JPH07159422A - Cantilever chip holder - Google Patents
Cantilever chip holderInfo
- Publication number
- JPH07159422A JPH07159422A JP5309419A JP30941993A JPH07159422A JP H07159422 A JPH07159422 A JP H07159422A JP 5309419 A JP5309419 A JP 5309419A JP 30941993 A JP30941993 A JP 30941993A JP H07159422 A JPH07159422 A JP H07159422A
- Authority
- JP
- Japan
- Prior art keywords
- cantilever
- vibration
- tip
- plate material
- shim
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims abstract description 38
- 238000013016 damping Methods 0.000 claims abstract description 21
- 239000000523 sample Substances 0.000 description 18
- 230000005284 excitation Effects 0.000 description 5
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- -1 acryl Chemical group 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 230000001151 other effect Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、探針を試料に沿って走
査させて、試料表面を測定するカンチレバーチップを保
持するカンチレバーチップホルダーに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cantilever tip holder for holding a cantilever tip for measuring a sample surface by scanning a probe along the sample.
【０００２】[0002]
【従来の技術】従来、この種のカンチレバーチップホル
ダーを備えた走査型プローブ顕微鏡として、例えば特開
昭６３−３０９８０３号公報に開示されたような原子間
力顕微鏡（ＡＦＭ）が知られている。2. Description of the Related Art Conventionally, an atomic force microscope (AFM) as disclosed in Japanese Patent Laid-Open No. 63-309803 is known as a scanning probe microscope equipped with a cantilever tip holder of this type.
【０００３】このようなＡＦＭでは、探針を走査しなが
ら、探針と試料との間に働く相互作用を検出することに
よって、試料の表面情報が測定されている。特に、ＡＣ
モードのＡＦＭには、探針を励振させながら試料に接近
させることにより、試料と探針との間に作用する力勾配
を検出する。In such an AFM, the surface information of the sample is measured by detecting the interaction acting between the probe and the sample while scanning the probe. Especially AC
In the mode AFM, the force gradient acting between the sample and the probe is detected by moving the probe closer to the sample while exciting the probe.
【０００４】図６に示すように、上記カンチレバーチッ
プホルダーは、支持部２と、この支持部２によって基端
部が支持されたバイモルフアクチュエータ４と、このバ
イモルフアクチュエータ４の先端部に取り付けられたカ
ンチレバーチップ６とを備えている。なお、カンチレバ
ーチップ６には、その自由端に探針８を保持したカンチ
レバー１０が設けられている。As shown in FIG. 6, the cantilever chip holder has a supporting portion 2, a bimorph actuator 4 having a base end portion supported by the supporting portion 2, and a cantilever attached to a tip portion of the bimorph actuator 4. And a chip 6. The cantilever tip 6 is provided with a cantilever 10 holding a probe 8 at its free end.
【０００５】ここで、力勾配は、カンチレバー１０の共
振特性の変化によって検出されている。具体的には、力
勾配は、カンチレバー１０の振動振幅信号に反映されて
おり、振幅が一定になるように試料に対する探針８の位
置関係を制御することによって、試料の表面情報が測定
されている。Here, the force gradient is detected by the change in the resonance characteristic of the cantilever 10. Specifically, the force gradient is reflected in the vibration amplitude signal of the cantilever 10, and the surface information of the sample is measured by controlling the positional relationship of the probe 8 with respect to the sample so that the amplitude becomes constant. There is.
【０００６】[0006]
【発明が解決しようとする課題】しかしながら、カンチ
レバー１０の励振は、支持部２を介して伝達されて、Ａ
ＦＭを構成しているカンチレバー１０以外の部材を振動
させることになり、カンチレバー１０の先端の振動のみ
を高精度に検出することが困難になってしまう場合があ
る。However, the excitation of the cantilever 10 is transmitted through the support portion 2 and the
Since members other than the cantilever 10 that compose the FM are vibrated, it may be difficult to detect only the vibration of the tip of the cantilever 10 with high accuracy.
【０００７】また、カンチレバー１０の共振点を検知す
るためには、共振周波数周辺の周波数領域内において、
一様な振幅で励振させる必要がある。本発明は、このよ
うな問題点を解決するためになされており、その目的
は、カンチレバー先端の振動のみを高精度に検出するこ
とができるカンチレバーチップホルダーを提供すること
にある。Further, in order to detect the resonance point of the cantilever 10, in the frequency region around the resonance frequency,
It is necessary to excite with a uniform amplitude. The present invention has been made to solve such a problem, and an object thereof is to provide a cantilever tip holder capable of detecting only the vibration of the tip of the cantilever with high accuracy.
【０００８】[0008]
【課題を解決するための手段】このような目的を達成す
るために、本発明のカンチレバーチップホルダーは、支
持部と、前記支持部によって支持された板材と、この板
材上に設けられたカンチレバーチップと、前記板材上に
設けられ、所定の電圧を印加することによって、前記板
材を所定方向に振動させる振動部材と、前記支持部と前
記板材との間に介在され、前記板材から発生した振動が
前記支持部に伝達されないように、上記振動を減衰させ
る振動減衰素材とを備える。In order to achieve such an object, a cantilever chip holder according to the present invention is provided with a support portion, a plate material supported by the support portion, and a cantilever chip provided on the plate material. And a vibration member that is provided on the plate member and vibrates the plate member in a predetermined direction by applying a predetermined voltage, and is interposed between the support portion and the plate member, and vibration generated from the plate member is generated. A vibration damping material for damping the above-mentioned vibration so as not to be transmitted to the support portion.
【０００９】[0009]
【作用】振動部材を介して板材から発生した振動は、支
持部に伝達される前に、振動減衰素材によって減衰され
る。The vibration generated from the plate material via the vibrating member is damped by the vibration damping material before being transmitted to the supporting portion.
【００１０】[0010]
【実施例】以下、本発明の第１の実施例に係るカンチレ
バーチップホルダーについて図１及び図２を参照して説
明する。図１に示すように、本実施例のカンチレバーチ
ップホルダーは、支持部１２と、その基端部が支持部１
２によって支持された板材１４と、この板材１４の先端
部下面に接着又は着脱自在に固定されたカンチレバーチ
ップ１６と、板材１４の先端部上面に設けられ、所定の
電圧を印加することによって、板材１４の先端部を所定
方向に振動させる振動部材１８と、支持部１２と板材１
４との間に介在され、板材１４の先端部で発生した振動
が支持部１２に伝達されないように、上記振動を減衰さ
せる振動減衰素材２０とを備えている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A cantilever tip holder according to a first embodiment of the present invention will be described below with reference to FIGS. As shown in FIG. 1, the cantilever chip holder according to the present embodiment has a support portion 12 and a base end portion of the support portion 1.
2, a cantilever chip 16 that is adhesively or detachably fixed to the lower surface of the tip of the plate 14, and a cantilever chip 16 that is provided on the upper surface of the tip of the plate 14 to apply a predetermined voltage to the plate. A vibrating member 18 for vibrating the tip portion of 14 in a predetermined direction, the supporting portion 12, and the plate member 1.
4 and a vibration damping material 20 that damps the vibration so that the vibration generated at the tip portion of the plate member 14 is not transmitted to the support portion 12.
【００１１】支持部１２は、板材１４をＡＦＭ本体（図
示しない）に固定可能に構成されている。板材１４は、
例えばチタン（Ｔｉ）又はアルミナ等の固い金属（或い
はセラミック）で構成されており、シムと称される（以
下、板材をシムという）。The support portion 12 is constructed so that the plate member 14 can be fixed to the AFM body (not shown). The plate material 14 is
For example, it is made of a hard metal (or ceramic) such as titanium (Ti) or alumina, and is called a shim (hereinafter, a plate material is called a shim).
【００１２】カンチレバーチップ１６には、その自由端
に尖鋭化した探針２２を保持するカンチレバー２４が設
けられている。振動部材１８は、所定の電圧を印加する
ことによって長手方向に伸縮するチタン酸ジルコン酸鉛
（ＰＺＴ）で構成されており、その両面には電極（図示
しない）が形成されている。なお、このように長手方向
に伸縮する素材（即ち、ＰＺＴ）と固い素材（即ちシム
１４）とを組み合わせた構造をユニモルフアクチュエー
タと称される。The cantilever tip 16 is provided at its free end with a cantilever 24 for holding a sharpened probe 22. The vibrating member 18 is made of lead zirconate titanate (PZT) that expands and contracts in the longitudinal direction when a predetermined voltage is applied, and electrodes (not shown) are formed on both surfaces thereof. A structure in which a material that expands and contracts in the longitudinal direction (that is, PZT) and a hard material (that is, the shim 14) is combined is called a unimorph actuator.
【００１３】このような振動部材１８の上部電極には、
励振用発振器２６から延出した電線２８の延出端が半田
付けされており、下部電極は、導電性のシム１４又はシ
ム１４上の導電膜（図示しない）を介してアースされて
いる。The upper electrode of the vibrating member 18 is
The extended end of the electric wire 28 extending from the excitation oscillator 26 is soldered, and the lower electrode is grounded via the conductive shim 14 or the conductive film (not shown) on the shim 14.
【００１４】振動減衰素材２０は、その音響インピーダ
ンスがシム１４と異なるような、例えばゴム，アクリ
ル，金属粉又はセラミックス粉を混ぜたエポキシ樹脂等
の振動減衰の大きな板材で構成されている。The vibration damping material 20 is made of a plate material having a large vibration damping property, such as rubber, acryl, epoxy resin mixed with metal powder or ceramic powder, which has a different acoustic impedance from the shim 14.
【００１５】このような振動減衰素材２０上には、支持
部１２に対する着脱性及び位置決め精度を向上させるよ
うに、支持部１２との間に金属部３０が介挿されてい
る。このような構成において、カンチレバー２４の振動
特性に基づいたＡＣモードのＡＦＭ測定を行う場合、ま
ず、励振用発振器２６から振動部材１８の電極に所定の
励振信号が印加される。On such a vibration damping material 20, a metal portion 30 is interposed between the vibration damping material 20 and the support portion 12 so as to improve the attachability / detachability to the support portion 12 and the positioning accuracy. In such a configuration, when performing AC mode AFM measurement based on the vibration characteristics of the cantilever 24, first, a predetermined excitation signal is applied from the excitation oscillator 26 to the electrode of the vibration member 18.
【００１６】この結果、図２（ａ），（ｂ）に示すよう
に、振動部材１８は、その長手方向に伸縮し、この振動
部材１８の伸縮に伴ってシム１４の先端部が所定方向
（図２中矢印Ｓ方向）に振動される。As a result, as shown in FIGS. 2 (a) and 2 (b), the vibrating member 18 expands and contracts in the longitudinal direction, and as the vibrating member 18 expands and contracts, the tip of the shim 14 moves in a predetermined direction ( It is vibrated in the arrow S direction in FIG.
【００１７】このようなシム１４の振動によって、シム
１４の先端部下面に接着されたカンチレバーチップ１６
が励振される。そして、カンチレバーチップ１６を励振
させた状態でＡＦＭ測定が行われることになる。The vibration of the shim 14 causes the cantilever tip 16 adhered to the lower surface of the tip of the shim 14.
Is excited. Then, the AFM measurement is performed with the cantilever tip 16 excited.
【００１８】このとき、シム１４の先端部に発生してい
る振動は、シム１４を介して支持部１２に伝達される前
に、上記振動減衰素材２０によって減衰され、支持部１
２を介してＡＦＭ本体（図示しない）には伝達されな
い。At this time, the vibration generated at the tip of the shim 14 is damped by the vibration damping material 20 before being transmitted to the support portion 12 through the shim 14, and the support portion 1
It is not transmitted to the AFM main body (not shown) via the No. 2.
【００１９】即ち、上記ユニモルフアクチュエータで
は、カンチレバー２４の励振のみが行われることにな
る。このように本実施例のカンチレバーチップホルダー
には、シム１４の先端部で発生した振動が支持部１２に
伝達される前に減衰させる振動減衰素材２０が設けられ
ているため、カンチレバー先端の振動のみを高精度に検
出することが可能となる。That is, in the unimorph actuator, only the cantilever 24 is excited. As described above, since the cantilever tip holder of this embodiment is provided with the vibration damping material 20 for damping the vibration generated at the tip of the shim 14 before being transmitted to the support portion 12, only the vibration at the tip of the cantilever is provided. Can be detected with high accuracy.
【００２０】なお、上記金属部３０は必ずしも必要では
なく、支持部１２によって直接振動減衰素材２０を保持
することも可能である。次に、本発明の第２の実施例に
係るカンチレバーチップホルダーについて、図３ないし
図５を参照して説明する。なお、本実施例の説明に際
し、第１の実施例と同一の構成には同一符号を付して、
その説明を省略する。The metal portion 30 is not always necessary, and the vibration damping material 20 can be directly held by the support portion 12. Next, a cantilever chip holder according to a second embodiment of the present invention will be described with reference to FIGS. In the description of this embodiment, the same components as those in the first embodiment are designated by the same reference numerals,
The description is omitted.
【００２１】図３には、本実施例のカンチレバーチップ
ホルダーの断面図が示されており、（ａ）にはその上面
図が、（ｂ）にはその正面図が、（ｃ）にはその側面図
が示されている。3A and 3B are sectional views of the cantilever chip holder of this embodiment. FIG. 3A is a top view thereof, FIG. 3B is a front view thereof, and FIG. A side view is shown.
【００２２】図３に示すように、本実施例のカンチレバ
ーチップホルダーには、その両側が突出した矩形状ホル
ダ本体３２が設けられており、このホルダ本体３２の内
側面には、互いに対向配置された一対の振動減衰素材２
０が張り付けられている。As shown in FIG. 3, the cantilever chip holder of this embodiment is provided with a rectangular holder main body 32 that projects from both sides, and the holder main body 32 is disposed on its inner side surface so as to face each other. A pair of vibration damping materials 2
0 is attached.
【００２３】これら一対の振動減衰素材２０は、両持ち
支持部としての機能を有しており、その内側面の間に
は、所定角度だけ傾斜配置されたシム１４がホルダ本体
３２の長手方向に張設支持されている。The pair of vibration damping materials 20 have a function as a both-end supporting portion, and a shim 14 inclined at a predetermined angle is provided between the inner side surfaces thereof in the longitudinal direction of the holder main body 32. It is stretched and supported.
【００２４】このシム１４上には、ＰＺＴ製の振動部材
１８がホルダ本体３２の長手方向に張設されている。こ
れらシム１４及び振動部材１８によってユニモルフアク
チュエータが構成され、カンチレバーチップ１６は、ユ
ニモルフアクチュエータの中心に着脱自在に張り付けら
れている。具体的には、カンチレバーチップ１６は、カ
ンチレバーチップ接着板及びカンチレバー位置決め固定
板としての機能を有するシム１４の中心に張り付けられ
ている。A vibration member 18 made of PZT is stretched on the shim 14 in the longitudinal direction of the holder body 32. The shim 14 and the vibrating member 18 constitute a unimorph actuator, and the cantilever chip 16 is detachably attached to the center of the unimorph actuator. Specifically, the cantilever chip 16 is attached to the center of the shim 14 that functions as a cantilever chip adhesive plate and a cantilever positioning and fixing plate.
【００２５】このような構成によれば、振動部材１８に
所定の励振信号が印加された場合、上記ユニモルフアク
チュエータは、図４（ａ），（ｂ）に示すように、両端
を支持する振動減衰素材２０を節として且つ中心の変位
量が最大になるモードが一次のモードとして励振され
る。According to this structure, when a predetermined excitation signal is applied to the vibrating member 18, the unimorph actuator, as shown in FIGS. 4 (a) and 4 (b), damps the vibrations supporting both ends. The mode in which the material 20 is the node and the displacement amount of the center is maximum is excited as the primary mode.
【００２６】しかしながら、本実施例も第１の実施例と
同様に、ユニモルフアクチュエータから発生した振動
は、その両端に設けられた振動減衰素材２０によって減
衰されるため、上記振動がホルダ本体３２を介してＡＦ
Ｍ本体（図示しない）に伝達されることはない。However, in this embodiment as well, as in the first embodiment, the vibration generated from the unimorph actuator is damped by the vibration damping material 20 provided at both ends of the unimorph actuator. AF
It is not transmitted to the M body (not shown).
【００２７】即ち、上記ユニモルフアクチュエータで
は、カンチレバー２４（図３参照）の励振のみが行われ
ることになる。また、図５に示すように、シム１４の面
にカンチレバーチップ１６の位置決め用の罫書線等の書
き込み又は掘り込みを施すことによって、カンチレバー
２４の変位センサ（図示しない）を位置決めする際にお
ける調整範囲を限定することが可能となる。なお、本実
施例の他の効果は、第１の実施例と同様であるため、そ
の説明は省略する。That is, in the above unimorph actuator, only the cantilever 24 (see FIG. 3) is excited. Further, as shown in FIG. 5, an adjustment range for positioning a displacement sensor (not shown) of the cantilever 24 by writing or digging a marking line or the like for positioning the cantilever tip 16 on the surface of the shim 14. Can be limited. Since the other effects of this embodiment are similar to those of the first embodiment, the description thereof will be omitted.
【００２８】[0028]
【発明の効果】本発明によれば、板材から発生した振動
が支持部に伝達される前に、その振動を減衰させる振動
減衰素材が設けられているため、カンチレバー先端の振
動のみを高精度に検出することが可能となる。According to the present invention, since the vibration damping material for damping the vibration generated from the plate material before the vibration is transmitted to the support portion is provided, only the vibration at the tip of the cantilever can be accurately adjusted. It becomes possible to detect.
【図１】本発明の第１の実施例に係るカンチレバーチッ
プホルダーの構成を概略的に示す断面図。FIG. 1 is a sectional view schematically showing the configuration of a cantilever chip holder according to a first embodiment of the present invention.
【図２】振動部材の伸縮に伴ってシムの先端部が矢印Ｓ
方向に振動している状態を示す断面図。[Fig. 2] As the vibrating member expands and contracts, the tip of the shim is indicated by an arrow S.
Sectional drawing which shows the state which is vibrating in the direction.
【図３】本発明の第２の実施例に係るカンチレバーチッ
プホルダーの構成を概略的に示す断面図。FIG. 3 is a sectional view schematically showing the configuration of a cantilever chip holder according to a second embodiment of the present invention.
【図４】両端を支持する振動減衰素材を節として中心の
変位量が最大になるモードが一次のモードとして励振さ
れている状態を示す断面図。FIG. 4 is a cross-sectional view showing a state in which a mode in which a displacement amount of a center is maximum is excited as a primary mode with a vibration damping material supporting both ends as a node.
【図５】シムの面にカンチレバーチップの位置決め用の
罫書線等の書き込み又は掘り込みが施された状態を示す
平面図。FIG. 5 is a plan view showing a state in which a marking line or the like for positioning the cantilever tip is written or dug into the surface of the shim.
【図６】従来のカンチレバーチップホルダーの構成を概
略的に示す断面図。FIG. 6 is a sectional view schematically showing the configuration of a conventional cantilever chip holder.
【符号の説明】 １２…支持部、１４…板材（シム）、１６…カンチレバ
ーチップ、１８…振動部材、２０…振動減衰素材。[Explanation of Codes] 12 ... Supporting part, 14 ... Plate material (shim), 16 ... Cantilever tip, 18 ... Vibration member, 20 ... Vibration damping material.
Claims (1)
って、前記板材を所定方向に振動させる振動部材と、 前記支持部と前記板材との間に介在され、前記板材から
発生した振動が前記支持部に伝達されないように、上記
振動を減衰させる振動減衰素材とを備えていることを特
徴とするカンチレバーチップホルダー。1. A support part, a plate material supported by the support part, a cantilever chip provided on the plate material, a plate material provided on the plate material, and a predetermined voltage applied to the plate material. A vibration member that vibrates in a direction, and a vibration damping material that is interposed between the support portion and the plate member and that damps the vibration so that the vibration generated from the plate member is not transmitted to the support portion. A cantilever tip holder characterized in that
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30941993A JP3318085B2 (en) | 1993-12-09 | 1993-12-09 | Cantilever tip holder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30941993A JP3318085B2 (en) | 1993-12-09 | 1993-12-09 | Cantilever tip holder |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07159422A true JPH07159422A (en) | 1995-06-23 |
| JP3318085B2 JP3318085B2 (en) | 2002-08-26 |
Family
ID=17992782
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30941993A Expired - Fee Related JP3318085B2 (en) | 1993-12-09 | 1993-12-09 | Cantilever tip holder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3318085B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007132782A (en) * | 2005-11-10 | 2007-05-31 | Sii Nanotechnology Inc | Excitation cantilever holder and scanning probe microscope |
| JP2008203058A (en) * | 2007-02-20 | 2008-09-04 | Seiko Instruments Inc | Lever excitation mechanism and scanning probe microscope |
| JP2009174862A (en) * | 2008-01-21 | 2009-08-06 | Sii Nanotechnology Inc | Cantilever holder for scanning probe microscope and scanning probe microscope provided with the same |
| WO2011016256A1 (en) | 2009-08-06 | 2011-02-10 | 国立大学法人 金沢大学 | Cantilever excitation device and scanning probe microscope |
-
1993
- 1993-12-09 JP JP30941993A patent/JP3318085B2/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007132782A (en) * | 2005-11-10 | 2007-05-31 | Sii Nanotechnology Inc | Excitation cantilever holder and scanning probe microscope |
| KR101263033B1 (en) * | 2005-11-10 | 2013-06-24 | 에스아이아이 나노 테크놀로지 가부시키가이샤 | Vibration-type cantilever holder and scanning probe microscope |
| JP2008203058A (en) * | 2007-02-20 | 2008-09-04 | Seiko Instruments Inc | Lever excitation mechanism and scanning probe microscope |
| JP2009174862A (en) * | 2008-01-21 | 2009-08-06 | Sii Nanotechnology Inc | Cantilever holder for scanning probe microscope and scanning probe microscope provided with the same |
| WO2011016256A1 (en) | 2009-08-06 | 2011-02-10 | 国立大学法人 金沢大学 | Cantilever excitation device and scanning probe microscope |
| US8505111B2 (en) | 2009-08-06 | 2013-08-06 | National University Corporation Kanazawa University | Cantilever excitation device and scanning probe microscope |
| JP5585965B2 (en) * | 2009-08-06 | 2014-09-10 | 国立大学法人金沢大学 | Cantilever excitation device and scanning probe microscope |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3318085B2 (en) | 2002-08-26 |
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