JPH07134300A - Reflective liquid crystal display - Google Patents
Reflective liquid crystal displayInfo
- Publication number
- JPH07134300A JPH07134300A JP28125693A JP28125693A JPH07134300A JP H07134300 A JPH07134300 A JP H07134300A JP 28125693 A JP28125693 A JP 28125693A JP 28125693 A JP28125693 A JP 28125693A JP H07134300 A JPH07134300 A JP H07134300A
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- crystal display
- metal
- display device
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
(57)【要約】
【目的】 明るい画面表示が可能で、表示欠陥が生じ難
く、信頼性に優れた反射型液晶表示装置を提供するこ
と。
【構成】 光反射性の金属電極12を有する背面電極板1
と、この背面電極板に対向して配置されかつ透明電極22
をを有する観察者側電極板2と、これ等両電極板間に封
入された液晶物質4とを備える反射型液晶表示装置であ
って、上記金属電極12が銀より酸化され易い金属(例え
ばMg)を含有する銀合金薄膜から成ることを特徴とす
る。そして、上記銀合金の薄膜は銀単体の薄膜に較べて
背面電極板を構成するガラス基板との密着性が良好で、
かつ加熱作用によりその凝集が起こり難く、しかも硬度
が高いため反射型液晶表示装置の組み立て工程や装置駆
動中において金属電極の損傷や基板からの剥離を未然に
防止することが可能となる。従って、目的とする上記反
射型液晶表示装置を提供できる。
(57) [Abstract] [Purpose] To provide a reflective liquid crystal display device capable of displaying a bright screen, hardly causing a display defect, and excellent in reliability. [Structure] Back electrode plate 1 having light-reflecting metal electrode 12
And the transparent electrode 22 which is arranged facing the back electrode plate.
1. A reflective liquid crystal display device comprising an observer-side electrode plate 2 having: and a liquid crystal substance 4 enclosed between these electrode plates, wherein the metal electrode 12 is a metal that is more easily oxidized than silver (for example, Mg. ) Containing a silver alloy thin film. And the thin film of the silver alloy has better adhesion to the glass substrate that constitutes the back electrode plate than the thin film of silver alone,
In addition, since the agglomeration is less likely to occur due to the heating action and the hardness is high, it is possible to prevent damage to the metal electrode and peeling from the substrate during the assembly process of the reflective liquid crystal display device and the driving of the device. Therefore, the target reflective liquid crystal display device can be provided.
Description
【0001】[0001]
【産業上の利用分野】本発明は、画面観察者とは反対側
に位置する背面電極板に光反射性の金属電極を有する反
射型液晶表示装置に係り、特に明るい画面表示が可能で
かつ表示欠陥が生じ難く、しかも信頼性に優れた反射型
液晶表示装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a reflective liquid crystal display device having a light-reflective metal electrode on a back electrode plate located on the side opposite to a screen observer, and particularly capable of displaying a bright screen. The present invention relates to a reflective liquid crystal display device which is less likely to cause defects and has excellent reliability.
【0002】[0002]
【従来の技術】液晶表示装置は、一般に、電極が配設さ
れた一対の電極板と、これ等電極板間に封入された液晶
物質とでその主要部が構成され、上記電極間に電圧を印
加することにより液晶物質の配向状態を変化させてこの
液晶物質を透過する光の偏光面を制御すると共に、偏光
フィルムによりその透過・不透過を制御して画面表示を
行うものである。そして、この種の液晶表示装置として
は、上記背面電極板の裏面若しくは側面に光源(ラン
プ)を配置し、背面電極板側から光線を入射させるバッ
クライト型あるいはライトガイド型のランプ内蔵式透過
型液晶表示装置が広く普及している。2. Description of the Related Art Generally, a liquid crystal display device comprises a pair of electrode plates on which electrodes are arranged and a liquid crystal substance enclosed between the electrode plates, the main part of which is used to apply a voltage between the electrodes. By applying the voltage, the alignment state of the liquid crystal substance is changed to control the plane of polarization of the light transmitted through the liquid crystal substance, and at the same time, the polarizing film controls the transmission / non-transmission of the liquid crystal substance to perform screen display. As a liquid crystal display device of this type, a light source (lamp) is arranged on the back surface or the side surface of the back electrode plate, and a backlight type or light guide type transmissive type with a built-in lamp in which light rays are incident from the back electrode plate side. Liquid crystal display devices are widely used.
【0003】しかし、ランプ内蔵式透過型液晶表示装置
においては、そのランプによる消費電力が大きくCRT
やプラズマディスプレイ等他の種類のディスプレイと略
同等の電力を消費するため、液晶表示装置本来の低消費
電力といった特徴を損ない、また、携帯先での長時間の
利用が困難となるという欠点を有していた。However, in a transmissive liquid crystal display device with a built-in lamp, the power consumption of the lamp is large and the CRT is large.
Since it consumes almost the same amount of power as other types of displays such as a plasma display and a plasma display, it has the drawback that the original low power consumption of the liquid crystal display device is impaired and that it becomes difficult to use it for a long time at the destination. Was.
【0004】他方、このようなランプを内蔵することな
く、装置の観察者側に位置する電極板(観察者側電極板
と称する)から室内光や自然光等の外光を入射させ、か
つ、この入射光を上記背面電極板に設けられた光反射材
で反射させると共に、この反射光で画面表示する反射型
液晶表示装置も知られている。そして、この反射型液晶
表示装置ではランプを利用しないことから消費電力が小
さく、携帯先での長時間駆動に耐えるという利点を有し
ている。On the other hand, without incorporating such a lamp, outside light such as room light or natural light is made incident from an electrode plate (referred to as an observer-side electrode plate) located on the observer side of the apparatus, and There is also known a reflection type liquid crystal display device in which incident light is reflected by a light reflecting material provided on the back electrode plate and a screen is displayed by this reflected light. In addition, this reflective liquid crystal display device has advantages that it consumes less power because it does not use a lamp and can withstand long-time driving at a portable location.
【0005】このような反射型液晶表示装置として、例
えば、図4に示すように背面電極板aの裏面に金属反射
板a3を設けたもの、あるいは、図5に示すように背面
電極板aの電極a2を光反射性の金属薄膜で構成しこの
電極a2により入射光を反射させて画面表示するもの等
が知られているが、図4に示された反射型液晶表示装置
においては液晶物質cによって構成された表示画面が上
記金属反射板a3に映って虚像を生じ二重に観察される
という欠点があるため、このような欠点を有さない図5
に示された反射型液晶表示装置が主流を占めている。
尚、図4〜5中、bは観察者側電極板、cは液晶物質、
dは偏光フィルム、eは背面電極板aと観察者側電極板
bとを周辺部で一体化させるシール材を示している。As such a reflection type liquid crystal display device, for example, as shown in FIG. 4, a metal reflection plate a3 is provided on the back surface of the back electrode plate a, or as shown in FIG. It is known that the electrode a2 is made of a light-reflective metal thin film and incident light is reflected by the electrode a2 to display a screen. In the reflection type liquid crystal display device shown in FIG. The display screen constituted by the above has a drawback that it is reflected on the metal reflection plate a3 to form a virtual image and is double observed.
The reflection type liquid crystal display device shown in FIG.
4 to 5, b is a viewer-side electrode plate, c is a liquid crystal substance,
Reference numeral d denotes a polarizing film, and reference numeral e denotes a sealing material that integrates the back electrode plate a and the observer-side electrode plate b in the peripheral portion.
【0006】[0006]
【発明が解決しようとする課題】ところで、図5の反射
型液晶表示装置に組込まれる光反射性の金属電極a2と
しては、従来、安価で光反射率に優れたアルミニウム薄
膜が広く利用されているが、アルミニウム薄膜は水分や
塩基により酸化され易くこの酸化に伴い光反射性能が低
下して経時的に表示欠陥を引起こし易いため、近年、水
分や塩基に対し高い耐性を有する銀薄膜が上記金属電極
a2として利用されている。By the way, as the light-reflective metal electrode a2 incorporated in the reflection type liquid crystal display device of FIG. 5, an aluminum thin film which is inexpensive and has excellent light reflectance has been widely used. However, the aluminum thin film is easily oxidized by moisture or a base, and the light reflection performance is deteriorated due to this oxidation, and a display defect is likely to occur with time. It is used as the electrode a2.
【0007】しかし、アルミニウム薄膜に代えて銀薄膜
を適用した場合にも以下に示すような問題点を有してお
り未だ改善の余地を有していた。However, even when a silver thin film is applied instead of the aluminum thin film, there are the following problems and there is still room for improvement.
【0008】まず、背面電極板を構成する基板に対して
上記銀薄膜は密着性が良好でなく、液晶表示装置の組み
立て工程や装置駆動中において銀薄膜が基板から剥離し
易い問題があり、かつ、銀薄膜は硬度が余り高くないた
め液晶表示装置の組み立て工程の際にその表面に物理的
な力が作用すると損傷され易い問題があった。First, the adhesion of the silver thin film to the substrate constituting the back electrode plate is not good, and there is a problem that the silver thin film easily peels off from the substrate during the process of assembling the liquid crystal display device or driving the device, and However, since the hardness of the silver thin film is not so high, there is a problem that the surface of the silver thin film is easily damaged when a physical force acts on its surface during the assembly process of the liquid crystal display.
【0009】更に、液晶表示装置の組立て時における熱
処理工程(例えば、背面電極板aと観察者側電極板bと
をシール材eを介して重ね合わせ、200〜300℃に
加熱加圧して一体化する工程、あるいは、液晶を安定し
て配向させるためその配向膜を200〜300℃で熱処
理する工程)の際、その加熱作用により銀薄膜が球状に
凝集し易くこの凝集により銀薄膜表面に凹凸が形成され
てその反射性能を損ない易い問題点を有していた。Further, a heat treatment step in assembling the liquid crystal display device (for example, a back electrode plate a and an observer side electrode plate b are overlapped with each other with a sealing material e interposed therebetween, and heated and pressurized at 200 to 300 ° C. to be integrated. During the heating step, or in the step of heat-treating the alignment film at 200 to 300 ° C. to stably align the liquid crystal), the silver thin film is likely to be spherically aggregated by the heating action, and this aggregation causes unevenness on the silver thin film surface. It has a problem that it is easily formed and impairs its reflection performance.
【0010】本発明はこのような問題点に着目してなさ
れたもので、その課題とするところは、液晶表示装置の
組み立て工程や装置駆動中において金属電極の剥離や損
傷が起こり難く、長期に亘って明るい画面表示が可能で
かつ表示欠陥が起こり難い反射型液晶表示装置を提供す
ることにある。The present invention has been made by paying attention to such a problem, and its problem is that the metal electrode is less likely to be peeled off or damaged during the assembly process of the liquid crystal display device or during the driving of the device. It is an object of the present invention to provide a reflective liquid crystal display device capable of displaying a bright screen over the entire length and in which display defects hardly occur.
【0011】[0011]
【課題を解決するための手段】すなわち、請求項1に係
る発明は、光反射性の金属電極を有する背面電極板と、
この背面電極板に対向して配置されかつ透明電極を有す
る観察者側電極板と、これ等両電極板間に封入された液
晶物質とを備え、上記金属電極と透明電極との間に電圧
を印加して液晶物質を駆動させ画面表示する反射型液晶
表示装置を前提とし、上記光反射性の金属電極が、銀よ
り酸化され易い金属を含有する銀合金の薄膜にて構成さ
れていることを特徴とするものである。That is, the invention according to claim 1 is a back electrode plate having a light-reflecting metal electrode,
An observer-side electrode plate having a transparent electrode arranged opposite to the back electrode plate and a liquid crystal substance enclosed between the two electrode plates are provided, and a voltage is applied between the metal electrode and the transparent electrode. On the premise of a reflective liquid crystal display device in which a liquid crystal substance is applied to drive a liquid crystal substance to display a screen, the light reflective metal electrode is composed of a thin film of a silver alloy containing a metal that is more easily oxidized than silver. It is a feature.
【0012】そして、銀より酸化され易い金属が含まれ
た銀合金の薄膜は、銀単体の薄膜に較べて基板との密着
性が良好で、かつ、加熱作用により凝集が起こり難く、
しかも硬度も高いため、光反射性の金属電極を上記銀合
金で構成した場合、液晶表示装置の組み立て工程や装置
駆動中において上記金属電極の剥離や損傷が起こり難く
なる。A thin film of a silver alloy containing a metal that is more easily oxidized than silver has better adhesion to a substrate than a thin film of silver alone, and is less likely to aggregate due to heating.
Moreover, since the light-reflecting metal electrode is made of the above silver alloy, the metal electrode is less likely to be peeled off or damaged during the assembly process of the liquid crystal display device or during the driving of the device because of its high hardness.
【0013】従って、明るい画面表示が可能でかつ表示
欠陥が生じ難くしかも信頼性に優れた反射型液晶表示装
置を提供することが可能となる。Therefore, it is possible to provide a reflective liquid crystal display device capable of displaying a bright screen, hardly causing a display defect, and excellent in reliability.
【0014】このような技術的手段において銀より酸化
され易い金属とは、銀に比較して酸素原子と結合し易く
その結合エネルギーが高い金属をいい、従ってこのよう
な金属は、一般に、金属の電子親和力(電子親和力がよ
り小さい方がカチオンになり易く、酸素アニオンと結合
し易い)、電気陰性度、仕事関数、イオン化ポテンシャ
ル等によって判断できる。また、金属原子と酸素原子と
の結合エネルギーが高いためその金属酸化物の融点が高
くなる。そして、このような金属が含まれた銀合金は、
この合金中に微量に含まれる金属酸化物や金属イオンに
よって基板に対し強い結合力を発揮する。例えば、基板
がガラスから成る場合には、このガラス基板表面の酸素
アニオンと上記金属酸化物又は金属イオンが強い結合力
で結合する。このような金属としては、例えば、マグネ
シウム、アルミニウム、チタン、ジルコニウム、及び、
ハフニウムが使用でき、かつ、これ等金属の二種類以上
を上記薄膜中に含有させてもよい。請求項2に係る発明
は上記金属を特定した発明に関する。The metal that is more easily oxidized than silver in such technical means is a metal that is more likely to bond with an oxygen atom and has a higher binding energy than silver, and therefore such a metal is generally a metal. It can be judged by the electron affinity (the smaller the electron affinity is, the more easily it becomes a cation and the more easily it binds to the oxygen anion), electronegativity, work function, ionization potential and the like. Further, since the binding energy between the metal atom and the oxygen atom is high, the melting point of the metal oxide is high. And a silver alloy containing such a metal,
The metal oxide and metal ions contained in a small amount in this alloy exert a strong bonding force with respect to the substrate. For example, when the substrate is made of glass, the oxygen anion on the surface of the glass substrate and the metal oxide or metal ion are bonded with a strong bonding force. Examples of such a metal include magnesium, aluminum, titanium, zirconium, and
Hafnium can be used, and two or more kinds of these metals may be contained in the thin film. The invention according to claim 2 relates to the invention in which the above metal is specified.
【0015】すなわち、請求項2に係る発明は、請求項
1記載の発明に係る反射型液晶表示装置を前提とし、銀
より酸化され易い金属が、マグネシウム、アルミニウ
ム、チタン、ジルコニウム及びハフニウムの内から選択
された一又は二種類以上の金属から成ることを特徴とす
るものである。That is, the invention according to claim 2 is premised on the reflective liquid crystal display device according to claim 1, and the metal that is more easily oxidized than silver is selected from magnesium, aluminum, titanium, zirconium and hafnium. It is characterized by being composed of one or more selected metals.
【0016】尚、基板との密着力を十分に向上させるた
めには金属電極を構成する銀合金中に銀より酸化され易
い上記金属を0.5atm %以上含有することが好まし
く、また、熱処理時における凝集をより確実に防止する
ためには2atm %以上含有することが望ましい。また、
上記金属がマグネシウム、アルミニウム、又はこの両者
である場合には、これ等金属の添加量の増加に伴い上記
銀合金の耐性が低下して水分や塩基による酸化が起こり
易くなるため、金属電極を構成する銀合金中の上記金属
含有率は30atm %以下にとどめることが望ましい。他
方、上記金属がチタン又はチタンを含む二種類以上の金
属である場合には、これ等金属の添加量の増加に伴い上
記銀合金の耐食性が高くなり過ぎてそのエッチングが困
難となり、電極パターンの加工精度が低下する恐れがあ
るため、金属電極を構成する銀合金中の上記金属含有率
は50atm %以下にとどめることが望ましい。請求項3
及び4に係る発明はこのような技術的理由に基づいてな
されたものである。In order to sufficiently improve the adhesion with the substrate, it is preferable that the silver alloy forming the metal electrode contains 0.5 atm% or more of the above-mentioned metal which is more easily oxidized than silver. In order to more surely prevent the agglomeration in (2), it is preferable to contain 2 atm% or more. Also,
When the metal is magnesium, aluminum, or both of them, the resistance of the silver alloy decreases with an increase in the amount of addition of these metals, and oxidation due to water or a base easily occurs. It is desirable that the content of the above metal in the silver alloy is 30 atm% or less. On the other hand, when the metal is titanium or two or more kinds of metals containing titanium, the corrosion resistance of the silver alloy becomes too high with the increase of the addition amount of these metals, which makes etching difficult, and Since the processing accuracy may be deteriorated, it is desirable that the metal content in the silver alloy forming the metal electrode is 50 atm% or less. Claim 3
The inventions according to 4 and 4 have been made based on such technical reasons.
【0017】すなわち、請求項3に係る発明は、請求項
2記載の発明に係る反射型液晶表示装置を前提とし、銀
より酸化され易い金属が、マグネシウム及びアルミニウ
ムから選択された一又は二種類の金属から成り、かつ、
光反射性の金属電極が上記金属を0.5〜30atm %含
有する銀合金の薄膜にて構成されることを特徴とするも
のであり、また、請求項4に係る発明は、請求項2記載
の発明に係る反射型液晶表示装置を前提とし、銀より酸
化され易い金属が、チタン又はチタンを含む二種類以上
の金属から成り、光反射性の金属電極が上記金属を0.
5〜50atm %含有する銀合金の薄膜にて構成されるこ
とを特徴とするものである。That is, the invention according to claim 3 is premised on the reflective liquid crystal display device according to claim 2, and the metal that is more easily oxidized than silver is one or two kinds selected from magnesium and aluminum. Made of metal, and
The light-reflective metal electrode is composed of a thin film of a silver alloy containing 0.5 to 30 atm% of the metal, and the invention according to claim 4 is the invention according to claim 2. On the premise of the reflective liquid crystal display device according to the present invention, the metal that is more easily oxidized than silver is titanium or two or more kinds of metals containing titanium, and the light-reflective metal electrode has the above-mentioned metal.
It is characterized by being composed of a thin film of a silver alloy containing 5 to 50 atm%.
【0018】尚、上記光反射性の金属電極の硬度を更に
向上させて傷付きを防止するため、上記銀合金中に他の
元素を微量含有させてもよい。このような元素として
は、例えば、V、Nb、Ta、Cr、Mo、W、Mn、
Fe、Ni、Co、Cu、及び、Zn等の金属元素が挙
げられる。また、Si、P、Bi、Sb等の非金属元素
を添加してもよい。In order to further improve the hardness of the light-reflecting metal electrode and prevent scratches, a small amount of another element may be contained in the silver alloy. Examples of such elements include V, Nb, Ta, Cr, Mo, W, Mn,
Metal elements such as Fe, Ni, Co, Cu, and Zn are listed. Moreover, you may add nonmetallic elements, such as Si, P, Bi, and Sb.
【0019】次に、光反射性の上記金属電極は、背面電
極板の基板上に上記金属電極と同一の組成を有する銀合
金の薄膜を成膜し、周知のフォトリソプロセスに従って
上記薄膜をパターニングすることにより形成することが
できる。そして、上記薄膜を成膜する方法としては、例
えば、この薄膜と同一の組成を有する銀合金をターゲッ
トとしてスパッタリングする方法、あるいは、上記銀合
金を蒸着源として真空蒸着する方法等が挙げられる。ま
た、銀とこれより酸化され易い金属とを交互に(例え
ば、ストライプ状又は同心円状)に配置したり、銀の上
に部分的に銀より酸化され易い上記金属を載置したりす
ることにより、銀と上記金属の双方をそれぞれ部分的に
表面に露出させてターゲットとしスパッタリングするこ
とにより上記銀合金の薄膜を成膜することが可能であ
る。この場合、成膜される薄膜の組成は銀の露出面積と
上記金属の露出面積との比に依存する。また、イオンプ
レーティングにより成膜することも可能である。Next, for the light-reflecting metal electrode, a thin film of a silver alloy having the same composition as the metal electrode is formed on the substrate of the back electrode plate, and the thin film is patterned by a well-known photolithography process. Can be formed. Examples of the method of forming the thin film include a method of sputtering a silver alloy having the same composition as the thin film as a target, a method of vacuum vapor deposition using the silver alloy as a vapor deposition source, and the like. Further, by alternately arranging silver and a metal that is more easily oxidized than that (for example, in a stripe shape or a concentric circle), or by placing the above-mentioned metal that is partially oxidized more easily than silver on silver. It is possible to form a thin film of the above silver alloy by partially exposing both the silver and the above metal on the surface and using them as targets for sputtering. In this case, the composition of the formed thin film depends on the ratio of the exposed area of silver to the exposed area of the metal. It is also possible to form a film by ion plating.
【0020】また、銀合金の薄膜が成膜されかつ背面電
極板を構成する基板としては、例えばガラス基板が挙げ
られる。また、この他、プラスチックフィルム、プラス
チックボード等の適用も可能である。この基板は透明に
限らず、黒色、白色、その他の色に着色したものであっ
てもよい。基板として黒色のものを使用する場合には、
液晶表示装置の画素と画素との間隙部位(画素間部位)
に遮光膜を形成することなく上記金属電極が存在しない
部位に入射した光線の反射を防止して表示画面のコント
ラストの向上を図ることが可能になる。また、液晶表示
装置が、室内光の多い明るい部屋で使用するときには上
記室内光を利用して画面表示を行うと共に、この室内光
が不足する暗い部屋で使用するときに備えて装置内部に
ランプを内蔵する半透過形の反射型液晶表示装置の場合
には、透明な基板を利用することが望ましい。The substrate on which the thin film of silver alloy is formed and which constitutes the back electrode plate is, for example, a glass substrate. In addition to these, it is also possible to apply a plastic film, a plastic board, or the like. This substrate is not limited to being transparent, but may be colored in black, white, or another color. When using the black one as the substrate,
Liquid crystal display device pixel-to-pixel gap area (inter-pixel area)
It is possible to improve the contrast of the display screen by preventing the reflection of the light rays incident on the portion where the metal electrode does not exist without forming the light shielding film. Further, when the liquid crystal display device is used in a bright room with a lot of room light, the above-mentioned room light is used for screen display, and a lamp is provided inside the device for use in a dark room where the room light is insufficient. In the case of a built-in transflective liquid crystal display device, it is desirable to use a transparent substrate.
【0021】また、上記基板上に銀合金の薄膜を成膜す
るに先立って、この薄膜と基板との密着力を向上させる
処理を基板表面に施すこともできる。このような表面処
理としては、例えば、紫外線照射、プラズマ処理が挙げ
られる。また、上記密着力を向上させるため、銀合金の
薄膜を成膜するに先立って、基板上にクロム薄膜やIT
O薄膜を成膜することもできる。そして、ITO薄膜を
成膜した場合には、このITO薄膜が透明でしかも導電
性を有するため、このITO薄膜をストライプ状にパタ
ーニングすると共に上記薄膜を矩形状の画素パターンに
パターニングすることにより、この画素以外の部位に遮
光層を設けることなくこの部位の光反射を防止して表示
画面のコントラストを向上させることが可能となる。Prior to forming the silver alloy thin film on the substrate, a treatment for improving the adhesion between the thin film and the substrate may be performed on the substrate surface. Examples of such surface treatment include ultraviolet irradiation and plasma treatment. In addition, in order to improve the adhesion, a chromium thin film or an IT film is formed on the substrate before forming the silver alloy thin film.
It is also possible to form an O thin film. When the ITO thin film is formed, since the ITO thin film is transparent and has conductivity, the ITO thin film is patterned into a stripe shape and the thin film is patterned into a rectangular pixel pattern. It is possible to improve the contrast of the display screen by preventing light reflection at this portion without providing a light shielding layer on the portion other than the pixel.
【0022】他方、観察者側電極板を構成する基板とし
ては、ガラス基板、プラスチックフィルム、プラスチッ
クボード等の透明基板が適用でき、また、透明電極とし
てはITOやネサ膜等の透明導電膜が適用できる。ま
た、この観察者側電極板に光散乱層を設けて表示光を散
乱させ表示画面の視野角を拡大させたり、カラーフィル
ター層を設けて表示光を着色してカラー表示することも
可能である。光散乱層は上記基板の液晶物質と接触する
内側、あるいは偏光フィルムと接触する外側のいずれに
設けてもよい。このような光散乱層としては、例えば、
透明樹脂バインダー中にこれと屈折率の異なる微粒子を
分散させたものが適用でき、このような微粒子として
は、例えば、MgF2、CaF2、LiF、NaF、Ba
F2、SiO2、TiO2、HfO2、MgO、CaO、A
l2O3、SnO2、PbO、Sb2O5、ZrO2、CeO
2等の無機微粉末、あるいはPTFE(ポリテトラフル
オロエチレン)等のフッ素樹脂の微粉末、アモルファス
ポリオレフィン微粉末、ポリジビニルベンゼンのビー
ズ、ポリスチレンの中空ビーズ、ポリサルフォン微粉
末、溶融石英の微粉末、FK−6等のフッ化物含有珪酸
ガラスの微粉末等が使用できる。また、上記基板の表面
を粗面化処理してこの表面を光散乱層の代わりに利用す
ることも可能である。On the other hand, a transparent substrate such as a glass substrate, a plastic film or a plastic board can be applied as the substrate constituting the observer side electrode plate, and a transparent conductive film such as ITO or a Nesa film can be applied as the transparent electrode. it can. It is also possible to provide a light-scattering layer on the observer-side electrode plate to scatter the display light to expand the viewing angle of the display screen, or to provide a color filter layer to color the display light for color display. . The light-scattering layer may be provided either on the inside of the substrate, which is in contact with the liquid crystal substance, or on the outside thereof, which is in contact with the polarizing film. As such a light scattering layer, for example,
A transparent resin binder in which fine particles having a refractive index different from that of the transparent resin binder is dispersed can be applied. Examples of such fine particles include MgF 2 , CaF 2 , LiF, NaF, and Ba.
F 2 , SiO 2 , TiO 2 , HfO 2 , MgO, CaO, A
l 2 O 3 , SnO 2 , PbO, Sb 2 O 5 , ZrO 2 , CeO
Inorganic fine powder such as 2 or fluororesin fine powder such as PTFE (polytetrafluoroethylene), amorphous polyolefin fine powder, polydivinylbenzene beads, polystyrene hollow beads, polysulfone fine powder, fused silica fine powder, FK Fine powder of fluoride-containing silicate glass such as -6 can be used. It is also possible to roughen the surface of the substrate and use this surface instead of the light scattering layer.
【0023】また、上記カラーフィルター層としては、
着色材を含有するインキを画素パターンに印刷して形成
した印刷法によるカラーフィルター層、透明樹脂を画素
パターンに染色して形成した染色法によるカラーフィル
ター層、あるいは着色材を含有する感光性透明樹脂を塗
布した後フォトリソプロセスに従って画素パターンに露
光・現像して形成した顔料分散法によるカラーフィルタ
ー層、着色材を含有する電着塗料を画素パターンに電着
させて形成した電着法によるカラーフィルター層、着色
材を含有するトナーを電子写真法に従って画素パターン
に付着させて形成した電子写真法によるカラーフィルタ
ー層等の周知のカラーフィルター層を利用することがで
きる。As the color filter layer,
A color filter layer formed by printing an ink containing a colorant on a pixel pattern by a printing method, a color filter layer formed by dyeing a transparent resin on a pixel pattern by a dyeing method, or a photosensitive transparent resin containing a colorant A color filter layer by a pigment dispersion method formed by exposing and developing a pixel pattern according to a photolithography process after applying the above, and a color filter layer by an electrodeposition method formed by electrodeposition of an electrodeposition coating material containing a coloring material on the pixel pattern A well-known color filter layer such as an electrophotographic color filter layer formed by adhering a toner containing a coloring material to a pixel pattern according to the electrophotography can be used.
【0024】尚、本発明に係る金属電極は観察者側電極
板の透明電極に比較して電気抵抗が小さいため、液晶表
示装置が単純マトリクス駆動方式(液晶物質又はその配
向状態がSTN、ECB、ホメオトロピック又は反強誘
電性液晶の場合に主に適用されている)の場合には、上
記金属電極を走査側電極として使用し、観察者側電極板
の透明電極を信号電極として使用することが好ましい。
また、画素毎に液晶物質を駆動させる駆動素子(TFT
等)を備えるアクティブマトリクス駆動方式のものの場
合には、上記背面電極板と観察者側電極板のいずれに駆
動素子を設けてもよい。Since the metal electrode according to the present invention has a smaller electric resistance than the transparent electrode of the observer-side electrode plate, the liquid crystal display device uses a simple matrix driving method (the liquid crystal substance or its alignment state is STN, ECB, (Mainly applied in the case of homeotropic or antiferroelectric liquid crystal), it is possible to use the above metal electrode as the scanning side electrode and the transparent electrode of the observer side electrode plate as the signal electrode. preferable.
In addition, a driving element (TFT that drives a liquid crystal substance for each pixel)
In the case of the active matrix driving system including the above), the driving element may be provided on either the back electrode plate or the viewer side electrode plate.
【0025】[0025]
【作用】請求項1〜4に係る発明によれば、反射型液晶
表示装置の背面電極板に設けられる光反射性の金属電極
が、銀より酸化され易い金属を含有する銀合金の薄膜に
て構成されており、上記銀合金の薄膜は銀単体の薄膜に
較べて背面電極板を構成する基板との密着性が良好で、
かつ、加熱作用によりその凝集が起こり難く、しかも、
硬度が高いため、反射型液晶表示装置の組み立て工程や
装置駆動中において上記金属電極の損傷や基板からの剥
離を未然に防止することが可能となる。According to the present invention, the light-reflective metal electrode provided on the back electrode plate of the reflective liquid crystal display device is a thin film of a silver alloy containing a metal that is more easily oxidized than silver. The thin film of the silver alloy has better adhesion to the substrate forming the back electrode plate than the thin film of silver alone,
Moreover, the aggregation is less likely to occur due to the heating action, and moreover,
Since the hardness is high, it is possible to prevent damage to the metal electrodes and peeling from the substrate during the assembly process of the reflective liquid crystal display device and the driving of the device.
【0026】[0026]
【実施例】以下、図面を参照して本発明の実施例につい
て詳細に説明する。Embodiments of the present invention will now be described in detail with reference to the drawings.
【0027】[実施例1]この実施例に係る反射型液晶
表示装置は、図1に示すように背面電極板1と、この背
面電極板1に対向して配置された観察者側電極板2と、
これ等両電極板1、2を周辺部で一体化させるシール材
3と、これ等両電極板1、2の間に封入された液晶物質
4と、上記観察者側電極板2の外面に積層された偏光フ
ィルム5とでその主要部が構成されている。また、上記
背面電極板1は、厚さ0.7μmのガラス基板11と、
このガラス基板11上に幅315μm、ピッチ330μ
mのストライプパターンに設けられかつマグネシウムを
4atm %含有する銀合金の薄膜(厚さ0.2μm)から
成る金属電極12とで構成され、他方、観察者側電極板
2は、厚さ0.7μmのガラス基板21と、このガラス
基板21上に幅315μm、ピッチ330μmのストラ
イプパターン(上記金属電極12と直交する方向のスト
ライプパターン)に設けられかつ厚さ0.24μmの透
明導電膜から成る透明電極22とで構成されている。[First Embodiment] As shown in FIG. 1, a reflective liquid crystal display device according to this embodiment includes a back electrode plate 1 and an observer-side electrode plate 2 arranged so as to face the back electrode plate 1. When,
A sealing material 3 that integrates these two electrode plates 1 and 2 in the peripheral portion, a liquid crystal substance 4 enclosed between these two electrode plates 1 and 2, and is laminated on the outer surface of the observer-side electrode plate 2. The polarized film 5 thus formed constitutes a main part thereof. The back electrode plate 1 includes a glass substrate 11 having a thickness of 0.7 μm,
315 μm wide and 330 μm pitch on this glass substrate 11.
m striped pattern and a metal electrode 12 made of a silver alloy thin film (0.2 μm thick) containing 4 atm% of magnesium, while the observer-side electrode plate 2 has a thickness of 0.7 μm. And a transparent electrode composed of a transparent conductive film having a thickness of 0.24 μm and provided on the glass substrate 21 in a stripe pattern (stripe pattern in a direction orthogonal to the metal electrode 12) having a width of 315 μm and a pitch of 330 μm. 22 and 22.
【0028】そして、この液晶表示装置は以下の工程に
より製造したものである。The liquid crystal display device is manufactured by the following steps.
【0029】まず、マグネシウムを4atm %含有する銀
合金をターゲットとし、これと同じ組成の薄膜をガラス
基板11上にスパッタリングにより成膜し、周知のフォ
トリソプロセスに従いストライプパターンに加工して背
面電極板1を製造した。First, using a silver alloy containing 4 atm% of magnesium as a target, a thin film having the same composition as this is formed on the glass substrate 11 by sputtering, processed into a stripe pattern according to a well-known photolithography process, and the back electrode plate 1 is formed. Was manufactured.
【0030】次に、室温に維持した上記ガラス基板21
上に透明導電膜を真空蒸着し、かつフォトリソプロセス
に従ってストライプパターンに加工した後、この透明導
電膜に対しその導電率を増大させるために加熱処理を施
して観察者側基板2を製造した。そして、上記背面電極
板1と観察者側電極板2とをシール材3を介して重ね合
わせ、200〜300℃の温度で加熱かつ加圧して一体
化させ上記反射型液晶表示装置を製造した。Next, the glass substrate 21 kept at room temperature.
After a transparent conductive film was vacuum-deposited on it and processed into a stripe pattern according to a photolithography process, the transparent conductive film was subjected to heat treatment to increase its conductivity, whereby an observer side substrate 2 was manufactured. Then, the back electrode plate 1 and the observer-side electrode plate 2 were overlapped with each other with the sealant 3 interposed therebetween, and heated and pressed at a temperature of 200 to 300 ° C. to be integrated with each other to manufacture the reflection type liquid crystal display device.
【0031】こうして製造した反射型液晶表示装置の金
属電極12の形状を観察したところ、銀合金の薄膜成膜
時に比較してその外観上の変化は見られず凝集現象が生
じていないことが確認できた。また、その光反射率を測
定したところ95%を示し、優れた光反射性能を有する
ことも確認できた。尚、この金属電極12上にセロハン
テープを接着した後引き剥がし、このセロハンテープの
剥離に伴って引き剥がされた銀合金薄膜の有無により上
記金属電極12とガラス基板11との密着性を評価した
ところ、上記セロハンテープに付着して引き剥がされた
銀合金薄膜は全く観察されず、高い密着性を有している
ことが確認できた。Observation of the shape of the metal electrode 12 of the reflection type liquid crystal display device manufactured in this manner confirmed that no change in appearance was observed and no agglomeration phenomenon occurred compared to when a thin film of silver alloy was formed. did it. In addition, the light reflectance was measured and found to be 95%, which confirmed that the material had excellent light reflecting performance. In addition, the cellophane tape was adhered on the metal electrode 12 and then peeled off, and the adhesion between the metal electrode 12 and the glass substrate 11 was evaluated by the presence or absence of the silver alloy thin film peeled off along with the separation of the cellophane tape. However, no silver alloy thin film adhered to the cellophane tape and peeled off was observed, and it was confirmed that the silver alloy thin film had high adhesion.
【0032】[比較例]マグネシウムを4atm %含有す
る銀合金薄膜に代えて銀単体の薄膜を使用した点を除
き、実施例1と同様に反射型液晶表示装置を製造した。Comparative Example A reflective liquid crystal display device was manufactured in the same manner as in Example 1 except that a thin film of silver alone was used in place of the silver alloy thin film containing 4 atm% of magnesium.
【0033】こうして製造された反射型液晶表示装置の
金属電極12の形状を観察したところ、金属電極12の
一部が破壊され球状に凝集した銀薄膜が観察された。When the shape of the metal electrode 12 of the reflection type liquid crystal display device manufactured as described above was observed, a silver thin film in which a part of the metal electrode 12 was destroyed and spherically aggregated was observed.
【0034】また、この金属電極12上にセロハンテー
プを接着した後引き剥がしたところ、上記銀薄膜はほぼ
全部がセロハンテープの剥離に伴って引き剥がされた。When a cellophane tape was adhered onto the metal electrode 12 and then peeled off, almost all of the silver thin film was peeled off along with the peeling of the cellophane tape.
【0035】[実施例2]マグネシウムを4atm %含有
する銀合金薄膜に代えてマグネシウム4atm %とチタン
1atm %を含有する銀合金の薄膜を使用した点を除き、
実施例1と同様に反射型液晶表示装置を製造した。[Example 2] A silver alloy thin film containing 4 atm% magnesium and 1 atm% titanium was used in place of the silver alloy thin film containing 4 atm% magnesium, except that a silver alloy thin film containing 4 atm% magnesium and 1 atm% titanium was used.
A reflective liquid crystal display device was manufactured in the same manner as in Example 1.
【0036】得られた反射型液晶表示装置の金属電極に
凝集現象は観察されず、また高い光反射性能を示した。
また、上記セロテープを用いた剥離試験においてもセロ
ハンテープに付着して引き剥がされた銀合金薄膜は観察
されず、高い密着性を有することが確認できた。No aggregation phenomenon was observed in the metal electrode of the obtained reflection type liquid crystal display device, and high light reflection performance was exhibited.
Further, in the peeling test using the above-mentioned cellophane tape, no silver alloy thin film adhered to the cellophane tape and peeled off was observed, and it was confirmed to have high adhesion.
【0037】[実施例3]この実施例に係る反射型液晶
表示装置は、図2に示すように背面電極板1と、この背
面電極板1に対向して配置された観察者側電極板2と、
これ等両電極板1、2を周辺部で一体化させるシール材
3と、これ等両電極板1、2の間に封入された液晶物質
4と、上記観察者側電極板2の外面に積層された偏光フ
ィルム5と、背面側電極板1の背後に配置されかつ照明
の暗い室内で点灯して使用されるランプ(図示せず)と
でその主要部が構成されている。また、上記背面電極板
1は、厚さ0.7μmのガラス基板11と、このガラス
基板11上に幅195μm、ピッチ210μmのストラ
イプパターンに設けられかつ酸化錫を7.5重量%含有
する酸化インジウムから成るITO薄膜(厚さ0.1μ
m)13と、このITO薄膜13上の画素部位にパター
ン(図3に示すように中央部に径70μmの円形の穴開
きパターン14aを有する一辺が195μmの矩形パタ
ーン)状に設けられかつアルミニウムを8atm %含有す
る銀合金の薄膜から成る金属電極14とで構成され、他
方、観察者側電極板2は、厚さ0.7μmのガラス基板
21と、このガラス基板21上に幅195μm、ピッチ
210μmのストライプパターン(上記金属電極14と
直交する方向のストライプパターン)に設けられかつ厚
さ0.2μmの透明導電膜から成る透明電極22とで構
成されている。[Embodiment 3] In the reflection type liquid crystal display device according to this embodiment, as shown in FIG. 2, a back electrode plate 1 and an observer side electrode plate 2 arranged so as to face the back electrode plate 1. When,
A sealing material 3 that integrates these two electrode plates 1 and 2 in the peripheral portion, a liquid crystal substance 4 enclosed between these two electrode plates 1 and 2, and is laminated on the outer surface of the observer-side electrode plate 2. The polarized film 5 thus formed and a lamp (not shown) arranged behind the rear electrode plate 1 and used by being turned on in a darkened room constitute a main part. The back electrode plate 1 includes a glass substrate 11 having a thickness of 0.7 μm, and indium oxide which is provided on the glass substrate 11 in a stripe pattern having a width of 195 μm and a pitch of 210 μm and which contains 7.5 wt% of tin oxide. ITO thin film consisting of (thickness 0.1μ
m) 13 and a pixel portion on the ITO thin film 13 in a pattern (a rectangular pattern having a circular perforated pattern 14a with a diameter of 70 μm in the central portion as shown in FIG. 3 and a side of 195 μm) and aluminum. The observer-side electrode plate 2 is composed of a glass electrode 21 having a thickness of 0.7 μm, a width of 195 μm, and a pitch of 210 μm on the glass substrate 21. And a transparent electrode 22 formed of a transparent conductive film having a thickness of 0.2 μm and provided in a stripe pattern (a stripe pattern in a direction orthogonal to the metal electrode 14).
【0038】尚、上記金属電極14の中央部に設けられ
た穴開きパターン14aは、照明の暗い室内で液晶表示
装置を駆動する際に点灯される上記ランプの光線を画素
部位に誘導するものである。The perforated pattern 14a provided in the central portion of the metal electrode 14 guides the light beam of the lamp, which is turned on when the liquid crystal display device is driven in a dark room, to the pixel portion. is there.
【0039】そして、この反射型液晶表示装置は以下の
工程により製造したものである。The reflective liquid crystal display device is manufactured by the following steps.
【0040】まず、室温に維持したガラス基板11上
に、酸化錫を7.5重量%含有する酸化インジウムから
成るITO薄膜とアルミニウムを8atm %含有する銀合
金の薄膜をスパッタリングにより成膜し、周知のフォト
リソプロセスに従い上記銀合金薄膜を穴開きパターンを
有する上記矩形パターンに加工した後、上記ITO薄膜
を上記ストライプパターンに加工して背面電極板1を製
造した。First, an ITO thin film made of indium oxide containing 7.5% by weight of tin oxide and a silver alloy thin film containing 8 atm% of aluminum were formed by sputtering on a glass substrate 11 kept at room temperature. After processing the silver alloy thin film into the rectangular pattern having a perforated pattern according to the photolithographic process of 1., the ITO thin film was processed into the stripe pattern to manufacture the back electrode plate 1.
【0041】次に、室温に維持した上記ガラス基板21
上に透明導電膜を真空蒸着し、フォトリソプロセスに従
って上記ストライプパターンに加工した後、この透明導
電膜に対しその導電率を増大させるために加熱処理を施
して観察者側基板2を製造した。そして、上記背面電極
板1と観察者側電極板2とをシール材3を介して重ね合
わせ、200〜300℃の温度で加熱かつ加圧して一体
化させ上記反射型液晶表示装置を製造した。Next, the glass substrate 21 kept at room temperature.
A transparent conductive film was vacuum-deposited thereon, processed into the above stripe pattern according to a photolithography process, and then heat treatment was applied to the transparent conductive film to increase the conductivity thereof, whereby the viewer-side substrate 2 was manufactured. Then, the back electrode plate 1 and the observer-side electrode plate 2 were overlapped with each other with the sealant 3 interposed therebetween, and heated and pressed at a temperature of 200 to 300 ° C. to be integrated with each other to manufacture the reflection type liquid crystal display device.
【0042】得られた反射型液晶表示装置の金属電極1
4に凝集現象は観察されず、また高い光反射性能を示し
た。また、上記セロテープを用いた剥離試験においても
セロハンテープに付着して引き剥がされた銀合金薄膜は
観察されず、高い密着性を有することが確認できた。Metal electrode 1 of the obtained reflection type liquid crystal display device
No aggregation phenomenon was observed in No. 4, and high light reflection performance was exhibited. Further, in the peeling test using the above-mentioned cellophane tape, no silver alloy thin film adhered to the cellophane tape and peeled off was observed, and it was confirmed to have high adhesion.
【0043】[0043]
【発明の効果】請求項1〜4に係る発明によれば、反射
型液晶表示装置の背面電極板に設けられる光反射性の金
属電極が、銀より酸化され易い金属を含有する銀合金の
薄膜にて構成されており、上記銀合金の薄膜は銀単体の
薄膜に較べて背面電極板を構成する基板との密着性が良
好で、かつ、加熱作用によりその凝集が起こり難く、し
かも、硬度が高いため、反射型液晶表示装置の組み立て
工程や装置駆動中において上記金属電極の損傷や基板か
らの剥離を未然に防止することが可能となる。According to the present invention, the light-reflective metal electrode provided on the back electrode plate of the reflective liquid crystal display device contains a silver alloy thin film containing a metal that is more easily oxidized than silver. The thin film of the silver alloy has better adhesion to the substrate forming the back electrode plate than the thin film of silver alone, and its aggregation is less likely to occur due to the heating action, and the hardness is Since the cost is high, it is possible to prevent damage to the metal electrode and peeling from the substrate during the assembly process of the reflective liquid crystal display device and the driving of the device.
【0044】従って、明るい画面表示が可能でかつ表示
欠陥が生じ難くしかも信頼性に優れた反射型液晶表示装
置を提供できる効果を有している。Therefore, there is an effect that it is possible to provide a reflective liquid crystal display device capable of displaying a bright screen, hardly causing a display defect, and excellent in reliability.
【図面の簡単な説明】[Brief description of drawings]
【図1】実施例1に係る反射型液晶表示装置の断面図。FIG. 1 is a cross-sectional view of a reflective liquid crystal display device according to a first embodiment.
【図2】実施例3に係る反射型液晶表示装置の断面図。FIG. 2 is a cross-sectional view of a reflective liquid crystal display device according to a third embodiment.
【図3】実施例3に係る金属電極のパターンを示す要部
平面図。FIG. 3 is a plan view of a principal part showing a pattern of a metal electrode according to a third embodiment.
【図4】従来例に係る反射型液晶表示装置の断面図。FIG. 4 is a cross-sectional view of a reflective liquid crystal display device according to a conventional example.
【図5】従来例に係る反射型液晶表示装置の断面図。FIG. 5 is a cross-sectional view of a reflective liquid crystal display device according to a conventional example.
1 背面電極板 2 観察者側電極板 3 シール材 4 液晶物質 5 偏光フィルム 11 ガラス基板 12 金属電極 21 ガラス基板 22 透明電極 1 Rear Electrode Plate 2 Observer Side Electrode Plate 3 Sealing Material 4 Liquid Crystal Material 5 Polarizing Film 11 Glass Substrate 12 Metal Electrode 21 Glass Substrate 22 Transparent Electrode
Claims (4)
と、この背面電極板に対向して配置されかつ透明電極を
有する観察者側電極板と、これ等両電極板間に封入され
た液晶物質とを備え、上記金属電極と透明電極との間に
電圧を印加して液晶物質を駆動させ画面表示する反射型
液晶表示装置において、 上記光反射性の金属電極が、銀より酸化され易い金属を
含有する銀合金の薄膜にて構成されていることを特徴と
する反射型液晶表示装置。1. A back electrode plate having a light-reflecting metal electrode, an observer-side electrode plate which is arranged so as to face the back electrode plate and has a transparent electrode, and is enclosed between these two electrode plates. In a reflective liquid crystal display device comprising a liquid crystal substance and driving a liquid crystal substance by applying a voltage between the metal electrode and the transparent electrode to display a screen, the light reflective metal electrode is more easily oxidized than silver. A reflective liquid crystal display device comprising a thin film of a silver alloy containing a metal.
ム、アルミニウム、チタン、ジルコニウム及びハフニウ
ムから選択された一又は二種類以上の金属から成ること
を特徴とする請求項1に記載の反射型液晶表示装置。2. The reflective liquid crystal display according to claim 1, wherein the metal that is more easily oxidized than silver is one or more kinds of metals selected from magnesium, aluminum, titanium, zirconium and hafnium. apparatus.
及びアルミニウムから選択された一又は二種類の金属か
ら成り、かつ、光反射性の金属電極が上記金属を0.5
〜30atm %含有する銀合金の薄膜にて構成されている
ことを特徴とする請求項2に記載の反射型液晶表示装
置。3. A metal that is more easily oxidized than silver is composed of one or two kinds of metals selected from magnesium and aluminum, and a light-reflecting metal electrode is formed of 0.5 or more of the above metals.
3. The reflection type liquid crystal display device according to claim 2, wherein the reflection type liquid crystal display device is constituted by a thin film of a silver alloy containing about 30 atm%.
タンを含む二種類以上の金属から成り、光反射性の金属
電極が上記金属を0.5〜50atm %含有する銀合金の
薄膜にて構成されていることを特徴とする請求項2に記
載の反射型液晶表示装置。4. A metal which is more easily oxidized than silver is composed of titanium or two or more kinds of metals containing titanium, and a light-reflecting metal electrode is a thin film of a silver alloy containing 0.5 to 50 atm% of the above metal. The reflective liquid crystal display device according to claim 2, which is configured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28125693A JPH07134300A (en) | 1993-11-10 | 1993-11-10 | Reflective liquid crystal display |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28125693A JPH07134300A (en) | 1993-11-10 | 1993-11-10 | Reflective liquid crystal display |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07134300A true JPH07134300A (en) | 1995-05-23 |
Family
ID=17636542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28125693A Pending JPH07134300A (en) | 1993-11-10 | 1993-11-10 | Reflective liquid crystal display |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07134300A (en) |
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| JPH07318929A (en) * | 1994-05-30 | 1995-12-08 | Casio Comput Co Ltd | Liquid crystal display |
| JP2002328629A (en) * | 2001-04-13 | 2002-11-15 | Samsung Electronics Co Ltd | Wiring, method of manufacturing the same, thin film transistor substrate including the wiring, and method of manufacturing the same |
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| JP2007316645A (en) * | 1998-04-08 | 2007-12-06 | Seiko Epson Corp | Liquid crystal device and electronic device |
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-
1993
- 1993-11-10 JP JP28125693A patent/JPH07134300A/en active Pending
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| KR100788310B1 (en) * | 2002-03-07 | 2007-12-27 | 엘지.필립스 엘시디 주식회사 | Electroless Plating of Silver on Indium Tin Oxide Electrodes |
| US7566417B2 (en) | 2002-08-08 | 2009-07-28 | Kobe Steel, Ltd. | Ag base alloy thin film and sputtering target for forming Ag base alloy thin film |
| US7758942B2 (en) | 2002-08-08 | 2010-07-20 | Kabushiki Kaisha Kobe Seiko Sho | Ag base alloy thin film and sputtering target for forming Ag base alloy thin film |
| US7776420B2 (en) | 2002-08-08 | 2010-08-17 | Kobe Steel, Ltd. | Ag base alloy thin film and sputtering target for forming Ag base alloy thin film |
| US7722942B2 (en) | 2002-08-08 | 2010-05-25 | Kobe Steel, Ltd. | Ag base alloy thin film and sputtering target for forming Ag base alloy thin film |
| US7514037B2 (en) | 2002-08-08 | 2009-04-07 | Kobe Steel, Ltd. | AG base alloy thin film and sputtering target for forming AG base alloy thin film |
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| JP2007226186A (en) * | 2006-02-20 | 2007-09-06 | Samsung Electronics Co Ltd | Display substrate, manufacturing method thereof, and display device having the same |
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