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JPH0690053B2 - Distortion detector strain detector - Google Patents

Distortion detector strain detector

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Publication number
JPH0690053B2
JPH0690053B2 JP59234735A JP23473584A JPH0690053B2 JP H0690053 B2 JPH0690053 B2 JP H0690053B2 JP 59234735 A JP59234735 A JP 59234735A JP 23473584 A JP23473584 A JP 23473584A JP H0690053 B2 JPH0690053 B2 JP H0690053B2
Authority
JP
Japan
Prior art keywords
magnetostrictive
probe
strain
wire
magnetostrictive wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59234735A
Other languages
Japanese (ja)
Other versions
JPS61112923A (en
Inventor
宏三 京和泉
Original Assignee
サンテスト株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by サンテスト株式会社 filed Critical サンテスト株式会社
Priority to JP59234735A priority Critical patent/JPH0690053B2/en
Publication of JPS61112923A publication Critical patent/JPS61112923A/en
Publication of JPH0690053B2 publication Critical patent/JPH0690053B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は磁歪現象を用いて物体の機械的変位や液面の変
位などを検出する変位検出器の歪検出装置に関するもの
である。
Description: TECHNICAL FIELD The present invention relates to a strain detector for a displacement detector that detects a mechanical displacement of an object or a displacement of a liquid surface by using a magnetostriction phenomenon.

〔従来の技術〕[Conventional technology]

従来、物体の機械的変位や液面の変位などを検出する変
位検出器としては差動変圧器やポテンショメータ、静電
容量式変位検出器など種々のものが知られており、その
中でも磁歪現象を応用した変位検出器が特に線形性、分
解能に優れている。
Conventionally, various types of displacement detectors such as a differential transformer, a potentiometer, and a capacitance type displacement detector have been known as displacement detectors for detecting mechanical displacement of an object or displacement of a liquid surface. The applied displacement detector is particularly excellent in linearity and resolution.

この種の磁歪式変位検出器として、米国特許第3,898,55
5号公報に記載のように、円管状の磁歪線の中心に導線
を挿通するとともに、磁歪線の外側に移動可能な永久磁
石を配置したものが知られている。そして、導線に電流
パルスを流すことにより永久磁石の近接する磁歪線の近
接する部位で捩り歪を発生させ、この捩り歪を磁歪線の
一端部に設けた歪検出装置で電気信号に変換し、捩り歪
の伝播時間を計測することにより永久磁石に与えられる
機械的変位を検出している。
As this type of magnetostrictive displacement detector, U.S. Patent No. 3,898,55
As described in Japanese Patent Laid-Open No. 5 (1994), it is known that a conductor wire is inserted through the center of a circular magnetostrictive wire and a movable permanent magnet is arranged outside the magnetostrictive wire. Then, by causing a current pulse to flow through the conducting wire, a torsional strain is generated in a portion where the magnetostrictive wire is close to the permanent magnet, and the torsional strain is converted into an electric signal by a strain detecting device provided at one end of the magnetostrictive wire, The mechanical displacement given to the permanent magnet is detected by measuring the propagation time of the torsional strain.

上記歪検出装置は、自由端が磁歪線の表裏に固着された
2本の帯片と、これら帯片に巻回された受信用コイル
と、両帯片の間に配置したバイアス用磁石とで構成され
ており、磁歪線を伝播した捩り歪を帯片の縦方向歪に変
換し、これをコイルによって電気信号に変換している。
The above-mentioned strain detection device is composed of two strips whose free ends are fixed to the front and back sides of the magnetostrictive wire, a receiving coil wound around these strips, and a bias magnet arranged between the strips. The torsional strain propagated through the magnetostrictive line is converted into a longitudinal strain of the strip, and this is converted into an electric signal by a coil.

〔発明が解決しようとする課題〕[Problems to be Solved by the Invention]

上記歪検出装置の場合には、帯片の自由端を磁歪線に溶
接によって固着するようになっているが、少しでも広い
面積で溶接すると、磁歪線を伝播する捩り歪が溶接部で
分散,反射してしまい、きれいな波形が検出できない欠
点がある。そのため、溶接作業には高度の技術と細心の
注意とが要求され、生産性が悪くなってコスト上昇を招
く問題があった。
In the case of the strain detecting device, the free end of the strip is fixed to the magnetostrictive wire by welding, but if the welding is performed in a wide area as much as possible, the torsional strain propagating the magnetostrictive wire is dispersed at the welded portion, There is a drawback that a beautiful waveform cannot be detected because it is reflected. Therefore, the welding work requires a high degree of skill and close attention, and there is a problem that productivity is deteriorated and cost is increased.

そこで、本発明の目的は、製造が簡単で、かつ捩り歪を
高い精度で電気信号に変換できる変位検出器の歪検出装
置を得ることである。
Therefore, an object of the present invention is to provide a strain detector for a displacement detector that is easy to manufacture and that can convert torsional strain into an electrical signal with high accuracy.

〔課題を解決するための手段〕[Means for Solving the Problems]

上記目的を達成するために、本発明の歪検出装置は、磁
歪線の特定部位に設けられ、磁歪線に対して交差して接
触するプローブと、該プローブの軸方向歪を検出し、電
気信号に変換する受信器と、上記プローブと磁歪線との
外側に配置され、両者を圧接保持する弾性体と、弾性体
の背後を押圧してプローブと磁歪線との圧接力を調整す
る調整手段とを具備してなるものである。
In order to achieve the above object, the strain detection device of the present invention is provided in a specific portion of the magnetostrictive line, a probe that intersects and contacts the magnetostrictive line, detects the axial strain of the probe, and an electrical signal. A receiver for converting to, a probe and a magnetostrictive wire disposed outside the probe, and an elastic body for pressing and holding the two, and an adjusting means for pressing the back of the elastic body to adjust the press-contact force between the probe and the magnetostrictive wire. It is equipped with.

〔作用〕[Action]

本発明の第1の特徴は、磁歪線とプローブとが溶接部等
の不要部を有さず交差状に接触し、かつ両側から弾性体
を介して押圧保持していることである。磁歪線とプロー
ブとを溶接等で固着すると、磁歪線の捩り歪はプローブ
の軸方向歪に効率よく変換されるが、逆に溶接部で捩り
歪の分散や反射が起こり、受信部では本来必要な波形だ
けでなく不要波形も多く検出される。これに対し、磁歪
線とプローブを両側から弾性体を介して押圧保持すれ
ば、捩り歪の軸方向歪への変換効率は溶接時に比べて若
干低下するが、磁歪線とプローブとが溶接時に比べて狭
い面積で接触するので、接触部における捩り歪の分散や
反射が少なく、しかも弾性体が捩り歪の分散や反射を抑
制し、受信部では不要波形の少ない“きれいな波形”を
検出できる。
A first feature of the present invention is that the magnetostrictive wire and the probe are in contact with each other in a cross shape without any unnecessary portion such as a welded portion, and are pressed and held from both sides via elastic bodies. When the magnetostrictive wire and the probe are fixed by welding etc., the torsional strain of the magnetostrictive wire is efficiently converted into the axial strain of the probe, but on the contrary, the torsional strain is dispersed and reflected at the welded part, which is originally necessary at the receiving part. Not only unnecessary waveforms but also many unnecessary waveforms are detected. On the other hand, if the magnetostrictive wire and the probe are pressed and held from both sides via the elastic body, the conversion efficiency of the torsional strain into the axial strain is slightly lower than that at the time of welding, but the magnetostrictive wire and the probe are at the time of welding. Since the contact is made in a narrow area, there is little dispersion or reflection of the torsional strain at the contact portion, and the elastic body suppresses the dispersion or reflection of the torsional strain, and the receiving portion can detect a "clean waveform" with few unnecessary waveforms.

また、本発明の第2の特徴は、磁歪線とプローブの圧接
力を調整手段で調整可能としたことである。溶接で磁歪
線とプローブを固着した場合、反射波は溶接面積の多少
によって大きく異なり、溶接の良否が受信器の検出波形
に大きな影響を与える。しかも、溶接後の調整は全く不
可能である。これに対し、本発明では調整手段で圧接力
を調整し得るので、組付後に受信器の検出波形を見なが
ら調整手段を操作することにより、常に望ましい波形に
調整できる。したがって、個々の製品の検出波形のバラ
ツキが少なく、均質の歪検出装置を得ることが可能とな
る。
The second feature of the present invention is that the pressure contact force between the magnetostrictive wire and the probe can be adjusted by the adjusting means. When the magnetostrictive wire and the probe are fixed by welding, the reflected wave differs greatly depending on the size of the welding area, and the quality of welding greatly affects the waveform detected by the receiver. Moreover, adjustment after welding is completely impossible. On the other hand, in the present invention, since the pressure contact force can be adjusted by the adjusting means, the desired waveform can always be adjusted by operating the adjusting means while watching the detected waveform of the receiver after assembling. Therefore, it is possible to obtain a uniform strain detection device with less variation in the detection waveform of each product.

その他、本発明では磁歪線とプローブとの組付に際し、
磁歪線とプローブとを両側から弾性体を介して挟み、こ
れらを調整手段で締め付けるだけでよいので、従来のよ
うな面倒な溶接作業が全く不要であり、組付が簡単で生
産性も格段に向上する。さらに、本発明では磁歪線とプ
ローブとを容易に分解できるので、受信部が故障した場
合には受信部のみを取り替えればよく、他の部分、つま
り磁歪線や弾性体,調整手段等はそのまま共用できる利
点がある。
In addition, in the present invention, when assembling the magnetostrictive wire and the probe,
Since the magnetostrictive wire and the probe are sandwiched from both sides via the elastic body and they are only tightened by the adjusting means, there is no need for complicated welding work as in the past, assembly is easy and productivity is remarkably high. improves. Further, according to the present invention, the magnetostrictive wire and the probe can be easily disassembled, so that if the receiving part fails, only the receiving part needs to be replaced, and the other parts, that is, the magnetostrictive line, the elastic body, the adjusting means, etc., remain unchanged. It has the advantage of being shared.

なお、磁歪線とプローブとを直角に交差させれば、磁歪
線を伝播する捩り歪をプローブの軸方向歪に最も効率よ
く変換できるので、望ましい。
It is desirable that the magnetostrictive line and the probe intersect at a right angle because the torsional strain propagating through the magnetostrictive line can be most efficiently converted into the axial strain of the probe.

〔実施例〕〔Example〕

第1図は本発明にかかる変位検出器の具体例を示す。 FIG. 1 shows a specific example of the displacement detector according to the present invention.

図面において、磁歪線1は非磁性で導電性の中筒7の中
に挿通され、この中筒7の両端部内部には中心を磁歪線
1が貫通するゴムなどの弾性体8が組み込まれている。
そして、磁歪線1に張力を持たせた後、中筒7の両端部
を圧縮して絞り部9を形成することにより、磁歪線1と
弾性体8とを同時に押圧し、磁歪線1は中筒7の中に装
備される。
In the drawing, the magnetostrictive wire 1 is inserted into a non-magnetic and conductive middle cylinder 7, and inside both ends of the middle cylinder 7, an elastic body 8 such as a rubber through which the magnetostrictive wire 1 penetrates is incorporated. There is.
Then, after applying tension to the magnetostrictive wire 1, both ends of the middle cylinder 7 are compressed to form the narrowed portions 9, thereby simultaneously pressing the magnetostrictive wire 1 and the elastic body 8, and the magnetostrictive wire 1 is It is equipped in the cylinder 7.

上記絞り部9では弾性体8が磁歪線1の外周に密着する
ので、磁歪線1の両端まで伝播した超音波が弾性体8で
効果的に吸収される。したがって、永久磁石2で生じた
捩り歪による超音波のみを、中筒7に形成した開口部25
を経て歪検出装置4で検出することが可能となる。
Since the elastic body 8 is in close contact with the outer circumference of the magnetostrictive wire 1 in the narrowed portion 9, the ultrasonic wave propagated to both ends of the magnetostrictive wire 1 is effectively absorbed by the elastic body 8. Therefore, only the ultrasonic wave due to the torsional strain generated in the permanent magnet 2 is formed in the opening 25 formed in the middle cylinder 7.
After that, the distortion can be detected by the strain detection device 4.

磁歪線1の始端は導線12に接続され、後端は導線10によ
って中筒7の右端に電気的に接続され、さらに中筒7の
左端は導線11に接続されているため、多心ケーブル15に
より供給される電流パルスが磁歪線1に流れる。なお、
この実施例では、中筒7を導電体の一部として使用した
が、中筒7が非導電性材料で構成されている場合には、
別の導線(図示せず)を磁歪線1の後端と導線11との間
に設ければ、同様の目的を達する。
Since the start end of the magnetostrictive wire 1 is connected to the conducting wire 12, the rear end thereof is electrically connected to the right end of the middle cylinder 7 by the conducting wire 10, and the left end of the middle cylinder 7 is connected to the conducting wire 11, the multicore cable 15 The current pulse supplied by the magnetic field flows through the magnetostrictive line 1. In addition,
In this embodiment, the middle cylinder 7 is used as a part of the conductor, but when the middle cylinder 7 is made of a non-conductive material,
If another conductor wire (not shown) is provided between the rear end of the magnetostrictive wire 1 and the conductor wire 11, the same purpose is achieved.

磁歪線1を装備した中筒7は非磁性の外筒17の中に挿入
され、この外筒17と中筒7との間に形成される環状空間
に、例えばスポンジなどからなる振動吸収材23が配置さ
れている。この振動吸収材23は、外筒17や、外筒17に溶
接あるいは他の機械的方法で接合固定されたケース20な
どに作用する外部からの機械的な振動や衝撃を吸収,減
衰させ、不必要な外乱が歪検出装置4で検出されないよ
うにしている。
The middle cylinder 7 equipped with the magnetostrictive wire 1 is inserted into a non-magnetic outer cylinder 17, and a vibration absorbing material 23 made of, for example, a sponge is provided in an annular space formed between the outer cylinder 17 and the middle cylinder 7. Are arranged. The vibration absorbing material 23 absorbs and attenuates mechanical vibrations and shocks from the outside that act on the outer cylinder 17, the case 20 welded to the outer cylinder 17, or joined and fixed by another mechanical method. The necessary disturbance is prevented from being detected by the strain detector 4.

外筒17の右端にはエンドキャップ18が圧入もしくは他の
機械的方法で密封固定されており、例えば外筒17が液中
にあっても、液体が外筒17の内部に浸入することなく、
永久磁石2の位置を検出することが可能となる。
At the right end of the outer cylinder 17, an end cap 18 is press-fitted or fixed by another mechanical method, for example, even if the outer cylinder 17 is in liquid, the liquid does not enter the outer cylinder 17,
It is possible to detect the position of the permanent magnet 2.

ケース20の左端にはケースカバー19が挿入固定され、こ
のケースカバー19を貫通して多心ケーブル15がケース20
内に導入されている。多心ケーブル15は磁歪線1への電
流パルスの供給を行うとともに、歪検出装置4の検出信
号を導線13,14を介して取り出すことができる。また、
多心ケーブル15としてシールド線を使用すれば、シール
ド導線16をケース20の内面に電気的に接続し、ケース20
および外筒17を磁歪線1および歪検出装置4の電気的シ
ールドとして使用することもできる。
A case cover 19 is inserted and fixed at the left end of the case 20, and the multi-core cable 15 is penetrated through the case cover 19 to connect the case 20 to the case 20.
Has been introduced within. The multi-core cable 15 can supply a current pulse to the magnetostrictive wire 1 and take out the detection signal of the strain detecting device 4 through the conductors 13 and 14. Also,
If a shield wire is used as the multi-core cable 15, the shield conductor 16 is electrically connected to the inner surface of the case 20,
The outer cylinder 17 can also be used as an electric shield for the magnetostrictive wire 1 and the strain detecting device 4.

上記構成の変位検出器は、変位を検出すべき機械などの
固定部24にケース20のネジ部21を挿入してナット22で締
め付け固定し、機械などの可動部(図示せず)に永久磁
石2を固定すれば容易に設置でき、機械などの可動部の
変位を検出することができる。
The displacement detector having the above-described configuration is configured such that the screw portion 21 of the case 20 is inserted into the fixed portion 24 of the machine or the like where displacement is to be detected, and the nut 22 is tightened and fixed, and the permanent magnet is attached to the movable portion (not shown) of the machine or the like. If 2 is fixed, it can be easily installed and the displacement of a movable part such as a machine can be detected.

第2図は本発明の主要部である歪検出装置4の一例を示
す。
FIG. 2 shows an example of the strain detection device 4 which is the main part of the present invention.

左端に受信器の一例である圧電素子27が接着されたプロ
ーブ26は磁歪線1に対し角度をもって接触しており、コ
字形の押え金具29がゴム等の弾性体28を介して磁歪線1
とプローブ26との接触を保持している。そして、押え金
具29の左端部をネジ30で締め付けることにより、磁歪線
1とプローブ26との接触をより確実なものとしている。
A probe 26, to which a piezoelectric element 27, which is an example of a receiver, is attached at the left end, is in contact with the magnetostrictive wire 1 at an angle, and a U-shaped holding metal fitting 29 is interposed between the magnetostrictive wire 1 and an elastic body 28 such as rubber.
Holds contact with the probe 26. Then, by tightening the left end portion of the retainer fitting 29 with the screw 30, the contact between the magnetostrictive wire 1 and the probe 26 is made more reliable.

磁歪線1上の永久磁石2の近接する位置で生じた捩り歪
がプローブ26と接触している磁歪線1の部分に到達すれ
ば、この捩り歪31によってプローブ26の軸方向に歪32が
生じ、圧電素子27の両極板に接続された導線13,14間に
歪32の大きさに応じた電気信号が得られる。このよう
に、磁歪線1とプローブ26とが角度をもって点接触して
いるので、プローブ26の接触による捩り歪の反射の影響
を最少限にとどめることができ、高精度の検出が可能で
ある。
When the torsional strain generated at the position where the permanent magnet 2 is close to the magnetostrictive line 1 reaches the portion of the magnetostrictive line 1 in contact with the probe 26, the torsional strain 31 causes a strain 32 in the axial direction of the probe 26. An electric signal corresponding to the magnitude of the strain 32 is obtained between the conducting wires 13 and 14 connected to the bipolar plates of the piezoelectric element 27. Thus, since the magnetostrictive wire 1 and the probe 26 are in point contact with each other at an angle, the influence of the reflection of the torsional strain due to the contact of the probe 26 can be minimized, and highly accurate detection can be performed.

〔発明の効果〕〔The invention's effect〕

以上の説明で明らかなように、本発明によれば、プロー
ブを磁歪線に交差させて圧接させることにより、磁歪線
の捩り歪をプローブの軸方向変位へ変換するようにした
ので、面倒な溶接工程が不要であり、製造が遥かに簡単
となる。
As is apparent from the above description, according to the present invention, the probe is crossed with the magnetostrictive wire and pressed against it, so that the torsional strain of the magnetostrictive wire is converted into the axial displacement of the probe, which is troublesome welding. No steps are required and manufacturing is much easier.

また、プローブと磁歪線との背後を弾性体で支持し、か
つ調整手段でプローブと磁歪線との圧接力を調整可能と
しているので、適度な圧接力を容易に得ることができる
とともに、弾性体がプローブとの接触部に到達した捩り
歪の分散,反射を抑制し、従来の溶接方式に比べてきれ
いな波形を検出することができる。
Further, since the back of the probe and the magnetostrictive wire is supported by an elastic body, and the pressure contact force between the probe and the magnetostrictive wire can be adjusted by the adjusting means, an appropriate pressure contact force can be easily obtained, and the elastic body It is possible to suppress the dispersion and reflection of the torsional strain that has reached the contact portion with the probe, and to detect a clean waveform as compared with the conventional welding method.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明にかかる変位検出器の一実施例の断面
図、第2図はその歪検出装置の磁歪線の軸方向から見た
拡大断面図である。 1……磁歪線、2……永久磁石、4……歪検出装置、26
……プローブ、27……圧電素子、28……弾性体。
FIG. 1 is a cross-sectional view of an embodiment of the displacement detector according to the present invention, and FIG. 2 is an enlarged cross-sectional view of the strain detecting device as seen from the axial direction of the magnetostrictive line. 1 ... Magnetostrictive line, 2 ... Permanent magnet, 4 ... Strain detection device, 26
...... Probe, 27 ...... Piezoelectric element, 28 …… Elastic body.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】磁歪線に電流パルスを流し、磁歪線に沿っ
て移動可能な永久磁石の近接する磁歪線の部位で捩り歪
を発生させ、磁歪線の特定部位までの捩り歪の伝播時間
を計測することにより、永久磁石に与えられる機械的変
位を検出する変位検出器において、 磁歪線の特定部位に設けられ、磁歪線に対して交差して
接触するプローブと、該プローブの軸方向歪を検出し、
電気信号に変換する受信器と、上記プローブと磁歪線と
の外側に配置され、両者を圧接保持する弾性体と、弾性
体の背後を押圧してプローブと磁歪線との圧接力を調整
する調整手段とを具備してなる変位検出器の歪検出装
置。
1. A current pulse is applied to a magnetostrictive line to generate a torsional strain at a portion of the magnetostrictive line that is adjacent to a permanent magnet that can move along the magnetostrictive line, and the propagation time of the torsional strain to a specific portion of the magnetostrictive line is set. In a displacement detector that detects the mechanical displacement applied to a permanent magnet by measuring, a probe that is provided at a specific part of the magnetostrictive line and that crosses and contacts the magnetostrictive line, and the axial strain of the probe Detect and
A receiver for converting into an electric signal, an elastic body arranged outside the probe and the magnetostrictive wire and holding them in pressure contact, and an adjustment for pressing the back of the elastic body to adjust the pressure contact force between the probe and the magnetostrictive wire. Distortion detecting apparatus for a displacement detector, comprising:
JP59234735A 1984-11-07 1984-11-07 Distortion detector strain detector Expired - Lifetime JPH0690053B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59234735A JPH0690053B2 (en) 1984-11-07 1984-11-07 Distortion detector strain detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59234735A JPH0690053B2 (en) 1984-11-07 1984-11-07 Distortion detector strain detector

Related Child Applications (3)

Application Number Title Priority Date Filing Date
JP3557289A Division JPH01272918A (en) 1989-02-15 1989-02-15 Strain detecting device for displacement detector
JP24467789A Division JPH02124424A (en) 1989-09-19 1989-09-19 Displacement detector
JP24467889A Division JPH02124425A (en) 1989-09-19 1989-09-19 Displacement detector

Publications (2)

Publication Number Publication Date
JPS61112923A JPS61112923A (en) 1986-05-30
JPH0690053B2 true JPH0690053B2 (en) 1994-11-14

Family

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Application Number Title Priority Date Filing Date
JP59234735A Expired - Lifetime JPH0690053B2 (en) 1984-11-07 1984-11-07 Distortion detector strain detector

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Country Link
JP (1) JPH0690053B2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02163615A (en) * 1988-12-19 1990-06-22 Jeco Co Ltd Position sensor
JPH01272918A (en) * 1989-02-15 1989-10-31 Sankyo Boeki Kk Strain detecting device for displacement detector
JPH0626884A (en) * 1992-07-07 1994-02-04 San Tesuto Kk Position detection device
US6612168B2 (en) 1995-05-11 2003-09-02 Mts Systems Corporation Explosion proof magnetostrictive probe
CA2696180C (en) * 1995-05-11 2012-08-07 Mts Systems Corporation Acoustic transducer components
JP3059928B2 (en) * 1996-01-12 2000-07-04 トヨタ自動車株式会社 Magnetostrictive wire and displacement detector
DE102004060577B4 (en) * 2004-12-16 2010-08-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Circuit and method for generating a current pulse in a waveguide
JP5336298B2 (en) * 2009-08-21 2013-11-06 サンテスト株式会社 Carriage cart positioning stop device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3898555A (en) 1973-12-19 1975-08-05 Tempo Instr Inc Linear distance measuring device using a moveable magnet interacting with a sonic waveguide

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5486366A (en) * 1977-12-22 1979-07-09 Mitsubishi Precision Co Ltd Nonncontact type displacement measuring instrument
CH656954A5 (en) * 1981-10-30 1986-07-31 Maag Zahnraeder & Maschinen Ag METHOD AND ARRANGEMENT FOR EVALUATING SIGNALS FROM AN ULTRASONIC WAY MEASURING SYSTEM.
JPS5937418A (en) * 1982-08-26 1984-02-29 Makome Kenkyusho:Kk Apparatus for measuring length using ultrasonic delay line
DE3304520A1 (en) * 1983-02-10 1984-08-16 Gebhard Balluff Fabrik feinmechanischer Erzeugnisse GmbH & Co, 7303 Neuhausen ULTRASONIC GAUGE

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3898555A (en) 1973-12-19 1975-08-05 Tempo Instr Inc Linear distance measuring device using a moveable magnet interacting with a sonic waveguide

Also Published As

Publication number Publication date
JPS61112923A (en) 1986-05-30

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