JPH06312507A - Liquid jet record head, manufacture thereof, and recording device equipped therewith - Google Patents

Abstract

PURPOSE:To eliminate inflection of a head itself and defective printing by preventing cure and contraction of a liquid passage forming material of a liquid jet record head at low cost without increasing manufacturing process. CONSTITUTION:A base body having a solid layer of nozzle pattern is coated with a liquid passage forming material of active energy line curing type containing a ring-opening cation polymeric epoxy resin and a compound whose volume expands by polymerization of the resin and the ring-opening cation. Further, a cover plate which transmits the active energy line is connected to the base plate through the material, which is irradiated with the active energy light so as to cure the liquid passage forming material. Thereafter, the solid layer is removed so as to obtain a liquid jet record head.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid jet recording head for generating recording liquid droplets used in a liquid jet recording system,
The present invention relates to a manufacturing method thereof and a recording apparatus including the liquid jet recording head.

[0002]

2. Description of the Related Art A liquid jet recording head applied to an ink jet (liquid jet) recording system is generally provided with a fine recording liquid discharge port (hereinafter referred to as an orifice), a liquid flow path and a part of the liquid flow path. And a liquid discharge energy generation unit that is used. Conventionally, as a method of manufacturing such a liquid jet recording head, a method as shown in FIG. 1 is known.

First, as shown in FIG. 1A, a photosensitive resin layer (positive photoresist or the like) 2 is laminated on a substrate 1 to be processed, and this is exposed through a mask 3 (see FIG. 1B). )),
The photosensitive resin layer 2 is patterned by development to form a solid layer (resist pattern) 4 on the substrate 1 to be processed (FIG. 1C). Next, as shown in FIG. 1D, the substrate 1 is further coated with an active energy ray-curable liquid flow path forming material 5, and subsequently, as shown in FIG. The active energy ray-curable liquid flow path forming material is cured by irradiation. Further, as shown in FIG. 1 (f), the patterned solid layer 4 is formed by using an organic solvent such as a halogen-containing hydrocarbon, a ketone, an ester or an alcohol, or an alkaline aqueous solution such as sodium hydroxide or potassium hydroxide. It is dissolved and removed to form the liquid channel 6.

[0004]

However, in the liquid jet recording head manufactured by such a conventional method, since the liquid flow path forming material undergoes curing shrinkage at the time of curing, the liquid flow path formed is curved and printing failure occurs. In some cases, the liquid flow path forming material may be cracked or the liquid flow path forming material may be peeled off from the substrate.

An object of the present invention is to solve the above problems and to provide a liquid jet recording head with good printing.

[0006]

The present invention provides a lid plate which is coated with an active energy ray-curable liquid flow path forming material on a substrate provided with a solid layer of a nozzle pattern and which transmits an active energy ray. A step of forming a nozzle by irradiating an active energy ray to cure the liquid flow path forming material after bonding to the substrate via the material, and then removing the solid layer of the nozzle pattern, and an ejection energy generating element forming step In a method of manufacturing a liquid jet recording head including: by using a material containing a ring-opening cationically polymerizable epoxy resin and the epoxy resin and a compound that undergoes ring-opening cationic polymerization and volume expansion as the liquid flow path forming material. The above problems are solved.

In the present invention, a substrate made of glass, ceramics, plastic, metal or the like and transparent to active energy rays is used.

Such a substrate functions as a part of a liquid flow path and a material for forming a liquid chamber, and also as a support for laminating a solid layer and an active energy ray-curable liquid flow path forming material described later. When the step of irradiation with active energy rays described below is performed from the lid plate side, the shape and material of the lid plate can be used without particular limitation.
A desired number of liquid ejection energy generating elements such as electrothermal converters or piezoelectric elements are arranged on the substrate. Ejection energy for ejecting the recording liquid droplets is applied to the recording liquid by such a liquid ejection energy generating element, and recording is performed. Therefore, for example, when an electrothermal converter is used as the liquid ejection energy generating element, this element heats the recording liquid in the vicinity,
Generates discharge energy. Further, for example, when a piezoelectric element is used as the liquid ejection energy generating element, ejection energy is generated by mechanical vibration of this element.

Incidentally, control signal input electrodes for operating these elements are connected to these elements.
Further, generally, various functional layers such as a protective layer are provided for the purpose of improving the durability of these liquid ejection energy generating elements, but, of course, the provision of such a functional layer is also acceptable in the present invention. .

Next, a solid layer made of a sensitive resin is laminated on the liquid flow path forming portion on the substrate including the liquid discharge energy generating element and the liquid chamber forming portion communicating with the liquid flow passage forming portion.

In the present invention, it is not always necessary to provide a solid layer in both the liquid flow passage and the liquid chamber forming portion, and the solid layer may be provided at least in the liquid flow passage forming portion.

The above solid layer is removed after each step described below, and a liquid flow path and a liquid chamber are formed in the removed portion.
Of course, the shapes of the liquid flow path and the liquid chamber can be set as desired, and the solid layer can also be formed in accordance with the shapes of the liquid flow path and the liquid chamber. Specific examples of the sensitive resin and means used for forming such a solid layer include those listed below.

A solid layer is formed using a photosensitive dry film according to a so-called dry film image forming process.

A solvent-soluble polymer layer and a photoresist layer having a desired thickness are sequentially laminated on the first substrate 1, and after patterning the photoresist layer, the solvent-soluble polymer layer is selectively removed.

The resin is printed.

As the photosensitive dry film mentioned above, either a positive type or a negative type can be used. For example, a positive type dry film is solubilized in a developing solution by irradiation with active energy rays. In the case of a positive type dry film or a negative type dry film, a negative type dry film which is a photopolymerization type but can be dissolved or peeled off with methylene chloride or a strong alkali is suitable.

Specific examples of the positive dry film include "OZATEC R225" (trade name, Hoechst Japan Co., Ltd.), and the negative dry film includes
"OZATEC T Series" [Product Name, Hoechst Japan Co., Ltd.], "PHOTEC PHT Series" [Product Name, Hitachi Chemical Co., Ltd.], "RISTON" [Product Name, Du Pont de
Nemo Earth Co. ] Etc. are used.

Of course, not only these commercially available materials,
A resin composition acting positively, for example, a resin composition mainly composed of a naphthoquinone diad derivative and a novolac type phenolic resin, and a resin composition acting negatively,
For example, a composition mainly composed of an acrylic oligomer having an acrylic ester as a reactive group and a thermoplastic polymer compound and a sensitizer, or a composition composed of a polythiol, a polyene compound and a sensitizer can be similarly used.

Examples of the solvent-soluble polymer mentioned in the above are:
Any polymer compound which has a solvent capable of dissolving it and can form a film by coating may be used. The photoresist layer that can be used here is typically a positive liquid photoresist composed of a novolac phenolic resin and naphthoquinone diazide, a negative liquid photoresist composed of polyvinyl cinnamate, a negative liquid composed of cyclized rubber and bisazide. Examples thereof include photoresists, negative photosensitive dry films, thermosetting inks and ultraviolet curable inks.

Examples of the material for forming the solid layer 3 by the printing method mentioned above are flat plate ink, screen ink and transfer type which are used in respective drying methods such as evaporation drying type, thermosetting type and ultraviolet curing type. Resin etc. are used.

Among the materials listed above, the means using a photosensitive dry film is preferable in view of processing accuracy, easiness of removal, workability, etc. Among them, a positive type dry film is used. Is particularly preferable. That is, the positive photosensitive material has, for example, a resolution superior to that of the negative photosensitive material, the relief pattern has a vertical and smooth side wall surface, or a tapered or inverse tapered cross-sectional shape can be easily formed. It has the feature that it is optimal for shaping the liquid flow path. Further, it has a feature that the relief pattern can be dissolved and removed with a developing solution or an organic solvent, which is preferable as the solid layer forming material in the present invention. In particular, for example, in the positive-type photosensitive material using the naphthoquinonediazide and novolac-type phenol resin mentioned above, since it can be completely dissolved in a weak alkaline aqueous solution or alcohol, it does not cause any damage to the energy generating element, and the post-process Removal is extremely quick. Among such positive type photosensitive materials, the dry film type is the most preferable material in that a thick film having a thickness of 10 to 100 μm can be obtained.

On the substrate on which the solid layer is formed by ordinary photolithography using the photosensitive resist as described above, an active energy ray-curable liquid flow path forming material is laminated so as to cover the solid layer. To be done.

As the active energy ray-curable liquid flow path forming material, any material capable of covering the solid layer can be preferably used, but the material forms the liquid flow path and the liquid chamber. In the present invention, a material containing a ring-opening cationically polymerizable epoxy resin and a compound which undergoes ring-opening cationic polymerization to undergo volume expansion is used in the present invention. In particular, a compound having a spiro orthocarbonate structure is preferable as the compound that undergoes ring-opening cationic polymerization with an epoxy resin and undergoes volume expansion.

The active energy ray-curable liquid flow path forming material is laminated by, for example, a discharging device using a nozzle suitable for the substrate shape, an applicator, a curtain coater, a roll coater, a spray coater, a spin coater, or the like. The method of doing so is specifically mentioned.

Next, a cover plate is laminated on the active energy ray-curable liquid flow path forming material of the substrate. At this time, the lid plate
If necessary, a recess for obtaining a desired liquid chamber volume may be provided in the liquid chamber forming portion. Of course, the lid plate, like the substrate,
Any desired material such as glass, plastic, photosensitive resin, metal or ceramics can be used, but if the step of activating the active energy rays described below is performed from the lid side, it must be transparent to the active energy rays. is necessary. Further, the cover plate may be provided with a supply port for supplying the recording liquid in advance.

Although not shown above, the active energy ray-curable liquid flow path forming material may be laminated after the lid plate is laminated on the solid layer. As a stacking method in this case, it is preferable to use a method in which the lid plate is pressure-bonded to the substrate, the inside pressure is reduced, and then an active energy ray-curable liquid flow path forming material is injected. When stacking the lid plates, a spacer is provided between the substrate and the lid plate or a convex portion is formed at the end of the lid plate so that the active energy ray-curable liquid flow path forming material has a required thickness. May be devised such as provision of.

In this way, after obtaining a laminated body in which the substrate, the solid layer, the active energy ray-curing type liquid flow path forming material and the lid plate are laminated in this order, it is applied to the liquid chamber formation planned site from the active energy ray. A mask is laminated on the side of the substrate transparent to the active energy rays (cover plate in this example) so as to shield the active energy rays, and the active energy rays are irradiated from above the mask. The irradiation of the active energy ray cures the active energy ray-curable liquid flow path forming material in the irradiated portion to form a cured resin layer, and the curing also joins the substrate and the lid plate. The active energy ray-curable material that is not irradiated with the active energy ray remains uncured.

As the active energy rays, ultraviolet rays, electron rays, visible rays and the like can be used. However, ultraviolet rays and visible rays are preferable because they are exposed through the substrate, and ultraviolet rays are most suitable from the viewpoint of polymerization rate. There is. As the ultraviolet ray source, a light source having a high energy density such as a high pressure mercury lamp, an ultrahigh pressure mercury lamp, a halogen lamp, a xenon lamp, a metal halide lamp or a carbon arc is preferably used.
The light from the light source has high parallelism and the less heat is generated, the more accurate processing can be performed.However, it is an ultraviolet light source that is generally used for printing plate making or printed wiring board processing or curing of photo-curable paint. If there is, it is almost available.

As the mask for the active energy rays, when ultraviolet rays or visible rays are used, a metal mask, a silver salt emulsion mask, a diazo mask or the like may be used.

Then, for example, when the end face of the orifice is not exposed, if necessary, the laminated body, which has been cured by irradiation with active energy rays, is cut at a required position by a dicing saw using a diamond blade or the like.
The end face of the orifice is exposed. However, such a cutting operation is not always necessary for the practice of the present invention. For example, a liquid curable material is used, a mold is used when laminating the material, and the orifice tip is closed and covered. If the orifice end surface is formed so as not to be broken and the orifice end surface is formed to be smooth, the cutting is not necessary.

Next, the solid layer and the uncured active energy ray-curing type liquid flow path forming material are removed from the above-mentioned laminated body after the irradiation of active energy rays to form a liquid flow path and a liquid chamber.

The means for removing the solid layer and the uncured active energy ray-curing type liquid flow path forming material is not particularly limited, but specifically, for example, the solid layer and the uncured active energy ray-curable material A preferable method is a method of immersing and removing a conductive material in a liquid that dissolves, swells, or peels. At this time, it is also possible to use ultrasonic treatment, spraying, heating, stirring, shaking, pressurization circulation, and other removal promoting means, if necessary.

Examples of the liquid used for the removing means include halogen-containing hydrocarbons, ketones, esters,
Examples thereof include aromatic hydrocarbons, ethers, alcohols, N-methylpyrrolidone, dimethylformamide, phenol, water, water containing an acid or alkali, and the like. If necessary, a surfactant may be added to these liquids. Further, when a positive type dry film is used as the solid layer, it is preferable to irradiate the solid layer with ultraviolet rays again for easy removal.
It is preferred to warm the liquid to 0-60 ° C.

After the above steps are completed, the tip of the orifice may be cut, polished, or smoothed, if necessary, in order to optimize the distance between the liquid discharge energy generating element and the orifice.

The present invention has excellent effects particularly in a liquid jet recording head and a recording apparatus for forming flying droplets by utilizing thermal energy among the liquid jet recording methods for recording.

A typical structure and principle of a recording head which can be manufactured by the present invention is described in, for example, US Pat.
Nos. 723,129 and 4,740,796, and the present invention is preferably carried out using these basic principles. This method is applicable to both so-called on-demand type and continuous type.

Particularly in the case of the on-demand type, the electrothermal converter arranged corresponding to the sheet or liquid path holding the liquid (ink) corresponds to the recorded information and exceeds the nucleate boiling. By applying at least one drive signal that gives a rapid temperature rise, heat energy is generated in the electrothermal converter, causing film boiling on the heat-acting surface of the recording head, resulting in a one-to-one correspondence with this drive signal. Correspondingly, it is effective because bubbles can be formed in the liquid (ink). Due to the growth and contraction of the bubbles, the liquid (ink) is ejected through the ejection opening (ejection port) to form at least one droplet. It is more preferable to make this drive signal into a pulse shape because bubbles can be grown and contracted immediately and appropriately, so that liquid (ink) ejection with excellent responsiveness can be achieved.
As this pulse-shaped drive signal, US Pat.
Those described in 63,359 and 4,345,262 are suitable. Note that US Pat.
If the conditions described in the specification of No. 13,124 are adopted, more excellent recording can be performed.

As the constitution of the recording head, in addition to the combination constitution of the discharge port, the liquid passage, and the electrothermal converter (the linear liquid passage or the right-angle liquid passage) as disclosed in the above-mentioned respective specifications, U.S. Pat. Nos. 4,558,333, which disclose a configuration in which a heat acting portion is arranged in a bending region.
The structure described in the specification of 459,600 is also included in the present invention. In addition, for multiple electrothermal converters,
Japanese Unexamined Patent Publication No. 59-123670, which discloses a configuration in which a common slit is used as a discharge portion of an electrothermal converter, and Japanese Patent Laid-Open No. 59-63670, which discloses a configuration in which an opening for absorbing a pressure wave of thermal energy is associated with the discharge portion. The present invention is also effective for a recording head having a structure based on Japanese Patent Laid-Open No. 138461.

Further, as a recording head in which the present invention can be effectively used, there is a full line type recording head having a length corresponding to the width of the maximum recording medium which can be recorded by the recording apparatus. The full-line type recording head has a full-line configuration formed by combining a plurality of recording heads as disclosed in the above specification, or a configuration as one recording head integrally formed. But good.

In addition, by being mounted on the apparatus main body, it can be electrically connected to the apparatus main body and can be supplied with ink from the apparatus main body by a replaceable chip type recording head or the recording head itself. The present invention is also effective in the case of a cartridge-type recording head that is provided in a specific manner.

Further, it is preferable to add recovery means for the recording head, preliminary auxiliary means, etc. to the recording apparatus of the present invention because the recording apparatus of the present invention can be made more stable. is there. Specific examples thereof include capping means for the recording head, cleaning means, pressure or suction means, an electrothermal converter or a heating element other than this, or a preheating means by a combination thereof, recording and Adding a means for performing a preliminary ejection mode for performing another ejection is also effective for stable recording.

Further, the recording mode of the recording apparatus is not limited to the recording mode of only the mainstream color such as black, but the recording head may be integrally formed or a plurality of combinations may be used. The present invention is also extremely effective for a recording head that can be used in an apparatus provided with at least one of full-color mixed colors.

In the above description, the ink has been described as a liquid, but it is an ink that solidifies at room temperature or lower and becomes soft or liquid at room temperature, or is generally performed in liquid ejection. It may soften or become a liquid within a temperature range of 30 ° C. or higher and 70 ° C. or lower, which is a temperature range for temperature adjustment. That is, the ink may be in a liquid state when the use recording signal is applied.

In addition, excessive temperature rise of the head or ink due to thermal energy is positively prevented by using it as energy for changing the state of the ink from a solid state to a liquid state, or ink evaporation is prevented. For the purpose, it is possible to use an ink that solidifies when left standing. In any case, liquefaction occurs only when heat energy is applied, such as when the ink is liquefied by applying heat energy according to the recording signal and ejected as an ink liquid, or when it begins to solidify when it reaches the recording medium. The use of an ink having the property of applying is also applicable to the present invention.

Such an ink is disclosed in JP-A-54-568.
No. 47 or JP-A No. 60-71260, a configuration in which the electrothermal converter is opposed to a liquid sheet or a solid material held in the recesses or through holes of the porous sheet. Is also good.

In the present invention, the most effective one for each of the above-mentioned inks is to execute the above-mentioned film boiling method.

FIG. 2 is an external perspective view showing an example of a liquid jet recording apparatus (IJRA) in which the recording head obtained by the present invention is mounted as a liquid jet head cartridge (IJC).

In the figure, reference numeral 20 is an IJC provided with a nozzle group for ejecting ink in opposition to the recording surface of the recording paper fed onto the platen 24. Reference numeral 16 is a carriage (HC) for holding the IJC 20, which is connected to a part of the drive belt 18 for transmitting the driving force of the drive motor 17 and has two guide shafts 19A and 19A arranged in parallel with each other.
By making it slidable with 9B, reciprocating movement over the entire width of the recording paper of the IJC 20 is possible.

Reference numeral 26 is a head recovery device, which is an IJC 20.
Is arranged at one end of the movement path of, for example, at a position facing the home position. The drive force of the motor 22 via the transmission mechanism 23 causes the head recovery device 26 to operate, and
Cap the JC20. This head recovery device 2
In association with the capping of the IJC 20 by the cap portion 26A of 6, the ink is sucked by an appropriate suction means provided in the head recovery device 26 or the ink is pressure-fed by an appropriate pressure means provided in the ink supply path to the IJC 20. The ejection recovery process such as removing the thickened ink in the nozzle by forcibly ejecting the ink from the ejection port is performed. Also, the IJC 20 is protected by capping at the end of recording or the like.

A blade 30 is provided on the side surface of the head recovery device 26 and is a wiping member made of silicon rubber. The blade 30 is a blade holding member 30.
The head recovery device 26 is held by A in a cantilever form.
Is operated by the motor 22 and the transmission mechanism 23,
It becomes possible to engage with the ejection surface of the IJC 20. As a result, the blade 30 is projected into the movement path of the IJC 20 at an appropriate timing in the recording operation of the IJC 20 or after the ejection recovery process using the head recovery device 26, and the ejection surface of the IJC 20 is moved along with the movement operation of the IJC 20. Wipe off condensation, wetness or dust.

[0051]

EXAMPLES The present invention will be specifically described below with reference to examples.

Example 1 First, an electrothermal converter (material HfB ₂ ) was formed as a liquid ejection energy generating element on a glass substrate (thickness: 1.1 mm) as a substrate, and then a positive type was formed on the substrate. A 50 μm-thick photosensitive layer made of a dry film (“OZATEC R225”, manufactured by Hoechst Japan Ltd.) was formed by lamination.

A mask was overlaid on this photosensitive layer, and 70 mJ / cm ² of ultraviolet irradiation was applied to the portion excluding the liquid flow path and the portion where the liquid chamber was to be formed. The length of the liquid flow path was 3 mm.

Next, spray development is performed with a 5% aqueous solution of sodium metasilicate to form a relief solid layer having a thickness of about 50 μm in the liquid flow path and the liquid chamber forming portion on the substrate including the electrothermal converter. did.

On each of the substrates on which the solid layer was formed, a composition having the following composition was laminated as an active energy ray-curable liquid flow path forming material.・ Ring-opening cationically polymerizable epoxy resin: Asahi Denka Co., Ltd.
Made, ADEKA OPTOMER KRM2410 (trade name) 100
Department, ADEKA OPTOMER SP-150 (trade name) 1.5
Part: 20 parts of norbornene spiro orthocarbonate having the following structural formula as a compound that undergoes ring-opening cationic polymerization with the above epoxy resin and undergoes volume expansion

[0056]

[Chemical 1] -NUC silane coupling agent A-187 (manufactured by Nippon Unicar Co., Ltd.) 5 parts.

The compound of the above structural formula was synthesized from diol and tetramethyl orthocarbonate.

The operating procedure was as follows.

Using the applicator, the above composition was applied to a substrate on which the above-mentioned solid layer was laminated, from the upper surface of the substrate by 70 μm.
Was applied to the thickness.

Next, a substrate having this material laminated thereon has a thickness of 1.1 mm, a recess having a depth of 0.3 mm at a portion where a liquid chamber is to be formed, and a through hole for supplying a recording liquid at the center of the recess. A glass substrate serving as a lid plate having a (liquid supply port) was aligned with a position where a liquid chamber was to be formed to obtain a laminate.

Next, a film mask was brought into close contact with the upper surface of the lid plate of this laminate to shield active energy rays from the site where the liquid chamber was to be formed, and active energy rays were irradiated from above. The exposure amount at this time was 8 joules. Then, the film was removed, and the electrothermal converter was cut so that the electrothermal converter was located at a position of 0.7 mm from the tip of the orifice to form an end face of the orifice.

The laminate with the exposed end face of the orifice was immersed in ethanol, the liquid chamber was filled with ethanol, and the end face of the orifice was kept in contact with ethanol. A dissolution removal operation was performed. After completion of dissolution removal, washing was performed with a 5% NaOH aqueous solution and pure water. After washing, heat curing was performed at 130 ° C. for 1 hour to completely cure the liquid flow path forming material.

When the liquid jet recording head thus manufactured was observed, no inflection of the head was observed. In addition, by mounting this recording head on the recording device,
Recording was performed using a liquid jet ink composed of glycerin / direct black 154 (water-soluble black dye) = 65/30/5 (parts by weight), but no print disorder was observed.

Comparative Example 1 A liquid jet recording head was produced in the same manner as in Example 1 except that the compound which volume-expanded by ring-opening cationic polymerization with the epoxy resin was not used. When the obtained recording head was observed, inflection of the head was found. Further, when recording was carried out in the same manner as in Example 1, irregularities in printing were observed.

[0065]

As described above, according to the present invention,
Curing shrinkage of the liquid flow path forming material of the liquid jet recording head can be prevented at low cost without increasing the number of manufacturing processes. As a result, curing contraction of the liquid flow path forming material is eliminated, and the bending and defective printing of the liquid jet recording head itself are eliminated.

[Brief description of drawings]

FIG. 1 is a schematic cross-sectional view illustrating a process of forming a liquid flow path.

FIG. 2 is a perspective view showing an example of a recording apparatus provided with a liquid jet recording head according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Substrate 2 Positive photoresist 3 Mask 4 Solid layer (resist pattern) 5 Liquid flow path forming material 6 Liquid flow path section

Claims (5)

[Claims] 1. A substrate provided with a solid layer of a nozzle pattern is coated with an active energy ray-curable liquid flow path forming material, and a lid plate that transmits active energy rays is bonded to a substrate via the material. After that, it is formed by a manufacturing method including a step of forming a nozzle by irradiating an active energy ray to cure the liquid flow path forming material, and then removing a solid layer of a nozzle pattern, and a discharge energy generating element forming step. A liquid jet recording head according to claim 1, wherein the liquid flow path forming material contains a ring-opening cationically polymerizable epoxy resin and a compound that expands volumetrically by ring-opening cationic polymerization with the epoxy resin. 2. The liquid jet recording head according to claim 1, wherein the ejection energy generating element is an electrothermal converter that generates thermal energy used for ejecting ink. 3. The liquid jet recording head according to claim 1, wherein the liquid ejection recording head is a full line type in which a plurality of ejection openings are provided over the entire width of the recording area of the recording medium. 4. A substrate provided with a solid layer of a nozzle pattern is coated with an active energy ray-curable liquid flow path forming material, and a lid plate that transmits active energy rays is bonded to a substrate via the material. After that, a liquid jet recording head including a step of forming nozzles by irradiating an active energy ray to cure the liquid flow path forming material and then removing the solid layer of the nozzle pattern and an ejection energy generating element forming step A manufacturing method of a liquid jet recording head, wherein the liquid flow path forming material contains a ring-opening cationically polymerizable epoxy resin and a compound which undergoes ring-opening cationic polymerization and volume expands. 5. The liquid jet recording head according to claim 1, wherein an ink ejection port for ejecting ink is provided facing the recording surface of the recording medium, and the recording head. A recording device comprising at least a member for mounting the recording medium.