JPH0627026B2 - Ceramic substrate firing sheet - Google Patents
Ceramic substrate firing sheetInfo
- Publication number
- JPH0627026B2 JPH0627026B2 JP2011739A JP1173990A JPH0627026B2 JP H0627026 B2 JPH0627026 B2 JP H0627026B2 JP 2011739 A JP2011739 A JP 2011739A JP 1173990 A JP1173990 A JP 1173990A JP H0627026 B2 JPH0627026 B2 JP H0627026B2
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- alumina
- ceramic substrate
- firing
- ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Paper (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は電子機器用の回路基板の作成に使用されるセラ
ミックス基板焼成時に用いるセパレートシートとしての
セラミックス基板焼成用シートに関するものである。Description: TECHNICAL FIELD The present invention relates to a ceramic substrate baking sheet as a separate sheet used for baking a ceramic substrate used for producing a circuit board for electronic devices.
〔従来の技術〕〔発明が解決しようとする課題〕 従来、回路基板はセラミックス台板上にアルミナ等から
なるセラミックスの未焼成基板を必要に応じて多段に載
置して、基板と基板の間等に機械又は手作業でアルミナ
粉末の如き高融点金属酸化物の粉末を散布し、その後未
焼成基板を焼成して基板を製造していた。[Prior Art] [Problems to be Solved by the Invention] Conventionally, a circuit board is constructed by placing an unfired substrate of ceramics such as alumina on a ceramic base plate in multiple stages as necessary, and between the substrates. A powder of a refractory metal oxide such as alumina powder is mechanically or manually sprayed onto the above, and then the unbaked substrate is baked to manufacture the substrate.
この方法では作業性が悪く前期高融点金属酸化物が均一
に分散されず、製造された基板に反りやうねりを発生す
るとともに、基板同志の付着も起るために、コスト高と
なる等の問題があった。In this method, the workability is poor and the refractory metal oxide is not uniformly dispersed in the previous period, which causes warpage and undulation on the manufactured substrate, and the adhesion of the substrate to each other also causes a problem such as high cost. was there.
又、他の方法としてガラス繊維，ロックウール，アルミ
ナシリケート等を基本材として作製したセラミックスシ
ートを、セラミックス焼成用シートとして使用すること
も行なわれてきているが、近年は新素材セラミックスの
開発により、セラミックスの焼成温度が上昇する傾向に
あり、このような繊維を使用したシートでは1000℃以上
の高温域での基板の焼成に際して該シートが基板と反応
したり、基板同志が融着したりして基板の焼成に対する
悪影響が発生する等の問題があった。In addition, as another method, a ceramic sheet produced by using glass fiber, rock wool, alumina silicate, etc. as a basic material has been used as a sheet for firing ceramics. In recent years, due to the development of new material ceramics, The firing temperature of ceramics tends to rise, and in a sheet using such a fiber, when the substrate is fired in a high temperature range of 1000 ° C. or higher, the sheet reacts with the substrate or the substrates are fused with each other. There is a problem such as an adverse effect on the firing of the substrate.
本発明は前記の如き実情に鑑み、鋭意検討の結果なされ
たもので、アルミナ系セラミックス繊維と、アルミナ系
バインダーとを組合せて抄造した紙のシートを採用した
ものである。The present invention has been made as a result of earnest studies in view of the above circumstances, and employs a paper sheet made by combining alumina-based ceramic fibers and an alumina-based binder.
本発明を構成するアルミナ系セラミックス繊維は、Al2O
3−SiO2質を出発原料として繊維化したもので、例えば
商品名デンカアルセン（電気化学工業社製）として上市
されているものが本発明に適用される。そしてその特徴
とするところは、繊維中に含まれるAl2O3の含有量が８
０〜９５％という高配合にあることにある。つまり通常
のアルミナシリケート繊維（セラミックファイバー）は
Al2O3の含有量が５５％が上限なのに対し、本発明で適
用するアルミナ系セラミックス繊維は例えば前駆体法と
よばれる特殊な繊維化技術を用い、紡糸助剤を添加した
原液を繊維化することにより、Al2O3の含有量を約８０
〜９５％にしたものである。The alumina-based ceramic fiber that constitutes the present invention is Al 2 O 3.
Fibers obtained by using 3- SiO 2 as a starting material, for example, those marketed under the trade name Denka Arsene (manufactured by Denki Kagaku Kogyo Co., Ltd.) are applicable to the present invention. And the feature is that the content of Al 2 O 3 contained in the fiber is 8
It is in a high composition of 0 to 95%. In other words, normal alumina silicate fiber (ceramic fiber)
While the upper limit of the content of Al 2 O 3 is 55%, the alumina-based ceramic fiber applied in the present invention uses, for example, a special fiberizing technique called a precursor method, and a stock solution containing a spinning aid is fiberized. The content of Al 2 O 3 is about 80
Up to 95%.
このように高配合のAl2O3から構成されるアルミナ系セ
ラミックス繊維を使用することにより、前述のガラス繊
維、ロックウール、アルミナシリケート繊維よりも耐熱
温度を大幅に向上することが可能となり、１６００℃の
使用温度でも繊維が劣化したり、収縮したりすることが
ない。By using the alumina-based ceramic fiber composed of a high content of Al 2 O 3 as described above, it is possible to significantly improve the heat resistance temperature as compared with the above-mentioned glass fiber, rock wool and alumina silicate fiber. The fiber does not deteriorate or shrink even at a use temperature of ℃.
一方本発明を構成するアルミナ系バインダーとは水を分
散媒としたアルミナ水和物のコロイド液すなわちアルミ
ナゾルが適用される。該アルミナゾルは５ｍμ〜２００
ｍμのコロイドの大きさを持つベーマイト系アルミナ水
和物で重合粒子が水中の陰イオンを安定剤として分散し
ている乳白色の液体であり、例えば商品名アルミナゾル
（日産化学社製）として上市されているものが使用され
る。On the other hand, as the alumina-based binder constituting the present invention, a colloidal solution of alumina hydrate having water as a dispersion medium, that is, alumina sol is applied. The alumina sol is 5 mμ to 200
Boehmite-based alumina hydrate having a colloidal size of mμ, which is a milky white liquid in which polymer particles are dispersed with an anion in water as a stabilizer, and is marketed, for example, under the trade name Aluminasol (manufactured by Nissan Chemical Co., Ltd.). What is present is used.
本発明の実施に際しては湿式抄造法が用いられる。すな
わちアルミナ系セラミックス繊維を水に分散したスラリ
ーとし、これにバインダーとして例えばアルミナゾルを
アルミナ系セラミックス繊維に対し５〜60重量％加えて
抄造される。この場合アルナゾルが５重量％未満では抄
造されたシートに所定の強度が得られず、一方60重量％
を超えた場内はアルミナゾルの歩留りが悪くなり、シー
トの強度上昇には貢献しない。In carrying out the present invention, a wet papermaking method is used. That is, a slurry is prepared by dispersing alumina-based ceramic fibers in water, and alumina sol as a binder is added to the slurry in an amount of 5 to 60% by weight based on the alumina-based ceramic fibers for papermaking. In this case, if the amount of arunazol is less than 5% by weight, the paper sheet cannot have a predetermined strength, while 60% by weight
The yield of alumina sol becomes worse in the field exceeding 1.0 and does not contribute to the increase in the strength of the sheet.
アルミナゾルの定着にはアンモニアを使用し、pHが７〜
10になるように調整する。pHがこの範囲を外れた場合は
アルミナゾルの定着は旨く行かず、必要なシートの強度
は得られない。Ammonia is used to fix the alumina sol, and the pH is 7-
Adjust to 10. If the pH is out of this range, the fixing of the alumina sol will not be successful and the required sheet strength cannot be obtained.
得られるシートの厚さは０．０５〜２mmが適当であり、
０．０５mm未満では焼成後必要なシートの強度が得られ
ず、又焼成において基板同志が融着する可能性を生じる
ので好ましくない。又、シートの厚さが２mmを超えた場
合は必要以上に厚くなるだけであるので、コストが高く
なるだけで他に有利な効果は生れない。The suitable thickness of the obtained sheet is 0.05-2 mm,
If it is less than 0.05 mm, the necessary strength of the sheet cannot be obtained after firing, and there is a possibility that the substrates are fused together during firing, which is not preferable. Further, when the thickness of the sheet exceeds 2 mm, the thickness is unnecessarily increased, so that the cost is increased and no other advantageous effect is produced.
又、無機バインダーだけではシートに強度が不足するよ
うな場合、ＰＶＡ，ＳＷＰ，天然パルプ，合成パルプ等
の有機系バインダーを使用することが好ましい。ただし
有機系バインダーの添加量はバインダーの総量に対し20
重量％以下であることが望ましい。20重量％を超えた場
合には、セラミックスの焼成時にセラミックス基板に悪
影響を及ぼす可能性が考えられる。しかし、その影響が
容認できる範囲ならばその範囲での添加はたとえ20重量
％を超えても不都合ではない。When the strength of the sheet is insufficient with only the inorganic binder, it is preferable to use an organic binder such as PVA, SWP, natural pulp or synthetic pulp. However, the amount of organic binder added is 20 with respect to the total amount of binder.
It is desirable that the content is not more than weight%. If it exceeds 20% by weight, it is considered that the ceramic substrate may be adversely affected during firing of the ceramic. However, if the effect is in an acceptable range, addition in that range is not inconvenient even if it exceeds 20% by weight.
上記の方法で抄造された本発明のセラミックス基板焼成
用シートは表面が平滑で基板焼成時にシートの凹凸によ
るセラミックスへの悪影響はなく平滑なセラミックス基
板が得られる。The ceramic substrate baking sheet of the present invention produced by the above method has a smooth surface, and a smooth ceramic substrate can be obtained without any adverse effect on the ceramic due to the unevenness of the sheet during baking of the substrate.
以下に本発明を実施例により具体的に説明する。 The present invention will be specifically described below with reference to examples.
実施例１ 水１０にAl2O3の含有量が約８０％のアルミナ系セラ
ミックス繊維（商品名デンカアルセン、電気化学工業社
製）を４０ｇ、アルミナ系バインダー（商品名アルミナ
ゾル、日産化学社製）の乾燥重量１０ｇ相当量を加えて
よく撹拌した後、アンモニア、硫酸バンドでｐＨを調節
し、バインダーを定着後、更にポリアクリルアミド系の
凝集剤（商品名サンフロックＡＨ−２００Ｐ、日産化学
社製）を加え、この原料２をＴＡＰＰＩ型手抄器に入
れて手抄を行い、本発明のセラミックス基板焼成用シー
トを作成した。Example 1 40 g of alumina-based ceramic fiber (trade name Denka Arcen, manufactured by Denki Kagaku Kogyo) having an Al 2 O 3 content of about 80% in water 10 and an alumina binder (trade name: alumina sol, manufactured by Nissan Chemical Co., Ltd.) After adding 10 g of dry weight equivalent and stirring well, the pH was adjusted with ammonia and sulfuric acid bands, after fixing the binder, a polyacrylamide-based coagulant (trade name: Sunflock AH-200P, manufactured by Nissan Kagaku) Then, this raw material 2 was put into a TAPPI-type hand-making machine and hand-papermaking was performed to prepare a ceramic substrate firing sheet of the present invention.
比較例１ 実施例１におけるアルミナ系セラミックス繊維をアルミ
ナシリケート繊維（Al2O3含有量５０％商品名イビウー
ル、イビデン社製）に代え、アルミナ系バインダーをシ
リカ系バインダー（商品名スノーテックス、日産化学社
製）に代えた以外は実施例１と同様にして比較用のセラ
ミックス基板焼成用シートを作成した。Comparative Example 1 The alumina-based ceramic fiber in Example 1 was replaced with alumina silicate fiber (Al 2 O 3 content 50%, trade name Ibiwool, manufactured by Ibiden), and the alumina-based binder was changed to silica-based binder (trade name Snowtex, Nissan Chemical Co., Ltd.). A comparative ceramic substrate burning sheet was prepared in the same manner as in Example 1 except that the sheet was manufactured by the same company.
比較例２ 実施例１におけるアルミナ系セラミックス繊維をアルミ
ナシリケート繊維（Al2O3含有量５０％商品名イビウー
ル、イビデン社製）に代えた以外は実施例１と同様にし
て比較用のセラミックス基板焼成用シートを作成した。Comparative Example 2 A ceramic substrate for comparison was fired in the same manner as in Example 1 except that the alumina-based ceramic fiber in Example 1 was replaced with alumina silicate fiber (Al 2 O 3 content: 50%, trade name: Ibiwool, manufactured by Ibiden). I made a sheet for.
比較例３ 実施例１におけるアルミナ系バインダーをシリカ系バイ
ンダー（商品名スノーテックス、日産化学社製）に代え
た以外は実施例１と同様にして比較用のセラミックス基
板焼成用シートを作成した。Comparative Example 3 A comparative ceramic substrate firing sheet was prepared in the same manner as in Example 1 except that the alumina binder in Example 1 was replaced with a silica binder (trade name: Snowtex, manufactured by Nissan Chemical Industries, Ltd.).
上記実施例１および比較例１〜３により得られたセラミ
ックス基板焼成用シート１を第１図に示すように厚さ
１．５mm、面積５０mm×１００mmからなるアルミナの未
焼成セラミックス基板２の間に挟み、９００〜１５００
℃の温度で焼成した結果、第１表に示す結果が得られ
た。なお、第１図中の３はセラミックス台板である。As shown in FIG. 1, a sheet 1 for firing a ceramic substrate obtained in Example 1 and Comparative Examples 1 to 3 was placed between unfired ceramic substrates 2 of alumina having a thickness of 1.5 mm and an area of 50 mm × 100 mm. Sandwich, 900-1500
As a result of firing at a temperature of ° C, the results shown in Table 1 were obtained. In addition, 3 in FIG. 1 is a ceramic base plate.
上記第１表から明らかなとおり、アルミナシリケート繊
維を使用したシート（比較例１〜３）では１０００℃ま
では収縮率が比較的小さくセパレートシートとして使用
してもセラミックス基板に何の影響も無かったが、１２
００℃を超えると、シートの収縮が始まり１５００℃で
は約５０％（面積保持率）の収縮となり、セラミックス
基板表面に収縮や凹凸などの影響を与えることが判明し
た。 As is apparent from Table 1 above, the sheets using the alumina silicate fibers (Comparative Examples 1 to 3) had a relatively small shrinkage rate up to 1000 ° C. and had no effect on the ceramic substrate even when used as a separate sheet. But 12
It has been found that when the temperature exceeds 00 ° C, the sheet starts to shrink, and at 1500 ° C, the shrinkage is about 50% (area retention rate), which causes shrinkage and unevenness on the surface of the ceramic substrate.
しかし、本発明によるデンカアルセンとアルミナゾルの
組合わせによるシート（実施例１）では１５００℃で焼
成しても何ら影響はなかった。However, the sheet (Example 1) of the combination of Denkaarsen and alumina sol according to the present invention had no effect even if fired at 1500 ° C.
バインダーについてもシリカ系のもの（比較例１〜３）
は１０００℃を超えると、基板との反応、融着がおこ
り、セパレーターとして使用出来ないことが判明した。Silica-based binders (Comparative Examples 1 to 3)
It has been found that when the temperature exceeds 1000 ° C., the reaction with the substrate and the adhesion occur, so that it cannot be used as a separator.
実施例２ アルミナ含有量８０％のアルミナ系セラミックス繊維
（商品名デンカアルセン、電気化学工業社製）とアルミ
ナ系バインダー（アルミナゾル）を乾燥重量比率で前者
が８０部、後者が２０部となるように抄紙原料を水中で
調整したアジテーターを用いて撹拌混合する。この抄紙
原料にｐＨが９．０となるようにアンモニア水を加えア
ルミナゾルを定着させる。更にこれにポリアクリルアミ
ド系の凝集剤（商品名サンフロックＡＨ−２００Ｐ、日
産化学社製）を加える。この抄紙原料を抄紙幅２００mm
のフォードリニアー型抄紙機で抄紙し、坪料１５０ｇ／
m2、厚さ２００μｍからなる本発明のセラミックス基板
焼成用シートを得た。Example 2 Alumina-based ceramic fibers having 80% alumina content (trade name: Denka Arcen, manufactured by Denki Kagaku Kogyo Co., Ltd.) and an alumina-based binder (alumina sol) were adjusted so that the dry weight ratio was 80 parts for the former and 20 parts for the latter. The papermaking raw materials are stirred and mixed using an agitator prepared in water. Ammonia water is added to the papermaking raw material so that the pH becomes 9.0, and the alumina sol is fixed. Furthermore, a polyacrylamide type flocculant (trade name: Sanfloc AH-200P, manufactured by Nissan Chemical Co., Ltd.) is added to this. This papermaking material is 200mm wide
Paper with a Ford linear type paper machine of 150 g / g
A sheet for firing a ceramic substrate of the present invention having m 2 and a thickness of 200 μm was obtained.
第２図に示すようにこのシート４をリールから矢印方向
に送り出し、ヒーター５を内蔵する酸化雰囲気中の連続
焼成炉６を通過させ、内部にある基板用の未焼成セラミ
ックスシートを焼成した後、リールに巻き取るようにし
て実施した。As shown in FIG. 2, this sheet 4 is sent out from the reel in the direction of the arrow and passed through a continuous firing furnace 6 in an oxidizing atmosphere containing a heater 5 to fire an unfired ceramic sheet for a substrate therein, It was carried out by winding it up on a reel.
その際本発明のセラミックス基板焼成用シート４は、未
焼成のセラミックス基板７の支持体となるように利用し
て本発明の実施を試みた。At that time, the sheet 4 for firing a ceramic substrate of the present invention was used so as to serve as a support for the unfired ceramic substrate 7, and an attempt was made to carry out the present invention.
具体的には、連続焼成炉６としては長さ１ｍ、幅１５cm
の装置を使用し、焼成条件は１２００℃の温度で酸化雰
囲気中、１分間に５cmの速度で移動し、２０分かけて焼
成を行うようにした。Specifically, the continuous firing furnace 6 has a length of 1 m and a width of 15 cm.
The firing conditions were set to 1200 ° C. in an oxidizing atmosphere at a rate of 5 cm per minute for 20 minutes.
焼成に際しては５０×５０mmのアルミナの未焼成セラミ
ックス基板７を、多数のロール８の上を走行する本発明
のセラミックス基板焼成用シート１の上に等間隔にて載
置して行った。その結果基板への融着を生じることも無
く、剥離製も良好で、しかも基板に亀裂や傷を生じるこ
とも無く、このような連続焼成炉を使用しても何ら実用
上の問題を生じることが無かった。The firing was performed by placing 50 × 50 mm unfired ceramic substrate 7 of alumina on the ceramic substrate firing sheet 1 of the present invention running on a large number of rolls 8 at equal intervals. As a result, there is no fusion to the substrate, peeling is good, and there are no cracks or scratches on the substrate, and there is no practical problem even if such a continuous firing furnace is used. There was no
本発明によりアルミナ等の基板を多段状に重ねて焼成す
る場合に、１５００℃までの焼成が可能となり、更に本
発明のセラミックス基板焼成用シートの平滑な面に接触
した状態で焼成されるので敷粉を使用した場合と異なり
基板に亀裂や傷が発生しない。According to the present invention, when substrates such as alumina are stacked and fired in a multi-stage manner, firing up to 1500 ° C. is possible, and further, firing is performed in contact with the smooth surface of the ceramic substrate firing sheet of the present invention. Unlike the case of using powder, the substrate does not crack or scratch.
第１図及び第２図は本発明のセラミックス基板焼成用シ
ートを使って基板を焼成する状態を示す断面図である。 １：セラミックス基板焼成用シート ２：未焼成セラミックス基板 ３：セラミックス台板 ４：セラミックス基板焼成用シート ５：ヒーター、６：連続焼成炉 ７：未焼成セラミックス基板 ８：ロール1 and 2 are cross-sectional views showing a state where a substrate is fired using the ceramic substrate firing sheet of the present invention. 1: Ceramic substrate firing sheet 2: Unfired ceramic substrate 3: Ceramic base plate 4: Ceramic substrate firing sheet 5: Heater, 6: Continuous firing furnace 7: Unfired ceramic substrate 8: Roll
Claims (2)
系バインダーとを組合せて抄造してなることを特徴とす
るセラミックス基板焼成用シート1. A sheet for firing a ceramic substrate, characterized in that the sheet is made by combining an alumina-based ceramic fiber and an alumina-based binder for papermaking.
載のセラミックス基板焼成用シート2. A ceramic substrate firing sheet according to claim 1, further comprising an organic binder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011739A JPH0627026B2 (en) | 1990-01-23 | 1990-01-23 | Ceramic substrate firing sheet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011739A JPH0627026B2 (en) | 1990-01-23 | 1990-01-23 | Ceramic substrate firing sheet |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03218981A JPH03218981A (en) | 1991-09-26 |
| JPH0627026B2 true JPH0627026B2 (en) | 1994-04-13 |
Family
ID=11786401
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011739A Expired - Fee Related JPH0627026B2 (en) | 1990-01-23 | 1990-01-23 | Ceramic substrate firing sheet |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0627026B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3438939B2 (en) * | 1993-11-19 | 2003-08-18 | 日本無機株式会社 | Inorganic paper molding |
| MX2018000125A (en) * | 2015-06-29 | 2018-08-15 | Corning Inc | MANUFACTURING LINE, PROCEDURE AND SINTERED ARTICLE. |
| CN112573903B (en) * | 2019-09-30 | 2022-08-26 | 国网河南省电力公司桐柏县供电公司 | Aluminum oxide composite substrate material and preparation method thereof |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6226488A (en) * | 1985-07-25 | 1987-02-04 | 日本バイリ−ン株式会社 | Dunnage material for baking |
| JPS6391206A (en) * | 1986-10-06 | 1988-04-21 | Mitsubishi Kasei Corp | Preparation of inorganic fiber preform |
| JPS63196800A (en) * | 1987-02-06 | 1988-08-15 | オ−ケ−トレ−デイング株式会社 | Fire retardant sheet |
| JPH01148757A (en) * | 1987-12-04 | 1989-06-12 | Kawasaki Refract Co Ltd | Patching repairing material |
-
1990
- 1990-01-23 JP JP2011739A patent/JPH0627026B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03218981A (en) | 1991-09-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6255600B2 (en) | ||
| JPS63282496A (en) | Heat exchange element for gas and manufacture thereof | |
| JPH0627026B2 (en) | Ceramic substrate firing sheet | |
| JP2011042519A (en) | Ceramic setter for electronic component firing, and method for manufacturing the same | |
| JPS6186473A (en) | Manufacturing method for inorganic molded products | |
| JP4071841B2 (en) | Porous ceramic setter with high thermal conductivity and method for producing the same | |
| JPH0362672B2 (en) | ||
| JP2000086361A (en) | Heat resistant material and method for producing the same | |
| JP2000143364A (en) | Three-dimensional network structure vitreous sintered body and method for producing the same | |
| JPH0794347B2 (en) | Insulation | |
| JPS616184A (en) | Manufacture of fiber ceramic structure | |
| JPS63303855A (en) | Manufacturing method of low expansion board | |
| CN118388213B (en) | Anti-falling blank bottom texture ceramic tile and preparation method thereof | |
| JP2561624B2 (en) | Ceramic substrate firing sheet | |
| KR100762833B1 (en) | Method for producing corrugated ceramic paper and corrugated ceramic paper produced thereby | |
| JP3324929B2 (en) | Manufacturing method of inorganic plate | |
| JPS61236659A (en) | Manufacturing method of conductive ceramic | |
| JPH01148765A (en) | Lightweight refractories and their manufacturing method | |
| JP4882360B2 (en) | Substrate manufacturing method | |
| ZA200300821B (en) | Bonded fibrous materials. | |
| JPH07102560B2 (en) | Method for manufacturing nonflammable molded body | |
| JPS62283884A (en) | Fibrous ceramic heat insulator | |
| JPS58199781A (en) | High temperature heat insulating composite material formed body and manufacture | |
| JP3215390B2 (en) | Electronic component firing setter and method of manufacturing the same | |
| JPS59169989A (en) | Method for producing heat-resistant fibrous molded product |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |