JPH06350258A - Production of printed wiring board - Google Patents
Production of printed wiring boardInfo
- Publication number
- JPH06350258A JPH06350258A JP5223329A JP22332993A JPH06350258A JP H06350258 A JPH06350258 A JP H06350258A JP 5223329 A JP5223329 A JP 5223329A JP 22332993 A JP22332993 A JP 22332993A JP H06350258 A JPH06350258 A JP H06350258A
- Authority
- JP
- Japan
- Prior art keywords
- wiring board
- printed wiring
- synthetic resin
- conductor
- sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 26
- 239000004020 conductor Substances 0.000 claims abstract description 50
- 229920003002 synthetic resin Polymers 0.000 claims abstract description 38
- 239000000057 synthetic resin Substances 0.000 claims abstract description 38
- 238000000034 method Methods 0.000 claims abstract description 33
- 238000010030 laminating Methods 0.000 claims abstract 2
- 239000000758 substrate Substances 0.000 claims description 23
- 239000002184 metal Substances 0.000 claims description 17
- 229910052751 metal Inorganic materials 0.000 claims description 17
- 238000005530 etching Methods 0.000 claims description 16
- 229920005989 resin Polymers 0.000 claims description 16
- 239000011347 resin Substances 0.000 claims description 16
- 230000000149 penetrating effect Effects 0.000 claims description 11
- 239000011888 foil Substances 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000003786 synthesis reaction Methods 0.000 claims 1
- 230000008569 process Effects 0.000 abstract description 10
- 238000003825 pressing Methods 0.000 abstract description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 43
- 239000010410 layer Substances 0.000 description 39
- 229910052802 copper Inorganic materials 0.000 description 22
- 239000010949 copper Substances 0.000 description 22
- 239000011889 copper foil Substances 0.000 description 21
- 238000007747 plating Methods 0.000 description 16
- 239000009719 polyimide resin Substances 0.000 description 12
- 229920001721 polyimide Polymers 0.000 description 11
- 230000007547 defect Effects 0.000 description 10
- 229910000679 solder Inorganic materials 0.000 description 8
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 6
- 238000007654 immersion Methods 0.000 description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 5
- 238000005553 drilling Methods 0.000 description 4
- 239000004744 fabric Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 238000000059 patterning Methods 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 229960003280 cupric chloride Drugs 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229920002492 poly(sulfone) Polymers 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000007731 hot pressing Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- 229920005668 polycarbonate resin Polymers 0.000 description 2
- 239000004431 polycarbonate resin Substances 0.000 description 2
- 229920001225 polyester resin Polymers 0.000 description 2
- 239000004645 polyester resin Substances 0.000 description 2
- 229920005992 thermoplastic resin Polymers 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 1
- XQUPVDVFXZDTLT-UHFFFAOYSA-N 1-[4-[[4-(2,5-dioxopyrrol-1-yl)phenyl]methyl]phenyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C(C=C1)=CC=C1CC1=CC=C(N2C(C=CC2=O)=O)C=C1 XQUPVDVFXZDTLT-UHFFFAOYSA-N 0.000 description 1
- 229920001342 Bakelite® Polymers 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 244000043261 Hevea brasiliensis Species 0.000 description 1
- 239000004640 Melamine resin Substances 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 239000005062 Polybutadiene Substances 0.000 description 1
- 239000004697 Polyetherimide Substances 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229920013629 Torelina Polymers 0.000 description 1
- 239000004742 Torelina™ Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000004637 bakelite Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 229920005549 butyl rubber Polymers 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hcl hcl Chemical compound Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 229920006015 heat resistant resin Polymers 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 239000011256 inorganic filler Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920003052 natural elastomer Polymers 0.000 description 1
- 229920001194 natural rubber Polymers 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000012766 organic filler Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229920006287 phenoxy resin Polymers 0.000 description 1
- 239000013034 phenoxy resin Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920003192 poly(bis maleimide) Polymers 0.000 description 1
- 229920001084 poly(chloroprene) Polymers 0.000 description 1
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 1
- 229920002857 polybutadiene Polymers 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 229920001601 polyetherimide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000012779 reinforcing material Substances 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920002994 synthetic fiber Polymers 0.000 description 1
- 239000012209 synthetic fiber Substances 0.000 description 1
- 229920006259 thermoplastic polyimide Polymers 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
Landscapes
- Production Of Multi-Layered Print Wiring Board (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は印刷配線板の製造方法に
係り、特に配線層間を貫通型の導体配線部で接続する構
成を備え、かつ高密度な配線および実装が可能な信頼性
の高い印刷配線板を、工数の低減を図りながら、歩留ま
り良好に製造し得る方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a printed wiring board, and more particularly, it has a structure in which wiring layers are connected by a through-type conductor wiring portion, and high-density wiring and mounting are highly reliable. The present invention relates to a method capable of manufacturing a printed wiring board with a good yield while reducing the number of steps.
【0002】[0002]
【従来の技術】たとえば両面型印刷配線板もしくは多層
型印刷配線板においては、両面導電パターンなどの配線
層間の電気的な接続を、次のようにして行っている。た
とえば両面方印刷配線板の場合は、両面銅箔張り基板の
所定位置に穴明け加工(穿設加工)を施し、穿設した穴
の内壁面を含め、全面に化学メッキ処理を施してから、
電気メッキ処理で厚付けし、穴の内壁面の金属層を厚く
して信頼性を高め、配線層間の電気的な接続を行ってい
る。また、多層印刷配線板の場合は、基板両面に張られ
た銅箔をそれぞれパターニングした後、そのパターニン
グ面上に絶縁シート(たとえばプリプレグ)を介して銅
箔を積層・配置し、加熱加圧により一体化した後、前述
の両面型印刷配線板のときと同様に、穴明け加工および
メッキ処理による配線層間の電気的な接続、表面銅箔に
ついてのパターニングにより多層型印刷配線板を得てい
る。なお、より配線層の多い多層型印刷配線板の場合
は、中間に介挿させる両面型印刷配線板数を増やす方式
で製造できる。2. Description of the Related Art For example, in a double-sided printed wiring board or a multi-layered printed wiring board, electrical connection between wiring layers such as double-sided conductive patterns is made as follows. For example, in the case of a double-sided printed wiring board, perforation processing (perforation processing) is performed at a predetermined position on the double-sided copper foil-clad board, and chemical plating is performed on the entire surface, including the inner wall surface of the perforated hole,
The metal layer on the inner wall surface of the hole is thickened by electroplating to improve reliability and electrically connect the wiring layers. Also, in the case of a multilayer printed wiring board, after patterning the copper foils stretched on both sides of the substrate respectively, stacking and arranging the copper foils on the patterned surfaces via an insulating sheet (eg prepreg), and applying heat and pressure. After the integration, as in the case of the double-sided printed wiring board described above, a multilayer printed wiring board is obtained by electrical connection between wiring layers by punching and plating, and patterning of the surface copper foil. In the case of a multilayer printed wiring board having more wiring layers, it can be manufactured by a method of increasing the number of double-sided printed wiring boards inserted in the middle.
【0003】前記印刷配線板の製造方法において、配線
層間の電気的な接続をメッキ方法によらず行う方法とし
て、両面銅箔張り基板の所定位置に穴明けし、この穴内
に導電性ペーストを印刷法などにより流し込み、穴内に
流し込んだ導電性ペーストの樹脂分を硬化させて、配線
層間を電気的に接続する方法も行われている。In the method of manufacturing a printed wiring board, as a method of electrically connecting wiring layers without using a plating method, a hole is made at a predetermined position on a double-sided copper foil-clad substrate, and a conductive paste is printed in the hole. There is also a method in which the resin component of the conductive paste poured into the holes is cured by a method or the like to electrically connect the wiring layers.
【0004】[0004]
【発明が解決しようとする課題】上記で説明したよう
に、配線層間の電気的な接続にメッキ法を利用する印刷
配線板の製造方法においては、基板に配線層間の電気的
な接続用の穴明け(穿穴)加工、穿設した穴内壁面を含
めたメッキ処理工程などを要し、印刷配線板の製造工程
が冗長であるとともに、工程管理も繁雑であるという欠
点がある。一方、配線層間の電気的な接続用の穴に、導
電性ペーストを印刷などにより埋め込む方法の場合も、
前記メッキ法の場合と同様に穴明け工程を必要とする。
しかも、穿設した穴内に、均一(一様)に導体性ペース
トを流し込み埋め込むことが難しく、電気的な接続の信
頼性に問題があった。いずれにしても、前記穴明け工程
などを要することは、印刷配線板のコストや歩留まりな
どに反映し、低コスト化などへの要望に対応し得ないと
いう欠点がある。また、前記配線層間の電気的な接続構
成の場合は、印刷配線板の表裏面に、配線層間接続用の
導電体穴が設置されているため、その導電体穴の領域に
配線を形成・配置し得ないし、さらに電子部品を搭載す
ることもできないので、配線密度の向上が制約されると
ともに、電子部品の実装密度向上も阻害されるという問
題がある。つまり、従来の製造方法によって得られる印
刷配線板は、高密度配線や高密度実装による回路装置の
コンパクト化、ひいては電子機器類の小形化などの要望
に、十分応え得るものといえず、前記コスト面を含め、
実用的により有効な印刷配線板の製造方法が望まれてい
る。本発明は上記事情に対処してなされたもので、簡易
なプロセスで、より高密度の配線および実装が可能で、
信頼性の高い印刷配線板を歩留まりよく製造し得る方法
の提供を目的とする。As described above, in a method of manufacturing a printed wiring board that uses a plating method for electrical connection between wiring layers, holes for electrical connection between wiring layers are formed in a substrate. It has the disadvantages that it requires a drilling (drilling) process, a plating process including the inner wall surface of the drilled hole, the manufacturing process of the printed wiring board is redundant, and the process control is complicated. On the other hand, in the case of embedding a conductive paste in the holes for electrical connection between wiring layers by printing,
As in the case of the plating method, a drilling process is required.
Moreover, it is difficult to evenly (uniformly) pour and embed the conductive paste into the bored holes, and there is a problem in reliability of electrical connection. In any case, the need for the perforating step is reflected in the cost and yield of the printed wiring board, and there is a drawback that it cannot meet the demand for cost reduction. Further, in the case of the electrical connection configuration between the wiring layers, since conductor holes for connecting wiring layers are provided on the front and back surfaces of the printed wiring board, the wiring is formed and arranged in the area of the conductor holes. This is not possible, and since electronic parts cannot be mounted, there is a problem that improvement in wiring density is restricted and improvement in mounting density of electronic parts is also hindered. In other words, the printed wiring board obtained by the conventional manufacturing method cannot fully meet the demand for compact circuit devices by high-density wiring and high-density mounting, and further miniaturization of electronic devices. Including faces
A practically more effective method for producing a printed wiring board is desired. The present invention has been made in consideration of the above circumstances, and enables high-density wiring and mounting with a simple process,
An object of the present invention is to provide a method capable of manufacturing a highly reliable printed wiring board with high yield.
【0005】[0005]
【課題を解決するための手段】本発明に係る第1の印刷
配線板の製造方法は、所定位置に導体バンプ群を形設し
た支持基体の主面に、合成樹脂系シート主面を対接させ
て積層配置する工程と、前記積層体を加圧し、前記合成
樹脂系シートの厚さ方向に、前記バンプ群をそれぞれ貫
挿させて貫通型の導体配線部を形成する工程とを具備し
て成ることを特徴とし、さらに本発明に係る第2の印刷
配線板の製造方法は、所定位置に導体バンプ群を形設し
た導電性金属箔の主面に、合成樹脂系シート主面を対接
させて積層配置する工程と、前記積層体を加圧し、前記
合成樹脂系シートの厚さ方向に、前記バンプ群をそれぞ
れ貫挿させて貫通型の導体配線部を形成する工程と、前
記貫通型の導体配線部を形成した積層体の導電性金属箔
に、エッチング処理を施して、前記貫通型の導体配線部
に接続する配線パターンを形成する工程とを具備して成
ることを特徴とする。According to a first method for manufacturing a printed wiring board of the present invention, a main surface of a synthetic resin sheet is brought into contact with a main surface of a supporting substrate having conductor bump groups formed at predetermined positions. And a step of stacking and arranging them, and a step of pressurizing the laminated body to form a through-type conductor wiring part by respectively inserting the bump groups in the thickness direction of the synthetic resin sheet. The second method for producing a printed wiring board according to the present invention is characterized in that the main surface of the conductive metal foil having conductor bump groups formed at predetermined positions is contacted with the main surface of the synthetic resin sheet. And a step of arranging them in a stacked manner, a step of pressurizing the laminated body to form a through-type conductor wiring part by respectively inserting the bump groups in the thickness direction of the synthetic resin sheet, and the through-type The conductive metal foil of the laminated body on which the conductor wiring part of Subjected to, characterized in that formed by a step of forming a wiring pattern connected to the conductor wiring portion of the transmembrane.
【0006】本発明において、導体バンプ群を形設した
支持基体としては、たとえば剥離性の良好な合成樹脂シ
ート類,もしくは導電性シート(箔)などが挙げられ、
この支持基体は1枚のシートであってもよいし、パター
ン化されたものでもよく、その形状はとくに限定されな
いし、さらに導体バンプ群は、一方の主面だけでなく、
両主面にそれぞれ形設した形のものを用いてもよい。In the present invention, examples of the supporting substrate on which the conductor bump group is formed include synthetic resin sheets having good peelability, or conductive sheets (foil),
The supporting substrate may be a single sheet or may be patterned, and its shape is not particularly limited, and the conductor bump group is not limited to one main surface,
You may use the thing formed in each main surface respectively.
【0007】ここで、前記導体バンプは、たとえば銀,
金,銅,半田粉などの導電性粉末、これらの合金粉末も
しくは複合(混合)金属粉末と、たとえばポリカーボネ
ート樹脂,ポリスルホン樹脂,ポリエステル樹脂,フェ
ノキシ樹脂,フェノール樹脂,ポリイミド樹脂などのバ
インダー成分とを混合して調製された導電性組成物、あ
るいは導電性金属などで構成される。そして、前記バン
プ群の形設は、導電性組成物で形成する場合、たとえば
比較的厚いメタルマスクを用いた印刷法により、アスペ
クト比の高いバンプを形成でき、そのバンプ群の高さは
一般的に、 100〜 400μm 程度が望ましく、さらにバン
プ群の高さは一層の合成樹脂系シートを貫通し得る高さ
および複数層の合成樹脂系シートを貫通し得る高さとが
適宜混在していてもよい。Here, the conductor bump is, for example, silver,
Conductive powder such as gold, copper, solder powder, alloy powder or composite (mixed) metal powder of these, and binder component such as polycarbonate resin, polysulfone resin, polyester resin, phenoxy resin, phenol resin, polyimide resin, etc. are mixed. It is composed of a conductive composition prepared by the above or a conductive metal. When the bump group is formed of a conductive composition, a bump having a high aspect ratio can be formed by, for example, a printing method using a relatively thick metal mask. In addition, it is preferable that the height of the bump group is 100 to 400 μm, and the height of the bump group that can penetrate one layer of the synthetic resin sheet and the height that can penetrate the plurality of layers of the synthetic resin sheet may be appropriately mixed. .
【0008】一方、導電性金属でバンプ群を形成する手
段としては、 (a)ある程度形状もしくは寸法が一定な微
小金属魂を、粘着剤層を予め設けておいた支持基体面に
散布し、選択的に固着させるか(このときマスクを配置
して行ってもよい)、 (b)銅箔などを支持基体とした場
合は、メッキレジストを印刷・パターニングして、銅,
錫,金,銀,半田などメッキして選択的に微小な金属柱
(バンプ)群の形成、(c)支持基体面に半田レジストの
塗布・パターニングして、半田浴に浸漬して選択的に微
小な金属柱(バンプ)群の形成などが挙げられる。ここ
で、バンプに相当する微小金属魂ない微小な金属柱は、
異種金属を組合わせて成る多層構造、多層シェル構造で
もよい。たとえば銅を芯にし表面を金や銀の層で被覆し
て耐酸化性を付与したり、銅を芯にし表面を半田層被覆
して半田接合性をもたせたりしてもよい。なお、本発明
において、バンプ群を導電性組成物で形成する場合は、
メッキ法などの手段で行う場合に較べて、さらに工程な
ど簡略化し得るので、低コスト化の点で有効である。On the other hand, as means for forming a bump group with a conductive metal, (a) fine metal particles having a certain shape or size are dispersed on the surface of a supporting substrate provided with an adhesive layer in advance and selected. Or (b) if copper foil or the like is used as the supporting substrate, the plating resist is printed and patterned to form copper,
Tin, gold, silver, solder, etc. are plated to selectively form minute metal pillars (bumps), (c) Solder resist is applied / patterned on the supporting substrate surface, and then immersed in a solder bath to selectively For example, formation of minute metal pillars (bumps) can be mentioned. Here, a small metal pillar without a small metal soul corresponding to a bump is
A multi-layer structure or a multi-layer shell structure formed by combining different metals may be used. For example, copper may be used as a core and the surface may be coated with a gold or silver layer to impart oxidation resistance, or copper may be used as a core and the surface may be coated with a solder layer so as to have solder bondability. In the present invention, when the bump group is formed of a conductive composition,
Compared with the case of using a plating method or the like, the process can be further simplified, which is effective in terms of cost reduction.
【0009】本発明において、前記導体バンプ群が貫挿
され、貫通型の導体配線部を形成する合成樹脂系シート
としては、たとえば熱可塑性樹脂フイルム(シート)が
挙げられ、またその厚さは50〜 800μm 程度が好まし
い。ここで、熱可塑性樹脂シートとしては、たとえばポ
リカーボネート樹脂,ポリスルホン樹脂,熱可塑性ポリ
イミド樹脂,4フッ化ポリエチレン樹脂,6フッ化ポリ
プロピレン樹脂,ポリエーテルエーテルケトン樹脂など
のシート類が挙げられる。また、硬化前状態に保持され
る熱硬化性樹脂シートとしては、エポキシ樹脂,ビスマ
レイミドトリアジン樹脂,ポリイミド樹脂,フェノール
樹脂,ポリエステル樹脂,メラミン樹脂,あるいはブタ
ジェンゴム,ブチルゴム,天然ゴム,ネオプレンゴム,
シリコーンゴムなどの生ゴムのシート類が挙げられる。
これら合成樹脂は、単独でもよいが絶縁性無機物や有機
物系の充填物を含有してもよく、さらにガラスクロスや
マット、有機合成繊維布やマット、あるいは紙などの補
強材と組み合わせて成るシートであってもよい。In the present invention, examples of the synthetic resin sheet for penetrating the conductor bump group to form the through-hole type conductor wiring portion include a thermoplastic resin film (sheet) and have a thickness of 50. It is preferably about 800 μm. Here, examples of the thermoplastic resin sheet include sheets of polycarbonate resin, polysulfone resin, thermoplastic polyimide resin, tetrafluoropolyethylene resin, hexafluoropolypropylene resin, polyetheretherketone resin, and the like. Further, as the thermosetting resin sheet which is kept in the pre-curing state, epoxy resin, bismaleimide triazine resin, polyimide resin, phenol resin, polyester resin, melamine resin, butadiene rubber, butyl rubber, natural rubber, neoprene rubber,
Examples include raw rubber sheets such as silicone rubber.
These synthetic resins may be used alone or may contain an insulating inorganic or organic filler, and are a sheet formed by combining with a reinforcing material such as glass cloth or mat, organic synthetic fiber cloth or mat, or paper. It may be.
【0010】さらに、本発明において、バンプ群を形設
した支持基体などの主面に、合成樹脂系シート主面を対
接させて積層配置して成る積層体をそのままもしくは加
熱して加圧するとき、合成樹脂系シートを載置する基台
(当て板)としては、寸法や変形の少ない金属板もしく
は耐熱性樹脂板、たとえばステンレス板,真鍮板、ポリ
イミド樹脂板(シート),ポリテトラフロロエチレン樹
脂板(シート)などが使用される。この積層体の加圧に
当たり、加熱して合成樹脂系シートの樹脂分が柔らかく
なった状態で加圧し、バンプ群を貫挿させると、より良
好なバンプ群の貫挿を達成し得る。Further, according to the present invention, when a laminated body in which a synthetic resin sheet main surface is placed in contact with a main surface of a support base or the like on which a bump group is formed is laminated or is heated and pressed. As a base (patch plate) on which a synthetic resin sheet is placed, a metal plate or a heat-resistant resin plate with little size or deformation, for example, a stainless plate, a brass plate, a polyimide resin plate (sheet), a polytetrafluoroethylene resin Plates (sheets) are used. When the laminated body is pressed, when the resin group of the synthetic resin sheet is heated to be softened, and the bump group is inserted, better insertion of the bump group can be achieved.
【0011】[0011]
【作用】本発明に係る印刷配線板の製造方法によれば、
配線層間を電気的に接続する層間の導体配線部は、いわ
ゆる積層一体化する工程での加熱・加圧により、層間絶
縁層を成す合成樹脂系シートの可塑状態化と、支持基体
面の導体バンプ群の圧入とによって、確実に信頼性の高
い配線層間の電気的な接続が達成される。つまり、プロ
セスの簡易化を図りながら、微細な配線パターン層間を
任意な位置(箇所)で、高精度にかつ信頼性の高い電気
的な接続を形成し得るので、配線密度の高い印刷配線板
を低コストで製造することが可能となり、また前記配線
パターン層間の電気的な接続に当たり、接続穴の形設も
不要となるので、その分高密度配線および高密度実装の
可能な印刷配線板が得られることになる。According to the method of manufacturing a printed wiring board according to the present invention,
The conductor wiring portions between the wiring layers that electrically connect the wiring layers are made into a plastic state of the synthetic resin sheet forming the interlayer insulating layer by heating and pressing in the so-called laminated integration process, and the conductor bumps on the surface of the supporting substrate. The press-fitting of the group ensures reliable electrical connection between the wiring layers. In other words, while simplifying the process, it is possible to form highly accurate and reliable electrical connections between fine wiring pattern layers at arbitrary positions (locations), so that a printed wiring board with a high wiring density can be formed. It is possible to manufacture at low cost, and it is not necessary to form a connection hole for electrical connection between the wiring pattern layers, so that a printed wiring board capable of high density wiring and high density mounting can be obtained. Will be done.
【0012】[0012]
【実施例】以下図1 (a) (b),図2 (a) (b),図3 (a)
(b),図4 (a) (b)および図5(a) (b)をそれぞれ参照
して本発明の実施例を説明する。EXAMPLES Examples 1 (a) and (b), FIGS. 2 (a) and (b), and FIG. 3 (a)
An embodiment of the present invention will be described with reference to FIGS. 4 (b), 4 (a) and 4 (b) and FIGS. 5 (a) and 5 (b).
【0013】実施例1 図1 (a) (b)および図2 (a) (b)は本実施例の実施態様
を模式的に示したものである。先ず、厚さ50μm のポリ
イミド樹脂フィルム(商品名,カプトンフィルム,製造
元:東レKK)を支持基体シート1として、ポリマータ
イプの銀系の導電性ペースト(商品名,熱硬化性導電性
ペーストDW-250H-5 ,製造元:東洋紡績KK)として、
また板厚の 200μm のステンレス板の所定箇所に 0.4mm
径の穴を明けたメタルマスクを用意した。そして、前記
ポリイミド樹脂フィルム1面に、前記メタルマスクを位
置決め配置して導電性ペーストを印刷し、この印刷され
た導電性ペーストが乾燥後、同一マスクを用い同一位置
に再度印刷する方法で3回印刷を繰り返し、高さ 200μ
m 弱の山形のパンブ2を形成(形設)した。図1 (a)
は、こうして形設された導電性バンプ2の形状を側面的
に示したものである。一方、厚さ 100μm のポリエーテ
ルイミド樹脂フィルム(商品名,スミライトFS-1400,
製造元:住友ベークライトKK)をとして用意し、図2
(a)に断面的に示すごとく、前記合成樹脂シート3上
に、前記形設した導電性のバンプ2を対向させて支持基
体シート1を位置決め配置して積層体化した。その後、
前記合成樹脂シート3裏面に、前記支持シート1と同一
種類のポリイミド樹脂フィルムを当て板4として積層・
配置し、樹脂圧として 1 MPaで加圧しそのまま取りだ
し、表裏のシート1,4を剥離したところ、図2 (b)に
断面的に示すごとく、前記導電性のバンプ2がそのまま
形で、合成樹脂シート3中にに圧入し、図1 (b)に側面
的に示すごとく、裏面シート4に対接して面で先端が潰
された形になった同一平面を成して合成樹脂シート3厚
さ方向に貫通する導体配線部5を備えた印刷配線板が得
られた。前記形成した貫通型の導体配線部5について、
テスターで各導体配線部5を表裏面から導通テストした
ところ、全数が0.01Ω以下の抵抗であった。Example 1 FIGS. 1 (a) and (b) and FIGS. 2 (a) and 2 (b) schematically show an embodiment of this example. First, a 50 μm thick polyimide resin film (trade name, Kapton film, manufacturer: Toray KK) is used as a supporting substrate sheet 1, and a polymer type silver-based conductive paste (trade name, thermosetting conductive paste DW-250H -5, Manufacturer: Toyobo KK)
In addition, 0.4 mm is placed at a specified location on a 200 μm thick stainless steel plate.
A metal mask with a diameter hole was prepared. Then, the metal mask is positioned and arranged on the surface of the polyimide resin film to print a conductive paste, and after the printed conductive paste is dried, it is printed again at the same position using the same mask three times. Repeated printing, height 200μ
Formed (shaped) a little m-shaped pumb 2 Figure 1 (a)
Shows a side view of the shape of the conductive bump 2 thus formed. On the other hand, a 100 μm thick polyetherimide resin film (trade name, Sumilite FS-1400,
Manufacturer: Sumitomo Bakelite KK) is prepared as
As shown in a sectional view in (a), the supporting substrate sheet 1 was positioned and arranged on the synthetic resin sheet 3 with the formed conductive bumps 2 facing each other to form a laminated body. afterwards,
On the back surface of the synthetic resin sheet 3, a polyimide resin film of the same type as the support sheet 1 is laminated as a backing plate 4.
After arranging it, the resin pressure of 1 MPa was applied and the sheet was taken out as it was, and the front and back sheets 1 and 4 were peeled off. As shown in the sectional view of FIG. As shown in a side view in FIG. 1 (b), the sheet 3 is press-fitted into the sheet 3 and is in contact with the back sheet 4 to form the same plane in which the tip is crushed to form a synthetic resin sheet 3 A printed wiring board having a conductor wiring portion 5 penetrating in the direction was obtained. Regarding the formed through-type conductor wiring portion 5,
When a continuity test was conducted on each conductor wiring part 5 from the front and back surfaces with a tester, the total number was 0.01 Ω or less.
【0014】実施例2 図3 (a) (b)は本実施例の実施態様を模式的に示す断面
図である。本実施例は、上記実施例1の場合において、
支持基体シート1としてポリイミド樹脂フイルムの代わ
りに、通常、印刷配線板の製造に使用されている厚さ35
μm の電解銅箔1′を用いる一方、裏面シート(当て
板)4として同様に厚さ35μm の電解銅箔4′を用いた
以外は、実施例1の場合と同様に、図3 (a)に示すごと
く、積層配置して、またこの積層体につき 270℃, 1 M
Paを作用させてプレス加工を行い、図3 (b)に示すごと
く、両銅箔1′,4′間が貫通型に接続された導体配線
部5を有する両面銅張板を作成した。この両面銅張板の
両面に、通常のエッチングレジストインク(商品名,PS
R-4000 H,製造元:太陽インキKK)をスクリーン印刷
し、導体パターン部をマスクしてから、塩化第2銅をエ
ッチング液としてエッチング処理後、レジストマスク剥
離して、両面印刷配線板を得た。こうして製造した両面
型印刷配線板について、通常実施されている電気チェッ
クを行ったところ、全ての接続に不良ないし信頼性など
の問題が認められなかった。Example 2 FIGS. 3 (a) and 3 (b) are sectional views schematically showing an embodiment of this example. The present embodiment is the same as the above first embodiment except that
Instead of the polyimide resin film as the supporting base sheet 1, a thickness of 35 which is usually used in the production of printed wiring boards is used.
As in Example 1, except that the electrolytic copper foil 1 ′ having a thickness of 35 μm was used as the back sheet (patch plate) 4 while the electrolytic copper foil 1 ′ having a thickness of 3 μm was used. As shown in Fig.2, the layers are arranged in layers, and this layered body is 270 ℃, 1 M
Pressing was performed under the action of Pa to prepare a double-sided copper clad plate having a conductor wiring portion 5 in which the two copper foils 1 ′ and 4 ′ were connected in a penetrating manner as shown in FIG. 3 (b). Normal etching resist ink (trade name, PS
R-4000 H, manufacturer: Taiyo Ink KK) was screen-printed to mask the conductor pattern portion, and after the etching treatment using cupric chloride as an etching solution, the resist mask was peeled off to obtain a double-sided printed wiring board. . When the thus-produced double-sided printed wiring board was subjected to an electrical check that is usually carried out, no problems such as defects or reliability were found in all connections.
【0015】実施例3 本実施例は、上記実施例1の場合において、支持基体シ
ート1としてポリイミド樹脂フイルムの代わりに、通
常、印刷配線板の製造に使用されている厚さ35μm の電
解銅箔1′を、裏面シート(当て板)4として同様に厚
さ35μm の電解銅箔4′をそれぞれ用いる一方、合成樹
脂系シート3としてガラスクロスにエポキシ樹脂を含浸
被着して成る厚さ 200μm のプリプレグを用い、前記図
3 (a)に示すごとく、積層配置して、またこの積層体に
つき以下のような条件でプレス加工を行い、図3 (b)に
示すごとく、両銅箔1′,4′間が貫通型に接続された
導体配線部5を有する両面銅張板を作成した。前記プレ
ス加工は、積層体をセットしてから、加熱を始め 120℃
に達した時点で、 2 MPaの樹脂圧を作用させ、この状態
でさらに加熱し 170℃に達した時点で 1時間そのまま保
持してから冷却させた後、取り出す方式で行った。Example 3 In this example, instead of the polyimide resin film as the supporting substrate sheet 1 in the case of Example 1 above, an electrolytic copper foil having a thickness of 35 μm, which is usually used in the production of printed wiring boards, is used. 1'is also used as a back sheet (patch plate) 4 in the same manner as an electrolytic copper foil 4'having a thickness of 35 μm, while a synthetic resin sheet 3 having a thickness of 200 μm formed by impregnating glass cloth impregnated with epoxy resin. Using a prepreg, as shown in FIG. 3 (a), the laminates are arranged, and the laminate is pressed under the following conditions. As shown in FIG. 3 (b), both copper foils 1 ', A double-sided copper clad plate having a conductor wiring portion 5 connected between 4'in a penetrating manner was prepared. In the press processing, after setting the laminated body, start heating and 120 ° C
At that time, a resin pressure of 2 MPa was applied, and further heating was performed in this state, and when it reached 170 ° C, it was held for 1 hour, cooled, and then taken out.
【0016】この両面銅張板の両面に、通常のエッチン
グレジストインク(商品名,PSR-4000 H,製造元:太陽
インキKK)をスクリーン印刷し、導体パターン部をマ
スクしてから、塩化第2銅をエッチング液としてエッチ
ング処理後、レジストマスク剥離して、両面印刷配線板
を得た。こうして製造した両面型印刷配線板について、
通常実施されている電気チェックを行ったところ、全て
の接続に不良ないし信頼性などの問題が認められなかっ
た。また、前記両面導電パターン間の接続の信頼性を評
価するため、ホットオイルテストで( 260℃のオイル中
に10秒浸漬,20℃のオイル中に20秒浸漬のサイクルを 1
サイクルとして)、 500回行っても不良発生は認められ
ず、従来の銅メッキ法による場合に比較して、導電(配
線)パターン層間の接続信頼性が格段にすぐれていた。A normal etching resist ink (trade name, PSR-4000 H, manufacturer: Taiyo Ink KK) is screen-printed on both sides of this double-sided copper clad board, the conductor pattern portion is masked, and then cupric chloride After the etching treatment with the above as an etching solution, the resist mask was peeled off to obtain a double-sided printed wiring board. Regarding the double-sided printed wiring board manufactured in this way,
When the electrical check that was normally performed was performed, no problems such as defects or reliability were found in all the connections. In addition, in order to evaluate the reliability of the connection between the double-sided conductive patterns, a hot oil test (a cycle of immersion in oil at 260 ° C for 10 seconds and immersion in oil at 20 ° C for 20 seconds 1
As a cycle), no defect was observed even after 500 times, and the connection reliability between the conductive (wiring) pattern layers was remarkably excellent as compared with the case of the conventional copper plating method.
【0017】実施例4 図4 (a) (b)は本実施例の実施態様を模式的に示す断面
図である。本実施例においては、 PPS樹脂シート(商品
名,トレリナ3000,製造元:東レKK)をガラスクロス
に含浸して成る厚さ 120μm の合成樹脂系シート3を作
成し、この合成樹脂系シート3の両主面に、平均粒径 1
μm の銀粉およびポリスルホン樹脂からなる導体ペース
トを、 300メッシュのステンレススクリーンを用いて印
刷し、所要の導体パターン6を形成した後、前記導体パ
ターン6の所要箇所に、 180メッシュのステンレススク
リーンを用いて 0.4mm角,高さ80μm のバンプ2をそれ
ぞれ形設した。Embodiment 4 FIGS. 4 (a) and 4 (b) are sectional views schematically showing an embodiment of this embodiment. In this example, a PPS resin sheet (trade name, Torelina 3000, manufacturer: Toray KK) is impregnated into a glass cloth to form a synthetic resin sheet 3 having a thickness of 120 μm. Average grain size on the main surface 1
After printing the conductor paste consisting of μm silver powder and polysulfone resin using a 300 mesh stainless screen to form the required conductor pattern 6, a 180 mesh stainless screen is used at the required location of the conductor pattern 6. Bumps 2 of 0.4 mm square and 80 μm in height were formed respectively.
【0018】前記両面にそれぞれ層間接続用の導電性の
バンプ2を形設した合成樹脂系シート3を、図4 (a)に
示すごとく、ポリイミド樹脂フイルム1で挟む形に積層
配置し、この積層体を 295℃に設定した温度でプレス加
工を行い、その後ポリイミド樹脂フイルム1を剥離する
ことにより、図4 (b)に示すごとく、両面の導体パター
ン6間が貫通型に接続された導体配線部5を有する両面
型印刷配線板を作成した。なお、この実施例の場合にお
いては、導体パターン6の導電性バンプ2が形設される
予定部(領域)を一部切除などしておき、導電性突起2
を合成樹脂系シート3に対して圧入し易くしておくのが
好ましい。As shown in FIG. 4 (a), synthetic resin sheets 3 each having conductive bumps 2 for interlayer connection formed on both sides thereof are laminated and sandwiched between polyimide resin films 1, and this laminated The body is pressed at a temperature set to 295 ° C, and then the polyimide resin film 1 is peeled off, as shown in Fig. 4 (b), and the conductor wiring part in which the conductor patterns 6 on both sides are connected in a through type. A double-sided printed wiring board having No. 5 was prepared. In the case of this embodiment, a portion (area) of the conductor pattern 6 where the conductive bumps 2 are to be formed is partially cut off, and the conductive protrusions 2 are formed.
It is preferable to make it easy to press into the synthetic resin sheet 3.
【0019】こうして製造した両面型印刷配線板につい
て、通常実施されている電気チェックを行ったところ、
全ての接続に不良ないし信頼性などの問題が認められな
かった。The double-sided printed wiring board thus manufactured was subjected to an electrical check, which is usually carried out.
No problems were found in all connections, such as defects or reliability.
【0020】実施例5 図5 (a) (b)は本実施例の実施態様を模式的に示す断面
図である。Example 5 FIGS. 5 (a) and 5 (b) are sectional views schematically showing an embodiment of this example.
【0021】上記実施例3の場合と同様にして作成した
両面配線板を、図5 (a)に示すごとく、実施例3で使用
したものと同種の、厚さ 100μm のガラスクロス含浸エ
ポキシ樹脂プリプレグ 2枚で挟む形に積層・配置し、さ
らに、実施例3で使用したものと同種の導電性バンプ2
が形設された銅箔1′で挟むようにそれぞれ配置・積層
した。この積層体について、実施例3の場合と同様の条
件で熱プレス加工・処理を施して、内層の導電性パター
ン同士、および内層の導電性パターンが表面の銅箔1′
に貫通型に接続する両面銅箔張り基板を作成した。As shown in FIG. 5 (a), a double-sided wiring board prepared in the same manner as in the above-mentioned Example 3 was used, as shown in FIG. 5 (a), of the same kind as that used in Example 3, with a glass cloth-impregnated epoxy resin prepreg of 100 μm in thickness. The conductive bumps 2 of the same type as those used in Example 3 are stacked and arranged so as to be sandwiched between two pieces.
Were placed and laminated so as to be sandwiched between the copper foils 1 ′ formed with. This laminated body was subjected to hot press working / treatment under the same conditions as in Example 3, and the inner layers of the conductive patterns and the inner layer of the conductive patterns had copper foils 1'on the surface.
A double-sided copper foil-clad substrate to be connected in a through type was prepared.
【0022】次いで、この両面銅張板の両面に、通常の
エッチングレジストインク(商品名,PSR-4000 H,製造
元:太陽インキKK)をスクリーン印刷し、導体パター
ン部をマスクしてから、塩化第2銅をエッチング液とし
てエッチング処理後、レジストマスク剥離して、両面印
刷配線板を得た。こうして製造した4層印刷配線板につ
いて、通常実施されている電気チェックを行ったとこ
ろ、全ての接続に不良ないし信頼性などの問題が認めら
れなかった。また、前記両面導電パターン間の接続の信
頼性を評価するため、ホットオイルテストで( 260℃の
オイル中に10秒浸漬,20℃のオイル中に20秒浸漬のサイ
クルを 1サイクルとして)、 500回行っても不良発生は
認められず、従来の銅メッキ法による場合に比較して、
導電(配線)パターン間の接続信頼性が格段にすぐれて
いた。Next, a normal etching resist ink (trade name, PSR-4000 H, manufacturer: Taiyo Ink KK) is screen-printed on both sides of this double-sided copper clad board to mask the conductor pattern portion and then chloride After the etching treatment using 2 copper as an etching solution, the resist mask was peeled off to obtain a double-sided printed wiring board. When the thus-produced four-layer printed wiring board was subjected to a usual electrical check, no problems such as defects or reliability were found in all the connections. Moreover, in order to evaluate the reliability of the connection between the double-sided conductive patterns, a hot oil test was conducted (a cycle of immersion in oil at 260 ° C for 10 seconds and immersion in oil at 20 ° C for 20 seconds as one cycle). No defect was found even after repeated use. Compared with the conventional copper plating method,
The connection reliability between the conductive (wiring) patterns was remarkably excellent.
【0023】実施例6 図6 (a) (b)は本実施例の実施態様を模式的に示す断面
図である。Example 6 FIGS. 6 (a) and 6 (b) are sectional views schematically showing an embodiment of this example.
【0024】支持基体シートとして、予め所要の構造
(形状)に加工した導体パターンの少なくとも一方の面
に、高さがほぼ倍の比で異なる導電性バンプ2が形設さ
れた銅箔6′,6″、実施例3で使用したものと同種の
厚さ 100μm のプリプレグ3、厚さ35μm の電解銅箔
1′、裏面シート(当て板)4として同様に厚さ35μm
の電解銅箔4′をそれぞれ用意し、図6 (a)に示すごと
く積層・配置した。この積層体について、実施例3の場
合と同様の条件で熱プレス加工・処理を施して、内層の
導電性パターン6′同士、および内層の導電性パターン
6′が表面の銅箔1′に貫通型に接続する両面銅箔張り
基板を作成した。As a supporting base sheet, a copper foil 6 ', in which conductive bumps 2 having different heights are formed on at least one surface of a conductor pattern which has been processed into a required structure (shape) in advance, are formed. 6 ″, a prepreg 3 of the same kind as used in Example 3 and having a thickness of 100 μm, an electrolytic copper foil 1 ′ having a thickness of 35 μm, and a back sheet (patch plate) 4 similarly having a thickness of 35 μm
Each of the electrolytic copper foils 4'was prepared and laminated and arranged as shown in FIG. 6 (a). This laminated body is subjected to hot press working / treatment under the same conditions as in Example 3 so that the inner layer conductive patterns 6 ′ and the inner layer conductive pattern 6 ′ penetrate the copper foil 1 ′ on the surface. A double-sided copper foil-clad substrate to be connected to the mold was created.
【0025】次いで、この両面銅張板の両面に、通常の
エッチングレジストインク(商品名,PSR-4000 H,製造
元:太陽インキKK)をスクリーン印刷し、導体パター
ン部をマスクしてから、塩化第2銅をエッチング液とし
てエッチング処理後、レジストマスク剥離して、両面印
刷配線板を得た。こうして製造した4層印刷配線板につ
いて、通常実施されている電気チェックを行ったとこ
ろ、全ての接続に不良ないし信頼性などの問題が認めら
れなかった。また、前記両面導電パターン間の接続の信
頼性を評価するため、ホットオイルテストで( 260℃の
オイル中に10秒浸漬,20℃のオイル中に20秒浸漬のサイ
クルを 1サイクルとして)、 500回行っても不良発生は
認められず、従来の銅メッキ法による場合に比較して、
導電(配線)パターン間の接続信頼性が格段にすぐれて
いた。Next, a normal etching resist ink (trade name, PSR-4000 H, manufacturer: Taiyo Ink KK) is screen-printed on both sides of the double-sided copper clad board to mask the conductor pattern portion, and then chloride chloride After the etching treatment using 2 copper as an etching solution, the resist mask was peeled off to obtain a double-sided printed wiring board. When the thus-produced four-layer printed wiring board was subjected to a usual electrical check, no problems such as defects or reliability were found in all the connections. Moreover, in order to evaluate the reliability of the connection between the double-sided conductive patterns, a hot oil test was conducted (a cycle of immersion in oil at 260 ° C for 10 seconds and immersion in oil at 20 ° C for 20 seconds as one cycle). No defect was found even after repeated use. Compared with the conventional copper plating method,
The connection reliability between the conductive (wiring) patterns was remarkably excellent.
【0026】なお、本発明は上記実施例に限定されるも
のでなく、本発明の趣旨を逸脱しない範囲で、いろいろ
の変形を採り得る。The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the present invention.
【0027】実施例7 上記実施例2において、バンプ群の構成を代えた他は、
基本的に同様な工程で印刷配線板の製造例であり、した
がって図3 (a) (b)に模式的に示すの実施態様例を参照
して説明する。本実施例は、支持基体シート1としてポ
リイミド樹脂フイルムの代わりに、通常、印刷配線板の
製造に使用されている厚さ35μm の電解銅箔1′を用
い、この銅箔1′の粗化面側にメッキレジストを印刷
し、所定位置(箇所)に径 0.3mmの露出面群を残すパタ
ーニングを行った後、銅メッキ処理を施して、前記露出
面領域に高さ約 100μm の銅層上に、高さ約10μm のニ
ッケル層を重ねて全体として約 110μm の導体バンプ群
を形成した。前記バンプ群をメッキ法で形成した銅箔
1′を用いるる一方、裏面シート(当て板)4として同
様に厚さ35μm の電解銅箔4′を用いた以外は、実施例
1の場合と同様に、図3 (a)に示すごとく、積層配置し
て、またこの積層体につき同様の条件でプレス加工を行
い、図3 (b)に示すごとく、両銅箔1′,4′間が貫通
型に接続された導体配線部5を有する両面銅張板を作成
した。この両面銅張板の両面に、通常のエッチングレジ
ストインク(商品名,PSR-4000 H,製造元:太陽インキ
KK)をスクリーン印刷し、導体パターン部をマスクし
てから、塩化第2銅をエッチング液としてエッチング処
理後、レジストマスク剥離して、両面印刷配線板を得
た。こうして製造した両面型印刷配線板について、通常
実施されている電気チェックを行ったところ、全ての接
続に不良ないし信頼性などの問題が認められなかった。Example 7 In the above Example 2, except that the configuration of the bump group was changed,
This is an example of manufacturing a printed wiring board by basically the same steps, and therefore, an explanation will be given with reference to an example of an embodiment schematically shown in FIGS. In this example, instead of the polyimide resin film as the supporting substrate sheet 1, an electrolytic copper foil 1'having a thickness of 35 μm, which is usually used in the production of printed wiring boards, is used, and the roughened surface of this copper foil 1'is used. After the plating resist is printed on the side and the exposed surface group with a diameter of 0.3 mm is left in a predetermined position (location), patterning is performed, and then copper plating is applied to the exposed surface area on the copper layer with a height of about 100 μm. , A nickel layer having a height of about 10 μm was overlaid to form a conductor bump group of about 110 μm in total. The same as in Example 1 except that the copper foil 1'where the bump group is formed by plating is used, while the electrolytic copper foil 4'having a thickness of 35 μm is also used as the back sheet (patch plate) 4. Then, as shown in FIG. 3 (a), the laminates are arranged, and the laminated body is pressed under the same conditions, and as shown in FIG. 3 (b), the copper foils 1'and 4'are penetrated. A double-sided copper clad plate having a conductor wiring portion 5 connected to the mold was prepared. A normal etching resist ink (trade name, PSR-4000 H, manufacturer: Taiyo Ink KK) is screen-printed on both sides of this double-sided copper clad board, the conductor pattern is masked, and then the cupric chloride etching solution is used. After the etching treatment, the resist mask was peeled off to obtain a double-sided printed wiring board. When the thus-produced double-sided printed wiring board was subjected to an electrical check that is usually carried out, no problems such as defects or reliability were found in all connections.
【0028】なお、本実施例でのバンプ群形成を、半田
レジストマスクを介しての半田ディップ法で行っても同
様な結果が得られた。さらに他の実施例における導電性
組成物によるバンプ群の形成を、前記メッキ法におこな
っても配線層間が接続された印刷配線板を得ることが可
能であった。Similar results were obtained even when the bump group formation in this embodiment was carried out by the solder dipping method using a solder resist mask. Even if the bump group was formed of the conductive composition in another example by the plating method, it was possible to obtain a printed wiring board in which wiring layers were connected.
【0029】[0029]
【発明の効果】本発明によれば、パターン層間を接続す
る導電性のバンプを形設する工程、合成樹脂系シートを
積層的に配置して熱プレスする工程、外層パターニング
する工程というプロセスの簡略化、換言すると製造工程
数を従来の製造方法に比べ格段に少ない工程に低減しな
がら、両面型印刷配線板ないし多層型印刷配線板を容易
に製造することが可能となる。特に工程の繰り返しが多
い多層型印刷配線板の製造においては、大幅な工程数の
低減となり、生産性ないし量産性の向上に効果がある。
そして、従来の多層型印刷配線板などの製造工程で、必
要不可欠であった穴明け工程、メッキ工程が不要になる
ことに伴い、製造工程で発生する不良が大幅に抑えら
れ、歩留まりが向上するばかりでなく、信頼性の高い印
刷配線板が得られることになる。また、製造される印刷
配線板は、層間接続用の穴が表面に存在しないので、配
線密度の格段な向上を図り得るし、電子部品の実装用エ
リアも、穴の位置に関係なく設定し得ることになり、実
装密度も格段に向上し、ひいては実装電子部品間の距離
を短縮できるので、回路の性能向上をも図り得る。つま
り、本発明は、印刷配線板の低コス化に寄与するだけで
なく、実装回路装置のコンパクト化や、高性能化などに
も大きく寄与するものといえる。According to the present invention, the steps of forming conductive bumps for connecting pattern layers, arranging synthetic resin sheets in a laminated manner and hot pressing, and patterning outer layers are simplified. In other words, it is possible to easily manufacture a double-sided printed wiring board or a multilayer printed wiring board while reducing the number of manufacturing steps to a significantly smaller number of steps as compared with the conventional manufacturing method. Particularly in the production of a multilayer printed wiring board in which many steps are repeated, the number of steps is significantly reduced, which is effective in improving productivity or mass productivity.
In addition, since the drilling process and the plating process, which are indispensable in the conventional manufacturing process of the multilayer printed wiring board and the like, are not necessary, the defects occurring in the manufacturing process are significantly suppressed, and the yield is improved. Not only that, a highly reliable printed wiring board can be obtained. In addition, since the printed wiring board manufactured does not have holes for interlayer connection on the surface, wiring density can be significantly improved, and the electronic component mounting area can be set regardless of the position of the holes. As a result, the packaging density can be remarkably improved, and the distance between the mounted electronic components can be shortened, so that the circuit performance can be improved. That is, it can be said that the present invention not only contributes to the reduction of the cost of the printed wiring board, but also contributes to the downsizing of the mounted circuit device and the high performance thereof.
【図1】本発明の第1の実施態様例を模式的に示すもの
で、 (a)は支持基板面に形設された導電性バンプを示す
側面図、 (b)は熱プレスにより合成樹脂系シートに圧入
された導電性バンプの形状を示す断面図。FIG. 1 schematically shows a first embodiment example of the present invention, in which (a) is a side view showing conductive bumps formed on the surface of a supporting substrate, and (b) is a synthetic resin formed by hot pressing. FIG. 3 is a cross-sectional view showing the shape of a conductive bump press-fitted into a system sheet.
【図2】本発明の第1の実施態様例を模式的に示すもの
で、 (a)は支持基板,合成樹脂系シーおよび当て板の積
層・配置を示す断面図、 (b)は熱プレスにより合成樹脂
系シートの厚さ方向に貫通する導体配線部を圧入形成し
た状態を示す断面図。2A and 2B schematically show a first embodiment of the present invention, in which FIG. 2A is a sectional view showing a stacking / arrangement of a supporting substrate, a synthetic resin sheet and a backing plate, and FIG. 2B is a hot press. FIG. 6 is a cross-sectional view showing a state in which a conductor wiring portion penetrating in the thickness direction of a synthetic resin sheet is press-fitted and formed by the above method.
【図3】本発明の第2の実施態様例を模式的に示すもの
で、 (a)は支持基板,合成樹脂系シーおよび当て板の積
層・配置を示す断面図、 (b)は熱プレスにより合成樹脂
系シートの厚さ方向に貫通する導体配線部を圧入形成し
た状態を示す断面図。FIG. 3 schematically shows a second embodiment of the present invention, in which (a) is a cross-sectional view showing stacking and arrangement of a supporting substrate, a synthetic resin sheet and a backing plate, and (b) is a hot press. FIG. 6 is a cross-sectional view showing a state in which a conductor wiring portion penetrating in the thickness direction of a synthetic resin sheet is press-fitted and formed by the above method.
【図4】本発明の第3の実施態様例を模式的に示すもの
で、 (a)は支持基板,合成樹脂系シーおよび当て板の積
層・配置を示す断面図、 (b)は熱プレスにより合成樹脂
系シートの厚さ方向に貫通する導体配線部を圧入形成し
た状態を示す断面図。FIG. 4 schematically shows a third embodiment of the present invention, in which (a) is a cross-sectional view showing stacking and arrangement of a supporting substrate, a synthetic resin sheet and a backing plate, and (b) is a hot press. FIG. 6 is a cross-sectional view showing a state in which a conductor wiring portion penetrating in the thickness direction of a synthetic resin sheet is press-fitted and formed by the above method.
【図5】本発明の第4の実施態様例を模式的に示すもの
で、 (a)は支持基板,合成樹脂系シーおよび当て板の積
層・配置を示す断面図、 (b)は熱プレスにより合成樹脂
系シートの厚さ方向に貫通する導体配線部を圧入形成し
た状態を示す断面図。5A and 5B schematically show a fourth embodiment of the present invention, in which FIG. 5A is a sectional view showing a stacking and arrangement of a supporting substrate, a synthetic resin sheet and a backing plate, and FIG. 5B is a hot press. FIG. 6 is a cross-sectional view showing a state in which a conductor wiring portion penetrating in the thickness direction of a synthetic resin sheet is press-fitted and formed by the above method.
【図6】本発明の第4の実施態様例を模式的に示すもの
で、 (a)は支持基板,合成樹脂系シーおよび当て板の積
層・配置を示す断面図、 (b)は熱プレスにより合成樹脂
系シートの厚さ方向に貫通する導体配線部を圧入形成し
た状態を示す断面図。FIG. 6 schematically shows a fourth embodiment of the present invention, in which (a) is a cross-sectional view showing stacking and arrangement of a supporting substrate, a synthetic resin sheet and a backing plate, and (b) is a hot press. FIG. 6 is a cross-sectional view showing a state in which a conductor wiring portion penetrating in the thickness direction of a synthetic resin sheet is press-fitted and formed by the above method.
1,1′…支持基体シート 2…導体バンプ 3…
合成樹脂系シート 4,4′…当て板(裏面シート) 5…層間貫通型の
導体配線部 6,6′…導体パターン1, 1 '... Support base sheet 2 ... Conductor bump 3 ...
Synthetic resin type sheet 4, 4 '... Patch plate (back sheet) 5 ... Interlayer penetration type conductor wiring part 6, 6' ... Conductor pattern
───────────────────────────────────────────────────── フロントページの続き (72)発明者 新井 康司 神奈川県川崎市幸区小向東芝町1番地 株 式会社東芝小向工場内 (72)発明者 笹岡 賢司 神奈川県川崎市幸区小向東芝町1番地 株 式会社東芝小向工場内 (72)発明者 森 崇浩 神奈川県川崎市幸区小向東芝町1番地 株 式会社東芝小向工場内 (72)発明者 池ケ谷 文敏 神奈川県川崎市幸区小向東芝町1番地 株 式会社東芝小向工場内 (72)発明者 古渡 定雄 神奈川県川崎市幸区小向東芝町1番地 株 式会社東芝小向工場内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Koji Arai 1 Komukai Toshiba Town, Komu-shi, Kawasaki City, Kanagawa Prefecture Komu Factory, Toshiba Corporation (72) Kenji Sasaoka Komukai-Toshiba, Kawasaki City, Kanagawa Prefecture Town No. 1 Incorporation company Toshiba Komukai Factory (72) Inventor Takahiro Mori Komukai Toshiba Town No. 1, Komukai-ku, Kawasaki City, Kanagawa Prefecture Incorporated company Toshiba Komukai Factory (72) Inventor Fumitoshi Ikegaya Kawasaki City, Kanagawa Prefecture Komukai-ku, Toshiba No. 1 in the Komukai factory, Toshiba Corporation (72) Inventor Sadao Furuwata No. 1, Komu-shiba town, Saiwai-ku, Kawasaki-shi, Kanagawa Komukai factory, the Toshiba corporation
Claims (2)
基体の主面に、合成樹脂系シート主面を対接させて積層
配置する工程と、 前記積層体を加圧し、前記合成樹脂系シートの厚さ方向
に、前記バンプ群をそれぞれ貫挿させて貫通型の導体配
線部を形成する工程とを具備して成ることを特徴とする
印刷配線板の製造方法。1. A step of arranging a main surface of a synthetic resin sheet on a main surface of a supporting substrate having conductor bump groups formed at predetermined positions so as to be in contact with each other, and stacking the laminated body so as to apply pressure to the synthetic resin. And a step of forming a through-type conductor wiring part by penetrating each of the bump groups in the thickness direction of the sheet.
性金属箔の主面に、合成樹脂系シート主面を対接させて
積層配置する工程と、 前記積層体を加圧し、前記合成樹脂系シートの厚さ方向
に、前記バンプ群をそれぞれ貫挿させて貫通型の導体配
線部を形成する工程と、 前記貫通型の導体配線部を形成した積層体の導電性金属
箔に、エッチング処理を施して、前記貫通型の導体配線
部に接続する配線パターンを形成する工程とを具備して
成ることを特徴とする印刷配線板の製造方法。2. A step of laminating and placing a main surface of a synthetic resin sheet on a main surface of a conductive metal foil having a group of conductor bumps formed at predetermined positions in a laminated manner, pressurizing the laminate, and performing the synthesis. In the thickness direction of the resin-based sheet, a step of penetrating each of the bump groups to form a through-type conductor wiring portion, and etching the conductive metal foil of the laminate in which the through-type conductor wiring portion is formed, And a step of forming a wiring pattern to be connected to the through-type conductive wiring portion, the method being the method of manufacturing a printed wiring board.
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22332993A JP3167840B2 (en) | 1993-04-16 | 1993-09-08 | Printed wiring board and method for manufacturing printed wiring board |
US08/204,994 US5600103A (en) | 1993-04-16 | 1994-03-02 | Circuit devices and fabrication method of the same |
DE69411438T DE69411438T2 (en) | 1993-04-16 | 1994-03-09 | Circuit arrangements and methods for their manufacture |
EP94301659A EP0620701B1 (en) | 1993-04-16 | 1994-03-09 | Circuit devices and fabrication method of the same |
CN94105556A CN1053785C (en) | 1993-04-16 | 1994-04-15 | Printed circuit board and manufacturing method thereof |
KR1019940008044A KR100203540B1 (en) | 1993-04-16 | 1994-04-16 | Circuit parts and manufacturing method of circuit parts |
US08/577,324 US5822850A (en) | 1993-04-16 | 1995-12-22 | Circuit devices and fabrication Method of the same |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9017793 | 1993-04-16 | ||
JP5-90177 | 1993-04-16 | ||
JP22332993A JP3167840B2 (en) | 1993-04-16 | 1993-09-08 | Printed wiring board and method for manufacturing printed wiring board |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH06350258A true JPH06350258A (en) | 1994-12-22 |
JP3167840B2 JP3167840B2 (en) | 2001-05-21 |
Family
ID=26431681
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22332993A Expired - Lifetime JP3167840B2 (en) | 1993-04-16 | 1993-09-08 | Printed wiring board and method for manufacturing printed wiring board |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3167840B2 (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5943212A (en) * | 1996-05-01 | 1999-08-24 | Shinko Electric Industries Co., Ltd. | Ceramic circuit board and semiconductor device using same |
JPH11307937A (en) * | 1998-04-18 | 1999-11-05 | Ibiden Co Ltd | Core board, its manufacturing method, and multi-layer printed circuit board |
WO2003056889A1 (en) * | 2001-12-25 | 2003-07-10 | Hitachi Chemical Co., Ltd. | Connection substrate, multilayer wiring board using the connection substrate, substrate for semiconductor package, semiconductor package, and methods for manufacturing them |
JP2007059529A (en) * | 2005-08-23 | 2007-03-08 | Nippon Mektron Ltd | Manufacturing method of circuit board |
US7416687B2 (en) | 2006-03-31 | 2008-08-26 | Dai Nippon Printing Co., Ltd. | Electroconductive paste composition and printed wiring board |
JP2009117340A (en) * | 2007-11-07 | 2009-05-28 | Samsung Electro-Mechanics Co Ltd | Conductive paste and printed circuit board using the same |
US7651940B2 (en) | 2002-12-02 | 2010-01-26 | Tdk Corporation | Electronic part producing method and electronic part |
JP2011071533A (en) * | 2008-04-03 | 2011-04-07 | Samsung Electro-Mechanics Co Ltd | Method of manufacturing multilayer printed circuit board |
-
1993
- 1993-09-08 JP JP22332993A patent/JP3167840B2/en not_active Expired - Lifetime
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5943212A (en) * | 1996-05-01 | 1999-08-24 | Shinko Electric Industries Co., Ltd. | Ceramic circuit board and semiconductor device using same |
JPH11307937A (en) * | 1998-04-18 | 1999-11-05 | Ibiden Co Ltd | Core board, its manufacturing method, and multi-layer printed circuit board |
WO2003056889A1 (en) * | 2001-12-25 | 2003-07-10 | Hitachi Chemical Co., Ltd. | Connection substrate, multilayer wiring board using the connection substrate, substrate for semiconductor package, semiconductor package, and methods for manufacturing them |
US8028402B2 (en) | 2001-12-25 | 2011-10-04 | Hitachi Chemical Co., Ltd. | Connection board, and multi-layer wiring board, substrate for semiconductor package and semiconductor package using connection board, and manufacturing method thereof |
US7651940B2 (en) | 2002-12-02 | 2010-01-26 | Tdk Corporation | Electronic part producing method and electronic part |
JP2007059529A (en) * | 2005-08-23 | 2007-03-08 | Nippon Mektron Ltd | Manufacturing method of circuit board |
US7416687B2 (en) | 2006-03-31 | 2008-08-26 | Dai Nippon Printing Co., Ltd. | Electroconductive paste composition and printed wiring board |
JP2009117340A (en) * | 2007-11-07 | 2009-05-28 | Samsung Electro-Mechanics Co Ltd | Conductive paste and printed circuit board using the same |
JP2011071533A (en) * | 2008-04-03 | 2011-04-07 | Samsung Electro-Mechanics Co Ltd | Method of manufacturing multilayer printed circuit board |
Also Published As
Publication number | Publication date |
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JP3167840B2 (en) | 2001-05-21 |
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