JPH0693309A - Method and device for producing superfine particles - Google Patents
Method and device for producing superfine particlesInfo
- Publication number
- JPH0693309A JPH0693309A JP3361568A JP36156891A JPH0693309A JP H0693309 A JPH0693309 A JP H0693309A JP 3361568 A JP3361568 A JP 3361568A JP 36156891 A JP36156891 A JP 36156891A JP H0693309 A JPH0693309 A JP H0693309A
- Authority
- JP
- Japan
- Prior art keywords
- ultrafine particles
- filter
- gas
- particles
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 17
- 239000002245 particle Substances 0.000 title claims description 6
- 239000011882 ultra-fine particle Substances 0.000 claims abstract description 47
- 238000004519 manufacturing process Methods 0.000 claims abstract description 12
- 239000007789 gas Substances 0.000 description 39
- 238000011084 recovery Methods 0.000 description 15
- 239000000843 powder Substances 0.000 description 10
- 230000000694 effects Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000002316 fumigant Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
Abstract
(57)【要約】
【目的】 直径１０μ以下の超微粒子のフィルタを用い
た製造方法及び装置を提供する。
【構成】 ガス気流中の超微粒子をフィルターを用いて
捕集する製造方法において、フィルター表面に付着した
超微粒子を圧化ガスにより払落す。フィルター前後の圧
力差が一定値以上となったとき、差圧をゼロにしてから
圧化ガスを噴射する。フィルターを複数個並列設置し、
超微粒子の発生を中断させることなく連続運転する。
(57) [Summary] [Object] To provide a manufacturing method and apparatus using a filter of ultrafine particles having a diameter of 10 μm or less. [Structure] In a manufacturing method in which ultrafine particles in a gas stream are collected using a filter, the ultrafine particles adhering to the surface of the filter are removed by a pressurized gas. When the pressure difference before and after the filter becomes a certain value or more, the pressure difference is made zero and then the pressurized gas is injected. Install multiple filters in parallel,
Continuous operation without interruption of generation of ultrafine particles.
Description
【０００１】[0001]
【産業上の利用分野】本発明は超微粒子の製造方法及び
装置に関し、特にガス雰囲気中で金属、合金、セラミッ
クス等を溶解して蒸発させることにより得られた直径１
０μｍ以下、とりわけ直径０．１μｍ以下の超微粒子を
捕集する方法及び装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for producing ultrafine particles, and particularly to a diameter 1 obtained by melting and evaporating metals, alloys, ceramics, etc. in a gas atmosphere.
The present invention relates to a method and an apparatus for collecting ultrafine particles having a diameter of 0 μm or less, particularly 0.1 μm or less.
【０００２】[0002]
【従来の技術】超微粒子を発生させる方法は、特公昭５
７―４４７２５号、特開昭６１―２７６９０３号、特公
昭５８―５４１６６号等に示されている。2. Description of the Related Art A method for producing ultrafine particles is disclosed in Japanese Examined Patent Publication No.
No. 7-44725, JP-A No. 61-276903, JP-B No. 58-54166.
【０００３】たとえば、Ｆｅ、Ｎｉ、Ｃｏ、Ｃｕ、Ａｌ
等の母材を、Ｈ2 、Ｏ2 、Ｎ2 等の２原子分子ガスを単
独あるいは混合したふんい気ガス中でアーク溶解炉にお
いて溶解し、溶融放出現象により溶融原料の超微粒子を
発生させる。For example, Fe, Ni, Co, Cu, Al
And other base materials are melted in an arc melting furnace in a fumigant gas in which diatomic molecular gases such as H 2 , O 2 and N 2 are used alone or mixed, and ultrafine particles of a molten raw material are generated by a melting and releasing phenomenon. .
【０００４】この発生した超微粒子は直径１０μｍ以
下、とりわけ直径０．１μｍ以下のものを含み、捕集方
法として遠心分離による方法やフィルターによる方法な
どがあるが、超微粒子であるため、遠心力作用の効果が
小さく、又フィルターが目詰まりし易く、捕集が困難で
あり、種々の改良が提案されているが未だ充分ではな
い。The generated ultrafine particles include those having a diameter of 10 μm or less, especially 0.1 μm or less. As a collecting method, there are a centrifugal separation method and a filter method. Effect is small, the filter is likely to be clogged and it is difficult to collect, and various improvements have been proposed, but they are not yet sufficient.
【０００５】たとえば、 （１）特開昭６１―２７６９０３号公報には、捕集室を
複数個設け、交互又は順次切り換えて行う装置が開示さ
れているが、捕集系が複雑、かつ、大きくなり、装置コ
ストが高く又、広いスペースを要する欠点がある。For example, (1) Japanese Patent Application Laid-Open No. 61-276903 discloses a device provided with a plurality of collection chambers and alternately or sequentially switching them. However, the collection system is complicated and large. Therefore, there is a drawback that the device cost is high and a large space is required.
【０００６】すなわち、該装置で複数の種類の超微粉を
製造する場合、内部掃除に時間を要し、又、各種超微粉
の専用機を想定すると、膨大な設備費、スペースとな
り、コストアップの要因となる。That is, when a plurality of types of ultrafine powders are produced by the apparatus, it takes time to clean the inside, and assuming a dedicated machine for various types of ultrafine powders, enormous equipment cost, space, and cost increase. It becomes a factor.
【０００７】（２）特公昭５８―５４１６６号公報に
は、遠心捕集器と濾過式捕集器の組合せ方法及び装置が
開示されているが、超微粒子は、粒子径が極めて小さ
く、重力、遠心力作用の効果が小さく全量捕集すること
はできず、結局フィルターに頼らなければならない。(2) Japanese Patent Publication No. 58-54166 discloses a method and an apparatus for combining a centrifugal collector and a filtration collector. However, ultrafine particles have an extremely small particle size and are The effect of centrifugal force is so small that it is impossible to collect the whole amount, and eventually a filter must be used.
【０００８】又、フィルター切り換え又は、払い落とし
機構がなく、捕集量に限界がある為、いずれ、超微粒子
の発生系を停止せざるを得ない。Further, since there is no filter switching or a mechanism for removing the particles and there is a limit to the amount of collection, it is unavoidable that the generation system of ultrafine particles will be stopped eventually.
【０００９】（３）特開昭６２―２０７８０４号公報に
は、フィルターに振動機構を取り付けて、かつ、バルブ
を介して複数個の捕集室を設ける方法及び装置が開示さ
れているが、フィルターに超微粒子が堆積してくると、
その前後で差圧が生じる。ガス流量にもよるが、この様
な場合、単に振動を与えても超微粒子払い落としの効果
は良くない。(3) Japanese Unexamined Patent Publication (Kokai) No. 62-207804 discloses a method and apparatus in which a vibration mechanism is attached to a filter and a plurality of collection chambers are provided through valves. When ultra-fine particles are deposited on the
A differential pressure is generated before and after that. Although it depends on the gas flow rate, in such a case, the effect of removing the ultrafine particles is not good even if only vibration is applied.
【００１０】大量生産を指向する場合、ある程度以上の
ガス流量が必要であり、この場合、いっそう、差圧が大
きくなり、捕集効果が悪い。When aiming for mass production, a gas flow rate of a certain level or more is required, and in this case, the differential pressure becomes larger and the collection effect is poor.
【００１１】[0011]
【発明が解決しようとする課題】フィルターを使用する
従来技術では、フィルター表面に超微粉が一定量以上積
層すると、フィルターが目づまりするため、キャリア
ガスを循環させている方法の場合は、そのキャリアガス
の流量が減少し超微粉の発生に悪影響を及ぼす、フィ
ルターの前後に差圧が生じるため単に振動を与えても超
微粉の払い落としが十分行われない。In the prior art using a filter, when a certain amount or more of ultrafine powder is deposited on the surface of the filter, the filter becomes clogged. The flow rate of gas is reduced, which adversely affects the generation of ultrafine powder, and a differential pressure is generated before and after the filter, so even if vibration is simply applied, the ultrafine powder cannot be sufficiently removed.
【００１２】従って一定量以上の超微粉がフィルターに
堆積した時点で超微粉の製造を一時停止して、振動等に
より超微粉をフィルターから剥離させなければならなか
った。必然的に連続性が損なわれ生産性の低下をまねく
等の問題があった。Therefore, when a certain amount or more of ultrafine powder is deposited on the filter, the production of ultrafine powder must be temporarily stopped and the ultrafine powder must be separated from the filter by vibration or the like. Inevitably, there was a problem that continuity was impaired and productivity was lowered.
【００１３】[0013]
【課題を解決するための手段】本発明は、 (1) 生成された超微粒子をガス気流に乗せフィルターを
用いて捕集する超微粒子の製造方法において、蓄圧され
たガスをフィルター裏面から噴射させることにより、フ
ィルター表面に積層した超微粒子を払い落とすことを特
徴とする超微粒子の製造方法。According to the present invention, (1) in a method for producing ultrafine particles in which generated ultrafine particles are placed on a gas flow and collected using a filter, a pressure-accumulated gas is jetted from the back surface of the filter. Thus, the method for producing ultrafine particles, characterized in that the ultrafine particles laminated on the surface of the filter are removed.
【００１４】(2) フィルター前後の圧力差が一定値以上
となったとき、差圧をゼロにして蓄圧されたガスをフィ
ルター内部から噴射させることを特徴とする請求項１記
載の方法。(2) The method according to claim 1, wherein when the pressure difference before and after the filter exceeds a certain value, the pressure difference is set to zero and the accumulated gas is injected from the inside of the filter.
【００１５】(3) 複数個のフィルターを並列して設置
し、超微粒子の発生を中断させることなしに、順次払い
落としを行うことを特徴とする請求項１記載の方法。(3) The method according to claim 1, characterized in that a plurality of filters are installed in parallel, and the filters are sequentially removed without interrupting the generation of ultrafine particles.
【００１６】(4) 超微粒子を払い落とした後、大気中に
取り出す前に、超微粒子を徐酸化することを特徴とする
請求項１記載の方法。(4) The method according to claim 1, wherein the ultrafine particles are gradually oxidized before they are taken out into the atmosphere after the ultrafine particles are removed.
【００１７】(5) 超微粒子の発生室、発生室から導出し
たガス気流中の超微粒子を回収する捕集室、捕集室内部
に設置された複数個のフィルター、フィルターを通過し
たガスを発生室に循環させる経路、及び循環ガスの一部
を蓄圧する蓄圧タンク、フィルター表面に積層した超微
粒子を払い落とすため蓄圧されたガスをフィルター裏面
から噴射させる経路を設けたことを特徴とする超微粒子
の製造装置。である。(5) Ultrafine particle generation chamber, collection chamber for collecting ultrafine particles in the gas stream discharged from the generation chamber, a plurality of filters installed inside the collection chamber, and gas passing through the filters Ultrafine particles characterized by providing a path for circulating the gas to the chamber, a pressure accumulating tank for accumulating a part of the circulating gas, and a path for ejecting the accumulated gas from the back surface of the filter in order to blow off the ultrafine particles laminated on the filter surface. Manufacturing equipment. Is.
【００１８】以下図１を基に、本発明の実施例を説明す
る。An embodiment of the present invention will be described below with reference to FIG.
【００１９】超微粒子は、特公昭５７―４４７２５、特
開昭６１―２７６９０３、特公昭５８―５４１６６等に
示された方法により発生させることができる。たとえ
ば、発生室１には、水冷銅ハース４を陽極、電極３を陰
極として、直流電源６によって、プラズマアークを発生
させ、各種金属、セラミックス等の母材５を溶融せしめ
る。The ultrafine particles can be generated by the methods described in JP-B-57-44725, JP-A-61-276903, JP-B-58-54166 and the like. For example, in the generation chamber 1, a water-cooled copper hearth 4 is used as an anode and an electrode 3 is used as a cathode, and a DC arc 6 is used to generate a plasma arc to melt a base material 5 such as various metals and ceramics.
【００２０】原料８を貯蔵する原料タンク２はロータリ
ーバルブ１３を介し、密閉状態で発生室に接続され、シ
ュート２５を通じ必要に応じハース上へ落下する。落下
するタイミングは、通常、アーク電圧計と連動して行
う。The raw material tank 2 for storing the raw material 8 is hermetically connected to the generating chamber via the rotary valve 13 and drops onto the hearth through the chute 25 as necessary. The timing of falling is usually linked with the arc voltmeter.
【００２１】発生した超微粒子は、連結ダクトを通って
捕集室７へ導かれフィルター１７ａ、ｂ、ｃ、ｄで濾過
される。濾過後の清浄なガスは熱交換器１０を通り、ガ
ス循環ポンプ１５によって再び発生室に送られる。The generated ultrafine particles are guided to the collection chamber 7 through the connecting duct and filtered by the filters 17a, b, c, d. The filtered clean gas passes through the heat exchanger 10 and is sent again to the generation chamber by the gas circulation pump 15.
【００２２】フィルターに一定量の超微粒子が堆積する
とフィルターの前後に圧力差が生じるが、これを、圧力
計２６及び２７で計測し、その差圧が一定値以上になっ
たら（又は、単にタイマー操作でもよい。）フィルター
から超微粒子を払い落とす動作を行わしめる。即ち、こ
の間、蓄圧ポンプ１４でフィルター通過後の清浄なガス
の一部を蓄圧タンク（サージタンク）２４に蓄圧してお
く。When a certain amount of ultrafine particles are deposited on the filter, a pressure difference is generated before and after the filter. This pressure difference is measured by the pressure gauges 26 and 27, and when the pressure difference exceeds a certain value (or simply a timer is used). It may be operated.) Perform the action to remove ultrafine particles from the filter. That is, during this period, a part of the clean gas that has passed through the filter is accumulated in the accumulator tank (surge tank) 24 by the accumulator pump 14.
【００２３】かかる後、フィルター１７ａの場合なら、
バルブ１９ａを閉じると同時にバルブ１８ａを開けて圧
力ガスをサージタンクから噴射せしめる。終了後、１８
閉、１９ａ開、とし、ポンプ１４でサージタンクに蓄圧
する。この動作を順次行い払い落とす。バルブ１９ａ、
ｂ、ｃ、ｄを閉めるのは、払い落としの瞬間フィルター
前後の差圧をゼロにすることで払い落としの効果を高め
る為である。After that, in the case of the filter 17a,
At the same time as closing the valve 19a, the valve 18a is opened to inject the pressure gas from the surge tank. After the end, 18
Closed and opened 19a, the pump 14 accumulates pressure in the surge tank. This operation is carried out in sequence to remove it. Valve 19a,
The reason for closing b, c, and d is to enhance the effect of removing by making the differential pressure before and after the filter at the moment of removal to be zero.
【００２４】捕集室に落下した超微粒子は幾分塊状にな
っている為、攪拌羽根２８で攪拌粉砕し、カサ密度を高
めるのがよい。Since the ultrafine particles that have fallen into the collection chamber are somewhat lumpy, it is preferable to stir and pulverize them with the stirring blade 28 to increase the bulk density.
【００２５】系内循環ガスを取り入れるサージタンクの
容積の決定は重要である。小さすぎれば十分な払い落と
し効果が得られない。大きすぎれば循環ガス量の減少量
が多くなり、系内内圧の低下、ひいては超微粒子の発生
に悪影響を及ぼす。又、サージタンクへの充填圧力も考
慮する必要がある。It is important to determine the volume of the surge tank that takes in the circulating gas in the system. If it is too small, the sufficient pay-off effect cannot be obtained. If it is too large, the amount of circulating gas decreases, and the internal pressure of the system lowers, which adversely affects the generation of ultrafine particles. It is also necessary to consider the filling pressure in the surge tank.
【００２６】従って、その容積は循環ガス量の１０〜２
０％とし、循環ガスの約１０％を取り入れるのが良い。
例えば２０％容積としフィルターにかかる濾過圧力が
０．５ｋｇ／ｃｍ2 ・Ｇ程度で効果的な払い落としが行
われる。Therefore, the volume is 10 to 2 of the circulating gas amount.
It is recommended to set it to 0% and take in about 10% of the circulating gas.
For example, when the volume is 20% and the filtration pressure applied to the filter is about 0.5 kg / cm 2 · G, effective removal is performed.
【００２７】一定量の超微粒子が捕集室にたまったらボ
ールバルブ２０を開けて、回収ポット８へ導く。なお、
この時グローブボックス９内部は、系内のガス組成を変
化させないため循環ガス成分と同一成分に調整しておく
ことが好ましい。When a certain amount of ultrafine particles are accumulated in the collection chamber, the ball valve 20 is opened to guide it to the recovery pot 8. In addition,
At this time, the inside of the glove box 9 is preferably adjusted to have the same composition as the circulating gas component so as not to change the gas composition in the system.
【００２８】バルブ２０を閉めたら、超微粒子をグロー
ブボックス外部即ち大気中でハンドリングできるよう粒
子全体が酸化し、燃えてしまわないようバリアとして粒
子表面に薄い酸化膜を形成させる為のいわゆる「徐酸
化」操作に入る。After the valve 20 is closed, the ultrafine particles are oxidized so that they can be handled outside the glove box, that is, in the atmosphere, and the so-called "gradual oxidation" is used to form a thin oxide film on the surface of the particles as a barrier so as not to burn. "Enter the operation.
【００２９】真空ポンプ１６ｂで一度内部ガスを放出し
た後、Ａｒガス、又はＮ2ガス（図中省略）を充填す
る。酸素源として当該ガス中の酸素を利用する方法、又
はフィルター、除湿器を介し、大気を利用する方法又
は、一定濃度に調整された酸素混合ガスを利用する方法
などいずれでもよい。徐酸化終了後、回収ポットをグロ
ーブボックスから取り出す。After the internal gas is once discharged by the vacuum pump 16b, Ar gas or N 2 gas (not shown) is filled. Any of a method of using oxygen in the gas as an oxygen source, a method of using the atmosphere through a filter or a dehumidifier, or a method of using an oxygen mixed gas adjusted to a constant concentration may be used. After completion of the gradual oxidation, the recovery pot is taken out of the glove box.
【００３０】徐酸化せずに超微粒子を利用する場合は、
グローブボックス内に密閉可能容器８を用意し、雰囲気
ガスをＡｒまたはＮ2 に調整後、グローブ２１で容器に
充填し密閉した後取り出す。When ultrafine particles are used without gradual oxidation,
A closable container 8 is prepared in the glove box, the atmosphere gas is adjusted to Ar or N 2 , and then the container is filled with the glove 21 and sealed, and then taken out.
【００３１】一連の操作が終了したら次の粉を回収する
ため、発生系を止めることなく、グローブボックスに回
収ポット８を再セットしグローブボックス内のガス濃度
を調整して次の回収に備える。When a series of operations is completed, the next powder is collected. Therefore, without stopping the generation system, the collection pot 8 is reset in the glove box and the gas concentration in the glove box is adjusted to prepare for the next collection.
【００３２】[0032]
【実施例１】図１の装置を使用して、超微粒子のフィル
ターへの付着量と、払い落し１回当りの回収率の関係を
測定し図２に示した。母材としてＦｅ、Ｎｉ、Ｃｏ、Ｃ
ｕ、Ａｌを用いた。フィルター内部への噴射圧力を０．
５ｋｇ／ｃｍ2 （ゲージ圧）、循環ガス流量を２００ｌ
／ｍｉｎとした。Example 1 Using the apparatus shown in FIG. 1, the relationship between the amount of ultrafine particles adhering to the filter and the recovery rate per one-time removal was measured and shown in FIG. Fe, Ni, Co, C as base materials
u and Al were used. The injection pressure into the filter is set to 0.
5 kg / cm 2 (gauge pressure), circulating gas flow rate 200 l
/ Min.
【００３３】Ｆｅ、Ｎｉ、Ｃｏは付着量が異っても回収
率に殆ど差がないがＣｕ、Ａｌは付着量により回収率が
変化した。The recovery rates of Fe, Ni, and Co are almost the same even if the adhesion amounts differ, but the recovery rates of Cu and Al change depending on the adhesion amounts.
【００３４】[0034]
【実施例２】実施例１の条件でＦｅについて、一定時間
（３０分）毎に払い落しを行い、その回収率を測定した
結果を、図３に示す。払い落し回数を増やせば回収率が
１００％に近づくことがわかる。Example 2 Under the conditions of Example 1, Fe was removed at regular intervals (30 minutes) and the recovery rate was measured. The results are shown in FIG. It can be seen that the recovery rate approaches 100% by increasing the number of times of payment.
【００３５】[0035]
【実施例３】実施例１において、母材をＦｅとし、ガス
流量を３００ｌ／ｍｉｎとして、噴射圧力を変えて回収
率を調べ図４に示した。回収率からは噴射圧力０．５〜
０．８ｋｇ−Ｇ／ｃｍ2 がよいが、０．５ｋｇ−Ｇ／ｃ
ｍ2 の方が系内ガス圧力の変動が小さくより好ましかっ
た。Example 3 In Example 1, the base material was Fe, the gas flow rate was 300 l / min, the injection pressure was changed, and the recovery rate was examined. From recovery rate, injection pressure is 0.5-
0.8 kg-G / cm 2 is good, but 0.5 kg-G / c
m 2 was more preferable because the fluctuation of the gas pressure in the system was small.
【００３６】[0036]
【実施例４】実施例１において、母材をＦｅとし、噴射
圧力０．５ｋｇ−Ｇ／ｃｍ2 とし、フィルター前後差圧
と払落効果の関係を調べ図５に示した。Example 4 In Example 1, the base material was Fe, the injection pressure was 0.5 kg-G / cm 2, and the relationship between the differential pressure across the filter and the drop-off effect was investigated and shown in FIG.
【００３７】従来の方法においてはガス流量が小さいと
きは、粉のフィルターへの押しつけ力が小さいため、差
圧があっても回収率が高くなっているが、ガス流量が大
きくなると回収率が著しく低下する。In the conventional method, when the gas flow rate is small, the powder pressing force against the filter is small, and therefore the recovery rate is high even if there is a differential pressure. descend.
【００３８】本発明の場合、払い落しフィルターのガス
の流れをしゃ断する為、差圧ゼロとなり、ガス流量によ
らず回収率は高かった。In the case of the present invention, since the gas flow through the blow-off filter is cut off, the differential pressure becomes zero, and the recovery rate was high regardless of the gas flow rate.
【００３９】[0039]
【発明の効果】本発明によってフィルターからの超微粒
子の剥離を効率よく、しかも発生を停止することなしに
行わしめることができるようになり超微粒子製造の生産
性が向上した。Industrial Applicability According to the present invention, the separation of ultrafine particles from the filter can be carried out efficiently and without stopping the generation, and the productivity of ultrafine particle production is improved.
【図１】本発明実施例装置の説明図である。FIG. 1 is an explanatory diagram of an apparatus according to an embodiment of the present invention.
【図２】付着量と回収率の関係を示す図である。FIG. 2 is a diagram showing a relationship between an adhesion amount and a recovery rate.
【図３】払落し回数と回収率の関係を示す図である。FIG. 3 is a diagram showing the relationship between the number of payments and the collection rate.
【図４】フィルター１本当たり付着量と回収率の関係を
示す図である。FIG. 4 is a diagram showing the relationship between the amount of adhesion per filter and the recovery rate.
【図５】ガス流量と回収率の関係を示す図である。FIG. 5 is a diagram showing a relationship between a gas flow rate and a recovery rate.
１ 発生室 ２ 原料タンク ３ 電極 ４ ハース（水冷） ５ 溶融母材 ６ 電源 ７ 捕集室 ８ 回収ポット ９ グローブボックス １０ 熱交換器 １１ Ａｒボンベ １２ Ｈ2ボンベ １３ ボールバルブ １４ 蓄圧ポンプ １５ ガス循環ポンプ １６ ａ、ｂ真空ポンプ １７ ａ、ｂ、ｃ、ｄフィルター １８ ａ、ｂ、ｃ、ｄ電磁弁 １９ ａ、ｂ、ｃ、ｄ電磁弁 ２０ ボールバルブ ２１ グローブ ２２ エアシリンダー ２３ 電磁弁 ２４ サージタンク ２５ シュート ２６ 圧力計 ２７ 圧力計 ２８ 攪拌羽根1 Generation Chamber 2 Raw Material Tank 3 Electrode 4 Hearth (Water Cooling) 5 Molten Base Material 6 Power Supply 7 Collection Chamber 8 Recovery Pot 9 Glove Box 10 Heat Exchanger 11 Ar Cylinder 12 H 2 Cylinder 13 Ball Valve 14 Accumulation Pump 15 Gas Circulation Pump 16 a, b vacuum pump 17 a, b, c, d filter 18 a, b, c, d solenoid valve 19 a, b, c, d solenoid valve 20 ball valve 21 globe 22 air cylinder 23 solenoid valve 24 surge tank 25 Chute 26 Pressure gauge 27 Pressure gauge 28 Stirring blade
フロントページの続き (72)発明者 榊 宏一 青森県八戸市河原木遠山新田（番地なし) 大平洋金属株式会社八戸製造所内 (72)発明者 佐藤 一志 青森県八戸市河原木遠山新田（番地なし) 大平洋金属株式会社八戸製造所内Front page continuation (72) Inventor Koichi Sakaki Kawaraki Toyama Shinden, Hachinohe City, Aomori Prefecture (no address) Inside Ohira Yohyo Co., Ltd. Hachinohe Factory (72) Inventor Kazushi Sato Kawaraki Toyama Nitta, Aomori Prefecture (no address) Ohira Yohkin Co., Ltd. Hachinohe Factory
Claims (5)
ィルターを用いて捕集する超微粒子の製造方法におい
て、蓄圧されたガスをフィルター裏面から噴射させるこ
とにより、フィルター表面に積層した超微粒子を払い落
とすことを特徴とする超微粒子の製造方法。1. A method for producing ultrafine particles, in which the produced ultrafine particles are placed on a gas stream and collected by using a filter, by injecting a pressure-accumulated gas from the back surface of the filter to obtain ultrafine particles laminated on the filter surface. A method for producing ultrafine particles, which comprises removing the particles.
なったとき、差圧をゼロにして蓄圧されたガスをフィル
ター内部から噴射させることを特徴とする請求項１記載
の方法。2. The method according to claim 1, wherein when the pressure difference before and after the filter becomes a predetermined value or more, the pressure difference is set to zero and the accumulated gas is injected from the inside of the filter.
超微粒子の発生を中断させることなしに、順次払い落と
しを行うことを特徴とする請求項１記載の方法。3. A plurality of filters are installed in parallel,
The method according to claim 1, wherein the particles are sequentially removed without interrupting the generation of ultrafine particles.
り出す前に、超微粒子を徐酸化することを特徴とする請
求項１記載の方法。4. The method according to claim 1, wherein the ultrafine particles are gradually oxidized before being taken out into the atmosphere after the ultrafine particles are blown off.
ガス気流中の超微粒子を回収する捕集室、捕集室内部に
設置された複数個のフィルター、フィルターを通過した
ガスを発生室に循環させる経路、及び循環ガスの一部を
蓄圧する蓄圧タンク、フィルター表面に積層した超微粒
子を払い落とすため蓄圧されたガスをフィルター裏面か
ら噴射させる経路を設けたことを特徴とする超微粒子の
製造装置。5. A generation chamber for ultrafine particles, a collection chamber for collecting ultrafine particles in a gas stream discharged from the generation chamber, a plurality of filters installed in the collection chamber, and a gas generation chamber for the gas passing through the filters. Of the ultrafine particles, characterized by having a path for circulating the gas to the inside of the filter, a pressure accumulating tank for accumulating a part of the circulating gas, and a path for ejecting the accumulated gas from the back surface of the filter to blow off the ultrafine particles laminated on the filter surface. Manufacturing equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3361568A JP2673978B2 (en) | 1991-12-26 | 1991-12-26 | Ultrafine particle manufacturing method and manufacturing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3361568A JP2673978B2 (en) | 1991-12-26 | 1991-12-26 | Ultrafine particle manufacturing method and manufacturing apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0693309A true JPH0693309A (en) | 1994-04-05 |
| JP2673978B2 JP2673978B2 (en) | 1997-11-05 |
Family
ID=18474100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3361568A Expired - Fee Related JP2673978B2 (en) | 1991-12-26 | 1991-12-26 | Ultrafine particle manufacturing method and manufacturing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2673978B2 (en) |
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|---|---|---|---|---|
| JPS6190719A (en) * | 1984-10-11 | 1986-05-08 | Hitachi Plant Eng & Constr Co Ltd | Bug filter control device |
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