JPH06171094A - Ink jet recording head and manufacturing method thereof - Google Patents
Ink jet recording head and manufacturing method thereofInfo
- Publication number
- JPH06171094A JPH06171094A JP33071292A JP33071292A JPH06171094A JP H06171094 A JPH06171094 A JP H06171094A JP 33071292 A JP33071292 A JP 33071292A JP 33071292 A JP33071292 A JP 33071292A JP H06171094 A JPH06171094 A JP H06171094A
- Authority
- JP
- Japan
- Prior art keywords
- recording head
- ink
- fluorine
- oxide fine
- nozzle plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000010419 fine particle Substances 0.000 claims abstract description 34
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims abstract description 33
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 33
- 239000011737 fluorine Substances 0.000 claims abstract description 33
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 24
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 24
- 239000010703 silicon Substances 0.000 claims abstract description 24
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 24
- 238000010438 heat treatment Methods 0.000 claims abstract description 15
- 239000002904 solvent Substances 0.000 claims abstract description 14
- 230000008878 coupling Effects 0.000 claims abstract description 12
- 239000007822 coupling agent Substances 0.000 claims abstract description 12
- 238000010168 coupling process Methods 0.000 claims abstract description 12
- 238000005859 coupling reaction Methods 0.000 claims abstract description 12
- 238000009835 boiling Methods 0.000 claims abstract description 7
- 239000006185 dispersion Substances 0.000 claims abstract description 3
- 239000003960 organic solvent Substances 0.000 claims abstract description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 33
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 13
- 239000002245 particle Substances 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000005871 repellent Substances 0.000 abstract description 11
- 230000000694 effects Effects 0.000 abstract description 5
- 238000004381 surface treatment Methods 0.000 abstract description 2
- 239000000976 ink Substances 0.000 description 53
- 239000010410 layer Substances 0.000 description 19
- 239000003921 oil Substances 0.000 description 13
- 238000000034 method Methods 0.000 description 8
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 230000002940 repellent Effects 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 3
- 238000004455 differential thermal analysis Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 229920002379 silicone rubber Polymers 0.000 description 3
- 239000004945 silicone rubber Substances 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000003301 hydrolyzing effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 150000004703 alkoxides Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- -1 aluminum alkoxide Chemical class 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Chemically Coating (AREA)
Abstract
(57)【要約】
【構成】 インクジェット記録装置に用いるインクジェ
ット記録ヘッドにおいて、インクが吐出するノズルプレ
ート表面上に酸化物微粒子層が形成され、更にその上に
含フッ素シリコンカップリング層が形成されていること
を特徴とする。ノズル表面に酸化物微粒子が分散した有
機溶媒を主分散溶媒とするオルガノゾルを塗布し、酸化
物微粒子の脱物理吸着水温度以上に加熱し、その上に含
フッ素シリコンカップリング剤溶液を塗布し、溶媒の沸
点以上まで加熱することにより形成される。
【効果】 インクジェット記録ヘッドのノズル表面に優
れた特性の撥水撥油処理が施せ、高い印字品質のインク
ジェット記録ヘッドを提供できた。また本発明による表
面処理は、その持続性に非常に優れているために、記録
ヘッドの長寿命化が可能となった。
(57) [Summary] [Structure] In an inkjet recording head used in an inkjet recording apparatus, an oxide fine particle layer is formed on a nozzle plate surface from which ink is ejected, and a fluorine-containing silicon coupling layer is further formed thereon. It is characterized by being The organosol having the organic solvent in which the oxide fine particles are dispersed as the main dispersion solvent is applied to the nozzle surface, heated to the temperature of dephysically adsorbed water of the oxide fine particles or higher, and the fluorine-containing silicon coupling agent solution is applied thereon. It is formed by heating above the boiling point of the solvent. [Effect] The nozzle surface of the inkjet recording head can be subjected to water-repellent and oil-repellent treatment with excellent characteristics, and an inkjet recording head with high printing quality can be provided. Further, since the surface treatment according to the present invention is extremely excellent in its durability, the life of the recording head can be extended.
Description
【0001】[0001]
【産業上の利用分野】本発明は、インクジェット記録装
置に用いるインクジェット記録ヘッドに関わる。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet recording head used in an ink jet recording apparatus.
【0002】[0002]
【従来の技術】インクジェット記録ヘッドにはガラス、
金属、樹脂等の材質が用いられている。しかしインクジ
ェット記録ヘッドにおいて、ノズル表面の撥水撥油性が
不十分だとインクの液滴が付着するため、吐出するイン
ク滴の直進性が損なわれ、印字乱れ等のトラブルによっ
て記録不能となることがあった。2. Description of the Related Art Inkjet recording heads are made of glass,
Materials such as metal and resin are used. However, in the ink jet recording head, if the water and oil repellency of the nozzle surface is insufficient, ink droplets will adhere, impairing the straightness of the ejected ink droplets and making recording impossible due to problems such as print disturbance. there were.
【0003】そこでインクが吐出するノズルプレート表
面を、インクの付着をなくすために撥水撥油化処理する
ことが示され、静電粉体塗装(特開昭57−15776
5)、共析メッキ、プラズマ重合(特開昭60−183
161)等によりノズル表面に含フッ素樹脂粒子を付着
させて撥水撥油化するという方法が提供されている。ま
た、含フッ素シリコンカップリング処理する方法(特開
昭56−89569)や、溶媒可溶性含フッ素樹脂を塗
布して薄膜を形成する方法(特開平3−13273)も
提供されている。Therefore, it has been shown that the surface of a nozzle plate from which ink is ejected is treated to be water and oil repellent in order to eliminate the adhesion of ink.
5), eutectoid plating, plasma polymerization (JP-A-60-183)
161) and the like, there is provided a method in which fluorine-containing resin particles are attached to the nozzle surface to make it water and oil repellent. Further, a method of fluorine-containing silicon coupling treatment (JP-A-56-89569) and a method of applying a solvent-soluble fluorine-containing resin to form a thin film (JP-A-3-13273) are also provided.
【0004】[0004]
【発明が解決しようとする課題】しかしながら、印字品
質の高精細化、高コントラスト化、多色化等の要求から
インクの改良がなされ、インクの長期安定性を確保する
ための添加剤も必要となった。前述の従来技術による撥
水撥油化処理では初期特性が不十分なうえ、インク中に
長期浸漬しておくと、処理層の剥離やインクの吸着が発
生し、特性の著しい劣化がおこった。However, the ink has been improved in response to the demands for high definition of printing quality, high contrast, and multicolor, and an additive for ensuring long-term stability of the ink is also required. became. The water-repellent and oil-repellent treatment according to the above-mentioned conventional technique has insufficient initial characteristics, and when it is immersed in ink for a long time, the treated layer is peeled off or ink is adsorbed, resulting in remarkable deterioration of characteristics.
【0005】本発明は前記課題を解決するためのもので
あり、インクジェット記録ヘッドのノズルプレート表面
に優れた特性の撥水撥油処理を行い、しかもその効果の
持続性に優れ、長期間にわたって印字品質の高いインク
ジェット記録ヘッド及びその容易な製造方法の提供を目
的としている。The present invention has been made to solve the above-mentioned problems, and the water-repellent and oil-repellent treatment with excellent characteristics is performed on the surface of the nozzle plate of the ink jet recording head, and further, the effect is excellent in durability and printing is performed for a long period of time. It is an object of the present invention to provide a high quality ink jet recording head and an easy manufacturing method thereof.
【0006】[0006]
【課題を解決するための手段】上記目的は、インクジェ
ット記録装置に用いるインクジェット記録ヘッドにおい
て、インクが吐出するノズルプレート表面上に酸化物微
粒子層が形成され、更にその上に含フッ素シリコンカッ
プリング層が形成されていることにより達成される。ま
た、本インクジェット記録ヘッドは、少なくとも以下の
工程を用いることで製造できる。In the ink jet recording head used for an ink jet recording apparatus, the above-mentioned object is to form an oxide fine particle layer on the surface of a nozzle plate from which ink is ejected, and further to form a fluorine-containing silicon coupling layer thereon. Is achieved by forming The inkjet recording head can be manufactured by using at least the following steps.
【0007】a)インクが吐出するノズルプレート表面
に、酸化物微粒子が分散した有機溶媒を主分散溶媒とす
るオルガノゾルを塗布する工程。A) A step of applying an organosol whose main dispersion solvent is an organic solvent in which fine oxide particles are dispersed, onto the surface of a nozzle plate from which ink is ejected.
【0008】b)酸化物微粒子の脱物理吸着水温度以上
に加熱し、酸化物微粒子層を定着させる工程。B) Dephysiological adsorption of oxide fine particles A step of heating above the water temperature to fix the oxide fine particle layer.
【0009】c)酸化物微粒子層上に含フッ素シリコン
カップリング剤溶液を塗布する工程。C) A step of applying a fluorine-containing silicon coupling agent solution on the oxide fine particle layer.
【0010】d)溶媒の沸点以上まで加熱し、含フッ素
シリコンカップリング層を定着させる工程。D) A step of heating to above the boiling point of the solvent to fix the fluorine-containing silicon coupling layer.
【0011】[0011]
【作用】高浸透性、高保存安定性を備えたインクに対し
ては、ノズルプレート表面に含フッ素樹脂粒子を付着さ
せる方法や、含フッ素樹脂薄膜を形成する方法は、含フ
ッ素樹脂の表面エネルギーが著しく小さいため密着力が
不十分であり、界面にインクが浸透し剥離が発生する。
また、含フッ素シリコンカップリング処理する方法は、
基材の反応基とは化学結合で強固に結合しているもの
の、反応基密度が小さいため結合密度が小さく、含フッ
素シリコンカップリング処理されていない部分にインク
が吸着し、劣化してしまう。初期の高撥水撥油性は、化
学結合していない付着しているだけの含フッ素シリコン
カップリング剤でもたらされているもので、耐久性はな
い。[Function] For inks having high penetrability and high storage stability, the method of adhering fluorine-containing resin particles to the nozzle plate surface and the method of forming a fluorine-containing resin thin film are Is extremely small, the adhesion is insufficient and the ink penetrates into the interface to cause peeling.
Further, the method of fluorine-containing silicon coupling treatment,
Although it is strongly bonded to the reactive group of the base material by a chemical bond, the density of the reactive group is low, so the bond density is low, and the ink is adsorbed to the portion not subjected to the fluorine-containing silicon coupling treatment and deteriorates. The initial high water / oil repellency is brought about by the fluorine-containing silicon coupling agent which is not chemically bonded and is only attached, and is not durable.
【0012】ノズルプレート表面に酸化物微粒子分散ゾ
ルを塗布し、酸化物微粒子の脱物理吸着水温度以上に加
熱すると、酸化物微粒子層が強固に定着する。含フッ素
樹脂粒子と異なり、酸化物微粒子の表面エネルギーは著
しく大きいため、特に金属や無機材料との密着力に優れ
ている。シリカ微粒子はインクに侵食され、溶出してし
まうため、耐インク性の強いアルミナやジルコニア微粒
子が、汎用的で好ましい。酸化物微粒子層の表面は活性
で、多くの水酸基を有している。そのため含フッ素シリ
コンカップリング剤の化学結合を、高密度で行なうこと
ができる。溶媒の沸点以上まで加熱すると、付着してい
るだけの含フッ素シリコンカップリング剤の未反応の化
学結合を促進し、含フッ素シリコンカップリング層を強
固に定着できる。処理層の剥離やインクの吸着は発生し
ないため、初期特性がそのまま持続される。When the oxide fine particle-dispersed sol is applied to the surface of the nozzle plate and heated to a temperature higher than the temperature of dephysically adsorbed water of the oxide fine particles, the oxide fine particle layer is firmly fixed. Unlike the fluorine-containing resin particles, the oxide fine particles have a remarkably large surface energy, and thus are particularly excellent in adhesiveness with metals and inorganic materials. Since the silica fine particles are eroded by the ink and are eluted, the alumina and zirconia fine particles having high ink resistance are general-purpose and preferable. The surface of the oxide fine particle layer is active and has many hydroxyl groups. Therefore, the fluorine-containing silicon coupling agent can be chemically bonded at a high density. When heated to the boiling point of the solvent or higher, the unreacted chemical bond of the fluorine-containing silicon coupling agent just attached is promoted, and the fluorine-containing silicon coupling layer can be firmly fixed. Since the treatment layer is not peeled off or ink is not adsorbed, the initial characteristics are maintained.
【0013】含フッ素シリコンカップリング剤は様々な
種類が市販されており、表面エネルギーが小さく、立体
障害性の高いものを用いることで、初期的に優れた撥水
撥油性を確保することは比較的容易である。Various types of fluorine-containing silicon coupling agents are commercially available, and it is comparative that it is possible to secure excellent water and oil repellency in the initial stage by using those having low surface energy and high steric hindrance. It is easy.
【0014】[0014]
(実施例1)図1はインクジェット記録ヘッドの一例を
模式的に示した断面図である。1は圧力室であり、PZ
T素子または発熱体等によってインク吐出のための圧力
を得る部分である。3はインク吐出ノズルである。4は
第一基板でありインク流路用のパターン溝が形成されて
いる。5は第二基板であり、両者の張り合わせによって
インク流路は形成される。2がノズルプレートである。(Embodiment 1) FIG. 1 is a sectional view schematically showing an example of an ink jet recording head. 1 is a pressure chamber, PZ
This is a portion for obtaining a pressure for ejecting ink by the T element or the heating element. Reference numeral 3 is an ink ejection nozzle. Reference numeral 4 is a first substrate on which a pattern groove for an ink flow path is formed. Reference numeral 5 is a second substrate, and an ink flow path is formed by bonding the two. 2 is a nozzle plate.
【0015】図2に、ノズルプレート表面の撥水化処理
の工程を模式的な断面図で示した。(a)は処理前のニ
ッケル製のノズルプレートの、ノズル付近の拡大図を示
している。ノズルの口径は数十μmである。FIG. 2 is a schematic sectional view showing the steps of water repellent treatment of the nozzle plate surface. (A) is an enlarged view of the vicinity of the nozzle of the nickel nozzle plate before treatment. The diameter of the nozzle is several tens of μm.
【0016】(b)はノズルプレート表面に、酸化物微
粒子層が定着した状態を示した。表面に塗布する酸化物
微粒子が分散したゾルには、アルミナ微粒子がエタノー
ルを主成分とする溶媒に分散したアルミナゾルを用い
た。アルミナ微粒子の大きさや濃度は、適当な値を選択
できるが、ここではアルミナの平均粒径0.05μm、
濃度1wt%のアルミナゾルについて例を述べる。アル
ミナ微粒子は、アルミニウムアルコキシドを加水分解す
ることによって得ることができる。またアルミナゾル5
20(日産化学社製)のように、球形でない微粉末も用
いることができる。ノズルプレートの裏面、またはノズ
ル内部をマスクテープやフォトレジストで保護し、アル
ミナゾルをノズルプレートの表面に、ディッピングで塗
布した。アルミナ微粒子層を、約0.2μmの厚みで形
成できた。保護層を除去した後、300℃で1時間加熱
処理した。示差熱分析によるアルミナ微粒子の脱物理吸
着水温度は130℃である。水との接触角は約10度と
高い親水性を示し、水酸基を高密度に有していることが
わかる。(B) shows a state where the oxide fine particle layer is fixed on the surface of the nozzle plate. An alumina sol in which alumina particles were dispersed in a solvent containing ethanol as a main component was used as the sol on the surface of which the oxide particles were dispersed. An appropriate value can be selected for the size and concentration of the alumina fine particles, but here, the average particle diameter of the alumina is 0.05 μm,
An example of an alumina sol having a concentration of 1 wt% will be described. Alumina fine particles can be obtained by hydrolyzing an aluminum alkoxide. Alumina sol 5
It is also possible to use a non-spherical fine powder such as 20 (manufactured by Nissan Chemical Co., Ltd.). The back surface of the nozzle plate or the inside of the nozzle was protected with a mask tape or a photoresist, and alumina sol was applied to the surface of the nozzle plate by dipping. The alumina fine particle layer could be formed with a thickness of about 0.2 μm. After removing the protective layer, heat treatment was performed at 300 ° C. for 1 hour. The temperature of the dephysically adsorbed water of alumina fine particles by differential thermal analysis is 130 ° C. It can be seen that the contact angle with water is as high as about 10 degrees and shows a high hydrophilicity and has a high density of hydroxyl groups.
【0017】(c)は、酸化物微粒子層上に含フッ素シ
リコンカップリング層を定着させた状態を示した。フッ
素系溶媒に含フッ素シリコンカップリング剤である1H,1
H,2H,2H-PERFLUORODECYLTRICHLOROSILANEを10%溶解
させ、ノズルプレート表面に塗布した。フッ素系溶媒の
沸点は180℃である。各加熱処理温度で1時間加熱処
理したサンプルを、浸透性の高い染料インクに浸漬し、
70℃で5日間保持した前後のインクとの接触角を表1
に示す。200℃以上の加熱処理で、十分な撥水撥油効
果が得られていることがわかった。(C) shows a state in which the fluorine-containing silicon coupling layer is fixed on the oxide fine particle layer. 1H, 1 which is a fluorine-containing silicon coupling agent in a fluorine-based solvent
10% of H, 2H, 2H-PERFLUORODECYLTRICHLOROSILANE was dissolved and applied to the surface of the nozzle plate. The boiling point of the fluorine-based solvent is 180 ° C. The sample heat-treated at each heat treatment temperature for 1 hour was dipped in a dye ink having high permeability,
Table 1 shows the contact angles with the ink before and after holding at 70 ° C for 5 days.
Shown in. It was found that a sufficient water / oil repellency effect was obtained by the heat treatment at 200 ° C. or higher.
【0018】[0018]
【表1】 [Table 1]
【0019】アルミナ微粒子層のないノズル内部も、初
期的にはインクをはじいていたが、前記インクエージン
グにより、良好な濡れ性を示した。試みにニッケル板上
に含フッ素シリコンカップリング剤溶液を塗布し、20
0℃で1時間加熱処理したサンプルを作製したところ、
初期のインクとの接触角は70度であったが、インク浸
漬後は10度であった。Initially, the ink was repelled inside the nozzle without the alumina fine particle layer, but due to the ink aging, good wettability was exhibited. For trial, apply a solution of fluorine-containing silicon coupling agent on a nickel plate, and
When a sample heat-treated at 0 ° C. for 1 hour was prepared,
The initial contact angle with the ink was 70 degrees, but it was 10 degrees after the ink immersion.
【0020】含フッ素シリコンカップリング剤溶液塗布
後、300℃で1時間加熱処理したノズルプレートを用
いて製造したインクジェット記録ヘッドを、記録装置に
装着して印字試験を行なったところ、印字乱れ等のトラ
ブルは発生せず、高精細でコントラストの高い印字が可
能となった。インクを注入しながらシリコンゴムによる
擦り試験をしたところ、10000回擦った後にもイン
クとの接触角は60度以上あり、撥水撥油効果がほとん
ど劣化せず長期間にわたって印字品質の高いインクジェ
ット記録ヘッドを達成できた。After applying the fluorine-containing silicon coupling agent solution, an ink jet recording head manufactured by using a nozzle plate which was heat-treated at 300 ° C. for 1 hour was mounted on a recording apparatus and a printing test was conducted. No trouble occurred, and high-definition and high-contrast printing became possible. A rubbing test using silicone rubber while injecting ink showed that the contact angle with the ink was 60 degrees or more even after rubbing 10,000 times, and the water and oil repellency effect was hardly deteriorated, and inkjet recording with high print quality for a long time I was able to achieve the head.
【0021】(実施例2)ステンレス(SUS316-L)製の
ノズルプレート表面に、ジルコニア微粒子が分散したゾ
ルを塗布した。ジルコニア微粒子の大きさや濃度は、適
当な値を選択できるが、ここでは平均粒径0.02μm
の球形のジルコニア粒子をアルコキシドを加水分解する
ことによって作製し、メタノール中に濃度0.5wt%
で分散させた。ノズルプレートの裏面、またはノズル内
部をマスクテープやフォトレジストで保護し、ジルコニ
アゾルをノズルプレートの表面に、スピンコートで塗布
した。ジルコニア微粒子層を、約0.1μmの厚みで形
成できた。保護層を除去した後、各加熱処理温度で1時
間加熱処理した。示差熱分析によるジルコニア微粒子の
脱物理吸着水温度は170℃である。水との接触角は加
熱処理温度によらず約10度と高い親水性を示し、水酸
基を高密度に有していることがわかる。Example 2 A sol in which zirconia fine particles were dispersed was applied to the surface of a nozzle plate made of stainless steel (SUS316-L). An appropriate value can be selected for the size and concentration of the zirconia fine particles, but here, the average particle diameter is 0.02 μm.
Of spherical zirconia particles were prepared by hydrolyzing alkoxide, and the concentration was 0.5 wt% in methanol.
Dispersed. The back surface of the nozzle plate or the inside of the nozzle was protected with a mask tape or a photoresist, and the zirconia sol was applied to the surface of the nozzle plate by spin coating. The zirconia fine particle layer could be formed with a thickness of about 0.1 μm. After removing the protective layer, heat treatment was performed at each heat treatment temperature for 1 hour. The temperature of the dephysically adsorbed water of the zirconia fine particles by differential thermal analysis is 170 ° C. It can be seen that the contact angle with water shows a high hydrophilicity of about 10 degrees regardless of the heat treatment temperature, and has a high density of hydroxyl groups.
【0022】フッ素系溶媒に含フッ素シリコンカップリ
ング剤であるKP−801M(信越化学社製)を10%
溶解させ、ノズルプレート表面に塗布し、120℃で1
時間加熱処理した。フッ素系溶媒の沸点は100℃であ
る。ジルコニアゾル塗布後の各加熱処理温度で1時間加
熱処理したサンプルを、界面活性剤及び安定化剤を含ん
だ顔料インクに浸漬し、70℃で5日間保持した前後の
インクとの接触角を表2に示す。200℃以上の加熱処
理で、十分な密着強度が得られていることがわかった。10% of fluorine-containing silicon coupling agent KP-801M (manufactured by Shin-Etsu Chemical Co., Ltd.) in a fluorine-based solvent.
Dissolve, apply on the nozzle plate surface, and at 120 ℃ 1
Heat treated for hours. The boiling point of the fluorine-based solvent is 100 ° C. A sample heat-treated for 1 hour at each heat-treatment temperature after applying zirconia sol was dipped in a pigment ink containing a surfactant and a stabilizer, and the contact angle before and after the ink was kept at 70 ° C. for 5 days was shown. 2 shows. It was found that sufficient adhesion strength was obtained by heat treatment at 200 ° C. or higher.
【0023】[0023]
【表2】 [Table 2]
【0024】ジルコニアゾル塗布後、300℃で1時間
加熱処理したノズルプレートを用いて製造したインクジ
ェット記録ヘッドを、記録装置に装着して印字試験を行
なったところ、印字乱れ等のトラブルは発生せず、高コ
ントラストで耐候性の高い印字が可能となった。インク
を注入しながらシリコンゴムによる擦り試験をしたとこ
ろ、10000回擦った後にもインクとの接触角は60
度以上あり、撥水撥油効果がほとんど劣化せず長期間に
わたって印字品質の高いインクジェット記録ヘッドを達
成できた。After the zirconia sol was applied, an ink jet recording head manufactured by using a nozzle plate heat-treated at 300 ° C. for 1 hour was mounted on a recording apparatus and a printing test was conducted, and no trouble such as print disturbance was found. Printing with high contrast and high weather resistance is now possible. A rubbing test with silicone rubber was performed while injecting ink, and the contact angle with ink was 60 even after rubbing 10,000 times.
As a result, an ink jet recording head with high printing quality could be achieved for a long period of time with almost no deterioration in water and oil repellency.
【0025】(実施例3)ステンレス(SUS316-L)製の
ノズルプレート表面に、ジルコニア微粒子が分散したゾ
ルを塗布した。ジルコニア微粒子の大きさや濃度は、適
当な値を選択できるが、ここでは平均粒径0.06μm
のジルコニアゾルNZS-30A (日産化学社製)を用い、メ
タノール中に濃度2wt%で分散させた。ノズルプレー
トの裏面、またはノズル内部をマスクテープやフォトレ
ジストで保護し、ジルコニアゾルをノズルプレートの表
面に、スピンコートで塗布した。ジルコニア微粒子層
を、約0.3μmの厚みで形成できた。保護層を除去し
た後、200℃で1時間加熱処理した。示差熱分析によ
るジルコニア微粒子の脱物理吸着水温度は120℃であ
る。水との接触角は約15度と高い親水性を示し、水酸
基を高密度に有していることがわかる。Example 3 A sol in which fine zirconia particles were dispersed was applied to the surface of a nozzle plate made of stainless steel (SUS316-L). An appropriate value can be selected for the size and concentration of the zirconia fine particles, but here, the average particle diameter is 0.06 μm.
Zirconia sol NZS-30A (manufactured by Nissan Kagaku Co., Ltd.) was dispersed in methanol at a concentration of 2 wt%. The back surface of the nozzle plate or the inside of the nozzle was protected with a mask tape or a photoresist, and the zirconia sol was applied to the surface of the nozzle plate by spin coating. The zirconia fine particle layer could be formed with a thickness of about 0.3 μm. After removing the protective layer, heat treatment was performed at 200 ° C. for 1 hour. The dephysically adsorbed water temperature of the zirconia fine particles by differential thermal analysis is 120 ° C. The contact angle with water is about 15 degrees, which shows high hydrophilicity, and it is understood that the polymer has a high density of hydroxyl groups.
【0026】フッ素系溶媒に含フッ素シリコンカップリ
ング剤である1H,1H,2H,2H-PERFLUOROOCTYLTRIETHOXYSIL
ANE を3%溶解させ、ノズルプレート表面に塗布し、2
50℃で1時間加熱処理した。フッ素系溶媒の沸点は1
00℃である。カラー染料を含んだインクに浸漬し、7
0℃で5日間保持したところ、インクと60度以上の接
触角が得られ、十分な撥水撥油効果及び密着強度が得ら
れていることがわかった。1H, 1H, 2H, 2H-PERFLUOROOCTYLTRIETHOXYSIL which is a fluorine-containing solvent and a fluorine-containing silicon coupling agent
Dissolve 3% of ANE and apply it to the surface of the nozzle plate.
It heat-processed at 50 degreeC for 1 hour. The boiling point of the fluorinated solvent is 1
It is 00 ° C. Dip in ink containing color dye, and
When kept at 0 ° C. for 5 days, it was found that a contact angle with the ink of 60 ° or more was obtained, and sufficient water / oil repellency effect and adhesion strength were obtained.
【0027】このノズルプレートを用いて製造したイン
クジェット記録ヘッドを、記録装置に装着して印字試験
を行なったところ、印字乱れ等のトラブルは発生せず、
鮮明なカラー印字が可能となった。インクを注入しなが
らシリコンゴムによる擦り試験をしたところ、1000
0回擦った後にもインクとの接触角は60度以上あり、
撥水撥油効果がほとんど劣化せず長期間にわたって印字
品質の高いインクジェット記録ヘッドを達成できた。When an ink jet recording head manufactured by using this nozzle plate was attached to a recording apparatus and a printing test was conducted, no trouble such as print disturbance was observed.
Vivid color printing is now possible. When a rubbing test with silicone rubber was performed while injecting ink, 1000
The contact angle with ink is 60 degrees or more even after rubbing 0 times,
An ink jet recording head with high printing quality could be achieved for a long period of time with almost no deterioration in water and oil repellency.
【0028】[0028]
【発明の効果】以上述べたように本発明によれば、イン
クジェット記録ヘッドにおいてノズルプレート表面に優
れた特性の撥水撥油処理を施し、高い印字品質のインク
ジェット記録ヘッドを提供できた。また本発明による表
面処理は、その持続性に非常に優れているために、記録
ヘッドの長寿命化が可能となる。As described above, according to the present invention, it is possible to provide an ink jet recording head having high printing quality by subjecting the nozzle plate surface to the water and oil repellent treatment having excellent characteristics in the ink jet recording head. Further, since the surface treatment according to the present invention is extremely excellent in its durability, the life of the recording head can be extended.
【0029】さらに本発明のインクジェット記録ヘッド
の製造方法は、極めて簡単な装置及び工程で撥水撥油化
処理ができるため、製造上安全であり、コストも大幅に
下げられるものであり、その効果は大きい。Further, according to the method of manufacturing the ink jet recording head of the present invention, since the water and oil repellent treatment can be performed by an extremely simple apparatus and process, it is safe in manufacturing and the cost can be drastically reduced. Is big.
【図1】 実施例1におけるインクジェット記録ヘッド
の概略を、模式的に示した断面図である。FIG. 1 is a schematic cross-sectional view of an inkjet recording head according to a first exemplary embodiment.
【図2】 実施例1におけるノズルプレート表面の撥水
撥油化処理の工程を、模式的に示した断面図である。FIG. 2 is a cross-sectional view that schematically shows the process of water and oil repellency treatment on the surface of the nozzle plate in the first embodiment.
1 圧力室 2 ノズルプレート 3 インク吐出ノズル 4 第一基板 5 第二基板 21 酸化物微粒子層 22 含フッ素シリコンカップリング層 1 Pressure Chamber 2 Nozzle Plate 3 Ink Ejection Nozzle 4 First Substrate 5 Second Substrate 21 Oxide Fine Particle Layer 22 Fluorine-Containing Silicon Coupling Layer
Claims (3)
ジェット記録ヘッドにおいて、インクが吐出するノズル
プレート表面上に酸化物微粒子層が形成され、更にその
上に含フッ素シリコンカップリング層が形成されている
ことを特徴とするインクジェット記録ヘッド。1. In an inkjet recording head used in an inkjet recording apparatus, an oxide fine particle layer is formed on a surface of a nozzle plate from which ink is ejected, and a fluorine-containing silicon coupling layer is further formed thereon. Inkjet recording head.
ズルプレートが金属であり、ノズルプレート表面上に形
成される酸化物微粒子層がアルミナまたはジルコニアで
あることを特徴とする請求項1記載のインクジェット記
録ヘッド。2. The ink jet recording head according to claim 1, wherein the nozzle plate used in the ink jet recording apparatus is made of metal, and the oxide fine particle layer formed on the surface of the nozzle plate is made of alumina or zirconia.
酸化物微粒子層が形成され、更にその上に含フッ素シリ
コンカップリング層が形成されているインクジェット記
録ヘッドの製造において、少なくとも以下の工程を用い
ることを特徴とするインクジェット記録ヘッドの製造方
法。 a)インクが吐出するノズルプレート表面に、酸化物微
粒子が分散した有機溶媒を主分散溶媒とするオルガノゾ
ルを塗布する工程。 b)酸化物微粒子の脱物理吸着水温度以上に加熱し、酸
化物微粒子層を定着させる工程。 c)酸化物微粒子層上に含フッ素シリコンカップリング
剤溶液を塗布する工程。 d)溶媒の沸点以上まで加熱し、含フッ素シリコンカッ
プリング層を定着させる工程。3. Use of at least the following steps in the production of an ink jet recording head in which an oxide fine particle layer is formed on the surface of a nozzle plate from which ink is ejected, and a fluorine-containing silicon coupling layer is further formed thereon. A method of manufacturing an inkjet recording head, comprising: a) A step of applying an organosol whose main dispersion solvent is an organic solvent in which fine oxide particles are dispersed, onto the surface of a nozzle plate from which ink is ejected. b) A step of fixing the oxide fine particle layer by heating above the dephysisorption water temperature of the oxide fine particles. c) A step of applying a fluorine-containing silicon coupling agent solution on the oxide fine particle layer. d) A step of heating to above the boiling point of the solvent to fix the fluorine-containing silicon coupling layer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33071292A JP3161106B2 (en) | 1992-12-10 | 1992-12-10 | Ink jet recording head and method of manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33071292A JP3161106B2 (en) | 1992-12-10 | 1992-12-10 | Ink jet recording head and method of manufacturing the same |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH06171094A true JPH06171094A (en) | 1994-06-21 |
JP3161106B2 JP3161106B2 (en) | 2001-04-25 |
Family
ID=18235723
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP33071292A Expired - Lifetime JP3161106B2 (en) | 1992-12-10 | 1992-12-10 | Ink jet recording head and method of manufacturing the same |
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Country | Link |
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US7141305B2 (en) | 2001-04-02 | 2006-11-28 | Matsushita Electric Industrial Co., Ltd. | Water-repellent film and method for producing the same, and ink jet head and ink jet type recording apparatus using the same |
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US7141305B2 (en) | 2001-04-02 | 2006-11-28 | Matsushita Electric Industrial Co., Ltd. | Water-repellent film and method for producing the same, and ink jet head and ink jet type recording apparatus using the same |
US6855375B2 (en) | 2002-03-28 | 2005-02-15 | Matsushita Electric Industrial Co., Ltd. | Method for producing water-repellent film |
EP2163389A1 (en) | 2003-07-22 | 2010-03-17 | Canon Kabushiki Kaisha | Ink jet head and its manufacture method |
US7758158B2 (en) | 2003-07-22 | 2010-07-20 | Canon Kabushiki Kaisha | Ink jet head and its manufacture method |
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