JPH063397A - Potential distribution measuring device - Google Patents

Abstract

PURPOSE:To measure the potential at a small part which cannot be measured by a system for measuring the amount of induction electric charge by detecting the operation of electrostatic force which operates on a probe by scanning a recording medium or the probe two-dimensionally. CONSTITUTION:Bringing a probe 2 for detecting potential closer to a recording medium 1 with a potential distribution causes induction charge to be induced at a part facing the recording medium side of the probe 2 due to electrostatic charge on the recording medium. At this time, induction electric charge is induced at the tip part when for example an object with a sharp tip such as a needle is used as a probe. An electrostatic force is applied between the probe 2 and the medium 1 due to electric field which is generated by the induction electric charge and the medium 1 so that the probe 2 results in a mechanical displacement such as deflection when the probe 2 is subjected to mechanical displacement. The mechanical displacement indicates the amount of displacement corresponding to the electrostatic force so that the electrostatic force which is operated upon it, namely the potential at the part, can be determined by detecting the mechanical potential.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the reading of an electrostatic latent image formed on a charge image holding medium such as an electrostatic recording medium or an electrostatic latent image holding medium for electrophotography, or electrostatic force such as electrostatic charge or polarization. 2 such as signal reading of high density recording device using
The present invention relates to a device for measuring a dimensional potential distribution.

[0002]

2. Description of the Related Art Generally, in order to measure the surface potential of a recording medium having a potential distribution such as a charged sample, a measuring electrode is brought close to the recording medium, and an induced charge induced in the measuring electrode at that time is measured. Means for measuring are used. That is, when a capacitance is formed between the recording medium and the measuring electrode by bringing the measuring electrode closer to the recording medium, an induced charge corresponding to the electrostatic charge on the recording medium is induced on the measuring electrode.

Conventionally, the surface potential is measured by measuring the amount of induced charges thus induced. The two-dimensional potential distribution can be measured by two-dimensionally scanning the measuring electrode or the recording medium.

[0004]

In the conventional method for measuring the amount of induced charges, when measuring the potential of a minute portion, it is necessary to reduce the size of the measuring electrode according to the measuring portion. However, as the size of the measuring electrode becomes smaller, the amount of induced electric charge induced in proportion to the area becomes smaller, so that the absolute value of the signal amount to be detected becomes smaller. Therefore, considering the characteristics such as the S / N ratio of the signal processing system, the size of the measurement electrode cannot be infinitely reduced, and there is a limit. Therefore, it is extremely difficult to measure a minute portion by the method of measuring the induced charge amount.

An object of the present invention is to solve the above problems, and it is an object of the present invention to provide a potential distribution measuring device capable of measuring the potential of a minute portion which cannot be measured by the method of measuring the amount of induced charges.

[0006]

DISCLOSURE OF THE INVENTION The present invention aims to measure the electric potential of a minute portion on a sample, and uses a probe having a minute action cross section for detecting an electric potential.
This is possible and realized by means.

When the potential detecting probe is brought close to a recording medium having a potential distribution, an electrostatic charge on the recording medium induces an induced charge in the portion of the probe facing the recording medium side. At this time, if a probe with a sharp tip such as a needle is used as the probe, the induced charge is induced at the tip portion.

An electrostatic force acts between the probe and the recording medium due to the induced electric charge induced and the electric field generated by the recording medium. Therefore, if the probe is mechanically displaceable, the probe may be mechanically deformed. Displacement occurs.
Since mechanical displacement indicates the amount of displacement corresponding to electrostatic force,
By detecting this mechanical displacement, it is possible to know the electrostatic force acting on the mechanical displacement, that is, the potential of the portion.

Further, in this method, it is sufficient that a detectable mechanical displacement can be obtained by the electrostatic force due to the induced electric charge. Therefore, the probe material, shape, configuration, or mechanical displacement detection means is used. By selecting it, the potential distribution can be measured with the resolution of the probe up to the size of molecule or atomic order. Further, by scanning the recording medium or the probe two-dimensionally, the two-dimensional potential distribution state can be measured.

The above is the case where the probe in a stationary state is used, but the same measurement can be performed by bringing the probe vibrated by an external force close to the recording medium. The probe is made to approach a recording medium having a potential distribution while being vibrated by an external force so as to maintain a constant amplitude at its mechanical natural frequency. Then, similarly to the case described above, induced charges are induced, and electrostatic force acts on the probe.
A new external force, which is the electrostatic force of the probe, acts to change the natural frequency or amplitude of the probe. The change in the natural frequency or the amplitude changes depending on the electrostatic force acting on the probe, so that the electrostatic force, that is, the potential of the part can be known by measuring the natural frequency or the amplitude.

The measurement of the potential distribution by the two-dimensional scanning and the resolution are the same as in the case of the mechanical displacement described above.

As described above, by using the potential detecting probe, the potential of a minute portion can be measured by the method of directly utilizing the phenomenon of mechanical displacement, change in natural frequency, or change in amplitude, which is caused by the electrostatic force. it can.

These actions are influenced not only by the potential of the recording medium but also by the distance between the probe and the recording medium. When measuring the potential distribution on the recording medium while scanning, if the distance between the probe and recording medium is controlled so that the state of the probe does not change due to the action of these electrostatic forces, this control amount acts on the probe. Therefore, the potential distribution can be measured by scanning while measuring this value.

In addition to the electric field generated by the recording medium, the electrostatic force acting between the probe and the recording medium is
It can also be operated by externally applying a voltage between the recording media. Therefore, when measuring the potential distribution on the recording medium while scanning it, apply a bias voltage between the probe and the recording medium, and control the bias voltage so that the probe state does not change due to the electrostatic force generated from the recording medium. When this is set, this control amount corresponds to the electrostatic force acting on the probe, and the potential distribution can be measured from this value.

[0015]

The present invention uses a potential detecting probe and utilizes the mechanical displacement of the probe, the change of the natural frequency, or the change of the amplitude due to the electrostatic force acting when approaching the recording medium having the potential distribution. , The amount of control when the probe-recording medium distance and the probe-recording medium bias voltage are controlled so that the state of the probe does not change due to the action of electrostatic force exceeds the conventional method of directly measuring the induced charge. It is possible to measure the potential distribution with fine resolution.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a diagram showing a basic configuration of potential detection by a recording medium and a probe described in each of the following embodiments. In the recording medium 1, the charge holding layer 1c is laminated on the support 1a with the conductive layer 1b interposed therebetween, and the recording charge exists on the charge holding layer 1c to form a potential distribution. Not limited to the recording medium having such a configuration, electrostatic charge, induced charge,
Any medium having a potential distribution due to dipole polarization or the like can be a measurement target in the present invention. When the probe 2 is brought close to such a recording medium 1, the probe 2
An electric charge is induced on the surface of the recording medium 1 and an electrostatic force acts between the surface and the recording medium 1. The potential distribution of the recording medium 1 is measured by utilizing the action of this electrostatic force.

[Embodiment 1] FIG. 2 is a diagram showing an embodiment in which the potential distribution of a recording medium is measured from the mechanical displacement of a probe. In the figure, 1 is a recording medium, 2 is a probe, 3 is a probe fixing jig, 4 is a mechanical displacement measuring device, 5 is a Z direction moving device, 6 is an XY scanning device, 7 is a Z direction control device, and 8 Is X
A Y scanning control device 9 is a recording processing device. The recording medium 1 is installed on the XY scanning device 6 and the Z-direction moving device 5 in order to scan on the XY plane and approach the probe 2. At this time, if the recording medium 1 is in the form of a card, the XY scanning device 6 can use an XY stage or the like using a piezoelectric element, an electromagnetic motor or the like as a drive source. If the recording medium 1 has a disk shape, the XY scanning device 6 includes a rotating mechanism and a moving device in the direction of the rotation center, and the recording medium 1
Is a cylindrical shape formed on a drum or the like, the XY scanning device 6 is a moving device in a direction parallel to the rotation mechanism and the rotation axis. As the Z-direction moving device 5, a Z stage using a piezoelectric element, an electromagnetic motor or the like as a drive source can be used.

The XY scanning device 6 and the Z-direction moving device 5 are connected to an XY scanning control device 8 and a Z-direction control device 7, respectively, and driven and controlled. The XY scanning device 6 and the Z-direction moving device 5 are integrally formed by a piezoelectric element or the like and are movable in the X, Y, and Z directions other than the case where they are separated as shown in FIG. You may use what was done.

The probe 2 is installed near the recording medium 1 with one end fixed by the probe fixing jig 3. The material and form of the probe 2 may be any as long as induced charges are induced when the probe is placed in a field where an electric field exists, and mechanical displacement is caused by the action of electrostatic force with the recording charges. FIG. 3 shows an example of a probe formed using a conductive metal foil (Ni or the like). The thickness of the metal foil is 10
μm, and the tip portion is sharpened to increase the lateral resolution during measurement. In addition to this, a wire-shaped metal wire, a needle made of a material having ferroelectricity, or the like can be used as the probe of the present device as long as it causes mechanical displacement by an electric field.

When a conductive material such as metal is used as the probe, in order to enhance the effect of electrostatic force,
As shown in FIG. 2, the probe 2 and the conductive layer 1 b of the recording medium 1
May be short-circuited. Also, instead of short-circuiting, both may be connected to ground respectively. As a result, the charges having the opposite polarity to the recording charges induced in the conductive layer 1b are distributed to the probe, so that the electrostatic force can be increased.

In FIG. 2, the probe fixing jig 3 is not provided with a moving mechanism, but the recording medium 1 is installed in X.
The Y scanning device 6 and the Z direction moving device 5 may be provided on the probe fixing jig 3, respectively. Of course, they may be provided in both.

The recording medium 1 and the probe 2 are brought close to each other by the Z-direction moving device 5 to a distance where an electrostatic force is exerted by the interaction between the two. One end of the probe 2 is fixed by the probe fixing jig 3, and the tip end portion receives a force by the electrostatic force due to the interaction with the recording medium, so that mechanical displacement such as bending occurs. This is detected by the mechanical displacement measuring device 4.

The mechanical displacement detector 4 is generally an AFM.
The method used in (atomic force microscope) can be used. That is, an STM that is provided with a needle for detecting a tunnel current above the probe 2 and detects the displacement of the probe 2 from the tunnel current between the probe 2 and the needle for detecting the tunnel current.
A method using the principle of (scanning tunneling microscope), or the displacement of the probe 2 is measured by irradiating the upper surface of the probe 2 with a light beam such as a laser beam from any one direction and measuring the positional displacement of the reflected light. It is possible to use an optical lever method for knowing the above, a light wave interference method for recognizing the displacement of the probe 2 by irradiating the upper surface of the probe with laser light, and an interference phenomenon with the reflected light.

The displacement signal output from the mechanical displacement detection device 4 and the position signal output from the XY scanning control device 8 are taken into the recording processing device 9. A recorder, a computer or the like is used as the recording processing device. Here, the displacement signal is converted into a potential on the recording medium, and the potential at an arbitrary position on the recording medium can be known by making it correspond to the position signal obtained from the XY scanning control device 8. The position signal may use a signal obtained by providing an independent device for measuring the relative position of the probe and the recording medium without using the XY scanning control device.

After the measurement at any position, X-
By scanning the recording medium 1 with the Y scanning device 6, the potential distribution of the recording medium 1 can be measured. As a scanning method, after measuring one point, move to the next position, stop and then perform the measurement, along with an intermittent scanning method, there is also a method of performing measurement in a state of continuously moving without stopping It is possible. Further, it is possible to actually move either the recording medium, the probe, or both.

Although the example of detecting the mechanical displacement of the probe has been described above, another configuration is possible within the range not changing the gist of the present invention depending on the shape of the recording medium, the scanning direction and the like.

[Embodiment 2] FIG.
It is a figure which shows the Example which measures an electric potential distribution from the amplitude, The basic structure is the same as that of [Example 1], and the vibration excitation apparatus 10 and the amplitude measurement apparatus 11 are added to this. The vibration excitation device 10 is for vibrating the probe 2 at its natural frequency. As a means for vibrating, a piezoelectric element or the like is connected to the probe 2 or the probe fixing jig 3,
The piezoelectric element is vibrated by applying a piezoelectric pulse at a frequency corresponding to the natural frequency. Also, the laser beam,
There is a method in which a heat pulse is applied to a part of the probe with a heating element or the like at a frequency corresponding to the natural frequency to cause thermal expansion in the frequency to vibrate.

The recording medium 1 and the probe 2 in a vibrating state are brought close to each other by the Z-direction moving device 5. When the probe 2 is brought close to the distance where the electrostatic force works, the vibration state of the probe changes due to the electrostatic force and the amplitude changes. These changes are detected by the mechanical displacement detecting device 4, pass through the amplitude measuring device 11, and are recorded as an amplitude signal in the recording processing device 9.
Is taken into. The amplitude measuring device 11 is composed of, for example, a circuit that detects an AC component of an input signal. The potential distribution can be measured by converting the amplitude signal input in the recording processing device 9 into the potential on the recording medium. The above is the same as the case of [Example 1] except for the points described above.

[Embodiment 3] FIG.
In the figure which shows the example which measures an electric potential distribution from the natural frequency, the basic structure is the same as that of [Example 2], and the natural frequency measuring device 12 is replaced with the amplitude measuring device of [Example 2].
Has been added. When the recording medium 1 and the probe 2 in the vibrating state are brought close to each other by the Z-direction moving device 5 and brought close to the distance where the electrostatic force works, the natural frequency of the probe changes according to the strength of the electrostatic force. . This is measured by the natural frequency measuring device 12. As a method, for example, while monitoring the vibration state by the mechanical displacement measuring device 4, the vibration excitation device 10 scans the frequency at which the probe is vibrated, and the frequency at which the maximum amplitude is obtained is selected to determine the natural frequency. There are ways. The information on the natural frequency obtained by the natural frequency measuring device 12 is transmitted to the recording processing device 9. The potential distribution can be measured by converting the signal input in the recording processing device 9 into the potential on the recording medium. The above is the same as the case of [Example 1] except for the points described above.

[Embodiment 4] FIG. 6 shows detection of mechanical displacement.
FIG. 3 is a diagram showing an embodiment in which the distance between the recording medium and the probe is controlled so that the value is maintained at a constant value, and the potential distribution is measured from the control amount. The basic configuration is the same as in [Example 1],
The signal of the mechanical displacement detection device 4 enters the Z direction control device 7, and the control signal of the Z direction control device 7 is taken into the recording processing device 9. Probe 2 and recording medium 1
The probe 2 causes a mechanical displacement due to an electrostatic force due to the interaction with the, and the displacement amount also changes by changing the distance between the probe and the recording medium. That is, even if the potential on the recording medium is the same, the magnitude of the electrostatic force that works depends on the distance from the probe.

In the Z-direction control device 7, when a value different from the initially set displacement amount is input from the mechanical displacement detection device 4, the Z-direction moving device 5 causes the probe so that the displacement amount becomes the initially set displacement amount. — Control the spacing between recording media. This control amount corresponds to the amount of static electricity that acts between the probe and the recording medium. What is moved at this time is the recording medium,
Alternatively, it may be a probe or both. Then, the control amount signal is sent to the recording processing device 9, where it is converted into a potential on the recording medium. The above is the same as the case of [Example 1] except for the points described above.

[Embodiment 5] In FIG. 7, the probe is vibrated.
It is a diagram showing an embodiment in which the potential distribution is measured by controlling the interval between the probe and the recording medium so as to keep the amplitude constant, and the basic configuration is the same as in the case of [Embodiment 2]. The output signal of the measuring device 11 enters the Z direction control device 7, and the control signal is taken into the recording device 9.

An electrostatic force due to the interaction between the probe 2 and the recording medium 1 changes the vibration state of the probe and changes the amplitude. The amount of change in the amplitude also changes by changing the interval between the probe and the recording medium. . That is, even if the potential on the recording medium is the same, the magnitude of the electrostatic force that works depends on the distance from the probe.

In the Z-direction control device 7, when an amplitude different from the initially set vibration amplitude is input from the amplitude measuring device 11, the probe-recording medium is moved by the Z-direction moving device 5 so that the initially set amplitude is obtained. Control the spacing between.
This control amount corresponds to the amount of static electricity that acts between the probe and the recording medium. What is moved at this time may be a recording medium, a probe, or both. Then, the control amount signal is sent to the recording processing device 9, where it is converted into a potential on the recording medium. The above is the same as the case of [Example 1] except for the points described above.

[Sixth Embodiment] FIG. 8 shows the vibration of a probe.
FIG. 6 is a diagram showing an example in which the potential distribution is measured by controlling the interval between the probe and the recording medium so as to keep the natural frequency constant, and the basic configuration is the same as in the case of [Example 3], An output signal of the natural frequency measuring device 12 enters the Z direction control device 7, and the control signal is taken into the recording device 9.

The natural frequency of the probe changes due to the electrostatic force due to the interaction between the probe 2 and the recording medium 1, but this change amount also changes depending on the distance between the probe and the recording medium. That is, even if the potential on the recording medium is the same, the magnitude of the electrostatic force that works depends on the distance from the probe.

In the Z-direction control device 7, when a natural frequency different from the initially set natural frequency is input from the natural frequency measuring device 12, the Z-direction control device 7 adjusts the Z to be the initially set frequency.
The direction moving device 5 controls the distance between the probe and the recording medium. This control amount corresponds to the amount of static electricity that acts between the probe and the recording medium. What is moved at this time may be a recording medium, a probe, or both. Then, the control amount signal is sent to the recording processing device 9, where it is converted into a potential on the recording medium. The above is the same as the case of [Example 1] except for the points described above.

[Embodiment 7] FIG. 9 shows detection of mechanical displacement.
It is a diagram showing an embodiment in which the bias voltage between the recording medium and the probe is controlled so as to maintain the value at a constant value, and the potential distribution is measured from the control amount. The basic configuration is the same as that in [Example 1]. The signal of the mechanical displacement detection device 4 enters the bias voltage control device 13, and the control signal of the bias voltage control device 13 is taken in by the recording processing device 9, and the bias voltage is applied between the probe 2 and the dielectric layer 1b of the recording medium 1. Is applied.

The probe 2 is mechanically displaced by an electrostatic force due to the interaction between the probe 2 and the recording medium 1. The displacement amount is also changed by applying a bias voltage between the probe and the recording medium. That is, even if the potential on the recording medium is the same, the magnitude of the electrostatic force acting on the probe differs depending on the external bias voltage.

In the bias voltage control device 13, when a value different from the initially set displacement amount is input from the mechanical displacement detection device 4, the bias between the probe and the recording medium is adjusted so that the initially set displacement amount is obtained. Control the voltage. This control amount corresponds to the potential on the recording medium. The control amount signal is sent to the recording processing device 9, where it is converted into a potential on the recording medium. Except for the points described above, it is the same as the case of the first embodiment.

[Embodiment 8] FIG. 10 is a view showing an embodiment in which the potential distribution is measured by vibrating the probe and controlling the bias voltage between the probe and the recording medium so as to keep the amplitude constant. The configuration is the same as in the case of [Embodiment 2], but the output signal of the amplitude measuring device 11 enters the bias voltage control device 13, and the control signal is taken in by the recording processing device 9, and the probe 2 and the recording medium 1 are read. Dielectric layer 1
The point is that a bias voltage can be applied during b.

An electrostatic force due to the interaction between the probe 2 and the recording medium 1 changes the vibration state of the probe and changes the amplitude. The amplitude change is also caused by applying a bias voltage between the probe and the recording medium. Change. That is, even if the potential on the recording medium is the same, the magnitude of the electrostatic force acting on the probe differs depending on the external bias voltage.

In the bias voltage controller 13, when an amplitude different from the initially set amplitude is input from the amplitude measuring device 11, the bias voltage between the probe and the recording medium is controlled so that the initially set amplitude is obtained. . This control amount corresponds to the potential on the recording medium. The control amount signal is sent to the recording processing device 9, where it is converted into a potential on the recording medium.
Except for the points described above, it is the same as the case of the first embodiment.

[Embodiment 9] FIG. 11 is a diagram showing an embodiment in which the potential distribution is measured by vibrating the probe and controlling the bias voltage between the probe and the recording medium so as to keep the natural frequency thereof constant. The basic configuration is [Example 3].
However, the output signal of the natural frequency measuring device 12 enters the bias voltage control device 13, and the control signal is taken in by the recording processing device 9, and the output signal between the probe 2 and the dielectric layer 1b of the recording medium 1 is changed. A bias voltage can be applied to.

Although the natural frequency of the probe changes due to the electrostatic force due to the interaction between the probe 2 and the recording medium 1, the change in this frequency also changes when a bias voltage is applied between the probe and the recording medium. To do. That is, even if the potential on the recording medium is the same, the magnitude of the electrostatic force acting on the probe differs depending on the external bias voltage.

In the bias voltage controller 13, when a natural frequency different from the initially set natural frequency is input from the natural frequency measuring device 12, the probe-recording medium is adjusted so that the initially set natural frequency is obtained. Control the bias voltage across. This control amount corresponds to the potential on the recording medium. The control amount signal is sent to the recording processing device 9, where it is converted into a potential on the recording medium. Except for the points described above, it is the same as the case of the first embodiment.

Next, an example of measurement based on Example 5 described with reference to FIG. 8 will be described. The specific system configuration of FIG. 8 is as shown in FIG. The sample 21 corresponding to the recording medium 1 has a layer structure of insulating layer / ITO / glass, and the insulating layer is FEP (Fluoro Ethylene propylene).
Using a film, an electrostatic latent image (20μ
m lines and spaces) were formed. Sample 21
Is a piezo actuator 2 that is driven and controlled by a power supply 27.
X driven by the XY controller 28 in the Z direction at 5
A laser diode (830n that scans in the XY directions on the -Y stage 26 and is driven by the function generator 31 with respect to the cantilever 22 that constitutes the probe.
A heat pulse was applied from m) to oscillate. The optical lever method is used to detect the vibration, and the laser diode 24a (670n
m) was irradiated and the reflected light was detected by PSD24b.
The detection output was phase-detected by the lock-in amplifier 32, and the piezo actuator 25 was driven from the power source 27 through the amplifier 33 by the detection output, and the interval was controlled so that the amplitude of the cantilever was controlled to be constant. When the output of the amplifier 33 at this time and the position information obtained from the XY controller 28 are input to the computer 29 and plotted, FIG.
The results shown in are obtained. FIG. 13 shows X300 μm,
The electrostatic latent image (potential distribution) in the area of Y150 μm is shown.

[0048]

As described above, the potential distribution of the recording medium can be measured with finer resolution. The present invention utilizes the electrostatic force between the recording medium and the probe, and changes not only the potential distribution but also the electric field outside the recording medium such as the electrostatic charge amount distribution, the induced charge distribution, the polarization state distribution, and the dielectric constant distribution. Anything can be measured.

Further, it can also be used as a reading device of a recording system using the above phenomenon as a memory.

[Brief description of drawings]

FIG. 1 is a diagram showing a basic configuration of potential detection by a recording medium and a probe of the present invention.

FIG. 2 is a diagram showing an example in which a potential distribution is measured from mechanical displacement.

FIG. 3 is a diagram showing an example of a probe.

FIG. 4 is a diagram showing an example of measuring a potential distribution from a vibration amplitude.

FIG. 5 is a diagram showing an example of measuring a potential distribution from a natural frequency.

FIG. 6 is a diagram showing an example in which a potential distribution is measured from a probe-recording medium interval control amount for keeping a mechanical displacement constant.

FIG. 7 is a diagram showing an example of measuring a potential distribution from a probe-recording medium interval control amount for keeping a vibration amplitude constant.

FIG. 8 is a diagram showing an example in which the potential distribution is measured from a probe-recording medium interval control amount for keeping the natural frequency constant.

FIG. 9 is a diagram showing an example of measuring a potential distribution from a bias voltage control amount for keeping a mechanical displacement constant.

FIG. 10 is a diagram showing an example of measuring a potential distribution from a bias voltage control amount for keeping the vibration amplitude constant.

FIG. 11 is a diagram showing an example in which the potential distribution is measured from the bias voltage control amount for keeping the natural frequency constant.

FIG. 12 is a diagram showing a specific system configuration of FIG.

FIG. 13 is a diagram showing an actual measurement result by the system of FIG.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Recording medium, 1a ... Support body, b ... Dielectric layer, 1c ... Charge holding layer, 2 ... Probe, 3 ... Probe fixing jig, 4 ... Mechanical displacement detection device, 5 ... Z-direction moving device, 6 ... X -Y scanning device, 7 ... Z direction control device, 8 ... XY scanning control device, 9 ... Recording processing device, 10 ... Vibration excitation device, 11 ... Amplitude measuring device, 12 ... Natural frequency measuring device, 13 ... Bias Voltage control device.

Claims (12)

[Claims] 1. An apparatus for measuring a potential distribution on a recording medium using a potential detection probe, a moving means for three-dimensionally changing a relative positional relationship between the potential detection probe and the recording medium, and the probe and the recording. A moving means for bringing the probe and the recording medium close to each other to a distance where the interaction by the electrostatic force is generated, and the recording medium or the probe is two-dimensionally scanned. A potential distribution measuring device characterized by detecting the action of electrostatic force acting on the probe. 2. The apparatus according to claim 1, further comprising spacing control means for controlling the spacing between the probe and the recording medium so as to keep the action of electrostatic force acting on the probe constant.
A potential distribution measuring device for measuring the potential distribution on the recording medium from the control amount by the interval control means. 3. The apparatus according to claim 1, further comprising bias voltage control means for applying a bias voltage between the probe and the recording medium and controlling the bias voltage so as to keep the action of the electrostatic force acting on the probe constant. Prepare,
A potential distribution measuring device for measuring a potential distribution on a recording medium based on a control amount by a bias voltage control means. 4. The potential distribution measuring device according to claim 1, wherein the detecting means detects an electrostatic force by detecting a mechanical displacement of the probe. 5. The apparatus according to claim 1, further comprising vibration excitation means for vibrating the probe at its natural frequency, and the detection means detects electrostatic force by detecting a change in vibration amplitude of the probe due to electrostatic force. An electric potential distribution measuring device characterized by detecting electric potential. 6. The apparatus according to claim 1, further comprising a vibration excitation means for vibrating the probe at its natural frequency, and the detection means detects static electricity by detecting a change in natural frequency of the probe due to electrostatic force. A potential distribution measuring device characterized by detecting force. 7. The potential distribution measuring device according to claim 2, wherein the distance control means controls the distance between the probe and the recording medium so as to keep the mechanical displacement of the probe constant. 8. The apparatus according to claim 2, further comprising vibration excitation means for vibrating the probe at its natural frequency, and the interval control means between the probe and the recording medium so as to keep the vibration amplitude of the probe constant. A potential distribution measuring device characterized by controlling the distance between the two. 9. The apparatus according to claim 2, further comprising a vibration excitation means for vibrating the probe at its natural frequency, and said interval control means maintaining the probe's natural frequency constant. An electric potential distribution measuring device characterized by controlling a distance between them. 10. The potential distribution measurement according to claim 3, wherein the bias voltage control means controls the bias voltage between the probe and the recording medium so as to keep the mechanical displacement of the probe constant. apparatus. 11. The apparatus according to claim 3, further comprising vibration excitation means for vibrating the probe at its natural frequency, wherein the bias voltage control means keeps the vibration amplitude of the probe constant. A potential distribution measuring device characterized by controlling a bias voltage between them. 12. The apparatus according to claim 3, further comprising a vibration excitation means for vibrating the probe at its natural frequency, wherein the bias voltage control means keeps the natural frequency of the probe constant. A potential distribution measuring device characterized by controlling a bias voltage between recording media.