JPH0717443U - Blade auto changer - Google Patents

Abstract

(57) [Summary] [Purpose] To obtain a blade autochanger that enables easy attachment and detachment of old and new blades to and from a spindle. [Structure] A blade autochanger that is mounted on a precision cutting device such as a dicing device and automatically replaces the blade. The blade autochanger warms the blade to facilitate attachment / detachment of the blade to / from the spindle. And a fitting relaxing means for relaxing the fitting.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a blade autochanger that facilitates attachment / detachment of a blade.

[0002]

[Prior art]

 There is a blade auto changer which is attached to a precision cutting device such as a dicing device and automatically replaces the blade. This has a blade attaching / detaching means and a nut attaching / detaching means. For example, as shown in FIG. While removing b, a new blade can be attached to this spindle a.

[0003]

[Problems to be solved by the device]

 In the blade autochanger, since the diameter tolerance between the mounting portion c (made of titanium or SUS) of the spindle a and the blade b (made of aluminum hub blade) is about several μm, which is extremely small, the blade b to the spindle a is It is relatively difficult to attach and detach the blade b, and in particular, the blade b may not be able to be removed because the blade a meshes with the spindle a. The present invention has been made in order to solve such conventional problems, and an object thereof is to provide a blade autochanger capable of easily attaching and detaching a blade to and from a spindle. .

[0004]

[Means for Solving the Problems]

 As a means for technically solving this problem, the present invention is a blade autochanger mounted on a precision cutting device such as a dicing device to automatically replace a blade. The gist of the invention is a blade autochanger, which is provided with a fitting relaxation means for warming the blade to facilitate the removal or attachment / detachment of the blade and relaxing fitting with the spindle.

[0005]

[Work]

 When the blade is removed from the spindle, the fitting relaxation means warms the blade, and the expansion of the inner diameter due to its thermal expansion makes it easier to pull out the blade, and also when the blade is fitted to the spindle, it becomes easier to install.

[0006]

【Example】

 Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In FIG. 1, reference numeral 1 denotes a blade rack, in which a new blade holding shaft 2 for holding a blade b ′ to be newly mounted and an old blade holding shaft 3 for holding a used blade b are juxtaposed. , Has blade fitting shafts 2a, 3a at the tip thereof, and as shown in FIG. 2, a plurality of suction holes 2b, 3b for attracting the blades are provided on the tip surfaces thereof in the circumferential direction. There is.

Reference numeral 4 denotes a first operation shaft, which is formed so as to be rotatable about the shaft and is provided so as to be movable back and forth along the axis thereof, and a blade attaching / detaching means 5 is attached to a tip end portion thereof.

As shown in FIG. 3, the blade attaching / detaching means 5 includes a support arm 51 provided in a direction perpendicular to the axial direction of the first operating shaft 4, and an operating portion 52 attached to the tip thereof. A ring-shaped blade holding portion 53 is provided inside the cup-shaped operation portion 52, and a plurality of suction holes 53a for adsorbing the blade are circumferentially provided on the tip end surface of the blade holding portion 53. It is provided.

As shown in FIG. 4, the suction holes 53a are connected to the vacuum suction means Q and the fitting relaxation means R via communication paths P ₁ and P ₂ provided in the support arm 51 and the first operation shaft 4. It is connected so that the suction action by the suction means Q and the heating action by the fitting relaxation means R can be appropriately switched and performed. In this case, the fitting reducing means R is provided with a mechanism that sends out hot air or hot water.

Reference numeral 6 denotes a second operation shaft, which is formed so as to be rotatable independently of the first operation shaft 4 by aligning an axis with the inside of the first operation shaft 4 as shown in FIG. The nut attachment / detachment means 7 is attached to the tip end portion of the nut attachment / detachment means.

As shown in FIG. 3, the nut attaching / detaching means 7 includes a support arm 71 provided in a direction perpendicular to the axial direction of the second operation shaft 6, and an operation portion 72 attached to the tip thereof. Have. A ring-shaped nut rotating portion 73 and a spindle pressing portion 74 arranged at the center thereof are rotatably provided inside the cup-shaped inside of the operation portion 72, and the spindle holding portion 74 is different from the nut rotating portion 73. It is rotatable independently, and further, a plurality of suction holes 72a for sucking the nuts are circumferentially provided on the inner peripheral surface of the tip portion of the operation portion 72.

A pin 73a that engages with a small hole g for rotation of the blade pressing nut d 1 shown in FIG. 9 is provided on the tip end surface of the nut rotating portion 73 in the circumferential direction according to the position of the small hole g. Four pins 74a are provided on the tip end surface of the spindle pressing portion 74 in the circumferential direction in accordance with the position of the small holes f and engage with the small holes f of the spindle a for preventing rotation. . It is preferable that each of these engagement pins 73a and 74a is formed so as to be able to move forward and backward through a spring (not shown), and is normally biased in a protruding state. In FIG. 1, reference numeral 8 is a semiconductor wafer holding table.

In the blade autochanger according to the present invention configured as described above, the procedure for replacing the blade will be described. First, the first operating shaft 4 is rotated by a required angle to move the blade attaching / detaching means 5 to the inoperative position. Rotate and wait.

Next, the second operating shaft 6 is rotated by a required angle and moved forward to move the nut attaching / detaching means 7 to the working position to attach the operating portion 72 to the blade pressing nut d of the spindle a shown in FIG. Let it work. At this time, the spindle pressing portion 74 is rotated so that the engagement pin 74a is fitted into the small rotation preventing hole f at the tip of the spindle a shown in FIG. 9, and the spindle pressing portion 74 prevents the spindle a from rotating. Hold on. The engaging pins 73a of the nut rotating portion 73 are fitted into the rotating small holes g of the blade pressing nut d, respectively, and the nut rotating portion 73 is gradually retracted while rotating to move the blade pressing nut d to the spindle a. The blade pressing nut d is sucked through the suction hole 72a and is adsorbed to the inner peripheral surface of the distal end portion of the operation portion 72 while being removed from the screw portion e of.

After that, the operating portion 72 is retracted and the spindle pressing portion 74 is retracted, so that the engaging pin 74a is removed from the small hole f for preventing rotation of the spindle a, and the second operating shaft 6 is reversed by the required angle. The nut attaching / detaching means 7 is rotated to the non-acting position and is made to stand by by rotating the nut attaching / detaching means 7 in the direction.

Next, the blade attaching / detaching means 5 standing by at the non-acting position is rotationally moved from that position to the working position to act on the used old blade b mounted on the spindle a. That is, the old blade b is covered with the operating portion 52, and hot air, hot water or the like is blown from the suction hole 53 to the old blade b by the fitting relaxation means R, the old blade b is thermally expanded and the inner diameter is expanded, and the old blade b is removed from the spindle a. Easy to remove.

After that, the blowing of warm air, warm water, etc. is stopped, the suction hole 53 is connected to the suction means Q, and the old blade b is adsorbed and held to be removed from the threaded portion e of the spindle a, and as shown in FIG. The support arm 51 is rotated and stored in the old blade holding shaft 3a of the blade rack 1. The old blade b is sucked by the suction hole 3b and fitted and held on the old blade holding shaft 3a.

The blade attaching / detaching means 5 further rotates and moves to the new blade holding shaft 2 and sucks and holds the new blade b ′ from the new blade holding shaft 2, and also rotationally moves to the spindle a to mount the new blade b ′ on the spindle a. To do.

At this time, in order to facilitate the mounting of the new blade b ′ on the spindle a, the heating element S is arranged on the new blade holding shaft 2 of the blade rack 1 as shown in FIG. The new blade b ′ may be thermally expanded immediately before being mounted on the spindle a to increase the inner diameter.

After the blade attaching / detaching means 5 is rotationally moved to the non-acting position and is on standby, the nut attaching / detaching means 7 is rotationally moved from the standby position to the operating position, and the blade pressing nut d is screwed on the spindle a. The new blade b'is fixed by being screwed onto the portion e. At this time, the spindle pressing portion 74 is rotated so that the engaging pin 74a is fitted into the small rotation preventing hole f at the tip of the spindle a, and the spindle pressing portion 74 holds the spindle a so that it does not rotate.

The engagement pin 73a of the nut rotating part 73 is gradually advanced while rotating the nut rotating part 73 while being fitted into the small hole g of the blade pressing nut d. Can be screwed onto the thread portion e of the spindle a. After the mounting, the blade attaching / detaching means 5 is rotationally moved to the non-acting position and stands by.

In this way, the old and new blades can be replaced automatically, and when the new and old blades are attached and detached, the inner diameter is enlarged by heating so that the spindle can be easily attached and detached. And it can be done smoothly.

FIG. 6 and FIG. 7 show a second embodiment of the present invention. In the blade attaching / detaching means 25 provided at the tip of the first operating shaft 24, the old blade attaching / detaching means 25a and the new blade are attached. It differs from the first embodiment in that the attaching / detaching means 25b are symmetrically provided at both ends of a support arm 251 which is provided in a direction perpendicular to the axial direction of the first operation shaft 24. However, the nut attaching / detaching means 27 provided at the tip of the second operation shaft 26 has the same structure as the nut attaching / detaching means 7 of the first embodiment.

In the case of the second embodiment, the blade attaching nut d of the spindle a is removed by the nut attaching / detaching means 27, and the old blade b attached to the spindle a is removed by the old blade attaching / detaching means 25a. . At this time, hot air or hot water is blown from the suction hole 253a to thermally expand the old blade b to enlarge the inner diameter and make it easy to disengage from the spindle a. Therefore, although not shown, the suction hole 253a is connected to the suction means and the fitting relaxation means via the support arm 251 and the communication path provided in the first operation shaft 24.

After removing the old blade b by the old blade attaching / detaching means 25a, the blade attaching / detaching means 25 is rotated by 180 °, and the new blade b ′ previously held by the new blade attaching / detaching means 25b is attached to the spindle a. If the blade pressing nut d held by the nut attaching / detaching means 27 is screwed onto the spindle a again, the new blade b'can be fixed. In this case, it is possible to heat the new blade b'by the new blade attaching / detaching means 25b so as to enlarge the inner diameter thereof. Further, since the old blade is removed by removing it from the old blade attaching / detaching means 25a, the blade rack 1 in the first embodiment becomes unnecessary.

FIG. 8 shows a third embodiment of the present invention, in which the nut attaching / detaching means 37 which is substantially the same as the nut attaching / detaching means shown in the first and second embodiments, is attached to the blade attaching / detaching means 35 (this). Is substantially the same as the blade attaching / detaching means shown in the first and second embodiments.) In this case, the second operation shaft and the supporting arm are unnecessary, It has the features of simplifying the configuration of the blade autochanger and downsizing the entire device. Also in the third embodiment, it is possible to provide a fitting relaxation means using warm air or warm water so that the old and new blades can be easily attached and detached.

[0027]

[Effect of device]

 As described above, according to the present invention, when the blade is removed from the spindle in the blade autochanger, the blade is warmed by hot air or hot water, and the expansion of the inner diameter due to its thermal expansion is used to facilitate the removal of the blade. Even when the blade is fitted to the spindle, it is easy to install by warming it. Therefore, even if the diameter tolerance is very small, the blade can be easily attached to and detached from the spindle, and the blade can be automatically exchanged smoothly.

[Brief description of drawings]

FIG. 1 is a plan view of an essential part of an apparatus showing a first embodiment of the present invention.

FIG. 2A and FIG. 2B are schematic perspective views of a blade holding shaft in a blade rack.

FIG. 3 is a schematic perspective view of a blade attaching / detaching means and a nut attaching / detaching means.

FIG. 4 is an explanatory diagram showing a connection state of a suction hole of a blade attaching / detaching means and a suction means and a fitting reducing means.

FIG. 5 is a front view of an essential part of the device for explaining a blade replacement procedure.

FIG. 6 is a plan view of an essential part of the device showing a second embodiment of the present invention.

FIG. 7 is a schematic perspective view of the main part of the apparatus.

FIG. 8 is a plan view of an essential part of the device showing a third embodiment of the present invention.

FIG. 9 is a perspective view showing a state in which a blade pressing nut and a cutting blade are removed from the spindle.

[Explanation of symbols]

1 ... Blade rack 2 ... New blade holding shaft 2a
... Blade fitting shaft 2b ... Suction hole 3 ... Old blade holding shaft 3a ... Blade fitting shaft 3b ... Suction hole 4 ... First operation shaft
5 ... Blade attaching / detaching means 51 ... Support arm 52 ... Operating portion 53 ... Blade holding portion 53a ... Suction hole 6 ... Second operating shaft 7 ... Nut attaching / detaching means
71 ... Support arm 72 ... Operation part 72a ... Suction hole 73 ... Nut rotating part 73a ... Engagement pin 74
... Spindle pressing portion 74a ... Engaging pin 8 ... Semiconductor wafer holding table 24 ... First operation shaft 25 ... Blade attaching / detaching means 2
5a ... Old blade attaching / detaching means 25b ... New blade attaching / detaching means 251 ... Support arm 253a ... Suction hole
26 ... 2nd operation shaft 27 ... Nut attaching / detaching means 35
... blade detachable means 37 ... nut connecting unit P _1, P ₂ ... communicating passage Q ... suction means R ... fitting relieving means S ... heating body

Claims (1)

[Scope of utility model registration request] 1. A blade autochanger which is mounted on a precision cutting device such as a dicing device to automatically replace the blade, wherein the blade autochanger heats the blade in order to easily remove or attach the blade of the spindle. An automatic blade changer, characterized in that a fitting relaxing means for relaxing fitting with the spindle is provided.