JPH0711028U - Surface mount type piezoelectric vibrator - Google Patents
Surface mount type piezoelectric vibratorInfo
- Publication number
- JPH0711028U JPH0711028U JP4468393U JP4468393U JPH0711028U JP H0711028 U JPH0711028 U JP H0711028U JP 4468393 U JP4468393 U JP 4468393U JP 4468393 U JP4468393 U JP 4468393U JP H0711028 U JPH0711028 U JP H0711028U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric plate
- base substrate
- plate
- piezoelectric
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 238000007789 sealing Methods 0.000 claims abstract description 9
- 238000000605 extraction Methods 0.000 claims abstract description 8
- 239000013078 crystal Substances 0.000 abstract description 24
- 238000005452 bending Methods 0.000 abstract description 8
- 230000005284 excitation Effects 0.000 abstract description 5
- 239000000919 ceramic Substances 0.000 description 5
- 239000010453 quartz Substances 0.000 description 3
- 230000035939 shock Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
(57)【要約】
【目的】 外部衝撃による水晶等の圧電板の撓みを最小
限に抑え、その撓みによる圧電板の破損をなくしたより
信頼性の高い表面実装型圧電振動子を提供するものであ
る。
【構成】 外部への引き出し電極が形成されたベース基
板1が有り、その少なくとも長手方向両端部分には圧電
板5を支持する支持部材(接続用電極3a,3bと支持
台4)を有し、表裏面に励振電極が形成された圧電板5
を搭載し、ベース基板の上部に封止用蓋を取り付けて封
止した表面実装型圧電振動子において、少なくとも前記
圧電板周囲近傍に補助支持部材13b,13cを設け
た。
(57) [Abstract] [Purpose] To provide a more reliable surface mount type piezoelectric vibrator in which the bending of a piezoelectric plate such as a crystal due to an external impact is minimized and the piezoelectric plate is not damaged by the bending. Is. There is a base substrate 1 on which an extraction electrode to the outside is formed, and a support member (connection electrodes 3a, 3b and a support 4) for supporting the piezoelectric plate 5 is provided at least at both longitudinal end portions thereof. Piezoelectric plate 5 with excitation electrodes formed on the front and back surfaces
In a surface mount type piezoelectric vibrator in which the above is mounted, and a sealing lid is attached to the upper part of the base substrate for sealing, auxiliary supporting members 13b and 13c are provided at least near the periphery of the piezoelectric plate.
Description
【0001】[0001]
本考案は表面実装型圧電振動子に関し、特に水晶等を用いた圧電板の撓みを抑 制する圧電板の保持構造に関するものである。 The present invention relates to a surface-mounted piezoelectric vibrator, and more particularly to a piezoelectric plate holding structure that suppresses bending of the piezoelectric plate using quartz or the like.
【0002】[0002]
近年の電子機器の小型化にともない、電子部品は薄型で低くかつプリント配線 基板上にその表面で高密度に実装されることが要求されている。水晶振動子の分 野においてもこれは例外ではなく、最近では薄型の表面実装型の水晶振動子が考 案されており、図6に示すように、セラミックからなるベース基板1上面に、従 来用いられていた支持体を用いずに、基板上に形成された引き出し端子の電極パ ッド3の上面に、直接、励振電極12が形成された水晶板5を搭載し、導電性接 合材で接合していた。また、電極パッド3の対向部分には、前記電極パッドの厚 みに合わせて前記水晶板の傾きをなくすための支持台4を設ける。そして、ベー ス基板1と封止用蓋(図示せず)との接合は例えば低融点ガラスを用いて接合し 、気密封止する構成となっている。 With the recent miniaturization of electronic devices, electronic components are required to be thin and low and to be mounted on a printed wiring board at a high density on the surface thereof. This is no exception in the field of crystal units, and recently thin-type surface mount type crystal units have been considered, and as shown in FIG. A crystal plate 5 having an excitation electrode 12 is directly mounted on the upper surface of an electrode pad 3 of a lead-out terminal formed on a substrate without using the support used, and a conductive bonding material is used. It was joined with. In addition, a support base 4 for eliminating the inclination of the crystal plate is provided at the facing portion of the electrode pad 3 according to the thickness of the electrode pad. The base substrate 1 and the sealing lid (not shown) are bonded to each other using, for example, low melting point glass to hermetically seal.
【0003】[0003]
しかし、上記構成では、電極パッド及びセラミック積層といった弾力性を持た ない支持部材で水晶板を固着支持しているため、落下等の衝撃が加わると、図7 の断面図に示すように水晶板5が大きく撓み、水晶板5が前記支持部分3あるい は4から、破損することがあった。 However, in the above configuration, since the crystal plate is fixedly supported by the supporting member having no elasticity such as the electrode pad and the ceramic laminate, when a shock such as a drop is applied, the crystal plate 5 as shown in the cross-sectional view of FIG. Was largely bent, and the crystal plate 5 was sometimes damaged from the support portion 3 or 4.
【0004】 本考案の目的は、外部衝撃による水晶等の圧電板の撓みを最小限に抑え、その 撓みによる圧電板の破損をなくしたより信頼性の高い表面実装型圧電振動子を提 供するものである。An object of the present invention is to provide a more reliable surface mount type piezoelectric vibrator in which the bending of a piezoelectric plate such as a crystal due to an external impact is minimized and the piezoelectric plate is not damaged by the bending. Is.
【0005】[0005]
【課題を解決するための手段】 そこで本考案の表面実装型圧電振動子は、外部への引き出し電極が形成された ベース基板が有り、その少なくとも長手方向両端部分には圧電板を支持する支持 部材を有し、表裏面に電極形成された圧電板を搭載し、ベース基板の上部に封止 用蓋を取り付けて封止した表面実装型圧電振動子において、少なくとも前記圧電 板周囲近傍に補助支持部材を設けたTherefore, the surface-mounted piezoelectric vibrator of the present invention has a base substrate on which external extraction electrodes are formed, and a support member for supporting the piezoelectric plate at least at both longitudinal end portions thereof. In a surface-mounted piezoelectric vibrator, which has a piezoelectric plate with electrodes formed on the front and back surfaces and is sealed by mounting a sealing lid on the upper part of the base substrate, an auxiliary support member is provided at least near the periphery of the piezoelectric plate. Provided
【0006】[0006]
電極パッド及びセラミック積層体といった弾力性のない支持部材で圧電板の長 手方向両端部を支持することによって生じる圧電板の撓みは、圧電板周囲近傍に 補助支持部材を設けたことにより、落下等の衝撃が加わっても、圧電板の撓みを 最小限に抑えることができる。そのため、圧電板が前記支持部分から、破損する ことがなくなった。 Deflection of the piezoelectric plate caused by supporting both longitudinal ends of the piezoelectric plate with supporting members such as electrode pads and ceramic laminates that do not have elasticity is dropped due to the provision of auxiliary support members near the periphery of the piezoelectric plate. Even if a shock is applied, the bending of the piezoelectric plate can be minimized. Therefore, the piezoelectric plate is not damaged from the supporting portion.
【0007】[0007]
次に、本考案について図面を参照にし、また圧電振動子として水晶振動子を例 にして説明する。図1は本考案の第1の実施例を示す透視平面図である。図2は 図1のA−A線に沿う断面図である。図3は第2の実施例を示す透視平面図であ る。図4は第3の実施例を示す透視平面図である。尚、本考案の第1、第2、第 3、第4の実施例について、同様の部分には同番号を付した。 本考案の表面実装型水晶振動子のベース基板1と封止用蓋2はアルミナ等のセ ラミックで作られている。そして、ベース基板1の長手方向側面には外部回路と の接続用端子1a、1bを設け、ベース基板1の上面には水晶板5の励振電極1 2(裏面は図示せず)と電気的接続するための接続用電極3a、3bが設けられ ている。また、接続用電極の対向部には接続用電極の厚みに合わせて水晶板の傾 きをなくすための支持台4を設ける。そして、外部接続用端子1a、1bと前記 接続用電極3a、3bとは引き出し電極13a、13bを設けることにより電気 的接続が成されている。そこで、引き出し電極13bの幅を広く設け、水晶板周 囲に重なるように形成し、また、接続用電極3aから前記引き出し電極13bと 略同様に水晶板周囲に重なるように形成し、かつ、他の電極とは接続されないダ ミー電極13cを設ける。これらの電極は、前記接続用電極3a、3b並びに支 持台4の厚みに比べて若干薄く形成し段差を設ける。これは、例えば、ベース基 板1の上面にタングステンのメタライズ層を形成し、そして、電解メッキにより タングステンのメタライズ層の上面にニッケルメッキ層を形成した後、引き出し 電極13b並びにダミー電極13cの形成部分にマスクをかぶせ、前記引き出し 電極13b及びダミー電極13c以外の電極の上面にさらに金メッキ層を形成す ることにより得られる。そして、励振電極12が形成された(裏面については図 示せず)矩形のATカットの水晶板5を接続用電極3a、3b及び4に搭載し導 電性接合材6で接合し、その後、ベース基板1の上方に封止用蓋2をかぶせて低 融点ガラス7で封止用蓋とベース基板の接合部分21に接合し、気密封止する。 このように形成された表面実装型水晶振動子は引き出し電極13bとダミー電極 13cとが補助支持部材の働きをする。 Next, the present invention will be described with reference to the drawings and taking a crystal oscillator as an example of a piezoelectric oscillator. FIG. 1 is a perspective plan view showing a first embodiment of the present invention. FIG. 2 is a sectional view taken along the line AA of FIG. FIG. 3 is a perspective plan view showing the second embodiment. FIG. 4 is a perspective plan view showing the third embodiment. In addition, about the 1st, 2nd, 3rd, and 4th Example of this invention, the same number is attached | subjected to the same part. The base substrate 1 and the sealing lid 2 of the surface mount type crystal unit of the present invention are made of ceramic such as alumina. Then, terminals 1a and 1b for connecting to an external circuit are provided on the side surface in the longitudinal direction of the base substrate 1, and the upper surface of the base substrate 1 is electrically connected to the excitation electrodes 12 (the back surface is not shown) of the crystal plate 5. There are provided connection electrodes 3a and 3b. In addition, a support base 4 is provided at the opposite portion of the connection electrode to prevent the crystal plate from tilting in accordance with the thickness of the connection electrode. The external connection terminals 1a, 1b and the connection electrodes 3a, 3b are electrically connected by providing lead electrodes 13a, 13b. Therefore, the lead electrode 13b is formed so as to have a wide width so as to overlap the circumference of the crystal plate, and the connection electrode 3a is formed so as to overlap the circumference of the crystal plate in substantially the same manner as the lead electrode 13b. The dummy electrode 13c which is not connected to the above electrode is provided. These electrodes are formed slightly thinner than the thickness of the connecting electrodes 3a, 3b and the supporting base 4 to provide a step. This is because, for example, a tungsten metallization layer is formed on the upper surface of the base substrate 1, and a nickel plating layer is formed on the upper surface of the tungsten metallization layer by electrolytic plating. It is obtained by covering the upper surface with a mask and further forming a gold plating layer on the upper surfaces of the electrodes other than the extraction electrode 13b and the dummy electrode 13c. Then, a rectangular AT-cut quartz plate 5 on which the excitation electrode 12 is formed (the back surface is not shown) is mounted on the connecting electrodes 3a, 3b and 4 and joined by a conductive joining material 6, and then the base is formed. The sealing lid 2 is placed over the substrate 1 and bonded to the bonding portion 21 between the sealing lid and the base substrate with the low melting point glass 7 to hermetically seal. In the surface mount type crystal resonator thus formed, the extraction electrode 13b and the dummy electrode 13c function as an auxiliary support member.
【0008】 また、図3に示すように、補助支持部材としての電極は、水晶板長手方向両端 部分で前記水晶板5と引き出し電極13d及びダミー電極13e、13fとが重 なるように形成される構成や、図4に示すように、補助支持部材としての電極は 、水晶板長手方向の中央部付近で前記水晶板5と引き出し電極13g及びダミー 電極13hとが重なるように形成される構成であってもよい。Further, as shown in FIG. 3, the electrode as the auxiliary supporting member is formed such that the crystal plate 5 and the extraction electrode 13d and the dummy electrodes 13e and 13f overlap each other at both ends in the crystal plate longitudinal direction. As shown in FIG. 4 and FIG. 4, the electrode as an auxiliary support member is formed such that the crystal plate 5, the extraction electrode 13g and the dummy electrode 13h overlap each other near the central portion in the crystal plate longitudinal direction. May be.
【0009】 本考案の実施例では電極を形成することにより補助支持部材としたが、図4に 示すように、あらかじめベース基板1上にセラミックを積層して、ベース基板の 一部に補助支持部材11a、11bを形成してもよい。In the embodiment of the present invention, the auxiliary supporting member is formed by forming the electrode. However, as shown in FIG. 4, the ceramic is laminated on the base substrate 1 in advance, and the auxiliary supporting member is partially formed on the base substrate. You may form 11a, 11b.
【0010】 尚、前記補助部材の厚さは、支持部材の厚さと同じかそれより薄ければよいが 、補助支持部材の厚さが薄すぎると、水晶板と補助支持部材との距離が長くなり 衝撃時に水晶板の撓みが生じることがあるので、水晶板と補助支持部材との距離 が短く設定されるように補助支持部材の厚みは、ある程度の厚みを有して設計す る必要がある。The thickness of the auxiliary member may be equal to or less than the thickness of the supporting member. However, if the thickness of the auxiliary supporting member is too thin, the distance between the crystal plate and the auxiliary supporting member becomes long. Since the crystal plate may bend during impact, it is necessary to design the auxiliary support member to have a certain thickness so that the distance between the crystal plate and the auxiliary support member is set short. .
【0011】[0011]
電極パッド及びセラミック積層体といった弾力性のない支持部材で圧電板の長 手方向両端部を支持することによって生じる圧電板の撓みは、圧電板周囲近傍に 補助支持部材を設けたことにより、落下等の衝撃が加わっても、圧電板の撓みを 最小限に抑えることができる。そのため、圧電板が前記支持部分から、破損する ことがなくなり、より信頼性の高い表面実装型圧電振動子を得られる。 Deflection of the piezoelectric plate caused by supporting both longitudinal ends of the piezoelectric plate with supporting members such as electrode pads and ceramic laminates that do not have elasticity is dropped due to the provision of auxiliary support members near the periphery of the piezoelectric plate. Even if a shock is applied, the bending of the piezoelectric plate can be minimized. Therefore, the piezoelectric plate is not damaged from the supporting portion, and a more reliable surface-mounted piezoelectric vibrator can be obtained.
【図1】本考案の第1の実施例を示す透視平面図であ
る。FIG. 1 is a perspective plan view showing a first embodiment of the present invention.
【図2】図1のA−A線に沿う断面図である。FIG. 2 is a sectional view taken along the line AA of FIG.
【図3】第2の実施例を示す透視平面図である。FIG. 3 is a perspective plan view showing a second embodiment.
【図4】第3の実施例を示す透視平面図である。FIG. 4 is a perspective plan view showing a third embodiment.
【図5】第4の実施例を示す透視平面図である。FIG. 5 is a perspective plan view showing a fourth embodiment.
【図6】従来の実施例を示す透視平面図である。FIG. 6 is a perspective plan view showing a conventional example.
【図7】従来の水晶板の撓み構造を示す断面図である。FIG. 7 is a cross-sectional view showing a conventional bending structure of a quartz plate.
1・・・ベース基板 1a、1b・・・接続用端子 2・・・封止用蓋 3・・・電極パッド 3a、3b・・・接続用電極 4・・・支持台 5・・・水晶板 12・・・励振電極 13a、13b、13d・・・引き出し電極 13c、13e、13f・・・ダミー電極 DESCRIPTION OF SYMBOLS 1 ... Base substrate 1a, 1b ... Connection terminal 2 ... Sealing lid 3 ... Electrode pad 3a, 3b ... Connection electrode 4 ... Support stand 5 ... Crystal plate 12 ... Excitation electrodes 13a, 13b, 13d ... Extraction electrodes 13c, 13e, 13f ... Dummy electrodes
Claims (1)
ス基板が有り、その少なくとも長手方向両端部分には圧
電板を支持する支持部材を有し、表裏面に電極形成され
た圧電板を搭載し、ベース基板の上部に封止用蓋を取り
付けて封止した表面実装型圧電振動子において、少なく
とも前記圧電板周囲近傍に補助支持部材を設けたことを
特徴とする表面実装型圧電振動子。1. A base substrate having an external extraction electrode formed, a support member for supporting the piezoelectric plate at least at both ends in the longitudinal direction, and a piezoelectric plate having electrodes formed on the front and back surfaces. A surface-mounted piezoelectric vibrator in which a sealing lid is attached and sealed on an upper part of a base substrate, wherein an auxiliary support member is provided at least in the vicinity of the periphery of the piezoelectric plate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1993044683U JP2557761Y2 (en) | 1993-07-22 | 1993-07-22 | Surface mount type piezoelectric vibrator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1993044683U JP2557761Y2 (en) | 1993-07-22 | 1993-07-22 | Surface mount type piezoelectric vibrator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0711028U true JPH0711028U (en) | 1995-02-14 |
JP2557761Y2 JP2557761Y2 (en) | 1997-12-17 |
Family
ID=12698237
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1993044683U Expired - Lifetime JP2557761Y2 (en) | 1993-07-22 | 1993-07-22 | Surface mount type piezoelectric vibrator |
Country Status (1)
Country | Link |
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JP (1) | JP2557761Y2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014064137A (en) * | 2012-09-20 | 2014-04-10 | Daishinku Corp | Package for piezoelectric vibration device and piezoelectric vibration device |
WO2014115451A1 (en) * | 2013-01-23 | 2014-07-31 | 株式会社村田製作所 | Piezoelectric vibration component |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58116329U (en) * | 1982-02-02 | 1983-08-09 | 日本電波工業株式会社 | Protection device for piezoelectric vibrator |
JPS61206317U (en) * | 1985-06-11 | 1986-12-26 | ||
JPH0546115U (en) * | 1991-11-12 | 1993-06-18 | 株式会社大真空 | Surface mount crystal unit |
-
1993
- 1993-07-22 JP JP1993044683U patent/JP2557761Y2/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58116329U (en) * | 1982-02-02 | 1983-08-09 | 日本電波工業株式会社 | Protection device for piezoelectric vibrator |
JPS61206317U (en) * | 1985-06-11 | 1986-12-26 | ||
JPH0546115U (en) * | 1991-11-12 | 1993-06-18 | 株式会社大真空 | Surface mount crystal unit |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014064137A (en) * | 2012-09-20 | 2014-04-10 | Daishinku Corp | Package for piezoelectric vibration device and piezoelectric vibration device |
WO2014115451A1 (en) * | 2013-01-23 | 2014-07-31 | 株式会社村田製作所 | Piezoelectric vibration component |
Also Published As
Publication number | Publication date |
---|---|
JP2557761Y2 (en) | 1997-12-17 |
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R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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EXPY | Cancellation because of completion of term |