JPH0698293B2 - Anti-rotation double cylinder for moving objects in vacuum chamber - Google Patents

Description

Description: [Industrial field of application] The present invention relates to an anti-rotation double cylinder used when moving an object to be processed in a vacuum chamber.

[Prior art]

Conventionally, as a double cylinder used for moving an object to be processed in a vacuum chamber, as shown in FIG. 4, the opening end of the outer cylinder 16 of the double cylinder 15 is fixed to the wall plate 6 of the vacuum chamber 5. , The front portion of the outer piston shaft 17 of the double cylinder 15 penetrates the wall plate 6 and projects into the vacuum chamber 5, and the front portion of the inner piston shaft 18 of the double cylinder 15 projects into the vacuum chamber 5. Let the outer piston shaft
Rear ends of a pair of guide rods 19 arranged on both sides of the rod 17 in parallel with the guide rods 19 are screwed and fixed to the wall plate 6 in the vacuum chamber 5, and the other end of each guide rod 19 is connected by a connecting member 20. A movable support member 9 which is connected and moves to support an object to be processed in the vacuum chamber 5 is slidably fitted to each guide rod 19 to movably support a male screw portion at the front end of the inner piston shaft 18. A piston 21 provided on the bottom of the outer cylinder 16 and on the outer piston shaft 17 is provided with cylinder-expanding air holes 22 and 23 by screwing and fixing to the central portion of the member 9, and the inside of the front end of the outer piston shaft 17 is provided. Two seal rings 24 are provided in the piston shaft fitting portion at intervals in the piston shaft longitudinal direction, and further two seal rings 25 are provided in the outer piston shaft fitting portion of the outer piston shaft 16 in the cylinder longitudinal direction. Provided in the outer cylinder 16 Provided with a cylinder shortened vents 26 at a position closer to the side piston shaft fitting portion,
The outer cylinder and the inner cylinder of the outer piston shaft 17 are also provided with cylinder shortening air supply holes 27 and 28, and an exhaust hole 29 is provided between the seal rings 25 on the opening end side of the outer cylinder 16. A double cylinder having a structure is known.

[Problems to be solved by the invention]

However, in the case of the conventional double cylinder for moving an object to be processed in a vacuum chamber, since the sealability of the seal ring 24 is not perfect against a high pressure difference, the pressure air in the outer piston shaft 17 and the outer piston shaft 17 are It is not suitable for a vacuum chamber that needs to maintain an ultra-high vacuum because it penetrates a small amount through the space between the inner piston shaft 18 and prevents the movable support member 9 from rotating in the vacuum chamber 5. Since a pair of guide rods 19 and a connecting rod 20 for connecting the guide rods 19 must be provided, there is a problem that the space in the vacuum chamber 5 becomes narrow.

[Object and Structure of Invention]

An object of the present invention is to provide a rotation preventing double cylinder for moving an object to be processed in a vacuum tank, which can advantageously solve the above-mentioned problems. The gist of the present invention is to provide a pneumatic double cylinder 1 And the guide cylinder 2 are arranged in parallel with each other so as to extend in the front-rear direction, and the front end opening of the outer cylinder 3 in the double cylinder 1 and the outer guide member 4 into which the guide cylinder 2 is slidably fitted are arranged in a vacuum chamber. 5 is fixed to the wall plate 6 of the double cylinder 1
The front end of the inner piston shaft 7 and the front end of the guide shaft 8 slidably fitted in the front end of the guide cylinder 2 are connected to a movable support member 9 arranged in the vacuum chamber 5. An annular exhaust chamber 11 and seal rings 12 located on both sides of the annular exhaust chamber 11 are provided in the inner piston shaft fitting portion at the front end of the outer piston shaft 10 in the double cylinder 1, and the annular exhaust chamber 11 and the front end portion in the double cylinder 2 are provided. Is connected via an exhaust pipe 13 arranged in the vacuum chamber 5, and a suction port 14 is provided at the rear end of the guide cylinder 2 for moving the object to be processed in the vacuum chamber. It is on the rotation prevention double cylinder.

〔Example〕

 Next, the present invention will be described in detail with reference to the illustrated example.

1 to 3 show an embodiment of the present invention in which a pneumatic double cylinder 1 and a guide cylinder 2 are arranged in parallel with each other and extend in the front-rear direction. A seal ring 31 is fitted into an annular groove provided on the end surface of the front end opening of the outer ring member 3 and an annular groove provided on the front end surface of the outer guide member 4 into which the guide cylinder 2 is slidably inserted. Further, the front end portion of the outer cylinder 3 and the outer guide member 4 are brought into contact with the wall plate 6 of the vacuum chamber 5 and fixed by bolts (not shown), and the outer piston shaft 10 and the guide cylinder 2 of the double cylinder 1 are connected to each other. Is slidably fitted in the wall plate 6 in an airtight manner, and further has a screw rod provided at the front end portion of the inner piston shaft 7 in the double cylinder 1,
The screw rod provided at the front end portion of the guide shaft 8 slidably fitted in the front end portion of the guide cylinder 2 is screwed and fixed to the movable support member 9 arranged in the vacuum chamber 5, and is also guided. The front end of the cylinder 2 and the front end of the outer piston shaft 10 are connected by a connecting plate 32.

An annular exhaust chamber 11 and annular grooves located on the front and rear sides of the annular exhaust chamber 11 are provided in the inner piston shaft fitting portion at the front end of the outer piston shaft 10 in the double cylinder 1, and a seal ring 12 made of an O ring is fitted in the annular groove. The front end of the guide cylinder 2 and the annular exhaust chamber 11 are connected to each other via an exhaust pipe 13 arranged in the vacuum chamber 5, and an intake port 14 is provided at the rear end of the guide cylinder 2. Further, an annular exhaust chamber 33, an exhaust hole 34 connected to the annular exhaust chamber 33, and annular grooves located on the front and rear sides of the annular exhaust chamber 33 are provided in the outer piston shaft fitting portion at the front end of the outer cylinder 3. The seal ring 35 is fitted in the annular groove.

The guide cylinder fitting portion of the outer guide member 4 is provided with an annular exhaust chamber 36, exhaust holes 37 connected to the annular exhaust chamber 36, and annular grooves located on both front and rear sides of the annular exhaust chamber 36. A seal ring 38 is fitted in the groove, and the suction port 14 and the exhaust holes 34, 37 are connected to a vacuum suction source such as a vacuum pump.

The cylinder shortening air supply pipe 39 is slidably fitted in the bottom portion of the outer cylinder 3 and the inner piston 40 provided on the inner piston shaft 7 in an airtight state, and the cylinder shortening air supply pipe 39.
Is inserted into an outer piston 41 provided on the outer piston shaft 10 and is airtightly fixed by welding. Further, a cylinder shortening air supply hole 42 is provided at a rear end portion of the inner piston shaft 7, and a front end of the outer cylinder 3 is provided. A cylinder shortening air supply hole 43 is provided on the side, and cylinder extending air supply holes 44 and 45 are provided in the bottom portion of the outer cylinder 3 and the outer piston 41.

FIG. 1 shows a state in which the double cylinder 1 is shortened to the minimum. Next, when compressed air is supplied from the cylinder extension air supply hole 44 in a state where the cylinder shortening air supply pipe 39 and the cylinder shortening air supply hole 43 are in communication with the atmosphere, as shown in FIG. And the movable support member 9 is moved forward by the inner piston shaft 7, the guide cylinder 2 is moved forward by the outer piston shaft 10 via the connecting plate 32, and the guide cylinder 2 is guided by the inner piston shaft 7 via the movable support member 9. The shaft 8 is moved forward. FIG. 3 shows a state in which the double cylinder 1 is maximally extended.

Also, with the cylinder extension air supply hole 44 communicating with the atmosphere,
Cylinder shortening air supply pipe 39 and cylinder shortening air supply hole 43
When compressed air is supplied from the inside, the inner piston shaft 7 is moved backward by the air pressure, the movable support member 9 is moved backward by the inner piston shaft 7, and the guide cylinder 2 is moved by the outer piston shaft 10 via the connecting plate 32. And the guide shaft 8 is moved backward by the inner piston shaft 7 via the movable support member 9.

In this case, rotation of the inner piston shaft 7 and the movable support member 9 is prevented by the rotation preventing device composed of the outer guide member 4, the guide cylinder 2 and the guide shaft 8, and the outer piston shaft 10 and the inner piston shaft 7 are fitted together. The air that is about to leak into the vacuum chamber 5 from the junction passes through the guide cylinder 2 and is sucked and discharged from the suction port 14.

〔The invention's effect〕

According to this invention, the outer guide member 4 fixed to the wall plate 6 of the vacuum chamber 5, the guide cylinder 2 fitted into the outer guide member 4, and the guide shaft fitted into the front end portion of the guide cylinder 2 are provided. The rotation preventing device composed of 8 can prevent the rotation of the movable support member 9 in the vacuum chamber 5, and the conventional double cylinder for moving the object to be processed in the vacuum chamber for that purpose is provided in the vacuum chamber. Since the pair of guide rods and the connecting member for connecting the guide rods can be omitted, the space in the vacuum chamber 5 can be widened, and the inner piston shaft 7 and the outer piston shaft 10 in the double cylinder 1 can be omitted. The air that is about to leak into the vacuum chamber 5 from the fitting part of the above enters the annular exhaust chamber 11 and then the exhaust pipe 13
Since the air in the outer piston shaft 10 can be surely prevented from leaking into the vacuum chamber 5 because it is sucked and discharged from the intake port 14 through the inside of the guide cylinder 2 and the guide cylinder 2, the ultra-high vacuum layer is formed. However, the movable support member 9 can be moved by the vacuum pressure type double cylinder 1 while maintaining the inside of the vacuum layer 5 in an ultra-high vacuum state.
It is possible to obtain the effect that the air that has entered the inside can be easily and surely sucked and discharged by utilizing the space between the exhaust pipe 13 and the guide cylinder 2 and the guide shaft 8 in the rotation preventing device.

[Brief description of drawings]

1 to 3 show an embodiment of the present invention, wherein FIG. 1 is a vertical sectional side view showing a state in which the rotation preventing double cylinder is shortened, and FIG. 2 is an extended state of the rotation preventing double cylinder. FIG. 3 is a vertical cross-sectional side view showing a state in which the anti-rotation double cylinder is extended by the full stroke. FIG. 4 is a vertical sectional side view showing a conventional double cylinder for moving an object to be processed in a vacuum chamber. In the figure, 1 is a double cylinder, 2 is a guide cylinder, 3 is an outer cylinder, 4 is an outer guide member, 5 is a vacuum chamber, 6 is a wall plate, 7 is an inner piston shaft, 8 is a guide shaft, 9
Is a movable support member, 10 is an outer piston shaft, 11 is an annular exhaust chamber, 12 is a seal ring, 13 is an exhaust pipe, 14 is a suction port, 32 is a connecting plate, 33 is an annular exhaust chamber, 34 is an exhaust hole, and 35 is A seal ring, 36 is an annular exhaust chamber, 37 is an exhaust hole, and 38 is a seal ring.

Claims (1)

[Claims] 1. A pneumatic double cylinder 1 and a guide cylinder 2 are arranged so as to extend in a front-rear direction in a parallel state, and a front end opening of an outer cylinder 3 of the double cylinder 1 and a guide cylinder 2 are slidably fitted. The inserted outer guide member 4 is fixed to the wall plate 6 of the vacuum chamber 5, and the guide shaft slidably fitted in the front end portion of the inner piston shaft 7 and the front end portion of the guide cylinder 2 in the double cylinder 1. The front end portion of 8 is connected to the movable support member 9 arranged in the vacuum chamber 5, and the annular exhaust chamber 11 is connected to the inner piston shaft fitting portion of the front end of the outer piston shaft 10 in the double cylinder 1.
And a seal ring 12 located on both sides thereof, the annular exhaust chamber 11 and the front end of the double cylinder 2 are connected via an exhaust pipe 13 arranged in the vacuum chamber 5, and the guide cylinder 2. A rotation preventing double cylinder for moving an object to be processed in a vacuum chamber, characterized in that a suction port 14 is provided at a rear end portion of 2.