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JPH06281519A - Pressure sensor - Google Patents

Pressure sensor

Info

Publication number
JPH06281519A
JPH06281519A JP5066541A JP6654193A JPH06281519A JP H06281519 A JPH06281519 A JP H06281519A JP 5066541 A JP5066541 A JP 5066541A JP 6654193 A JP6654193 A JP 6654193A JP H06281519 A JPH06281519 A JP H06281519A
Authority
JP
Japan
Prior art keywords
cover
terminal
pressure
electronic circuit
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5066541A
Other languages
Japanese (ja)
Other versions
JP3067001B2 (en
Inventor
Tateki Mitani
干城 三谷
Koji Akiyama
幸治 秋山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP5066541A priority Critical patent/JP3067001B2/en
Publication of JPH06281519A publication Critical patent/JPH06281519A/en
Application granted granted Critical
Publication of JP3067001B2 publication Critical patent/JP3067001B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To reduce the size of sensor and lower the cost by combining the connector inserted by a terminal and the cover and fixing a capacitor to the cover after soldering on a shield cover. CONSTITUTION:A connector 18 formed by inserting a terminal 17 and a cover 16 are combined in one and a capacitor 20 is soldered on a shield cover 19 and then fixed to the cover 16. A base plate 21 fixed with a pressure sensing element 22 and an overlapping electronic circuit 23 with the use of a long lead 23a and a base 24 containing a filter 25 are fixed to the cover 16. When pressure from a measured object reaches a diaphragm having the pressure sensing element 22 through the medium, the filter 25 and a pressure introduction part 26, the diaphragm is distorted, the balance of the bridge resistors formed on the diaphragm is lost to generate a resistance difference. This is converted to voltage to transmit to the electronic circuit 23, amplified and temperature- compensated there, and the output is transmitted to the terminal and a computer, etc.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、気体や液体の圧力を
測定する圧力センサに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pressure sensor for measuring the pressure of gas or liquid.

【0002】[0002]

【従来の技術】図3は例えば実開平4−64741号公
報に示された従来の圧力センサの断面図、図4は図3を
上からみた図である。図において、1は外部に電気的に
接続されるターミナル、2はターミナル1を包含しかつ
図示しない外部コネクタと機械的に接続されるコネク
タ、3は外部から侵入する電波ノイズをカットするコン
デンサで、シールド板4及びターミナル1に半田付けさ
れている。5は例えば半導体によるピエゾ抵抗効果を用
いた感圧素子6,この感圧素子6の出力信号を増幅しさ
らに温度補償する機能をもつ電子回路(HIC)7,及
び外部からの電波ノイズを遮蔽するシールドカバー8等
を装着した基板で、ターミナル1と半田付部9により接
続されている。10は感圧素子6の圧力導入部すなわち
ニップル、11はニップル10部とカップ12との間を
シールするOリング、13はカップ12とターミナル
1,コネクタ2と一体化したベース14との間に挿入さ
れたフィルタ、15は感圧素子6,電子回路7,基板5
等を保護しかつベース14と固着されたカバーである。
2. Description of the Related Art FIG. 3 is a sectional view of a conventional pressure sensor disclosed in, for example, Japanese Utility Model Laid-Open No. 4-64741, and FIG. 4 is a top view of FIG. In the figure, 1 is a terminal electrically connected to the outside, 2 is a connector that includes the terminal 1 and is mechanically connected to an external connector (not shown), and 3 is a capacitor that cuts out radio wave noise from the outside, Soldered to the shield plate 4 and the terminal 1. Reference numeral 5 is, for example, a pressure sensitive element using a piezoresistive effect by a semiconductor 6, an electronic circuit (HIC) 7 having a function of amplifying an output signal of the pressure sensitive element 6 and further performing temperature compensation, and shielding radio wave noise from the outside. A board on which a shield cover 8 and the like are mounted is connected to the terminal 1 by a soldering portion 9. Reference numeral 10 is a pressure introducing portion, that is, a nipple of the pressure sensitive element 6, 11 is an O-ring for sealing between the nipple 10 portion and the cup 12, and 13 is between the cup 12 and the base 14 integrated with the terminal 1 and the connector 2. The inserted filter, 15 is the pressure sensitive element 6, the electronic circuit 7, the substrate 5
A cover that protects the like and is fixed to the base 14.

【0003】次に動作について説明する。フィルタ13
を通って感圧素子6に伝わった圧力は、感圧素子6内の
例えば半導体ピエゾ抵抗効果を利用したダイアフラムを
歪ませ、その歪み量に応じた抵抗値変化を電子回路7に
伝える。そこで、数十倍に増幅し、更に広い温度範囲で
も精度良く測定できるように温度補償がされている。こ
の圧力に応じた出力電圧変化は、コネクタ2内のターミ
ナル1を通して外部の図示しない例えばコンピュータに
伝わる。
Next, the operation will be described. Filter 13
The pressure transmitted to the pressure sensitive element 6 through the strain distorts the diaphragm in the pressure sensitive element 6, which utilizes, for example, the semiconductor piezoresistive effect, and transmits a resistance value change corresponding to the strain amount to the electronic circuit 7. Therefore, the temperature is compensated so that it can be amplified several tens of times and can be accurately measured even in a wider temperature range. The change in the output voltage according to the pressure is transmitted to an external device (not shown) such as a computer through the terminal 1 in the connector 2.

【0004】[0004]

【発明が解決しようとする課題】従来の圧力センサは以
上のように構成されているので、基板5上に占める感圧
素子6及び電子回路7の面積が大きくなり、そのために
シールドカバー8が大形となると共に、コンデンサ3を
半田付けするシールド板4が必要となって外形が大きく
なると共に、同時にコストも高くなるという問題点があ
った。
Since the conventional pressure sensor is constructed as described above, the area of the pressure sensitive element 6 and the electronic circuit 7 occupied on the substrate 5 becomes large, and therefore the shield cover 8 is large. In addition to the shape, the shield plate 4 for soldering the capacitor 3 is required, and the outer shape is increased, and at the same time, the cost is increased.

【0005】この発明は上記のような問題点を解消する
ためになされたもので、小形化が図れると共に同時にコ
ストダウンが図れる圧力センサを得ることを目的とす
る。
The present invention has been made to solve the above problems, and an object thereof is to obtain a pressure sensor which can be downsized and at the same time cost reduced.

【0006】[0006]

【課題を解決するための手段】この発明に係る圧力セン
サは、ターミナルをインサートしたコネクタとカバーと
を一体化し、コンデンサをシールドカバーに半田付けし
た後カバーに固定し、感圧素子と電子回路とを重ねて装
着した基板をカバーに固定すると共にフィルタを内蔵し
たベースをカバーに固定したものである。
In a pressure sensor according to the present invention, a connector having a terminal inserted and a cover are integrated, a capacitor is soldered to a shield cover and then fixed to the cover, and a pressure sensitive element and an electronic circuit are provided. The substrates mounted in layers are fixed to the cover, and the base with the built-in filter is fixed to the cover.

【0007】[0007]

【作用】この発明における圧力センサは、感圧素子と電
子回路とを重ねて基板上に装着してコネクタをカバーと
一体化したことにより、小形化されコストが下がる。
In the pressure sensor of the present invention, the pressure-sensitive element and the electronic circuit are superposed on each other and mounted on the substrate to integrate the connector with the cover, whereby the pressure sensor is downsized and the cost is reduced.

【0008】[0008]

【実施例】【Example】

実施例1.以下、この発明の一実施例を図1,図2につ
いて説明する。図1は断面図、図2は図1を上からみた
図である。図において、16はターミナル17をインサ
ート成形したコネクタ18と一体化したカバー、19は
コンデンサ20を半田付けしたシールドカバーで、カバ
ー16内に固定されている。21は感圧素子22と長い
リード23aを用いた電子回路(HIC)23とを重ね
て装着した基板で、ターミナル17に半田付け21aさ
れている。24はフィルタ25を内蔵したベースで、カ
バー16と固定されている。
Example 1. An embodiment of the present invention will be described below with reference to FIGS. 1 is a sectional view, and FIG. 2 is a view of FIG. 1 seen from above. In the figure, 16 is a cover integrated with a connector 18 in which a terminal 17 is insert-molded, and 19 is a shield cover to which a capacitor 20 is soldered, which is fixed in the cover 16. Reference numeral 21 denotes a substrate on which a pressure-sensitive element 22 and an electronic circuit (HIC) 23 using long leads 23a are stacked and mounted, and soldered 21a to the terminal 17. Reference numeral 24 denotes a base having a filter 25 built therein, which is fixed to the cover 16.

【0009】次に動作について説明する。測定対象の圧
力媒体が、フィルタ25を通り圧力導入部26から感圧
素子22の図示しない例えば半導体ピエゾ抵抗効果を利
用したダイアフラムに到着すると、ダイアフラムが歪
み、ダイアフラム上に形成された4本のブリッジ状の抵
抗のバランスがくずれ、抵抗差が生じる。これを電圧変
換して電子回路23に伝え、ここで増幅及び温度補償し
てターミナル17より出力電圧の変化として図示しない
コンピュータ等へ伝える。又コンデンサ20は、ターミ
ナル17から入ってくる電波ノイズを、シールドカバー
19は外来の電波ノイズをそれぞれ遮断し、圧力センサ
が正常に機能するように保護する。
Next, the operation will be described. When the pressure medium to be measured reaches the not-shown diaphragm of the pressure-sensitive element 22 through the filter 25 from the pressure introducing portion 26, the diaphragm is distorted and the four bridges formed on the diaphragm are distorted. -Shaped resistance is out of balance, resulting in a resistance difference. This is voltage-converted and transmitted to the electronic circuit 23, where it is amplified and temperature-compensated and transmitted from the terminal 17 to a computer (not shown) as a change in the output voltage. Further, the capacitor 20 shields radio wave noise coming from the terminal 17 and the shield cover 19 shields external radio wave noise, respectively, and protects the pressure sensor so as to function normally.

【0010】このように感圧素子22と電子回路23と
を重ねて基板21上に装着しておくと、全体として従来
タイプに比べ容積が2/3になり、重量も2/3となっ
て小形化が図れると共に同時に安価になる。
When the pressure-sensitive element 22 and the electronic circuit 23 are stacked and mounted on the substrate 21 as described above, the overall volume becomes 2/3 and the weight becomes 2/3 as compared with the conventional type. The size can be reduced and the cost can be reduced at the same time.

【0011】実施例2.上記実施例では感圧素子22の
上方に電子回路23を装着したものを示したが、電子回
路23の上方に感圧素子22を設けてもよい。又、フィ
ルタ25がない場合も同様である。又、上記実施例では
圧力センサの場合について説明したが、他の例えば加速
度センサや電流センサであっても、上記実施例と同様の
効果を奏する。
Embodiment 2. Although the electronic circuit 23 is mounted above the pressure sensitive element 22 in the above embodiment, the pressure sensitive element 22 may be provided above the electronic circuit 23. The same applies when the filter 25 is not provided. Further, in the above-described embodiment, the case of the pressure sensor has been described, but the same effect as that in the above-described embodiment can be obtained even if another sensor such as an acceleration sensor or a current sensor is used.

【0012】[0012]

【発明の効果】以上のように、この発明によれば基板上
に感圧素子と電子回路とを重ねて装着すると共にコネク
タとカバーを一体構造にしかつシールドカバーをカバー
に固定するように構成したので、装置が従来品に比べて
2/3の形状になって小形となると共に安価になるとい
う効果が得られる。
As described above, according to the present invention, the pressure sensitive element and the electronic circuit are mounted on the substrate in an overlapping manner, and the connector and the cover are integrally structured and the shield cover is fixed to the cover. Therefore, it is possible to obtain the effect that the device has a shape that is ⅔ of that of the conventional product, is small, and is inexpensive.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の一実施例による圧力センサを示す断
面図である。
FIG. 1 is a sectional view showing a pressure sensor according to an embodiment of the present invention.

【図2】図1を上からみた図である。FIG. 2 is a view of FIG. 1 seen from above.

【図3】従来の圧力センサを示す断面図である。FIG. 3 is a cross-sectional view showing a conventional pressure sensor.

【図4】図3を上からみた図である。FIG. 4 is a view of FIG. 3 seen from above.

【符号の説明】[Explanation of symbols]

16 カバー 17 ターミナル 18 コネクタ 19 シールドカバー 20 コンデンサ 21 基板 22 感圧素子 23 電子回路 24 ベース 25 フィルタ 16 Cover 17 Terminal 18 Connector 19 Shield Cover 20 Capacitor 21 Board 22 Pressure Sensitive Element 23 Electronic Circuit 24 Base 25 Filter

─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───

【手続補正書】[Procedure amendment]

【提出日】平成5年8月5日[Submission date] August 5, 1993

【手続補正1】[Procedure Amendment 1]

【補正対象書類名】図面[Document name to be corrected] Drawing

【補正対象項目名】図3[Name of item to be corrected] Figure 3

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【図3】 [Figure 3]

【手続補正2】[Procedure Amendment 2]

【補正対象書類名】図面[Document name to be corrected] Drawing

【補正対象項目名】図4[Name of item to be corrected] Figure 4

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【図4】 [Figure 4]

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 ターミナルをインサートしたコネクタと
一体化したカバーと、このカバー内に固着されかつコン
デンサが半田付けされるシールドカバーと、前記ターミ
ナルに半田付けされかつ感圧素子と電子回路とが重ねて
装着される基板と、前記カバーに固着されかつフィルタ
が内蔵されるベースとを備えたことを特徴とする圧力セ
ンサ。
1. A cover integrated with a connector into which a terminal is inserted, a shield cover fixed to the cover and soldered with a capacitor, and a pressure-sensitive element and an electronic circuit which are soldered to the terminal and overlap each other. A pressure sensor, comprising: a substrate mounted on the cover; and a base fixed to the cover and having a built-in filter.
JP5066541A 1993-03-25 1993-03-25 Pressure sensor Expired - Lifetime JP3067001B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5066541A JP3067001B2 (en) 1993-03-25 1993-03-25 Pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5066541A JP3067001B2 (en) 1993-03-25 1993-03-25 Pressure sensor

Publications (2)

Publication Number Publication Date
JPH06281519A true JPH06281519A (en) 1994-10-07
JP3067001B2 JP3067001B2 (en) 2000-07-17

Family

ID=13318872

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5066541A Expired - Lifetime JP3067001B2 (en) 1993-03-25 1993-03-25 Pressure sensor

Country Status (1)

Country Link
JP (1) JP3067001B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4442478A1 (en) * 1993-11-30 1995-06-14 Mitsubishi Electric Corp Sensor with integrated connector
US5661244A (en) * 1994-10-05 1997-08-26 Mitsubishi Denki Kabushiki Kaisha Pressure sensor
EP0949494A2 (en) * 1998-04-09 1999-10-13 Fujikoki Corporation Semiconductive pressure sensor
CN105307833A (en) * 2013-04-30 2016-02-03 迈克尔·雷蒙德·格罗洛 Intermediate connector
JP2016103654A (en) * 2016-01-04 2016-06-02 旭化成ケミカルズ株式会社 Electronic equipment

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4442478A1 (en) * 1993-11-30 1995-06-14 Mitsubishi Electric Corp Sensor with integrated connector
DE4442478C2 (en) * 1993-11-30 1999-03-25 Mitsubishi Electric Corp Sensor with integrated connector
US5661244A (en) * 1994-10-05 1997-08-26 Mitsubishi Denki Kabushiki Kaisha Pressure sensor
EP0949494A2 (en) * 1998-04-09 1999-10-13 Fujikoki Corporation Semiconductive pressure sensor
EP0949494A3 (en) * 1998-04-09 2000-05-03 Fujikoki Corporation Semiconductive pressure sensor
US6176137B1 (en) 1998-04-09 2001-01-23 Fujikoki Corporation Pressure sensor
CN105307833A (en) * 2013-04-30 2016-02-03 迈克尔·雷蒙德·格罗洛 Intermediate connector
JP2016103654A (en) * 2016-01-04 2016-06-02 旭化成ケミカルズ株式会社 Electronic equipment

Also Published As

Publication number Publication date
JP3067001B2 (en) 2000-07-17

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