JPH06349904A - Probe card - Google Patents

Abstract

(57) [Abstract] [Purpose] Regarding the probe card used when the electrical measurement target is minute, fix all the probe needles when replacing the probe needles when the probe needles are worn or damaged. Resin removal, repositioning of all probe needles,
(EN) Provided is a probe card capable of reducing the number of man-hours required for re-fixing with a resin and reducing the number of probe cards. [Structure] A probe card substrate 1 and a plurality of probe card sub-substrates 2 to which probe needles 3 are fixed are configured. The removal and re-fixing of the resin for fixing the probe needle 3 is performed in units of the probe card sub-board 2. [Effect] The number of probe needles 3 to be readjusted when replacing the probe needles can be reduced. Further, when the number of simultaneous measurements is different, it can be dealt with only by mounting the sub-boards for the number of simultaneous measurements on the probe card board, and a probe card for each number of simultaneous measurements is unnecessary.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe card used when an electrical measurement target is minute.

[0002]

2. Description of the Related Art Conventionally, in a probe card, all the probe needles are fixed to a probe card substrate with an insulating resin.

Therefore, even if one of the plurality of probe needles is worn or damaged and needs to be replaced, the resin fixing the plurality of probe needles must be removed. Repositioning was required.

[0004]

According to such a conventional method, a plurality of probe needles are fixed even if one of the plurality of probe needles is worn or damaged and is replaced. Since the resin has to be removed, it is necessary to readjust the total number of probe needles, which requires a lot of work. Moreover, when fixing, it is necessary to fix all the probe needles with positional accuracy within the adjustable range, which requires skill.

Further, even in the same type, if the number of simultaneous measurements is different, a completely different probe card substrate will result,
Various probe cards were needed. In addition, each type of probe card must have a spare,
A lot of probe cards were needed.

An object of the present invention is to solve the conventional problems and to provide a probe card which prevents various types of probe cards from increasing in number.

[0007]

According to the present invention, a probe card is divided into a plurality of probe card sub-boards on which a probe card substrate body and a probe needle are fixed. Since the fixing can be done on a probe card sub-board unit basis, the number of probe needles to be readjusted when exchanging probe needles can be reduced, and the fixing work also requires a small number of probe needles to be fixed at the same time, so that the skill level is low. Also, when the number of simultaneous measurements is different, it is sufficient to mount the probe card sub boards for the number of simultaneous measurements on the probe card board, and only one type of probe card is required. It can prevent quantification.

[0008]

FIG. 1 shows an embodiment of the present invention.

In the case of a conventional probe card, when the probe needles 3 are worn or damaged and are to be replaced, the fixing resin 4 is removed, all the probe needles 3 are repositioned, and the resin needles are re-fixed. Work was needed.

Moreover, these operations require skill.

The present invention solves the conventional problems described above, and provides a probe card substrate which requires less man-hours and does not require skill when replacing the probe needle.

As shown in FIG. 1, a probe card substrate 1
And a plurality of probe card sub-boards 2 are prepared, and each probe card sub-board 2 has the same structure.

The probe needle 3 is fixed to the probe card sub-board 2 with a fixing resin 4.

The probe card sub board 2 is attached to the probe card board 1 with screws or the like.

The signal is transmitted from the conductive pattern of the probe card substrate 1 to the conductive pattern of the probe card sub-substrate 2 through the contact pin or contact surface, and further to the probe needle 3 soldered to the conductive pattern. To be done.

In the case of the conventional probe card shown in FIG.
Even if the probe needle 3 of the book breaks down, the probe needle fixing resin 4 is removed and the broken probe needle 3 is replaced and fixed again,
Furthermore, the total number of probe needles 3 had to be readjusted.

According to the embodiment of FIG. 1 of the present invention, the tip position adjustment of the probe needle 3 can be carried out in units of the probe card sub-board 2, so that the probe needle 3 fails and the probe needle fixing resin 4 is removed. Even when the needles 3 are replaced and the probe needles 3 are readjusted, the number of probe needles 3 to be readjusted is smaller than in the conventional case, and the number of adjustment steps can be reduced.

Further, since the number of probe needles 3 to be fixed at the same time is small, the skill level is low.

Further, when the number of simultaneous measurement is different, it is only necessary to attach one set of probe card sub-boards 2 of the probe card sub-board 10 for IC1 for simultaneous measurement of one, and for simultaneous measurement of two, the probe card sub-board for IC1. 10 and the probe card sub-board 11 for IC2, two sets of probe card sub-boards 2 are attached, and when measuring four more simultaneously, the probe card sub-board 10 for IC1 and the IC
2 probe card sub-board 11 and IC3 probe card sub-board 12 and IC4 probe card sub-board 1
It suffices to attach four sets of probe card sub-boards 2 to 3, and only one type of probe card is required.

In the embodiment of FIG. 2, a vertical adjustment thin plate 5 having a thickness of about 10 μm to 50 μm for adjusting the position of the probe card sub-board 2 in the height direction is provided between the probe card base 1 and the probe card sub-base 2. It can be adjusted by scissors.

The vertical adjustment thin plate 5 can be adjusted in the vertical direction depending on how many sheets are sandwiched between the probe card substrate 1 and the probe card sub-substrate 2.

In the embodiment shown in FIG. 3, the horizontal adjustment mechanism 8 is used to adjust the position of the tip of the probe needle in the horizontal direction.

In the position adjusting method of FIG. 3, the probe card sub-board 2 is loosened by fixing the probe card sub-board fixing screw 6.
For horizontal fixing and changing the height position of the horizontal adjustment mechanism 8 by rotating the horizontal adjustment screw 7 for fixing the probe card sub-board while pressing the probe card sub-board 2 to the outside. By tightening the screw 6, it is possible to adjust the position in the horizontal direction.

FIG. 5 shows an embodiment in which horizontal position adjustment is unnecessary.

In FIG. 4, the high-accuracy positioning guide pin 9 is simply built in and mounted with high accuracy, and position adjustment in the horizontal direction is unnecessary.

[0026]

According to the present invention, the replacement work and the adjustment work of the probe needle 3 can be shortened, and the skill level becomes unnecessary. Also, the type of probe card can be reduced.

[Brief description of drawings]

FIG. 1 is a perspective view of the present invention.

FIG. 2 is a sectional view taken along the line A-A ′ of the present invention.

FIG. 3 is a sectional view of the present invention having a horizontal position adjusting mechanism.

FIG. 4 is a cross-sectional view of the present invention in which horizontal positioning is performed by a highly accurate positioning guide pin.

FIG. 5 is a conventional perspective view.

[Explanation of symbols]

 1 probe card board 2 probe card sub board 3 probe needle 4 probe needle fixing resin 5 vertical adjustment thin plate 6 probe card sub board fixing screw 7 horizontal adjustment screw 8 horizontal adjustment mechanism 9 high-precision positioning guide pin 10 Probe card sub-board for IC1 11 Probe card sub-board for IC2 12 Probe card sub-board for IC3 13 Probe card sub-board for IC4

Claims (1)

[Claims] 1. A probe card comprising a probe card substrate and probe needles, which is used when an electrical measurement target is minute, and includes a plurality of probe card subs for fixing the probe needles with resin or the like. A probe card comprising a substrate and a probe card substrate to which the substrate is attached.