JPH07254246A - Head slider support device and rotating disk storage device - Google Patents
Head slider support device and rotating disk storage deviceInfo
- Publication number
- JPH07254246A JPH07254246A JP6045526A JP4552694A JPH07254246A JP H07254246 A JPH07254246 A JP H07254246A JP 6045526 A JP6045526 A JP 6045526A JP 4552694 A JP4552694 A JP 4552694A JP H07254246 A JPH07254246 A JP H07254246A
- Authority
- JP
- Japan
- Prior art keywords
- spring
- head slider
- support device
- suspension spring
- gimbal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003860 storage Methods 0.000 title claims description 22
- 239000000725 suspension Substances 0.000 claims abstract description 88
- 239000000463 material Substances 0.000 claims abstract description 40
- 230000008878 coupling Effects 0.000 claims abstract description 13
- 238000010168 coupling process Methods 0.000 claims abstract description 13
- 238000005859 coupling reaction Methods 0.000 claims abstract description 13
- 239000010408 film Substances 0.000 description 28
- 238000000034 method Methods 0.000 description 13
- 230000000694 effects Effects 0.000 description 12
- 238000007747 plating Methods 0.000 description 8
- 238000005452 bending Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000005530 etching Methods 0.000 description 6
- 230000003014 reinforcing effect Effects 0.000 description 5
- 125000006850 spacer group Chemical group 0.000 description 5
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 238000005304 joining Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 101000606504 Drosophila melanogaster Tyrosine-protein kinase-like otk Proteins 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B21/00—Head arrangements not specific to the method of recording or reproducing
- G11B21/16—Supporting the heads; Supporting the sockets for plug-in heads
- G11B21/20—Supporting the heads; Supporting the sockets for plug-in heads while the head is in operative position but stationary or permitting minor movements to follow irregularities in surface of record carrier
- G11B21/21—Supporting the heads; Supporting the sockets for plug-in heads while the head is in operative position but stationary or permitting minor movements to follow irregularities in surface of record carrier with provision for maintaining desired spacing of head from record carrier, e.g. fluid-dynamic spacing, slider
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/56—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head support for the purpose of adjusting the position of the head relative to the record carrier, e.g. manual adjustment for azimuth correction or track centering
Landscapes
- Supporting Of Heads In Record-Carrier Devices (AREA)
Abstract
(57)【要約】
【目的】ヘッドスライダ支持装置のサスペンションばね
を薄型化し、ジンバルばね及びサスペンションばねの剛
性のばらつきをなくすこと。
【構成】記録再生ヘッドを備えたスライダ13を取り付
ける取付部と、ジンバル可撓性部とからなるジンバルば
ね12及びアクセス機構結合部18と、可撓性を有する
スプリング部15と、剛体部14とより構成されるサス
ペンションばね11からなり、剛体部14に、それ自体
に剛性を与えるため、サスペンションばねの板材の少な
くとも一部に、例えばメッキ膜等によるリブ16を配置
したヘッドスライダ支持装置。
(57) [Abstract] [Purpose] To make the suspension spring of the head slider support device thin to eliminate variations in the rigidity of the gimbal spring and the suspension spring. A gimbal spring 12 and an access mechanism coupling portion 18 each having a mounting portion for mounting a slider 13 having a recording / reproducing head, a gimbal flexible portion, a flexible spring portion 15, and a rigid body portion 14. A head-slider support device comprising a suspension spring 11 formed of, and a rib 16 made of, for example, a plated film, disposed on at least a part of the plate material of the suspension spring in order to impart rigidity to the rigid body portion 14 itself.
Description
【0001】[0001]
【産業上の利用分野】本発明は、磁気ディスク装置、光
磁気記録装置等の記憶媒体面に、情報を磁気的又は光学
的に記録、再生するためのヘッドを支持するヘッドスラ
イダ支持装置及びそのヘッドスライダ支持装置を搭載し
た回転円板記憶装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a head slider supporting device for supporting a head for magnetically or optically recording and reproducing information on the surface of a storage medium such as a magnetic disk device or a magneto-optical recording device. The present invention relates to a rotating disk storage device equipped with a head slider support device.
【0002】[0002]
【従来の技術】従来の技術を磁気ディスク装置を例にと
って説明する。従来の磁気ディスク装置におけるヘッド
スライダ支持装置は、例えば特公昭58−22827号
公報に記載の如く、サスペンションばねの剛体部が薄い
金属板をほぼ直角に折り曲げて構成した部材(以下フラ
ンジと略す)によって形成されていた。図21に従来の
ヘッドスライダ支持装置の斜視図を、図22にその上面
図を示す。サスペンションばね1の先端にスライダ3が
ジンバルばね2を介して取り付けられている。ジンバル
ばね2はスライダ3を取り付ける取付部及びスライダ3
の回転方向の自由度を与える可撓性部より構成され、サ
スペンションばね1に点溶接されている。サスペンショ
ンばね1は剛体部4とスプリング部5及びアクセス機構
に結合する結合部7から構成されている。通常スプリン
グ部5の変形により、サスペンションばね1又はジンバ
ルばね2のスライダ3に対向する部分に設けたディンプ
ル部(図示せず)を介して、スライダ3に荷重を付加す
る。スプリング部5の上下剛性は小さく押えられ、回転
円板のうねりや振動等による面振れに対し荷重変動を小
さく押えている。サスペンションばね1の板厚は数十μ
m程度と薄いため、剛体部4の面外方向剛性を確保する
ため、長手方向両側の板をほぼ直角に曲げてフランジ部
6が形成されている。2. Description of the Related Art A conventional technique will be described by taking a magnetic disk device as an example. A head slider support device in a conventional magnetic disk device is, for example, as described in Japanese Patent Publication No. 58-22827, a suspension spring made of a member (hereinafter abbreviated as a flange) formed by bending a thin metal plate at a substantially right angle. Had been formed. FIG. 21 is a perspective view of a conventional head slider supporting device, and FIG. 22 is a top view thereof. A slider 3 is attached to the tip of the suspension spring 1 via a gimbal spring 2. The gimbal spring 2 has a mounting portion for mounting the slider 3 and the slider 3
The suspension spring 1 is spot-welded to the suspension spring 1. The suspension spring 1 is composed of a rigid body portion 4, a spring portion 5 and a coupling portion 7 that is coupled to the access mechanism. Due to the deformation of the normal spring portion 5, a load is applied to the slider 3 via a dimple portion (not shown) provided in a portion of the suspension spring 1 or the gimbal spring 2 facing the slider 3. The vertical rigidity of the spring portion 5 is suppressed to be small, and the load fluctuation is suppressed to a small amount due to surface waviness due to undulations and vibration of the rotating disk. The thickness of the suspension spring 1 is several tens of μ
Since it is as thin as about m, the flanges 6 are formed by bending the plates on both sides in the longitudinal direction at substantially right angles in order to secure the rigidity of the rigid body 4 in the out-of-plane direction.
【0003】また、他の従来のヘッドスライダ支持装置
として、ジンバルばねとサスペンションばねを一体構造
にしてディンプル部をなくし、ハーフエッチングにより
ジンバル部に可撓性を持たせたものがある。Another conventional head slider supporting device is one in which a gimbal spring and a suspension spring are integrally structured to eliminate the dimple portion, and the gimbal portion is made flexible by half etching.
【0004】また、さらに他の従来のヘッドスライダ支
持装置として、特開昭59−213066号公報に開示
されている、複数の板材を重ね合わせ接合することによ
ってサスペンションばねの剛体部を構成したものがあ
る。Still another conventional head slider supporting device is disclosed in Japanese Patent Laid-Open No. 59-213066, in which a rigid body portion of a suspension spring is formed by superposing and joining a plurality of plate materials. is there.
【0005】[0005]
【発明が解決しようとする課題】上記従来のサスペンシ
ョンばねとジンバルばねを別部材で形成し、ディンプル
を介してスライダに荷重を付加するヘッドスライダ支持
装置は、ディンプル部でのすべり摩擦を伴ったスライダ
とサスペンションばねの相対運動が可能であるため、磁
気ディスク装置の所定の半径位置へのアクセス動作、暴
走時やCS/S(コンタクトスタートストップ)動作時
等にスライダに外力が働いて、上記ディンプル部ですべ
りが発生し、サスペンションばねに対するスライダの位
置が変化する可能性があり、トラックずれの原因となる
という問題があった。SUMMARY OF THE INVENTION A conventional head slider supporting device, in which the suspension spring and the gimbal spring are formed as separate members and a load is applied to the slider via the dimple, is a slider with sliding friction at the dimple portion. Since the relative movement between the suspension spring and the suspension spring is possible, an external force acts on the slider during an access operation to a predetermined radial position of the magnetic disk device, a runaway, a CS / S (contact start stop) operation, etc. There is a problem that slippage may occur and the position of the slider with respect to the suspension spring may change, causing track deviation.
【0006】また、サスペンションばねの剛体部は、薄
い金属板の長手方向両側端をほぼ直角に折り曲げたフラ
ンジを形成することによって作られていたが、この方法
では、機能的に十分な面外方向の剛性を得るために数百
μm以上のフランジの高さが必要であった。ところが磁
気ディスク装置の高密度実装化に伴って円板間隔は次第
に減少されつつあり、円板間に実装されるサスペンショ
ンバネも薄型化が要求されている。しかし折り曲げ型の
フランジによって剛体部を構成した従来の技術は、薄型
化を実現することが困難であるという問題があった。The rigid portion of the suspension spring is made by forming a flange by bending both ends of a thin metal plate in the longitudinal direction at substantially right angles. However, in this method, a functionally sufficient out-of-plane direction is formed. The flange height of several hundreds of μm or more was required to obtain the rigidity of the above. However, as the magnetic disk device is mounted at a higher density, the disc space is gradually reduced, and the suspension spring mounted between the discs is also required to be thin. However, the conventional technique in which the rigid portion is configured by the bent flange has a problem that it is difficult to realize a thin structure.
【0007】また、サスペンションばねはスライダの揚
力とバランスさせるための荷重を与える機能を持ってい
るが、この荷重はスライダの浮上量に影響するため、荷
重のばらつきはできるだけ小さいことが要求されてい
る。具体的にはサスペンションばねの上下方向ばね剛性
を小さくする必要がある。しかし、従来のサスペンショ
ンばねはフランジ部により剛体部を形成しているため、
スプリング部の上下方向ばね剛性を小さくするためサス
ペンションばねの板を薄くすると剛体部の剛性低下を招
き、両者はトレードオフの関係にあり、サスペンション
ばねの剛性を確保し、かつスプリング部の上下方向の剛
性を下げることが困難であるという問題があった。さら
に従来は、実装時にサスペンションばねに与えられる変
位によって、図22に示すフランジ端部8に応力が集中
しやすく、この部分に引き起こされた塑性変形が荷重ば
らつきの原因になるという問題があった。The suspension spring has a function of giving a load for balancing with the lift of the slider. Since this load affects the flying height of the slider, it is required that the variation of the load be as small as possible. . Specifically, it is necessary to reduce the vertical spring rigidity of the suspension spring. However, since the conventional suspension spring forms the rigid body part by the flange part,
If the suspension spring plate is thinned to reduce the vertical spring stiffness of the spring part, the rigidity of the rigid part is reduced.Therefore, there is a trade-off between the two, ensuring the rigidity of the suspension spring and ensuring the spring part's vertical direction. There is a problem that it is difficult to reduce the rigidity. Further, conventionally, there has been a problem that the stress is likely to be concentrated on the flange end portion 8 shown in FIG. 22 due to the displacement given to the suspension spring at the time of mounting, and the plastic deformation caused at this portion causes the load variation.
【0008】また、サスペンションばねの振動特性を検
討すると、フランジによってサスペンションばねの面外
剛性は高められるが、ねじり剛性や面内剛性は高められ
ず、逆にねじれ振動モードや面内振動モードは、フラン
ジの質量によって固有振動数が低下するという問題があ
った。固有振動数の低下はヘッドの振動の増加や位置決
め動作においてサーボ帯域の低下につながり、ヘッドで
情報を読み書きする動作の安定性や高速性を悪化させる
原因になっていた。When the vibration characteristics of the suspension spring are examined, the out-of-plane rigidity of the suspension spring is increased by the flange, but the torsional rigidity and the in-plane rigidity are not increased, and conversely, the torsional vibration mode and the in-plane vibration mode are There is a problem that the natural frequency is reduced due to the mass of the flange. The decrease in the natural frequency leads to an increase in head vibration and a decrease in the servo band in the positioning operation, which is a cause of deteriorating the stability and speed of the operation of reading and writing information by the head.
【0009】さらに磁気ディスク装置の面密度が高くな
るに伴って、スライダの浮上量は狭小化傾向にあり、円
板に良好に追従するためにスライダの小形化が進んでお
り、それに対応してサスペンションの質量も低減する必
要があった。ところが、従来のサスペンションでは、小
形化に対しフランジ部を精度良く曲げる加工が難しく、
性能劣化及び加工コストの増加等が発生するという問題
があった。Further, as the areal density of the magnetic disk device becomes higher, the flying height of the slider tends to be narrowed, and the slider is being miniaturized in order to follow the disc satisfactorily. It was also necessary to reduce the mass of the suspension. However, with the conventional suspension, it is difficult to bend the flange part with high accuracy to reduce the size,
There is a problem that performance deterioration and increase in processing cost occur.
【0010】また、上記従来のディンプル部をなくして
サスペンションばねとジンバルばねを一体構造としたヘ
ッドスライダ支持装置は、上記のディンプル部でのすべ
りによるトラックずれの問題を解決している。しかし、
この従来のヘッドスライダ支持装置は、ジンバルばねが
サスペンションばねの一部をハーフエッチングで板厚を
薄くして製造されたため、ジンバルばねの板厚が精度の
確保が難しいハーフエッチングに依存し、板厚のばらつ
きが発生し、ジンバル剛性がばらつき、その結果浮上量
がばらつくという問題があった。具体的には非磁性ステ
ンレスの圧延材の板厚の精度がおよそ±1μmに対し
て、ハーフエッチングの精度は±5μmかそれ以上とな
るのが現状である。少なくとも圧延材をハーフエッチン
グするため必ず圧延材より円板精度が悪化する問題を持
っていた。Further, the head slider supporting device in which the suspension spring and the gimbal spring are integrally formed without the above-mentioned conventional dimple portion solves the problem of the track deviation due to the slip at the dimple portion. But,
In this conventional head slider support device, since the gimbal spring is manufactured by thinning the plate thickness of a part of the suspension spring by half etching, the plate thickness of the gimbal spring depends on half etching, which is difficult to ensure accuracy, and However, there is a problem in that the gimbal rigidity varies, and as a result, the flying height varies. Specifically, under the present circumstances, the precision of the half-etching is ± 5 μm or more, while the precision of the plate thickness of the rolled material of non-magnetic stainless steel is about ± 1 μm. Since the rolled material is at least half-etched, there is a problem that the precision of the disk is always worse than that of the rolled material.
【0011】また、上記従来の複数の板材を重ね合わせ
接合することによってサスペンションばねの剛体部を構
成したヘッドスライダ支持装置は、複数の板材をスポッ
ト溶接により接合しているため、溶接位置のばらつきが
発生し、スライダの浮上量等のばらつきが発生するとい
う問題があった。Further, in the head slider supporting device in which the rigid body portion of the suspension spring is constructed by superposing and joining a plurality of the above-mentioned conventional plate members, since the plurality of plate members are joined by spot welding, the welding position varies. However, there is a problem that variations occur in the flying height of the slider.
【0012】本発明の目的は、サスペンションばねを薄
型化し、ジンバルばね及びサスペンションばねの剛性の
ばらつきをなくしたヘッドスライダ支持装置を提供する
ことにある。本発明の他の目的は、記憶円盤間の間隔を
縮めた回転円板記憶装置を提供することにある。An object of the present invention is to provide a head slider support device in which the suspension spring is made thin to eliminate variations in the rigidity of the gimbal spring and the suspension spring. Another object of the present invention is to provide a rotating disk storage device in which the distance between the storage disks is reduced.
【0013】[0013]
【課題を解決するための手段】上記目的を達成するため
に、本発明のヘッドスライダ支持装置は、記録再生ヘッ
ドを備えたスライダを取り付ける取付部と可撓性部とか
らなるジンバルばね及びアクセス機構に結合する結合部
と、可撓性を有するスプリング部と、剛体部とより構成
されるサスペンションばねからなり、サスペンションば
ねは、上記ジンバルばねを結合部側と逆側の端部にて支
持し、かつ、剛体部は、それ自体に剛性を与えるため
に、上記サスペンションばねの板材の少なくとも一部に
デポジット膜を配置するようにしたものである。上記ジ
ンバルばねは、上記サスペンションばねの板材と同一の
板材からなることが好ましい。In order to achieve the above-mentioned object, a head slider supporting device of the present invention is a gimbal spring and an access mechanism comprising a mounting portion for mounting a slider having a recording / reproducing head and a flexible portion. The suspension spring is composed of a coupling portion that is coupled to, a flexible spring portion, and a rigid body portion, and the suspension spring supports the gimbal spring at an end portion on the side opposite to the coupling portion side, In addition, the rigid body portion is provided with a deposit film on at least a part of the plate material of the suspension spring in order to impart rigidity to itself. The gimbal spring is preferably made of the same plate material as the plate material of the suspension spring.
【0014】また、上記目的を達成するために、本発明
のヘッドスライダ支持装置は、ジンバルばねとサスペン
ションばねを、可撓性を持ち、厚さが一定の同一の板材
から形成し、ジンバルばねは、記録再生ヘッドを備えた
スライダを取り付ける取付部と可撓性部とから構成し、
サスペンションばねは、(1)ジンバルばねと逆側の端
部に配置され、アクセス機構に結合する結合部と、
(2)上記板材に剛性を与えるために、デポジット膜が
配置された領域を含む剛体部と、(3)スプリング部と
から構成するようにしたものである。In order to achieve the above object, in the head slider supporting device of the present invention, the gimbal spring and the suspension spring are formed from the same plate material having flexibility and constant thickness. A mounting portion for mounting a slider having a recording / reproducing head and a flexible portion,
The suspension spring is (1) arranged at an end opposite to the gimbal spring and connected to the access mechanism;
(2) In order to impart rigidity to the plate member, the plate member is constituted by a rigid portion including a region in which a deposit film is arranged, and (3) a spring portion.
【0015】さらにまた、上記目的を達成するために、
本発明のヘッドスライダ支持装置は、ジンバルばねとサ
スペンションばねを、可撓性を持ち、厚さが一定の同一
の板材から形成し、サスペンションばねは、板材に剛性
を与えるために、デポジット膜が配置された領域を含む
剛体部と、アクセス機構に結合する結合部と、スプリン
グ部とから構成し、ジンバルばねは、記録再生ヘッドを
備えたスライダを取り付ける取付部と可撓性部とから構
成し、かつ、剛体部のスプリング部と接続する側と逆側
の領域に、少なくとも3方を剛体部に囲まれて配置する
ようにしたものである。Furthermore, in order to achieve the above object,
In the head slider support device of the present invention, the gimbal spring and the suspension spring are formed of the same plate material having flexibility and a constant thickness, and the suspension spring is provided with a deposit film in order to give rigidity to the plate material. A rigid portion including a region, a coupling portion that is coupled to the access mechanism, and a spring portion.The gimbal spring includes a mounting portion for mounting a slider having a recording / reproducing head and a flexible portion. In addition, at least three sides of the rigid body portion are arranged so as to be surrounded by the rigid body portion in a region opposite to the side where the rigid body portion is connected to the spring portion.
【0016】さらに、上記他の目的を達成するために、
本発明の回転円板記憶装置は、複数の円板状の記憶媒
体、複数の記録再生ヘッド、記録再生ヘッドをそれぞれ
支持するためのスライダ、スライダをそれぞれ支持する
ためのヘッドスライダ支持装置、ヘッドスライダ支持装
置を支持し、かつ、ヘッドスライダ支持装置を記憶媒体
上に移動させるアクセス手段を有し、かつ、円板状の記
憶媒体のそれぞれの間隔を0.2mmから1、5mm、
好ましくは0.6mmから1、5mmの範囲にしたもの
である。Further, in order to achieve the above-mentioned other objects,
The rotating disk storage device of the present invention includes a plurality of disk-shaped storage media, a plurality of recording / reproducing heads, sliders for respectively supporting the recording / reproducing heads, a head slider supporting device for respectively supporting the sliders, and a head slider. An access means for supporting the supporting device and for moving the head slider supporting device onto the storage medium, and the distance between the disk-shaped storage media is 0.2 mm to 1,5 mm;
It is preferably in the range of 0.6 mm to 1,5 mm.
【0017】[0017]
【作用】サスペンションばねの剛体部は、デポジットに
よって設けられたデポジット膜によって必要な面外方向
の剛性が確保され、かつジンバル部を板厚の精度がでる
材料(例えばステンレス圧延材)で構成することが可能
となり、低いジンバル剛性を、剛性ばらつきを押さえ安
定して実現することができる。同時にサスペンションば
ねのスプリング部の上下方向の剛性の低減も実現でき
る。さらにサスペンションばねとジンバルばねを一体で
形成すれば、従来のヘッドスライダ支持装置のディンプ
ル部をなくすことができ、その結果、トラックずれを防
止することが可能となる。[Function] The rigid portion of the suspension spring should be made of a material (for example, stainless rolled material) that secures the required rigidity in the out-of-plane direction by the deposit film provided by the deposit and that has a high plate thickness accuracy. Therefore, low gimbal rigidity can be stably realized while suppressing variations in rigidity. At the same time, the rigidity of the suspension spring in the vertical direction can be reduced. Further, if the suspension spring and the gimbal spring are integrally formed, the dimple portion of the conventional head slider supporting device can be eliminated, and as a result, it is possible to prevent the track deviation.
【0018】また、サスペンションばねの薄形化が実現
できる。またサスペンションばねの剛体部に設けられた
リブはサスペンションばねのねじれ剛性や面内剛性を増
加させる働きをするので、ヘッド支持装置のねじり振動
や面内振動の高固有値化を計ることができる。Further, the suspension spring can be made thinner. Further, since the ribs provided on the rigid body portion of the suspension spring serve to increase the torsional rigidity and the in-plane rigidity of the suspension spring, the torsional vibration and the in-plane vibration of the head support device can be increased to a high eigenvalue.
【0019】また、サスペンションばねのスプリング部
と剛体部の境界部にサスペンションばね短手方向にリブ
を設けたときは、組立時やスライダ浮上時に両者の境界
で生ずる応力を集中させ難くする。また短手方向のリブ
を設ける変わりに境界部にスプリング部と剛体部中間の
厚さを持つ部分を設けることにより、サスペンションば
ねの剛性変化が連続的になり、応力集中によって引き起
こされる塑性変形を回避できる。Further, when the ribs are provided in the lateral direction of the suspension spring in the boundary portion between the spring portion and the rigid body portion of the suspension spring, it is difficult to concentrate the stress generated at the boundary between the suspension spring and the slider during floating. Also, instead of providing ribs in the lateral direction, by providing a part with a thickness between the spring part and the rigid part at the boundary part, the rigidity of the suspension spring changes continuously, avoiding plastic deformation caused by stress concentration. it can.
【0020】またデポジット膜で構成したヘッドスライ
ダ支持装置ではフランジ部の曲げ加工を廃止し、プレス
用金型をなくすことができ、加工コストを低減すること
ができる。Further, in the head slider supporting device composed of the deposit film, the bending process of the flange portion can be eliminated, the pressing die can be eliminated, and the processing cost can be reduced.
【0021】[0021]
【実施例】以下、本発明の実施例を図面を用いて詳細に
説明する。 〈実施例1〉本発明の第1の実施例を図1〜図3及び図
5により説明する。図1はヘッドスライダ支持装置の第
1の実施例を示す斜視図である。サスペンションばね1
1は、その剛体部14の先端にジンバルばね12が配置
され、ジンバルばね12にスライダ13が取り付けられ
ている。一方、サスペンションばね11の根元側はアク
セス機構(図示せず)に結合するアクセス機構結合部1
8を構成する構造である。サスペンションばね11の剛
体部14、スプリング部15及びジンバルばね12は同
一部材の圧延材等の薄板10で構成され、剛体部14は
剛体部を構成するリブ16をサスペンションばねの長手
方向の両サイドに設けている。また剛体部を構成するリ
ブ16の内側に、磁気ヘッドの信号線のための配線シー
ト17を設けている。Embodiments of the present invention will now be described in detail with reference to the drawings. <Embodiment 1> A first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a perspective view showing a first embodiment of the head slider support device. Suspension spring 1
1, the gimbal spring 12 is arranged at the tip of the rigid body portion 14, and the slider 13 is attached to the gimbal spring 12. On the other hand, the root side of the suspension spring 11 is an access mechanism coupling portion 1 that is coupled to an access mechanism (not shown).
8 is a structure that configures 8. The rigid body portion 14, the spring portion 15 and the gimbal spring 12 of the suspension spring 11 are composed of a thin plate 10 made of the same material such as rolled material. The rigid body portion 14 has ribs 16 constituting the rigid body portion on both sides in the longitudinal direction of the suspension spring. It is provided. A wiring sheet 17 for the signal line of the magnetic head is provided inside the rib 16 that constitutes the rigid body.
【0022】図2はジンバルばね近傍の拡大図である。
シンバルばね12は、スライダ接合部19とジンバル可
撓性部20よりなる。記録再生ヘッド21を搭載したス
ライダ13はスライダ接合部19でジンバルばね12に
取り付けられ、ジンバル可撓性部20により面外に柔軟
に、面内に剛に支持される。また、配線シート17から
のリード線(図示せず)は、ジンバル可撓性部20の上
を通り、2手に分かれてスライダ接合部19の上に至
り、リード線端子部27に達し、スライダ13側の端子
部(図示せず)に接続される。図3は図2の剛体部14
のA−A断面を示す断面図である。剛体部14の剛体部
を構成するリブ16は、圧延材等の薄板10の片面にデ
ポジット膜を成膜して構成している。FIG. 2 is an enlarged view of the vicinity of the gimbal spring.
The cymbal spring 12 includes a slider joint portion 19 and a gimbal flexible portion 20. The slider 13 on which the recording / reproducing head 21 is mounted is attached to the gimbal spring 12 at the slider joint portion 19, and is flexibly supported out-of-plane and rigidly supported in-plane by the gimbal flexible portion 20. A lead wire (not shown) from the wiring sheet 17 passes over the gimbal flexible portion 20 and is divided into two hands to reach the slider joint portion 19 and reach the lead wire terminal portion 27, It is connected to a terminal portion (not shown) on the 13 side. FIG. 3 shows the rigid body portion 14 of FIG.
It is sectional drawing which shows the AA cross section. The ribs 16 that form the rigid body portion of the rigid body portion 14 are formed by depositing a deposit film on one surface of the thin plate 10 such as a rolled material.
【0023】本構成によれば、剛体部14のリブ17を
含む板厚をスプリング部15及びジンバルばね12の板
厚より大きくすることができ、剛体部14の剛性を確保
することができると同時に、ジンバルばね12を厚さ精
度の高い圧延材等の薄板(例えば厚さ25μmのSUS
304の非磁性圧延薄板の厚さ精度は±1μm以下であ
る)をそのまま使用できので、ジンバルばね12の面外
のピッチ剛性、ロール剛性を小さく、かつばらつきも小
さく押えて実現できる。その結果、従来のハーフエッチ
ング方式に比べ、スライダ13の浮上姿勢のばらつきを
大幅に小さくでき、媒体面への追従性を高めることがで
きる。また、ジンバルばね12とサスペンションばね1
1を一体構造で構成したことにより、従来、2体でディ
ンプル部を持つために問題となった、ディンプルでのス
ライダの浮上姿勢の変動、アクセス動作時等に発生する
ディンプル部の滑べりによる記録再生ヘッドのトラック
ずれも防止できる。According to this configuration, the plate thickness of the rigid body portion 14 including the ribs 17 can be made larger than the plate thicknesses of the spring portion 15 and the gimbal spring 12, and the rigidity of the rigid body portion 14 can be secured at the same time. , The gimbal spring 12 is a thin plate such as a rolled material having a high thickness accuracy (for example, SUS having a thickness of 25 μm).
Since the thickness accuracy of the non-magnetic rolled thin plate 304 is ± 1 μm or less), the out-of-plane pitch rigidity and roll rigidity of the gimbal spring 12 can be reduced, and the variation can be suppressed. As a result, compared to the conventional half etching method, it is possible to greatly reduce the variation in the flying posture of the slider 13 and improve the followability to the medium surface. Also, the gimbal spring 12 and the suspension spring 1
Since 1 is configured as an integral structure, recording has been caused by the fluctuation of the flying posture of the slider at the dimples and the slippage of the dimples that occurs during the access operation, which has been a problem since two bodies have dimples. Track deviation of the reproducing head can also be prevented.
【0024】また、本実施例のサスペンションばね11
の板厚は、従来のフランジを用いた場合に比べて薄くす
ることができる。図5は、サスペンションばね11に従
来のフランジを設けた場合のその高さと、それと等価な
面外剛性をリブによって実現するために必要なリブの高
さの関係を示す図であり、付着形成したリブが圧延材等
の薄板10と同程度の機械的特性を有するとして計算し
た値を示す。フランジの板厚を0.076mm、高さを
0.7mmとすると、リブの幅が1〜2mmの時、高さ
は0.2mm程度でよく、高さはフランジの場合の約3
0%に低減できることが分かる。また、本方式では、リ
ブ16の幅を広くすることによって面内剛性を高くする
ことができるので、ヘッドスライダ支持装置の面内モー
ドの高固有振動化を実現することができる。なお本実施
例では配線によるサスペンションばね11の厚さの増加
を避けるため記録再生ヘッドのリード線の配線をプリン
トシート等の配線シート17により行っている。また、
デポジット膜で構成したヘッドスライダ支持装置ではフ
ランジ部の曲げ加工を廃止し、プレス用金型をなくすこ
とができ、加工コストを低減することができる。Further, the suspension spring 11 of the present embodiment.
The plate thickness of can be made thinner than that when a conventional flange is used. FIG. 5 is a diagram showing the relationship between the height of the suspension spring 11 when a conventional flange is provided and the height of the rib required to realize the out-of-plane rigidity equivalent to the same, by the attachment and formation. The value calculated assuming that the rib has the same mechanical characteristics as the thin plate 10 such as a rolled material is shown. If the plate thickness of the flange is 0.076 mm and the height is 0.7 mm, the height may be about 0.2 mm when the width of the rib is 1 to 2 mm, and the height is about 3 in the case of the flange.
It can be seen that it can be reduced to 0%. Further, in this method, since the in-plane rigidity can be increased by increasing the width of the rib 16, it is possible to realize a high natural vibration of the in-plane mode of the head slider support device. In this embodiment, in order to avoid an increase in the thickness of the suspension spring 11 due to wiring, the lead wire of the recording / reproducing head is wired by the wiring sheet 17 such as a print sheet. Also,
In the head slider support device composed of the deposit film, the bending process of the flange portion can be eliminated, the pressing die can be eliminated, and the processing cost can be reduced.
【0025】剛体部を構成するリブ16は、圧延材等薄
板10と同等な機械的性質を有し、圧延材等の薄板10
と強く結合するデポジット膜であり、物理的、化学的手
法、例えばメッキ、スパッタ、加熱蒸着等により形成で
き、非磁性材料であることが望ましい。具体的には、ス
テンレス(SUS304等)圧延材に成膜可能で非磁性
なものとして、NiP等のメッキ膜が有効で、特に無電
解NiPメッキを用いて高性能な膜が実現できる。無電
解NiPメッキにより形成した膜は、ステンレス材と同
等な機械的性質を有し、熱処理することにより強度を確
保することが可能となる。The ribs 16 constituting the rigid body portion have the same mechanical properties as the thin plate 10 made of rolled material, and the thin plate 10 made of rolled material.
It is a deposit film that strongly bonds with, can be formed by physical and chemical methods such as plating, sputtering, and heat vapor deposition, and is preferably a non-magnetic material. Specifically, a plated film of NiP or the like is effective as a non-magnetic film that can be formed on a rolled material of stainless steel (SUS304 or the like), and a high-performance film can be realized by using electroless NiP plating. The film formed by the electroless NiP plating has the same mechanical properties as the stainless material, and the strength can be secured by heat treatment.
【0026】リブ形状の形成の方法は、ジンバルばね1
2等のパターンを製作した圧延材等の薄板10の全体に
一様にメッキし、その後、紫外線感光性レジストを塗
り、リブ形状に露光現像し、不要部分のメッキを硝酸等
でエッチングすることによって実現できる。またリブの
厚さが数μmの薄膜場合は、リブパターンのマスクを作
り、その後メッキすることによっても実現できる。The method of forming the rib shape is the gimbal spring 1
By uniformly plating the whole thin plate 10 such as a rolled material on which a pattern such as 2 is manufactured, then applying an ultraviolet-sensitive resist, exposing and developing into a rib shape, and etching unnecessary portions of the plating with nitric acid or the like. realizable. When the rib is a thin film having a thickness of several μm, it can be realized by forming a rib pattern mask and then plating.
【0027】このようなメッキ等によるデポジット膜を
使用することにより、磁気ディスク装置の小形大容量化
に対応するヘッドスライダ支持装置の小型化に対して曲
げ加工が難しくなるフランジ等をなくし、剛体部を構成
するリブ16を精度よく容易に形成でき、小形ヘッドス
ライダ支持装置を実現できた。By using such a deposit film formed by plating or the like, a flange or the like, which makes it difficult to bend the head slider supporting device corresponding to the miniaturization and large capacity of the magnetic disk device, is eliminated, and the rigid portion is eliminated. The ribs 16 constituting the above can be formed accurately and easily, and a small head slider supporting device can be realized.
【0028】次に、このヘッドスライダ支持装置を備え
た磁気ディスク装置について説明する。図19は、磁気
ディスク装置の一実施例を示す一部破砕斜視図である。
図19において、記憶媒体41はスピンドル軸(図示せ
ず)に積層され、この軸に連結したモータにより回転駆
動される。スライダ13には記憶媒体41に記録された
データを読み出し、或いは記憶媒体41にデータを書き
込むための記録再生ヘッド(磁気変換器)21が搭載さ
れている。スライダ13はヘッドスライダ支持装置42
により支持され、このヘッドスライダ支持装置42は位
置決め機構44に連結されている。位置決め機構44
は、この例では回転軸を中心に移動させる構造を取り、
ヘッドスライダ支持装置42の反対側に設けたボイスコ
イルモータ等の駆動部45によりスライダ13を記憶媒
体41の半径方向に移動させ、位置決めするものであ
る。この形式はロータリーアクセス方式と称している。
上述した記録媒体41、スライダ13、ヘッドスライダ
支持装置42、位置決め機構44及び駆動部45等は清
浄に保たれたカバー46内に収納されている。Next, a magnetic disk device provided with this head slider support device will be described. FIG. 19 is a partially fragmented perspective view showing an embodiment of the magnetic disk device.
In FIG. 19, a storage medium 41 is stacked on a spindle shaft (not shown) and is rotationally driven by a motor connected to this shaft. A recording / reproducing head (magnetic converter) 21 for reading data recorded in the storage medium 41 or writing data in the storage medium 41 is mounted on the slider 13. The slider 13 is a head slider support device 42.
The head slider support device 42 is connected to a positioning mechanism 44. Positioning mechanism 44
Takes a structure that moves around the rotation axis in this example,
The slider 13 is moved in the radial direction of the storage medium 41 and positioned by a drive unit 45 such as a voice coil motor provided on the opposite side of the head slider support device 42. This format is called the rotary access method.
The recording medium 41, the slider 13, the head slider support device 42, the positioning mechanism 44, the drive unit 45, and the like described above are housed in a cover 46 kept clean.
【0029】本構成によればヘッドスライダ支持装置の
サスペンションばねの剛体部をジンバルばねの板厚の薄
板にメッキ等のデポジット膜で構成することによってそ
の薄型化が計れ、円板間隔を小さくでき、装置のホーム
ファクタに多くの円板を入れることが可能となる。或い
は同じ円板枚数の装置では装置高さを小さくできる。例
えば厚さ0.4mmのスライダを使い、図5より従来の
フランジと同等の剛性を得るためのリブ高さを0.2m
mとし、装置組み込みギャップを0.2mmを考えて
も、円板間隔t=(0.4+0.2)×2+0.2=
1.4mm程度が可能となる。According to this structure, the rigid portion of the suspension spring of the head slider supporting device is made of a deposit film such as a plating on a thin plate of the gimbal spring so that it can be thinned and the disc space can be reduced. It is possible to put many discs into the home factor of the device. Alternatively, the height of the device can be reduced in the device having the same number of disks. For example, a slider with a thickness of 0.4 mm is used, and as shown in FIG. 5, the rib height is 0.2 m to obtain the same rigidity as that of the conventional flange.
Even if the device built-in gap is 0.2 mm, the disc spacing t = (0.4 + 0.2) × 2 + 0.2 =
It can be about 1.4 mm.
【0030】図23は、種々の厚さのスライダを用いた
ときの、スライダ厚さと円板間隔の関係を示す図であ
る。図中、直線aは上記のタイプのヘッドスライダ支持
装置の場合を、直線bは、後述する実施例2のタイプの
ヘッドスライダ支持装置の場合を示す。スライダ厚さが
薄くなるとスライダの質量も減少し、ヘッドスライダ支
持装置全体が高剛性化するので、リブも薄くできる。こ
のように円板間隔は1.5mm以下にできる。その値の
下限は0.2mm程度までである。実用上は1.5mm
から0.6mmの範囲にすることが好ましい。FIG. 23 is a diagram showing the relationship between the slider thickness and the disc spacing when sliders of various thicknesses are used. In the figure, the straight line a shows the case of the head slider supporting device of the above type, and the straight line b shows the case of the head slider supporting device of the second embodiment described later. When the slider thickness is reduced, the mass of the slider is reduced, and the rigidity of the entire head slider support device is increased, so that the rib can be reduced. In this way, the disc spacing can be 1.5 mm or less. The lower limit of the value is up to about 0.2 mm. Practically 1.5 mm
To 0.6 mm is preferable.
【0031】また本構成によればサスペンションの固有
振動数が高く、オフトラック振動が少ないためアクセス
速度を高め、かつセトリング時間を短縮することがで
き、アクセスタイムを短縮できる。Further, according to this structure, since the natural frequency of the suspension is high and the off-track vibration is small, the access speed can be increased, the settling time can be shortened, and the access time can be shortened.
【0032】〈実施例2〉ヘッドスライダ支持装置をよ
り薄型化した本発明の第2の実施例を図4に示す。図2
のB−B断面に相当する部分の断面図である。剛体部を
構成するリブ16を圧延材等の薄板10のスライダが付
く側に形成している。本実施例によればリブ16の厚さ
をスライダ13の厚さ以下にすることができる。従来の
フランジを設ける方式では、フランジをスライダが付く
側に向けると媒体との接触の可能性があるが、本実施例
ではそのようなことがなく、より薄型化を実現できる。<Second Embodiment> FIG. 4 shows a second embodiment of the present invention in which the head slider support device is made thinner. Figure 2
3 is a cross-sectional view of a portion corresponding to the BB cross section of FIG. Ribs 16 that form a rigid portion are formed on the side of the thin plate 10 such as a rolled material to which the slider is attached. According to this embodiment, the thickness of the rib 16 can be made equal to or less than the thickness of the slider 13. In the conventional method of providing the flange, if the flange is directed to the side where the slider is attached, there is a possibility of contact with the medium, but in the present embodiment, such a situation does not occur, and a thinner device can be realized.
【0033】また、スライダもデポジットで形成すれ
ば、スライダの接着がなくなり、一方向からの同様の加
工プロセスでスライダとリブが形成でき、ヘッド位置精
度の向上と加工工数、コストの低減ができる。このヘッ
ドスライダ支持装置は次のようにして形成できる。基板
であるスライダ接合部にアルミナ等の絶縁物を、次にパ
ーマロイ等の下部磁性膜をデポジットし、所定の形にイ
オンミリング等でパターニングし、絶縁膜を介して導体
コイルを形成し、さらに絶縁膜を介して、磁気コアを形
成する上部磁性膜を形成する。さらに、上部、下部磁性
膜を所定の間隔を隔てて、厚さ方向に成長させ、媒体と
平行になる面に磁気ギャップを形成する。さらに絶縁膜
をデポジットし、その上に炭化シリコンやカーボン等の
耐摺動性を確保する薄膜をデポジットし、スライダとす
る。Further, if the slider is also formed by deposit, the slider is not adhered, and the slider and the rib can be formed by the same processing process from one direction, so that the head position accuracy can be improved and the processing man-hour and the cost can be reduced. This head slider support device can be formed as follows. Deposit an insulator such as alumina on the slider joint of the substrate, and then deposit a lower magnetic film such as permalloy and pattern it by ion milling etc. into a predetermined shape to form a conductor coil through the insulating film. An upper magnetic film forming a magnetic core is formed through the film. Further, the upper and lower magnetic films are grown in the thickness direction with a predetermined space therebetween to form a magnetic gap on the surface parallel to the medium. Further, an insulating film is deposited, and a thin film of silicon carbide, carbon, or the like that secures sliding resistance is deposited on the insulating film to form a slider.
【0034】〈実施例3〉図6は本発明のヘッドスライ
ダ支持装置の第3の実施例を示すジンバルばね近傍の斜
視図である。サスペンションばねの長手方向の両サイド
の剛体部を構成するリブ16をジンバルばね12の上に
も延長し、その先端で一本に結合した例である。剛体部
14の剛性のさらなる向上とリブが両サイドに分離して
いた時に発生するサスペンションばねの捻り変形を防止
し、捻り振動特性を向上する効果がある。なお、図が煩
雑になるため、配線シート17の先端部は省略し、1部
分のみ示した。<Third Embodiment> FIG. 6 is a perspective view showing the vicinity of a gimbal spring showing a third embodiment of the head slider supporting apparatus of the present invention. This is an example in which the ribs 16 that form the rigid body portions on both sides in the longitudinal direction of the suspension spring are extended to above the gimbal spring 12 and are joined together at the tip thereof. This has the effects of further improving the rigidity of the rigid body portion 14 and preventing the torsional deformation of the suspension spring that occurs when the ribs are separated on both sides, thus improving the torsional vibration characteristics. Since the drawing becomes complicated, the tip of the wiring sheet 17 is omitted and only one portion is shown.
【0035】〈実施例4〉図7は本発明のヘッドスライ
ダ支持装置の第4の実施例を示すジンバルばね近傍の斜
視図である。サスペンションばねの剛体部14を構成す
るリブ16を圧延材等の薄板10の上下両面に設けた例
である。図7のA−A断面図を図8に示す。本構成によ
り、サスペンションばねの薄形化と面内及び捻れ方向の
剛性を向上する効果がある。また、リブ16を片面に設
けた場合、温度変化に対しバイメタル効果による変形が
発生する恐れがあるが、本実施例のヘッドスライダ支持
装置は、この変形を低減する効果がある。<Fourth Embodiment> FIG. 7 is a perspective view showing the vicinity of a gimbal spring showing a fourth embodiment of the head slider supporting apparatus of the present invention. This is an example in which the ribs 16 that form the rigid body portion 14 of the suspension spring are provided on both upper and lower surfaces of the thin plate 10 such as a rolled material. A sectional view taken along the line AA of FIG. 7 is shown in FIG. This configuration has the effects of thinning the suspension spring and improving the rigidity in the plane and in the twisting direction. Further, when the rib 16 is provided on one surface, deformation due to the bimetal effect may occur due to temperature change, but the head slider support device of the present embodiment has an effect of reducing this deformation.
【0036】また、本実施例ヘッドスライダ支持装置
は、図2に示したジンバルばね12を面内に90度回転
した構造とした例である。本構造によればジンバル可撓
性部20とサスペンションばねを結ぶ腕が横方向にな
り、リブ16をジンバルばね12の先端まで設ける必要
がなくなり、ヘッドスライダ支持装置の質量を軽減し、
固有振動数を高め、高速アクセスを可能にする効果があ
る。また、それ以外に、実施例1に記載したと同様な効
果がある。The head slider support device of this embodiment is an example in which the gimbal spring 12 shown in FIG. 2 is rotated 90 degrees in the plane. According to this structure, the arm connecting the gimbal flexible portion 20 and the suspension spring is in the lateral direction, it is not necessary to provide the rib 16 to the tip of the gimbal spring 12, and the mass of the head slider support device is reduced.
It has the effect of increasing the natural frequency and enabling high-speed access. Other than that, the same effect as described in Example 1 is obtained.
【0037】図9は図7のB−B断面を示す断面図であ
る。リブ16を圧延材等の薄板10の両側に設けると共
にジンバルばね12のスライダ接合部19に接合部スペ
ーサ26を設けている。接合部スペーサ26はリブ16
と同時にデポジット膜で構成することにより、リブ16
と同時に形成することができる。接合部スペーサ26は
スライダ13とジンバル可撓性部20が重なる位置関係
にあるとき、スライダ13の面外の回転運動の自由度を
確保する効果がある。接合部スペーサ26を他の材料で
構成してもよい。FIG. 9 is a sectional view showing a BB section in FIG. The ribs 16 are provided on both sides of the thin plate 10 such as a rolled material, and the slider joints 19 of the gimbal spring 12 are provided with joint spacers 26. The joint spacer 26 is a rib 16
At the same time, the rib 16 is formed by using a deposit film.
It can be formed at the same time. When the slider 13 and the gimbal flexible portion 20 are in a positional relationship where the slider 13 and the gimbal flexible portion 20 are overlapped with each other, the joint spacer 26 has an effect of ensuring the freedom of rotational movement of the slider 13 out of the plane. The joint spacer 26 may be made of another material.
【0038】〈実施例5〉図10は本発明のヘッドスラ
イダ支持装置の第5の実施例を示し、図7のA−A断面
に対応する位置の断面図である。圧延材等の薄板10の
上下両面に設けた剛性部を構成するリブ16をつなげ、
一体化した例である。前記実施例4に記載の効果の他
に、リブ16の結合を強くし、加工時のマスクを単純化
する効果がある。<Embodiment 5> FIG. 10 shows a fifth embodiment of the head slider supporting apparatus of the present invention, and is a sectional view of a position corresponding to the section AA of FIG. Connect the ribs 16 constituting the rigid portion provided on the upper and lower surfaces of the thin plate 10 such as a rolled material,
This is an integrated example. In addition to the effect described in the fourth embodiment, there is an effect that the coupling of the rib 16 is strengthened and the mask at the time of processing is simplified.
【0039】〈実施例6〉図11は本発明のヘッドスラ
イダ支持装置の第6の実施例を示す斜視図、図12はそ
の横側面図である。剛体部を構成する補強層22をサス
ペンションばね11の両端、スプリング部15を残し、
剛体部14の中央部に設けた例である。配線シートは省
略した。補強膜22は、実施例1と同様の方法で、紫外
線感光性レジストのパターン変えることにより製造し
た。実施例1に記載の効果の他に、補強膜22の成膜が
容易でヘッドスライダ支持装置の小形化に対応できる効
果がある。<Embodiment 6> FIG. 11 is a perspective view showing a sixth embodiment of the head slider supporting apparatus of the present invention, and FIG. 12 is a lateral side view thereof. The reinforcing layer 22 forming the rigid body part is left at both ends of the suspension spring 11, and the spring part 15 is left,
This is an example provided in the central portion of the rigid body portion 14. The wiring sheet is omitted. The reinforcing film 22 was manufactured in the same manner as in Example 1 by changing the pattern of the UV photosensitive resist. In addition to the effect described in the first embodiment, the reinforcing film 22 can be easily formed and the head slider supporting device can be downsized.
【0040】〈実施例7〉図13は本発明のヘッドスラ
イダ支持装置の第7の実施例を示す斜視図であり、図1
4はそのC−C断面を示す断面図である。剛体部14の
形成方法として剛体部を構成する補強層23としてサス
ペンションばね11のスプリング部15とジンバルばね
12以外の上下面と側面を一体にデポジット膜で覆った
例である。成膜が非常に単純化でき小形化、低コストか
を実現できる。実施例1に記載の効果の他に、上下両面
に成膜しているので温度変化による変形も低減してい
る。<Embodiment 7> FIG. 13 is a perspective view showing a seventh embodiment of the head slider supporting apparatus of the present invention.
4 is a cross-sectional view showing the CC cross section. As an example of a method of forming the rigid body portion 14, an example in which the upper and lower surfaces and side surfaces of the suspension spring 11 other than the spring portion 15 and the gimbal spring 12 are integrally covered with a deposit film as the reinforcing layer 23 constituting the rigid body portion. The film formation can be greatly simplified, downsized, and at low cost. In addition to the effect described in the first embodiment, since the film is formed on both upper and lower surfaces, deformation due to temperature change is also reduced.
【0041】〈実施例8〉図15は本発明のヘッドスラ
イダ支持装置の第8の実施例を示す斜視図であり、図1
6はそのD−D断面を示す断面図である。サスペンショ
ンばね11とジンバルばね12を別部材で構成し、両者
を溶接した例である。別部材で構成したことによりトラ
ックずれの特性は悪化するが、サスペンションの薄型化
の効果があり、ジンバルばね12を小形に実現できる。<Embodiment 8> FIG. 15 is a perspective view showing an eighth embodiment of the head slider supporting apparatus of the present invention.
6 is a cross-sectional view showing the DD cross section. This is an example in which the suspension spring 11 and the gimbal spring 12 are composed of separate members and are welded together. Although the characteristic of the track deviation is deteriorated by the configuration of the separate member, the suspension is thinned and the gimbal spring 12 can be realized in a small size.
【0042】〈実施例9〉図17は本発明のヘッドスラ
イダ支持装置の第9の実施例のサスペンションばねの剛
体部の部分を示す平面図である。サスペンションばね
は、実施例1と同様に、剛体部14、スプリング部15
及びジンバルばね12が同一部材の圧延材等の薄板10
で構成され、剛体部14には、剛性部を構成するリブ1
6とサスペンションばねの短手方向に横桁24がラダー
状に設けられている。本構成により面外(特に捻り)方
向と面内方向の剛性を向上できる。また、スプリング部
15に接する横桁は、スライダ13に荷重が負荷された
場合に、従来のフランジを有する方式で発生した、荷重
ばらつきの原因となる応力集中を回避し、塑性変形をな
くし、荷重のばらつきを小さくすることができる。<Embodiment 9> FIG. 17 is a plan view showing a portion of a rigid portion of a suspension spring of a ninth embodiment of a head slider supporting apparatus of the present invention. The suspension spring includes the rigid body portion 14 and the spring portion 15 as in the first embodiment.
And the gimbal spring 12 is a thin plate 10 such as a rolled material having the same member.
The rigid portion 14 has a rib 1 that constitutes a rigid portion.
A cross beam 24 is provided in a ladder shape in the lateral direction of 6 and the suspension spring. With this configuration, the rigidity in the out-of-plane (especially twist) direction and the in-plane direction can be improved. In addition, the cross girder contacting the spring portion 15 avoids stress concentration, which is caused by a method having a conventional flange and causes a load variation when a load is applied to the slider 13, eliminates plastic deformation, and reduces load. Can be reduced.
【0043】〈実施例10〉図18は本発明のヘッドス
ライダ支持装置の第10の実施例のサスペンションばね
の剛性部の部分の断面を示す断面図である。図17に示
した実施例9の薄板10の内、ラダー状のリブに囲まれ
た部分を中空部25とした例である。成膜時のマスクが
簡単になり、また軽量化を実現することができる。<Embodiment 10> FIG. 18 is a sectional view showing a section of a rigid portion of a suspension spring of a tenth embodiment of a head slider supporting apparatus of the present invention. In the thin plate 10 of Example 9 shown in FIG. 17, the portion surrounded by the ladder-shaped ribs is a hollow portion 25. The mask during film formation can be simplified and the weight can be reduced.
【0044】〈実施例11〉図20は本発明のヘッドス
ライダ支持装置を搭載したリニア形磁気ディスク装置を
示す図である。位置決め機構44にガイドアーム43が
結合され、ガイドアーム44にヘッドスライダ支持装置
42が連結され、ヘッドスライダ支持装置42の先端部
に記録再生ヘッド21を搭載したスライダ13が装着さ
れている。スライダ13はボイスコイルモータ等駆動部
45で駆動され回転する記憶媒体41の半径方向に進退
する。本実施例においても、図19に示したロータリア
クセス方式と同様の効果が得られる。<Embodiment 11> FIG. 20 is a diagram showing a linear type magnetic disk device equipped with a head slider supporting device of the present invention. The guide arm 43 is coupled to the positioning mechanism 44, the head slider support device 42 is connected to the guide arm 44, and the slider 13 having the recording / reproducing head 21 mounted thereon is attached to the tip end of the head slider support device 42. The slider 13 advances and retreats in the radial direction of the storage medium 41 that is driven by the voice coil motor drive unit 45 and rotates. Also in this embodiment, the same effect as the rotary access method shown in FIG. 19 can be obtained.
【0045】なお、本発明は上記実施例に限定される物
ではない。本発明の思想を逸脱しない範囲であれば、例
えはジンバルばね12の形状、大きさは仕様に応じて定
めればよい。The present invention is not limited to the above embodiment. For example, the shape and size of the gimbal spring 12 may be determined according to the specifications without departing from the concept of the present invention.
【0046】[0046]
【発明の効果】以上説明したように、本発明によればジ
ンバルばねやサスペンションばねのスプリング部を厚さ
の精度の高い板材で構成し、ジンバルばねのピッチ及び
ロール方向の剛性やスプリング部の上下方向剛性を低く
でき、かつ、それらのばらつきを低減し、優れた振動特
性を実現できた。さらに、曲げ加工を廃止でき、サスペ
ンションばねの厚さを薄くできた。また、回転円板記憶
装置の円板間隔を小さくし、実装密度を向上させ、大容
量化を実現できた。As described above, according to the present invention, the spring portion of the gimbal spring or the suspension spring is formed of a plate material having a high thickness accuracy, and the rigidity of the gimbal spring in the pitch and roll directions and the vertical movement of the spring portion. The directional rigidity could be lowered, and their variations could be reduced to realize excellent vibration characteristics. Furthermore, the bending process can be eliminated and the suspension spring can be made thinner. In addition, the disk space of the rotating disk storage device can be reduced, the packaging density can be improved, and a large capacity can be realized.
【図1】本発明のヘッドスライダ支持装置の第1の実施
例を示す斜視図。FIG. 1 is a perspective view showing a first embodiment of a head slider support device of the present invention.
【図2】図1のヘッドスライダ支持装置のジンバルばね
近傍の拡大斜視図。2 is an enlarged perspective view of the vicinity of a gimbal spring of the head slider support device of FIG.
【図3】図2のA−A断面を示す断面図。3 is a cross-sectional view showing a cross section taken along the line AA of FIG.
【図4】本発明のヘッドスライダ支持装置の第2の実施
例の断面図。FIG. 4 is a sectional view of a second embodiment of the head slider support device of the present invention.
【図5】フランジ高さと等価な面外剛性を得るために必
要なリブ高さの関係を示す図。FIG. 5 is a diagram showing a relationship between a rib height and a rib height required to obtain an out-of-plane rigidity equivalent to a flange height.
【図6】本発明のヘッドスライダ支持装置の第3の実施
例のジンバルばね近傍の拡大斜視図。FIG. 6 is an enlarged perspective view of the vicinity of a gimbal spring of a third embodiment of the head slider support device of the present invention.
【図7】本発明のヘッドスライダ支持装置の第4の実施
例のジンバルばね近傍の拡大斜視図。FIG. 7 is an enlarged perspective view of the vicinity of a gimbal spring of a fourth embodiment of the head slider support device of the present invention.
【図8】図7のヘッドスライダ支持装置のA−A断面を
示す断面図。8 is a sectional view showing an AA section of the head slider supporting device of FIG.
【図9】図7のヘッドスライダ支持装置のB−B断面を
示す断面図。9 is a cross-sectional view showing a BB cross section of the head slider support device of FIG.
【図10】本発明のヘッドスライダ支持装置の第5の実
施例の断面図。FIG. 10 is a sectional view of a head slider support device according to a fifth embodiment of the present invention.
【図11】本発明のヘッドスライダ支持装置の第6の実
施例を示す斜視図。FIG. 11 is a perspective view showing a sixth embodiment of the head slider support device of the present invention.
【図12】図11のヘッドスライダ支持装置の横側面
図。12 is a lateral side view of the head slider support device of FIG.
【図13】本発明のヘッドスライダ支持装置の第7の実
施例を示す斜視図。FIG. 13 is a perspective view showing a seventh embodiment of the head slider support device of the present invention.
【図14】図13のヘッドスライダ支持装置のC−C断
面を示す断面図。14 is a cross-sectional view showing a CC cross section of the head slider support device of FIG.
【図15】本発明のヘッドスライダ支持装置の第8の実
施例を示す斜視図。FIG. 15 is a perspective view showing an eighth embodiment of the head slider support device of the present invention.
【図16】図15のヘッドスライダ支持装置のD−D断
面を示す断面図。16 is a sectional view showing a DD section of the head slider supporting device of FIG.
【図17】本発明のヘッドスライダ支持装置の第9の実
施例のサスペンションばねの剛性部の平面図。FIG. 17 is a plan view of a rigid portion of a suspension spring according to a ninth embodiment of the head slider support device of the present invention.
【図18】本発明のヘッドスライダ支持装置の第10の
実施例のサスペンションばねの剛性部の断面図。FIG. 18 is a cross-sectional view of the rigid portion of the suspension spring of the tenth embodiment of the head slider support device of the present invention.
【図19】本発明のヘッドスライダ支持装置の搭載した
磁気ディスク装置を示す斜視図。FIG. 19 is a perspective view showing a magnetic disk device equipped with the head slider support device of the present invention.
【図20】本発明のヘッドスライダ支持装置を搭載した
リニア型磁気ディスク装置を示す平面図。FIG. 20 is a plan view showing a linear type magnetic disk device equipped with a head slider supporting device of the present invention.
【図21】従来のヘッドスライダ支持装置を示す斜視
図。FIG. 21 is a perspective view showing a conventional head slider support device.
【図22】従来のヘッドスライダ支持装置の応力集中箇
所を示す説明図。FIG. 22 is an explanatory diagram showing stress concentration points of a conventional head slider support device.
【図23】円盤間隔とスライダ厚さの関係を示す説明
図。FIG. 23 is an explanatory diagram showing the relationship between the disk spacing and the slider thickness.
1、11…サスペンションばね 2、12…ジンバルばね 3、13…スライダ 4、14…剛体部 5、15…スプリング部 6…フランジ部 7…結合部 8…フランジ端部 10…薄板 16…リブ 17…プリント用配線シート 18…アクセス機構結合部 19…スライダ接合部 20…ジンバル可撓性部 21…記録再生ヘッド 22、23…補強層 24…横桁 25…中空部 26…接合部スペーサ 27…リード線端子部 41…記憶媒体 42…ヘッドスライダ支持装置 43…ガイドアーム 44…位置決め機構 45…駆動部 46…カバー 1, 11 ... Suspension spring 2, 12 ... Gimbal spring 3, 13 ... Slider 4, 14 ... Rigid body portion 5, 15 ... Spring portion 6 ... Flange portion 7 ... Coupling portion 8 ... Flange end portion 10 ... Thin plate 16 ... Rib 17 ... Wiring sheet for printing 18 ... Access mechanism coupling portion 19 ... Slider joint portion 20 ... Gimbal flexible portion 21 ... Recording / reproducing head 22, 23 ... Reinforcing layer 24 ... Transverse beam 25 ... Hollow portion 26 ... Joining portion spacer 27 ... Lead wire Terminal part 41 ... Storage medium 42 ... Head slider support device 43 ... Guide arm 44 ... Positioning mechanism 45 ... Drive part 46 ... Cover
───────────────────────────────────────────────────── フロントページの続き (72)発明者 清水 利彦 神奈川県小田原市国府津2880番地 株式会 社日立製作所ストレージシステム事業部内 (72)発明者 徳山 幹夫 神奈川県小田原市国府津2880番地 株式会 社日立製作所ストレージシステム事業部内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Toshihiko Shimizu 2880, Kozu, Odawara, Kanagawa Stock Company Hitachi Storage Systems Division (72) Inventor, Mikio Tokuyama 2880, Kozu, Odawara, Kanagawa Hitachi Storage Co., Ltd. System Division
Claims (8)
ける取付部及び可撓性部からなるジンバルばね並びにア
クセス機構に結合する結合部、可撓性を有するスプリン
グ部及び剛体部より構成されるサスペンションばねから
なり、該サスペンションばねは、上記ジンバルばねを結
合部側と逆側の端部にて支持し、かつ、上記剛体部は、
それ自体に剛性を与えるために、上記サスペンションば
ねの板材の少なくとも一部にデポジット膜を配置して構
成されたことを特徴とするヘッドスライダ支持装置。1. A gimbal spring including a mounting portion for mounting a slider having a recording / reproducing head and a flexible portion, and a suspension spring including a coupling portion for coupling to an access mechanism, a flexible spring portion and a rigid portion. The suspension spring supports the gimbal spring at an end portion opposite to the coupling portion side, and the rigid body portion is
A head slider support device characterized in that a deposit film is arranged on at least a part of the plate material of the suspension spring in order to impart rigidity to itself.
ばねの板材と同一の板材からなることを特徴とする請求
項1記載のヘッドスライダ支持装置。2. The head slider support device according to claim 1, wherein the gimbal spring is made of the same plate material as the plate material of the suspension spring.
域の表裏にそれぞれ配置されたことを特徴とする請求項
1記載のヘッドスライダ支持装置。3. The head slider support device according to claim 1, wherein the deposit films are provided on the front and back sides of a desired region of the plate material, respectively.
に、ジンバルばね及びサスペンションばねを構成し、ジ
ンバルばねは、記録再生ヘッドを備えたスライダを取り
付ける取付部及び可撓性部からなり、サスペンションば
ねは、(1)ジンバルばねと逆側の端部に配置され、ア
クセス機構に結合する結合部、(2)上記板材に剛性を
与えるために、デポジット膜が配置された領域を含む剛
体部及び(3)スプリング部よりなることを特徴とする
ヘッドスライダ支持装置。4. A gimbal spring and a suspension spring are formed on the same plate material having flexibility and a constant thickness, and the gimbal spring has a mounting portion for mounting a slider having a recording / reproducing head and a flexibility. The suspension spring comprises (1) a connecting portion arranged at an end opposite to the gimbal spring and connected to an access mechanism, and (2) an area where a deposit film is arranged to give rigidity to the plate material. A head slider support device comprising: a rigid body portion including (3) and a spring portion (3).
域の表裏にそれぞれ配置されたことを特徴とする請求項
4記載のヘッドスライダ支持装置。5. The head slider support device according to claim 4, wherein the deposit films are arranged on the front and back sides of a desired region of the plate material.
に、ジンバルばね及びサスペンションばねを構成し、サ
スペンションばねは、上記板材に剛性を与えるために、
デポジット膜が配置された領域を含む剛体部、アクセス
機構に結合する結合部及びスプリング部よりなり、ジン
バルばねは、記録再生ヘッドを備えたスライダを取り付
ける取付部及び可撓性部からなり、かつ、剛体部のスプ
リング部と接続する側と逆側の領域に、少なくとも3方
を剛体部に囲まれて配置されていることを特徴とするヘ
ッドスライダ支持装置。6. A gimbal spring and a suspension spring are formed on the same plate material having flexibility and a constant thickness, and the suspension spring imparts rigidity to the plate material.
The gimbal spring includes a rigid portion including a region where the deposit film is arranged, a coupling portion that couples to the access mechanism, and a spring portion.The gimbal spring includes a mounting portion that mounts a slider having a recording / reproducing head and a flexible portion, and A head slider support device, wherein at least three sides of the rigid body portion are arranged surrounded by the rigid body portion in a region opposite to a side connected to the spring portion.
域の表裏にそれぞれ配置されたことを特徴とする請求項
6記載のヘッドスライダ支持装置。7. The head slider support device according to claim 6, wherein the deposit films are arranged on the front and back sides of a desired region of the plate material, respectively.
ヘッド、該記録再生ヘッドをそれぞれ支持するためのス
ライダ、スライダをそれぞれ支持するためのヘッドスラ
イダ支持装置、ヘッドスライダ支持装置を支持し、か
つ、ヘッドスライダ支持装置を記憶媒体上に移動させる
アクセス手段を有する回転円板記憶装置であって、上記
円板状の記憶媒体のそれぞれの間隔は、0.2mmから
1.5mmの範囲にあることを特徴とする回転円板記憶
装置。8. A plurality of disk-shaped storage media, a plurality of recording / reproducing heads, sliders for respectively supporting the recording / reproducing heads, a head slider supporting device for respectively supporting the sliders, and a head slider supporting device. And a rotating disk storage device having access means for moving the head slider support device onto the storage medium, wherein the intervals of the disk-shaped storage media are in the range of 0.2 mm to 1.5 mm. The rotating disk storage device according to claim 1.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6045526A JPH07254246A (en) | 1994-03-16 | 1994-03-16 | Head slider support device and rotating disk storage device |
KR1019950005318A KR950027696A (en) | 1994-03-16 | 1995-03-15 | Head slider support device and information recording and reproducing device using the same |
CN95102499A CN1114769A (en) | 1994-03-16 | 1995-03-16 | Head slider supporting apparatus and information recording/reproducing apparatus using same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6045526A JPH07254246A (en) | 1994-03-16 | 1994-03-16 | Head slider support device and rotating disk storage device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH07254246A true JPH07254246A (en) | 1995-10-03 |
Family
ID=12721864
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6045526A Pending JPH07254246A (en) | 1994-03-16 | 1994-03-16 | Head slider support device and rotating disk storage device |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPH07254246A (en) |
KR (1) | KR950027696A (en) |
CN (1) | CN1114769A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7301729B2 (en) | 2003-05-15 | 2007-11-27 | Tdk Corporation | Suspension, head gimbal assembly with multilayered plate suspension having ribs and disk drive apparatus with head gimbal assembly |
US7317595B2 (en) | 2003-04-23 | 2008-01-08 | Hitachi Global Storage Technologies Netherlands B.V. | Suspension assembly and rotary disk storage device |
US7477487B1 (en) | 2005-04-28 | 2009-01-13 | Hutchinson Technology Incorporated | Multi-layered and shaped load beam for disk drive suspensions |
US7606002B1 (en) | 2005-05-26 | 2009-10-20 | Hutchinson Technology Incorporated | Offset dimple in a disk drive with head suspension flexure extending into load beam offset aperture |
US10796727B1 (en) | 2019-05-08 | 2020-10-06 | Seagate Technology Llc | Using solid state deposition in the manufacture of data storage devices, and related devices and components thereof |
US11017819B1 (en) * | 2019-05-08 | 2021-05-25 | Seagate Technology Llc | Data storage devices, and related components and methods of making |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8609992B2 (en) | 2009-12-24 | 2013-12-17 | Dai Nippon Printing Co., Ltd. | Circuit board, manufacturing method of circuit board, suspension substrate, suspension, device-mounted suspension, and hard disk drive |
-
1994
- 1994-03-16 JP JP6045526A patent/JPH07254246A/en active Pending
-
1995
- 1995-03-15 KR KR1019950005318A patent/KR950027696A/en not_active Application Discontinuation
- 1995-03-16 CN CN95102499A patent/CN1114769A/en active Pending
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7317595B2 (en) | 2003-04-23 | 2008-01-08 | Hitachi Global Storage Technologies Netherlands B.V. | Suspension assembly and rotary disk storage device |
US7301729B2 (en) | 2003-05-15 | 2007-11-27 | Tdk Corporation | Suspension, head gimbal assembly with multilayered plate suspension having ribs and disk drive apparatus with head gimbal assembly |
US7492553B2 (en) | 2003-05-15 | 2009-02-17 | Tdk Corporation | Suspension, head gimbal assembly with a multilayered and reinforced suspension and disk drive apparatus with head gimbal assembly |
US7477487B1 (en) | 2005-04-28 | 2009-01-13 | Hutchinson Technology Incorporated | Multi-layered and shaped load beam for disk drive suspensions |
US7606002B1 (en) | 2005-05-26 | 2009-10-20 | Hutchinson Technology Incorporated | Offset dimple in a disk drive with head suspension flexure extending into load beam offset aperture |
US10796727B1 (en) | 2019-05-08 | 2020-10-06 | Seagate Technology Llc | Using solid state deposition in the manufacture of data storage devices, and related devices and components thereof |
US11017819B1 (en) * | 2019-05-08 | 2021-05-25 | Seagate Technology Llc | Data storage devices, and related components and methods of making |
US11302363B2 (en) | 2019-05-08 | 2022-04-12 | Seagate Technology Llc | Data storage devices, and related components and methods of making |
US11302364B2 (en) | 2019-05-08 | 2022-04-12 | Seagate Technology Llc | Data storage devices, and related components and methods of making |
Also Published As
Publication number | Publication date |
---|---|
KR950027696A (en) | 1995-10-18 |
CN1114769A (en) | 1996-01-10 |
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