JPH06187626A - Magnetic head slider and its supporter, production of the slider and supporter, and magnetic disk device - Google Patents
Magnetic head slider and its supporter, production of the slider and supporter, and magnetic disk deviceInfo
- Publication number
- JPH06187626A JPH06187626A JP33577992A JP33577992A JPH06187626A JP H06187626 A JPH06187626 A JP H06187626A JP 33577992 A JP33577992 A JP 33577992A JP 33577992 A JP33577992 A JP 33577992A JP H06187626 A JPH06187626 A JP H06187626A
- Authority
- JP
- Japan
- Prior art keywords
- slider
- magnetic head
- magnetic
- head slider
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
Abstract
(57)【要約】
【構成】磁気トランスジューサ3を搭載し、ラビングコ
ンタクト状態を保持させるスライダ面1aを設けた第1
のスライダ1と空気軸受面になりうるスライダ面2a,
2bを設けた第2のスライダ2とをスライダの厚さ方向
に動くように連結させ、それぞれに別々の所定の荷重を
加える。
【効果】磁気ヘッドスライダを、高速回転した記録媒体
面の長波長及び短波長のうねりに対して同時に追従させ
ながらラビングコンタクト状態を保持させることができ
る。
(57) [Summary] [Structure] A magnetic transducer 3 is mounted and a slider surface 1a for holding a rubbing contact state is provided.
Slider 1 and slider surface 2a which can be an air bearing surface,
The second slider 2 provided with 2b is connected so as to move in the thickness direction of the slider, and a different predetermined load is applied to each. [Effect] The rubbing contact state can be held while the magnetic head slider simultaneously follows the long-wavelength and short-wavelength undulations of the surface of the recording medium that rotates at high speed.
Description
【0001】[0001]
【産業上の利用分野】本発明は磁気ヘッドスライダ及び
その支持体及びその製造方法及び磁気ディスク装置に係
わり、特に、高記録密度化,高信頼性化,低コスト化に
優れた磁気ヘッドスライダ及びその支持体及びその製造
方法及び磁気ディスク装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head slider, a support for the same, a method for manufacturing the same, and a magnetic disk device, and more particularly to a magnetic head slider excellent in high recording density, high reliability and low cost. The present invention relates to a support, a method for manufacturing the support, and a magnetic disk device.
【0002】[0002]
【従来の技術】従来の磁気ディスク装置に使用されてい
る磁気ヘッドスライダは従来の空気軸受を応用したもの
で、磁気記録媒体が回転中に空気力学的に発生する浮上
力と、磁気ヘッドスライダを支持する支持体から加えら
れた所定の荷重とが釣り合うように、磁気記録媒体面と
の距離が微小で、かつ、一定に保ちながら安定浮上して
いる。2. Description of the Related Art A magnetic head slider used in a conventional magnetic disk device is an application of a conventional air bearing, which is used to reduce the aerodynamic levitation force generated during rotation of a magnetic recording medium and the magnetic head slider. The distance from the surface of the magnetic recording medium is very small so that the predetermined load applied from the supporting body is balanced, and the surface of the magnetic recording medium flies stably while keeping it constant.
【0003】また、走行する記録媒体面上には、ランナ
ウトのような長波長なうねりからスライダ長・面粗さ程
度の短波長のうねりまであらゆる波長が存在し、それら
のうねりに追従させるために、スライダは上下方向,ピ
ッチング(前後)方向,ローリング(横)方向の3自由度の
運動に対して復元力が働き、動的に安定になるようなス
ライダ・支持系になっている。この振動系は空気膜の剛
性・減衰係数をばねとダンパでモデル化できるため、う
ねりに対する追従特性を向上させるには、スライダの軽
質量化,スライダ寸法の微小化,高空気膜剛性化,高減
衰係数化が必要である。さらに、エレクトロニック デ
ザイン 5 マーチ 1,1980(Electronic Desig
n,5,March,1,1980年,60〜63ページ)に
論じられているような、磁界を印加したり、残留磁界を
検出する磁気トランスデューサが、最小な浮上量となり
うる一方のスライダレールの流出端側面に、薄膜素子と
してリソグラフィ技術で形成されている。Further, on the surface of the recording medium which is running, there are all wavelengths from long-wave undulations such as runout to short-wave undulations such as slider length and surface roughness, and in order to follow these undulations. The slider has a slider / support system in which a restoring force acts on the movement of three degrees of freedom in the vertical direction, the pitching (front-back) direction, and the rolling (lateral) direction, and is dynamically stabilized. Since this vibration system can model the rigidity and damping coefficient of the air film with springs and dampers, in order to improve the follow-up characteristics to undulations, the slider weight should be reduced, the slider size should be smaller, the air film rigidity should be higher, and the damping should be high. Coefficienting is necessary. In addition, Electronic Design 5 March 1, 1980 (Electronic Desig
n, 5, March, 1, 1980, pp. 60-63), a magnetic transducer for applying a magnetic field or detecting a residual magnetic field may cause a minimum flying height of one slider rail. A thin film element is formed on the side surface of the outflow end by a lithographic technique.
【0004】最近の磁気ディスク装置の高性能化に対す
る要求は高記録密度化及び記録媒体の小径化である。そ
れらの磁気ヘッドスライダに対する要求は、スライダ寸
法を極力小さくして、かつ、浮上量を微小化することで
ある。特に、記録媒体とラビングコンタクト状態を保持
させながら記録再生する場合、記録密度は飛躍的に向上
する。Recent demands for higher performance of magnetic disk devices include higher recording density and smaller recording media. The requirements for those magnetic head sliders are to minimize the slider size and to reduce the flying height. In particular, when recording / reproducing while maintaining the rubbing contact state with the recording medium, the recording density is remarkably improved.
【0005】1990年電子情報通信学会秋季全国大会
予講集SC−5−1,5−268ページに記載されてい
る、接触走行しながら記録再生する方式は、主磁極励磁
形の単磁極ヘッドを上下に自由にスライドする可動部の
先端に取り付け、自重あるいはばねで可動部の先端を押
して支えている。この問題点は、面粗さ程度の微小なう
ねりに対しては接触走行が可能であるが、ランナウトの
ような長波長及びスライダ長程度の波長のうねりに追従
させるためのスライダ・支持系になってない。このた
め、回転数およびうねり振幅が大きくなると、スライダ
が長波長のうねりに追従できなくなり、記録媒体と接触
し、損傷する磁気ディスク装置の信頼性に関する問題が
生じる。The method for recording / reproducing while traveling in contact, which is described in the 1990 National Conference of the Institute of Electronics, Information and Communication Engineers Autumn Meeting, SC-5-1, 5-268, uses a main pole excitation type single pole head. It is attached to the tip of the movable part that slides up and down, and the tip of the movable part is pushed and supported by its own weight or spring. This problem is that contact traveling is possible for minute undulations of surface roughness, but it becomes a slider-support system for following long-wave undulations such as runouts and undulations of wavelengths of the slider length. Not at all. For this reason, when the number of revolutions and the undulation amplitude increase, the slider cannot follow the undulation of a long wavelength, comes into contact with the recording medium, and is damaged.
【0006】特開昭62−167610号公報に記載されている
従来方式の磁気ヘッドスライダは、接触走行するスライ
ダ面と空気軸受面になりうるスライダ面を設け、記録媒
体面との接触力を微小化している。この問題点は、ラン
ナウトのような長波長及びスライダ長程度の波長のうね
りを追従させるためのスライダ支持系になっているが、
常時接触状態を保持させることは難しく、間欠接触を許
容してしまうことである。The conventional magnetic head slider disclosed in Japanese Patent Laid-Open No. 62-167610 is provided with a slider surface which can be in contact with a slider surface and a slider surface which can be an air bearing surface, so that the contact force with the recording medium surface is reduced. It has become. This problem is a slider support system for following a long wavelength like a runout and a swell of a wavelength of about the slider length.
It is difficult to maintain a constant contact state, and intermittent contact is permitted.
【0007】特開昭63−306514号公報に記載されている
従来方式の磁気ヘッドスライダは、従来の磁気ヘッドス
ライダに、そり状可撓性の支持体を介して磁気トランス
デューサを有する微小なスライダを搭載し、記録媒体面
のあらゆるうねりに対して追従特性を向上させている
が、接触走行しながら記録再生する方式ではない。The conventional magnetic head slider disclosed in Japanese Patent Laid-Open No. 63-306514 is a conventional magnetic head slider, which is a micro slider having a magnetic transducer via a sled-like flexible support. It is mounted to improve the follow-up characteristic to any undulations on the surface of the recording medium, but it is not a method of recording and reproducing while traveling in contact.
【0008】以上のように、磁気ヘッドスライダを、ラ
ンナウトのような長波長なうねりとスライダ長・面粗さ
程度の短波長のうねりとを同時に追従させながらラビン
グコンタクト状態を保持させるのは非常に難しい。As described above, it is very effective for the magnetic head slider to maintain the rubbing contact state while simultaneously following the long-wave undulation such as runout and the short-wave undulation such as the slider length and surface roughness. difficult.
【0009】アイイーイーイー トランザクションズ
オン マグネティクス エムエージー27(IEEE Tran
s.MAG.,MAG−27),6(1991)4921ペー
ジに記載されている方式は、無潤滑の記録媒体面上を、
マイクロメカトロニクス,リソグラフィ技術を適用し
て、スライダとジンバルを一体化した超小型ヘッドを軽
荷重で接触走行させる方式であるが、高速アクセスは難
しく、かつ高コストとなる。IEE Transactions
On Magnetics MAG 27 (IEEE Tran
s.MAG., MAG-27), 6 (1991) 4921, the method described on page 4921
This is a method of applying micromechatronics and lithographic technology to make an ultra-compact head with slider and gimbal integrated contact travel with a light load, but high-speed access is difficult and costly.
【0010】特開平4−113568 号公報に記載されている
方式は、磁気ヘッドスライダを潤滑剤によって液体浮上
させる方式であるが、メニスカスが形成可能になるまで
潤滑剤を厚くする必要があり、潤滑剤の回転飛散が問題
となる。また、潤滑剤は数分子層程度に薄膜化すると、
粘性係数が数104〜107倍にもなり、固体的に振る舞
うため、本方式は使用不可となり、磁気記録的浮上量の
限界値を持つ。The method described in Japanese Patent Laid-Open No. 4-113568 is a method of floating a magnetic head slider with a lubricant, but it is necessary to thicken the lubricant until a meniscus can be formed. The rotational scattering of the agent becomes a problem. Also, if the lubricant is thinned to a few molecular layers,
Since the viscous coefficient is several 10 4 to 10 7 times, and it behaves in a solid state, this method cannot be used, and has a magnetic flying height limit value.
【0011】従来の磁気ヘッドスライダの支持体は、特
開昭55−22296 号公報に記載されたように、段状をなす
低可撓性横枠によって互いに連結される二つの外側可撓
性指部を形成する矩形切欠部と、横枠から矩形切欠部へ
向けて延設される可撓性中央舌状部とを有する可撓体
と、可撓体を支持する弾性部と荷重用ビーム部を兼用し
た部材と、兼用部材と中央舌状部との間に設置された荷
重用突起部とを具備する磁気ヘッドスライダの支持体で
ある。これらの構成によって、磁気ヘッドスライダが高
速回転した記録媒体面上のうねりに追従できるように、
荷重用突起部を支点として、スライダを上下,ピッチン
グ,ローリングの3自由度の動きを可能にしている。同
時に、磁気記録媒体が回転中に空気力学的に発生する浮
上力と、荷重用ビーム部から荷重用突起部を介して加え
られた所定の荷重とが釣り合うようにしている。しか
し、後に本発明において開示するような、スライダ1及
び2をそれぞれ別々の荷重を加える支持体ではない。A conventional magnetic head slider support has two outer flexible fingers which are connected to each other by a step-like low-flexible lateral frame as described in Japanese Patent Laid-Open No. 55-22296. Portion having a rectangular cutout portion, a flexible central tongue portion extending from the lateral frame toward the rectangular cutout portion, an elastic portion supporting the flexible body, and a load beam portion. A support body for a magnetic head slider, comprising: a member that also serves as a member, and a load protrusion that is provided between the member that serves as a member and the central tongue. With these configurations, the magnetic head slider can follow the undulations on the surface of the recording medium that rotates at a high speed.
With the load protrusion as a fulcrum, the slider can be moved in three degrees of freedom: vertical movement, pitching, and rolling. At the same time, the levitation force aerodynamically generated during rotation of the magnetic recording medium and the predetermined load applied from the load beam portion via the load projection portion are balanced. However, the sliders 1 and 2 are not supports to which separate loads are applied, as disclosed later in the present invention.
【0012】[0012]
【発明が解決しようとする課題】上記従来の接触走行し
ながら記録再生する方式の磁気ヘッドスライダでは、ラ
ンナウトのような長波長なうねりとスライダ長・面粗さ
程度の短波長のうねりとを同時に追従させながらラビン
グコンタクト状態を保持させるのが難しかった。SUMMARY OF THE INVENTION In the above-described conventional magnetic head slider for recording / reproducing while traveling in contact, long-wave undulations such as runout and short-wave undulations such as slider length / surface roughness are simultaneously formed. It was difficult to keep the rubbing contact state while following.
【0013】本発明の目的は、磁気ヘッドスライダを高
速回転した記録媒体面の長波長及び短波長のあらゆるう
ねりに対して同時に追従させながらラビングコンタクト
状態を保持させることである。It is an object of the present invention to maintain the rubbing contact state while simultaneously causing the magnetic head slider to follow any undulations of long wavelength and short wavelength on the surface of a recording medium which is rotated at a high speed.
【0014】本発明の他の目的は、磁気ヘッドスライダ
を支持する支持体を提供することである。Another object of the present invention is to provide a support for supporting the magnetic head slider.
【0015】本発明の他の目的は、磁気ヘッドスライダ
の製造方法を低コストで製造する製造方法を提供するこ
とである。Another object of the present invention is to provide a manufacturing method for manufacturing a magnetic head slider at low cost.
【0016】[0016]
【課題を解決するための手段】磁気トランスジューサを
搭載し、ラビングコンタクト状態を保持させるスライダ
面を設けた第1のスライダと空気軸受面になりうるスラ
イダ面を設けた第2のスライダとをスライダの厚さ方向
に動くように連結させた。A first slider provided with a magnetic transducer and provided with a slider surface for holding a rubbing contact state and a second slider provided with a slider surface which can be an air bearing surface are provided. They were connected so as to move in the thickness direction.
【0017】第1のスライダ及び第2のスライダを支え
る支持体では、荷重用ビーム部に矩形状切欠部を設け
て、第1のスライダ及び第2のスライダに対してそれぞ
れ別々の荷重を加える支持体にした。In the support for supporting the first slider and the second slider, the load beam portion is provided with a rectangular notch so that a separate load is applied to the first slider and the second slider. I made it to my body.
【0018】[0018]
【作用】第2のスライダ及びその支持体では、空気軸受
面になりうるスライダ面とスライダを上下,ピッチン
グ,ローリングの3自由度の動きを可能にした支持体と
を設けているため、ランナウトのような長波長及びスラ
イダ長程度の波長のうねりが追従できる。In the second slider and its supporting body, the slider surface which can be an air bearing surface and the supporting body which allows the slider to move in three degrees of freedom including vertical movement, pitching and rolling are provided. It is possible to follow undulations of such a long wavelength and a wavelength of about the slider length.
【0019】磁気トランスジューサを搭載した第1のス
ライダ及びその支持体は、ラビングコンタクト状態を保
持させるスライダ面とそのスライダに負荷できる支持体
を設けているため、面粗さ程度の短波長のうねりを追従
させながらラビングコンタクト状態を保持できる。さら
に、第1のスライダは第2のスライダとピッチング・ロ
ーリング方向の2自由度に関しては一体に動き、上下方
向に関しては第2のスライダと独立に動くため、ランナ
ウトのような長波長なうねりに対してもラビングコンタ
クト状態を保持できる。Since the first slider and the supporting body for mounting the magnetic transducer are provided with a slider surface for holding the rubbing contact state and a supporting body that can be loaded on the slider, waviness of a short wavelength of about surface roughness is provided. The rubbing contact state can be maintained while following. Furthermore, since the first slider moves integrally with the second slider in two degrees of freedom in the pitching / rolling direction and independently in the vertical direction with respect to the second slider, it can be used for long-wave undulations such as runout. However, the rubbing contact state can be maintained.
【0020】[0020]
【実施例】図1は本発明の一実施例の磁気ヘッドスライ
ダを示す。第1のスライダ1にラビングコンタクト状態
を保持させるスライダ面1aが設けてあり、薄膜素子3
は、最小浮上量となりうる第1のスライダ1の流出端側
面に搭載する。第2のスライダ2に、従来技術である空
気軸受面になりうるテーパフラットスライダレール2
a,2bが両側に沿って平行に設けられている。1 shows a magnetic head slider according to an embodiment of the present invention. The first slider 1 is provided with a slider surface 1a for holding the rubbing contact state, and the thin film element 3
Is mounted on the outflow end side surface of the first slider 1 that can provide the minimum flying height. For the second slider 2, a taper flat slider rail 2 which can be an air bearing surface according to the prior art is used.
a and 2b are provided in parallel along both sides.
【0021】第1のスライダのスライダ面1aが空気軸
受面になりうる可能性がある場合、加える荷重及びスラ
イダ形状を空気膜の減衰係数が負になるように選定する
ことによって、空気膜潤滑を不安定領域で動作させ、安
定浮上させないようにする。When there is a possibility that the slider surface 1a of the first slider can be an air bearing surface, air film lubrication is performed by selecting the applied load and the slider shape so that the damping coefficient of the air film is negative. Operate in an unstable area so that it does not float stably.
【0022】第1及び第2のスライダとの連結部4の形
状は台形状になっており、スライダの厚さ方向に動き、
スライダの長さ方向に拘束するように動作する。The connecting portion 4 with the first and second sliders has a trapezoidal shape and moves in the thickness direction of the slider.
Operates to constrain the length of the slider.
【0023】図2に従来の磁気ヘッドスライダを示す。
従来の磁気ヘッドスライダ5の薄膜素子3は、テーパフ
ラットスライダレール2本2a′,2b′のいずれか一
方の流出端に搭載されている。FIG. 2 shows a conventional magnetic head slider.
The thin film element 3 of the conventional magnetic head slider 5 is mounted on the outflow end of either one of the two tapered flat slider rails 2a 'and 2b'.
【0024】図3,図4に本発明の実施例の磁気ヘッド
スライダの製造方法を示す。3 and 4 show a method of manufacturing the magnetic head slider of the embodiment of the present invention.
【0025】(1)薄膜素子付ブロック6を切り出す
(図3a参照)。(1) Cutting out the block 6 with thin film element
(See Figure 3a).
【0026】(2)従来の機械加工で、第1のスライダ
のスライダ面1aとテーパフラットスライダレール2
a,2bを形成する(図3b〜図4a参照)。(2) By conventional machining, the slider surface 1a of the first slider and the taper flat slider rail 2
a and 2b are formed (see FIGS. 3b to 4a).
【0027】(3)従来の放電加工あるいはレーザ加工
で、第1のスライダと第2のスライダとを、その連結部
4の形状が台形になるように切り離す(図4b参照)。(3) By conventional electric discharge machining or laser machining, the first slider and the second slider are separated so that the connecting portion 4 has a trapezoidal shape (see FIG. 4b).
【0028】(4)第1のスライダと第2のスライダと
の連結部表面7に二硫化モリブデン,カーボンなどの固
体潤滑剤、あるいはKRYTOX143フッ素化オイル
(デュポン社製),FonbinZなどの液体潤滑剤を付
着させる(図4c参照)。(4) A solid lubricant such as molybdenum disulfide or carbon, or KRYTOX143 fluorinated oil is formed on the surface 7 of the connecting portion between the first slider and the second slider.
A liquid lubricant such as FonbinZ (manufactured by DuPont) is attached (see FIG. 4c).
【0029】このように、本発明の磁気ヘッドスライダ
は従来方法の機械加工・放電加工あるいはレーザ加工で
加工するため、マイクロメカトロニクス,リソグラフィ
加工方法に比べて低コストで製造できる。As described above, since the magnetic head slider of the present invention is processed by the conventional method of machining / electric discharge machining or laser processing, it can be manufactured at a lower cost than the micromechatronics and lithography processing methods.
【0030】図5に本発明の実施例の磁気ヘッドスライ
ダの支持体を示す。第1のスライダ1及び第2のスライ
ダ2にそれぞれ荷重用突起部8を設け、さらに荷重用ビ
ーム部9に矩形状切欠部10を設けて、第1のスライダ
1に対しては矩形状切欠部10で、第2のスライダ2に
対しては荷重用ビーム部9で荷重をそれぞれ独立に加え
る。FIG. 5 shows a support of the magnetic head slider of the embodiment of the present invention. Each of the first slider 1 and the second slider 2 is provided with a load projection portion 8, and a load beam portion 9 is provided with a rectangular cutout portion 10 to provide a rectangular cutout portion for the first slider 1. At 10, the load is applied to the second slider 2 independently by the load beam portion 9.
【0031】図6に従来の磁気ヘッドスライダの支持体
を示す。従来の磁気ヘッドスライダの支持体では、磁気
ヘッドスライダ5に一つの荷重用突起部8を介して荷重
用ビーム部9で荷重を加える。FIG. 6 shows a conventional magnetic head slider support. In the conventional magnetic head slider support, a load is applied to the magnetic head slider 5 by the load beam portion 9 via one load protrusion portion 8.
【0032】図7に本発明の実施例の磁気ヘッドスライ
ダが磁気記録媒体面上に追従する様子を示す。本発明の
実施例の磁気ヘッドスライダは、ランナウトのような長
波長なうねり13や面粗さ程度の短波長のうねり12に
対して同時に追従しながらラビングコンタクト状態を保
持可能である。FIG. 7 shows how the magnetic head slider according to the embodiment of the present invention follows the surface of the magnetic recording medium. The magnetic head slider according to the embodiment of the present invention can maintain the rubbing contact state while simultaneously following the long-wavelength waviness 13 such as a runout and the short-wavelength waviness 12 such as surface roughness.
【0033】[0033]
【発明の効果】本発明によれば、磁気ヘッドスライダ
を、高速回転した記録媒体面の長波長なうねりと短波長
のうねりに対して追従させながらラビングコンタクト状
態を保持可能となり、高密度記録化,高信頼性化,低コ
スト化が図れる。According to the present invention, the rubbing contact state can be maintained while the magnetic head slider is made to follow the long-wavelength waviness and the short-wavelength waviness of the surface of the recording medium rotated at a high speed, and a high density recording can be realized. High reliability and low cost can be achieved.
【図1】本発明の実施例の磁気ヘッドスライダを示す斜
視図。FIG. 1 is a perspective view showing a magnetic head slider according to an embodiment of the invention.
【図2】従来の磁気ヘッドスライダを示す斜視図。FIG. 2 is a perspective view showing a conventional magnetic head slider.
【図3】本発明の実施例の磁気ヘッドスライダの製造方
法を示す説明図。FIG. 3 is an explanatory diagram showing a method of manufacturing the magnetic head slider according to the embodiment of the invention.
【図4】本発明の実施例の磁気ヘッドスライダの製造方
法を示す説明図。FIG. 4 is an explanatory diagram showing a method of manufacturing the magnetic head slider according to the embodiment of the invention.
【図5】本発明の実施例の磁気ヘッドスライダの支持体
を示す説明図。FIG. 5 is an explanatory view showing a support body of the magnetic head slider of the embodiment of the invention.
【図6】従来の磁気ヘッドスライダの支持体を示す説明
図。FIG. 6 is an explanatory view showing a support of a conventional magnetic head slider.
【図7】本発明の実施例の磁気ヘッドスライダが磁気記
録媒体面上で追従する様子を示す説明図。FIG. 7 is an explanatory diagram showing how the magnetic head slider according to the embodiment of the present invention follows on the surface of a magnetic recording medium.
1…第1のスライダ、2…第2のスライダ、1a…第1
のスライダのスライダ面、2a,2b…テーパフラット
スライダレール、3…薄膜素子、4…第1のスライダと
第2のスライダとの連結部。1 ... 1st slider, 2 ... 2nd slider, 1a ... 1st
Slider surfaces of the sliders 2a, 2b ... Tapered flat slider rails, 3 ... Thin film element, 4 ... Connection portion between first slider and second slider.
Claims (9)
生可能な磁気トランスジューサを搭載し、回転する前記
磁気記録媒体の面上で接触あるいは間欠接触状態を保持
させる磁気ヘッドスライダにおいて、前記磁気トランス
ジューサを搭載し、回転する前記磁気記録媒体の面上で
接触状態を保持させるスライダ面を設けた第1のスライ
ダと空気軸受面になりうるスライダ面を設けた第2のス
ライダとがスライダの厚さ方向に動くように連結したこ
とを特徴とする磁気ヘッドスライダ。1. A magnetic head slider for mounting a magnetic transducer capable of recording or reproducing a recording signal on a magnetic recording medium and maintaining a contact or intermittent contact state on the surface of the rotating magnetic recording medium, wherein the magnetic transducer is A first slider provided with a slider surface for holding a contact state on the surface of the magnetic recording medium that is mounted and rotated, and a second slider provided with a slider surface that can be an air bearing surface are formed in the thickness direction of the slider. A magnetic head slider characterized in that it is movably connected to the magnetic head slider.
媒体の面上で前記第1のスライダは、前後方向及び横方
向に対しては前記第2のスライダと一体に動き、上下方
向に対しては前記第2のスライダと独立に動くように構
成した磁気ヘッドスライダ。2. The first slider according to claim 1, wherein the first slider moves integrally with the second slider in the front-rear direction and the lateral direction on the surface of the rotating magnetic recording medium, and in the vertical direction. And a magnetic head slider configured to move independently of the second slider.
生可能な磁気トランスジューサを搭載した磁気ヘッドス
ライダを回転する前記磁気記録媒体上に空気力学的に安
定浮上させるために、前記磁気ヘッドスライダに荷重用
突起部を介して荷重を加える荷重用ビーム部を設けた磁
気ヘッドスライダの支持体において、複数の磁気ヘッド
スライダに別々の荷重を加えることを特徴とする磁気ヘ
ッドスライダの支持体。3. A load is applied to the magnetic head slider so that the magnetic head slider having a magnetic transducer capable of recording or reproducing a recording signal on the magnetic recording medium is aerobically stably levitated on the rotating magnetic recording medium. A support body for a magnetic head slider, wherein a support beam portion for applying a load via a projection portion is provided, wherein different loads are applied to a plurality of magnetic head sliders.
前記第2のスライダとの連結部の形状を台形にした磁気
ヘッドスライダ。4. The magnetic head slider according to claim 1, wherein the connecting portion between the first slider and the second slider has a trapezoidal shape.
前記第2のスライダとの連結部表面に固体潤滑剤あるい
は液体潤滑剤を付着させた磁気ヘッドスライダ。5. The magnetic head slider according to claim 1, wherein a solid lubricant or a liquid lubricant is attached to a surface of a connecting portion between the first slider and the second slider.
ライダのスライダ面の空気潤滑膜を不安定領域で動作さ
せ、前記第2のスライダのスライダ面の空気潤滑膜を安
定領域で動作させる磁気ヘッドスライダ及びその支持
体。6. The air lubrication film on the slider surface of the first slider is operated in an unstable region, and the air lubrication film on the slider surface of the second slider is operated in a stable region. Magnetic head slider and its support.
矩形状切欠部を設けた磁気ヘッドスライダの支持体。7. The magnetic head slider support according to claim 3, wherein the load beam portion is provided with a rectangular notch.
を搭載したブロックから前記第1のスライダのスライダ
面及び前記第2のスライダのスライダ面を機械加工で作
製する工程と前記第1のスライダと前記第2のスライダ
をレーザ加工あるいは放電加工で切り離す工程を有する
磁気ヘッドスライダの製造方法。8. The method according to claim 1, wherein the slider surface of the first slider and the slider surface of the second slider are machined from a block mounting a magnetic transducer, the first slider and the first slider. A method of manufacturing a magnetic head slider, comprising the step of separating the second slider by laser processing or electric discharge processing.
ドスライダ及び前記磁気ヘッドスライダの支持体を使用
した磁気ディスク装置。9. A magnetic disk device according to claim 1, wherein the magnetic head slider and a support for the magnetic head slider are used.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33577992A JPH06187626A (en) | 1992-12-16 | 1992-12-16 | Magnetic head slider and its supporter, production of the slider and supporter, and magnetic disk device |
DE19934342079 DE4342079C2 (en) | 1992-12-09 | 1993-12-09 | Recording disk system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33577992A JPH06187626A (en) | 1992-12-16 | 1992-12-16 | Magnetic head slider and its supporter, production of the slider and supporter, and magnetic disk device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH06187626A true JPH06187626A (en) | 1994-07-08 |
Family
ID=18292357
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP33577992A Pending JPH06187626A (en) | 1992-12-09 | 1992-12-16 | Magnetic head slider and its supporter, production of the slider and supporter, and magnetic disk device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH06187626A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5764432A (en) * | 1995-01-24 | 1998-06-09 | Kabushiki Kaisha Toshiba | Recording and reproducing head slider and recording and reproducing apparatus using same |
-
1992
- 1992-12-16 JP JP33577992A patent/JPH06187626A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5764432A (en) * | 1995-01-24 | 1998-06-09 | Kabushiki Kaisha Toshiba | Recording and reproducing head slider and recording and reproducing apparatus using same |
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