JPH0666643A - Substrate with temperature detector - Google Patents

Abstract

PURPOSE:To detect the temperature of a semiconductor substrate accurately at the time of heat treatment while allowing detection of temperatures at many points on the substrate. CONSTITUTION:A thin film thermocouple 3 is formed on a substrate 1 and an electromotive force, corresponding to the temperature of the substrate 1, is induced at a contact part 33 of the thermocouple 3. The electromotive force is detected and employed in the measurement of temperature of the substrate 1. When a plurality of sets of thin film thermocouple 3 are provided on the substrate, temperatures at many points on the substrate can be measured concurrently.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to temperature measurement of a substrate used for manufacturing semiconductor devices and the like.

[0002]

2. Description of the Related Art FIG. 6 shows a substrate with a thermocouple used for conventional temperature measurement. In the figure, 7 is a cement for fixing a thermocouple, 1 is a substrate, and 12 is a thermocouple.

Next, the operation will be described. The thermocouple 12 is fixed to the substrate 1 with cement 7. When the substrate 1 is heated, the cement 7 is also heated at the same time, and an electromotive force due to the Seebeck effect is generated at the joint portion of the dissimilar metal of the thermocouple 12 fixed inside the cement 7, and this electromotive voltage should be measured. Thus, the temperature of the substrate 1 is measured.

[0004]

In the prior art, since the thermocouple 12 is fixed by the cement 7, the contact state between the substrate 1 and the thermocouple 12 is not constant, especially during a heating / cooling process for a short time. However, there is a problem that the temperature display differs depending on the contact state. Further, when measuring at a plurality of points on the substrate surface, it is impossible to simultaneously measure at a plurality of points because the space for mounting the thermocouple is large.

The present invention has been made to solve the above problems, eliminates the error of temperature display due to the difference in the contact state between the thermocouple and the substrate, and allows simultaneous measurement at multiple points in the substrate. It is intended to be possible.

[0006]

A substrate with a temperature detector according to the present invention has a temperature detector made of a pair of thin-film metal members forming a thermocouple arranged on the substrate.
Further, a thin film resistance temperature detector is formed on the substrate as a temperature detector. In addition, temperature detectors are provided at a plurality of locations on the substrate.

[0007]

The substrate with a temperature detector according to the present invention detects the temperature of the substrate by the electromotive force of a thin film thermocouple. Further, the temperature of the substrate is detected by the resistance value of the resistance temperature detector. Further, the temperature of the substrate at a plurality of locations is detected by thermocouples or resistance temperature detectors on the plurality of thin films.

[0008]

【Example】

Example 1. Embodiments of the present invention will be described below with reference to the drawings. In FIG. 1, 1 is a semiconductor substrate, 2 is a thin film-shaped insulating member formed on the substrate 1, 3 is a thin film-shaped dissimilar metal member 31, 32 joined at a contact portion 33, It is a thermocouple that is configured by arranging. Here, the thermocouple 3 generates an electromotive force according to the temperature of the substrate 1 due to the Seebeck effect of the contact portion 33. Reference numeral 4 is a protective film for protecting the thinned thermocouple 3, 5 is a pad portion provided at an end of the thinned thermocouple 3, 6 is a thermocouple element wire welded to the pad portion, 7 Is a cement for fixing the thermocouple wire 6.

Next, the operation will be described. When the substrate 1 is heated, an electromotive force is generated by the Seebeck effect at the contact portion 33 of the thin film thermocouple 3. This electromotive force is taken out of the substrate by the thermocouple element 6 and the electromotive force is measured to obtain the substrate 1
It is possible to measure the temperature of.

Embodiment 2. Although the thin film thermocouple is used in the first embodiment, a thin film resistance temperature detector may be used.
FIG. 3 shows an example of the material of the resistance temperature detector which is made into a thin film. The material whose electric characteristic changes depending on the heat treatment temperature (FIG. 3 shows an example of the WSi2 film) is used to measure the electric characteristic. Also has the same effect.

FIG. 2 shows this embodiment, in which 8 is a resistance thermometer formed in a thin film shape, and 9 is a heat-resistant conductive material for externally measuring the electric characteristics of the thin film resistance thermometer element 8. It is the body. When the substrate 1 is heat-treated, a thin film resistance temperature detector 8
The heating temperature of the substrate 1 can be obtained from the change in the electrical characteristics (in this case, the resistance value).

Embodiment 3. As a modified example of the second embodiment, when a material whose electric characteristics are changed by heat treatment and whose characteristics are not changed even when the characteristics are cooled to room temperature is used, the electric characteristics are measured after the heat treatment. Even if the same effect is obtained.

FIG. 4 shows this embodiment, and 10 is a thin film resistance temperature detector made of a material that retains electric characteristics according to the heating temperature during heat treatment. The processing temperature is measured by touching the needle of the measuring instrument and measuring the electrical characteristics of the thin film.

Example 4. In the second and third embodiments, the resistance temperature detectors 8 and 10 are linearly patterned, but a zigzag resistance temperature detector 11 may be formed as shown in FIG. In this case, the difference in change in the electrical characteristics of the resistance temperature detector 11 becomes large, and the measurement sensitivity can be increased.

Example 5. In the above embodiment, one temperature detector is formed, but by forming a plurality of temperature detectors, the temperatures at many points on the substrate can be detected at the same time.

[0016]

As described above, according to the present invention, since the thin-film temperature detector is formed on the substrate, the contact state between the substrate and the portion for detecting the temperature becomes constant, and the accuracy is improved. Highly stable temperature measurement is possible. Further, if the film is thinned, the area of the temperature detecting portion can be reduced, so that it is possible to easily measure the temperature at many points on the substrate.

[Brief description of drawings]

FIG. 1 is a perspective view showing a first embodiment of the present invention.

FIG. 2 is a perspective view showing a second embodiment of the present invention.

FIG. 3 is a characteristic diagram showing electrical characteristics of Example 2 of the present invention.

FIG. 4 is a perspective view showing a third embodiment of the present invention.

FIG. 5 is a perspective view showing a fourth embodiment of the present invention.

FIG. 6 is a perspective view of a conventional substrate with a temperature detector.

[Explanation of symbols]

 1 Substrate 3 Thermocouple 4 Protective film 7 Cement 8 Resistance temperature detector

Claims (3)

[Claims] 1. A semiconductor substrate, and a temperature detector having a thermocouple composed of a pair of thin-film metal members arranged on the substrate, the temperature of the substrate being generated by the electromotive force of the thermocouple of the temperature detector. A substrate with a temperature detector, which is configured to detect temperature. 2. A semiconductor substrate, comprising a temperature detector having a thin film resistance temperature detector arranged on the substrate, wherein the temperature of the substrate is changed by a change in electric characteristics of the resistance temperature detector of the temperature detector. A substrate with a temperature detector, which is configured to detect temperature. 3. The temperature detector according to claim 1, wherein temperature detectors are provided at a plurality of locations on the semiconductor substrate, respectively, to detect temperatures at a plurality of locations on the substrate. Substrate with.