JPH07117458B2 - Spectrometer - Google Patents

Description

The present invention relates to an output of a spectroscopic detector that measures reflected light or transmitted light from a measurement sample, and a spectroscopic detector that measures light from a light source for illuminating a sample. The present invention relates to a spectroscopic measurement device that obtains a ratio with the output of each of the corresponding wavelengths, and is particularly suitable for a power-saving spectroscopic measurement device that uses a pulse xenon lamp as a light source for illuminating a measurement sample.

(Prior Art) Japanese Patent Application Laid-Open No. 59-20804 discloses a method for measuring the spectral reflectance of an optical thin film in real time when an optical thin film is deposited using a vacuum deposition apparatus. Irradiate the sample and detect the reflected light with a spectroscopic detector,
A film thickness monitoring device is disclosed in which the light emission intensity of an illumination light source is measured by one light receiving element. In this conventional example, there is only one light receiving element for measuring the illumination light source and only the brightness of the illumination light source is measured, and it is not possible to measure the variation of the spectral energy distribution of the illumination light source. .

(Problems to be Solved by the Invention) When a pulse xenon lamp is used as a light source for illuminating a sample when illuminating the sample with an illumination light source and obtaining a spectroscopic measurement value of reflected light or transmitted light from the sample, It is convenient because it consumes less power. However, the pulse xenon lamp has a problem in that the spectral energy distribution thereof varies with each emission of light, which causes an error in the spectroscopic measurement value.

The present invention has been made in view of such points, and an object of the present invention is to make it possible to remove an error due to a change in spectral energy distribution of a light source from a spectroscopic measurement value of a sample, and to obtain an accurate spectroscopic measurement value. It is to provide a spectroscopic measurement device capable of obtaining

(Means for Solving Problems) In the spectroscopic measurement device according to the present invention, in order to solve the above problems, a sample (1) to be measured is provided as shown in FIG. An illuminating light source (2) for illuminating, and a first spectroscopic means (F1) that disperses either reflected light or transmitted light from the sample (1) into light of each wavelength, and the first spectroscopic means. A first light-receiving element array (PDA1) that receives the separated light of each wavelength, a second light-splitting unit (F2) that splits the light of the illumination light source (2) into light of each wavelength, and a second light-splitting unit. The second light receiving element array (PDA) for receiving the light of each wavelength dispersed by the means.
2) and a calculating means (DVD) for calculating the ratio of the output of the first light receiving element array and the output of the second light receiving element array, and the second spectroscopic means (F2) and the second light receiving element. The measurement wavelength interval of the second spectroscopic detector in combination with the element array (PDA2) is the first spectroscopic detector in combination with the first spectroscopic means (F1) and the first light receiving element array (PDA2). 2 is larger than the measurement wavelength interval of the second spectroscopic detector and interpolation calculation is performed between the measurement wavelength intervals of the second spectroscopic detector.

(Operation) In the present invention, the sample (1) to be measured is illuminated by the illumination light source (2). Either reflected light or transmitted light from the sample (1) is split into light of each wavelength by the first spectroscopic means (F1), and the split light of each wavelength is separated into the first light receiving element array (PDA1). ) Is received. First light receiving element array (PDA
The spectroscopic measurement value of the sample (1) obtained as the output of 1) is
It is affected by the fluctuation of the spectral energy distribution of the illumination light source (2), which causes a measurement error. Therefore, in the present invention, the spectral energy distribution of the illumination light source (2) is also measured at the same time for each sample measurement.
For this light source measurement, the light of the illumination light source (2) is split into light of each wavelength by the second spectroscopic means (F2), and the split light of each wavelength is divided into the second light receiving element array (PDA2). ) Is received. The spectroscopic measurement value obtained as the output of the second light-receiving element array (PDA2) is a measurement of the spectral energy distribution of the illumination light source (2). The ratios of the outputs of the first and second light receiving element arrays can be calculated by the calculating means (DVD). The ratio obtained here is obtained by removing the influence of the fluctuation of the spectral energy distribution of the illumination light source (2) from the spectroscopic measurement value of the sample (1), so that the measurement error due to the light source can be eliminated. It is possible to obtain accurate spectroscopic measurement values. Further, by increasing the measurement wavelength interval of the second spectral detector including the combination of the second spectroscopic means and the second light receiving element array, and calculating the interval between the measurement wavelength intervals by the interpolation calculation, the second light receiving element is obtained. It is possible to reduce the number of light receiving elements in a row and shorten the measurement time.

(Examples) Hereinafter, preferred examples of the present invention will be described with reference to the drawings.
FIG. 2 is a block diagram of an embodiment of the present invention. Second
In the figure, S1 and S2 are spectroscopic sensors that split incident light into light of each wavelength and output in parallel a photocurrent proportional to the light intensity of each wavelength.
It is composed of F1 and F2 and silicon photodiode arrays PDA1 and PDA2. Each of PDA1 and PDA2 is a silicon photodiode array in which 40 silicon photodiodes are linearly arranged. Silicon photodiode array
Bandpass filter array F for PDA1 and PDA2 respectively
1, F2 are placed in the optical path. The bandpass filter arrays F1 and F2 are formed by arranging a large number of optical bandpass filters having different transmission wavelengths so that the transmission wavelength thereof continuously changes linearly from the short wavelength side to the long wavelength side. By inputting light to the silicon photodiode arrays PDA1 and PDA2 through the bandpass filter arrays F1 and F2, the wavelength of light detected by each photodiode in the photodiode array continuously changes from short wavelength to long wavelength. It is supposed to do.

The light emitted from the pulse xenon lamp (2) by the illumination circuit (3) is partially incident on the light source measuring spectral sensor S2 in order to measure the variation in the spectral energy distribution of the light source, and the remaining 1 The part illuminates the measurement sample (1). The reflected light from the measurement sample (1) is incident on the sample measurement spectroscopic sensor S1. A photocurrent proportional to the energy of each wavelength of light incident on the sensors S1 and S2 is output from each silicon photodiode of the sensors S1 and S2. The photocurrent from each silicon photodiode of PDA1 and PDA2 is input to the photometric circuit section (4), integrated and A / D converted for each silicon photodiode, and the value is input / output port (5). , Control and computing unit (6)
Is input to. The lighting circuit (3) has an input / output port (5).
Is controlled by the control / calculation unit (6). Detailed configurations and operations of the photometric circuit section (4) and the illumination circuit (3) will be described later.

The control / calculation unit (6) is a central processing unit (CPU) that controls and calculates the entire system. Control / arithmetic unit (6)
Is a program storage unit (7) that is a read-only memory (ROM) that stores programs executed by the control / operation unit (6) and a random access memory (RAM) that stores operation data and system status. A certain data storage section (8), a spectroscopic sensor data storage section (9) which is an electrically erasable programmable read only memory (EEPROM) in which the detection wavelengths of the spectroscopic sensors S1 and S2 and various correction constants are described, and an external An external input / output port (10) for inputting / outputting data to / from an external device such as a personal computer, and a magnetic storage device control unit (11) for controlling a magnetic storage device (12) such as a floppy disk device or a hard disk device. ) And a display unit consisting of a liquid crystal display and a CRT (14)
A display control unit (13) for controlling the computer, a keyboard (15), a printer (16), and a real-time clock (17) for measuring the current time are connected, and these are controlled by the control / arithmetic unit (6). .

FIGS. 3, 4, and 5 are circuit diagrams of the photometry circuit section (4), FIGS. 6 and 8 are timing charts of photometry, and FIG. 9 is a flow chart of the photometry control program. First, Fig. 3 shows the silicon photodiode arrays PDA1 and PDA.
2 shows a current-voltage conversion circuit and an integration circuit connected to any one silicon photodiode PDi in 2. The circuit of FIG. 3 is connected to all the silicon photodiodes of the silicon photodiode arrays PDA1 and PDA2. In FIG. 3, OP1i is an operational amplifier, and a feedback resistor Rfi is connected between the inverting input terminal and the output terminal. The non-inverting input of the operational amplifier OP1i is connected to the ground. The anode of the silicon photodiode PDi is connected to the inverting input terminal of the operational amplifier OP1i, and the cathode of PDi is connected to the ground. The output terminal of the operational amplifier OP1i is a resistor Rci for integration.
, And the other end of the integrating resistor Rci is connected to the input terminal of the analog switch SW1i. The output terminal of the analog switch SW1i is connected to the inverting input terminal of the operational amplifier OP2i. The control terminal of the analog switch SW1i is connected to an integration control signal CHG described later. An integration capacitor Cci and an integration reset analog switch SW2i are connected in parallel between the inverting input terminal and the output terminal of the operational amplifier OP2i. The control signal of the analog switch SW2i is the signal RES described later.
It is connected to the. The calculation inverting input terminal of the amplifier OP2i is connected to an input of the discharge analog switches SW4i, the output of the analog switch SW4i is connected to one end of the discharge resistor R _D i, the other end of the resistor R _D i is, -5V It is connected to the. For convenience, the control signal of analog switch SW4i is set to ADi
I will name it. The non-inverting input of the operational amplifier OP2i is connected to ground, and the output terminal is the analog switch SW.
It is connected to the input terminal of 3i. Analog switch SW3i
The output terminal of is named Oi for convenience. Control signal of analog switch SW3i is analog switch
It is connected to the ADi signal which is the control signal of SW4i. For convenience, the above circuits are collectively referred to as AN (i).

FIG. 6 is a timing chart explaining the operation of the circuit of FIG. The operation of the circuit of FIG. 3 will be described below with reference to the timing chart of FIG. RE at time t1
The S signal goes low, the CHG signal goes high, the analog switch SW2i turns off, and the analog switch SW1i turns on. At the same time, or after a short delay, the lighting circuit (3) causes the pulse xenon lamp (2) to emit light.
The light passes through the bandpass filter array F1 or F2 and enters the silicon photodiode PDi. When light is incident on the silicon photodiode PDi, a photocurrent I1i proportional to the intensity of the incident light flows from the anode of PDi to the inverting input terminal of the operational amplifier OP1i, and almost all of it flows to the feedback resistor Rfi. The output voltage V1i of the operational amplifier OP1i is expressed by the following equation.

V1i = −I1i · Rfi ... Currently, since the analog switch SW1i is ON and SW2i is OFF, the current I2i of the following formula flows from the output terminal of the operational amplifier OP1i to the integration capacitor Cci through the integration resistor Rci.

The output voltage V2i of the integrating operational amplifier OP2i is
2i is time-integrated.

Therefore, V2i becomes a voltage proportional to the time integral value of the intensity of light incident on the silicon photodiode PDi. CHG at time t2 after the emission of the pulse xenon lamp (2) ends
The signal goes low and the analog switch SW1i turns off.
At this point, the output voltage V2i of the integrating operational amplifier OP2i is held. After that, the ADi signal becomes High at time t3,
Analog switches SW4i and SW3i are turned on. The charge stored in the integrating capacitor Cci is the analog switch SW4i.
And through the discharge resistor R _D i to −5 V with a constant current I3i expressed by the following formula.

Therefore, the output voltage V2i of the integrating operational amplifier OP2i decreases linearly. The operation of the signal Oi and the operation at the time thereafter will be described later.

FIG. 4 is a circuit diagram showing one block (kth block) in the photometric circuit. Silicon photodiode array PD
A total of 80 silicon photodiodes in A1 and PDA2
Divide into 0 blocks by 8 blocks. In this embodiment, the silicon photodiodes included in one block are divided into 10 consecutive silicon photodiodes. As shown in FIG.
The anodes of the ten silicon photodiodes PDj to PDj ₊₉ (j = k × 10) in the k-th block (k = 0, 1, ..., 7) are respectively the current-voltage conversion / integration circuits AN (j ) ~ AN
It is connected to (J + 9). The cathodes of silicon photodiodes are all connected to ground. circuit
Analog switch SW3j in AN (j) -AN (j + 9)-
The outputs Oj to Oj ₊₉ of SW3j ₊₉ are all connected to the non-inverting input of the comparator CMPk. The non-inverting input of comparator CMPk is connected to + 5V through resistor R1k. Inverting input of the comparator CMPk is connected to the negative reference voltage -V _B. The output of the comparator CMPk is Ck. ADj ~ ADj ₊₉
Are control signals of the analog switches SW4j to SW4j ₊₉ and SW3j to SW3j _{+9 in} the circuits AN (j) to AN (j + 9), respectively. For convenience, block the circuit block of Fig. 4
(K) Name it as (k = 0,1,2, ..., 7).

FIG. 5 is a circuit diagram of the entire photometric circuit of this embodiment. F1, F
2 is the bandpass filter array, which is PDA1, PDA2
Is the silicon photodiode array. PDA1, P
Each of the silicon photodiodes in DA2 is divided into 10 blocks of 4 blocks, that is, PDA1 and PDA2 are divided into 8 blocks, which are connected to the circuit blocks BLOCK (0) to BLOCK (7) described in FIG. 4, respectively. Has been done. The cathodes of all silicon photodiodes are connected to ground.

IC1 is a 4-input, 16-output decoder. Input terminal of IC1 is enabled terminal, but at the time of the High, Q ₀ ~Q ₁₅
All outputs go low. Is Low, outputs according to the 4-bit signal input to the A, B, C, D input terminals Q _{0 to} Q ₁₅
One of them goes high and the other goes low. In this embodiment, Q _{10 to} Q ₁₅ are not used, so they are not shown in the circuit diagram. Table 1 shows the relationship between A, B, C, D, inputs and Q _{0 to} Q ₉ .

However, in the above table, H: High level L: Low level ×: H or L To realize this function, for example, CMOS-IC 45
There are fourteen.

The output Q ₀ of IC1 is AD ₀ , AD ₁₀ , AD ₂₀ , AD ₃₀ , AD ₄₀ , AD ₅₀ , AD ₆₀ , A
Connected with D ₇₀ , output Q ₁ is AD ₁ ,, AD ₁₁ ,, AD ₂₁ ,, AD ₃₁ ,, AD ₄₁ , AD
₅₁ , AD ₆₁ , AD ₇₁ , output Q ₂ is AD ₂ ,, AD ₁₂ ,, AD ₂₂ ,, AD
₃₂ , AD ₄₂ , AD ₅₂ , AD ₆₂ , AD ₇₂ , output Q ₃ is AD ₃ , AD
₁₃ , AD ₂₃ , AD ₃₃ , AD ₄₃ , AD ₅₃ , AD ₆₃ , AD ₇₃ , output Q ₄
Is connected to AD ₄ , AD ₁₄ , AD ₂₄ , AD ₃₄ , AD ₄₄ , AD ₅₄ , AD ₆₄ , AD _74, and output Q ₅ is AD ₅ ,, AD ₁₅ , AD ₂₅ , AD ₃₅ , AD ₄₅ , AD ₅₅ , AD ₆₅ , AD
Connected to ₇₅ and output Q ₆ is AD ₆ ,, AD ₁₆ ,, AD ₂₆ , AD ₃₆ , AD ₄₆ , AD
₅₆ , AD ₆₆ , AD ₇₆ , output Q ₇ is AD ₇ ,, AD ₁₇ ,, AD ₂₇ , AD
₃₇ , AD ₄₇ , AD ₅₇ , AD ₆₇ , AD ₇₇ , output Q ₈ is AD ₈ , AD
₁₈ , AD ₂₈ , AD ₃₈ , AD ₄₈ , AD ₅₈ , AD ₆₈ , AD ₇₈ , output Q ₉
Are connected to AD ₉ , AD ₁₉ , AD ₂₉ , AD ₃₉ , AD ₄₉ , AD ₅₉ , AD ₆₉ , AD ₇₉ .

In addition, all circuit blocks BLOCK (0) to BLOCK (7)
Comparator outputs C0 to C7 are input to IC2 which is an 8-input NOR gate. In addition, each comparator output C0,
C1, C2, C3, C4, C5, C6, C7 are connected to one input of IC4, IC5, IC6, IC7, IC8, IC9, IC10, IC11 which are 2-input AND gates respectively, and IC4, IC5, IC6 The other inputs of IC7, IC8, IC9, IC10, and IC11 are all connected to the output of the 2-input NOR gate IC3. IC12, IC13, IC14, IC15, IC16, IC17, IC18, I
C19 is a 16-bit counter, and the count value is cleared to 0 at the rising edge of the CLR input, and the count value is incremented by 1 at the rising edge of the CK input. OSC
Is an oscillator for outputting a reference clock for A / D conversion. The output of the OSC is connected to one input of the 2-input NOR gate IC3. The input / output port (5) was described in the description of FIG. 2, and the signals RES and CHG described later in the description of FIG. 3 are the outputs of the input / output port (5). The A, B, C and D inputs of the decoder IC1 are outputs of the input / output port (5). The output of the 8-input NOR gate IC2 is input to the ADE input of the input / output port (5). CLR output of input / output port (5) is counter IC12, IC13, IC14, IC15, I
It is connected to the CLR input of C16, IC17, IC18, IC19. The output of the input / output port (5) is connected to one input of the 2-input NOR gate IC3. Since the output of the oscillator OSC is input to the other input of the 2-input NOR gate IC3,
As the output of the 2-input NOR gate IC3, an inverted signal of the output of the oscillator OSC is output when the signal is low, and it is always low when the signal is high. Counter IC12, IC13, IC1
4, Output of IC15, IC16, IC17, IC18, IC19 CT0, CT1, CT2, CT3, CT
4, CT5, CT6, CT7 are input to the input / output port (5).

FIG. 7 is a block diagram for explaining the illumination circuit (3). In FIG. 7, the numbers (2), (3) and (5) correspond to those in the second number. (35) is a power supply for the lighting circuit, which is a low voltage DC power supply of about 9V. Reference numeral (31) is a booster circuit utilizing blocking oscillation, which supplies power for charging a main capacitor (37) for accumulating electric charge for pulse xenon lamp light emission. (32) is a voltage control circuit that detects the charging voltage of the main capacitor (37), and when the charging voltage becomes higher than a predetermined maximum voltage, FC
When the HG1 output is set to low level and the charging voltage of the main capacitor (37) becomes lower than the predetermined minimum voltage which is lower than the maximum voltage, the FCHG1 output is set to high level and the charging voltage becomes the maximum voltage and the minimum voltage. FCHG when in between
This is a voltage detection circuit with hysteresis that keeps the state of 1 output.

The booster circuit (31) is connected to the FC from the voltage control circuit (32).
HG1 signal and boost control signal FCH from I / O port (5)
Enter G2. The FCHG2 signal is output from the I / O port (5), and the CPU (6) outputs it through the I / O port (5).
This is a signal for controlling the power supply from the booster circuit (31). The booster circuit (31) inputs the FCHG1 signal and the FCHG2 signal, and supplies power only when both signals are at a high level. (36) is a current from the main capacitor (37) to the booster circuit (31). This is a diode for preventing the reverse flow of. Therefore, FCHG2 from the I / O port (5)
Output from voltage control circuit (32) while output is high level
The booster circuit (31) is controlled by FCHG1, and the charging voltage of the main capacitor (37) is controlled to be between the highest level and the lowest level. (33) compares the charging voltage of the main capacitor (37) with a predetermined charging completion voltage that is the same as or lower than the minimum voltage, and when the charging voltage is higher, the VCHK output signal becomes High. When the charging voltage is lower, the VCHK output signal is set to Low. However, the maximum voltage, the minimum voltage, and the charging completion voltage are
Than the voltage at which the pulse xenon lamp (2) can emit light,
It is set high. VCHK from the voltage detection circuit (33)
The signal is input to the input / output port (5), and the CPU
By inputting the VCHK signal through the input / output port (5), (6) determines whether the lighting circuit (3) is ready to emit light. (34) is a light emission trigger circuit for causing the pulse xenon lamp (2) to emit light,
The pulse xenon lamp (2) is caused to emit light at the rising edge of the FLASH signal from the input / output port (5). CPU
(6) controls the FLASH signal via the input / output port (5) to control the light emission timing of the illumination circuit (3).

FIG. 8 is a timing chart showing the photometric timing of this embodiment, and FIGS. 9 (a), (b), (c) and (d) are CPUs.
It is a flowchart which shows the procedure of control of the photometry circuit part (4) by (6), and the calculation for calculating a measured value. The photometric operation will be described below with reference to the timing chart of FIG. 8 and the flowchart of FIG. # 1 in FIG. 9 (a)
, The CPU (6) inputs the charging completion signal VCHK from the lighting circuit (3) through the input / output port (5), and VCHK
It is determined whether or not the lighting circuit (3) can emit light by determining whether or not it is at the high level. If VCHK is Low, light emission preparation is not completed, so proceed to # 2, set error flag ERRF to 1, and return. If VCHK is High, light emission is possible, so proceed to # 3 and set boost control signal FCHG2 to Low. When FCHG2 becomes Low, the booster circuit (31) stops the power supply, but it takes about 100 microseconds to completely stop the power supply. The reason why the power supply to the step-up circuit (31) is stopped before the photometry is that the step-up circuit (31) oscillates at a high voltage while the power is supplied, which is harmful to the photometry circuit section (4). This is because it becomes a noise source. Next, the CPU (6) proceeds to # 5 and R
The ES signal goes low and the CHG signal goes high to start the integration operation. Immediately after that, in step # 6, the FLASH signal goes high.
Then, the pulse xenon lamp (2) is caused to emit light. As described above, part of the light emitted from the pulse xenon lamp (2) is incident on the light source measurement spectroscopic sensor S2, and the remaining part is irradiated to the measurement sample (1), and the light is emitted from the measurement sample (1). Is reflected by the sample measurement spectroscopic sensor S1.
The light incident on the spectroscopic sensors S1 and S2 is dispersed by the bandpass filter arrays F1 and F2, respectively, and is incident on the silicon photodiode arrays PDA1 and PDA2.
Each of the silicon photodiodes in the section outputs a photocurrent proportional to the dispersed light intensity. The photocurrent from each silicon photodiode is current-voltage converted according to the formula and integrated according to the formula, as described in the description of the timing chart of FIG. Therefore, the output voltages V2 _{0 to} V2 ₇₉ of the integrating circuit increase in the positive direction as shown in FIG. The CPU (6) waits until the light emission ends in step # 7 (3 msec in this embodiment),
In step # 8, the CHG signal is set to Low to end the integration operation. In this state, the integrated output voltages V2 _{0 to} V2 ₇₉ hold a voltage proportional to the time integral value of the intensity of light incident on each silicon photodiode. At this time, the FLASH signal is also low
Return to level and prepare for the next flash.

Next, the CPU (6) proceeds to step # 9 where the variable N is set to 0. The variable N is the value output to the A, B, C, D inputs of the decoder IC1 in FIG. 5 through the input / output port (5),
When the variable N is represented by a binary number, the 0th bit corresponds to A, the 1st bit corresponds to B, the 2nd bit corresponds to C, and the 3rd bit corresponds to D. Next, at # 10, set the CLR output of the input / output port (5) to High.
Counter IC12, IC13, IC14, IC15, IC16, IC17, IC18, I
Clear the count value of C19 to 0. Next, at # 11, the value 0 of the variable N is output from the input / output port (6) to the A, B, C, D terminals of IC1. Next, return the CLR signal to Low in step # 12,
Set the signal to Low. Now, since the A, B, C, D inputs are all Low, as shown in Table 1, the Q ₀ signal becomes High and ADi (i
= 0,10,20,30,40,50,60,70) becomes High and analog switches SW3i, SW4i (i = 0,10,20, ..., 60,70) become conductive . Therefore, as described above, the integrated output voltage V2
i (i = 0,10,20, ..., 60,70) decreases linearly. At this time, comparator CMP0, CMP1, CMP2, CMP3, CMP
The non-inverting inputs of 4, CMP5, CMP6, CMP7 are analog switches SW3 ₀ , SW3 ₁₀ , SW3 ₂₀ , SW3 ₃₀ , SW3 ₄₀ , SW3 ₅₀ , SW3 ₆₀ , SW3
Through ₇₀ , V2 ₀ , V2 ₁₀ , V2 ₂₀ , V2 ₃₀ , V2 ₄₀ , V2 ₅₀ , V2 ₆₀ , V2 ₇₀
It is connected to the. Now, it will be described with attention to the voltage of V2 _0, V2 ₀ comparator C via the analog switch SW3 ₀
Connected to the non-inverting input of MP0. As mentioned above, V2 ₀
The output of is going to decrease linearly, when towards V2 ₀ than the reference voltage -V _B of the inverting input terminal of the comparator CMP ₀ is high, the output C0 of the comparator CMP0 is High. The C0 signal is connected to one input of the 2-input AND gate IC4, and the NOR of the output of the oscillator OSC and the signal is input to the other input of IC4. Therefore, the clock input terminal CK0 of the counter IC12 A signal represented by the logical expression of the equation is input to.

Therefore, the clock pulse signal is input to the clock input CK0 of the counter IC12 only when the comparator output C0 is High and the signal is Low.

The signal goes low at # 12, and currently the comparator output C0
Is high, the counter IC12 counts clock pulses. V2 ₀ voltage with time went linearly decreases becomes lower than the reference voltage -V _B, the comparator output C0 is switched to Low from High. When C0 becomes Low, the clock pulse signal is not input to the clock input CK0 according to the formula, and the counter IC12 stops counting.

Therefore, the count value CT0 of the counter IC12 becomes a value proportional to the time from when the signal becomes Low until C0 becomes Low, that is, a value proportional to the voltage value of (V2 ₀ + V _B ). In this way, the silicon photodiode PD0
This means that the integrated value of the photocurrent of has been A / D converted. V2 ₁₀ , V2
The voltage of ₂₀ , V2 ₃₀ , V2 ₄₀ , V2 ₅₀ , V2 ₆₀ , V2 ₇₀ is A / D converted in the same manner as above, and the counter IC13, IC14, IC15, IC16, IC17,
The count value CTk of IC18 and IC19 is a value represented by the following formula.

CTk = C ₁ (V2j + V _B ) ... (where C ₁ is a proportional constant) k = 0,1,2, ..., 7 j = k × 10 As mentioned above, all comparators CMP0 to CMP7 outputs C0 to C7 is connected to one input of each 8-input NOR gate IC2, and the output ADE of IC2 is the comparator output C0.
It is High only when ~ C7 are all Low, and is Low otherwise. The fact that the comparator outputs C0 to C7 are all Low means that V2 ₀ , V2 ₁₀ , V2 ₂₀ , V2 ₃₀ , V2 ₄₀ , V2 ₅₀ , V2
_60, V2 ₇₀ of A / D conversion is that all been completed.

The CPU (6) inputs the ADE signal from the input / output port (5) in step # 13 and checks whether it is High or not. if
If the ADE signal is not High, repeat the input and check of the ADE signal until it becomes High. If the ADE signal goes high, # 14
Go to and set the signal to High. When the signal becomes High, all the outputs Q _{0 to} Q ₉ of the decoder IC1 become Low and the analog switches SW4i, SW3i (i = 0,10,20,30,40,50,60,70) are turned off.
And the integrated output V2i (i = 0,10,20,30,40,50,60,70)
Voltage stops decreasing linearly and is maintained at the current voltage. In addition, the comparator CMPk (k = 0,1,2, ...,
The non-inverting input of 7) becomes High by the pull-up resistor R1k, the comparator output Ck becomes High, but the signal becomes Hi.
Since it is gh, the counts by the counters IC12 to IC19 are not performed according to the formula, and the count value at that time is held.

Next, the CPU (6) sends the count value CT0, CT1, CT2, ..., CT7 of the counters IC12 to IC19 through the I / O port (5) at # 15.
, Array variables CM1 (N), CM1 (N + 10),
Store in CM1 (N + 20), ..., CM1 (N + 70). Currently N is 0, so CM1 (0), CM1 (10), CM1 (20),
..., CM1 (70), that is, the V2i A / D conversion value is CM1
(I) (i = 0, 10, 20, ..., 70). Next, in # 16, N is incremented by 1, and whether N is 10 or not is determined. If it is not 10, the process returns to # 10. # 10 to # 15
Up to N = 1 this time, just like when N = 0
Therefore, the integral output V2 ₁ ,, V2 ₁₁ ,, V2 ₂₁ ,, V2 ₃₁ ,, V2 ₄₁ , V2 ₅₁ , V2
₆₁ , V2 ₇₁ are A / D converted, array variables CM1 (1), CM1 (11),
CM1 (21), CM1 (31), CM1 (41), CM1 (51), CM1 (61),
Stored in CM1 (71). In # 16, N is incremented by 1 and then N
When # 10 to # 17 are repeated until 10 becomes 10, all integrated outputs V2i are A / D converted and stored in CM1 (i). With V2i
The relationship of CM1 (i) can be expressed by an equation.

CM1 (i) = C ₁ (V2i + V _B ) ... When it is determined that N has become 10 in # 17, it means that A / D conversion of all integrated outputs is completed.
Is set to High, and the integration capacitor Cci (i = 0,1,2, ...,
Turn on analog switch SW2i connected in parallel to (79)
And the charge of the integration capacitor Cci is set to zero. Furthermore, 0 is output to A, B, C, and D here, and it returns to the initial state.

Next, proceeding to # 19 in FIG. 9B, the measurement of dark offset is started. The measurement of the dark offset is the measurement with the above-mentioned pulse xenon lamp (2) emitted.
~ It is almost the same as # 18, and the pulse xenon lamp (2) is not made to emit light, and the boost control signal FCHG2 is set to High in the step of # 31 after the measurement is finished, and the boost circuit (31)
The timing chart is omitted because the only difference is that the power supply is restarted. In # 19 to # 21, the integrated output V2i (i = 0,1,2, ..., 79) in the state where the pulse xenon lamp (2) is not emitted is obtained, and # 22 to #
All integrated outputs are A / D converted in 31 and array variable O
Stored in F (i). This value of OF (i) is a value including all the effects of the offset of the operational amplifier and the external light, the dark current of the silicon photodiode, the leakage current of the analog switch, and the like, and the pulse xenon lamp (2 ) Is emitted from CM1 (i), which is the measured value.
By subtracting F (i), it is possible to cancel the error due to the offset, the dark current of the silicon photodiode, the leakage current of the analog switch, the influence of external light, and the like. Further, since the pulse xenon lamp (2) is used as the light source in this embodiment, it is possible to measure the dark offset without chopping the light as in the case where the constant light is used as the light source. It has the advantage of not requiring a drive part. # In FIG. 9 (c)
From 32 to # 35, the above dark offset correction is performed. That is, the pulse xenon lamp (2)
A value obtained by subtracting the dark offset measurement value OF (i) from the measurement value CM1 (i) obtained by emitting light is stored in CM1 (i).

Calculation of spectral sensitivity correction is performed from # 36. Here, the meaning and principle of the spectral sensitivity correction will be described. FIG. 10 (a) shows the photocurrent I1i of each silicon photodiode in the spectroscopic sensor S1 used in this embodiment and the current-voltage conversion / integration circuit AN (i) (i = 0, 1, 2, ... , 39) Spectral sensitivity Si as a photometric circuit system multiplied by the amplification factor
(Λ) (i = 0, 1, 2, ..., 39). Where λ
Is the wavelength of light. The band-pass filter arrays F1 and F2 of the spectroscopic sensors S1 and S2 have been subjected to infrared cut and ultraviolet cut processing. The value of is almost zero. S0 (λ) to S39 (λ) are arranged at a pitch of approximately 10 nm, and the half-width of the bandpass is wider than 10 nm. In addition, due to the influence of internal reflection between the bandpass filter array and the photodiode array, it has sensitivity in a wavelength region that is considerably away from the peak wavelength, and this will be referred to as the tail of the spectral sensitivity. Due to the tail of the spectral sensitivity and the wide half width, an error occurs in the measured value. The calculation of the spectral sensitivity correction is to obtain a correct measured value from the output of the sensor having the spectral sensitivity having a wide half width as described above.

Now, let the peak wavelength of the spectral sensitivity Si (λ) (i = 0,1,2, ..., 39) be PKi (i = 0,1,2, ..., 39). Then, the measurement wavelength range (370 to 720 nm in this embodiment) 40 areas Δλi (i = 0,1,2, ...
・, 39). Now, the spectral distribution of the light incident on the spectral sensor S1 is approximated to be flat within one wavelength region divided into 40 as shown in FIG. 10 (b), and the light intensity in the wavelength region Δλi is approximated. Be Pi. At this time, Si (λ)
The output of one sensor with spectral sensitivity of Oi (i = 0,1,
2, ..., 39), Oi is expressed by the following equation.

Now, aij is defined as follows.

With this definition, the equation can be expressed as

Since the above equation holds for i = 0 to 39, the following equation holds using a matrix.

The above equation is expressed as follows.

However, here, Is the matrix Is the inverse matrix of. Therefore, , The output of the spectroscopic sensor S1 From the value of, the spectral energy distribution of the incident light You can know.

In order to obtain the Seeking Inverse matrix of Should be calculated.

The sample measurement spectroscopic sensor S1 has been described above for convenience, but the same applies to the light source measurement spectroscopic sensor S2. Here, the spectral energy distribution of the incident light is set to the wavelength region Δ
It was approximated as being flat in λi,
This example is for measuring the spectral reflectance of a reflecting object, and the spectral reflectance of a reflecting object such as a coating or a printed material generally has a gentle curve and there are many things without sharp absorption. Can be approximated as follows.

Here, description will be given again according to the flowchart of FIG. In the formula for the spectroscopic sensor for sample measurement (sensor for sample) S1 To And in the formula for the light source measurement spectroscopic sensor (reference sensor) S2 To And In # 36 to # 39, the spectral sensitivity correction calculation shown in the equation is performed for the sample measuring spectral sensor S1. From # 40 to # 43, spectroscopic sensor S2 for light source measurement
The spectral sensitivity correction calculation shown in the equation is performed.
The formula is as follows for the spectroscopic sensor S1.

Now, the output Oi of the spectroscopic sensor S1 (i = 0,1,2, ..., 39)
Is stored in CM1 (i) and P calculated by the formula
If you decide to store i in CM2 (i), Becomes The formula is as follows for the spectroscopic sensor S2.

Now, the output of the spectroscopic sensor S2 is CM1 (i + 40) (i = 0,1,
2, ..., 39) and calculated by the formula P
If you decide to store i in CM2 (i + 40), Becomes The values of Bij and B'ij are stored in advance in the spectroscopic sensor data storage section (9).

Next, in # 44 of FIG. 9 (d), the light source correction is calculated. The illumination light source of this embodiment is a pulse xenon lamp (2), and its spectral energy distribution slightly fluctuates with each emission. Since the light source measurement spectroscopic sensor S2 measures the spectral energy distribution of the pulse xenon lamp (2) at almost the same wavelength as the sample measurement spectroscopic sensor S1, the spectral energy distribution of the sample light measured by the spectroscopic sensor S1 is measured. By dividing each corresponding wavelength by the spectral energy distribution of the light source measured by the spectral sensor S2 and using that value as the measured value, it is possible to eliminate the error due to the variation in the spectral energy distribution of the light source. # 44 to # 47
The calculation is done in. In # 45, CM2 (I) is the measured value corresponding to the I-th silicon photodiode of the spectroscopic sensor S1, and CM2 (I + 40) is the I value of the spectroscopic sensor S2.
The measured values correspond to the second silicon photodiode. The value obtained by dividing CM2 (I) by CM2 (I + 40) is CM3 (I).
To store. This is repeated from I = 0 to 39, all measurement values are light source corrected, and stored in CM3 (I). The correction of the fluctuation of the spectral energy distribution of the illumination light source is completed as described above, and the corrected value is stored in CM3 (i) (i = 0 to 39).

Next, in # 48, the wavelength correction is calculated. Here, the meaning of the wavelength correction calculation will be described. The spectroscopic sensor of this embodiment
S1 and S2 use a bandpass filter array,
The peak wavelengths are approximately 10 nm apart, but there is some variation in the wavelength pitch due to an error in manufacturing the filter. This wavelength pitch variation is calculated by linear interpolation
Correcting to a value of 10 nm pitch is the wavelength correction calculation described here.

In # 48 of FIG. 9 (d), the wavelength number J is first set to zero. Wavelength number J is 10 nm in the wavelength range of 400 nm to 700 nm
It is a number given to the wavelength of the interval, and when the wavelength is 400 nm, J = 0
Then, it is a numerical value that increases by 1 for every 10 nm increase. I is the sensor number, which is initialized to zero at # 49. However, I =
0 is the number of the sensor with the shortest peak wavelength,
I increases by 1 toward the long wavelength side. At # 50, the wavelength W corresponding to the wavelength number J is calculated. In # 51,
The peak wavelength PK (I) of the I-th sensor is compared with the J-th wavelength W. If PK (I) <W, the I is incremented by 1 in # 52 and the process returns to # 51. If PK (I) ≧ W, the process proceeds to # 53. That is, in # 51 and # 52, the number of the sensor having the peak wavelength equal to or longer than the J-th wavelength w and closest to W is searched. In # 53 to # 55, W1 and W shown in FIG. 11 are used.
Calculate the value of 2, M. W1 is the peak wavelength PK of the sensor with the peak wavelength closest to W that is greater than or equal to the W determined in # 51 and # 52.
(I) and one of them, the peak wavelength PK of the sensor on the short wavelength side
(I-1) and W2 is the difference between W and PK (I-1). M is the measured value of the first sensor CM3 (I)
And the measured value CM3 (I-1) of the (I-1) th sensor
Is the difference. At # 56, the measurement value at the wavelength W is obtained from the measurement values of the I-th sensor and the (I-1) -th sensor by linear interpolation calculation, and the value is defined as MEAS (J). #
At 57, increase the wavelength number J by 1, and at # 58, 400nm ~ 7
To determine if the 00nm range is all over,
It is determined whether or not J is 31, and if it is not 31, the process returns to # 50, and the measured value at the next wavelength is obtained by the above-described interpolation calculation.
If J becomes 31, it means that all the measured values at 10 nm intervals in the range of 400 nm to 700 nm have been obtained by the interpolation calculation. Therefore, proceed to # 59 to end the photometric subroutine and return. In this embodiment, # 49 is used for the sake of clarity.
Although the process from # 54 to # 54 is provided, the sensor number corresponding to the wavelength W, W1, W2, etc. can be calculated in advance and stored in the spectral sensor data storage unit (9). In that case, # 49, # 51, # 52, # 53, # 54 can be omitted.

The photometering circuit operation and the correction calculation process of the present embodiment have been described above. Next, the function and operation of the entire system will be described with reference to the flowcharts of FIG. First, when the power of the system is turned on, the process proceeds to step # 100 in FIG. 12 (a), and the input / output port (5), the external input / output port (10), the magnetic storage control unit (11), the display control unit ( 13), keyboard (15) and printer (16) are initialized. Next, in step # 101, the memory and setting data in the data storage unit (8) are initialized. Next, the display subroutine is executed in step # 102, and it is determined in step # 103 whether or not a key is pressed. The display subroutine will be described in detail later. If the key is pressed, proceed to # 105 in FIG. 12 (b). If the key is not pressed, the current time is set to the real time clock (1
Input from 7), display the value and return to # 103. FIG. 26 shows an arrangement example of the keyboard (15) used in this embodiment.

In # 105 of FIG. 12 (b), the pressed key is "MENU".
If it is the key, it is determined, and if so, the setting subroutine for performing the setting-related processing is executed in step # 125, and the process returns to step # 102. If the key is not "MENU", proceed to # 106 to determine whether the key is "CAL", and if so, execute the calibration subroutine for performing the calibration process using the standard reflector in step # 126. Return to # 102.
If the key is not "CAL", proceed to # 107, determine whether the key is "MEAS", and if so, execute the measurement sub-routine that performs the process related to measurement in step # 127, and then execute # 103.
Return to. However, the measurement subroutine is different from the photometry subroutine described above, and will be described in detail later. The key is "ME
If it is not "AS", proceed to # 108, determine whether the key is "STAT", and if so, proceed to # 128 to execute a statistical subroutine for processing for statistical calculation of measured values.
Return to 2. If the key is not "STAT", proceed to # 109, determine whether the key is "DATA", and if so, proceed to # 129 to set the data number of the measured data to be displayed. Execute the setting subroutine and return to # 103. If the key is not "DATA", proceed to # 110 and determine whether the key is "FEED". If so, # 1
In step 30, a printer paper feed subroutine for feeding paper to the printer (16) is executed, and the flow returns to step # 103. The key is "F
If it is not "EED", proceed to # 111, determine whether the key is "HCOPY", and if so, proceed to # 131, execute the screen copy subroutine for copying the display screen to the printer (16), and proceed to # 103. If the key is not "HCOPY", proceed to # 112, determine if the key is "LIST", and if so, proceed to # 132 to display the numerical data list of measured values on the display (14). Execute the data list subroutine that displays, prints to the printer (16), or outputs to the external input / output port (10), and returns to # 102. If the key is not "LIST", press # 113. Go to, determine if the key is "DEL" and if so go to # 133
A data erasing subroutine for erasing the measurement data currently displayed is executed, and the process returns to step # 102. The key is "DE
If it is not "L", proceed to # 114, determine whether the key is "HELP", and if so, proceed to # 134 to execute a usage instruction subroutine for displaying a description of how to use the system. Return to 102. If the key is not "HELP", # 115
Proceed to to determine whether the key is "CUR", and if so, proceed to # 135 to perform processing to set whether or not to display the cursor in the graph of the spectroscopic measurement value. Cursor ON / O
Execute the FF subroutine and return to # 103. The key is "CUR"
If not, the process proceeds to # 116 to determine whether or not the key is "→", and if so, the process proceeds to # 136 to execute a cursor right move subroutine for performing a process of right moving the cursor of the spectroscopic measurement value graph display. Execute and return to # 103. If the key is not "→", proceed to # 117, determine whether the key is "←", and if so, proceed to # 137, and move the cursor in the spectral reflectance graph display to the left Execute the left move subroutine and return to # 103. If the key is not "←", proceed to # 118, determine whether the key is "DOUT", and if so, proceed to # 138 to perform processing of outputting measurement data to the external input / output port (10). Execute the data output subroutine and return to # 103. The key is “DOU
If it is not "T", proceed to # 119, determine whether the key is "PRINT", and if so, proceed to # 139 and execute the data print subroutine to print the measured data on the printer (16). Then, if the key is not "PRINT", the process proceeds to # 120 in Fig. 12 (c) to determine whether the key is "f1". Execute the range setting subroutine that performs processing to set the display scale and display range of the measured value graph and chromaticity measured value graph, and return to # 103.If the key is not "f1", proceed to # 121 and press the key. Determine if it is "f2", and if so, proceed to # 141 to display the spectroscopic measurement graph and chromaticity measurement graph.
The grid ON / OFF subroutine for setting whether to display the grid for the scale is executed, and the process returns to # 103. If the key is not "f2", proceed to # 122 and press the key "f3"
If so, the process proceeds to step # 142 to execute a color system setting subroutine for performing a process of setting which color system to use in the color value calculation, and the process returns to step # 102. If the key is not "f3", proceed to # 123, determine whether the key is "f4", and if so, proceed to # 143. In the spectroscopic measurement graph display, the measured value and the reference value are also displayed. The reference value ON / OFF subroutine for performing processing for setting whether to display or not is executed, and the process returns to # 103. If the key is not "f4", #
Proceed to 124 to determine if the key is "f6" and if so #
Proceeding to 144, the display mode setting subroutine for performing the process of setting the format of the graph to be displayed and the unit of the measured value is executed, and the process returns to # 102. If the key is not "f6", return to # 103.

The processing when various keys are pressed has been briefly described above. Next, the main ones thereof will be described in detail. FIG. 13 is a flowchart of a setting subroutine for performing the above-mentioned setting-related processing. #
In step 200, let the user select one of 19 types of setting items. Next, proceeding to # 201, it is determined whether or not the selected item is "light source", and if so, proceeding to # 202, the user is given five color values of D65, A, B, C and USER. Select one of the calculation light source types and return to # 200. If the item is not "light source", proceed to # 203, determine whether the item is "field of view", and if so, in # 204, let the user select either a 2 ° field of view or a 10 ° field of view. Return to. If the item is not "field of view", proceed to # 205, determine whether the item is in "trigger mode", and if so, proceed to # 206 to determine how to start measurement. However, the trigger mode is manual, external trigger single shot,
The user is made to select one of four continuous external triggers and a timer, and the process returns to step # 200. If the item is not "Trigger mode", proceed to # 207 and set the item to "Trace wavelength".
If yes, the process proceeds to step # 208 to let the user set the selected wavelength when displaying the temporal change of the spectral reflectance at the selected wavelength, and the process returns to step # 200. If the item is not "trace wavelength", proceed to # 209 to determine whether the item is "limit warning". If so, in # 210, the difference between the reference value and the measured value is equal to or more than the limit value. If so, the user is made to set whether or not to perform the warning process, and the process returns to # 200.
If the item is not "limit warning", proceed to # 211 to determine whether the item is "average number of times", and if so, proceed to # 212 and determine how many times the average value of the measurements is used. Let the user set the average count and return to # 200. If the item is not "average count", proceed to # 213 to determine whether the item is "print mode". If so, whether to print the measurement data automatically every measurement (AUTO), Whether measurement data is printed only when the "PRINT" key is pressed (MANUA
Let the user set L) and return to # 200. If the item is not "print mode", proceed to # 215 to determine whether the item is "print item", and if so, proceed to # 216, and when printing the measurement data, spectral data and color calculation value The user is allowed to select which item of one or more types among various data to be printed, and the process returns to step # 200. If the item is not "print item", proceed to # 217, determine whether the item is in "data output mode", and if so, proceed to # 218 and output the measurement data to the external input / output port (10). Have the user set whether to automatically perform each measurement (AUTO) or output measurement data only when the "DOUT" key is pressed (MANUAL), and return to # 200. If the item is not "data output mode", proceed to # 219, determine whether the item is "data output item", and if so, proceed to # 220 and output the measured data to the external input / output port (10). In doing so, the user is allowed to select which item of one or more types among various data is to be output, and the process returns to step # 200. If the item is not a "data output item", proceed to # 221 to determine whether the item is in "RS232C mode", and if so, proceed to # 222 to inform the user of the baud rate of the RS232C port which is an external input / output port. Set various modes such as or stop bit length and return to # 200. If the item is not "RS232C mode", proceed to # 223, determine whether the item is "timer", and if so, proceed to # 224, start time, interval time, end time or end of the measurement interval timer. The user is made to set the number of times and whether the end is performed at the time or the number of times, and the process returns to step # 200. If the item is not "timer", proceed to # 225, determine whether the item is "clock", and if so, proceed to # 226 to let the user set the current time of the real-time clock (17). Return to 200. # 2 if the item is not "clock"
Proceed to 27, determine whether the item is “user spectral sensitivity”, and if so, proceed to # 228 to input the user spectral sensitivity.

Here, the meaning of the user spectral sensitivity will be described. In general, CIE spectral tristimulus values _{λ 1} , _λ , and _λ are used for color calculation. For example, when measuring the color density of a photograph, the spectral sensitivities shown in FIG. It has been disassembled, and other industries and users may use dedicated spectral sensitivities, and it would be extremely difficult if any spectral sensitivities other than _λ , _λ , and _λ could be used in color measurement. It is convenient. In this embodiment, the data of _{λ 1} , _{λ 2} , and _λ are stored in the ROM (7) as standard, and are used for color calculation. In addition to this, the user has arbitrary spectral sensitivity (hereinafter referred to as user spectral sensitivity). You can enter the
It is possible to store it in the RAM (8), calculate the product sum of its spectral sensitivity, the spectral reflectance of the sample, and the spectral energy distribution of the light source, and display it. Three types of spectral sensitivity can be input, which is convenient for three-color separation. Enter the three types of user spectral sensitivities with # 228 to # 230, and use US1 (i), US2 (i), US3 (i) (i
= 0 to 30), and return to # 200. If the item is not "user spectral sensitivity", the process proceeds to # 231 to determine whether the item is "user light source". If yes, the process proceeds to # 232 to input data of the spectral energy distribution of the user light source. Here, the meaning of the user light source will be described. In the color calculation of the object color, a D65 light source, an A light source, a B light source, a C light source or the like is used as a standard light source, and in this embodiment, the data of the spectral energy distribution of these light sources is stored in the ROM (7). It is used for color calculation, but if the user can define a light source with an arbitrary spectral energy distribution in addition to these standard light sources and can perform color calculation with that light source, the light source that affects the appearance of the object color This is useful when evaluating the color rendering index, which is expensive. In this embodiment, the user can input an arbitrary spectral energy distribution of the light source (hereinafter referred to as user light source), the data is stored in the RAM (8), and the color is calculated using the light source data. Is possible.
In # 232, input the spectral energy distribution of the user light source and store it in the memory UP (i) (i = 0 to 30).
Return to # 200.

If the item is not "user light source", proceed to # 233, determine whether the item is "user standard plate", and if so, proceed to # 234, enter the spectral reflectance data of the user standard plate, and enter R2 ( i) (i = 0 to 30), and return to # 200. The user will describe the standard plate in detail in the explanation of the calibration subroutine described later, but in simple terms, this embodiment uses the standard plate in which the user measured reflectance data by himself using a spectroscope or the like. It is the standard plate when calibrating the reflectance of the. If the item is not the "user standard plate", the process proceeds to # 235, determines whether the item is the "limit value", and if so, the process proceeds to # 236. In this embodiment, the upper limit value and the lower limit value of the spectral reflectance can be set for each wavelength, and when the spectral reflectance measurement value is out of the range of the limit value, a warning display is issued. There is. In addition, the upper limit value and lower limit value data can be displayed overlaid on the spectral graph display that displays the spectral reflectance measurement value, so that the relationship between the measured value and the limit value can be seen at a glance. Has become. In # 236, the upper limit value data is input and stored in LIMH (i) (i = 0 to 30), and in # 237, the lower limit value data is input and LIML
(I) Store in (i = 0 to 30) and return to # 200. If the item is not the "limit value", proceed to # 238 and the item is the "reference value".
If yes, proceed to # 239 to perform measurement and select whether to use the measured value as the reference value or enter the spectral reflectance data from the keyboard and use that value as the reference value. Do. # 239 displays the selected item,
Wait for key input at # 240. If there is a key input, proceed to # 241 to determine whether or not the key is 1, and if it is 1, it is a mode in which the measured value is used as a reference value, so proceed to # 242 and execute the photometry subroutine described above. Spectral reflectance R (i) at 243
(I = 0 to 30) is calculated, R (i) is stored in the reference value memory STD (i) (i = 0 to 30) in # 244, and the process returns to # 200. In # 241, if the key is not 1, proceed to # 245,
Whether the number of keys is 2 is determined, and if not, the process returns to # 240 and waits for key input. In # 245, if the key is 2, it is the mode in which the input data from the numeric keypad is used as the reference value data. Therefore, the process proceeds to # 246, and the spectral reflectance data of the reference value is input from the numeric keypad, and the STD (i) ( i = 0-3
Store it in 0) and return to # 200. If the item is not the "reference value", the process proceeds to # 247 to determine whether the item is "end", and if so, the setting subroutine is ended and the process returns.
If the item is not "end", return to # 200.

The description of the setting subroutine is completed above, and then, the calibration subroutine for performing the process of calibrating the reflectance measurement value using the sample whose spectral reflectance is known in advance will be described. FIG. 14 shows a flowchart of the calibration subroutine. # 300 out of 5 items
Let the user choose one. Explaining five items, "1. High-precision standard white plate" is a calibration that uses an expensive high-precision standard white plate whose spectral reflectance has very little change over time. Is a calibration that uses an inexpensive standard white plate whose spectral reflectance changes over time is higher than that of a high-precision standard white plate, and "3. User standard plate" is a standard for the user of the device of this embodiment. It is an item to measure the spectral reflectance of a sample other than the attached white plate with a spectroscope and calibrate it using the sample. "4. Calibration mode" is an item for selecting the calibration mode, and "5. End" is an item for ending the calibration subroutine.

In # 301, it is determined whether or not the item is “end”. If so, the process proceeds to # 302, the calibration subroutine is terminated, and the process returns. If not, proceed to # 303 to determine whether the item is calibrated with a high-precision standard white plate, and if so, proceed to # 304 to display a message to set the high-precision standard whiteness as a sample. , # 305 allows the user to select one from the two items of “measurement” and “stop”. In # 306, it is determined whether the item is “stop”. If “stop”, proceed to # 307. , The calibration subroutine is ended, and the process returns. If the item is not "Cancel", proceed to # 308 to determine whether or not the item is "Measurement", and if not, return to # 305, and if so, execute the photometric subroutine in # 309, # At 310, the measured value MEAS (i) is stored in C0 (i) (i = 0 to 30). Next, in # 311, a message to the effect that the standard white plate is set as a sample is displayed, and in # 312 the user is allowed to select one of two items, “measurement” and “stop”.
Determines whether the item is "Cancel", and if "Cancel",
The calibration subroutine is terminated and the process returns. "Cancel"
If not, the process proceeds to # 314 to determine whether or not the item is “measurement”. If not, the process returns to # 312, and if so, the process proceeds to # 315 to execute the photometric subroutine. Measurement value MEA at # 316
S (i) is stored in C1 (i) (i = 0 to 30).

Next, in # 317, the spectral reflectance of the common standard white plate is calculated by the formula, stored in R1 (i) (i = 0 to 30), the process proceeds to # 318, the calibration subroutine is terminated, and the process returns.

R1 (i) = C1 (i) × R0 (i) / C0 (i) (i = 0 to 30) In the above formula, R0 (i) is the spectral reflectance data of the high-accuracy standard white plate. The value is stored in the ROM (7) in advance. That is, in # 304 to # 310, the measurement values were calibrated by the high-precision standard white plate, and in # 311 to # 317, the spectral reflectance of the regular standard white plate was measured and stored. In # 303, if the item is not “high-precision standard white plate”, proceed to # 319. It is determined whether or not the calibration is performed using the common standard white plate, and if so, the process proceeds to # 320, a message indicating that the common standard white plate is set as a sample is displayed, and in # 321,
The user is prompted to select one of the two items, "measurement" and "stop", and in # 322 it is determined whether or not the item is "stop". Ends and returns. If it is not "Cancel", proceed to # 324,
Determine whether the item is "measurement" and not "measurement"#
Returning to step 321, if “measurement”, the process proceeds to step # 325 to execute a photometric subroutine. In # 326, the measured value MEAS (i) is C1
Store in (i), proceed to # 327, end the calibration subroutine, and return.

As described above, in the apparatus of the present embodiment, the absolute value calibration of the spectral reflectance includes the calibration with the regular standard white plate and the calibration with the high-precision standard white plate, which is inexpensive for daily calibration. In order to correct the temporal change in the spectral reflectance of the regular standard white plate, the regular standard white plate is used once every several months, and the spectral reflectance of the regular standard white plate is measured using the high precision standard white plate. Is measured and stored in memory.
The high-precision standard white plate is rarely used, and by storing it in an appropriate place, it is possible to prevent changes over time due to dirt and ultraviolet rays, and the standard white plate for regular use is stored once every few months. Since the change is corrected, maintenance is relatively easy. Therefore, this method can configure an inexpensive, workable, and highly accurate measurement system.

By the way, if the item is not the "normal standard white plate" in # 319, the process proceeds to # 328 in FIG. 14 (b) to determine whether the item is the "user standard plate". Proceed to step 1 to let the user select one item from the two items of "measurement" and "stop", and determine whether the item is "stop" in # 330,
If it is "Cancel", the process proceeds to # 331 to end the configuration subroutine and return. If it is not "Cancel", proceed to # 332 to determine whether the item is "Measurement". If it is not "Measurement", return to # 329. If it is "Measurement", execute the photometry subroutine in # 333. Measured value MEAS (i) is C2 (i) at 334
Store in (i = 0 to 30) and return. In # 328, if the item is not "user standard plate", proceed to # 336, determine whether the item is in "calibration mode", otherwise return to # 300, and if so, proceed to # 337. Then, one of the two calibration modes of the standard white plate and the user standard plate is selected and the process returns. If the standard white plate calibration mode is selected, # 320 to # 3 will be used when calculating the spectral reflectance of the sample.
Value obtained by calibration using a standard white plate performed in Step 26
C1 (i) and the spectral reflectance data R1 (i) of the standard white plate for common use measured in # 311 to # 317 are used. When the calibration mode of the user standard plate is selected, when calculating the spectral reflectance of the sample, the value C2 (i) obtained by the calibration with the user standard plate of # 329 to # 334 and the setting subroutine # 324 are used. The input spectral reflectance data R2 (i) of the user standard plate is used.

This is the end of the description of the calibration subroutine, and then the measurement subroutine will be described. FIG. 15 is a flowchart of the measurement subroutine. In # 400, first, the trigger mode is determined, and if it is the manual mode, the process proceeds to # 406, and if it is the timer mode, the process proceeds to # 401. In # 401,
Input the data of the real time clock (17) and determine whether the current time has passed the measurement start time set in # 224 of the above-mentioned setting subroutine. If "NO", proceed to # 402. It is determined whether or not the stop key is pressed, and if it is pressed, the process proceeds to step # 403 to end the measurement subroutine and return. If the stop key is not pressed, the process returns to # 401. If the current time has passed the measurement start time in # 401, the process proceeds to # 404 and the number of measurements J is cleared to zero. Next, at # 405, the current time is stored in the register T, and the routine proceeds to # 406. In # 406, a photometric subroutine is executed, and in # 407, a reflectance calculation subroutine is executed. The calculation result is stored in R (i). Details of the reflectance calculation subroutine will be described later. In # 408, execute a calculation subroutine that performs calculations such as color calculation and limit determination,
In # 409, a calculated value display subroutine for displaying the measured value and the calculated value is executed. In # 410, it is determined whether or not there is a free area in the measurement value memory. If there is no free area, the procedure proceeds to # 411, in which there is no free area in the measurement value memory and the current measurement value is not stored. Give a warning and proceed to # 412. If there is a free area in the measured value memory, proceed to # 413 and indicate the last measured data number N
1 is added to 1, and in # 414, N1 is substituted for N2 indicating the number of the displayed data. In # 415, the value of N2, which is the number of the data being displayed, is displayed. Then, in # 416, the spectral reflectance calculation value R (i) (I = 0 to 30) is stored in the N1th measurement value memory. Store in and proceed to # 412. In # 412, it is determined whether the print mode is AUTO. If it is AUTO, the process proceeds to # 417, the print item selected in # 216 of the setting subroutine is printed by the printer (16), and the process proceeds to # 418. . If the print mode is not AUTO in # 412, the process proceeds to # 418. #Four
In 18, it is determined whether or not the data output mode is AUTO, and if it is AUTO, the process proceeds to # 419, and the data output item selected in # 220 of the setting subroutine is output to the external input / output port (10). Go to. In # 418, the data output mode is
If not AUTO, go to # 420. In # 420, the trigger mode is determined, and if it is the manual mode, the process proceeds to # 421 to end the measurement subroutine and return. If it is the timer mode, proceed to # 422 and increase the number of times of measurement J by 1 and determine the timer end mode at # 423.
Is equal to the end count set in # 224 of the measurement subroutine.
Go to 6. In # 423, if the timer end mode is the time end mode, the process proceeds to # 426. # In 426, determine whether or not the cancel key is pressed, and if it is pressed #
Proceed to 425 to end the measurement subroutine and return. If the stop key is not pressed, the process proceeds to # 427, and it is determined whether or not the current time has passed the time T, which is the last measurement, plus the interval time set in # 224 of the setting subroutine, If the time has elapsed, return to # 405 and repeat the measurement. If it has not elapsed, the process proceeds to # 428 to determine the timer end mode, and if it is the end mode by the number of times, the process returns to # 426 to repeat the stop key and the interval time check. If it is the time end mode, proceed to # 429 to determine whether or not the current time has passed the end time, and if it is, proceed to # 425 to end the measurement subroutine and return. If # 426
Return to and repeat the check of the stop key, interval time, and end time.

This is the end of the description of the measurement subroutine, and then the reflectance calculation subroutine used in # 407 of the measurement subroutine and # 243 of the setting subroutine will be described. FIG. 16 is a flowchart of reflectance calculation. The reflectance calculation is to calculate the spectral reflectance of the sample from the spectral reflectance data of the standard plate used for calibration, the measured value, and the measured value of the sample. In # 500, the wavelength counter I is first cleared to 0. In # 501, the current calibration mode is standard white plate or user standard plate. This calibration mode is set in # 337 of the calibration subroutine. If the calibration mode is the standard white plate, the spectral reflectance R (I) of the sample at the I-th wavelength is calculated by the formula in # 502, and the process proceeds to # 504.

In the above equation, MEAS (I) is the measured value of the sample, C1 (I) is the measured value of the standard white plate used in the calibration, and R1 (I)
Is the spectral reflectance of the standard white plate used in the calibration process. If the calibration mode is the user standard plate in # 501, the spectral reflectance R (I) of the sample at the I-th wavelength is calculated by the equation in # 503, and the process proceeds to # 504.

In # 504, the wavelength counter I is incremented by 1, and in # 505, I
Determine if 31 or not. In this embodiment, the reflectance of 10 nm pitch in the wavelength region from 400 nm to 700 nm is calculated, so that I is 0 to 30, and when I becomes 31, the reflectance of all wavelengths is calculated. So if I is 31, # 506
Then, the reflectance calculation subroutine is terminated and the process returns. If I is not 31, the process returns to # 501 and is repeated until the reflectance calculation for all wavelengths is completed. This is the end of the description of the reflectance calculation subroutine.

Next, the calculation subroutine used in # 408 of the measurement subroutine will be described. This subroutine is a subroutine for performing various color calculations and limit determination processing based on the spectral reflectance R (i) of the sample calculated by the reflectance calculation subroutine. FIG. 17 is a flowchart of the calculation subroutine. In # 600, the color system mode is determined, and if the color system mode is the user spectral sensitivity mode,
Go to # 601. # 202 of the setting subroutine in # 601 to # 609
The type of the light source selected in step S1 is determined, and the spectral energy distribution data of the selected light source is stored in P (i).
If the selected light source is any one of D65, A, B and C light sources, the spectral energy distribution data D65 (i), A (i), B (i ),
Store C (i) (i = 0 to 30) in P (i). If the selected light source is the user light source, the spectral energy distribution data UP (i) of the user light source set in # 232 of the setting subroutine is stored in P (i). In # 610, color calculation is performed for the first user spectral sensitivity US1 (i). As shown in the flowchart, the spectral energy distribution P (i) of the light source and the first user spectral sensitivity US1
The value obtained by dividing the product sum of (i) and the spectral reflectance R (i) of the sample within the measurement wavelength region by the product sum of P (i) and US1 (i) within the measurement wavelength region is the first User color data UC (1)
To. In # 611 and # 612, for the second and third user spectral sensitivities US2 (i) and US3 (i), respectively, # 6
The same calculation as in 10 is performed, and the second and third user color data UC (2) and UC (3) are respectively substituted. Then # 6
13, # 614, # 615 Color calculation for user spectral sensitivity US1 (i), US2 (i), US3 (i) for the spectral reflectance data STD (i) of the reference value set after # 239 of the setting subroutine And set the values to USTD (1) and USTD respectively.
Store in (2), USTD (3). Next, in # 616, the user spectral sensitivity number I is set to 1, and in # 617, it is determined whether the color system is the logarithmic mode or the percent mode of the user spectral sensitivity. If it is the logarithmic mode, in # 618 and # 619, UC (I) and UST
Recalculate D (I) from percent value to absorbance value. When the spectral sensitivity for color density measurement of color photographs is set as the user spectral sensitivity and color measurement of color photographs is performed, color evaluation is generally performed with a logarithmic value, so the absorbance value that is a logarithmic value is used. The calculation function is very effective. In # 620, the difference between the measured value and the reference value is calculated and stored in ΔUC (I). If the color system is not the logarithmic mode but the percent mode, proceed to # 622, calculate the ratio between UC (I) and USTD (I), store in ΔUC (I), and proceed to # 621. . # 621
By adding 1 to I and discriminating the value of I in # 623, # 617 to # 621 are calculated for I = 1, 2, and 3, and the process proceeds to # 624.

In # 600, if the color system is not the user spectral sensitivity mode but the XYZ mode, the tristimulus value data (previously stored in ROM (7) in the field of view (2 ° or 10 °) selected in the setting subroutine in # 625. Stored), the data of the spectral energy distribution of the selected light source, and the spectral reflectance data of the sample, the color calculation in the normal XYZ color system or X ₁₀ Y ₁₀ Z ₁₀ color system is performed. Go to # 624. In # 624, the limit warning mode selected in # 210 of the setting subroutine is determined, and if the limit determination warning is issued (ON), then # 62.
Go to 5. In # 625, the wavelength number I is cleared to zero.
In # 626, the spectral reflectance R (I) of the sample at the I-th wavelength
Is greater than or equal to the upper limit value LIMH (I) of the spectral reflectance at the I-th wavelength set in # 236 of the setting subroutine, and if so, the process proceeds to # 627 and the spectral reflectance of the sample is determined. A limit warning display indicating that the rate is out of the allowable range is displayed, the arithmetic subroutine is terminated, and the process returns. # 626, R
If (I) is smaller than LIMH (I), proceed to # 628, where I
It is determined whether or not the spectral reflectance R (I) of the sample at the th-th wavelength is less than or equal to the lower limit value LIML (I) of the spectral reflectance at the I-th wavelength set in # 237 of the setting subroutine. If so, proceed to # 627, display a limit warning indicating that the spectral reflectance of the sample is outside the allowable range, and return. #
In R628, when R (I) is larger than LIML (I), the process proceeds to # 629, 1 is added to the wavelength number I, and the process proceeds to # 630. In # 630, in order to determine whether or not all wavelengths have ended, it is determined whether or not I is 31, and if "NO", the limit determination after # 626 is repeated for the next wavelength. If "YES", the spectral reflectance of the sample at all wavelengths is within the allowable range.
In 1, the limit warning display is erased, the calculation subroutine is terminated, and the process returns. In # 624, if the limit warning mode is a mode (OFF) in which the limit determination warning is not issued, the limit determination is not performed, the process immediately proceeds to # 631, the limit warning display is erased, and the process returns. This is the end of the description of the calculation subroutine.

Next, the calculation value display subroutine used in # 409 of the measurement subroutine will be described. FIG. 18 is a flowchart of the calculation value display subroutine. Figure 19 (a)
An example of the display is shown in (b). In # 700, it is determined whether or not the display mode set in the display mode setting subroutine of # 144 in FIG. 12 (c) is the spectral reflectance display mode. If “YES”, the process proceeds to # 701. If the previous measured value is currently displayed on the spectral reflectance graph, it is deleted and the spectral reflectance measured value currently stored in R (i) is displayed on the spectral reflectance graph. Here, it is determined whether or not the cursor display mode is ON, and when it is ON, the cursor currently displayed on the spectral reflectance graph and the numerical display of the data at the cursor point are corrected to correspond to the new measurement value. Processing is also performed. Next, after # 702, a time change graph of the spectral reflectance at the selected wavelength is displayed. First, in # 702, the selected wavelength number I is set to zero. In this embodiment, three types of wavelengths, WL (0), WL (1), and WL (2), are selected as 400 nm to 7 nm.
It can be set in 1nm pitch in the range of 00nm, and it is set in # 208 of the setting subroutine. Since the measured spectral reflectance values are at 10 nm intervals, the spectral reflectance at the selected wavelength is calculated by interpolation. In # 703, a value obtained by cutting off the ones digit of the I-th selected wavelength WL (I) is substituted for WL. In # 704, the wavelength number k corresponding to the wavelength WL is calculated, # 705
Then, the spectral reflectance R (k) at the wavelength WLnm and the wavelength (WL-
Using the value of the spectral reflectance R (k-1) at 10) nm,
The spectral reflectance at the wavelength WL (I) is obtained by interpolation calculation and substituted into y. In # 706, the value of I is determined and I = 0
If so, the X mark is drawn at # 707, if I = 1, the ● mark is drawn at # 708, and if I = 2, the O mark is drawn at # 709 at the coordinate (N2, y) of the time change graph. That is, the 0th selected wavelength WL (0) is set so that the data of the three selected wavelengths can be identified.
The data in is the × mark, the first selected wavelength WL
The data in (1) is the ● mark and the second selected wavelength.
The data in WL (2) is indicated by a circle. here
N2 is the data number of the data to be displayed as described in the measurement subroutine. In # 710, 1 is added to I, the value of I is determined in # 711, and for all of I = 0, 1, 2 # 703-
Perform # 710 and proceed to # 712. In the time change display, new data is overwritten without erasing the graph displayed immediately before, and the oldest to the latest spectral reflectance data of the selected wavelength are arranged from left to right. Since they are displayed at the same time, the user can see the change over time. Also, in the spectral reflectance graph, a straight line is drawn vertically at the position of the selected wavelength with a broken line, and the marks ×, ●, and ○ corresponding to each selected wavelength are drawn above it (see FIG. 19 ( (See a)), the relationship between the selected wavelength and the mark can be seen at a glance. Next, in # 712, it is determined whether or not the cursor is currently displayed. If it is displayed, the process advances to # 713 to move the cursor displayed on the reflectance time change graph to the position N2 on the horizontal axis. This cursor indicates which data on the time change graph the data being displayed on the spectral reflectance graph corresponds to. If the cursor is not being displayed at # 712, the process immediately proceeds to # 714. # 7
At 14, the color calculation value calculated by the calculation subroutine is displayed numerically, and the process proceeds to step # 715 to end the calculation value display subroutine and return. If the display mode is not the spectral reflectance display mode in # 700, it is the color graph display mode, so the process proceeds to # 716, and thereafter, the color graph display is performed (No. 19).
See FIG. (B)). In # 716, it is determined whether the current color system is the XYZ color system or the user spectral sensitivity color system. If it is the XYZ color system, proceed to # 717 and plot the Yxy calculated value on the Yxy chromaticity coordinate graph. And proceed to # 714. If the color system is the user spectral sensitivity color system, proceed to # 718 to # 720, and mark x on the coordinate (N2, UC (1)) of the time-varying graph of the user color and the coordinate (N2, UC (2)). ) Mark ●, coordinates (N2, UC (3))
Draw a circle mark on and proceed to # 712. UC (1), UC
(2) and UC (3) are user spectral sensitivities US1 (i), US2 (i), and US3, respectively, as described in the calculation subroutine.
In # 712 to # 713, which are color calculation values corresponding to (i), the data corresponding to the data number being displayed is located at any position on the time change graph of the user color, similar to the time change graph of the spectral reflectance. A cursor is displayed to indicate whether there is any, and then the color calculation value is numerically displayed in # 714 and the process returns. In the present embodiment, UC (1), UC
Although the values of (2) and UC (3) are graphed, it is easy to provide a function to graph ΔUC (1), ΔUC (2), and ΔUC (3) that represent the deviation from the reference value. Is. In addition, in order to identify the plot points in the time change graph of the spectral reflectance and the time change graph of the user color, the marks of the plot points are changed to ×, ●, and ○. In this case, it may be distinguished by the displayed color. This is the end of the description of the calculated value display subroutine.

Next, the data number setting subroutine will be described. FIG. 20 shows a flowchart of the data number setting subroutine. In this subroutine, data of an arbitrary number is called out from the N1 measurement value memories for display, and is processed as reflectance data. The user only inputs the data number and the memory content of that data number is called, but the input of that data number can also be set with numerical data using the numeric keypad,
Further, the data numbers can be continuously increased or decreased by using the "↑", "↓", "→" and "←" keys. By continuously increasing or decreasing the data number and displaying the stored contents of the data number on the graph every time the data number changes, the temporal change of the spectral reflectance data is recognized as a moving image of the spectral reflectance graph. can do. Hereinafter, description will be given according to the flowchart in FIG. # 800
Then, first, it is determined whether or not N1 (data number of the final measurement value) is zero. If N1 is zero, it means that there is no measured value, so proceed to # 801 without doing anything and return. If N1 is not zero, proceed to # 802 and wait until there is a key input. If there is a key input, proceed to # 803 to determine whether or not the key is a numeric key. , In variable N. # 805 with variable N
Discriminates whether the value of is an appropriate value, and if "YES", N2
And substitute to # 807. As described above, N2 is a variable that represents the data number of the data being displayed. If N is not an appropriate value in # 805, the value of N2 is not changed and the process proceeds to # 807. In # 807, the value of N2 is displayed as the data number display. In # 808, the N2th measurement value memory MEM (N2, i) is stored in the spectral reflectance data R (i), the calculation subroutine is executed using the R (i) in # 809, and the calculation value is calculated in # 810. Execute the display subroutine and return to # 802. # 8 in # 803 if the key is not a numeric key
Proceed to 11. In # 811, 5 is set to the variable k for adjusting the data number changing speed. The larger the value of k, the slower the speed of changing the data number. At # 812, the contents of the key input are stored in a variable called KM. In # 813, it is determined whether the contents of the key input and the contents of KM are equal, and if they are equal, the process proceeds to # 814. In # 814, it is determined whether or not the key is the cancel key. If the key is the cancel key, the process proceeds to # 815 to end the data number setting subroutine and return. If it is not the cancel key, proceed to # 816. After that, determine the contents of the key input in # 816 to # 824. If the key input is the "↑" key,
Set 10 to -10 for the "↓" key, 1 for the "→" key, -1 for the "←" key, and 0 for other keys as the data number change value d And proceed to # 825. # 8
In 25, the value obtained by adding d to N2 is substituted for N, and # 826 to # 830
The proper determination of the value of N is made with. N2 if N is less than or equal to zero
= 1, if N is greater than the data number N1 of the final measurement,
Set N2 = N1 and proceed to # 831. If N is a proper value, N
Substitute the value of for N2 and proceed to # 831. The value of N2 is displayed as the data number display in # 831, and the spectral reflectance data R is displayed in # 832.
The contents of the N2th measurement value memory MEM (N2, i) are stored in (i), the calculation subroutine is executed in # 833, and the calculation value display subroutine is executed in # 834. After # 835, it waits for the time for determining whether the key is continuously pressed and adjusting the data change speed. In # 835, it is determined whether or not a key is pressed, and if not pressed, the flow returns to # 802 to wait for a new key input. # 836 100 if pressed
Wait for msec. In # 837, k is decremented by 1, and # 8
In step 38, it is determined whether k is zero or not, until it becomes zero.
Repeat # 837. When k becomes zero, k is set to 1 in # 839 and the process returns to # 813. # 813 is a memory of key input contents
KM is compared with the current key input content, and if they do not match, the process returns to # 802 and waits for a new key input. That is, “↑”, “↓”,
Holding down one of the "→" and "←" keys will increase / decrease the data number continuously, but from the first increase / decrease of the data number to the second increase / decrease of the data number, the time interval is 500 msec. Is a time interval of 100 msec. If the "↑" and "↓" keys are used, a fast increase / decrease of 10 units is performed, and if the "→" and "←" are used, a slow increase / decrease of 1 unit is performed. That is, there are a total of four data number changing speeds, and when viewing the temporal change in the spectral reflectance as a moving image of the spectral reflectance graph, the speed can be selected, which is convenient. This is the end of the description of the data number setting subroutine.

Next, the display subroutine used in # 102 of the flowchart of the main program of FIG. 12 (a) will be described. The "calculated value display subroutine" described above was to display the measured value or calculated value on the already displayed graph scale, but the "display subroutine" explained below is the display mode, color system and selected wavelength. When the graph is redrawn from the beginning with a new display mode, color system, selected wavelength, etc., after the change etc. This is a subroutine used when performing. FIG. 21 is a flowchart of the display subroutine. An example of the display is shown in FIG. In # 900, erase all display. The display mode is determined in # 901. If the spectral reflectance display mode is selected, the flow advances to # 902 to draw the frame and unit of the spectral reflectance graph and the frame and unit of the spectral reflectance temporal change graph. In # 903, it is determined whether the grid display mode is ON or OFF. If it is ON, a grid is drawn on the spectral reflectance graph and the spectral reflectance time change graph at # 904 (Fig. 19 (c)).
reference). If the grid display mode is OFF in # 903, # 90
Proceed to # 905 without passing 4. At # 905, a vertical broken line for indicating the position of the selected wavelength for the time change display and marks x, ●, and ○ are drawn on the spectral reflectance graph. In # 906, it is determined whether the limit warning mode is ON or OFF. If it is ON, in # 907 the upper limit value data LIMH (i) and the lower limit value data LIML of the spectral reflectance are determined.
Display (i) and # on the spectral reflectance graph # 90.
Go to 8. If OFF, go to # 908. # In 908, determine whether the cursor display mode is ON, and if it is ON, #
The cursor is drawn at 909, the data at the cursor point is displayed numerically, and the process proceeds to step # 910 (see FIG. 19 (d)). If it is OFF, proceed directly to # 910. In # 910, the reference value display mode is
It is judged whether it is ON or not, and if it is ON, the reference value data STD is sent in # 911.
Display (i) on the spectral graph and proceed to # 912. If it is OFF, proceed directly to # 912. If the display mode is color graph display mode in # 901, proceed to # 926 to determine whether the color system is the XYZ color system or the user spectral sensitivity color system. If the color system is the XYZ color system, the Yxy graph frame is displayed. The unit is drawn, and in the case of the user spectral sensitivity color system, the frame and unit of the time change graph of the user color are drawn. In # 929, it is determined whether the grid display mode is ON or OFF. If it is ON, the grid is drawn on the Yxy graph or the user color time change graph in # 930, and the process proceeds to # 912. O
If it is FF, proceed to # 912 without doing anything. In # 912 to # 917, 1 to plot all the memory contents of the 1st to N1th measurement values in the time display graph of the spectral reflectance, the Yxy graph, or the time change graph of the user color.
Spectral reflectance R (i) from the second measurement value memory MEM (1, i) to the N1th measurement value memory MEM (N1, i)
Substituting in, the calculation subroutine, and the calculation value display subroutine are executed. # 918 to # 922 are processes for displaying the spectral reflectance graph of the N2th measurement value memory MEM (N2, i), color calculation values, etc., and # 918 is a frame for displaying numerical values of color values. Draw a unit, and at # 919, R MEM (N2, i)
Substitute in (i), execute the calculation subroutine in # 920,
The value of N2 is displayed as the data number in # 921, the calculated value display subroutine is executed in # 922, and the process returns. This is the end of the description of the display subroutine.

Next, the grid ON / OFF used in # 141 of Fig. 12 (c)
The subroutine will be described. This subroutine erases the grid display if the grid is being displayed, draws the grid display if it is not displaying the grid, and if the cursor is being displayed, deletes the cursor display and then draws the grid. . The flowchart is shown in FIG.

Next, turn on / off the cursor used in # 135 of Fig. 12 (b).
The subroutine will be described. This subroutine
When the cursor is being displayed when the display mode is the spectral reflectance display mode, the numerical display of the cursor display and the data at the cursor point is erased. If there is, and the grid is being displayed, the grid display is turned off and then the data of the cursor and the cursor point is drawn. The flowchart is shown in FIG. As you can see from the explanation of the grid ON / OFF subroutine and the cursor ON / OFF subroutine,
Care is taken not to mix the grid display and the cursor display, and it is possible to prevent the graph from becoming difficult to see due to the mixture of the grid and the cursor.

Finally, the reference value ON / OFF used in # 143 of Fig. 12 (c)
The subroutine will be described. This subroutine is for the reference value STD when the display mode is the spectral reflectance display mode.
It is to switch whether or not (i) is displayed on the spectral reflectance graph at the same time as the measured value. When the reference value STD (i) is displayed on the graph, the display is erased and STD (i) is displayed.
When is not displayed on the graph, the reference value STD (i) is displayed on the spectral reflectance graph. The flowchart is shown in FIG.

This completes the description of the first embodiment of the present invention,
Next, a second embodiment of the present invention will be described. In the above-described embodiment, the number of photodiodes incorporated in the light source measurement spectroscopic sensor S2 is equal to the sample measurement spectroscopic sensor S1.
However, if the fluctuation of the spectral energy distribution of the light source occurs gently with respect to the wavelength, reduce the number of photodiodes of the spectral sensor S2 for light source measurement to reduce the spectral energy distribution of the light source at coarse wavelength intervals. It is possible to perform measurement with sufficient accuracy even if the values at the wavelengths between the measured values are obtained by interpolation calculation. An example is shown below.

FIG. 27 shows the spectral energy distribution of the pulse xenon lamp used as the illumination light source of this example and the variation in the light emission each time. (For the sake of convenience, the fluctuation ratio is shown larger than it actually is.) As can be seen, the emission line is included in the range of 450 nm to 500 nm, and the spectral energy distribution in this range is dependent on the wavelength for each emission. Although it fluctuates sharply, it fluctuates gently with respect to the wavelength in other wavelength ranges. Therefore, in the range of 450 nm to 550 nm, the measurement wavelength pitch of the light source measurement spectroscopic sensor S2 is set to be the same as that of the sample measurement spectroscopic sensor S1.
The measurement wavelength pitch of S2 is made larger than that of the spectroscopic sensor S1,
By reducing the number of photodiodes and obtaining the value at the wavelength between them by interpolation calculation, the number of analog circuit components can be reduced without lowering the measurement accuracy. In the first embodiment, the order of A / D conversion of measured values is performed in parallel with the spectroscopic sensors S1 and S2. However, when the number of elements of the spectroscopic sensor S2 is reduced,
If A / D conversion of the spectroscopic sensor S2 is performed after the A / D conversion of S1 is completed, or if A / D conversion of the spectroscopic sensor S1 is performed after the A / D conversion of the spectroscopic sensor S2 is completed. , A / D conversion time can be shortened. 28 and 29 show examples of the circuit. The light source measurement spectroscopic sensor S2 has a wavelength of 45
The photodiodes PD43 to PD50 in the vicinity of 0 nm to 500 nm are configured such that the wavelength interval is approximately 10 nm pitch and the other range is 20 nm pitch. As a result, the number of photodiodes is 24, that is, the total of the spectroscopic sensors S1 and S2 is 64. BLOCK (i) (i = 0 to
The current-voltage converting / integrating circuits included in 7) are arranged in groups of 8 as shown in FIG. The order of the photodiodes connected to each block is as shown in FIG.
Unlike the embodiment described above, first, eight photodiodes of the spectroscopic sensor S1 are A / D-converted at the same time, and this is performed five times, and all the photodiodes of the spectroscopic sensor S1 are A / D converted.
After D conversion, 8 photodiodes of the spectroscopic sensor S2 are simultaneously A / D converted, and this is repeated 3 times so that all the photodiodes of the spectroscopic sensor S2 are A / D converted. . In the first embodiment, a total of 80 photodiodes and 80 sets of corresponding current-voltage conversion / integration circuits were required, and it was necessary to repeat 8 A / D conversions simultaneously 10 times each. , In the second embodiment, 64
One photodiode and 64 sets of corresponding current-voltage converting / integrating circuits are enough, and eight A / D conversions at the same time may be repeated eight times. As described above, in the second embodiment, the photometric circuit becomes small, and A / D conversion ends quickly. The photometric subroutine in this embodiment is shown in FIGS.
Shown in (c) and (d). The difference from the first embodiment is that # 17, # 30, # 35, # 41, # is reduced because the number of light receiving elements is reduced.
Due to the decrease in the constant in 43 and the change in the order of A / D conversion, the order of storing the A / D converted values in the memory is changed in # 15 and # 28, and
Spectral sensor for sample measurement in light source correction after # 44
The point is that the value of the light source at the wavelength measured in S1 and not measured in the light source measurement spectroscopic sensor S2 is obtained by interpolation calculation from the light source measurement values at the wavelengths before and after that.

(Effects of the Invention) As described above, the present invention separates the light of the light source for illuminating the measurement sample into light of each wavelength in addition to the first spectroscopic unit for measuring the sample and the first light receiving element array. Since the spectroscopic means and the second light receiving element array for receiving the light of each wavelength dispersed by the second spectroscopic means are provided, the spectral energy distribution of the light source can be measured every time the sample is measured. , First for measuring samples
Since the calculation means for calculating the ratio between the output of the light receiving element array of and the output of the second light receiving element array for light source measurement is provided, the error due to the fluctuation of the spectral energy distribution of the light source is removed from the spectroscopic measurement value of the sample. Even if a light source having an unstable spectral energy distribution characteristic is used as the light source for illuminating the measurement sample, there is an effect that accurate spectroscopic measurement can be performed.

In the wavelength region in which the fluctuation of the spectral energy distribution of the light source for illuminating the sample occurs gently with respect to the wavelength, the measurement wavelength interval of the spectroscopic detector by the combination of the second spectroscopic means and the second light receiving element array is If it is configured to be larger than the measurement wavelength interval of the spectroscopic detector formed by the combination of the first spectroscopic means and the first light receiving element array and to perform the interpolation calculation between the measurement wavelength intervals, the second light receiving element array is formed. Since the number of light receiving elements included can be reduced, the photometric circuit and the A / D conversion circuit can be downsized, and the measurement time can be shortened.

[Brief description of drawings]

FIG. 1 is a claim correspondence diagram showing the basic configuration of the present invention, and FIG.
FIG. 4 is a block diagram showing the overall configuration of a spectroscopic measurement device according to an embodiment of the present invention, FIG. 3 is a circuit diagram of a current-voltage conversion integration circuit used in the same as above, and FIG. 4 is a photometric circuit in the same as above. FIG. 5 is a circuit diagram showing one block, FIG. 5 is a circuit diagram of a photometry circuit used in the same as above, FIG. 6 is a timing chart for explaining the operation of the circuit in FIG. 3, and FIG. 7 is an illumination circuit used in the same as above. FIG. 8, FIG. 8 is a timing chart showing the photometric timing in the same as above, FIGS. 9A to 9D are flowcharts showing the photometric operation in the above, and FIG. 10A is the spectral sensitivity of the photometric circuit in the above. FIG. 10 (b) is an explanatory view for explaining the division of the wavelength region in the same as above, FIG. 11 is an explanatory view for explaining the wavelength correction in the same as above, and FIGS. 12 (a) to (c) ) Is the entire system in the same as above. Flow chart for explaining the operation of the flow chart of setting subroutine in Fig. 13 (a) to (c) are same as above, the flow chart of the calibration subroutine in FIG. 14 (a) (b) is same as above, 15
Figures (a) to (c) are the flowchart of the measurement subroutine in the same as above, Figure 16 is the flowchart of the reflectance calculation in the above, Figure 17 (a) to (c) is the flowchart of the calculation subroutine in the above, and Figure 18 is Flow chart of the calculation value display subroutine in the same as above, FIGS. 19 (a) to (d) are explanatory views showing a display example of the display section in the same as above, and FIGS. 20 (a) and 20 (b) are flow charts of the data number setting subroutine in above , FIG. 21 is a flowchart of a display subroutine in the same as above, FIG. 22 is a flowchart of a subroutine for displaying grid in the same as above, FIG. 23 is a flowchart of a subroutine for displaying cursor in above, and FIG. 24 is a reference value in above. Flowchart of Subroutine for Display, No. 25
The figure shows the spectral sensitivity for color density measurement of photographs that can be used in the same as above, FIG. 26 shows the arrangement example of the keyboard used in the same as above, and FIG. 27 shows the pulse xenon used in the second embodiment of the present invention. Diagram showing the variation of the spectral energy distribution of the lamp,
FIG. 28 is a circuit diagram showing one block of the photometric circuit shown in FIG. 29, and FIG. 29 is a circuit diagram showing the photometric circuit shown in FIG.
(A) to (d) are flowcharts of the photometric subroutine in the above. (1) sample, (2) illumination light source, (F1), (F2) bandpass filter array, (PDA1), (PDA2) photodiode array, (ADC1), (ADC2) A / D conversion Means, (DVD) is a calculation means.

Continuation of the front page (56) Reference JP-A-60-135730 (JP, A) JP-A-60-113124 (JP, A) Actually opened 59-185652 (JP, U) Actually opened 51-115066 (JP , U)

Claims (1)

[Claims] 1. A light source for illuminating a measurement sample, a first spectroscopic unit that disperses either reflected light or transmitted light from the measurement sample into light of each wavelength, and each wavelength dispersed by the first spectroscopic unit. First light-receiving element array for receiving the light of, the second light-splitting unit for splitting the light of the light source for illuminating the measurement sample into light of each wavelength, and the light of each wavelength split by the second light-splitting unit A second light receiving element array and a calculating means for calculating a ratio of the output of the first light receiving element array and the output of the second light receiving element array, the second spectroscopic means and the second light receiving element The measurement wavelength interval of the second spectroscopic detector in combination with the array is made larger than the measurement wavelength interval of the first spectroscopic detector in combination with the first spectroscopic means and the first light receiving element array, It is characterized in that it is configured to interpolate between the measurement wavelength intervals of the second spectral detector. Spectroscopic measurement device to.