JPH0617041Y2 - Dimension measuring instrument - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a size measuring instrument.

In particular, the present invention relates to a dimension measuring device that can simultaneously measure a gap dimension and a step dimension of a structure having a gap and a step adjacent to the gap.

[Prior Art] Conventionally, in a structure having a plurality of types of measurement sites, for example, as shown in FIG. 8, a structure having a gap d and a step h between upper end faces of both side walls of the gap d. In 100,
A method of selectively using a measuring instrument suitable for each measurement site of the gap d or the step h, or a method of measuring the dimension of the gap d and the step h using a caliper is known. There is.

In the former method, the dimension of the gap d is measured using a clearance gauge or a gap measuring instrument such as an inner micrometer, while the dimension of the step h is measured using a step gauge such as a depth gauge or a depth micrometer. It was something to measure.

In the latter method, the size of the gap d is measured using the inner jaw of the caliper, and the size of the step h is measured using the depth bar.

[Problems to be solved by the invention] In a method of selectively using different measuring devices for each measurement site, it is necessary to prepare plural kinds of measurement devices suitable for each measurement site from the beginning. . This is economically disadvantageous. In addition, in the measurement, it is necessary to replace the measuring instrument with a different measuring instrument for each measurement site and perform the measurement operation each time, so that the measurement operation is time-consuming and not efficient.

On the other hand, even in the method using calipers, since the portion to be used is different for each measurement site, the measurement operation has to be performed each time, and similarly the measurement work is time-consuming and not efficient.

Therefore, whichever method is used, it is not efficient because the measurement operation must be performed for each measurement site. In addition, whichever method is used, in order to measure the level difference with high accuracy in measuring the level difference, the level measuring instrument or the caliper must be stably held.
Therefore, conventionally, since the height dimension from the bottom surface of the gap d to the surface where the step is measured is measured and the step dimension is obtained from the difference in the height dimension, the measurement of the step dimension is extremely troublesome. It took time.

Here, the object of the present invention is to solve the above-mentioned conventional problems, and in a structure having a gap and a step adjacent to the gap, the gap size and the step size are efficiently and An object of the present invention is to provide a dimension measuring device that can measure easily.

[Means for Solving the Problem] Therefore, in the present invention, the gap size and the step size are configured to be simultaneously measured in one operation.

Specifically, while providing the first jaw on the body,
A second jaw is provided so as to be displaceable in two axial directions orthogonal to each other with respect to the first jaw, and a displacement detector is provided for detecting an axial displacement amount of the second jaw with respect to the first jaw, A step measuring surface that is perpendicular to the first jaw and the second jaw with respect to one of the two axial directions;
A gap measuring surface that projects at a right angle from the step measuring surface and is orthogonal to the axial direction of the other one is formed, and the step measuring surface of the second jaw is different from the step measuring surface of the first jaw. Urges the second jaw in each of the axial directions in a direction projecting from and away from the body and in a direction separating the gap measuring surface of the second jaw from the gap measuring surface of the first jaw. It is characterized in that a biasing means for performing is provided.

[Operation] When the second jaw is displaced in the two axial directions orthogonal to each other against the biasing means, the gap between the step measuring surface of the first jaw and the gap measuring surface of the second jaw and the first The distance between the jaw gap measuring surface and the second jaw gap measuring surface is detected by the displacement detector.

Therefore, after the second jaw is displaced against the biasing means in the biaxial directions orthogonal to each other and in the direction approaching the first jaw, the step measuring surfaces of the first and second jaws are covered. If the gap measuring surface is brought into contact with the gap of the object to be measured, the gap between the step measuring surfaces of the first and second jaws, that is, the step dimension of the object to be measured, and the first and second The distance between the jaw clearance measuring surfaces, that is, the clearance dimension of the object to be measured is detected by the displacement detector.

Therefore, the step size and the gap size can be measured at the same time by one measurement operation, so that these measurement operations can be performed efficiently. After the first jaw is brought into contact with one side of each measurement item, the second jaw is brought into contact with the other side of each measurement item while displacing the second jaw in the biaxial direction by the urging force of the urging means. Since it is sufficient, it is possible to perform the measurement easily with one-handed operation.

[Embodiment] The present invention will be described below based on an embodiment shown in FIGS. 1 to 6.

FIG. 1 is an external view of this embodiment, FIG. 2 is a front view with an upper lid removed, and FIG. 3 is a sectional view taken along line III-III in FIG. In these figures, a vertically long box-shaped body 3 is formed from a lower case 1 and an upper case 2.

A first holding member 11 is held inside the body 3 along a longitudinal direction (Y-axis direction) of the body 3 via a pair of mounting bases 4A and 4B fixed to the lower case 1. . A first scale 12 is attached to the first holding member 11 along the surface longitudinal direction, and a first jaw 13 is fixed to one end of the first holding member 11 by a screw (not shown). First
A part of the jaw 13 is protruded to the outside from the slits 5A and 5B formed on the upper end surface and one side surface of the body 3.

Further, in the body 3, a first displacement detection unit 14 is slidably fitted to the first holding member 11. The first displacement detection unit 14 includes a connecting member 2
A second displacement detection unit 22 slidably fitted in the longitudinal direction of the first holding member 11 via 1 is integrally attached. Therefore, the first displacement detection unit 1
When 4 is moved, the second displacement detection unit 22 is also moved in the Y-axis direction together with the first displacement detection unit 14.

A second holding member 23 is slidably inserted into the second displacement detection unit 22 in a direction (X-axis direction) orthogonal to the displacement direction of the first displacement detection unit 14. . A second scale 24 is attached to the second holding member 23 along the longitudinal direction of the surface thereof, and a second jaw 25 is attached to the end portion of the body 3 protruding from the slit 5B.
Are projectingly provided in the Y-axis direction and facing the first jaw 13. Therefore, the second jaw 25 is provided so as to be displaceable in the biaxial directions orthogonal to each other, that is, the Y and X axis directions.

Here, the first scale 12 and the first displacement detection unit 14 are for detecting and displaying a relative displacement amount of the second jaw 25 with respect to the first jaw 13 in the Y-axis direction. 1 displacement detector 15 is configured. Therefore, the first displacement detection unit 14 includes a first detector (not shown) that detects the displacement of the first displacement detection unit 14 with respect to the first scale 12 as a cyclic capacitance change. Output from a first measurement circuit (not shown) and a first measurement circuit for obtaining a displacement amount of the first displacement detection unit 14 with respect to the first scale 12 by subjecting a signal from the first detector to predetermined arithmetic processing. First display devices 16 for digitally displaying are respectively provided.

Further, the second scale 24 and the second displacement detection unit 22 are the second for detecting and displaying the relative displacement amount of the second jaw 25 in the X-axis direction with respect to the first jaw 13. The displacement detector 26 of FIG. Therefore, similarly to the first displacement detection unit 14, the second displacement detection unit 22 also includes the second displacement detection unit 2
A second detector (not shown) that detects the displacement of the second scale 24 with respect to 2 as a cyclic capacitance change, and performs a predetermined arithmetic processing on the signal from this second detector to detect the second displacement. Second scale 2 for unit 22
A second measuring circuit (not shown) for determining the displacement amount of No. 4 and a second indicator 27 for digitally displaying the output from the second measuring circuit are provided.

On the other hand, in the first jaw 13 and the second jaw 25,
For example, in order to measure the step h and the gap d of the DUT 100 as shown in FIG.
3A and 25A and gap measuring surfaces 13B and 25B are formed, respectively. Each of the step measurement surfaces 13A and 25A is formed in a flat surface shape that is orthogonal to either one of the biaxial directions in which the second jaw 25 is displaced, here the Y axis direction. The gap measuring surfaces 13B and 25B are arranged on the outer surface side of the projecting pieces 13C and 25C that project at right angles from the inner ends of the step measuring surfaces 13A and 25A, respectively, and the other axial direction of the two axial directions, here, X. It is formed in a flat surface shape orthogonal to the axial direction.

Further, the second jaw 25 has the step measuring surface 25A formed by the tension coil spring 31 as the biasing means shown in FIG.
Of the jaw 13 toward and away from the step measurement surface 13A of the body 13 and by the tension coil spring 32 as the biasing means shown in FIG.
5B is urged in a direction in which it separates from the gap measuring surface 13B of the first jaw 13, respectively.

That is, the tension coil spring 31 is, as shown in FIG.
One end thereof is connected to the first displacement detection unit 14 via a pin 33, and the other end is connected to the first holding member 11 via a pin 34.
Are locked to each. In addition, the tension coil spring 32
As shown in FIG. 5, one end is connected to the second holding member 23 via the pin 35 and the other end is connected to the second holding member 23 via the pin 36.
Are locked to the displacement detection units 22 of FIG.
Therefore, the second jaw 25 is biased upward in FIG. 2 by the tension coil spring 31 and rightward in FIG. 2 by the tension coil spring 32.

Further, at the end of the second holding member 23 to which the second jaw 25 is attached, a concave portion 41 for hanging a finger is formed in an arc shape. Therefore, when the finger is put on the concave portion 41 and pressed, the second jaw 25 is moved to the tension coil springs 31, 3 respectively.
It is possible to simultaneously displace in the Y and X axis directions against 2. In FIGS. 3 to 5, 42 and 43 are second
The first and second lock knobs respectively restrict the displacement of the jaw 25 in the Y and X axis directions. The first lock knob 42 penetrates an elongated hole (not shown) formed along the Y-axis direction on the back surface side of the body 3 and is screwed into the first displacement detection unit 14 to form the first lock knob 42. The holding member 11 can be contacted. The second lock knob 43 passes through a hole (not shown) formed along the X-axis direction on the back surface side of the body 3 and is screwed to the second displacement detection unit 22.
The second holding member 23 can be contacted.

Reference numeral 51 denotes a hold data key attached to the side surface of the body 3 from which the second jaw 25 projects. hold·
By pressing the data key 51, the display values of the indicators 16 and 27 of the first and second displacement detection units 14 and 22 can be held, and the signals from the first and second measuring circuits can be connected. It can be output to an external storage means (not shown) via 52, 52.

Next, the operation of this embodiment will be described.

First, as shown by the chain line in FIG. 1, the body 3 is held with one hand, and the thumb is hooked in the recess 41 to move the second jaw 25 in the Y and X axis directions and in each tension coil spring 31. ，
It is displaced in the direction against 32, that is, leftward and downward in FIG.

In this state, the first and second jaws 13 and 25 are inserted into the measurement site of the object to be measured 100, and first, the step measuring surface 13A and the gap measuring surface 13B of the first jaw 13 are connected to the object to be measured 100. The step h and the gap d are brought into contact with one side.

Here, the pressure of the thumb is gradually weakened so that the second jaw 25 is returned and displaced by the urging force of the tension coil springs 31 and 32, and the step measuring surface 25A and the gap measuring surface 25B of the second jaw 25 are covered. The measurement object 100 is brought into contact with the other side of the step h and the gap d (see FIG. 6).

Then, the distance between the pair of step measurement surfaces 13A and 25A, that is, the dimension of the step h of the DUT 100 is determined by the first scale 1
It is detected as the displacement amount of the first displacement detection unit 15 with respect to 2, and is digitally displayed on the first display 16. At the same time, the distance between the pair of gap measuring surfaces 13B and 25B, that is, the dimension of the gap d of the DUT 100 is detected as the amount of displacement of the second scale 24 with respect to the second displacement detection unit 22, and the second indicator is displayed. Digitally displayed on 27. That is, the dimensions of the step h and the gap d of the DUT 100 are simultaneously detected.

Here, when the thumb is removed from the recess 41 and the hold / data key 51 is pressed, the first and second displacement detection units 1
The display values displayed on the display units 16 and 27 of 4, 22 are held. Therefore, after the thumb is again hung on the recess 41 to displace the second jaw 25 in the direction approaching the first jaw 13, the body 3 is taken out of the DUT 100, and the indicators 16 and 27 are the most visible. The display on the display devices 16 and 27 can be read in the posture. That is, the display value can be easily read regardless of the measurement posture.

Therefore, according to this embodiment, the second jaw 25 is provided so as to be displaceable in the Y and X axis directions orthogonal to each other with respect to the first jaw 13, and the displacement of the second jaw 25 in each axial direction is performed. Displacement detectors 15 and 26 for detecting the amount are provided, and the step measuring surface 1 is attached to the first jaw 13 and the second jaw 25.
Since 3A, 25A and the clearance measuring surfaces 13B, 25B are formed, the step measuring surface 13 of each jaw 13, 25 is formed.
A, 25A on the step of the object to be measured 100, the gap measuring surface 13
If B and 25B are respectively brought into contact with the gap of the object to be measured 100, the dimension of the step and the gap of the object to be measured 100 can be measured at the same time. Therefore, the measurement work can be performed efficiently.

In addition, the first jaw 13 is fixed and the second jaw 25 is fixed.
Since it can be displaced in the Y and X axis directions, the first jaw 1
3 as the reference for measuring the step and the gap, the second jaw 25
Only one needs to be displaced. That is, first the first jaw 13 side is brought into contact with one side of the step and the gap, and then the second jaw 25 side is displaced and brought into contact with the other side of the step and the gap. Can be performed simply, quickly and surely.

In addition, the second jaw 25 is moved by the tension coil springs 31 and 32 in the Y and X axis directions and from the first jaw 13 to the body 3.
The second jaw 25 is pressed to displace it against the biasing forces of the tension coil springs 31 and 32 in the measurement, because the second jaw 25 is biased in the direction in which it projects away from the jaws. When the pressing force on the second jaw 25 is gradually weakened after the positions of 13 and 25 at the measurement site, the tension coil springs 31 and 32 return the second jaw 25 to contact the object to be measured. . Therefore, since it can be operated with one hand, it is easy to handle.

If the hold / data key 51 is pressed in the state where the first jaw 13 and the second jaw 25 are in contact with the step and the gap of the object to be measured, the display values displayed on the respective display units 16 and 27 are displayed. Is held, it is possible to easily read the display on each of the display devices 16 and 27 regardless of the measurement posture.

In the above embodiment, the displacement amounts of the second jaw 25 in the Y and X axis directions are detected by the capacitance type displacement detectors 15 and 26, but the displacement amounts in the respective axial directions are detected. The means is not limited to this. For example, an optical displacement detector or a magnetic displacement detector may be used.

Further, in the above embodiment, the gap measuring surfaces 13B and 25B are provided on the step measuring surfaces 13A and 25A, respectively, on the displacement direction of the first and second displacement detecting units 14 and 22, that is, on the flat surface orthogonal to the Y-axis direction. Although they are respectively formed on the flat surfaces orthogonal to the X-axis direction, they may be formed as shown in FIG. 7, for example. That is, the step measurement surfaces 13A and 25A orthogonal to the X-axis direction and the gap measurement surfaces 134B and 25B orthogonal to the Y-axis direction are formed on each of the first jaw 13 and the second jaw 25. You may do it.

Further, the biasing means is not limited to the tension coil springs 31 and 32 described in the above embodiment, but may be, for example, a compression coil spring.

[Advantage of Device] As described above, according to the present invention, the step and the gap of the object to be measured can be measured at the same time, so that the measurement work can be performed efficiently. Further, since only the second jaw can be displaced in the biaxial directions and the second jaw is biased in the direction separating from the first jaw, one-handed operation is possible,
The measurement work is also extremely simple.

[Brief description of drawings]

1 to 6 show an embodiment of the present invention.
The figure is a perspective view showing the external appearance, FIG. 2 is a front view with the upper case removed, FIG. 3 is a sectional view taken along line III-III in FIG. 2, and FIG. 4 is line IV-IV in FIG. Sectional view, Fig. 5 is V-V in Fig. 2.
FIG. 6 is a sectional view taken along the line, showing the measurement state. FIG. 7 is a view showing another embodiment of the present invention, and FIG. 8 is a perspective view showing an example of an object to be measured. 3 ... Instrument, 13 ... 1st jaw, 13A ... Level difference measuring surface, 13B ... Gap measuring surface, 15 ... 1st displacement detector, 25 ... 2nd jaw, 25A ... Step measuring surface, 25B ... Gap measuring Surface, 26 ... Second displacement detector, 31, 32 ... Tensile coil spring (biasing means).

Claims (1)

[Scope of utility model registration request] 1. A body is provided with a first jaw, and
A second jaw is provided so as to be displaceable in two axial directions orthogonal to each other with respect to the first jaw, and a displacement detector is provided for detecting an axial displacement amount of the second jaw with respect to the first jaw, A step measuring surface that is perpendicular to the first jaw and the second jaw with respect to one of the two axial directions;
A gap measuring surface that projects at a right angle from the step measuring surface and is orthogonal to the axial direction of the other one is formed, and the step measuring surface of the second jaw is different from the step measuring surface of the first jaw. Urges the second jaw in each of the axial directions in a direction projecting from and away from the body and in a direction separating the gap measuring surface of the second jaw from the gap measuring surface of the first jaw. A dimension measuring instrument comprising: