JPH0645480B2 - Membrane formation method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention prevents formation of a film on the entire peripheral edge of a glass plate when forming a film on the surface of a glass plate cut into a required shape. The present invention relates to a method for forming a film that prevents a coating film from being formed on the back surface of a glass plate, and in particular, a transparent conductive film or the like is formed by a sputtering method while leaving the entire peripheral edge portion of the bent glass plate. The present invention provides a film forming means that is suitable for use in a vehicle, a laminated structure for vehicles, a laminated glass, and the like, and is suitable for providing a more functional glass plate.

In addition, a vapor deposition method, which is a film forming method other than the sputtering method, C
It can be widely applied to the VD method and the like.

[Conventional technology]

Conventionally, the rear window glass for vehicles has been widely used as having anti-fogging function or an antenna function, and as a means for applying it, a conductive paste is screen-printed on the glass surface to generate heat for terminals and heat generation. Although it is based on a method of baking by providing a linear portion or a method of embedding an ultrafine wire on the mating surface side of the laminated glass, recently, a windshield for a vehicle also has a heat ray reflecting function in addition to the above-mentioned anti-fog effect and the like. A laminated glass having a structure in which a multifunctional transparent conductive film such as a metal thin film that can be applied is provided on the glass surface on the mating surface side has been adopted. As a means for forming the transparent conductive film, a vapor deposition method, a CVD method, or the like, and a sputtering method in recent years is also used, and the transparent conductive film needs to be formed on the surface of the glass plate after bending in view of heat resistance. In terms of insulation from the vehicle body during use and adhesion and durability of the transparent conductive film, it is necessary to form a film by removing, for example, several mm from the peripheral portion, that is, the end surface of the glass plate.

On the other hand, in the case of building window glass, for example, it is possible to attach a film having a heat ray reflecting function to the glass surface facing the enclosed space of the double glazing, excluding the sealing portion.
[0079] Further, Japanese Patent Laid-Open No. 59-45947 or Japanese Utility Model Laid-Open No. 61-7539 discloses a heat-reflecting film such as a metal thin film or an electric current in a double-layer glass by a vapor deposition method or a sputtering method. It is described that, in forming the heating film, after forming the film coating on the surface of the entire glass plate, the film at the peripheral portion or the peripheral portion of the glass plate is removed by a means such as trimming to form a multilayer.

As described above, as a means for forming a film excluding the peripheral portion of the glass plate, conventionally, affixing of a masking tape only on the film forming side, removal after film formation, etc. have been usually used.

Furthermore, for example, as a carrier for forming a transparent conductive film or the like on a bent glass plate by a sputtering method, a bent glass having a masking tape attached on the peripheral edge of the upper surface is directly placed on a base, and a sputtering chamber is placed. It was supposed to be transported inside.

[Problems to be solved by the invention]

As described above, the work of attaching the masking tape to the required portion of each glass plate, or the work of removing only the required portion after film formation by trimming or the like is complicated, laborious, and inefficient. Also, when bending glass plates of various different shapes are placed directly on the base, the curvature of the glass and the base may not always match, and in some cases a coating is formed on the back side of the peripheral edge of the glass plate. However, there are some cases in which the quality is unfavorable.

Furthermore, the masking tape is disposable, which is uneconomical. Furthermore, in order to put the glass plate in the vacuum chamber, it is necessary to repeat the operation of vacuum and atmospheric pressure,
The bent glass plate or the like may be fluttered due to the turbulence of the air flow at the time of switching, and in some cases, it may be damaged.

[Means for solving problems]

The present invention has been made in view of the above-mentioned drawbacks of the related art, and a flexible belt-shaped glass plate support member having at least two slacks is provided on each of two corresponding sides from a frame member on four sides, The supporting member is moved in accordance with the size, shape, etc. of the glass plate, and the glass plate is placed on the supporting member so that the capped flexible member sufficiently contacts the peripheral edge of the glass plate. This provides a method for forming a film that can easily cover both the front and back sides of the peripheral edge portion and does not reliably form a film on the peripheral edge portion.

That is, according to the present invention, a detachable flexible member is fitted around the entire circumference of a glass plate having a desired shape, and the film is formed by placing it on a flexible glass plate supporting member of a carrier. The present invention provides a method for forming a film.

Here, the flexible member is preferably made of silicon rubber or fluororesin having a groove, but the flexibility,
A material having heat resistance, non-adhesiveness, chemical resistance, etc., that is, a material that exhibits little change in properties upon repeated sputtering or the like can be used.

It should be noted that it is possible to cover the lower portion of the flexible member by providing elasticity or by providing a similar member or shape such as providing a protruding portion even if there is a gap with the temporary glass supporting member. Further, it is preferable that the end portion of the upper surface of the flexible member is tapered so that the uneven thickness of the boundary portion of the film during film formation can be eliminated.

The glass plate support member may be made of stainless steel, aluminum, a fluororesin, or the like, as long as it has flexibility, heat resistance, and the like and can withstand repeated use such as a sputtering process, and is made of a thin strip and has four sides. At least two strips each having a slack are erected on the corresponding two sides from the frame member, and are attached so as to be movable depending on the size and shape of the glass plate, and the cap is attached to the entire peripheral edge of the glass plate. It is possible to make a sufficient contact with the flexible member, and the size of the portion where the peripheral edge of the glass plate overlaps with the glass plate supporting member is preferably about 10 mm. .

The slack of the belt-shaped body may be adjusted at any time by using an elastic member as the frame member and depending on the tension of the belt-shaped body, or by attaching an adjusting member to each belt-shaped body. Needless to say, a stopper or the like may be used for fixing the glass plate after setting.

Further, as a method for forming a film, a sputtering method is preferable, but a vapor deposition method, a CVD method, or the like can be used and any method can be applied.

〔Example〕

 An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view showing a state in which a glass plate 7 before being transferred into a sputtering device (not shown) is placed on the glass plate supporting members 6a, 6b, 6c, 6d of the transfer frame 1 ,
The carrier base 1 has leg members 4 arranged in a quadrilateral square at a required position of a base 2 having a cutout portion 3, and a frame member 5 is provided above the leg members 4 so as to be connected to each other. The glass plate supporting members 6a, 6b, 6c, 6d in the form of belts, which are movable by connecting two opposite sides of the four sides of the frame member 5, are installed in a slack state and attached to the central portion formed by the supporting members. , in which the flexible member 8, which is capped on the peripheral portion is placed on the glass plate 7 such that sufficient overlapping alignment contact, which shows the completed set, the transport frame 1 in this state The film was transferred into a sputtering apparatus, and a transparent conductive film such as a metal thin film and a metal oxide film, various multilayer films, and the like were formed on the entire upper surface of the glass plate 7 excluding the masked portion by a sputtering method.

As a result, except for the required portion of the peripheral edge portion of the glass plate, the boundary portion of the film has no obvious thickness unevenness, and the film can be uniformly formed on the entire surface, and the back surface of the glass plate is not coated with a stable film. The film could be formed. The cutout portion of the base is for detecting the glass plate.

FIG. 2 is a cross-sectional view taken along the line AA ′ in FIG. 1, in which the flexible member 8 is brought into close contact with the glass plate supporting members 6a, 6b, 6c, 6d and is aligned with the glass plate 7. It is sectional drawing which shows that it is made to match.

FIG. 3 shows the glass plate 7 after forming the transparent conductive film and before removing the flexible member 8 taken out from the sputtering apparatus.
FIG.

FIG. 4 is a partially enlarged cross-sectional view of the transparent conductive film formed by capping the flexible member 8 with the tapered portion 9 on the peripheral edge of the glass plate 7.

〔The invention's effect〕

As described above, according to the present invention, a flexible member capped around the entire circumference of the glass plate is provided with a margin in a slack state so that the glass plate has flexibility that can be applied to various shapes such as the curvature of the glass plate. Since the film is formed by contacting the glass plate support member of the thin film strip, the flexible member and the glass plate support member are well matched to each other even with various environmental changes in the sputtering process. Since it does not cause fluttering, there is no fluttering of the glass plate and the glass plate supporting member, there is no inconvenience that a sputtering film is formed up to the back surface of the glass plate, and the glass plate also has various sizes and shapes such as bent glass. It is not affected by the glass plate supporting member and is preferable in various points such as thermal or mechanical, and the film thickness is uniform even at the film boundary part at the peripheral edge of the glass plate. It is intended to achieve also.

Further, the efficiency of the masking work is remarkably improved, and the flexible member can be repeatedly used, which is extremely economical.

[Brief description of drawings]

The drawings show one embodiment of the present invention. FIG. 1 is a perspective view of a glass plate capped with a flexible member on the peripheral portion placed on a carrier frame, and FIG. 2 is A of FIG. -A 'is a cross-sectional view, FIG. 3 is a perspective view of a glass plate after film formation, and FIG. 4 is a partially enlarged cross-sectional view of a BB part of FIG. 1 ... Transport platform, 2 ... Base, 4 ... Leg members, 6a, 6b, 6
c, 6d ... Glass plate supporting member, 7 ... Glass plate, 8 ... Flexible member, 9 ... Tapered portion

Claims (1)

[Claims] 1. A film is formed by fitting a detachable flexible member on the entire circumference of a peripheral portion of a glass plate having a desired shape, and placing the flexible member on a flexible glass plate supporting member of a carrier. A method for forming a film, comprising: