JPH06320366A - Table device and assembly method thereof - Google Patents
Table device and assembly method thereofInfo
- Publication number
- JPH06320366A JPH06320366A JP11474793A JP11474793A JPH06320366A JP H06320366 A JPH06320366 A JP H06320366A JP 11474793 A JP11474793 A JP 11474793A JP 11474793 A JP11474793 A JP 11474793A JP H06320366 A JPH06320366 A JP H06320366A
- Authority
- JP
- Japan
- Prior art keywords
- stone surface
- surface plate
- plate
- mounting
- movable machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B47/00—Porphines; Azaporphines
- C09B47/04—Phthalocyanines abbreviation: Pc
- C09B47/06—Preparation from carboxylic acids or derivatives thereof, e.g. anhydrides, amides, mononitriles, phthalimide, o-cyanobenzamide
- C09B47/073—Preparation from isoindolenines, e.g. pyrrolenines
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Machine Tool Units (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、例えば、半導体製造装
置等に備えられ、高精度な位置決めに利用されるテ−ブ
ル装置及びその組立方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a table device provided in a semiconductor manufacturing apparatus or the like and used for highly accurate positioning, and an assembling method thereof.
【０００２】[0002]
【従来の技術】例えば、半導体の製造や検査には、ウエ
ハやマスク等の作業対象を高精度に位置決めするテ−ブ
ル装置が利用されている。この種のテ−ブル装置におい
ては、ＸＹテ−ブル等の可動機械部分が、精密に仕上げ
られた石定盤に取り付けられることが多い。石定盤が利
用される理由として、石定盤の振動外乱に対する吸収性
が比較的高いこと、高い精度の平面に加工し易いこと等
が挙げられる。2. Description of the Related Art For example, in the manufacture and inspection of semiconductors, a table device for positioning a work object such as a wafer or a mask with high accuracy is used. In this type of table device, a movable mechanical part such as an XY table is often attached to a precisely finished stone surface plate. The reason why the stone surface plate is used is that the stone surface plate has relatively high absorbability against vibration disturbance, and that it can be easily processed into a highly accurate flat surface.
【０００３】可動機械部分が石定盤に取り付けられる際
には、通常図４に示すように、石定盤１の凹陥部２に金
具３が埋め込まれ、可動機械部分のレ−ル５等が石定盤
１にボルト締される。金具３には予めボルト孔４が設け
られている。金具３は、石定盤１の孔開け加工が済んだ
後、凹陥部２に接着される。そして、レ−ル５の複数箇
所が、このような連結構造によって石定盤１に固定され
る。When the movable machine part is attached to the stone surface plate, as shown in FIG. 4, the metal fitting 3 is usually embedded in the recessed portion 2 of the stone surface plate 1 so that the rail 5 and the like of the movable machine part are attached. It is bolted to the stone surface plate 1. The metal fitting 3 is provided with a bolt hole 4 in advance. The metal fitting 3 is bonded to the recessed portion 2 after the boring process of the stone surface plate 1 is completed. Then, a plurality of points of the rail 5 are fixed to the stone surface plate 1 by such a connecting structure.
【０００４】[0004]
【発明が解決しようとする課題】ところで、上述のよう
な金具３を石定盤１に埋め込んで接着する場合、石定盤
１と金具表面との間に隙間があくことがある。また、接
着力が金具３の表面積によって制限されるため、接着力
はあまり強くない。このため、ボルト６の締め付け力を
不用意に大とすると、金具３が石定盤１から浮いてしま
う場合がある。By the way, when the metal fitting 3 as described above is embedded in the stone surface plate 1 and adhered thereto, there may be a gap between the stone surface plate 1 and the surface of the metal fitting. Further, since the adhesive force is limited by the surface area of the metal fitting 3, the adhesive force is not so strong. Therefore, if the tightening force of the bolt 6 is carelessly increased, the metal fitting 3 may float from the stone surface plate 1.
【０００５】また、例えばレ−ル５が転がり式のリニア
ガイドのものである場合、レ−ル自身の曲りを矯正しな
がら、レ−ル５を石定盤１の取付け面７に沿わせる必要
がある。しかし、石定盤１と金具３との間の段差を原因
としてレ−ルに上下方向の曲りが生じる。さらに、ボル
ト６を過度に強く締め付けると、金具が浮上がり、レ−
ル５の固定が不完全になる。また、逆にボルト６の締め
付け力が弱すぎると、組立て後に、小さな力によってレ
−ル５が曲ってしまう。Further, for example, when the rail 5 is a rolling type linear guide, it is necessary to align the rail 5 with the mounting surface 7 of the stone surface plate 1 while correcting the bending of the rail itself. There is. However, the rail bends in the vertical direction due to the step between the stone surface plate 1 and the metal fitting 3. Furthermore, if the bolt 6 is tightened excessively, the metal fitting will rise and the
Fixing of rule 5 becomes incomplete. On the contrary, if the tightening force of the bolt 6 is too weak, the rail 5 will be bent by a small force after assembly.
【０００６】特に、細いレ−ルを使用する場合には、小
さい金具が多数用いられるため、金具３と石定盤１との
間の接着力が弱く、この傾向が強く現れる。結局、レ−
ル５の取付け精度のうち真直度（上下・左右方向）が低
くなり、リニアガイドの運転中の信頼性が悪影響を受け
る。本発明の目的とするところは、可動機械部分を石定
盤に精度よく取り付けることが可能なテ−ブル装置及び
その組立方法を提供することにある。In particular, when a thin rail is used, a large number of small metal fittings are used, so that the adhesive force between the metal fitting 3 and the stone surface plate 1 is weak, and this tendency becomes strong. After all,
The straightness (vertical / horizontal direction) of the mounting accuracy of the cable 5 becomes low, and the reliability of the linear guide during operation is adversely affected. It is an object of the present invention to provide a table device and a method for assembling the table device that allows the movable machine part to be accurately attached to the stone surface plate.
【０００７】[0007]
【課題を解決するための手段および作用】上記目的を達
成するために請求項１の発明は、石定盤に可動機械部分
を取付けてなるテ−ブル装置において、石定盤と可動機
械部分との間に取付け板を介在させ、取付け板によって
可動機械部分の石定盤への取付け部の平面度を調整し、
可動機械部分を石定盤に取付けたテ−ブル装置である。In order to achieve the above object, the invention of claim 1 is a table apparatus in which a movable machine part is attached to a stone surface plate. A mounting plate is interposed between the two, and the mounting plate adjusts the flatness of the mounting part of the movable machine part to the stone surface plate,
It is a table device in which the movable machine part is attached to a stone surface plate.
【０００８】また、請求項２の発明は、石定盤に可動機
械部分を取付けるテ−ブル装置の組立方法において、石
定盤に取付け板に固定したのち、取付け板に可動機械部
分を固定し、取付け板によって可動機械部分の石定盤へ
の取付け部の平面度を調整し、可動機械部分の取付け精
度を確保したテ−ブル装置の組立方法である。そして、
これらの発明は、可動機械部分を石定盤に精度よく取り
付けられるようにした。According to a second aspect of the present invention, in the method of assembling the table device for mounting the movable mechanical part on the stone surface plate, the movable mechanical portion is fixed on the mounting plate after the stone surface plate is fixed to the mounting plate. A method of assembling a table device in which the mounting plate is used to adjust the flatness of the mounting portion of the movable machine portion to the stone surface plate to ensure the mounting accuracy of the movable machine portion. And
In these inventions, the movable machine part can be accurately attached to the stone surface plate.
【０００９】[0009]
【実施例】以下、本発明の一実施例を図１〜図３に基づ
いて説明する。なお、従来の技術の項で説明したものと
重複するものについては同一番号を付し、その説明は省
略する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. The same parts as those described in the section of the prior art are designated by the same reference numerals, and the description thereof will be omitted.
【００１０】図１は本発明の一実施例を示すもので、図
中の符号１１はテ−ブル装置である。このテ−ブル装置
１１においては、石定盤１の上に取付け板１２、１２を
介して、可動機械部分としてのＸＹテ−ブル１３が取付
けられている。FIG. 1 shows an embodiment of the present invention. Reference numeral 11 in the drawing is a table device. In this table device 11, an XY table 13 as a movable machine part is mounted on the stone surface plate 1 via mounting plates 12 and 12.
【００１１】ＸＹテ−ブル１３は、Ｘテ−ブル１４、Ｙ
テ−ブル１５、ＤＣモ−タ（以下、モ−タと称する）１
６、１７、ボ−ルねじ１８、１９、及び、リニアガイド
２０、２１等を備えている。両テ−ブル１４、１５は取
付け板１２、１２の上に上下に重ねられている。一方の
モ−タ１６及びボ−ルねじ１８は石定盤１の平坦面２２
に取付けられており、他方のモ−タ１７及びボ−ルねじ
１９は下側のＸテ−ブル１４に取付けられている。そし
て、各ＤＣモ−タ１６、１７の動力がボ−ルねじ１８、
１９を介して各テ−ブル１４、１５に伝達され、各テ−
ブル１４、１５が直交する二軸（Ｘ軸、Ｙ軸）に変位す
る。The XY table 13 is an X table 14, Y.
Table 15, DC motor (hereinafter referred to as motor) 1
6, 17, ball screws 18, 19 and linear guides 20, 21 and the like. Both tables 14 and 15 are vertically stacked on the mounting plates 12 and 12. One of the motors 16 and the ball screws 18 is a flat surface 22 of the stone surface plate 1.
The other motor 17 and the ball screw 19 are attached to the lower X table 14. The power of each DC motor 16, 17 is the ball screw 18,
It is transmitted to each table 14 and 15 via 19 and each table.
The bulls 14 and 15 are displaced in two orthogonal axes (X axis and Y axis).
【００１２】各テ−ブル１４、１５の変位の際には、リ
ニアガイド２０、２１が各テ−ブル１４、１５を案内す
る。リニアガイド２０、２１は転がり式のもので、それ
ぞれ二本ずつのレ−ル２２、２３、２４、２４を有して
いる。上側のＹテ−ブル１５のためのレ−ル２４、２４
は下側のＸテ−ブル１４に取付けられており、Ｙテ−ブ
ル１５はこれらレ−ル２４、２４により案内されながら
直線変位する。When the tables 14 and 15 are displaced, the linear guides 20 and 21 guide the tables 14 and 15, respectively. The linear guides 20 and 21 are of a rolling type and each have two rails 22, 23, 24 and 24. Rails 24, 24 for the upper Y-table 15
Is attached to the lower X table 14, and the Y table 15 is linearly displaced while being guided by these rails 24, 24.
【００１３】また、Ｘテ−ブル１４のためのレ−ル２
３、２３は前記取付け板１２、１２に取付けられてお
り、取付け板１２、１２を介して石定盤１に固定されて
いる。そして、Ｘテ−ブル１４は、Ｙテ−ブル１５を保
持しながら、これらのレ−ル２３、２３に沿って変位す
る。レ−ル２３、２３の取付け板１２、１２への固定は
ボルト２５…によって行われている。A rail 2 for the X table 14 is also provided.
Reference numerals 3 and 23 are attached to the attachment plates 12 and 12, and are fixed to the stone surface plate 1 via the attachment plates 12 and 12. Then, the X table 14 is displaced along these rails 23, 23 while holding the Y table 15. The rails 23, 23 are fixed to the mounting plates 12, 12 by bolts 25 ...
【００１４】なお、上側のレ−ル２４、２４の固定を、
下側のレ−ル２３、２３と同様にボルトを利用して行う
ことが可能である。各取付け板１２は、例えば金属製の
もので、その上下の板面２６、２７はμｍオ−ダの高い
平面度で加工されている。また、取付け板１２は複数の
ボルト６…によって石定盤１に固定されている。図２及
び図３に示すようにボルト６の頭部２８は取付け板１２
の凹陥部２９に収まっており、軸部３０は取付け板１２
を貫通している。さらに、石定盤１には金具３が埋め込
まれており、ボルト６は金具３に螺合している。金具３
の表面は石定盤１の凹陥部２に接着されている。The upper rails 24, 24 are fixed by
It is possible to use a bolt like the lower rails 23, 23. Each mounting plate 12 is made of metal, for example, and the upper and lower plate surfaces 26 and 27 are processed to have a high flatness of the order of μm. The mounting plate 12 is fixed to the stone surface plate 1 by a plurality of bolts 6 ... As shown in FIGS. 2 and 3, the head portion 28 of the bolt 6 is attached to the mounting plate 12.
It is accommodated in the concave portion 29 of the shaft 30, and the shaft portion 30 is attached to the mounting plate 12.
Penetrates through. Further, a metal fitting 3 is embedded in the stone surface plate 1, and a bolt 6 is screwed into the metal fitting 3. Metal fittings 3
The surface of is adhered to the recess 2 of the stone surface plate 1.
【００１５】つぎに、上述のテ−ブル装置１１の組立方
法を説明する。まず、図２に示すように取付け板１２、
１２が石定盤１に載置される。ボルト６が金具３に螺合
して、取付け板１２が石定盤１に固定される。さらに、
図３に示すように下側のレ−ル２３が取付け板１２にボ
ルト締めされる。そして、取付け板１２の板面２６、２
７を基準としてレ−ル２３の真直度が測定され、レ−ル
２の姿勢が調整される。こののち、Ｘテ−ブル１４、及
び、Ｙテ−ブル１５が下側のレ−ル２３の上に順に組み
付けられる。Next, a method of assembling the above-mentioned table device 11 will be described. First, as shown in FIG.
12 is placed on the stone surface plate 1. The bolt 6 is screwed onto the metal fitting 3, and the mounting plate 12 is fixed to the stone surface plate 1. further,
As shown in FIG. 3, the lower rail 23 is bolted to the mounting plate 12. Then, the plate surfaces 26, 2 of the mounting plate 12
The straightness of the rail 23 is measured with reference to 7, and the attitude of the rail 2 is adjusted. After that, the X table 14 and the Y table 15 are sequentially assembled on the lower rail 23.
【００１６】ここで、下側のレ−ル２２の真直度の測
定、及び、ＸＹテ−ブル１３の組付け等の作業は、一般
的な方法を利用して行うことが可能である。すなわち、
上述のようなテ−ブル装置１１においては、二つの取付
け板１２、１２が備えられており、ＸＹテ−ブル１３は
これら取付け板１２、１２を介して石定盤１に取付けら
れる。そして、リニアガイド２０のレ−ル２３は取付け
板１２を介して石定盤１に固定されている。このため、
下側のレ−ル２３のボルトを石定盤１の金具３に直に螺
合することなく、下側のレ−ル２３を石定盤１に固定す
ることができる。したがって、金具３と石定盤１との間
の接着力を気にすることなく、大きい締付け力で下側の
レ−ル２３を石定盤１に固定することができる。Here, the work of measuring the straightness of the lower rail 22 and assembling the XY table 13 can be carried out by using a general method. That is,
The table device 11 as described above is provided with two mounting plates 12 and 12, and the XY table 13 is mounted on the stone surface plate 1 via these mounting plates 12 and 12. The rail 23 of the linear guide 20 is fixed to the stone surface plate 1 via the mounting plate 12. For this reason,
The lower rail 23 can be fixed to the stone surface plate 1 without directly screwing the bolts of the lower rail 23 into the metal fitting 3 of the stone surface plate 1. Therefore, the lower rail 23 can be fixed to the stone surface plate 1 with a large tightening force without paying attention to the adhesive force between the metal fitting 3 and the stone surface plate 1.
【００１７】取付け板１２の寸法を大とし、一枚の取付
け板１２に両レ−ル２３、２３を固定することも可能で
ある。しかし、ＸＹテ−ブル１３が大型である場合に
は、その大きさに見合う面積の板材が必要である。大型
の板材を使用する場合、工作機械（平面研削盤）の加工
限界によって、二本のレ−ル２３、２３の取付け面が同
一平面上に高精度に一致するように板材を加工するのは
難しい。It is also possible to increase the size of the mounting plate 12 and fix both rails 23, 23 to one mounting plate 12. However, when the XY table 13 is large, a plate material having an area corresponding to the size is required. When using a large plate material, it is necessary to machine the plate material so that the mounting surfaces of the two rails 23, 23 coincide with each other on the same plane with high precision due to the processing limit of the machine tool (surface grinder). difficult.
【００１８】しかし、本実施例のように取付け板を二枚
に分割することによって、取付け板１２の板面２５、２
６の加工が容易になる。そして、取付け板１２、１２の
高い平面度を得ることができる。However, by dividing the mounting plate into two as in this embodiment, the plate surfaces 25, 2 of the mounting plate 12 are
Processing of 6 becomes easy. Then, high flatness of the mounting plates 12 and 12 can be obtained.
【００１９】さらに、石定盤１と下側のレ−ル２３、２
３との間に取付け板１２、１２を介在させることによっ
て、レ−ル２３の太さに関係なく、大型なボルト６を使
用できる。このため、金具３の大型化が可能であり、こ
れに伴って接着力も高まる。この結果、下側のレ−ル２
３、２３は、より堅固に石定盤１に固定され、組立て後
のレ−ル２３、２３の狂いが少なくなる。Further, the stone surface plate 1 and the lower rails 23, 2
By interposing the mounting plates 12, 12 between the bolts 3 and 3, the large bolt 6 can be used regardless of the thickness of the rail 23. Therefore, the metal fitting 3 can be increased in size, and the adhesive strength is increased accordingly. As a result, the lower rail 2
3, 23 are more firmly fixed to the stone surface plate 1, and the rails 23, 23 after assembly are less likely to be out of alignment.
【００２０】なお、本実施例では可動機械部分としてＸ
Ｙテ−ブル１３が挙げられているが、本発明はこれに限
定されず、一般的な種々の精密機械を備えたテ−ブル装
置に適用可能である。そして、本発明は、要旨を逸脱し
ない範囲で種々に変更することが可能である。In this embodiment, X is used as the movable machine part.
Although the Y table 13 is mentioned, the present invention is not limited to this, and can be applied to a table device equipped with various general precision machines. The present invention can be variously modified without departing from the scope of the invention.
【００２１】[0021]
【発明の効果】以上説明したように請求項１の発明は、
石定盤に可動機械部分を取付けてなるテ−ブル装置にお
いて、石定盤と可動機械部分との間に取付け板を介在さ
せ、取付け板によって可動機械部分の石定盤への取付け
部の平面度を調整し、可動機械部分を石定盤に取付け
た。As described above, the invention of claim 1 is
In a table device in which a movable machine part is attached to a stone surface plate, an attachment plate is interposed between the stone surface plate and the movable machine portion, and the plane of the attachment portion of the movable machine portion to the stone surface plate is attached by the attachment plate. After adjusting the degree, the movable machine part was attached to the stone surface plate.
【００２２】また、請求項２の発明は、石定盤に可動機
械部分を取付けるテ−ブル装置の組立方法において、石
定盤に取付け板に固定したのち、取付け板に可動機械部
分を固定し、取付け板によって可動機械部分の石定盤へ
の取付け部の平面度を調整し、可動機械部分の取付け精
度を確保した。そして、これらの発明は、可動機械部分
を石定盤に精度よく取り付けられるという効果がある。According to a second aspect of the present invention, in the method of assembling the table device for mounting the movable machine part on the stone surface plate, the movable machine part is fixed on the mounting plate after the stone platen is fixed on the mounting plate. , The flatness of the mounting part of the movable machine part to the stone surface plate was adjusted by the mounting plate to ensure the mounting accuracy of the movable machine part. And these inventions have an effect that a movable machine part can be accurately attached to a stone surface plate.
【図１】本発明の一実施例のテ−ブル装置を示す構成
図。FIG. 1 is a block diagram showing a table device according to an embodiment of the present invention.
【図２】本発明の一実施例のテ−ブル装置の組立方法を
示す説明図。FIG. 2 is an explanatory view showing a method of assembling the table device according to the embodiment of the present invention.
【図３】本発明の一実施例のテ−ブル装置の組立方法を
示す説明図。FIG. 3 is an explanatory view showing a method of assembling the table device according to the embodiment of the present invention.
【図４】従来のテ−ブル装置の組立方法を示す説明図。FIG. 4 is an explanatory view showing a method of assembling a conventional table device.
１…石定盤、３…金具、６…ボルト、１１…テ−ブル装
置、１２、１２…取付け板、１３…ＸＹテ−ブル（可動
機械部分）、２３、２３…下側のレ−ル。DESCRIPTION OF SYMBOLS 1 ... Stone surface plate, 3 ... Metal fittings, 6 ... Bolt, 11 ... Table device, 12, 12 ... Mounting plate, 13 ... XY table (movable machine part), 23, 23 ... Lower rail .
Claims (2)
−ブル装置において、上記石定盤と上記可動機械部分と
の間に取付け板を介在させ、上記取付け板によって上記
可動機械部分の上記石定盤への取付け部の平面度を調整
し、上記可動機械部分を上記石定盤に取付けることを特
徴とするテ−ブル装置。1. A table device having a movable machine part mounted on a stone surface plate, wherein a mounting plate is interposed between the stone surface plate and the movable machine part, and the movable machine part is attached by the mounting plate. A table device characterized in that the flatness of an attachment portion to the stone surface plate is adjusted and the movable machine part is attached to the stone surface plate.
ル装置の組立方法において、上記石定盤に取付け板に固
定したのち、上記取付け板によって上記可動機械部分を
固定し、上記取付け板によって上記可動機械部分の上記
石定盤への取付け部の平面度を調整し、上記可動機械部
分の取付け精度を確保することを特徴とするテ−ブル装
置の組立方法。2. A method of assembling a table device for mounting a movable machine part on a stone surface plate, wherein said stone platen is fixed to a mounting plate, and then said movable plate is fixed to said mounting plate. A method of assembling a table device, wherein the flatness of a mounting portion of the movable machine portion to the stone surface plate is adjusted to ensure the accuracy of mounting the movable machine portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11474793A JPH06320366A (en) | 1993-05-17 | 1993-05-17 | Table device and assembly method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11474793A JPH06320366A (en) | 1993-05-17 | 1993-05-17 | Table device and assembly method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06320366A true JPH06320366A (en) | 1994-11-22 |
Family
ID=14645664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11474793A Pending JPH06320366A (en) | 1993-05-17 | 1993-05-17 | Table device and assembly method thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06320366A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101374401B1 (en) * | 2010-10-07 | 2014-03-17 | 포항공과대학교 산학협력단 | Electric field aided robotic nozzle printer and method for fabrication of aligned organic wire patterns |
| CN114260852A (en) * | 2021-12-23 | 2022-04-01 | 绍兴市耐特驱动科技有限公司 | Assembling method of quick-mounting type lifting table |
-
1993
- 1993-05-17 JP JP11474793A patent/JPH06320366A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101374401B1 (en) * | 2010-10-07 | 2014-03-17 | 포항공과대학교 산학협력단 | Electric field aided robotic nozzle printer and method for fabrication of aligned organic wire patterns |
| CN114260852A (en) * | 2021-12-23 | 2022-04-01 | 绍兴市耐特驱动科技有限公司 | Assembling method of quick-mounting type lifting table |
| CN114260852B (en) * | 2021-12-23 | 2024-03-12 | 绍兴市耐特驱动科技有限公司 | Assembling method of quick-assembly lifting table |
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