JPH0638313Y2 - Transfer device for continuous vacuum furnace - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a transfer device for transferring an object to be processed used in a continuous vacuum furnace.

[Conventional technology]

Generally, a roller hearth type vacuum furnace is often used as a continuous type vacuum furnace for heating an object to be processed in a vacuum state. And in this roller hearth type vacuum furnace, since the furnace temperature is often high temperature exceeding 1200 ° C,
A roller made of heat-resistant metal cannot provide strength and durability as a roller for transporting the processed material, and a water-cooled roller for circulating cooling water in a metal cylindrical roller is used.

However, since this water-cooling roller draws heat from the inside of the furnace, the water-cooling loss is large, and running costs such as electricity cost of the heating device are high, and the end of each roll is passed through the sealing device to the outside of the furnace to supply and drain cooling water. Since it is necessary to project and mount the rotary joint, there is a problem that the equipment is complicated and the inspection cost of a large number of sealing points is increased. Furthermore, in order to prevent uneven heating of the work under the influence of the cold water-cooling roll, and to prevent deformation due to the decrease in the hot strength of the roller, lift the work from below to raise it above the water-cooling roller. It is necessary to provide a lifter to hold the
The lifter has a cylinder for raising and lowering protruding downward from the furnace body, so that the whole height of the furnace is large, a large installation space is required in the vertical direction, and there are various problems such as increased equipment cost.

[Problems to be solved by the device]

The present invention solves the above-mentioned conventional problems. For a continuous vacuum furnace, the cooling loss is small, the operating cost is reduced, the installation space is small because no lifter is required, and the equipment cost is low. It is intended to provide a carrier device.

[Means for Solving the Problems]

Therefore, the continuous vacuum furnace transfer device of the present invention is a continuous vacuum furnace in which a heating chamber surrounded by a heat insulating wall and having a heating device is provided in the furnace body. A fixed beam is attached to the upper end of a fixed beam supporting column that penetrates the wall, a moving base and a drive mechanism for walking the moving base are provided below the bottom heat insulating wall, and an opening is provided in the bottom heat insulating wall. A seal plate for closing the section is slidably attached in the furnace length direction, and a movable beam support column having a base fixed to the movable table is slidably inserted in a hole provided in the seal plate in the vertical direction. A movable beam is attached to the upper end of the movable beam support column.

In the present invention, the walking motion of the movable table includes not only a normal rectangular motion of ascending-advancing-descending-retracting but also a curved motion such as a circular or elliptical shape.

[Action]

In the transport apparatus of the present invention, the workpiece is intermittently transported forward by the fixed beam and the movable beam that performs the walking movement. The vacuum heat treatment is performed with the object to be processed placed on the fixed beam. Unlike the hearth roller, each beam has a simple shape and few dimensional restrictions,
Since it is made of a heat-resistant material such as graphite or ceramics and water cooling can be omitted, there is no water cooling loss and the heating unevenness of the object to be treated is small. In addition, the seal plate provided in the opening of the bottom heat insulating wall closes the opening to prevent the moving table and its drive mechanism from being exposed to high temperature due to the radiant heat from the heating chamber, and also reduces heat loss and heat. Efficiently heat up the room.

〔Example〕

An embodiment of the present invention will be described below with reference to FIGS. 1 and 2.

In the figure, reference numeral 1 is a furnace body, and the inside of the furnace body 1 is divided into a front chamber 4, a vacuum chamber 5 and a cooling chamber 6 by partition walls 2 and 3, and the inside of the vacuum chamber 5 is a heat insulating wall made of graphite. 2 heating chambers surrounded by 7 8,9
Is provided, and the front chamber 4 is also provided with a similar heating chamber 10. Door 11a of the outlet of the heating chamber 10 and door 1 of the inlet of the heating chamber 8
1b, an exit door 11c of the heating chamber 8 and an entrance door 11d of the heating chamber 9,
The door 11e at the exit of the heating chamber 9 and the opening / closing device 12
Is driven to open and close. The opening / closing device 12 is a frame body that is vertically guided by a guide (not shown) fixed to the furnace body 1.
Each door 11 (generic name of the doors 11a to 11e) is connected to 13 via a parallel link 14, and the frame body 13 is moved up and down by a piston rod of an air cylinder 15 attached to the top of the furnace. After the lower end of the door 11 comes into contact with a stopper (not shown), the frame 13 is further lowered so that each door 11 is heated in each heating chamber 8
It is pressed against the end walls of ~ 10 to close each opening, and the frame 13
When the door 11 is pulled up, the door 11 is separated from each opening and drawn toward the frame body 13 side, and then is lifted upward while being suspended from the frame body 13. Reference numeral 16 is a heating device including an electric heater provided in each heating chamber 8-10.

On the other hand, 20 is a transfer device for transferring the processing object 19 in the heating chamber 8, which is a walking beam type transfer device having a fixed beam 21 and a movable beam 22. Reference numeral 23 denotes a fixed beam supporting column that penetrates the bottom heat insulating wall 7a that is the heat insulating wall 7 forming the bottom wall surface, the base portion of which is fixed to the lower side wall of the furnace body 1, and the fixed beam 21 is attached to the upper end thereof. Also the bottom insulation wall
7a is provided with an elongated hole-shaped opening 24 extending in the furnace length direction,
The movable beam 22 is attached to the upper end of a movable beam support column 25 penetrating the opening 24, and the base is attached to a moving table 26. Fixed beam 21, movable beam 22, fixed beam support column 23 that supports these, movable beam support column 25
Is made of graphite (some or all may be made of ceramic). A block 27 is fixed to the lower surface of the moving table 26, and a disc cam 28 is rotatably fitted in the block 27. Reference numeral 29 denotes a drive shaft rotatably supported by the furnace body 1 by a bearing 30, and the disc cam 28 is fixed to the middle portion of the drive shaft with its center eccentric. One end of the drive shaft penetrates the furnace body 1. It projects to the outside and is connected to the output shaft of a motor 31, which is a prime mover. 32 is a sealing device for vacuum reeling the furnace body penetrating portion of the drive shaft 29. On the other hand, the bottom heat insulating wall 7a has an opening
A seal plate 33 that closes the 24 is slidably supported in the furnace length direction by a guide 34, and a movable beam support column 25 is vertically slidable in a hole 35 formed in the seal plate 33. Is fitted to. A movable beam 36 for receiving an object to be processed at the time of transfer between the heating chambers is attached to the upper end of the movable beam support column 25 located between the heating chambers 8 and 9 provided on the movable table 26. Further, 37 and 38 are transfer devices for transferring the objects to be processed in the heating chambers 9 and 10, which have the same configuration as the transfer device 20. , Its detailed description is omitted. Further cooling room 6
However, since the heat insulating wall 7 does not exist, the seal plate 33 is not provided and the other points are the same as those of the carrier device 20.

In the continuous vacuum furnace 40 having the above configuration, the heating chamber of the front chamber 4
The object to be treated 19 which has been subjected to heat treatment such as preheating or dewaxing in 10 is sequentially heated in a vacuum state in the heating chambers 8 and 9, and then cooled in the cooling chamber 6. A transfer device for transferring the object to be processed 19 from the heating chamber 10 to the heating chamber 8.
When transferring 38 and 20 from the heating chamber 8 to the heating chamber 9, the transfer devices 20 and 37 are operated, and when transferring from the heating chamber 9 to the cooling chamber 6, the transfer devices 37 and 39 are operated. The object to be processed 19 is transported. Also, the object to be processed 19
The heating is performed by lowering the movable beam 22 as shown in the figure and placing the object 19 to be processed on the fixed beam 21. During heating, the fixed beam 21 and the movable beam 22 are heated to the same temperature as the object to be processed, but since they are made of graphite and are in a vacuum atmosphere, the object to be processed is not deformed or worn.
19 can be supported and transported, and since it is not water-cooled, uneven heating is less likely to occur in the object to be treated 19. Further, the seal plate 33 closes the opening 24 to block the radiant heat from the heating chamber having a temperature higher than 1000 ° C., and the moving table 26, the block 27, the disc cam 28, and the drive arranged below the bottom heat insulating wall 7a. Prevents drive mechanisms such as shaft 29 and bearing 30 from being exposed to high temperatures. The movable beam 22 and the fixed beam 21 can be used when the workpiece 19 is made up of small parts that tend to fall over.
In the case where the problem of the transfer at the time of delivery becomes a problem, the operation pattern of the motor 31 may be set so that the speed at the time of delivery is low.

The present invention is not limited to the above-described embodiment. For example, the movable beams 22 of the heating chambers 8 and 9 may be attached to a common movable table 26 so that they can be simultaneously driven. As the drive mechanism, in addition to the electric one using the above-mentioned disc cam, an inclined rail system or roller in which a fluid pressure cylinder horizontally drives the moving table 26 and another fluid pressure cylinder vertically drives the moving table 26 is used. A drive system other than the above, such as a lever system, may be used.

[Effect of device]

As described above, according to the present invention, since the object to be processed is carried by the walking beam type carrying device and the heating process is carried out with the object to be processed placed on the fixed beam, the water-cooled roller is used. Compared to the roller hearth type vacuum furnace that uses, the water cooling loss is eliminated, the operating cost is reduced, and the lifter is not required, so the vertical space for installing the furnace is small and the equipment cost is low. Further, compared to the roller hearth type, which requires a vacuum seal device for the furnace body penetrating portion for each roller, the number of vacuum seal devices is small and the inspection cost is low.

[Brief description of drawings]

FIG. 1 is a partial vertical sectional view of a continuous vacuum furnace showing an embodiment of the present invention, and FIG. 2 is a sectional view taken along the line AA of FIG. 1 ... Furnace body, 7 ... Insulation wall, 7a ... Bottom insulation wall, 8 ... Heating chamber,
9 ... Heating chamber, 10 ... Heating chamber, 16 ... Heating device, 20 ... Conveying device, 21 ... Fixed beam, 22 ... Movable beam, 23 ... Fixed beam supporting column, 24 ... Opening part, 25 ... Movable beam supporting column, 26 ... Movable table, 27 ... Block, 28 ... Disc cam, 29 ... Drive shaft, 30 ... Bearing, 33 ... Seal plate, 34 ... Guide, 35 ... Hole, 37 ... Conveyor, 38 ... Conveyor, 40 ... Continuous vacuum Furnace.

Claims (1)

[Scope of utility model registration request] 1. In a continuous vacuum furnace in which a heating chamber surrounded by a heat insulating wall and having a heating device inside is provided in a furnace body, a fixed beam supporting column having a base fixed to the furnace body and penetrating a bottom heat insulating wall is provided. A fixed beam is attached to the upper end, a moving table and a drive mechanism for walking the moving table are provided below the bottom heat insulating wall, an opening is provided in the bottom heat insulating wall, and a seal plate for closing the opening is installed in the furnace length. Mounted slidably in any direction,
A movable beam support column having a base fixed to the movable table is slidably inserted vertically into a hole provided in the seal plate,
A transfer device for a continuous vacuum furnace, wherein a movable beam is attached to an upper end of the movable beam support column.