JPH06298542A - Production of optical fiber preform - Google Patents
Production of optical fiber preformInfo
- Publication number
- JPH06298542A JPH06298542A JP8641893A JP8641893A JPH06298542A JP H06298542 A JPH06298542 A JP H06298542A JP 8641893 A JP8641893 A JP 8641893A JP 8641893 A JP8641893 A JP 8641893A JP H06298542 A JPH06298542 A JP H06298542A
- Authority
- JP
- Japan
- Prior art keywords
- glass layer
- porous glass
- glass
- pipe
- preform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013307 optical fiber Substances 0.000 title claims abstract description 18
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000005373 porous glass Substances 0.000 claims abstract description 56
- 239000011521 glass Substances 0.000 claims abstract description 48
- 238000000034 method Methods 0.000 claims abstract description 20
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 16
- 238000010438 heat treatment Methods 0.000 claims abstract description 16
- 150000001875 compounds Chemical class 0.000 claims abstract description 7
- 239000002904 solvent Substances 0.000 claims abstract description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910052779 Neodymium Inorganic materials 0.000 claims abstract description 3
- 229910052775 Thulium Inorganic materials 0.000 claims abstract description 3
- 229910052769 Ytterbium Inorganic materials 0.000 claims abstract description 3
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 3
- 229910052698 phosphorus Inorganic materials 0.000 claims abstract description 3
- 239000000463 material Substances 0.000 claims description 11
- 239000000654 additive Substances 0.000 claims description 10
- 230000000996 additive effect Effects 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 239000002994 raw material Substances 0.000 abstract description 9
- 239000007789 gas Substances 0.000 abstract description 8
- 239000011261 inert gas Substances 0.000 abstract description 4
- 229910052691 Erbium Inorganic materials 0.000 abstract 1
- 229910006113 GeCl4 Inorganic materials 0.000 abstract 1
- 229910003910 SiCl4 Inorganic materials 0.000 abstract 1
- HDGGAKOVUDZYES-UHFFFAOYSA-K erbium(iii) chloride Chemical compound Cl[Er](Cl)Cl HDGGAKOVUDZYES-UHFFFAOYSA-K 0.000 abstract 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 abstract 1
- IEXRMSFAVATTJX-UHFFFAOYSA-N tetrachlorogermane Chemical compound Cl[Ge](Cl)(Cl)Cl IEXRMSFAVATTJX-UHFFFAOYSA-N 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 47
- 229910052761 rare earth metal Inorganic materials 0.000 description 17
- 238000001035 drying Methods 0.000 description 6
- 229910003902 SiCl 4 Inorganic materials 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 238000005470 impregnation Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 4
- 150000002910 rare earth metals Chemical class 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 239000012159 carrier gas Substances 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000010419 fine particle Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- 229910005793 GeO 2 Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 description 2
- 239000012466 permeate Substances 0.000 description 2
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 239000004071 soot Substances 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000012792 core layer Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- SNMVRZFUUCLYTO-UHFFFAOYSA-N n-propyl chloride Chemical compound CCCCl SNMVRZFUUCLYTO-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000000918 plasma mass spectrometry Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004017 vitrification Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
- C03B37/01838—Reactant delivery systems, e.g. reactant deposition burners for delivering and depositing additional reactants as liquids or solutions, e.g. for solution doping of the deposited glass
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/08—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
- C03B2201/10—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant doped with boron
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
- C03B2201/28—Doped silica-based glasses doped with non-metals other than boron or fluorine doped with phosphorus
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/31—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with germanium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/34—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with rare earth metals, i.e. with Sc, Y or lanthanides, e.g. for laser-amplifiers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/34—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with rare earth metals, i.e. with Sc, Y or lanthanides, e.g. for laser-amplifiers
- C03B2201/36—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with rare earth metals, i.e. with Sc, Y or lanthanides, e.g. for laser-amplifiers doped with rare earth metals and aluminium, e.g. Er-Al co-doped
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は光ファイバ用母材の製造
方法に関し、詳しくは希土類元素添加光ファイバ増幅器
等に利用される希土類元素添加光ファイバなど、各種の
添加物を添加された光ファイバ用母材の製造方法に好適
な方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a base material for an optical fiber, and more specifically, an optical fiber doped with various additives such as a rare earth element-doped optical fiber used in a rare earth element-doped optical fiber amplifier. The present invention relates to a method suitable as a method for manufacturing a base material.
【0002】[0002]
【従来の技術】希土類元素添加光ファイバ用母材の製法
としては、文献1〔J.E.Townsend, S.B.Poole, D.N.Pay
ne " Solution-doping technique for fabrication of
rare-earth doped optical fibres ", IEE Electronics
Letters, vol.26, No.7, pp329 〜331 (1987)〕に記載
される、溶液含浸法を光ファイバ用母材の代表的製法で
あるMCVD法に適用したものが挙げられる。通常のM
CVD法では図1に示すように出発石英パイプの内部に
ガラス原料(例えばSiCl4 ,GeCl4 ,BC
l3 ,POCl3 など)や酸素(O2 )ガス、不活性ガ
スなどのキャリアガスを流しつつ酸水素バーナーに代表
される外部熱源により該出発石英パイプを加熱し、パイ
プ内でガラス原料を酸化させることによりガラス微粒子
を発生させる。ガラス微粒子は加熱源の下流側でパイプ
内面に堆積し、多孔質ガラス層を形成する。加熱源を往
復運動させることにより堆積した多孔質ガラス層は、加
熱され透明なガラス膜となる。文献1の方法ではこの
際、加熱源の温度をガラス微粒子を発生させ得るが多孔
質ガラス層の透明化には不十分な程度に調整し、多孔質
ガラス層をパイプ内面に堆積させたのち、そのパイプ内
部に希土類元素の塩化物などを溶解させた溶液を注ぎ込
み、多孔質ガラス層に溶液を含浸せしめたのち、乾燥し
て溶媒を留去させ、再度加熱透明化することにより、該
ガラス層に希土類元素が添加される。その後該パイプを
加熱中実化される。希土類元素は一般に光ファイバのコ
ア領域に添加されるので、文献1に記載されているよう
に出発石英パイプの内面にクラツド層を通常のMCVD
法で堆積させたのち、コア層として上述の手段で多孔質
ガラス層を形成し溶液含浸を行うことが一般的である。2. Description of the Related Art As a method for producing a base material for an optical fiber doped with a rare earth element, reference 1 [JETownsend, SBPoole, DNPay
ne "Solution-doping technique for fabrication of
rare-earth doped optical fibers ", IEE Electronics
Letters, vol.26, No.7, pp329 to 331 (1987)], the solution impregnation method is applied to the MCVD method which is a typical method for producing a preform for optical fibers. Normal M
In the CVD method, as shown in FIG. 1, glass raw materials (for example, SiCl 4 , GeCl 4 , BC) are placed inside the starting quartz pipe.
(1 3 , POCl 3, etc.), oxygen (O 2 ) gas, and an inert gas while flowing the starting quartz pipe by an external heat source typified by an oxyhydrogen burner to oxidize the glass raw material in the pipe. By doing so, glass fine particles are generated. The glass fine particles are deposited on the inner surface of the pipe on the downstream side of the heat source to form a porous glass layer. The porous glass layer deposited by reciprocating the heating source is heated to form a transparent glass film. In the method of Reference 1, at this time, the temperature of the heating source is adjusted to an extent that glass fine particles can be generated, but it is insufficient for making the porous glass layer transparent, and after the porous glass layer is deposited on the inner surface of the pipe, A solution in which a chloride of a rare earth element is dissolved is poured into the pipe, the porous glass layer is impregnated with the solution, dried, the solvent is distilled off, and the transparent glass layer is again heated to make the glass layer transparent. A rare earth element is added to. Then, the pipe is heated and solidified. Since rare earth elements are generally added to the core region of an optical fiber, as described in Reference 1, a cladding layer is formed on the inner surface of a starting quartz pipe by a conventional MCVD method.
After being deposited by the method, a porous glass layer is generally formed as the core layer by the above-mentioned means and solution impregnation is performed.
【0003】[0003]
【発明が解決しようとする課題】従来、このような手法
で希土類元素添加光ファイバ用母材を作製する際、溶液
含浸時や乾燥、透明ガラス化時に多孔質ガラス層がパイ
プ内面から剥離、脱落したり、或いは希土類元素の添加
量が大きくばらつき、所望量の添加が困難となるといっ
た問題があった。このような問題に対しては、従来は多
孔質ガラス層形成時の加熱条件や多孔質ガラス層用原料
ガスの供給量、または乾燥や透明化時の加熱条件を試行
錯誤的に調整することにより対処していた。しかしなが
ら、たとえ一旦安定な製造条件が見い出されても、ファ
イバ構造などの変更があった場合、同様な試行錯誤を繰
り返す必要があり、極めて非能率的であった。Conventionally, when a rare earth element-doped optical fiber preform is manufactured by such a method, the porous glass layer is peeled off from the inner surface of the pipe during solution impregnation, drying, or transparent vitrification. However, there is a problem that it is difficult to add a desired amount because the amount of the rare earth element added varies greatly. For such a problem, conventionally, by adjusting the heating conditions at the time of forming the porous glass layer and the supply amount of the raw material gas for the porous glass layer, or the heating conditions at the time of drying and making transparent by trial and error. I was dealing with it. However, even if stable manufacturing conditions were found once, if the fiber structure and the like were changed, similar trial and error had to be repeated, which was extremely inefficient.
【0004】[0004]
【課題を解決するための手段】本発明者らは上記問題点
と光ファイバ用母材作製工程における各種要因との関連
性について鋭意研究を重ね、多孔質ガラス層のカサ密度
が非常に重要であり、これを0.2g/cm3 〜0.8
g/cm3 に調整することにより、ガラスが如何なる組
成であっても、安定して所望量の希土類元素が添加でき
るという知見を得、本発明に到達した。すなわち、本発
明はガラスパイプの内面に石英ガラスを主成分とする多
孔質ガラス層を堆積させたのち、該多孔質ガラス層への
添加物を含有する溶液を該多孔質ガラス層に浸透させ、
しかるのち該多孔質ガラス層を加熱して透明ガラス化し
該ガラスパイプを中実化させるガラス用母材の製造方法
において、前記多孔質ガラス層のカサ密度を0.2g/
cm3 〜0.8g/cm3 とすることを特徴とする。上
記多孔質ガラス層への添加物として特に好ましくはE
r,Nd,Yb,Tm,Pr,La,Al及びPから選
ばれる元素の化合物の1種類以上であり、上記多孔質ガ
ラス層への添加物を含有する溶液はその溶媒が水または
エタノールであることが特に好ましい。上記ガラスパイ
プとしてVAD法により得られた棒状ガラス母材を穿孔
加工してパイプ状としたものを用いることが、光の伝送
を妨げるOHや不純物の汚染が極めて少ないこと、VA
D法によれば大型母材を得られるので種々の肉厚のガラ
スパイプが使用できる点から望ましい。[Means for Solving the Problems] The inventors of the present invention have conducted extensive studies on the relationship between the above problems and various factors in the optical fiber preform manufacturing process, and the bulk density of the porous glass layer is very important. Yes, this is 0.2 g / cm 3 to 0.8
The inventors have found that the desired amount of the rare earth element can be stably added to the glass regardless of the composition of the glass by adjusting g / cm 3 . That is, the present invention, after depositing a porous glass layer containing quartz glass as a main component on the inner surface of the glass pipe, permeate the porous glass layer with a solution containing an additive to the porous glass layer,
Then, in the method for producing a glass preform for heating the porous glass layer to make it transparent glass and solidifying the glass pipe, the bulk density of the porous glass layer is 0.2 g /
It is characterized in that it is set to cm 3 to 0.8 g / cm 3 . As an additive to the above-mentioned porous glass layer, particularly preferably E
A solution containing one or more compounds of an element selected from r, Nd, Yb, Tm, Pr, La, Al and P, and the solvent containing the additive to the porous glass layer is water or ethanol. Is particularly preferred. When the rod-shaped glass base material obtained by the VAD method is pierced into a pipe shape as the glass pipe, the contamination of OH and impurities that hinder the transmission of light is extremely small.
According to the method D, a large base material can be obtained, and thus glass pipes having various wall thicknesses can be used, which is desirable.
【0005】[0005]
【作用】多孔質ガラス層の溶液含浸を図5により説明す
る。図5に示すように、カサ密度が大きい、すなわちす
き間部の堆積が小さい場合には、溶液の侵入量も小さ
く、添加量は少なくなる傾向にあり、またカサ密度が小
さい場合は逆に添加量が大きくなる傾向がある。これに
より添加量(濃度)のばらつきが生じると考えられる。
また、乾燥、加熱、透明化時の多孔質ガラス層の剥離、
脱落については、カサ密度が比較的小さい場合、ガラス
粒子(スス)とパイプ内面との密着度が小さく、且つガ
ラス粒子相互の密着力が小さい為に、乾燥、加熱により
ガラス粒子が収縮した際に、ススの剥離、脱落が起こる
と考えられる。The solution impregnation of the porous glass layer will be described with reference to FIG. As shown in FIG. 5, when the bulk density is high, that is, when the deposition in the crevice is small, the amount of solution intrusion is small and the addition amount tends to be small. Tends to be large. It is considered that this causes variations in the added amount (concentration).
Also, drying, heating, peeling of the porous glass layer at the time of transparency,
Regarding the falling off, when the bulk density is relatively small, the adhesion between the glass particles (soot) and the inner surface of the pipe is small, and the mutual adhesion of the glass particles is small, so when the glass particles shrink due to drying or heating. It is considered that the soot is peeled off or comes off.
【0006】そこで、種々のカサ密度の多孔質ガラス層
をパイプ内面に内付けし、光ファイバ母材を作製し、更
にファイバに線引した結果、カサ密度が0.2g/cm
3 〜0.8g/cm3 のときに、多孔質ガラス層の剥
離、脱落がなく、所望の希土類元素が添加できることが
判った。なお、このカサ密度の領域において、希土類元
素添加量は以下の数1の式で見積もることができる。Therefore, a porous glass layer having various bulk densities is internally attached to the inner surface of the pipe to prepare an optical fiber preform, and the fiber is drawn. As a result, the bulk density is 0.2 g / cm.
It was found that when the amount was 3 to 0.8 g / cm 3 , the desired rare earth element could be added without peeling or dropping of the porous glass layer. In this region of bulk density, the amount of rare earth element added can be estimated by the following equation (1).
【数1】 [Equation 1]
【0007】本発明における多孔質ガラス層の堆積を具
体的に説明すると、図1に示すようにガラスパイプを回
転させながら片端より、不活性ガス、O2 ガスなどキャ
リアガスと共に、多孔質ガラス層の原料となるSiCl
4 、GeCl4 、BCl3 、POCl3 などを導入し、
ガラスパイプ表面を酸水素バーナーで加熱しながらバー
ナーをガラスパイプの長手方向に一定速度で移動させ、
ガラスパイプの内面に多孔質ガラス層を堆積させる。多
孔質ガラス層のカサ密度は、原料投入量(SiCl4 、
GeCl3 などの蒸気圧及びキャリアガスの流量)、酸
水素バーナーの火力、及びその移動速度に依存してお
り、これらの条件を変えることにより、種々のカサ密度
を有した多孔質ガラス層を堆積させることができる。添
加物を含有する溶液を多孔質ガラス層へ浸透させるに
は、例えば該パイプ内に注ぎ込んだ後、余剰の溶液を捨
てる等の手段が採用できるが、これに限定されるもので
はない。添加物としては多孔質ガラス層の添加したい元
素の化合物、例えば塩化物や酸化物等、具体的には例え
ばEr(ErCl3 など),Nd(NdCl3 など),
Yb(YbCl3 など),Tm(TmCl3 など),P
r(PrCl3 など),La(LaCl3 など),Al
〔Al(NO3 )など〕,P(P2 O5 ,H3 PO4 な
ど)等の希土類元素やその他の元素の化合物を挙げるこ
とができる。添加物を加える溶媒としては、例えば水、
エタノール等のアルコールが、塩化物、塩等の添加元素
含有化合物を十分に溶解でき、しかも自然乾燥により殆
ど揮散するのに加え、Cl2 などの反応性ガスにより容
易かつ徹底的に除去できるので簡便である。The deposition of the porous glass layer in the present invention will be specifically described. As shown in FIG. 1, while rotating the glass pipe, the porous glass layer is introduced from one end together with a carrier gas such as inert gas and O 2 gas. Raw material of SiCl
4 , GeCl 4 , BCl 3 , POCl 3, etc. are introduced,
While heating the glass pipe surface with an oxyhydrogen burner, move the burner in the longitudinal direction of the glass pipe at a constant speed,
A porous glass layer is deposited on the inner surface of the glass pipe. The bulk density of the porous glass layer is determined by the amount of raw material input (SiCl 4 ,
It depends on the vapor pressure of GeCl 3 etc. and the flow rate of carrier gas), the thermal power of the oxyhydrogen burner, and its moving speed. By changing these conditions, a porous glass layer with various bulk densities is deposited. Can be made. In order to permeate the solution containing the additive into the porous glass layer, for example, after pouring the solution into the pipe, the excess solution is discarded, but the method is not limited thereto. As the additive, a compound of an element to be added to the porous glass layer, such as chloride or oxide, specifically, Er (ErCl 3 or the like), Nd (NdCl 3 or the like),
Yb (such as YbCl 3), Tm (such as TmCl 3), P
r (PrCl 3 etc.), La (LaCl 3 etc.), Al
Examples include compounds of rare earth elements such as [Al (NO 3 ), etc.], P (P 2 O 5 , H 3 PO 4, etc.), and other elements. As the solvent to which the additive is added, for example, water,
Alcohols such as ethanol can dissolve the added element-containing compounds such as chlorides and salts sufficiently, and most of them volatilize by natural drying, and in addition, they can be easily and thoroughly removed by reactive gas such as Cl 2 Is.
【0008】[0008]
【実施例】以下、実施例を挙げて本発明を具体的に説明
するが、本発明はこれに限定されるものではない。 〔実施例1〕VAD法により得られた棒状のSiO2 ガ
ラス母材を穿孔加工し、長さ200mm、外径φ25m
m、内径φ12mmのパイプとしこれを数本用意した。
図1の構成によりガラスパイプを回転させながら片端よ
り、不活性ガスとしてN2 ガス、O2 ガス、多孔質ガラ
ス層の原料となるSiCl4 、GeCl4 を導入し、パ
イプ表面を酸水素バーナーで加熱しながらバーナーをパ
イプの長手方向に一定速度で移動させ、パイプの内面に
多孔質ガラス層を堆積させたものを数本作製した。原料
投入量(SiCl4 、GeCl3 の蒸気圧及びキャリア
ガスの流量)、酸水素バーナーの火力、移動速度を変え
ることにより、多孔質ガラス層のカサ密度がそれぞれ異
なる数本のパイプを作製した。更にエタノール(C2 H
5 OH)にAl(NO3 )3 ・9H2 Oを0.35モル
/リットルの濃度、ErCl3 ・6H2 Oを5×10-3
モル/リットルの濃度で溶解した溶液を各ガラスパイプ
内に注ぎ込み、該溶液を多孔質ガラス層に浸透させた。
その後、各ガラスパイプに残った余剰の溶液を除去し、
各ガラスパイプ内部にO2 、Cl2 などのガスを流しな
がら、多孔質ガラス層を加熱透明化して、該ガラスパイ
プを中実化させて、光ファイバ母材とした。得られた各
母材を輪切りに切り出し、ICP−MS法(誘導結合高
周波プラズマ質量分析法)により、図2に示す堆積によ
って生成させたコア部分のErの濃度を分析した。結果
を図3にまとめて示す。図3中●は多孔質ガラス層の組
成がSiO2 90モル%−GeO2 10モル%、○はS
iO2 80モル%−GeO220モル%、△はSiO2
100モル%であったものを示す。図3の結果より、
0.20〜0.78g/cm3 のカサ密度の領域でEr
が添加されており、前記のカサ密度から計算によって求
められる結果より低濃度となっているのは、加熱透明
化、パイプ中実化の際にErが揮散することによると考
えられる。また、図中×印で示されるA,Bではガラス
の組成に関係なくはく離した。カサ密度0.20g/c
m3 未満の領域では多孔質ガラス層の剥離により、また
0.8g/cm3 を越える領域では溶液浸透時にガラス
微粒子のスキ間体積が小さいことに加え、加熱透明化、
中実化時のErの揮散によって、殆ど添加されなかっ
た。EXAMPLES The present invention will be specifically described below with reference to examples, but the present invention is not limited thereto. [Example 1] A rod-shaped SiO 2 glass base material obtained by the VAD method was perforated to a length of 200 mm and an outer diameter of 25 m.
Several pipes having m and an inner diameter of 12 mm were prepared.
With the configuration shown in FIG. 1, while rotating the glass pipe, N 2 gas, O 2 gas as inert gas, and SiCl 4 and GeCl 4 as raw materials for the porous glass layer were introduced from one end, and the pipe surface was oxyhydrogen burner. While heating, the burner was moved in the longitudinal direction of the pipe at a constant speed, and several pipes were prepared by depositing a porous glass layer on the inner surface of the pipe. Several pipes having different bulk densities of the porous glass layers were produced by changing the raw material input amounts (SiCl 4 , GeCl 3 vapor pressure and carrier gas flow rate), the heating power of the oxyhydrogen burner, and the moving speed. Furthermore, ethanol (C 2 H
5 OH) to Al (NO 3) 3 · 9H 2 concentration O 0.35 mol / l, ErCl 3 · 6H 2 O to 5 × 10 -3
The solution dissolved at a concentration of mol / liter was poured into each glass pipe, and the solution was permeated into the porous glass layer.
After that, remove the excess solution remaining in each glass pipe,
While flowing a gas such as O 2 or Cl 2 into each glass pipe, the porous glass layer was heated to be transparent, and the glass pipe was solidified to obtain an optical fiber preform. Each of the obtained base materials was cut into slices, and the concentration of Er in the core portion produced by the deposition shown in FIG. 2 was analyzed by the ICP-MS method (inductively coupled high frequency plasma mass spectrometry). The results are summarized in Fig. 3. In FIG. 3, ● indicates that the composition of the porous glass layer is 90 mol% SiO 2 -10 mol% GeO 2 , and ○ indicates S.
iO 2 80 mol% -GeO 2 20 mol%, Δ is SiO 2
What was 100 mol% is shown. From the result of Figure 3,
Er in the range of the bulk density of 0.20 to 0.78 g / cm 3
It is considered that Er is volatilized and that the concentration is lower than the result obtained by calculation from the above-mentioned bulk density because Er is volatilized at the time of heat transparency and solidification of the pipe. Further, in A and B indicated by X in the figure, peeling occurred regardless of the composition of the glass. Bulk density 0.20 g / c
In the region of less than m 3 , the porous glass layer is peeled off, and in the region of more than 0.8 g / cm 3 , the volume of the fine glass particles at the time of solution permeation is small, and heating transparency
Almost no addition due to volatilization of Er during solidification.
【0009】〔実施例2〕実施例1と同一方法にて、内
面に多孔質ガラス層を堆積させたガラスパイプを作製し
た。なお、多孔質ガラス層のカサ密度は0.3g/cm
3 とした。水(H 2 O)またはエタノール(C2 H5 O
H)にErCl3 ・6H2 Oを5×5×10-3モル/リ
ットルの濃度、Al(NO3 )3 ・9H2 Oを種々の濃
度で溶解した溶液を、該多孔質ガラス層に浸透させ、実
施例1と同様の方法で中実化し、コア部分のAl濃度を
ICP−MS法で分析した。結果を図3、図4に示す。
Erの濃度は実施例1の結果と同じく1000ppmで
あった。図4中○は含浸溶液の溶媒がエタノールのも
の、●はH2 Oのものを表す。図4に示すように、Al
の溶液中の濃度と共に、ガラス中の濃度も高くなった。
またAl(NO3 )3 ・9H2 Oはエタノール中での溶
解度が低く、1モル/リットル以上の濃度領域では、乾
燥後にAlの析出が生じた為、これ以上の濃度では溶媒
に水(H2 O)が用いられた。[Embodiment 2] In the same manner as in Embodiment 1,
Made a glass pipe with a porous glass layer deposited on the surface
It was The bulk density of the porous glass layer is 0.3 g / cm.
3And Water (H 2O) or ethanol (C2HFiveO
ErCl in H)3・ 6H25 x 5 x 10 O-3Mol / li
Toll concentration, Al (NO3)3・ 9H2O in various concentrations
The porous glass layer is infiltrated with the
Solidify by the same method as in Example 1, and change the Al concentration in the core
It analyzed by the ICP-MS method. The results are shown in FIGS. 3 and 4.
The Er concentration was 1000 ppm, which was the same as the result of Example 1.
there were. In Fig. 4, ○ indicates that the solvent of the impregnation solution is ethanol.
, ● is H2Represents O. As shown in FIG.
The concentration in the glass increased with the concentration in the solution.
In addition, Al (NO3)3・ 9H2O is dissolved in ethanol
It has a low degree of resolution, and in the concentration range of 1 mol / liter or more,
Al precipitation occurred after drying, so if the concentration is higher than this, the solvent
Water (H2O) was used.
【0010】以上説明したように、希土類元素を含んだ
溶液をガラスパイプ内面に堆積させた多孔質ガラス層に
浸透させて、加熱透明化、パイプ中実化合物を行うこと
による、石英ガラスへの希土類元素添加の方法に於い
て、従来からの問題であった多孔質ガラス層の剥離、添
加濃度のばらつきを、多孔質ガラス層のカサ密度を0.
20g/cm3 〜0.8g/cm3 とすることにより解
決できた。As described above, a rare earth element is added to quartz glass by infiltrating the porous glass layer deposited on the inner surface of the glass pipe with a solution containing a rare earth element, heating the material for transparency, and conducting a pipe solid compound. In the element addition method, peeling of the porous glass layer and variations in the addition concentration, which have been problems in the past, were detected by adjusting the bulk density of the porous glass layer to 0.
It could be solved by a 20g / cm 3 ~0.8g / cm 3 .
【0011】[0011]
【図1】はMCVD法の概略説明図である。FIG. 1 is a schematic explanatory diagram of an MCVD method.
【図2】は本発明の実施例における希土類元素添加量を
測定した部分を説明するための加熱中実化母材の断面図
である。FIG. 2 is a cross-sectional view of a solidified base material for heating for explaining a portion where the amount of rare earth element addition in the example of the present invention was measured.
【図3】はパイプ内面の多孔質ガラス層カサ密度(g/
cm3 )とEr添加濃度(ppm)との関係を示すグラ
フ部である。FIG. 3 shows the bulk density (g / g) of the porous glass layer on the inner surface of the pipe.
3 is a graph part showing the relationship between cm 3 ) and Er addition concentration (ppm).
【図4】はパイプ内面の多孔質ガラス層カサ密度(g/
cm3 )とAl添加濃度(ppm)との関係を示すグラ
フ部である。FIG. 4 shows the bulk density (g / g) of the porous glass layer on the inner surface of the pipe.
3 is a graph part showing the relationship between (cm 3 ) and Al addition concentration (ppm).
【図5】は多孔質ガラス層への溶液含浸による希土類元
素添加のメカニズムを説明する模式図である。FIG. 5 is a schematic diagram illustrating a mechanism of adding a rare earth element by impregnating a porous glass layer with a solution.
Claims (4)
分とする多孔質ガラス層を堆積させたのち、該多孔質ガ
ラス層への添加物を含有する溶液を該多孔質ガラス層に
浸透させ、しかるのち該多孔質ガラス層を加熱して透明
ガラス化し該ガラスパイプを中実化させるガラス用母材
の製造方法において、前記多孔質ガラス層のカサ密度を
0.2g/cm3 〜0.8g/cm3 とすることを特徴
とする光ファイバ用母材の製造方法。1. A porous glass layer containing quartz glass as a main component is deposited on the inner surface of a glass pipe, and then a solution containing an additive to the porous glass layer is permeated into the porous glass layer, Then, in the method for producing a glass preform for heating the porous glass layer to make it transparent glass and solidifying the glass pipe, the bulk density of the porous glass layer is 0.2 g / cm 3 to 0.8 g. / Cm 3 The method for producing a preform for optical fibers, characterized in that
Nd,Yb,Tm,Pr,La,Al及びPから選ばれ
る元素の化合物の1種類以上であることを特徴とする請
求項1記載の光ファイバ用母材の製造方法。2. The additive to the porous glass layer is Er,
2. The method for producing an optical fiber preform according to claim 1, which is one or more kinds of compounds of an element selected from Nd, Yb, Tm, Pr, La, Al and P.
る溶液はその溶媒が水またはエタノールであることを特
徴とする請求項1または請求項2記載の光ファイバ用母
材の製造方法。3. The method for producing an optical fiber preform according to claim 1, wherein the solvent of the solution containing the additive for the porous glass layer is water or ethanol.
得られた棒状ガラス母材を穿孔加工してパイプ状とした
ものを用いることを特徴とする請求項1記載の光ファイ
バ用ガラス母材の製造方法。4. The method for producing a glass base material for an optical fiber according to claim 1, wherein a rod-shaped glass base material obtained by a VAD method is drilled to form a pipe shape as the glass pipe. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8641893A JPH06298542A (en) | 1993-04-13 | 1993-04-13 | Production of optical fiber preform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8641893A JPH06298542A (en) | 1993-04-13 | 1993-04-13 | Production of optical fiber preform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06298542A true JPH06298542A (en) | 1994-10-25 |
Family
ID=13886340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8641893A Pending JPH06298542A (en) | 1993-04-13 | 1993-04-13 | Production of optical fiber preform |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06298542A (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2746789A1 (en) * | 1996-03-30 | 1997-10-03 | Samsung Electronics Co Ltd | METHOD AND APPARATUS FOR MANUFACTURING OPTICAL FIBERS DOPED WITH ERBIUM |
| EP1043281A1 (en) * | 1999-04-09 | 2000-10-11 | Spectran Corporation | Method of fabricating preforms doped with rare earth metal for optical fibers |
| WO2003033422A1 (en) * | 2001-10-15 | 2003-04-24 | The Furukawa Electric Co., Ltd. | Method for producing rare earth element doped glass and fiber for optical amplification using the glass |
| JP2007091579A (en) * | 2005-08-29 | 2007-04-12 | Fujikura Ltd | Optical fiber preform manufacturing method |
| EP1903011A3 (en) * | 2006-09-20 | 2008-07-09 | Imra America, Inc. | Rare earth doped and large effective area optical fibers for fiber lasers and amplifiers |
| EP2108624A1 (en) | 2008-01-15 | 2009-10-14 | Sumitomo Electric Industries, Ltd. | Rare-earth-doped optical fiber, optical fiber amplifier, and method of manufacturing a preform for such fiber |
| US7792394B2 (en) | 2004-12-30 | 2010-09-07 | Imra America, Inc. | Photonic bandgap fibers |
| US8902493B2 (en) | 2008-12-04 | 2014-12-02 | Imra America, Inc. | Highly rare-earth-doped optical fibers for fiber lasers and amplifiers |
| US8995051B2 (en) | 2007-09-26 | 2015-03-31 | Imra America, Inc. | Glass large-core optical fibers |
| US9281650B2 (en) | 2005-05-20 | 2016-03-08 | Imra America, Inc. | Single mode propagation in fibers and rods with large leakage channels |
| US9645309B2 (en) | 2004-01-16 | 2017-05-09 | Imra America, Inc. | Large core holey fibers |
-
1993
- 1993-04-13 JP JP8641893A patent/JPH06298542A/en active Pending
Cited By (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2746789A1 (en) * | 1996-03-30 | 1997-10-03 | Samsung Electronics Co Ltd | METHOD AND APPARATUS FOR MANUFACTURING OPTICAL FIBERS DOPED WITH ERBIUM |
| EP1043281A1 (en) * | 1999-04-09 | 2000-10-11 | Spectran Corporation | Method of fabricating preforms doped with rare earth metal for optical fibers |
| KR100677174B1 (en) * | 1999-04-09 | 2007-02-05 | 피텔 유.에스.에이. 코포레이션 | Method for manufacturing preforms for rare earth doped optical fibers |
| WO2003033422A1 (en) * | 2001-10-15 | 2003-04-24 | The Furukawa Electric Co., Ltd. | Method for producing rare earth element doped glass and fiber for optical amplification using the glass |
| US7079738B2 (en) | 2001-10-15 | 2006-07-18 | The Furukawa Electric Co., Ltd. | Method for manufacturing a glass doped with a rare earth element and fiber for optical amplification using the same |
| US10197727B2 (en) | 2004-01-16 | 2019-02-05 | Imra America, Inc. | Large core holey fibers |
| US9645309B2 (en) | 2004-01-16 | 2017-05-09 | Imra America, Inc. | Large core holey fibers |
| US7792394B2 (en) | 2004-12-30 | 2010-09-07 | Imra America, Inc. | Photonic bandgap fibers |
| US9281650B2 (en) | 2005-05-20 | 2016-03-08 | Imra America, Inc. | Single mode propagation in fibers and rods with large leakage channels |
| US10067289B2 (en) | 2005-05-20 | 2018-09-04 | Imra America, Inc. | Single mode propagation in fibers and rods with large leakage channels |
| US9664849B2 (en) | 2005-05-20 | 2017-05-30 | Imra America, Inc. | Single mode propagation in fibers and rods with large leakage channels |
| JP2007091579A (en) * | 2005-08-29 | 2007-04-12 | Fujikura Ltd | Optical fiber preform manufacturing method |
| US8213758B2 (en) | 2006-09-20 | 2012-07-03 | Imra America, Inc. | Rare earth doped and large effective area optical fibers for fiber lasers and amplifiers |
| US8542968B2 (en) | 2006-09-20 | 2013-09-24 | Imra America, Inc. | Rare earth doped and large effective area optical fibers for fiber lasers and amplifiers |
| US7450813B2 (en) | 2006-09-20 | 2008-11-11 | Imra America, Inc. | Rare earth doped and large effective area optical fibers for fiber lasers and amplifiers |
| EP1903011A3 (en) * | 2006-09-20 | 2008-07-09 | Imra America, Inc. | Rare earth doped and large effective area optical fibers for fiber lasers and amplifiers |
| US8995051B2 (en) | 2007-09-26 | 2015-03-31 | Imra America, Inc. | Glass large-core optical fibers |
| US9632243B2 (en) | 2007-09-26 | 2017-04-25 | Imra America, Inc. | Glass large-core optical fibers |
| US10353144B2 (en) | 2007-09-26 | 2019-07-16 | Imra America, Inc. | Glass large-core optical fibers |
| EP2108624A1 (en) | 2008-01-15 | 2009-10-14 | Sumitomo Electric Industries, Ltd. | Rare-earth-doped optical fiber, optical fiber amplifier, and method of manufacturing a preform for such fiber |
| US8902493B2 (en) | 2008-12-04 | 2014-12-02 | Imra America, Inc. | Highly rare-earth-doped optical fibers for fiber lasers and amplifiers |
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