JPH06337623A - Method and device for generating hologram original plate - Google Patents

Abstract

PURPOSE:To generate the hologram original plate having satisfactory reproducibility and a distinct hologram image. CONSTITUTION:By a picture pattern generating device (picturing device) 1, a picture pattern P which becomes a motif is generated, and this graphic data is given to a diffraction grating pattern generating device 2. In a closed area of this picture pattern P, a diffraction grating pattern G in which slender quadrangles g1, g2 and g3 having minute width d1 being suitable for generating a diffraction phenomenon are arranged at a prescribed interval d2 and at a prescribed angle alpha is generated. In a plotting data generating device 3, graphic data of this diffraction grating pattern G is converted to prescribed plotting data, and by a charged particle beam plotting device 4, this pattern is plotted and becomes a hologram original plate.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for producing a hologram original plate, and more particularly, a method and an apparatus for producing a hologram original plate suitable for producing an original of a security hologram sticker for certifying an authentic article. Regarding

[0002]

2. Description of the Related Art Hologram stickers are used as a means for preventing counterfeiting of credit cards, bankbooks, cash vouchers and the like. In addition, hologram seals are used for products such as video tapes and luxury watches to prevent pirated copies from circulating. In addition, hologram stickers are also used for purposes such as decoration and sales promotion. In such a hologram sticker, a two-dimensional picture is often used as a motif instead of a three-dimensional stereoscopic image.

In order to produce such a hologram seal original plate, an optical hologram photographing method of forming interference fringes using a laser beam is usually used. That is, prepare a manuscript with a two-dimensional design motif and
The original is irradiated with one of the two branched laser lights, and the reflected light is interfered with the other branched laser light to record the interference fringes on the photosensitive material. After the hologram master plate is created in this manner, hologram seals can be mass-produced using the master plate by a pressing method.

[0004]

However, the above-mentioned conventional optical hologram photographing method has a problem that a clear hologram image cannot be obtained. That is, since the optically formed interference fringe is sensitive to vibration, it is necessary to perform hologram imaging in an environment in which vibration is completely eliminated. However, it is difficult to completely eliminate the vibration even when shooting with a vibration-proof table with considerable accuracy.
Therefore, so-called "blur" occurs in the recorded image of the interference fringes,
A bright hologram image with contrast cannot be obtained. Further, since the oscillation wavelength of the laser light used also fluctuates, spider glass noise cannot be avoided. As described above, since there is a problem of poor reproducibility in optical hologram photographing, it is difficult to make several same original plates.

Therefore, an object of the present invention is to provide a method and an apparatus for producing a hologram original plate which can obtain a clear hologram image and has good reproducibility.

[0006]

[Means for Solving the Problems]

(1) In the first invention of the present application, a first step of creating a picture pattern to be recorded as a hologram and a closed area forming the picture pattern have a minute width and a minute area suitable for causing a diffraction phenomenon. A long and narrow rectangle with a defined minute width, which defines the interval and a predetermined angle,
Distinguish between the second step of creating a diffraction grating pattern by arranging it in a closed area at a defined predetermined angle and a minute interval, and the inside area and the outside area of each quadrangle forming the diffraction grating pattern. A third step of creating drawing data for drawing the binary pattern by the charged particle beam drawing apparatus, and a fourth step of giving the drawing data to the charged particle beam drawing apparatus to draw a diffraction grating pattern;
The hologram original plate is created by.

(2) A second invention of the present application is, in the method for producing a hologram original plate according to the above-mentioned first invention, in the first step, producing a pattern pattern expressed by multiple loops,
In the second stage, the diffraction grating pattern is created by defining the region surrounded by one loop or the region between two adjacent loops as individual closed regions.

(3) A third invention of the present application is, in the method for producing a hologram original plate according to the above-mentioned first invention, in the first step, a pattern represented by a set of a plurality of pixels having binary information. A pattern is created, and in the second step, a diffraction grating pattern is created with each pixel as an individual closed region.

(4) The fourth invention of the present application is such that, in the hologram original plate producing method according to the above-mentioned first to third inventions, the charged particle beam is scanned on the XY two-dimensional plane in the fourth step. The drawing is performed using a drawing device capable of performing the drawing, and in the second step, a first parallelogram whose two sides are both parallel to the Y axis, or two sides are both parallel to the X axis. One of the parallel second parallelograms is used as an elongated quadrangle to form a diffraction grating pattern.

(5) A fifth invention of the present application is the method for producing a hologram original plate according to the above-mentioned fourth invention, wherein a predetermined angle θ (0 ° <θ <90 °) is determined and a side in the longitudinal direction is X. The first parallelogram is used for a quadrangle arranged at an angle within the range of −θ to + θ with respect to the axis, and the second parallelogram is used for a quadrangle arranged at an angle outside the above range. It was done like this.

(6) A sixth aspect of the invention of the present application is, in a hologram master production apparatus, a pattern generation apparatus for producing a picture pattern to be recorded as a hologram, and a closed area forming the picture pattern, a diffraction phenomenon occurs. By setting a minute width and minute interval suitable for the, and a predetermined angle, and arranging elongated quadrangles with a minute width in the closed area at a predetermined angle and minute interval, a diffraction grating pattern is formed. Drawing device for creating a diffraction grating pattern, and drawing data for creating a drawing data for drawing a binary pattern that distinguishes the inner area and the outer area of each quadrangle forming the diffraction grating pattern by the charged particle beam drawing apparatus A creation device and a charged particle beam drawing device for drawing a diffraction grating pattern on a physical original plate based on drawing data are provided. It is a thing.

[0012]

[Operation] A feature of the method for producing a hologram master according to the present invention is that a hologram pattern is recorded on the master by drawing with a charged particle beam instead of the conventional optical hologram photographing method. Therefore, first, in the first stage, a two-dimensional pattern pattern composed of closed areas is prepared. Then, in the second stage, a large number of elongated rectangles are arranged in the closed region. Since the elongated quadrangles have a minute width and are arranged at minute intervals, a diffraction grating pattern is formed. In the subsequent third step, binary pattern data that distinguishes the inside and the outside of the quadrangle is created. For example, binary pattern data in which the inner area is the drawing area and the outer area is the non-drawing area is created. In the final fourth step, drawing with a charged particle beam is performed based on this binary pattern data. By performing the drawing with the charged particle beam in this manner, a clear hologram image can be obtained, and by using the same drawing data, the same hologram image can be obtained, and thus the reproducibility is very good.

In general, the word "hologram" is used as a word indicating an image obtained by interference fringes. From such a meaning, the image formed on the original plate by the method of the present application is "hologram". It should be called "diffraction grating pattern" instead of "." However, since the anti-counterfeit seal mass-produced from this original plate is generally called a "hologram seal", in this specification, the "diffraction grating pattern" created on the original plate is also called the "hologram". Will be used.

[0014]

The present invention will be described below based on illustrated embodiments. FIG. 1 is a block diagram showing the basic configuration of a hologram master production device according to the present invention. The basic constituent elements of this device are a pattern pattern creating device 1, a diffraction grating pattern creating device 2, a drawing data creating device 3, and a charged particle beam drawing device 4. The patterns and the like shown on the right of each block are conceptual diagrams showing the creations by each device.

The picture pattern creating apparatus 1 is an apparatus having a function of creating a picture pattern P to be recorded as a hologram, and in this embodiment, it is constituted by a personal computer equipped with a drawing program. The picture pattern P created by this apparatus is expressed as a motif in the final hologram master plate. In the example shown in FIG. 1, this picture pattern creating apparatus 1
Although a simple circle graphic is shown as the picture pattern P created by, a picture pattern that actually uses a more complicated motif is created. The drawing system having the function of creating such a picture pattern P is
Since various things are known, detailed description is omitted here. It should be noted that if a device provided with a scanner device is used as the picture pattern creation apparatus 1, it is possible to take in the picture pattern drawn on the paper surface. In any case, the picture pattern creating apparatus 1 prepares a desired picture pattern P in the form of graphic data.

The diffraction grating pattern forming device 2 has a minute width and a minute interval suitable for causing a diffraction phenomenon and a predetermined angle with respect to a closed region constituting the pattern pattern P created by the pattern pattern creating device 1. The definition has a function of creating a diffraction grating pattern by arranging elongated quadrangles having a defined minute width in a closed region at a defined predetermined angle and a minute interval. A device having such a function can also be realized by a personal computer. That is, it is sufficient to input the pattern pattern P created by the pattern pattern creating apparatus 1 as graphic data and prepare a processing program for generating a diffraction grating pattern based on an instruction input by the operator. A diffraction grating pattern created based on the simple circular pattern pattern P shown in FIG. 1 is, for example, a diffraction grating pattern G shown in the figure. This pattern G consists of three elongated rectangles g
1, g2 and g3, each quadrangle has a width d1 and is arranged parallel to each other at an interval d2 in a direction such that its longitudinal direction forms an angle α with respect to a predetermined reference direction. There is. The operator may input the width d1, the interval d2, and the angle α of the quadrangle, and also input the inside portion of the picture pattern P as a closed area. The diffraction grating pattern creating device 2 inscribes, for the instructed closed region figure P, inscribed quadrangles g1 and g that satisfy the instructed condition.
Graphic data corresponding to 2 and g3 are generated. Thus
The diffraction grating pattern G will be obtained.

The squares g1, g2 and g3 shown in FIG.
Is a quadrangle having a relatively small aspect ratio for convenience of description, but in reality, the width d1 and the arrangement interval d2 of each quadrangle are small enough to generate a diffraction phenomenon (for example, about 1 μm). ), The longitudinal dimension of each quadrangle is the length required to traverse the designated closed region (for example, about several mm), and these quadrilaterals have a very large aspect ratio. Is.

The drawing data creating device 3 is a charged particle beam drawing device that draws a binary pattern that distinguishes the internal region and the external region of each quadrangle forming the diffraction grating pattern G created by the diffraction grating pattern creating device 2. Has a function of creating drawing data for drawing. The binary pattern B shown in FIG. 1 is a binary pattern in which an area inside each of the quadrangles g1, g2, and g3 forming the diffraction grating pattern G is a drawing area and an outside area is a non-drawing area. The data output from the creation device 3 is drawing data corresponding to such a binary pattern B. This drawing data will be described in the format required by the charged particle beam drawing apparatus 4. In short, the processing performed by the drawing data creation device 3 is performed by converting the graphic data corresponding to the diffraction grating pattern G into the charged particle beam drawing device 4
Is a process for converting into drawing data that can be handled. For example, when a general electron beam drawing apparatus for making a photomask is used as the charged particle beam drawing apparatus 4, a data converter provided for this drawing apparatus (for example, an electronic device manufactured by JEOL Ltd. When the beam drawing apparatus is used, a data conversion apparatus that performs “JEOL (registered trademark) conversion” can be used as the drawing data creation apparatus 3.

The charged particle beam drawing device 4 is a device having a function of performing beam scanning based on the drawing data created by the drawing data creating device 3 and drawing the binary pattern B on the original plate. Specifically, as mentioned above,
A commercially available electron beam drawing apparatus for making a photomask may be used. By performing electron beam scanning with this device, the binary pattern B can be drawn on the original plate,
The hologram original plate H can be obtained.

The above is the basic principle of the method for producing a hologram master according to the present invention. As described above, in the system of FIG. 1, a general CAD device may be used as the picture pattern creating device 1, and the drawing data creating device 3 and the charged particle beam drawing device 4 are generally commercially available drawing devices. Since a data conversion device for this drawing device may be used, in practice, this method can be implemented by preparing a program for executing the function of the diffraction grating pattern creating device 2. As described above, in the method of the present invention, the writing data corresponding to the binary pattern B can be prepared by data processing by a computer, and the writing data is given to the charged particle beam drawing device 4 to produce the hologram master plate. Since H is drawn, the reproducibility is very good. That is, if the same drawing data is used, almost the same hologram master plate can be obtained. Further, since the image on the hologram master is not an optically formed interference fringe image but an image formed by drawing with a charged particle beam, it becomes very clear.

Next, a more specific embodiment of the present invention will be disclosed below. As described above, the picture pattern creation device 1 is a general drawing device, and the picture pattern P created by such a drawing device is roughly classified into two.
There are two types of data formats. The first type is a data format generally called "draw system", which expresses contour lines by vector data. The second type is a data format generally called "paint system" and represents the entire pattern in raster data. The present invention can be applied to any of these data format picture patterns.

Therefore, first, let us consider a case where a "draw type" drawing apparatus is used as the picture pattern forming apparatus 1. For example, suppose that a picture pattern as shown in FIG. 2 (a) has been created. This picture pattern has contour lines C1 and C
The pattern is composed of 2 and this contour line is represented by vector data. The diffraction grating pattern creating apparatus 2 takes in such vector data and generates a diffraction grating pattern as shown in FIG. 2 (b). As shown in FIG. 2 (a), the contour line C1,
By C2, this picture pattern is a region, 3
Although it is divided into two closed areas, the operator specifies which area in which the diffraction grating pattern is to be generated, and the width, arrangement interval, and arrangement of the quadrangles forming the diffraction grating pattern to be generated. It will indicate the angle. However, if the width of the quadrangle and the arrangement interval are set to have predetermined set values at all times, the operator need only indicate the arrangement angle. As described above, the diffraction grating pattern is formed by a quadrangle having a minute width, but in the following description, this will be simply shown by one line. Further, in the actual diffraction grating pattern, the line spacing is much narrower than that shown and the density is high.

In the example shown in FIG. 2 (b), a diffraction grating pattern is formed in one closed area in the same direction. However, as shown in FIG. The direction of the diffraction grating pattern may be changed for each closed region. The value of α shown in FIG. 3 indicates the angle of the diffraction grating pattern (the angle in the longitudinal direction of a quadrangle having a minute width: hereinafter referred to as the grating angle) with reference to the horizontal direction of the figure. . Of course, it is also possible to change the width and arrangement interval of the quadrangle for each closed region. The width and arrangement interval of the quadrangle are parameters that determine the color of light observed from the hologram, and the grating angle is a parameter that determines the direction in which light is observed.

The picture pattern shown in FIG. 4 is an example in which the lattice angle is changed for each of the nine closed regions (the lattice pattern is not shown for some closed regions). A strip-shaped 9
When the picture pattern composed of one closed region is created, the diffraction grating pattern creating device 2 may specify the grating angle as shown by each value of α in FIG. In this example, the lattice angle α of the leftmost closed region is set to −40 °, and the lattice angle α of the rightmost closed region is set to 40 °, and α increases by 10 ° as it goes to the right closed region. It is set to Since the diffraction grating pattern creating apparatus 2 is originally a computer, “set the grating angle α of each closed region so as to start from α = −40 ° and increase by 10 °”.
A desired diffraction grating pattern can be generated only by giving such an instruction. In this way, when creating a diffraction grating pattern that gradually changes the grating angle,
When tilted, it is possible to create a hologram that has the effect of allowing light to flow from side to side.

The picture pattern shown in FIG. 5 has four concentric circles.
This is an example in which the lattice angle is changed for each of the two closed regions (again, the illustration of the lattice pattern is omitted for some closed regions). The lattice angle α is set to α = −30 ° in the outer closed region, and thereafter, the lattice angle α increases by 20 ° inward. By using a picture pattern expressed by such a multiple loop, a variety of pictures can be formed even with a simple motif. In the example shown in FIG. 5, a simple circle is used as a motif, but this is represented by multiple loops, and a region surrounded by one loop or a region between two adjacent loops is treated as an individual closed region. Therefore, a variety of patterns are formed as a whole. By using such a multiple loop, even a simple graphic such as a so-called heart shape or a star shape can be expressed as a relatively diverse pattern even if it is used as a motif.

Next, as the picture pattern forming apparatus 1,
Consider the case where a "paint-based" drawing device is used. A picture pattern created using a "paint-type" drawing device is represented by raster data and is a set of a plurality of pixels having binary information. In order to create a diffraction grating pattern in the diffraction grating pattern creating apparatus 2 based on such picture data, each pixel may be treated as an individual closed area, and a diffraction grating pattern may be created in each closed area. For example, it is assumed that the picture pattern creating apparatus 1 has created a picture pattern as shown in FIG.
This picture pattern is a pattern composed of a plurality of pixels arranged vertically and horizontally, and each pixel has a state of either "white" or "black". The diffraction grating pattern creating device 2 is
Capture such raster data, eg "black"
A diffraction grating pattern is generated in the pixel of, and a diffraction grating pattern as shown in FIG. 7 is generated as a whole. Of course, the operator can instruct the width, arrangement interval, and grating angle of the quadrangles that form the diffraction grating pattern to be generated. In the hologram having such a diffraction grating pattern, the diffracted light can be obtained only from the “black” pixels, and the pattern pattern can be recognized as a whole.

It should be noted that the method according to the present invention can use rectangular pixels. When a hologram original plate for a document including a plurality of pixels is formed by a conventional method, each pixel is generally circular. This is because the conventional method optically records pixels, and therefore rectangular pixels tend to have their four corners blurred. That is, when performing optical processing on a fine pixel, it is general common sense to make each pixel circular. On the other hand, in the method according to the present invention, the charged particle beam drawing apparatus 4 draws the diffraction grating pattern defined in each pixel, so that even if the pixel is rectangular, the four corners are not blurred and always clear. It is possible to draw various pixels. Since the rectangular pixel can increase the pixel density as compared with the circular pixel, a bright hologram image can be obtained by adopting the rectangular pixel.

As described above, the diffraction grating pattern shown as a set of lines in FIGS. 2 to 7 is actually a quadrangle having a minute width. In the description with reference to FIG. 1, as a method of generating such quadrangles g1, g2, g3, it has been described that an inscribed quadrangle inscribed in the contour line of the picture pattern P may be obtained. However, since such an inscribed quadrangle becomes an arbitrary quadrangle, when an electron beam drawing apparatus for making a photomask is used as the charged particle beam drawing apparatus 4, drawing takes time. Therefore, when such an electron beam drawing apparatus is used, each quadrangle may be a parallelogram (including a rectangle) instead of an arbitrary quadrangle. Specifically, as shown in FIG. 8, when the XY two-dimensional coordinate system is defined and the lattice angle α (the angle formed by the long side L) is defined with the X axis as a reference, −45 °
When the lattice angle α within the range of ≦ α ≦ 45 ° is set, both of the two short sides S are Y as shown in FIG. 8 (a).
Using a parallelogram that is parallel to the axis, 45 ° <α ≤ 90 °
And a lattice angle α within the range of −90 ° <α <−45 ° is set, a parallelogram whose two short sides S are both parallel to the X axis as shown in FIG. 8 (b). Should be used.

In an electron beam drawing apparatus for making a photomask on an XY two-dimensional plane, a pair of opposite sides form a parallelogram whose parallel sides are parallel to the X axis or the Y axis, as compared with the work of drawing an arbitrary quadrangle. The work of drawing is more efficient. For example, as shown in Figure 9 (a),
When drawing a parallelogram Z whose upper and lower sides are parallel to the X axis,
The process of scanning the electron beam spot E in the area within the parallelogram Z is sufficient. However, in the case of an arbitrary quadrangle as shown in FIG.
(A parallelogram whose upper and lower sides are parallel to the X axis) and a triangle Z
It is necessary to perform processing by dividing into three figures of 1 and Z2. In this way, considering the work efficiency in the drawing stage, the diffraction grating pattern created by the diffraction grating pattern creating apparatus 2 should be a parallelogram as shown in FIGS. 8 (a) and 8 (b). preferable. In fact, in the parallelogram shown in FIG. 8, the long side L is much longer than the short side S, so even if the parallelogram is used instead of the inscribed quadrangle, the shape of the pattern is It has almost no effect. It should be noted that although the grid angle α = ± 45 ° is used as a boundary here as a discrimination criterion for whether to use the parallelogram shown in FIG. 8A or the parallelogram shown in FIG. 8B. The boundary angle θ does not necessarily have to be 45 ° and can be set arbitrarily.

Although the present invention has been described above based on the illustrated embodiment, the present invention is not limited to this embodiment and can be implemented in various modes other than this. For example, in the above-described embodiment, the electron beam drawing device is used as the charged particle beam drawing device 4, but an ion beam drawing device may be used. Further, in the embodiment shown in FIGS. 6 and 7, the picture pattern having rectangular pixels is used, but a picture pattern having circular pixels as in the conventional art may be used (the pixel density can be improved. In terms of
As mentioned earlier, rectangular pixels are better).

[0031]

As described above, according to the method and apparatus for producing a hologram master according to the present invention, a hologram pattern is formed on the master by drawing with a charged particle beam instead of the conventional optical hologram photographing method. Since the recording is performed, a clear and reproducible hologram image can be obtained.

[Brief description of drawings]

FIG. 1 is a block diagram showing a basic configuration of an apparatus for producing a hologram master according to the present invention.

FIG. 2 is a diagram showing an example in which a diffraction grating pattern is formed for a picture pattern created by a draw type drawing apparatus.

FIG. 3 is a diagram showing an example in which the pattern pattern shown in FIG. 2 is divided into a plurality of closed regions, and diffraction grating patterns are formed at different angles for each closed region.

FIG. 4 is a diagram showing an example in which a diffraction grating pattern is formed in a plurality of strip-shaped closed regions while gradually changing the grating angle.

FIG. 5 is a diagram showing an example in which a diffraction grating pattern is formed in a plurality of concentric closed regions while gradually changing the grating angle.

FIG. 6 is a diagram showing an example of a picture pattern composed of a plurality of pixels created by a paint type drawing apparatus.

FIG. 7 is a diagram showing an example in which a diffraction grating pattern is formed for the picture pattern shown in FIG.

FIG. 8 is a view showing that the short side S is the X-axis or the Y-axis as a square having a minute width which constitutes a diffraction grating pattern in the method of the present invention.
It is a figure which shows the example which uses the parallelogram parallel to an axis.

FIG. 9 is a diagram for explaining the merits of using the parallelogram shown in FIG.

[Explanation of symbols]

 1 ... Picture pattern creating device 2 ... Diffraction grating pattern creating device 3 ... Drawing data creating device 4 ... Charged particle beam drawing device B ... Binary pattern C1, C2 ... Contour line E ... Electron beam spot G ... Diffraction grating pattern g1, g2 , G3 ... Inscribed quadrangle H ... Hologram master plate L ... Long side of parallelogram P ... Picture pattern S ... Short side of parallelogram Z, Z0 ... Parallelogram Z1, Z2 ... Triangle α ... Lattice angle ~ ... Closed area

Claims (6)

[Claims] 1. A first step of creating a picture pattern to be recorded as a hologram, and a closed region forming the picture pattern, having a minute width and minute interval suitable for causing a diffraction phenomenon, and a predetermined distance. A second step of creating an diffraction grating pattern by defining an angle and arranging the elongated quadrangles having a minute width in the closed region at the predetermined angle and the minute interval; A third step of creating drawing data for drawing a binary pattern by a charged particle beam drawing apparatus that distinguishes an internal area and an external area of each quadrangle forming the pattern; And a fourth step of applying the pattern to a drawing device to draw the diffraction grating pattern. 2. The method according to claim 1, wherein in the first step, a pattern pattern expressed by multiple loops is created, and in the second step, a region surrounded by one loop or adjacent two is formed. A method for producing a hologram master plate, characterized in that an area between two loops is formed as an individual closed area to form a diffraction grating pattern. 3. The method according to claim 1, wherein in the first step, a picture pattern represented by a set of a plurality of pixels having binary information is created, and in the second step, each of the pixels is formed. A method for producing a hologram master plate, characterized in that a diffraction grating pattern is produced with each closed region as a closed region. 4. The method according to claim 1, wherein in the fourth step, drawing is performed using a drawing device capable of scanning a charged particle beam on an XY two-dimensional plane, A first parallelogram whose two sides are both parallel to the Y-axis, or a second parallelogram whose two sides are both parallel to the X-axis, A method for producing a hologram master plate, characterized in that a diffraction grating pattern is produced by using one of them as an elongated rectangle. 5. The method according to claim 4, wherein a predetermined angle θ (0 ° <θ <90 °) is defined, and a side in the longitudinal direction is an angle within a range of −θ to + θ with respect to the X axis. A method for producing a hologram original plate, wherein a first parallelogram is used for a quadrangle to be arranged, and a second parallelogram is used for a quadrangle to be arranged at an angle outside the range. 6. A picture pattern creating device for creating a picture pattern to be recorded as a hologram, and a closed region forming the picture pattern, having a minute width and minute space suitable for causing a diffraction phenomenon, and a predetermined area. A diffraction grating pattern creating apparatus for creating a diffraction grating pattern by setting an angle and arranging the elongated quadrangles having the minute width in the closed region at the predetermined angle and the minute interval, A drawing data creation device that creates drawing data for drawing a binary pattern that distinguishes the internal area and the external area of each quadrangle forming the lattice pattern by the charged particle beam drawing apparatus, and based on the drawing data And a charged particle beam drawing device for drawing the diffraction grating pattern on a physical original plate. Lamb precursor of the creation device.