JPH0643580U - Semiconductor test equipment - Google Patents

Abstract

(57) [Summary] [Purpose] Timing accuracy is improved by inserting a small inductance in series with the terminating resistor of the long coaxial cable that connects the pulse signal transmission side of the semiconductor test equipment and the pulse signal reception side. Provided is a semiconductor test device which prevents deterioration and malfunction. A pulse signal transmission side 10 including an ECL gate array 11 and a pulse signal reception side 20 similarly including an ECL gate array 21 are provided, and the pulse signal transmission side 10 and the pulse signal reception side 20 are included. Is connected via a long coaxial cable 30 having a characteristic impedance of 50Ω and a total length of several meters, and a repetition frequency of 50
In a semiconductor test device that transmits a pulse signal of the order of 0 MH, the end of the long coaxial cable 30 is terminated with a terminating resistor 22 and a minute inductance 2 equal to the characteristic impedance.
A semiconductor test device grounded by a circuit in which 3 and 3 are connected in series.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a semiconductor test device, and more particularly to a semiconductor test device in which a pulse signal transmitting side and a pulse signal receiving side are connected by a long coaxial cable.

[0002]

[Prior art]

 A conventional example will be described with reference to FIG. In FIG. 3A, 10 is a pulse signal transmitting side of the semiconductor test equipment, and 20 is a pulse signal receiving side thereof. A long coaxial cable 30 connects the pulse signal transmitting side 10 and the pulse signal receiving side 20 and transmits the pulse signal generated at the pulse signal transmitting side 10 to the receiving side 20. 22 is a terminating resistance equal to the characteristic impedance of the long coaxial cable 30.

The pulse signal transmitting side 10 comprises an emitter-coupled logic gate array (ECL gate array) 11 and a pulse signal generator 12, and the pulse signal generated by the pulse signal generator 12 is processed by the ECL gate array 11. The result is sent out to the long coaxial cable 30. The pulse signal receiving side 20 is also composed of an ECL gate array 21, and its input end is grounded by a terminating resistor 22. The long coaxial cable 30 has a characteristic impedance of 50Ω and a total length of about 5 m. The pulse signal to be transmitted is assumed to be a pulse signal having a repetition frequency of 500 MH and of the order of nanoseconds.

[0004]

[Problems to be solved by the device]

 As described above, the pulse test signal transmission side 10 including the ECL gate array and the pulse signal reception side 20 including the ECL gate array are connected via the long coaxial cable 30 of about 5 m, and the semiconductor test equipment When a pulse signal is transmitted from the pulse signal transmitting side 10 to the pulse signal receiving side 20 of the above, the pulse signal is a point a waveform shown in Fig. 3 (b) at the point a of the long coaxial cable 30 which is the starting point of the transmission. However, at the point b of the long coaxial cable 30 which is the end point of the transmission, it is attenuated like the waveform of the point b shown in FIG. 3 (b), and at this point b, the signal level is insufficient and rises. This causes deterioration of the rising characteristics. Such lack of signal level and deterioration of rising characteristics cause deterioration of timing accuracy and malfunction of semiconductor test equipment.

According to the present invention, a small inductance is inserted in series to a terminating resistor 22 of a long coaxial cable 30 that connects a pulse signal transmitting side 10 and a pulse signal receiving side 20 of a semiconductor test apparatus. The present invention provides a semiconductor test apparatus that solves the above-mentioned problems.

[0006]

[Means for Solving the Problems]

 A pulse signal pulse signal transmission side 10 composed of an ECL gate array 11 is provided, and a pulse signal reception side 20 similarly composed of an ECL gate array 21 is provided, and a pulse signal transmission side 10 and a pulse signal reception side 20 are provided. The end of the long coaxial cable 30 is used in a semiconductor test apparatus that transmits a pulse signal of the order of 500 MH by repeatedly connecting the two through a long coaxial cable 30 having a characteristic impedance of 50 Ω and a total length of several meters. A semiconductor test device in which a terminal resistance 22 having a characteristic impedance and a minute inductance 23 are connected in series is grounded.

[0007]

【Example】

 An embodiment of this invention will be described with reference to FIG. FIG. 1A is almost the same as FIG. 3A. That is, the pulse signal transmitting side 10 of the semiconductor test equipment is composed of the ECL gate array 11 and the pulse signal generator 12, and the pulse signal generated by the pulse signal generator 12 is processed by the ECL gate array 11 and is long. It is sent out to the shaku coaxial cable 30. The long coaxial cable 30 has a characteristic impedance of 50Ω and a total length of about 5 m. Reference numeral 20 indicates the pulse signal receiving side, which also comprises an ECL gate array 21, the input end of which is grounded by a terminating resistor 22. 22 is a terminal resistance equal to the characteristic impedance of the long coaxial cable 30. The pulse signal to be transmitted is assumed to be a pulse signal having a repetition frequency of 500 MH and of the order of nanoseconds.

Here, 23 is a minute inductance according to the present invention inserted in series with the terminating resistor 22 of the long coaxial cable 30. According to the present invention, in the semiconductor test device in which the minute inductance 23 is inserted in series with the terminating resistor 22 of the long coaxial cable 30, the waveform and the end point at the point a, which is the start point of the pulse signal transmission of the long coaxial cable 30, are shown. The waveform at point b is as shown in FIG. 1 (b).

In FIG. 1B, the waveform at point a, which is the starting point of transmission of the pulse signal, is precisely shaped and the pulse signal waveform has a sufficient level. First, when the minute inductance 23 is short-circuited and this is not inserted in series with the terminal resistance 22 of the long coaxial cable 3, the waveform at the point b, which is the end point of the pulse signal transmission, is shown in FIG. The waveform is as shown in 3). This is a result of being attenuated by the long coaxial cable 30 during transmission through the long coaxial cable 30, and the rising characteristics are deteriorated and the level itself is insufficient.

Next, when the minute inductance 23 is inserted in series with the terminating resistor 22 of the long coaxial cable 30, the waveform at the end point b of the long coaxial cable 30, which is the end point of the transmission of the pulse signal, is shown in FIG. ), The waveform is shown in (2). Compared with the waveform shown in (3) of Fig. 1 (b) when the inductance 23 is not inserted, the long coaxial cable 30 causes less attenuation, and the rising characteristics and level are improved, which is satisfactory. Therefore, it is possible to prevent deterioration of timing accuracy and malfunction in the semiconductor test equipment.

As a mode of inserting the inductance 23 in series with the terminating resistor 22, a plurality of terminating resistors 22 in which the minute inductance 23 is inserted in series can be provided as shown in FIG. Further, in this case, it is possible to reduce the attenuation by connecting a resistor in parallel with the minute inductance 23 and adjusting the Q of the inductance.

[0012]

[Effect of device]

 When transmitting signals by connecting long high-frequency electronic circuits with a long coaxial cable, it is common practice to connect a matching impedance to the cable end to prevent attenuation and deterioration of the transmitted signal waveform. . However, although such a general theory is known, as described above in the semiconductor test apparatus, the pulse signal transmitting side 10 is composed of the ECL gate array, and the pulse signal receiving side 20 is also composed of the ECL gate array. When connecting the two via a long coaxial cable 30 having a characteristic impedance of 50Ω and a total length of about 5 m to transmit a pulse signal with a repetition frequency of 500 MH, the end of the long coaxial cable 30 is Even if it is grounded by the terminating resistor 22 having the same characteristic impedance, the attenuation of the pulse signal and the deterioration of the rising characteristic cannot be satisfactorily reduced. Therefore, it is possible to prevent the deterioration of the timing accuracy and the malfunction of the semiconductor test apparatus. I couldn't do that, and I had a hard time dealing with it. However, this invention was able to sufficiently reduce the deterioration of the attenuation and rising characteristics by connecting a small inductor in series with the terminating resistor. As a result, the deterioration of the timing accuracy and the malfunction of the semiconductor test apparatus as described above have been prevented.

[Brief description of drawings]

FIG. 1 is a diagram for explaining an embodiment of this invention.

FIG. 2 is a diagram for explaining another embodiment of the present invention.

FIG. 3 is a diagram illustrating a conventional example.

[Explanation of symbols]

 10 pulse signal transmitting side 11 ECL gate array 20 pulse signal receiving side 21 ECL gate array 22 terminating resistor 23 micro inductance 30 long coaxial cable

Claims (1)

[Scope of utility model registration request] 1. A pulse signal transmitting side configured by an ECL gate array, and a pulse signal receiving side similarly configured by an ECL gate array are provided, and a pulse signal transmitting side and a pulse signal receiving side are provided. In a semiconductor tester that transmits a pulse signal with a characteristic impedance of 50Ω and a total length of several meters through a long coaxial cable and a repetition frequency of 500 MH, the end of the long coaxial cable is equal to the characteristic impedance. A semiconductor test apparatus characterized by being grounded by a circuit in which a resistance and a minute inductance are connected in series.