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JPH06230206A - Diffraction grating - prism combination element and device using element thereof - Google Patents

Diffraction grating - prism combination element and device using element thereof

Info

Publication number
JPH06230206A
JPH06230206A JP5320483A JP32048393A JPH06230206A JP H06230206 A JPH06230206 A JP H06230206A JP 5320483 A JP5320483 A JP 5320483A JP 32048393 A JP32048393 A JP 32048393A JP H06230206 A JPH06230206 A JP H06230206A
Authority
JP
Japan
Prior art keywords
diffraction grating
prism
optical element
diffraction
dispersive optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5320483A
Other languages
Japanese (ja)
Inventor
Chungte W Chen
チュンテ・ダブリュ・チェン
Ernest W Gossett
アーネスト・ダブリュ・ゴッセット
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of JPH06230206A publication Critical patent/JPH06230206A/en
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4233—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
    • G02B27/4244—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application in wavelength selecting devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/14—Generating the spectrum; Monochromators using refracting elements, e.g. prisms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/04—Prisms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)

Abstract

PURPOSE: To obtain a spectrometer which compensates for the disadvantages that spectrometers of a prism and a diffraction grating have, when used individually and has advantages of the both. CONSTITUTION: A prism 50 is obtained by using a prism 56, having a diffraction grating 62 arranged adjacently to one surface of the prism 56. Light passing through the prism 50 is diffracted by both the prism 56 and the diffraction grating 62. The diffraction grating 62 may be fitted to any of the 1st and 2nd surfaces of the prism 56 and may be merely arranged adjacent to the prism 56.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上の利用分野】本発明は分散性光学的要素、特に
プリズムと回折格子の両方の特徴を有する分散性光学的
要素に関する。FIELD OF THE INVENTION This invention relates to dispersive optical elements, and more particularly to dispersive optical elements having the features of both prisms and diffraction gratings.

【０００２】[0002]

【従来の技術】分散性光学的要素は、多くの重要な用途
を有する。そのような要素は、波長によって変化する量
でそれらを通り抜ける光のパスを逸らせることによって
光を分散する。プリズム及び回折格子は、最も広く使用
される２つの分散性光学的要素である。プリズムは、そ
の形状がそれらを通り抜ける色々な波長の光を分離さ
せ、色々な量だけ逸らせるので、光を分散する。回折格
子では、回折格子を通り抜ける光は、回折格子の各スリ
ットから射出される波面の干渉によって生じる一連のオ
ーダーへ回折される。分散性光学的要素の１つの重要な
応用は、分光計の製造である。分光計は、医学、材料科
学、化学、環境科学、等のような多くの分野で重要な応
用例を有する。分光計は、回折格子或いはプリズムのよ
うな分散性光学的要素を使って、サンプル光のスペクト
ル組成の分析を可能にする。BACKGROUND OF THE INVENTION Dispersive optical elements have many important applications. Such elements disperse light by diverting the path of light through them in an amount that varies with wavelength. Prisms and diffraction gratings are the two most widely used dispersive optical elements. A prism disperses light because its shape separates light of different wavelengths that pass through them and diverts it by different amounts. In a diffraction grating, light passing through the diffraction grating is diffracted into a series of orders caused by the interference of wavefronts emitted from each slit of the diffraction grating. One important application of dispersive optical elements is in the manufacture of spectrometers. Spectrometers have important applications in many fields such as medicine, materials science, chemistry, environmental science, and so on. The spectrometer uses dispersive optical elements such as diffraction gratings or prisms to allow analysis of the spectral composition of the sample light.

【０００３】回折格子分光計及びプリズム分光計は、夫
々色々な長所と短所を有する。例えば、プリズムの分解
能は幅の広いスペクトル・バンドに亘って大きな変化量
を持つ。これは、プリズムの分解能が、波長で大きく非
線型の形で変化するプリズム材料の分散の関数であるか
らである。大抵の場合、プリズムの分解能は、材料の選
択にも関わらず所望のスペクトル特性曲線と合わない。
例えば、幅の広いスペクトルの有効範囲が望まれる時、
この幅の広いスペクトル・バンドに亘るプリズム分光計
の分解能に於ける幅の広い変化量はその有用性を個々に
限定する。Diffraction grating spectrometers and prism spectrometers each have various advantages and disadvantages. For example, the resolution of a prism has a large variation over a wide spectral band. This is because the resolution of the prism is a function of the dispersion of the prism material, which varies in a highly nonlinear manner with wavelength. In most cases, the resolution of the prism does not match the desired spectral characteristic curve despite the choice of material.
For example, when a wide spectrum coverage is desired,
The wide variation in the resolution of the prism spectrometer over this wide spectral band individually limits its usefulness.

【０００４】回折格子を利用した分光計は、別の欠点を
有する。回折格子分光計では、回折格子は一般的に１つ
だけの回折のオーダーのみに関して使用されることがで
きる。なぜならば別のオーダーでの光学的効率は非常に
低いであろうからである。これは回折格子の適応性を限
定する。更に、色々な回折のオーダーのための光の幅の
広い分離は単一の検知器でそれらを検知するのを妨げ
て、多くの応用に於けるそれらの有用性を限定し得る。
その上、回折格子の分解能は波長と無関係である。その
結果、分解能のダイナミック・レンジは固定され、所望
する分光計の仕様に適合するように合わされ得ない。分
解能のダイナミック・レンジは波長の分解能に於ける変
化量である。例えば、２５乃至２６ミクロンの範囲の波
長の範囲では１００の分解能を、また５乃至７ミクロン
の波長の範囲では１０００の分解能を有することが望ま
しいであろう。要するに、多くの応用例（分光計のよう
な）に於て、予め規定された分解能特性曲線を有する分
散性光学的要素を持つことが望ましい。曲線が、直線状
であるか、一定であるか、或いは何等かの他の規定され
た曲線であることが望ましいであろう。プリズムか或い
は回折格子かを選択するかどうかで、所望の曲線を得る
ための適応性が夫々で限定される。Spectrometers that utilize diffraction gratings have another drawback. In diffraction grating spectrometers, diffraction gratings can generally be used for only one diffraction order. This is because the optical efficiency on another order will be very low. This limits the adaptability of the diffraction grating. Moreover, the wide separation of the light for different orders of diffraction can prevent them from being detected by a single detector, limiting their usefulness in many applications.
Moreover, the resolution of the diffraction grating is independent of wavelength. As a result, the dynamic range of resolution is fixed and cannot be tailored to meet desired spectrometer specifications. The dynamic range of resolution is the amount of change in wavelength resolution. For example, it may be desirable to have a resolution of 100 in the wavelength range of 25 to 26 microns and a resolution of 1000 in the wavelength range of 5 to 7 microns. In short, in many applications (such as spectrometers) it is desirable to have a dispersive optical element with a predefined resolution characteristic curve. It may be desirable for the curve to be linear, constant, or some other defined curve. Depending on whether a prism or a diffraction grating is selected, the adaptability for obtaining the desired curve is limited respectively.

【０００５】[0005]

【発明が解決しようとする課題】従って、その分散特性
に於て回折格子或いはプリズムよりも更に適応性のある
分散性光学的要素を提供することが望ましいであろう。
更に、分解能のスペクトル曲線が、回折格子或いはプリ
ズムの何れかで可能であるものよりも大きな独特さを持
って予め決められ得る分散性光学的要素を提供すること
が望ましいであろう。更に、単純で、比較的低いコスト
で生産され得る分散性光学的要素を提供することが望ま
しいであろう。Therefore, it would be desirable to provide a dispersive optical element that is more adaptable in its dispersion properties than diffraction gratings or prisms.
Further, it would be desirable to provide a dispersive optical element whose resolution spectral curve can be predetermined with greater uniqueness than is possible with either a diffraction grating or a prism. Further, it would be desirable to provide a dispersive optical element that is simple and can be produced at a relatively low cost.

【０００６】[0006]

【課題を解決するための手段及び作用】本発明による
と、プリズムと、そのプリズムの１つの表面に隣接して
配置された回折格子とを具備する分散性光学的要素が提
供される。光はプリズムを通り抜けた後に、回折格子に
よって更に分散される。回折格子は、本発明の好ましい
実施例に於けるようにプリズムに取付けられることがで
きる。また、回折格子は、プリズムの第１或いは第２の
表面の何れかに隣接して置いてもよい。その結果、分散
性光学的要素は、回折格子及びプリズムの特性の両方の
選択によって可撓度を変えて最適化されることができる
分解能のような分散特性を持つ。つまり、プリズムのパ
ラメータは、選択された形状及び材料によって決定され
ることができ、回折格子の特性は、回折格子の数、回折
のオーダー、及び使用される回折格子の型によって特定
され得る。その結果、回折格子はプリズムによって導入
された角度の開きを増幅するのに使用されることがで
き、色々な回折のオーダーを同時に使用することができ
る。これによって、分散性光学的要素のための分解能の
非常に適応性があり改良されたダイナミック・レンジが
もたらされる。SUMMARY OF THE INVENTION In accordance with the present invention, there is provided a dispersive optical element comprising a prism and a diffraction grating disposed adjacent one surface of the prism. After passing through the prism, the light is further dispersed by the diffraction grating. The diffraction grating can be attached to the prism as in the preferred embodiment of the present invention. The diffraction grating may also be placed adjacent to either the first or second surface of the prism. As a result, dispersive optical elements have dispersive properties, such as resolution, that can be optimized with varying flexibility by selecting both the properties of the diffraction grating and the prism. That is, the parameters of the prism can be determined by the shape and material selected, and the characteristics of the grating can be specified by the number of gratings, the order of diffraction, and the type of grating used. As a result, the diffraction grating can be used to amplify the angular spread introduced by the prism and different diffraction orders can be used simultaneously. This results in a very adaptive and improved dynamic range of resolution for dispersive optical elements.

【０００７】[0007]

【実施例】本発明は回折格子及びプリズムの両方を利用
する分散性光学的要素である。従って、この分散性光学
的要素は、“グリズム（grism ）”と呼ばれるであろ
う。グリズムはプリズムと回折格子の両方の独特の特性
を利用する。これらの独特な特性は下記でより詳細に説
明されるであろう。本発明の好ましい実施例は分光計で
プリズムを利用する一方で、他方の使用が本発明の教示
に基くグリズムに対して採用され得ることは評価され
る。これらは収差の補正、波面のサンプリング、多数の
ビームの組合わせ、等を含む。DETAILED DESCRIPTION OF THE INVENTION The present invention is a dispersive optical element that utilizes both a diffraction grating and a prism. Therefore, this dispersive optical element will be referred to as "grism". Grisms take advantage of the unique properties of both prisms and diffraction gratings. These unique properties will be explained in more detail below. While the preferred embodiment of the present invention utilizes a prism in a spectrometer, it is appreciated that the use of the other may be employed for grisms based on the teachings of the present invention. These include aberration correction, wavefront sampling, multiple beam combination, and the like.

【０００８】図１を参照すると、クラシックなプリズム
分光計10の略図が示される。通常赤外線と紫外線との間
の何処にでもあり得る電磁放射線12が入射スリット14を
通って分光計へ入る。放射線12は、平行光学機器16のセ
ットによって平行にされ、それから第１表面20及び第２
表面22を有するプリズム18へ入る。そしてプリズム18か
ら放射される分散された放射線は、検知器26へ向って放
射線の焦点を合わせる映出光学機器のセット24へ入る。
プリズム18による放射線12の分散は、放射線が検知器26
上で色々な波長に対して角度を付けて分離させるであろ
う。検知器26上の映像は分離した色のスリット映像から
構成されるからであろう。Referring to FIG. 1, a schematic diagram of a classic prism spectrometer 10 is shown. Electromagnetic radiation 12, which would normally be anywhere between infrared and ultraviolet, enters the spectrometer through an entrance slit 14. The radiation 12 is collimated by a set of collimating optics 16 and then the first surface 20 and the second surface 20.
Enter prism 18 having surface 22. The dispersed radiation emitted from prism 18 then enters a set 24 of projection optics that focuses the radiation towards a detector 26.
The dispersion of the radiation 12 by the prism 18 is due to the radiation detector 26
The above will be angularly separated for various wavelengths. This is probably because the image on the detector 26 is composed of slit images of separate colors.

【０００９】一般的なプリズム分光計10の分解能は：The resolution of a typical prism spectrometer 10 is:

【数２】 である。[Equation 2] Is.

【００１０】ここで、λの上に−を付けたものとΔλと
は、平均波長と解像可能なスペクトル・バンド幅、Ｂは
プリズムのベース幅、ｎはプリズムの材料の屈折率、ｄ
ｎ／ｄλはプリズム18の分散である。波長の関数として
の屈折率は：Here, − is added to λ and Δλ is the average wavelength and the resolvable spectral bandwidth, B is the base width of the prism, n is the refractive index of the material of the prism, and d.
n / dλ is the dispersion of the prism 18. The index of refraction as a function of wavelength is:

【数３】 で近似されることができる。[Equation 3] Can be approximated by

【００１１】ここで、Ａ1 、Ａ2 …は、特定のプリズム
材料の特性である定数である。率の式を微分することに
よって、分散は下記のように表されることができる：Here, A 1 , A 2, ... Are constants which are characteristics of a specific prism material. By differentiating the rate equation, the variance can be expressed as:

【数４】 従って、式４は一般的なプリズムの分散特性が非常に非
直線状であり得ることを示す。その結果、一般的なプリ
ズム分光計の分解能も波長に関して非常に非直線状にな
るであろう。従ってプリズムの分解能は非常に非直線状
であり、プリズム材料の選択によって決められる。要す
るに、プリズムの分解能は材料の選択によって決り、個
々のシステムの要求に対して細く調整されることはでき
ない。[Equation 4] Therefore, Equation 4 shows that the dispersion characteristics of a typical prism can be very non-linear. As a result, the resolution of a typical prism spectrometer will also be very nonlinear with wavelength. Therefore, the resolution of the prism is very non-linear and is determined by the choice of prism material. In short, the resolution of the prism depends on the choice of material and cannot be fine-tuned to the requirements of the individual system.

【００１２】一般的な回折格子分光計28は、図２にしめ
される。この回折格子分光計28は、Ｃｚｅｒｎｙ−Ｔｕ
ｒｅｎｅｒ Ｍｏｕｎｔｉｎｇとして広く知られている
公知の形状である。光放射線30は入射スリット32を通っ
て分光計28へ入って、反射させられ、図１の平行光学機
器16と同じように機能する平行光学機器34によって平行
にされる。それから光放射線30は、図１のプリズム18の
機能と分散機能をする反射型の回折格子である回折格子
36上で反射させられる。それから光放射線は、射出スリ
ット40を通って検知器（図示されていない）上での光放
射線の焦点を合わせる映出光学機器38によって反射させ
られる。A typical diffraction grating spectrometer 28 is shown in FIG. This diffraction grating spectrometer 28 is a Czerny-Tu
It is a well-known shape widely known as rener mounting. The photo-radiation 30 enters the spectrometer 28 through an entrance slit 32, is reflected and collimated by collimating optics 34, which functions similarly to collimating optics 16 of FIG. Then, the photo-radiation 30 is a diffraction grating that is a reflection type diffraction grating that performs the function of the prism 18 of FIG.
Reflected on 36. The photo-radiation is then reflected by the projection optics 38, which focuses the photo-radiation on the detector (not shown) through the exit slit 40.

【００１３】回折格子分光計28の分解能は、ｐｘｍであ
り、ここで小文字のｐは回折のオーダー、ｍは回折格子
36の回折格子線の総数である。これは、回折格子36の分
解能が波長と無関係であることを示す。The resolution of the diffraction grating spectrometer 28 is pxm, where lower case p is the order of diffraction and m is the diffraction grating.
It is the total number of 36 diffraction grating lines. This indicates that the resolution of the diffraction grating 36 is independent of wavelength.

【００１４】上で説明されたプリズム分光計と回折格子
分光計の両方の欠点を克服するために、本発明は、プリ
ズムと回折格子の両方を利用した単一の分散性光学的要
素からなる“グリズム”を使用する。図３は、本発明の
第１の好ましい実施例のグリズム分光計42の略図であ
る。光放射線44は入射スリット46を通って分光計へ入
り、従来の平行光学機器48によって平行にされる。それ
から光は、それが分散されるグリズム50へ入る。それか
ら光放射線44は、映出光学装置52によって検知器54上に
スペクトルの焦点を合わせられる。To overcome the shortcomings of both prism and diffraction grating spectrometers described above, the present invention comprises a single dispersive optical element that utilizes both prisms and diffraction gratings. Use "grism". FIG. 3 is a schematic diagram of a first preferred embodiment grism spectrometer 42 of the present invention. Light radiation 44 enters the spectrometer through entrance slit 46 and is collimated by conventional collimating optics 48. The light then enters the grism 50 where it is dispersed. The photo-radiation 44 is then spectrally focused by the imaging optics 52 onto the detector 54.

【００１５】より詳細には、グリズム50は第１の表面58
と第２の表面60とを有するプリズム56を具備する。回折
格子62はプリズムの第２の表面60上にエッチングで作ら
れる。この好ましい実施例では、回折格子62台２の表面
60の上にエッチングで作られるが、本発明の長所を依然
として具現しつつ、他の変形実施例も可能である。例え
ば、回折格子62はプリズムの第１の表面58に着けられる
か、或いは透過回折格子62の代りに反射回折格子を具備
し得る。例えば、反射回折格子の場合、光放射線44はプ
リズムを通り抜け、プリズムの第２の表面上の反射回折
格子上に当って、反対の方向で再びプリズムを通過す
る。そのような形状では、平行光学機器は映出光学機器
としても使用され得る。更に、他の実施例では、回折格
子は他の手段によってプリズムに取付けられることがで
きるか、或いはプリズムに隣接して配置されて、実際に
は取付けられない分離回折格子を具備し得る。更に、ブ
レーズされた回折格子、二連の光学機器、ボリューム・
ホログラム、表面レリーフ・ホログラム、或いは吸収回
折格子のような、多くの色々な種類の回折格子が使用さ
れることができるということが認識されるであろう。More specifically, the grism 50 has a first surface 58.
And a prism 56 having a second surface 60. The grating 62 is etched on the second surface 60 of the prism. In this preferred embodiment, the surface of the 62 grating 2 is
Although made by etching on 60, other variations are possible while still embodying the advantages of the present invention. For example, the diffraction grating 62 may be affixed to the first surface 58 of the prism, or the transmission diffraction grating 62 may be replaced by a reflection diffraction grating. For example, in the case of a reflective diffraction grating, the optical radiation 44 passes through the prism, impinges on the reflective diffraction grating on the second surface of the prism and again passes through the prism in the opposite direction. With such a shape, the collimating optics can also be used as projection optics. Furthermore, in other embodiments, the diffraction grating may be attached to the prism by other means, or may be provided adjacent to the prism with a separate diffraction grating that is not actually attached. In addition, a blazed diffraction grating, dual optics, volume
It will be appreciated that many different types of gratings can be used, such as holograms, surface relief holograms, or absorption gratings.

【００１６】光放射線44はプリズム内で分散し、更に回
折格子62によって分散されるということに留意すること
が重要である。従って、プリズムと回折格子の組合わせ
は、色々な応用に対する個々の要求に適合する分解能の
機能を造り出す際に一層の適応性を提供する。It is important to note that the optical radiation 44 is dispersed within the prism and further by the diffraction grating 62. Thus, the prism and diffraction grating combination provides greater flexibility in creating resolution features that meet the individual requirements for different applications.

【００１７】“グリズム”の分解能は次式で表される。The resolution of "grism" is expressed by the following equation.

【００１８】[0018]

【数５】 ここで、Ｂはプリズムのベースの幅、Ａi の上に−を付
けたものは波長の関数としての屈折率の勾配を表すのに
使用される定数、ｐi は回折格子62のｉ' 番目のスペク
トル・バンドの回折のオーダー、Ｋは関連するスペクト
ル・バンドの総数、ｍは回折格子62のラインの数であ
る。本発明によると、各スペクトル・バンドのための回
折のオーダーの慎重な選択により、グリズムの分解能の
ダイナミック・レンジは、プリズム或いは回折格子だけ
のものよりもずっと改良されることができる。[Equation 5] Where B is the width of the base of the prism, A minus the one above A i is a constant used to describe the gradient of the index of refraction as a function of wavelength, and p i is the i'th of the grating 62. , The order of diffraction of the spectral bands, K is the total number of related spectral bands, and m is the number of lines of the diffraction grating 62. According to the invention, by careful selection of the order of diffraction for each spectral band, the dynamic range of grism resolution can be much improved over that of prisms or gratings alone.

【００１９】グリズムのパラメータを選択する際に、回
折格子に関連する２つの重要なパラメータがある：分解
能と回折効率である。分解能は回折格子の周期ｍと回折
のオーダｐとによって制御される。回折格子効率は回折
の機構に関連するパラメータによって制御される。例え
ば、ブレーズされた回折格子の回折効率は回折格子の周
期に対するブレーズされた幅の比の関数である。他方
で、ボリューム・ホログラムの回折効率は屈折率の変化
の関数である。In selecting the parameters of the grism, there are two important parameters associated with the diffraction grating: resolution and diffraction efficiency. The resolution is controlled by the period m of the diffraction grating and the diffraction order p. Grating efficiency is controlled by parameters related to the mechanism of diffraction. For example, the diffraction efficiency of a blazed grating is a function of the ratio of the blazed width to the grating period. On the other hand, the diffraction efficiency of a volume hologram is a function of the change in refractive index.

【００２０】図３の基本的グリズム分光計42は変形実施
例の中に個々の予め決定された回折のオーダーを利用し
て色々な所望のスペクトル特性を得る３つの追加的実施
例がある。これらの３つの実施例は図４、５、及び６に
示され、均等に回折されるグリズム、部分的に回折され
るグリズム、及び不均等に回折されるグリズムとして示
される。図４ａ及びｂでは、本発明の第２の好ましい実
施例に基く均等に回折されるグリズムが示される。図４
ａは従来のプリズム64を示し、そこでは３つのスペクト
ル・バンドで平均波長を有する放射線が図示されるよう
にプリズム64によって回折される。これらの３つのスペ
クトル・バンドは、例えば１、２、或いは４ミクロメー
タを具備し得る。従来のプリズム64を利用すると、３つ
のスペクトル・バンドの角度の広がりが比較的に小さい
ことが分かる。図４ｂでは、本発明のグリズム66が示さ
れる。グリズム66は回折格子68及びプリズム70を具備す
る。図４ａに於けるのと、同一の３つのスペクトル・バ
ンドは、同一の回折のオーダーを使ってグリズム66によ
ってここで回折される。特に、３つのスペクトル・バン
ドの夫々は、−１のオーダーに回折される。つまり、等
式５のｐ1 ´は全て同一である。プリズムと回折格子の
組合わせの結果として、グリズム65は、プリズムだけの
と較べて、３つのバンドの角度の広がりを増幅してい
る。この増幅は、応用に応じて多くの方法で使用され得
る多くの長所を有する。例えば、この角度の広がりの増
幅は分光計の分解能を増すのに使用され得る。The basic grism spectrometer 42 of FIG. 3 has three additional embodiments within the alternative embodiment that utilize individual predetermined diffraction orders to obtain various desired spectral characteristics. These three examples are shown in FIGS. 4, 5 and 6 and are shown as evenly diffracted grisms, partially diffracted grisms and unevenly diffracted grisms. In Figures 4a and b, an evenly diffracted grism according to a second preferred embodiment of the present invention is shown. Figure 4
a shows a conventional prism 64, where radiation having average wavelengths in three spectral bands is diffracted by the prism 64 as shown. These three spectral bands may comprise, for example, 1, 2, or 4 micrometers. It can be seen that utilizing the conventional prism 64, the angular spread of the three spectral bands is relatively small. In FIG. 4b, the grism 66 of the present invention is shown. The grism 66 includes a diffraction grating 68 and a prism 70. As in FIG. 4a, the same three spectral bands are now diffracted by grism 66 using the same order of diffraction. In particular, each of the three spectral bands is diffracted to the -1 order. That is, p 1 ′ in equation 5 are all the same. As a result of the prism and diffraction grating combination, the grism 65 amplifies the angular spread of the three bands as compared to the prism alone. This amplification has many advantages that can be used in many ways depending on the application. For example, amplification of this angular spread can be used to increase the resolution of the spectrometer.

【００２１】ここで図５を参照すると、本発明の第３の
実施例のグリズム72は部分的に回折されたグリズム構成
に示される。ここで、回折格子74とプリズム76とを具備
するグリズム72は、０番目の回折のオーダーが使用され
るのを除いて図４ｂのグリズム66のものと類似してい
る。ここで、全ての３つのスペクトル・バンドはプリズ
ムによって最初に回折される。バンド３は第１のオーダ
ーを使う回折格子74によってそれから更に分散される。
バンド１及び２は回折格子回折の範囲（gratingdiffrac
tion envelope）の外側にある。従って、バンド１及び
２の放射は、ゼロのオーダーを除いた他のオーダーに殆
ど分散されない。その結果、バンド１及び２の更なる角
度の広がりは生じない。Referring now to FIG. 5, the grism 72 of the third embodiment of the present invention is shown in a partially diffracted grism configuration. Here, the grism 72, which comprises a diffraction grating 74 and a prism 76, is similar to that of the grism 66 of FIG. 4b, except that the 0th diffraction order is used. Here, all three spectral bands are first diffracted by the prism. Band 3 is then further dispersed by diffraction grating 74 using the first order.
Bands 1 and 2 are the range of the grating diffraction (gratingdiffrac
outside the action envelope). Therefore, the radiation in bands 1 and 2 is hardly dispersed to other orders except the zero order. As a result, no further angular spread of bands 1 and 2 occurs.

【００２２】図６は、回折格子80及びプリズム82を有す
るグリズム78が“不均等に回折されるグリズム”になる
第３の変形実施例を示す。ここではバンド１、２、及び
３は夫々が色々な回折のオーダーを使用する回折格子に
よって回折される。この構成がより高い回折のオーダー
を使用するために非常に良い分解能を有するだけでな
く、生成された分光計の大きさも非常にコンパクトに作
られ得る。図４ｂ、５、及び６に示されるグリズムの３
つの型の夫々の選択は等式５を使って立案されるという
ことが認識されるであろう。つまり、回折格子線の数、
及び各個々のスペクトル・バンドに対する回折のオーダ
ーのようなパラメータの選択によってである。回折格子
がブレーズされた回折格子であるならば、望ましい形状
は回折格子の等式のパラメータを上手く操作することに
よって達成されて、所望のバンドのためのブレーズされ
る条件が得られることも認識されるであろう。グリズム
分光計のダイナミック・レンジを更に高めるために、使
用されるプリズムは色々な型の材料と適切なプリズムの
角度とを有する幾つかのプリズムから構成される複合プ
リズムに置き換えられ得る。従って、これらのプリズム
の定数Ａを慎重に選択することによって、上で等式５に
よって規定されたように望ましい性能を得ることができ
る。FIG. 6 shows a third modified embodiment in which a grism 78 having a diffraction grating 80 and a prism 82 becomes an "unequally diffracted grism". Here, bands 1, 2 and 3 are each diffracted by a diffraction grating using different diffraction orders. Not only does this configuration have very good resolution due to the use of higher diffraction orders, but the size of the spectrometer produced can also be made very compact. 3 of the grism shown in Figures 4b, 5 and 6
It will be appreciated that each choice of the three types is formulated using Equation 5. That is, the number of diffraction grating lines,
And by the choice of parameters such as the order of diffraction for each individual spectral band. It is also recognized that if the diffraction grating is a blazed diffraction grating, the desired shape can be achieved by successfully manipulating the parameters of the diffraction grating equation to obtain the blazed conditions for the desired band. Will To further increase the dynamic range of the grism spectrometer, the prisms used can be replaced by compound prisms consisting of several prisms with different types of materials and suitable prism angles. Therefore, by carefully choosing the constant A of these prisms, the desired performance can be obtained as defined by equation 5 above.

【００２３】前述より、本発明はプリズムと回折格子と
の間の分解能の分布が、分解能のダイナミック・レンジ
が著しく改善されたグリズムに屈するようになることが
理解できる。更に、適切な回折のオーダーの選択は、回
折効率の機能を調整することによって分解能を更に高め
ることができる。グリズムの効率関数の追加調整は、ブ
レーズされた回折格子、二連の回折格子、ボリューム位
相回折格子、表面レリーフ回折格子、或いは吸収回折格
子を含む色々な種類の回折格子を使用することによって
達成できる。From the foregoing, it can be seen that the present invention causes the distribution of resolution between the prism and the diffraction grating to yield to a grism with a significantly improved resolution dynamic range. Furthermore, the selection of the appropriate diffraction order can further improve the resolution by adjusting the function of diffraction efficiency. Additional tuning of the grism efficiency function can be achieved by using different types of gratings, including blazed gratings, double gratings, volume phase gratings, surface relief gratings, or absorption gratings. .

【００２４】当業者は、他の長所が本発明の使用によっ
て獲得できることと、明細書、図面、及び請求の範囲を
研究した後に本発明の本質的な意図から逸脱することな
しに作られ得るということが認識され得る。Those skilled in the art will appreciate that other advantages can be obtained through the use of the invention and can be made without departing from the essential spirit of the invention after studying the specification, drawings and claims. It can be appreciated.

【００２５】変型実施例がA modified embodiment is

【図面の簡単な説明】[Brief description of drawings]

【図１】従来の技術のプリズム分光計の略図。FIG. 1 is a schematic diagram of a prior art prism spectrometer.

【図２】従来の技術の回折格子分光計の略図。FIG. 2 is a schematic diagram of a prior art diffraction grating spectrometer.

【図３】本発明の第１の実施例のグリズム分光計の略
図。FIG. 3 is a schematic diagram of a grism spectrometer of the first embodiment of the present invention.

【図４】ａは３つの波長バンドに分散するグリズム分光
計の略図であり、ｂは本発明の第２の実施例の回折格子
の−１の回折のオーダーを利用する均等に回折するグリ
ズム分光計の略図。FIG. 4a is a schematic diagram of a grism spectrometer that disperses into three wavelength bands, and b is an evenly diffracting grism spectrometer utilizing the −1 diffraction order of the diffraction grating of the second embodiment of the present invention. Schematic diagram of the total.

【図５】本発明の第３の実施例の部分的に回折するグリ
ズム分光計の略図。FIG. 5 is a schematic diagram of a partially diffractive grism spectrometer of the third embodiment of the present invention.

【図６】本発明の第４の実施例の不均等に回折するグリ
ズム分光計の略図。FIG. 6 is a schematic diagram of a non-uniformly diffracting grism spectrometer of the fourth embodiment of the present invention.

【符号の説明】[Explanation of symbols]

10、28、42…分光計、12…電磁放射線、14、32、46…入
射スリット、16、48…平行光学機器、18、64、70、76、
82…プリズム、20、58…第１表面、22、60…第２表面、
24、38、52…映出光学機器、26、54…検知器、30、44…
光放射線、34…平行光学装置、36、50、62、68、74、80
…回折格子、40…射出スリット、65、66、72、78…グリ
ズム。10, 28, 42 ... Spectrometer, 12 ... Electromagnetic radiation, 14, 32, 46 ... Incident slit, 16, 48 ... Collimating optics, 18, 64, 70, 76,
82 ... Prism, 20, 58 ... First surface, 22, 60 ... Second surface,
24, 38, 52 ... Projection optics, 26, 54 ... Detector, 30, 44 ...
Light radiation, 34 ... Parallel optics, 36, 50, 62, 68, 74, 80
… Diffraction grating, 40… Ejection slit, 65, 66, 72, 78… Grism.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 アーネスト・ダブリュ・ゴッセット アメリカ合衆国、カリフォルニア州 91740、グレンドラ、エヌ・バレンシア・ ストリート 607 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Ernest W Gosset N Valencia Street, Glendora, 91740 California, United States 607

Claims (15)

【特許請求の範囲】[Claims] 【請求項１】 プリズムと；このプリズムの一つの面に
隣接する、回折格子とを具備する分散性光学的要素であ
り、この光学的要素を通る光が前記プリズムと回折格子
との両方によって分散される分散性光学的要素。1. A dispersive optical element comprising a prism and a diffraction grating adjacent one face of the prism, the light passing through the optical element being dispersed by both the prism and the diffraction grating. Dispersive optical element. 【請求項２】 前記プリズムは第一と第二の表面を有
し、前記回折格子は透過回折格子である請求項１に記載
の分散性光学的要素。2. The dispersive optical element according to claim 1, wherein the prism has first and second surfaces and the diffraction grating is a transmission diffraction grating. 【請求項３】 前記回折格子が前記第一の表面に付けら
れている請求項２に記載の分散性光学的要素。3. The dispersive optical element of claim 2, wherein the diffraction grating is attached to the first surface. 【請求項４】 前記プリズムは第一と第二の表面を有
し、前記回折格子は前記第二の表面に付けらた反射回折
格子である請求項１に記載の分散性光学的要素。4. The dispersive optical element of claim 1, wherein the prism has first and second surfaces and the diffraction grating is a reflective diffraction grating attached to the second surface. 【請求項５】 前記回折格子がブレ−ズされた回折格子
である請求項１に記載の分散性光学的要素。5. The dispersive optical element of claim 1, wherein the diffraction grating is a blazed diffraction grating. 【請求項６】 前記回折格子が二連の光学的回折格子で
ある請求項１に記載の分散性光学的要素。6. The dispersive optical element according to claim 1, wherein the diffraction grating is a double optical diffraction grating. 【請求項７】 前記回折格子がボリュウム・ホログラム
である請求項１に記載の分散性光学的要素。7. The dispersive optical element of claim 1, wherein the diffraction grating is a volume hologram. 【請求項８】 前記回折格子が表面レリ−フ・ホログラ
ムである請求項１に記載の分散性光学的要素。8. The dispersive optical element of claim 1, wherein the diffraction grating is a surface relief hologram. 【請求項９】 前記回折格子が吸収回折格子である請求
項１に記載の分散性光学的要素。9. The dispersive optical element according to claim 1, wherein the diffraction grating is an absorption diffraction grating. 【請求項１０】 分散性光学的要素の分解能が下記の式
により規定される請求項１に記載の分散性光学的要素： 【数１】 ここで、Ｂはプリズムのベース幅、Ａｉの上に−を付け
たものは波長の関数としてプリズムの屈折率の勾配を現
すのに使われる常数、ｐｉはｉ番目のスペクトル・バン
ドの回折のオーダー、ｋは関係するスペクトル・バンド
の総数、λは光の波長、λの上に−を付けたものは光の
スペクトル・バンドの平均波長、ｍは回折格子の線の総
本数である。10. The dispersive optical element according to claim 1, wherein the resolution of the dispersive optical element is defined by the following equation: Where B is the base width of the prism, A minus- above A i is a constant used to express the gradient of the refractive index of the prism as a function of wavelength, and p i is the diffraction of the i th spectral band. , K is the total number of spectral bands of interest, λ is the wavelength of light, λ above-is the average wavelength of the spectral band of light, and m is the total number of diffraction grating lines. 【請求項１１】 光入射手段と；平行光学的手段と；プ
リズムと前記プリズムの一つの面に隣接する回折格子と
を具備する光学的要素であって、光学的要素を通る光が
プリズムと回折格子との両方によって分散される分散性
光学的要素と；この分散性光学的要素によって分散され
た光をスペクトルに焦点合わせをする為の映出光学的手
段とを具備する分光計であって、前記平行光学的手段
は、前記光入射手段を通って前記分光計に入射する光を
平行にする為のものである、分光計。11. An optical element comprising: a light incident means; a parallel optical means; a prism and a diffraction grating adjacent to one surface of the prism, wherein light passing through the optical element is diffracted by the prism. A spectrometer comprising a dispersive optical element dispersed by both a grating; and a projection optical means for focusing the light dispersed by the dispersive optical element into a spectrum, A spectrometer, wherein the collimating optical means is for collimating the light incident on the spectrometer through the light incident means. 【請求項１２】 プリズムと；前記プリズムの一つの面
に付けられた回折格子とを具備する分散性光学的要素で
あって、光学的要素を通る光がプリズムと回折格子との
両方によって分散され、プリズムと回折格子とを通る第
一、第二及び第三の光学的バンドを具備する光がプリズ
ムによって回折の角度の広がりを増幅する回折格子の同
じ回折のオ−ダ−だけ回折される、分散性光学要素。12. A dispersive optical element comprising a prism; and a diffraction grating attached to one face of the prism, wherein light passing through the optical element is dispersed by both the prism and the diffraction grating. , Light having first, second and third optical bands passing through the prism and the diffraction grating is diffracted by the prism by the same diffraction order of the diffraction grating which amplifies the angular spread of the diffraction, Dispersive optical element. 【請求項１３】 プリズムと；このプリズムの一つの面
に付けられた、回折格子とを具備する分散性光学的要素
であって、前記プリズムを通る事によって分散された光
が回折格子をも通り、第一の光学的バンドの光が回折格
子によって更に回折され、回折格子の回折の範囲の外側
にある第二の波長バンドの光が回折格子のゼロ回折のオ
−ダ−にあり、そのため回折格子による第二のバンドの
光の回折が全く無い、分散性光学要素。13. A dispersive optical element comprising a prism and a diffraction grating attached to one surface of the prism, wherein light dispersed by passing through the prism also passes through the diffraction grating. , The light of the first optical band is further diffracted by the diffraction grating, and the light of the second wavelength band outside the diffraction range of the diffraction grating is at the zero diffraction order of the diffraction grating and is therefore diffracted. A dispersive optical element with no diffraction of the second band of light by the grating. 【請求項１４】 プリズムと；前記プリズムの一つの面
に取付けられた、回折格子とを具備する分散性光学的要
素であって、前記プリズムを通る事によって後で分散さ
れた光が回折格子によっても分散され、第一と第二波長
のバンドの光が回折格子によって回折格子の別の回折の
オ−ダ−だけ回折される、分散性光学要素。14. A dispersive optical element comprising a prism; and a diffraction grating mounted on one face of the prism, the light being dispersed later by passing through the prism by the diffraction grating. A dispersive optical element in which light in the first and second wavelength bands is also diffracted by the diffraction grating by another diffraction order of the diffraction grating. 【請求項１５】 プリズム手段が色々な材料から成る複
数のプリズムを具備する請求項１に記載の分散性光学的
要素。15. A dispersive optical element according to claim 1, wherein the prism means comprises a plurality of prisms of different materials.
JP5320483A 1992-12-18 1993-12-20 Diffraction grating - prism combination element and device using element thereof Pending JPH06230206A (en)

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US993344 1992-12-18

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ID=25539422

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EP (1) EP0602992B1 (en)
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