JPH0654538B2 - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH0654538B2 JPH0654538B2 JP59253056A JP25305684A JPH0654538B2 JP H0654538 B2 JPH0654538 B2 JP H0654538B2 JP 59253056 A JP59253056 A JP 59253056A JP 25305684 A JP25305684 A JP 25305684A JP H0654538 B2 JPH0654538 B2 JP H0654538B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- magnetic
- medium
- magnetic recording
- recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 claims description 55
- 239000011651 chromium Substances 0.000 claims description 16
- 229910052760 oxygen Inorganic materials 0.000 claims description 9
- 229910000599 Cr alloy Inorganic materials 0.000 claims description 8
- 229910052804 chromium Inorganic materials 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000011241 protective layer Substances 0.000 description 24
- 239000010410 layer Substances 0.000 description 22
- 239000000758 substrate Substances 0.000 description 9
- 229910045601 alloy Inorganic materials 0.000 description 8
- 239000000956 alloy Substances 0.000 description 8
- 239000010408 film Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 238000005299 abrasion Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 229910000859 α-Fe Inorganic materials 0.000 description 4
- 229910008458 Si—Cr Inorganic materials 0.000 description 3
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000001771 impaired effect Effects 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 229910020641 Co Zr Inorganic materials 0.000 description 1
- 229910020520 Co—Zr Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 239000006247 magnetic powder Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Description
【発明の詳細な説明】 〔発明の技術分野〕 この発明は磁気記録媒体に係り、特に垂直磁気異方性を
有する記録磁性層を備えた磁気記録媒体に関する。Description: TECHNICAL FIELD The present invention relates to a magnetic recording medium, and more particularly to a magnetic recording medium having a recording magnetic layer having perpendicular magnetic anisotropy.
近年、情報処理技術の発達に伴ってメモリ装置が担う情
報量は飛躍的に増加し、フロッピーディスク等の磁気記
録媒体に対する大容量化の要求もますます高まってい
る。この要求に応えるため、高密度記録の可能な磁気記
録媒体、特に最近では膜面に垂直な方向の磁化を利用し
て記録を行なう垂直磁気記録用の磁気記録媒体の研究・
開発が活発になされている。垂直磁気記録用の磁気記録
媒体は垂直磁気異方性を有する記録磁性層を備えた媒体
であり、現在実用されている面内記録用の磁気記録媒体
の多くを構成している塗布型媒体よりも、記録磁性層と
してＣｏ−Ｃｒ系合金等の金属薄膜をスパツタや蒸着に
より形成した金属薄膜型媒体、あるいはＢａフェライト
やＳｒフェライト等のマグネトプラムバイト型結晶構造
を有する酸化物薄膜型媒体が高密度記録により適した媒
体として有望視されている。In recent years, with the development of information processing technology, the amount of information carried by a memory device has dramatically increased, and there has been an increasing demand for larger capacity of magnetic recording media such as floppy disks. In order to meet this demand, research on magnetic recording media capable of high-density recording, in particular, magnetic recording media for perpendicular magnetic recording, which records by utilizing magnetization perpendicular to the film surface.
Development is active. A magnetic recording medium for perpendicular magnetic recording is a medium having a recording magnetic layer having perpendicular magnetic anisotropy, and is more than a coating type medium that constitutes most of the magnetic recording media for in-plane recording currently in practical use. In addition, a metal thin film type medium in which a metal thin film such as a Co—Cr alloy is formed by sputtering or vapor deposition as a recording magnetic layer, or an oxide thin film type medium having a magnetoplumbite type crystal structure such as Ba ferrite or Sr ferrite is high. It is regarded as a promising medium for density recording.
とこれ、塗布型媒体では磁性粉をバインダ等と混ぜて基
体上に塗布することにより記録磁性層が形成されるた
め、記録磁性層が弾力性を持っており、また磁性層中に
潤滑剤を混入させることも可能であり、それによって媒
体と磁気ヘッド間の接触を良好に維持し、媒体およびヘ
ッドの耐久性を十分に得ることができる。On the other hand, in the coating type medium, the recording magnetic layer is formed by mixing the magnetic powder with the binder or the like and coating the mixture on the substrate, so that the recording magnetic layer has elasticity, and the lubricant is contained in the magnetic layer. It is also possible to mix them, whereby good contact between the medium and the magnetic head can be maintained, and sufficient durability of the medium and head can be obtained.
これに対し、金属薄膜型媒体や酸化物薄膜型媒体におい
ては記録磁性層が弾力性をほとんど持たないため、フェ
ライト製などの硬い材質の磁気ヘッドが媒体上を走行す
ると、媒体表面やヘッドの表面にスクラッチ等の損傷が
生じ易くなる。その場合には、媒体およびヘッドの耐久
性が損われるばかりでなく、媒体やヘッドの摩耗粉の付
着により媒体・ヘッド間の実効的な距離が増大してスペ
ーシング・ロスが大きくなり、周波数特性の劣化や、再
生時の出力低下および出力変動の要因となる。On the other hand, in a metal thin film type medium or an oxide thin film type medium, since the recording magnetic layer has almost no elasticity, when a magnetic head made of a hard material such as ferrite runs on the medium, the medium surface or the surface of the head It is easy for scratches and other damage to occur. In that case, not only the durability of the medium and the head is impaired, but also the effective distance between the medium and the head is increased due to the adherence of the abrasion powder of the medium and the head, and the spacing loss is increased. Cause deterioration of the output, decrease in output during playback, and output fluctuation.
そこで、金属薄膜型媒体や酸化物薄膜型媒体の場合に
は、記録磁性層の上にこれを保護するための硬質材料か
らなる保護層を形成することが考えられる。保護層の具
体例としては酸化珪素，酸化アルミニウムおよび窒化チ
タン等の薄膜が従来提案されている。しかし、これらの
硬質保護層は材質が脆性であり、磁気ヘッドとの接触に
よってやはり摩耗が生じ易く、その摩耗粉が媒体やヘッ
ドを損傷させてしまうので、上述した問題に対する解決
策としては不十分である。Therefore, in the case of a metal thin film type medium or an oxide thin film type medium, it is conceivable to form a protective layer made of a hard material on the recording magnetic layer to protect it. As specific examples of the protective layer, thin films of silicon oxide, aluminum oxide, titanium nitride and the like have been conventionally proposed. However, these hard protective layers are fragile in material, and also easily wear due to contact with the magnetic head, and the abrasion powder damages the medium and the head, so it is not sufficient as a solution to the above-mentioned problems. Is.
この場合、保護層を厚く形成すれば少なくとも記録磁性
層の摩耗防止には有効と考えられるが、垂直磁気記録特
性の点から好ましくない。すなわち、垂直磁気記録方式
は本質的に記録密度が面内磁気記録方式よりもはるかに
高く、記録波長を短くできるのであるが、そのためには
ヘッド・媒体間の実効的な距離を極度に小さく抑える必
要があり、従って保護層の厚みも制限される。このよう
に保護層の厚さを垂直磁気記録特性を損わない程度に抑
えると、耐久性の向上効果はあまり期待できなくなる。In this case, a thick protective layer is considered to be effective in preventing at least the wear of the recording magnetic layer, but it is not preferable in terms of perpendicular magnetic recording characteristics. That is, the perpendicular magnetic recording method has a recording density much higher than that of the in-plane magnetic recording method, and the recording wavelength can be shortened. For that purpose, the effective distance between the head and the medium is extremely small. The thickness of the protective layer is therefore limited. If the thickness of the protective layer is suppressed to such an extent that the perpendicular magnetic recording characteristics are not impaired, the effect of improving durability cannot be expected so much.
この発明の目的は、垂直磁気記録特性を損うことなく、
媒体自身および媒体に接触して走行する磁気ヘッドの耐
久性を著しく高めることができる磁気記録媒体を提供す
ることにある。An object of the present invention is to maintain the perpendicular magnetic recording characteristics,
It is an object of the present invention to provide a magnetic recording medium that can remarkably enhance the durability of the medium itself and the magnetic head that travels in contact with the medium.
この発明に係る磁気記録媒体は、垂直磁気異方性を有す
る記録磁性層上に保護層として、厚さ５０〜４００オン
グストロームのシリコン，クロムおよび酸素を含む非晶
質薄膜（以下、Ｓｉ−Ｃｒ−Ｏ系非晶質薄膜という）を
形成したことを特徴としている。The magnetic recording medium according to the present invention has an amorphous thin film (hereinafter referred to as Si-Cr-) containing silicon, chromium and oxygen and having a thickness of 50 to 400 Å as a protective layer on the recording magnetic layer having perpendicular magnetic anisotropy. O-based amorphous thin film) is formed.
この発明によれば、Ｓｉ−Ｃｒ−Ｏ系非晶質薄膜を保護
層として形成したことにより、耐久性に優れ、しかも良
好な垂直磁気記録特性を持つ磁気記録媒体を得ることが
できる。According to the present invention, since the Si—Cr—O amorphous thin film is formed as the protective layer, it is possible to obtain a magnetic recording medium having excellent durability and good perpendicular magnetic recording characteristics.
すなわち、Ｓｉ−Ｃｒ−Ｏ系非晶質薄膜は非常に硬質で
あるため、記録磁性層を磁気ヘッドとの接触による損傷
から確実に保護することが可能である。しかも、Ｓｉ−
Ｃｒ−Ｏ系非晶質は酸化珪素，酸化アルミニウムあるい
は窒化チタン等の薄膜に比べ耐摩耗性が優れている。従
って、このＳｉ−Ｃｒ−Ｏ系非晶質薄膜上を磁気ヘッド
が連続走行しても摩耗粉の発生は非常に少なく、媒体自
身およびヘッドの摩耗・損傷は大幅に減少する。さら
に、Ｓｉ−Ｃｒ−Ｏ系非晶質薄膜は材質的に極めてち密
であり、また非晶質であるが故に粒界等の不均一性もな
いので、記録磁性層を外気から良く遮断し、耐腐蝕性を
著しく向上させる効果がある。そして、Ｓｉ−Ｃｒ−Ｏ
系非晶質薄膜は、さらに上述した耐摩耗性および耐腐蝕
性が良好であるという特徴から、その膜厚が比較的薄く
とも媒体および磁気ヘッドの耐久性を向上させることが
可能である。このため、前述のように摩耗粉の発生が少
なく摩耗粉による実効的な媒体・ヘッド間の実効的距離
の増大が少ないことと相まって、媒体・ヘッド間のスペ
ーシングロスを小さくでき、周波数特性の向上を図ると
ともに再生時の出力低下および出力変動を小さくし、垂
直磁気記録特性を飛躍的に高めることが可能となる。こ
こで、保護層であるＳｉ−Ｃｒ−Ｏ系非晶質薄膜の膜厚
は、５０〜４００オングストロームの範囲が好ましい。
膜厚が５０オングストロームに満たないと耐久性が十分
に得られず、また４００オングストロームを越えると上
述したスペーシングロスが大きくなり、垂直磁気記録特
性を損なうからである。すなわち、この発明によれば耐
久性と垂直磁気記録特性の両方を同時に満足する磁気記
録媒体を提供することができる。That is, since the Si—Cr—O amorphous thin film is extremely hard, it is possible to reliably protect the recording magnetic layer from damage due to contact with the magnetic head. Moreover, Si-
Cr-O type amorphous is superior in wear resistance to thin films of silicon oxide, aluminum oxide or titanium nitride. Therefore, even if the magnetic head continuously runs on this Si-Cr-O-based amorphous thin film, the generation of abrasion powder is very small, and the abrasion and damage of the medium itself and the head are greatly reduced. Furthermore, since the Si-Cr-O-based amorphous thin film is extremely dense in material and has no non-uniformity such as grain boundaries because it is amorphous, the recording magnetic layer is well shielded from the outside air, It has the effect of significantly improving the corrosion resistance. And Si-Cr-O
The amorphous amorphous thin film further has excellent wear resistance and corrosion resistance as described above. Therefore, even if the film thickness is relatively small, the durability of the medium and the magnetic head can be improved. Therefore, as described above, the generation of wear particles is small and the increase in the effective distance between the medium and the head due to the wear particles is small, and the spacing loss between the medium and the head can be reduced, and the frequency characteristic It is possible to improve the characteristics and reduce the output decrease and the output fluctuation during the reproduction, and it is possible to dramatically improve the perpendicular magnetic recording characteristics. Here, the thickness of the Si—Cr—O-based amorphous thin film that is the protective layer is preferably in the range of 50 to 400 angstrom.
This is because if the film thickness is less than 50 angstroms, sufficient durability cannot be obtained, and if it exceeds 400 angstroms, the spacing loss described above becomes large and the perpendicular magnetic recording characteristics are impaired. That is, according to the present invention, it is possible to provide a magnetic recording medium satisfying both durability and perpendicular magnetic recording characteristics at the same time.
第１図はこの発明の一実施例の磁気記録媒体を示す断面
図である。図において基体１は樹脂製のフィルム状基体
であり、この基体１の両面上に記録磁性層として例えば
直流マグネトロンスパッタリングにより厚さ０．５μｍ
のＣｏ−Ｃｒ系合金薄膜２がそれぞれ形成されている。
この Ｃｏ−Ｃｒ系合金薄膜２は膜面に垂直方向に磁化容易軸
を持つように配向されている。すなわち、Ｃｏ−Ｃｒ系
合金薄膜２は垂直磁気異方性を有している。そして、Ｃ
ｏ−Ｃｒ系合金薄膜２上に保護層として、５０〜４００
オングストロームの厚さのＳｉ−Ｃｒ−Ｏ系非晶質薄膜
３がそれぞれ形成されている。FIG. 1 is a sectional view showing a magnetic recording medium according to an embodiment of the present invention. In the figure, a substrate 1 is a resin film-shaped substrate, and a recording magnetic layer having a thickness of 0.5 μm is formed on both surfaces of the substrate 1 by, for example, DC magnetron sputtering.
Co-Cr alloy thin films 2 are formed respectively.
This Co—Cr alloy thin film 2 is oriented so that it has an easy axis of magnetization in the direction perpendicular to the film surface. That is, the Co—Cr alloy thin film 2 has perpendicular magnetic anisotropy. And C
As a protective layer on the o-Cr alloy thin film 2, 50 to 400
An Si-Cr-O-based amorphous thin film 3 having a thickness of angstrom is formed.
Ｓｉ−Ｃｒ−Ｏ系非晶質薄膜３は例えば ＳｉＯ２とＣｒ２Ｏ３の混合物のターゲットを用いた高
周波スパッタリングにより形成される。こうして形成さ
れたＳｉ−Ｃｒ−Ｏ系非晶質薄膜３はＣｏ−Ｃｒ系合金
薄膜２とのなじみ，密着性が良く、かつ非常に硬質で摩
耗しにくい。従って、フロッピーディスクのように磁気
ヘッドが媒体に連続的に接触して走行する場合でも、極
めて高い耐久性が得られる。Si-Cr-O-based amorphous thin film 3 is formed by high frequency sputtering using a target of, for example, a mixture of SiO 2 and Cr 2 O 3. The Si-Cr-O-based amorphous thin film 3 formed in this manner has good compatibility and adhesion with the Co-Cr-based alloy thin film 2, and is very hard and hard to wear. Therefore, even when the magnetic head continuously contacts the medium like a floppy disk and runs, extremely high durability can be obtained.
第１表はＣｏ−Ｃｒ系合金薄膜上に高周波スパッタリン
グにより種々の保護層を形成した磁気記録媒体につい
て、耐久性を調べた実験結果を示したものである。但
し、実験は上述した構成の磁気記録媒体をフロッピーデ
ィスクの形態に作製し、このディスクを毎分３００回転
で回転走行させながら、フェライト磁気ヘッドをディス
ク上の同一トラックに接触させて行なった。ここで、耐
久性は媒体（ディスク）およびヘッどの少なくとも一方
が著しい損傷を受けるまでの走行回数（パス）である。
著しい損傷とは媒体の場合、保護層および記録層の少な
くとも一部がけずれて、基体の表面が露出した状態をい
う。Table 1 shows the results of an experiment for examining the durability of magnetic recording media in which various protective layers were formed on a Co—Cr alloy thin film by high frequency sputtering. However, in the experiment, the magnetic recording medium having the above-mentioned structure was produced in the form of a floppy disk, and the ferrite magnetic head was brought into contact with the same track on the disk while the disk was rotated at 300 rpm. Here, the durability is the number of times of running (pass) until at least one of the medium (disk) and the head is significantly damaged.
In the case of a medium, the term “significant damage” refers to a state in which at least a part of the protective layer and the recording layer are displaced and the surface of the substrate is exposed.
第１表から明らかなように、この発明に基くＳｉ−Ｃｒ
−Ｏ系非晶質薄膜からなる保護層は従来より保護層とし
て提案されている酸化アルミニウム，炭化タングステ
ン，窒化ボロン，窒化チタン等の薄膜に比べ、より薄い
膜厚で耐久性において著しい向上がみられる。 As is clear from Table 1, Si-Cr based on the present invention
A protective layer made of an -O-based amorphous thin film has a thinner film and shows a marked improvement in durability as compared with a thin film of aluminum oxide, tungsten carbide, boron nitride, titanium nitride, etc. which has been conventionally proposed as a protective layer. To be
第２表に、保護層であるＳｉ−Ｃｒ−Ｏ系非晶質薄膜の
Ｓｉ，Ｃｒ，Ｏの各々の成分比（原子％）を種々変えた
場合の磁気記録媒体の耐久性について示す。但し、保護
層の厚さはいずれも１００オングストローム一定として
測定した。また、比較例としてＳｉ，Ｃｒ，Ｏのうち２
元素のみからなる非晶質薄膜を保護層とした場合の耐久
性についても併せて示した。 Table 2 shows the durability of the magnetic recording medium when various component ratios (atomic%) of Si, Cr, and O of the Si—Cr—O amorphous thin film that is the protective layer are variously changed. However, the thickness of each protective layer was measured at 100 angstroms. As a comparative example, 2 out of Si, Cr, and O are used.
The durability when an amorphous thin film made of only the element is used as the protective layer is also shown.
第２表から、Ｓｉが２０〜４０原子％、Ｃｒが１０〜３
０原子％、Ｏが３０〜７０原子％の組成範囲の場合に、
他の組成範囲に比べれより優れた耐久性を示すことが明
らかである。また、さらに好ましくはＳｉが２０〜３０
原子％、Ｃｒが１０〜２０原子％、Ｏが５０〜７０原子
％の組成範囲が特に優れた耐久性を示すことが分かる。From Table 2, Si is 20 to 40 atomic%, Cr is 10 to 3
When the composition range of 0 atomic% and O is 30 to 70 atomic%,
It is clear that it exhibits more excellent durability than other composition ranges. Moreover, Si is more preferably 20 to 30.
It can be seen that the composition range in which atomic%, Cr is 10 to 20 atomic% and O is 50 to 70 atomic% exhibits particularly excellent durability.
一方、Ｓｉ，Ｃｒ，Ｏのいずれか一つの元素のない２元
系の非晶質薄膜を保護層とした比較例６〜８の場合は、
これらの３元素を全て含有した本発明によるＳｉ−Ｃｒ
−Ｏ系非晶質薄膜からなる保護層の場合に比較して耐久
性が劣ってることが明らかであり、特にＯを含まない比
較例１のＳｉ−Ｃｒ系非晶質薄膜では、１００万パスと
いう低い耐久性しか得られないことが分かる。On the other hand, in the case of Comparative Examples 6 to 8 in which a binary amorphous thin film without any one element of Si, Cr and O is used as a protective layer,
Si-Cr according to the present invention containing all of these three elements
It is clear that the durability is inferior as compared with the case of the protective layer composed of an —O-based amorphous thin film, and particularly, in the Si—Cr-based amorphous thin film of Comparative Example 1 containing no O, 1 million passes It can be seen that only low durability is obtained.
以上の結果から、本発明によるＳｉ−Ｃｒ−Ｏ系非晶質
薄膜からなる保護層では、特にＯ（酸素）を含有してい
ることが耐久性向上に大きく寄与している。これは酸素
によってＳｉ−Ｃｒ−Ｏの原子間どうしの結合が網目状
に広がると共に、その密度が高くなるために、より強度
が増大することによると考えられる。From the above results, in the protective layer made of the Si—Cr—O type amorphous thin film according to the present invention, particularly containing O (oxygen) greatly contributes to the improvement of durability. It is considered that this is because the bond between Si—Cr—O atoms spreads like a mesh due to oxygen, and the density increases, so that the strength further increases.
また、Ｏを含有することによりＳｉやＣｒが酸化によっ
て非常に安定な状態となるために、Ｓｉ−Ｃｒ−Ｏ系非
晶質薄膜からなる保護層の下に形成されている記録磁性
層、特に金属薄膜の耐久性を向上させることができる。In addition, since Si and Cr become very stable due to oxidation by containing O, the recording magnetic layer formed below the protective layer made of the Si—Cr—O type amorphous thin film, particularly, The durability of the metal thin film can be improved.
また、上記実施例によれば記録磁性層が特にＣｏ−Ｃｒ
系合金薄膜２であり、この上に Ｓｉ−Ｃｒ−Ｏ系非晶質薄膜３が形成されている構造で
あるため、Ｃｏ−Ｃｒ系合金薄膜２中のＣｒ成分がＳｉ
−Ｃｒ−Ｏ系非晶質薄膜３との接着性向上に寄与するの
で、中間層を介在させることなくＳｉ−Ｃｒ−Ｏ系非晶
質薄膜３の良好な密着性を得ることができる。従って、
前述のようにＳｉ−Ｃｒ−Ｏ系非晶質薄膜３自体の膜厚
が薄くてよいことと相まって、媒体・ヘッド間の実効的
距離をより効果的に小さくできることになり、垂直磁気
記録においてもスペーシング・ロスが非常に小さく、良
好な記録再生特性が得られるという利点がある。Further, according to the above embodiment, the recording magnetic layer is particularly Co--Cr.
Since it is the system alloy thin film 2 and the Si-Cr-O system amorphous thin film 3 is formed on it, the Cr component in the Co-Cr system alloy thin film 2 is Si.
Since it contributes to the improvement of the adhesiveness with the -Cr-O-based amorphous thin film 3, good adhesion of the Si-Cr-O-based amorphous thin film 3 can be obtained without interposing an intermediate layer. Therefore,
As described above, in combination with the fact that the Si—Cr—O based amorphous thin film 3 itself may be thin, the effective distance between the medium and the head can be reduced more effectively, and also in perpendicular magnetic recording. The spacing loss is very small, and good recording / reproducing characteristics can be obtained.
第２図はこの発明の他の実施例の磁気記録媒体を示すも
ので、非磁性基体１１上に蒸着法により下地軟磁性層１
２と、記録磁性層としての Ｃｏ−Ｃｒ系合金薄膜１３が積層形成され、その上に保
護層としてＳｉ−Ｃｒ−Ｏ系非晶質薄膜１４がスパッタ
リングにより形成されている。下地軟磁性層１２は例え
ばパーマロイ薄膜， Ｃｏ−Ｚｒ系合金薄膜またはセンダスト合金薄膜等が使
用される。FIG. 2 shows a magnetic recording medium according to another embodiment of the present invention, in which a soft magnetic underlayer 1 is formed on a non-magnetic substrate 11 by an evaporation method.
2 and a Co—Cr based alloy thin film 13 serving as a recording magnetic layer are laminated and a Si—Cr—O based amorphous thin film 14 serving as a protective layer is formed thereon by sputtering. For the soft magnetic underlayer 12, for example, a permalloy thin film, a Co-Zr alloy thin film, a sendust alloy thin film, or the like is used.
このような構成の磁気記録媒体においても、前記実施例
で説明した磁気記録媒体と同様に優れた垂直磁気記録特
性と、高い耐久性が得られる。Also in the magnetic recording medium having such a structure, excellent perpendicular magnetic recording characteristics and high durability can be obtained as in the magnetic recording medium described in the above embodiment.
この発明は上記実施例に限定されるものではなく、その
要旨を逸脱しない範囲で種々変形実施することができ
る。例えば実施例では記録磁性層としてＣｏ−Ｃｒ系合
金薄膜を例示したが、垂直磁気異方性を有するものであ
れば、Ｃｏ−Ｃｒ系合金薄膜以外のものでもよく、また
このような金属薄膜に限らず酸化物薄膜でもよい。さら
に、実施例では基体の両面側に記録磁性層および保護層
が形成されている磁気記録媒体について述べたが、片面
にのみ形成されている媒体にも本発明を適用することが
できる。また、保護層としての Ｓｉ−Ｃｒ−Ｏ系非晶質薄膜上に潤滑層を形成してもよ
いことは勿論である。The present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the scope of the invention. For example, in the examples, a Co—Cr based alloy thin film was illustrated as the recording magnetic layer, but other than the Co—Cr based alloy thin film may be used as long as it has perpendicular magnetic anisotropy. Not limited to this, an oxide thin film may be used. Furthermore, in the examples, the magnetic recording medium in which the recording magnetic layer and the protective layer are formed on both sides of the substrate has been described, but the present invention can also be applied to a medium formed on only one side. Further, it goes without saying that a lubricating layer may be formed on the Si—Cr—O type amorphous thin film as a protective layer.
第１図はこの発明の一実施例に係る磁気記録媒体の断面
図、第２図はこの発明の他の実施例に係る磁気記録媒体
の断面図である。 １……樹脂製フィルム状基体、 ２，１３……Ｃｏ−Ｃｒ系合金薄膜、 ３，１４……Ｓｉ−Ｃｒ−Ｏ系非晶質薄膜、１１……非
磁性基体、１２……下地軟磁性層。FIG. 1 is a sectional view of a magnetic recording medium according to an embodiment of the present invention, and FIG. 2 is a sectional view of a magnetic recording medium according to another embodiment of the present invention. 1 ... Resin film substrate, 2, 13 ... Co-Cr alloy thin film, 3, 14 ... Si-Cr-O amorphous thin film, 11 ... Non-magnetic substrate, 12 ... Soft magnetic underlayer layer.
Claims (3)
た磁気記録媒体において、 前記記録磁性層上に、厚さ５０〜４００オングストロー
ムのシリコン、クロムおよび酸素を含む非晶質薄膜が形
成されていることを特徴とする磁気記録媒体。1. A magnetic recording medium having a recording magnetic layer having perpendicular magnetic anisotropy, wherein an amorphous thin film containing silicon, chromium and oxygen having a thickness of 50 to 400 angstrom is formed on the recording magnetic layer. A magnetic recording medium characterized by being provided.
ことを特徴とする特許請求の範囲第１項記載の磁気記録
媒体。2. The magnetic recording medium according to claim 1, wherein the recording magnetic layer is a Co—Cr alloy thin film.
ることを特徴とする特許請求の範囲第１項または第２項
記載の磁気記録媒体。3. The magnetic recording medium according to claim 1, wherein the magnetic recording medium is a floppy disk.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59253056A JPH0654538B2 (en) | 1984-11-30 | 1984-11-30 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59253056A JPH0654538B2 (en) | 1984-11-30 | 1984-11-30 | Magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61131223A JPS61131223A (en) | 1986-06-18 |
| JPH0654538B2 true JPH0654538B2 (en) | 1994-07-20 |
Family
ID=17245867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59253056A Expired - Lifetime JPH0654538B2 (en) | 1984-11-30 | 1984-11-30 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0654538B2 (en) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55101138A (en) * | 1979-01-25 | 1980-08-01 | Matsushita Electric Ind Co Ltd | Recording medium |
-
1984
- 1984-11-30 JP JP59253056A patent/JPH0654538B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61131223A (en) | 1986-06-18 |
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