JPH07156414A - Ink jet recording head, production thereof and recording apparatus - Google Patents

Abstract

PURPOSE:To easily and accurately form a liquid chamber having large volume by a reduced number of simple processes by forming a solid layer composed of a removable member even on an external take-out electrode to mold the same and subsequently removing the solid layer. CONSTITUTION:An ink emitting energy generating element 2, electrodes, a first solid layer 4 and a second solid layer 5 are formed on a substrate 1 at predetermined positions and the whole is arranged in a transfer mold consisting of upper and lower molds 11, 12. Subsequently, a molding resin 6 covering the solid layers so as to become the wall parts of ink emitting orifices, ink passages and an ink chamber is molded. The first and second solid layers 4, 5 are also molded on an external take-out electrode 13. By interposing the solid layers 4, 5 of this part between the substrate l and the upper mold 11, the inflow of the molding resin to the external take-out electrode 13 or the damage of an external take-out electrode 3' and the substrate 1 can be prevented.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing an ink jet recording head used in an ink jet recording system, an ink jet recording head manufactured by the method, and a recording apparatus having the recording head.

[0002]

2. Description of the Related Art Inkjet recording heads used in inkjet recording systems (hereinafter referred to as "recording heads")
In general, an ejection port for ejecting ink, a liquid chamber for storing the ink to be supplied to the ejection port, an ink channel for communicating the ejection port with the liquid chamber, and a part of the ink channel. An energy generating element that generates energy for ejecting ink, and an ink supply port for supplying ink to the liquid chamber from the outside are provided.

The following is known as a conventional method of manufacturing a recording head.

(1) A first substrate provided with an energy generating element is prepared, while a second substrate made of glass, metal or the like is provided with a discharge port, a flow path and a liquid chamber by a processing means such as cutting or etching. And a supply port for communicating the liquid chamber with the outside are provided, and the second substrate is bonded to the first substrate with an adhesive while aligning the positions of the energy generating element and the flow path. Method.

(2) A positive or negative photosensitive dry film is attached to a first substrate made of glass or the like provided with an energy generating element, and the discharge port, the flow path and the liquid chamber of the photosensitive dry film are attached. Is exposed by exposing it to a mask or a pattern corresponding to the above, and is developed to provide a patterned solid layer corresponding to the ejection port, the flow path and the liquid chamber on the first substrate. Next, a liquid curable material in which a curing agent is mixed is applied to the solid layer and the first substrate to have an appropriate thickness, and the curable material is cured by leaving it at a predetermined temperature for a long time. Then, the first substrate on which the curable material is cured is cut at a position where a discharge port is formed to expose the end face of the solid layer, and then the first substrate is immersed in a solvent that dissolves the solid layer, and the first substrate on which the curable material is cured is cut. A method of dissolving and removing the solid layer from the substrate No. 1 to provide a space for forming a flow path and a liquid chamber therein (JP-A-61-1).
5497, etc.).

(3) A positive-type or negative-type photosensitive dry film is attached to the first substrate provided with the energy generating element, and the pattern corresponding to the discharge port, the flow path and the liquid chamber in the photosensitive dry film. Is exposed or exposed to light and developed to provide a solid layer having a pattern corresponding to the discharge port, the flow path and the liquid chamber on the first substrate. Then, an active energy ray-curable material that is hardened by an active energy ray is applied on the solid layer and the first substrate to an appropriate thickness to provide a recess and a supply port for forming a part of the liquid chamber. The active energy ray transparent second substrate thus obtained is stuck on the active energy ray curable material so that a concave portion is aligned with a position where a liquid chamber is to be formed to form a laminated body. Then
The second substrate is masked so as to hide the portion of the active energy ray-curable material where the liquid chamber is to be formed, and the second substrate is masked.
The active energy ray-curable material is irradiated with the active energy ray through the substrate and cured. Next, the laminate in which the active energy ray-curable material is cured is cut at the position where the discharge port is formed to expose the end surface of the solid layer, and then the solid layer and the uncured active energy ray-curable material are dissolved. A method of immersing in a solvent to dissolve and remove the solid layer and the uncured active energy ray-curable material from the laminate to provide a space for forming a liquid flow path and a liquid chamber therein (JP-A-62-2534).
57, etc.).

[0007]

In the above-described conventional method of manufacturing each recording head, in the method of manufacturing a recording head of (1), the concave portion for forming the liquid chamber provided on the second substrate is enlarged. Although there is an advantage that it is possible to manufacture a recording head having a large liquid chamber suitable for high-speed recording, when the first substrate and the second substrate are bonded by an adhesive, the fineness of the first substrate is reduced. It is necessary to precisely align the energy generating element with the fine flow path of the second substrate, and when bonding with an adhesive, it is necessary to devise a method in which the adhesive does not flow into the fine flow path. There is a problem in that the device of (1) becomes complicated and expensive, lacks mass productivity, and raises the cost of the product.

In the method of manufacturing the recording head of (2),
Although there is an advantage of being able to solve the problem that occurs in the bonding of the first substrate and the second substrate as seen in the method of manufacturing the recording head of (1), the volume of the liquid chamber is above the first substrate. Since it is controlled to the same height as the thickness of the pattern-like solid layer provided in, it cannot be made too large, and since the process is complicated and time-consuming, and the number of processes is large, it is also lacking in mass productivity, There is a problem in that the cost of the product increases.

In the method of manufacturing a recording head of (3), the second method is used.
The advantage that a recording head having a large liquid chamber can be manufactured by enlarging a recess for forming another part of the liquid chamber provided on the substrate of (1) and the method of manufacturing a recording head of (1). Although it has an advantage of being able to solve the problem that occurs when bonding the first substrate and the second substrate as seen, the process is complicated and time-consuming as in the recording head manufacturing method of (2). Since the number of processes is even larger, there is still a problem that mass productivity is lacking, which causes an increase in product cost.

For the purpose of solving the above problems (1), (2) and (3), a manufacturing method utilizing a transfer molding method as shown in FIG. 5 has been proposed. In this conventional method, a positive-type or negative-type photosensitive dry film or the like that can be removed later is attached as the first solid layer 4 to the substrate 1 on which the ink ejection energy generating element 2 and the electrode 3 are provided. A pattern corresponding to the ejection port, the flow path and the liquid chamber of the photosensitive dry film (first solid layer 4) is exposed by exposing it with a mask, and the pattern is formed on the ejection port, the liquid flow path and the liquid chamber. A corresponding patterned first solid layer 4 is formed. Further thereon, a patterned second solid layer 5 corresponding to the liquid chamber is laminated and formed. Then, using other molds (upper mold 11 and lower mold 12) having cavities for molding the outer shape of the recording head and other functional parts (ink supply port 10 and the like), the mold resin 6 is sealed by the transfer molding method. Stop. Finally, both solid layers 4 and 5 are removed with an appropriate solvent or the like, and the discharge port,
A liquid flow path and a liquid chamber are completed to obtain an inkjet recording head.

However, in the conventional method shown in FIG. 5, since the mold abuts on the external extraction electrode 13 and the like during the molding, the dimensional accuracy of the mold is severely processed, and the thickness of the solid layer to be laminated is also large. Unless the accuracy of the thickness of the sheath is increased, the scratches of the external extraction electrode, the inflow of the mold resin onto the external extraction electrode, and the damage of the substrate are caused.

The present invention has been made to solve the problems of the prior art as described above, and does not require the step of precisely aligning and bonding two substrates, and the capacity can be reduced by a simple and small number of steps. Method for manufacturing an inexpensive ink jet recording head, which can form a large liquid chamber easily and accurately, has stable ink ejection characteristics, is precise and highly reliable, and is suitable for mass production, and an ink jet recording head produced by the method. And an inkjet recording apparatus including the recording head.

[0013]

According to a method of manufacturing an ink jet recording head of the present invention, at least a portion corresponding to an ink ejection port, an ink flow path and an ink liquid chamber on a substrate provided with an ink ejection energy generating element, A step of forming a solid layer made of a removable member; a step of molding a resin that covers at least the ink ejection port, the ink flow path, and the wall of the ink liquid chamber by covering the solid layer; In the method for manufacturing an inkjet recording head having a step of removing a solid layer, a solid layer made of a removable member is formed on an external extraction electrode, the molding step is performed, and the solid layer is removed after the molding. And a method of manufacturing an inkjet recording head.

The ink jet recording head of the present invention is the ink jet recording head manufactured by the method of the present invention.

Further, the recording apparatus of the present invention comprises the recording head of the present invention, which is provided with an ejection port for ejecting ink to the recording surface of the recording medium, and a member for mounting the head. It is a recording apparatus characterized by comprising at least.

[0016]

In the present invention, when the resin forming the ink discharge port, the ink flow path and the wall of the ink liquid chamber is molded, a solid layer made of a removable member is formed on the external extraction electrode, Make sure that the mold does not come into direct contact. The solid layer in this portion acts as a protective layer for the external extraction electrode and a layer that absorbs precision intersections such as the thickness of the mold and head substrate, and prevents inflow of mold resin and damage to the substrate. Further, by preventing these, restrictions on manufacturing conditions and mold manufacturing can be relaxed.

The present invention will be described in detail below with reference to the drawings.

FIG. 1 is a schematic sectional view illustrating a state where transfer molding is performed in the method of the present invention. In the embodiment shown in this figure, an upper mold 11 is obtained by forming the ink ejection energy generating element 2, the electrode 3, the first solid layer 4 and the second solid layer 5 at predetermined positions on the substrate 1. And a lower mold 12, and a resin (mold resin 6) for covering the solid layer is molded so as to form the ink ejection port, the ink flow path and the wall of the ink liquid chamber. Here, the coating of the solid layer is sufficient if the coating is performed so as to fulfill the functions of the above-mentioned respective constituent portions such as the flow path, and it is not always necessary to coat all portions of the solid layers 4 and 5. In the embodiment shown in this figure, the mold resin 6 is molded so as to cover the ink supply port 10 and leave the outer shape of the recording head. That is, the upper mold 11 includes a convex portion of a portion to be the ink supply port 10, and both molds have a cavity for forming an outer shape.

A first solid layer 4 and a second solid layer 5 are also provided on the external extraction electrode 13. By interposing the solid layers 4 and 5 in this portion between the substrate 1 and the upper mold 11, the inflow of the mold resin into the external extraction electrode 13 and the damage of the external extraction electrode 3'and the substrate are prevented. The external lead-out electrode 3'is an electrode portion for connecting to an external circuit board (wire bonding, general electrical mounting such as TAB). Therefore, the space above the external extraction electrode 13 is a space necessary for connection with an external circuit board, and can be said to be a non-molded portion in the sense that it is a place that should not be molded.

In the conventional method, as shown in FIG. 5, the solid layer was formed only to obtain the space portion constituting the recording head such as the ink flow path and the liquid chamber. However, in the present invention, the solid layer is formed on the external extraction electrode. The difference is that it is also formed on No. 13 (non-molded portion). Note that the solid layer does not necessarily have to be formed on the entire external extraction electrode on the substrate, and may be formed on only a part of the external extraction electrode if resin inflow and substrate damage can be prevented.

Further, in the embodiment shown in FIG. 1, the height of the portion corresponding to the ink ejection port and the ink flow path (that is, the first
The height of the portion corresponding to the ink liquid chamber (that is, the height of the second solid layer 5) is higher than the height of the solid layer 4). With such a configuration, there is an advantage that a larger liquid chamber can be formed. Further, in this aspect, since two types of solid layers, that is, the first solid layer 4 and the second solid layer 5, are used, there is an advantage that a large ink liquid chamber can be easily and satisfactorily formed. Further, the height of the solid layer on the external extraction electrode 13 is set to be the same as the height of the portion corresponding to the ink liquid chamber. If the thickness of the solid layer is set so that the line (parting line) where the mold contacts the solid layer is flat, the precision of the mold is easy to obtain, the mold production is easy, and good molding is possible. It will be possible.

This transfer molding method may be performed by an ordinary method. That is, the substrate 1 on which the first solid layer 4 and the second solid layer 5 are formed is placed on either the upper mold 11 or the lower mold 12 which is composed of a cavity having an appropriate runner, gate, and air bleeding structure. After inserting, clamp the mold. For example, when a thermosetting epoxy resin is used as the material of the mold resin 6, the resin preheating temperature 60
˜90 ° C., injection pressure 20 to 140 kgf / cm ² , mold temperature 100 to 180 ° C., holding pressure curing time 1 to 10 minutes, and post-curing after molding. For these conditions, moldability (shape, bubbles in resin, burr, flash, etc.) should be confirmed, and appropriate points should be set respectively. Generally, the higher the molding temperature, the shorter the curing time. Further, the higher the injection pressure, the more stable the shape and the less the generation of bubbles, but excessive pressure causes problems such as damage to the product, resin burr, and flash. Further, the post-curing does not necessarily have to be performed continuously with the molding, and may be performed at any time until the product is completed. Therefore, it can be performed at a convenient stage of the process. Of course, the above steps may be omitted depending on the usage state of the product.
Further, a releasing agent may be used in a mold or the like for the purpose of improving the releasability when the product is released from the mold after molding.

As the molding means for the molding resin 6, the transfer molding method is most suitable for the present invention in terms of mass productivity, accuracy, molding tact, and the like. However, other methods,
For example, a method such as injection molding, potting or casting may be used. As the material of the mold resin 6, various thermosetting resins and thermoplastic resins can be used. Also,
Depending on the molding means, a liquid resin that can be cured at room temperature, heat, or ultraviolet can be used. Specific examples include allyl resins, diallyl phthalate resins, silicone resins, polyester resins, phenol resins, melamine resins, acrylic resins, unsaturated polyester resins, polyurethane resins, polyimide resins and urea resins.

Next, referring to FIGS. 2 (a) to 2 (d),
The manufacturing process relating to the present invention will be described in sequence in order.

First, as illustrated in FIG. 2A, the substrate 1
The ink ejection energy generating element 2 and the electrode 3 are arranged on the top. As the substrate 1, for example, glass, ceramics, plastic, metal or the like can be used. However, as long as it functions as a part of a constituent member such as an ink flow path and can also function as a support for the solid layer, the shape of the substrate 1
The material and the like are not particularly limited.

The ink ejection energy generating elements 2 are arranged in a desired number on the substrate 1 in order to provide the ink liquid with energy for ejecting ink droplets.
An electrothermal conversion element, a piezoelectric element or the like can be used. When the electrothermal conversion element is used, the ink near the element is heated to generate ejection energy. When using a piezoelectric element, ejection energy is generated by mechanical vibration of this element.

The electrode 3 is connected to input a control signal for operating the ink ejection energy generating element 2, and for example, a semiconductor manufacturing process such as vapor deposition, sputtering, etching of a conductive material (aluminum or the like). It can be obtained by forming a film. In general, various functional layers such as a protective film layer may be provided for the purpose of improving the durability of the ink ejection energy generating element 2 and a part of the electrode 3. There is no problem in providing the functional layer.

Next, as shown in FIG. 2B, a removable first solid layer 4 is formed on the substrate 1 on which the ink ejection energy generating elements 2 and the like are arranged. The material of the first solid layer 4 is not particularly limited as long as it is removable. Further, the first solid layer 4 includes at least the ink ejection port,
It is a pattern-like layer provided on a portion corresponding to the ink flow path and the ink liquid chamber and on the external extraction electrode 13. Here, the portion corresponding to the ink liquid chamber is a liquid chamber equivalent portion of the entire ink liquid chamber, which is of the same height as the ink flow path. As a method of forming the first solid layer 4 in a pattern, for example, a positive or negative photosensitive resist is spinner-coated to a predetermined thickness on the substrate 1, or a positive or negative photosensitive resist is used. There is a method in which a photosensitive layer is formed by laminating a transparent dry film or the like with a laminator, and the pattern corresponding to the flow path and the liquid chamber and the pattern on the external extraction electrode are exposed or exposed by masking or exposing. However, the method of forming the first solid layer 5 in a pattern is not limited to this, and any method may be adopted as long as a desired pattern can be obtained.

In the present invention, when the main process for manufacturing the head is a process using a photolithography technique using a photoresist or a dry film, the fine portion of the recording head has a desired pattern and is extremely easy. Not only can it be formed, but it is also easy to simultaneously process a large number of recording heads having the same structure.

Then, as shown in FIG. 2 (c), a removable second solid layer 5 is formed on the substrate 1 on which the first solid layer 4 is formed. The material of the second solid layer 5 is not particularly limited as long as it is removable. The second solid layer 5 is a patterned layer provided at least on a portion corresponding to the ink liquid chamber and on the external extraction electrode 13. Here, the portion corresponding to the ink liquid chamber is
It is a portion corresponding to the liquid chamber of which the height is made higher than the ink flow path in the entire ink liquid chamber. As a method of forming the second solid layer 5 in a pattern, for example, there is a method of forming a solder resist in a pattern by screen printing. Further, for example, similarly to the method of forming the first solid layer 4, a photosensitive layer is formed again by spinner coating or a laminator, and a portion corresponding to the liquid chamber and a pattern on the external extraction electrode are masked or exposed and exposed. There is a method of developing. However, the method of forming the second solid layer 5 in a pattern is not limited to this, and any method can be used as long as it can form a desired pattern without deforming the first solid layer 4.
For example, various methods such as transfer and stamping methods can be adopted.

When a solid layer having the same property is formed by a simple method such as a screen printing method, the solid layer which is a post-process can be easily removed.

In the above embodiment, the solid layers 4 and 5 were formed in order, but the present invention is not limited to this, and it is also possible to form the solid layers 4 and 5. In this case, it is possible to use a positive resist.

Next, the transfer molding method as described above with reference to FIG. 1 is performed to cover the solid layers 4 and 5 so that at least the ink ejection port, the ink flow path, and the resin that becomes the wall of the ink liquid chamber are formed. To mold.

Then, as shown in FIG. 2 (d), the first solid layer 4 and the second solid layer 5 are removed, and the ink discharge port,
A space to be an ink flow path and an ink liquid chamber is formed. FIG. 3 is a schematic perspective view of the ink jet recording head thus obtained, that is, a schematic perspective view of FIG. As a method of removing the solid layers 4 and 5, for example, when the first solid layer 4 is a positive type dry film resist and the second solid layer 5 is a water-soluble solder resist, a caustic soda 5 wt% aqueous solution, or An organic solvent such as acetone can be used. As the solvent for this removal, any solvent other than those mentioned above can be used without limitation as long as it has selectivity with the mold resin. Further, since the ink ejection characteristics change depending on the length of the ink flow path, the vicinity of the ejection port may be cut at a predetermined position in order to determine the optimum position.

As shown in FIGS. 3 and 2D, the ink jet recording head obtained as described above has a space (ink ejection port 7, ink flow path 8) obtained by removing the first solid layer. , An ink liquid chamber 9) having the same height as the ink flow path,
A space obtained by removing the second solid layer (an ink liquid chamber 9 ′ whose height is higher than the ink flow path) is formed. Further, its outer shape is made of the mold resin 6, and the ink supply port 10 is also formed in the upper part.

In the example shown in FIG. 3, an ink jet recording head having three ejection ports is shown, but the same applies to a high density multi-array ink jet recording head having a larger number of ejection ports. .

The present invention provides excellent effects particularly in a recording head and a recording apparatus of the inkjet recording system for forming recording by forming jumping droplets by utilizing thermal energy among the inkjet recording systems. .

Regarding the typical structure and principle thereof, see, for example, US Pat. Nos. 4,723,129 and 4740.
No. 496, the present invention is preferably carried out using these basic principles. This recording method is applicable to both the so-called on-demand type and the continuous type.

To briefly explain this recording method, the electrothermal converter arranged corresponding to the sheet or liquid path holding the liquid (ink) is changed to the liquid (ink) corresponding to the recording information. Thermal energy is generated by applying at least one drive signal for overcoming the boiling phenomenon and for providing a rapid temperature rise that causes the boiling phenomenon, thereby causing film boiling on the heat acting surface of the recording head. In this way, bubbles can be formed in one-to-one correspondence with the drive signal applied from the liquid (ink) to the electrothermal converter, which is particularly effective for the on-demand recording method. By the growth and contraction of the bubbles, liquid (ink) is ejected through the ejection port,
Form at least one drop. When the drive signal has a pulse shape, the growth and contraction of the bubbles are immediately and appropriately performed, so that it is possible to achieve the ejection of the liquid (ink) with excellent responsiveness, which is more preferable. As the pulse-shaped drive signal, U.S. Pat. Nos. 4,463,359 and 4,345 are used.
Those as described in the '262 patent are suitable. If the conditions described in US Pat. No. 4,313,124 of the invention relating to the rate of temperature rise on the heat acting surface are adopted, more excellent recording can be performed.

The structure of the recording head is a combination of a discharge port, a liquid flow path, and an electrothermal converter as disclosed in the above-mentioned specifications (straight liquid flow path or right-angled liquid flow path).
In addition, as disclosed in U.S. Pat. No. 4,558,333 and U.S. Pat. No. 4,459,600, the present invention includes those having a configuration in which a heat acting portion is arranged in a bending region.

In addition, JP-A-59-123670 discloses a structure in which a common slit is used as a discharge port of the electrothermal converter for a plurality of electrothermal converters, and a pressure wave of thermal energy is absorbed. The present invention is also effective in a configuration based on Japanese Patent Application Laid-Open No. 59-138461, which discloses a configuration in which the opening corresponds to the ejection portion.

Further, as a recording head in which the present invention is effectively used, there is a full line type recording head having a length corresponding to the maximum width of the recording medium which can be recorded by the recording apparatus.
The full line head may be a full line configuration formed by combining a plurality of print heads as disclosed in the above specification, or may be a single full line print head integrally formed.

In addition, by being mounted on the apparatus main body, it can be electrically connected to the apparatus main body and can be supplied with ink from the apparatus main body by a replaceable chip type recording head or the recording head itself. The present invention is effective even in the case of using a cartridge type recording head that is provided specially.

Further, it is preferable to add recovery means for the recording head, preliminary auxiliary means, etc. to the recording apparatus of the present invention because the recording apparatus of the present invention can be made more stable. Specifically, the recording head is preheated by a capping means, a cleaning means, a pressure or suction means, an electrothermal converter or a heating element other than this, or a combination thereof. It is also effective to perform stable recording by adding a means for performing a preliminary ejection mode for performing ejection different from the means and recording.

Further, the recording mode of the recording apparatus is not limited to the mode in which only the mainstream color such as black is recorded, and either the recording head may be integrally formed or a plurality of combinations may be used. However, the present invention is extremely effective for an apparatus provided with at least one of a multicolor of different colors or a full color by color mixing.

Although the above-described embodiments of the present invention have been described using liquid ink, in the present invention, either ink that is solid at room temperature or ink that softens at room temperature is used. Can be used. In the above-mentioned inkjet device, the temperature of the ink itself is generally adjusted within the range of 30 ° C. or higher and 70 ° C. or lower to control the temperature of the ink so that the viscosity of the ink is within the stable ejection range. Any liquid may be used as long as the ink is liquid.

In addition, the excessive temperature rise of the head or ink due to thermal energy is positively prevented by using it as the energy of the state change of the ink from the solid state to the liquid state, or the evaporation of the ink is prevented. It is also possible to use an ink that solidifies when left as it is. In any case, liquefaction occurs only when heat energy is applied, such as when the ink is liquefied by applying heat energy according to the recording signal and ejected as an ink liquid, or when it begins to solidify when it reaches the recording medium. The use of an ink having such a property is also applicable to the present invention.

Such an ink is disclosed in JP-A-54-568.
No. 47 or Japanese Patent Laid-Open No. 60-71260, facing the electrothermal converter in the state of being held as a liquid or solid in the recesses or through holes of the porous sheet. It may be in the form.

In the present invention, the most effective one for each of the above-mentioned inks is to execute the above-mentioned film boiling method.

FIG. 4 is an external perspective view showing an example of an ink jet recording apparatus (IJRA) in which the recording head obtained by the present invention is mounted as an ink jet head cartridge (IJC).

In the figure, reference numeral 20 denotes an ink jet head cartridge provided with a group of nozzles for ejecting ink so as to face the recording surface of the recording paper fed onto the platen 24.
(IJC). 16 is a carriage H that holds the IJC 20
C, which is connected to a part of the drive belt 18 that transmits the driving force of the drive motor 17 and is slidable with the two guide shafts 19A and 19B arranged in parallel to each other, so that the IJC 20 It is possible to move back and forth over the entire width of the recording paper.

Reference numeral 26 is a head recovery device, which is arranged at one end of the movement path of the IJC 20, for example, at a position facing the home position. The head recovery device 26 is operated by the driving force of the motor 22 via the transmission mechanism 23, and the IJC 2
0 capping is performed. In association with the capping of the IJC 20 by the cap portion 26A of the head recovery device 26, ink is sucked by an appropriate suction device provided in the head recovery device 26 or an appropriate pressure device provided in an ink supply path to the IJC 20. Ink ejection is performed by forcibly ejecting the ink from the ejection port to remove the thickened ink in the nozzle and perform the ejection recovery process.
In addition, IJ can be set by capping at the end of recording.
C is protected.

Reference numeral 30 denotes a blade as a wiping member which is arranged on the side surface of the head recovery device 26 and is made of silicon rubber. The blade 30 is a blade holding member 3
The head recovery device 2 is held at 0A in a cantilever form.
Similar to 6, it is operated by the motor 22 and the conduction mechanism 23, and can be engaged with the ejection surface of the IJC 20. As a result, at the appropriate timing in the recording operation of the IJC 20,
Alternatively, after the ejection recovery process using the head recovery device 26, the blade 30 is projected into the movement path of the IJC 20,
This removes dew condensation, wetting, dust, or the like on the ejection surface of the IJC 20 as the IJC 20 moves.

[0054]

EXAMPLES The present invention will be described more concretely with reference to the following examples.

Example 1 FIG. 1 and FIG. 2 (a)-
According to the process shown in (d), a recording head is manufactured as follows.
did. A silicon wafer is used for the substrate 1 and
Is the electrothermal converter 2 (material HfB₂ Consisting of a heater)
And the electrode 3 (material A1) corresponding to the electrothermal converter 2
It was in a state of being lined up at a predetermined interval. Also shown
However, for the purpose of improving durability, each electrode 3, each
A protective film (SiO 2) is formed on the surface including the electrothermal converter 2. ₂ , Ta)
Which various functional layers are provided.

Then, a positive resist is spinner-coated on the substrate 1 to a predetermined thickness, and exposed through an ink flow path facing each electrothermal converter 2, a liquid chamber and a pattern mask on the external extraction electrode. By developing, the first solid layer 4 having a thickness of about 30 μm was formed.

Then, a second solid layer was formed by the screen printing method. As the screen printing plate, one provided with a part corresponding to a part to be a liquid chamber and a pattern on an external extraction electrode was used, and as a resist, a water-soluble solder resist (manufactured by San Nopco, trade name TC-564) was used.
S-SN) was used. The total thickness of the first solid layer 4 and the second solid layer 5 (that is, the height of the liquid chamber) is about 100 μm.
(The error is about ± 5 μm).

Then, the substrate on which the second solid layer had been formed was placed in a transfer mold molding machine to perform molding. The molding conditions at this time are as follows.

Mold resin 6: thermosetting epoxy resin Preheating temperature of resin: 70 ° C. Injection pressure: 150 kgf / cm ² Mold temperature during molding: 140 ° C. Holding cure time: 5 minutes Post cure.

Then, the discharge portion is cut to a predetermined ink flow path length by a known dicing method for cutting a wafer,
The discharge port surface was obtained. Then, solid layers 4 and 5 were removed using a 5% by weight aqueous solution of caustic soda. The number of ink flow paths 8 is 64, and the size of the liquid chamber is 5 mm × 5 mm.

When ink jet recording heads were continuously manufactured as described above, all were good without molding defects.

<Example 2> An ink jet recording head was produced in the same manner as in Example 1 except that the error in the thickness of the second solid layer was adjusted to about ± 20 µm to increase the variation. Good results were obtained.

<Comparative Example 1> An ink jet recording head was manufactured in the same manner as in Example 1 except that the solid layers 4 and 5 were not formed on the external extraction electrode 13 and the inkjet recording head was manufactured. Inflow of the mold resin into the resin and damage to the substrate and the like resulted in a non-defective rate of 50% or less.

[0064]

According to the present invention described above, the effects listed below can be obtained.

(1) In the molding method using a mold such as the transfer molding method, the solid layer on the external extraction electrode prevents the inflow of the molding resin, the damage of the electrode and the substrate, etc. At the same time, the mold is not required to have a complicated shape or a strict dimensional tolerance, and the constraints on the mold fabrication are alleviated, and the constraints on the manufacturing conditions such as the accuracy of the solid layer are alleviated.

(2) A recording head having excellent adhesiveness to substrates, strength, heat resistance, etc. can be easily and easily manufactured by a simple and small number of steps without the step of precisely aligning and bonding two substrates. It can be manufactured at low cost. Therefore,
A method of manufacturing an inexpensive inkjet recording head, which has stable ink ejection characteristics, is highly accurate and reliable, and is suitable for mass production.

(3) Further, in the present invention, if the height of the solid layer on the external extraction electrode is made the same as the height of the portion corresponding to the ink liquid chamber, the parting line becomes flat and the mold The accuracy is easy to obtain, the mold production is easy,
Good molding is possible.

(4) In the present invention, further, if the solid layer is formed so that the height of the portion corresponding to the ink liquid chamber is higher than the height of the portion corresponding to the ink discharge port and the ink flow path, it is easy. In addition, the volume of the ink liquid chamber can be satisfactorily increased. By enlarging the liquid chamber for temporarily storing the ink, the ink can be stably supplied and stable ink ejection can be obtained even in the case of the recording head having a particularly large number of ejection ports. Along with this, an ink jet recording head of high density multi-array can be obtained with good yield regardless of the number of ejection ports.

[Brief description of drawings]

FIG. 1 is a schematic cross-sectional view illustrating a state where transfer molding is performed in the method of the present invention.

2A to 2D are schematic cross-sectional views sequentially illustrating the manufacturing steps related to the method of the present invention.

FIG. 3 is a schematic perspective view of an inkjet recording head obtained by the method of the present invention.

FIG. 4 is a schematic perspective view illustrating an inkjet recording device of the present invention.

FIG. 5 is a schematic cross-sectional view illustrating a state where transfer molding is performed according to a conventional method.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Substrate 2 Ink ejection energy generating element 3, 3'electrode 4 First solid layer 5 Second solid layer 6 Mold resin 7 Ink ejection port 8 Ink flow channel 9 Ink liquid chamber of the same height as the ink flow channel 9'Ink liquid chamber corresponding to a height higher than the ink flow path 10 Ink supply port 11 Upper mold 12 Lower mold 13 External extraction electrode (non-molded part) 16 Carriage 17 Drive motor 18 Drive belt 19A, 19B Guide shaft 20 inkjet head cartridge 22 cleaning motor 23 conduction mechanism 24 platen 26 cap member 30 blade 30A blade holding member

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Claims (9)

[Claims] 1. A step of forming a solid layer made of a removable member on at least a portion corresponding to an ink ejection port, an ink flow path, and an ink liquid chamber on a substrate provided with an ink ejection energy generating element, In a method for manufacturing an ink jet recording head, which includes a step of molding a resin that forms at least the ink discharge port, an ink flow path, and a wall portion of an ink liquid chamber by covering a solid layer, and a step of removing the solid layer, A method for manufacturing an ink jet recording head, wherein a solid layer made of a removable member is formed also on the external extraction electrode, the molding step is performed, and the solid layer is removed after the molding. 2. The method for manufacturing an ink jet recording head according to claim 1, wherein the height of the portion corresponding to the ink liquid chamber is higher than the height of the portion corresponding to the ink discharge port and the ink flow path of the solid layer. 3. A solid layer formed in a portion corresponding to the ink ejection port, the ink flow path, and the ink liquid chamber comprises a first solid layer and a second solid layer, and the first solid layer is the above-mentioned solid layer. The second solid layer is a layer formed in a portion corresponding to the ink discharge port, the ink flow path, and the ink liquid chamber, and the second solid layer is formed on the first solid layer in order to increase the height of the ink liquid chamber. 3. The method for manufacturing an inkjet recording head according to claim 2, wherein the layer is further formed in a portion corresponding to the ink liquid chamber. 4. The method of manufacturing an ink jet recording head according to claim 2, wherein the height of the solid layer on the external extraction electrode is the same as the height of the portion corresponding to the ink liquid chamber. 5. The method for manufacturing an ink jet recording head according to claim 1, wherein the molding is performed by a transfer molding method. 6. The ink ejection energy generating element,
6. The method for manufacturing an ink jet recording head according to any one of 1 to 5, which is an electrothermal converter for generating heat by applying electric energy, causing a change in the state of ink, and discharging the ink. 7. The ink jet recording head according to claim 1, wherein the recording head is a full-line type in which a plurality of ink ejection openings are provided over the entire width of a recording area of a recording medium. Production method. 8. An ink jet recording head manufactured by the method according to claim 1. 9. The recording head according to claim 8, wherein the recording head has a discharge port for discharging ink to the recording surface of the recording medium, and a member for mounting the recording head. A recording device characterized by.