JPH0613615B2 - Plastic surface modification method - Google Patents
Plastic surface modification methodInfo
- Publication number
- JPH0613615B2 JPH0613615B2 JP61235738A JP23573886A JPH0613615B2 JP H0613615 B2 JPH0613615 B2 JP H0613615B2 JP 61235738 A JP61235738 A JP 61235738A JP 23573886 A JP23573886 A JP 23573886A JP H0613615 B2 JPH0613615 B2 JP H0613615B2
- Authority
- JP
- Japan
- Prior art keywords
- plastic surface
- treatment
- plastic
- corona
- fluorine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004033 plastic Substances 0.000 title claims description 33
- 229920003023 plastic Polymers 0.000 title claims description 33
- 238000002715 modification method Methods 0.000 title description 6
- 208000028659 discharge Diseases 0.000 claims description 15
- 238000011282 treatment Methods 0.000 claims description 15
- 238000003851 corona treatment Methods 0.000 claims description 14
- 239000007789 gas Substances 0.000 claims description 14
- 150000001875 compounds Chemical class 0.000 claims description 11
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 10
- 229910052731 fluorine Inorganic materials 0.000 claims description 10
- 239000011737 fluorine Substances 0.000 claims description 10
- 239000011261 inert gas Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- -1 polyethylene Polymers 0.000 description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 231100000053 low toxicity Toxicity 0.000 description 3
- 238000009832 plasma treatment Methods 0.000 description 3
- 239000004698 Polyethylene Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 125000001153 fluoro group Chemical group F* 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000005012 migration Effects 0.000 description 2
- 238000013508 migration Methods 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000009972 noncorrosive effect Effects 0.000 description 2
- 229920000620 organic polymer Polymers 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- WFLOTYSKFUPZQB-UHFFFAOYSA-N 1,2-difluoroethene Chemical group FC=CF WFLOTYSKFUPZQB-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000008037 PVC plasticizer Substances 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 208000018459 dissociative disease Diseases 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 238000003682 fluorination reaction Methods 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 238000007306 functionalization reaction Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000005871 repellent Substances 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 150000003464 sulfur compounds Chemical class 0.000 description 1
- 239000004753 textile Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000003440 toxic substance Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
- B05D5/10—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an adhesive surface
Landscapes
- Surface Treatment Of Optical Elements (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明はフッ素化合物あるいは他の種々の気体を用いて
プラスチック表面をコロナ処理するプラスチック表面改
質方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for modifying a plastic surface by corona-treating a plastic surface with a fluorine compound or other various gases.
［従来の技術及び発明が解決しようとする課題］ 従来、含フッ素化合物あるいは他の種々の気体を用い
て、プラスチック表面をプラズマ処理あるいはコロナ処
理することにより、該プラスチック表面をフッ素化ある
いはコーティングし、表面硬度、撥水性、親水性の付
与、接着性の向上あるいは可塑剤の移行防止またはプラ
ズマエッチング等、固体表面のさまざまな機能化が行わ
れている。[Problems to be Solved by the Related Art and Invention] Conventionally, a plastic surface is fluorinated or coated by plasma treatment or corona treatment with a fluorine-containing compound or other various gases. Various functionalizations of solid surfaces have been carried out such as surface hardness, water repellency, hydrophilicity, adhesion improvement, plasticizer migration prevention, and plasma etching.
例えば、特開昭５５−９９９３２号に開示されているよ
うに、ＣＦ4等を用いて有機高分子の表面をプラズマ処
理することにより、該有機高分子の表面に、耐水性、耐
薬品性、耐摩耗性を付与している。特開昭５６−１１８
４３０号ではＣＦ４等を用いて、ＰＶＣの可塑剤の移行
を防止している。特願昭５８−１８０５０３号ではＣＦ
4、Ｃ2Ｆ4等を用いてゴム、プラスチック、金属のガス
透過性、表面硬度の機能を付与している。特開昭５９−
１５９８０６号ではフルオロアルケンおよびフルオロア
ルカンを用いてポリエチレン、ポリアクリレート等に耐
水性、耐溶剤性、表面硬度を付与している。特開昭６０
−９０２２５号では、少量のメチルエチルケトンとＳＦ
6等を用いてコロナ処理を行い、ポリエステル、ポリエ
チレン、ポリアミド等の表面の不動態化を行っている。For example, as disclosed in JP-A-55-99932, by plasma-treating the surface of an organic polymer using CF 4 or the like, the surface of the organic polymer is treated to have water resistance, chemical resistance, Wear resistance is provided. JP-A-56-118
No. 430 uses CF 4 or the like to prevent migration of PVC plasticizer. CF in Japanese Patent Application No. 58-180503
4 , C 2 F 4 etc. are used to impart gas permeability and surface hardness to rubber, plastic and metal. JP-A-59-
In No. 159806, fluoroalkene and fluoroalkane are used to impart water resistance, solvent resistance and surface hardness to polyethylene, polyacrylate and the like. JP-A-60
-90225, a small amount of methyl ethyl ketone and SF
Corona treatment is performed using 6 etc. to passivate the surface of polyester, polyethylene, polyamide, etc.
一般的には含フッ素化合物のプラズマを用いた場合は、
プラズマ中に生じたフッ素原子が処理すべきプラスチッ
ク表面の結合手と非選択的にフッ化反応を行なうため、
プラスチック表面はフッ素原子で覆おわれ、処理後の該
プラスチック表面エネルギーは瞬時にポリテトラフルオ
ロエチレン（テフロン）と同様に極端に低下する。Generally, when plasma of a fluorine-containing compound is used,
Since the fluorine atoms generated in the plasma non-selectively fluorinate with the bonds on the plastic surface to be treated,
The surface of the plastic is covered with fluorine atoms, and the surface energy of the plastic after the treatment is instantly extremely reduced like polytetrafluoroethylene (Teflon).
更にこれらのプラズマ処理は通常１０Torr以下の真空雰
囲気中で行なわねばならず、工業的に実施する場合、大
型の真空装置を必要とし、設備費及びランニングコスト
は多大なものであった。特開昭60−90225号では、フッ
化炭素、ジフロロエチレン等の炭素含有モノマを用い、
大気圧に近い圧力でプラスチック等の表面にコロナ処理
を行ない表面の不動態化を行なっているが、この処理で
はプラスチック等の表面に不動態化した薄膜が積層され
るため、プラスチック等との接着が強くないなど実用上
の問題があり、更にモノマー活性化の際に生ずる有毒物
質の処理も必要であった。Further, these plasma treatments usually have to be carried out in a vacuum atmosphere of 10 Torr or less, and when industrially carried out, a large vacuum device is required, and the equipment cost and running cost are enormous. In JP-A-60-90225, a carbon-containing monomer such as fluorocarbon or difluoroethylene is used.
Corona treatment is applied to the surface of plastics, etc. at a pressure close to atmospheric pressure to passivate the surface. In this treatment, a passivated thin film is laminated on the surface of plastics, etc. There was a problem in practical use, such as not being strong, and it was also necessary to treat toxic substances generated when the monomer was activated.
［目的］ 本発明はこのような従来の難点に鑑みなされたもので、
プラスチック表面の表面エネルギーを任意に制御するこ
とのできるプラスチック表面改質方法を提供せんとする
ものである。[Purpose] The present invention has been made in view of such conventional problems,
An object of the present invention is to provide a plastic surface modification method capable of arbitrarily controlling the surface energy of the plastic surface.
［課題を解決するための手段］ このような目的を達成するため本発明者等は、プラスチ
ック表面を含フッ素化合物を用いて、コロナ処理を行
い、プラスチック表面の表面エネルギーを制御する方法
について鋭意研究を行った結果、プラスチック表面に疎
水性を与える含フッ素化合物と窒素、アルゴン、ヘリウ
ムあるいはネオン等の不活性ガスを混合した混合ガスを
用いてプラスチック表面のコロナ処理を行うと、大気圧
下でも非処理面のフッ素化反応によりプラスチック表面
の表面エネルギーが低下することを見出し、本発明を完
成させた。[Means for Solving the Problems] In order to achieve such an object, the inventors of the present invention have earnestly studied a method of controlling the surface energy of the plastic surface by performing corona treatment on the plastic surface using a fluorine-containing compound. As a result, when the corona treatment of the plastic surface was performed using a mixed gas in which a fluorine-containing compound that imparts hydrophobicity to the plastic surface and an inert gas such as nitrogen, argon, helium, or neon were mixed, even under atmospheric pressure, We have found that the surface energy of the plastic surface decreases due to the fluorination reaction of the treated surface, and completed the present invention.
即ち、本発明のプラスチック表面改質方法は、コロナ処
理によりプラスチック表面に疎水性を付与する含フッ素
化合物と、コロナ処理により前記プラスチック表面に親
水性を付与するガスとを混合した混合ガスを用いて、プ
ラスチック表面を大気圧でコロナ処理（無声放電処理）
して、プラスチック表面の表面エネルギーを低下させる
ものである。That is, the plastic surface modification method of the present invention uses a mixed gas obtained by mixing a fluorine-containing compound that imparts hydrophobicity to the plastic surface by corona treatment and a gas that imparts hydrophilicity to the plastic surface by corona treatment. Corona treatment of plastic surface at atmospheric pressure (silent discharge treatment)
Then, the surface energy of the plastic surface is lowered.
本発明に用いられる含フッ素化合物は常温あるいはプラ
ズマ処理（コロナ処理）時の温度でガス状であればいず
れも使用出きる。好ましくは、低毒性、不燃性である飽
和フッ化炭素化合物あるいは飽和フッ化イオウ化合物
で、常温で気体あるいは放電処理時の温度で気体化する
物を使用する。このような化合物として例えば、低毒性
且つ不燃性であるＣＦ4、Ｃ2Ｆ6等、また不燃性且つ非
腐食性であるＳＦ6、ＮＦ3等が挙げられる。The fluorine-containing compound used in the present invention can be used as long as it is in a gaseous state at room temperature or at the temperature of plasma treatment (corona treatment). It is preferable to use a saturated fluorocarbon compound or a saturated sulfur fluoride compound which has low toxicity and is nonflammable and which is gasified at room temperature or gasified at the temperature during discharge treatment. Examples of such compounds include CF 4 , C 2 F 6 and the like, which have low toxicity and nonflammability, and SF 6 and NF 3 , which are nonflammable and noncorrosive.
また、不活性ガスとしては、ヘリウム、アルゴン、窒素
等またはそれらの混合物が望ましい。As the inert gas, helium, argon, nitrogen or the like or a mixture thereof is desirable.
また、本発明により処理できるプラスチックの形状は繊
維状、板状、シート状、ブロック状等のいかなる形状の
ものであっても差し支えない。The shape of the plastic that can be treated by the present invention may be any shape such as fibrous shape, plate shape, sheet shape, block shape and the like.
コロナ処理は先端極部放電であり、フッ化化合物の解離
反応が充分行なえる密度であれば低周波放電、高周波放
電のいずれでもよい。The corona treatment is a tip pole part discharge, and may be a low frequency discharge or a high frequency discharge as long as the dissociation reaction of the fluorinated compound is sufficient.
［実施例］ 以下実施例を挙げて本発明を更に説明するが、本発明は
これらの実施例に限定されるものではない。[Examples] The present invention will be further described with reference to examples, but the present invention is not limited to these examples.
実施例１ 基材として、市販の厚さ１００μのポリエチレンテレフ
タレートフィルムを放電雰囲気として、ＳＦ4を２．６
５容量％を含むＨｅ（ヘリウム）混合ガスを、コロナ放
電装置として第１図に示した低周波による低温プラズマ
放電装置を用いて、大気圧にて処理周波数２９００Ｈ
ｚ、処理電流８ｍＡの条件で放電処理を行なった。第１
図に示したコロナ放電装置は、コロナ放電発生系１、ガ
ラス容器２、含フッ素化合物用のガス供給路３、不活性
ガス用のガス供給路４、混合ガス供給路５及びガス排出
路６より基本的に構成され、ガラス容器２内には電極７
及び電極７’が所定間隔を保って配置され、下方の電極
７’に被処理物８であるポリエチレンテレフタレートフ
ィルムをセットした。Example 1 As a base material, a commercially available polyethylene terephthalate film having a thickness of 100 μ was used as a discharge atmosphere and SF 4 was set to 2.6.
A He (helium) mixed gas containing 5% by volume was used as a corona discharge device using the low-frequency low-temperature plasma discharge device shown in FIG.
The discharge treatment was performed under the conditions of z and treatment current of 8 mA. First
The corona discharge device shown in the figure includes a corona discharge generation system 1, a glass container 2, a gas supply passage 3 for a fluorine-containing compound, a gas supply passage 4 for an inert gas, a mixed gas supply passage 5 and a gas discharge passage 6. Basically configured, the electrode 7 in the glass container 2
The electrodes 7'and 7'are arranged at a predetermined interval, and a polyethylene terephthalate film, which is the object to be treated 8, is set on the lower electrode 7 '.
放電処理後、ポリエチレンテレフタレート表面の水滴に
よる接触角を測定し、更に、表面をダイキンソルベント
（ダイキン工業（株）製）で洗浄した後、再び接触角の
測定を行なった。After the discharge treatment, the contact angle of water drops on the surface of polyethylene terephthalate was measured, and after further cleaning the surface with Daikin Solvent (manufactured by Daikin Industries, Ltd.), the contact angle was measured again.
第２図は放電処理時間と接触角の変化を示した。約７０
゜のポリエチレンテレフタレート表面接触角は、１分以
上の処理時間で１００゜を超え、洗浄後も９０゜以上の
値を示し水滴をよくはじく表面に変化していた。FIG. 2 shows the changes in the discharge treatment time and the contact angle. About 70
The contact angle of polyethylene terephthalate on the surface of 100 ° was over 100 ° for a treatment time of 1 minute or longer, and after washing, the contact angle was 90 ° or higher, and the surface was changed to repel water drops well.
実施例２ 基材として、厚さ１２５μのポリイミドフィルムを用
い、実施例８と同様の処理装置、処理条件にて２分間放
電処理を行なった。Example 2 A polyimide film having a thickness of 125 μm was used as a base material, and discharge treatment was performed for 2 minutes under the same processing apparatus and processing conditions as in Example 8.
ポリイミドフィルムの表面接触角は、未処理時の６５゜
〜７０゜から、処理直後には９４゜、洗浄後には９８゜
と水滴をよくはじく表面に変化していた。The surface contact angle of the polyimide film was changed from 65 ° to 70 ° before treatment to 94 ° immediately after the treatment and 98 ° after the washing, which was a surface that repels water droplets well.
［発明の効果］ 以上の実施例からも明らかなように本発明のプラスチッ
ク表面改質方法によれば、大気圧下でコロナ処理（無声
放電処理）することによりプラスチック表面をフッ素反
応により表面エネルギーを低下させることができるの
で、従来のプラスチック表面改質方法のように大型の真
空機器を用いることなしにプラスチック面を撥水性に変
えることができ産業上極めて有効である。[Effects of the Invention] As apparent from the above examples, according to the plastic surface modification method of the present invention, the surface energy of the plastic surface is reduced by the fluorine reaction by corona treatment (silent discharge treatment) under atmospheric pressure. Since it can be lowered, the plastic surface can be made water-repellent without using a large-sized vacuum device unlike the conventional plastic surface modification method, which is extremely industrially effective.
また、使用する含フッ化合物は、低毒性、不燃性を有す
る飽和フッ変炭素化合物あるいは不燃性、非腐食性を有
するフッ化イオウ化合物を用いれば、爆発等の危険性が
少なく、更には、既存のコロナ処理装置を用いて単純な
方法でプラスチック表面の改質が行える。Moreover, if the fluorine-containing compound used is a low-toxicity, non-combustible saturated fluorocarbon compound or a non-combustible, non-corrosive fluorinated sulfur compound, there is less risk of explosion, etc. The surface of the plastic can be modified by a simple method using the corona treatment device.
第１図は、本発明のプラスチック表面改質方法に用いら
れるコロナ処理装置の概略図、第２図は実施例１におけ
る処理時間を基材表面の水滴接触角の関係を示すグラフ
である。 １……コロナ放電発生系 ２……ガラス容器 ３、４……ガス供給路 ５……混合ガス供給路 ６……排気路 ７、７’……電極 ８……被処理物FIG. 1 is a schematic view of a corona treatment device used in the plastic surface modification method of the present invention, and FIG. 2 is a graph showing the relation between the treatment time and the water droplet contact angle on the substrate surface in Example 1. 1 ... Corona discharge generating system 2 ... Glass container 3, 4 ... Gas supply path 5 ... Mixed gas supply path 6 ... Exhaust path 7, 7 '... Electrode 8 ... Workpiece
フロントページの続き (72)発明者 岡崎 幸子 東京都杉並区高井戸東２−20−11 (56)参考文献 特開 昭56−118430（ＪＰ，Ａ) 「繊維学会 昭和59年度年次大会研究発 表会 講演要旨集」 社団法人繊維学会 昭和59年４月20日 発表番号３Ｈ03Front Page Continuation (72) Inventor Sachiko Okazaki 2-20-11, Takaido Higashi, Suginami-ku, Tokyo (56) Reference JP-A-56-118430 (JP, A) Conference Abstracts ”Textile Society of Japan April 20, 1984, Presentation Number 3H03
Claims (1)
性を付与する含フッ素化合物と、不活性ガスとを混合し
た混合ガスを用いて、プラスチック表面を大気圧でコロ
ナ処理（無声放電処理）して、前記プラスチック表面の
表面エネルギーを低下させることを特徴とするプラスチ
ック表面改質方法。1. A plastic surface is corona-treated (silent discharge treatment) at atmospheric pressure using a mixed gas in which a fluorine-containing compound that imparts hydrophobicity to the plastic surface by corona treatment and an inert gas are mixed, A method for modifying a plastic surface, which comprises reducing the surface energy of the plastic surface.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60-277652 | 1985-12-09 | ||
| JP27765285 | 1985-12-09 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3154946A Division JP2542750B2 (en) | 1985-12-09 | 1991-06-26 | Surface energy control method for plastics |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62235339A JPS62235339A (en) | 1987-10-15 |
| JPH0613615B2 true JPH0613615B2 (en) | 1994-02-23 |
Family
ID=17586408
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61235738A Expired - Lifetime JPH0613615B2 (en) | 1985-12-09 | 1986-10-02 | Plastic surface modification method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0613615B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998014506A1 (en) * | 1996-10-01 | 1998-04-09 | Matsushita Electric Industrial Co., Ltd. | Plastic substrate and method of manufacturing the same, and ink jet printer head and method of manufacturing the same |
| US7109108B2 (en) | 1992-10-09 | 2006-09-19 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device having metal silicide |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6335632A (en) * | 1986-07-30 | 1988-02-16 | Kuraray Co Ltd | Sheet-like fluorinated polymer structure and its production |
| US5318806A (en) * | 1992-10-02 | 1994-06-07 | Becton, Dickinson And Company | Tube having regions of different surface chemistry and method therefor |
| US5403453A (en) * | 1993-05-28 | 1995-04-04 | The University Of Tennessee Research Corporation | Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure |
| US5669583A (en) * | 1994-06-06 | 1997-09-23 | University Of Tennessee Research Corporation | Method and apparatus for covering bodies with a uniform glow discharge plasma and applications thereof |
| US5414324A (en) * | 1993-05-28 | 1995-05-09 | The University Of Tennessee Research Corporation | One atmosphere, uniform glow discharge plasma |
| JP2626559B2 (en) * | 1994-06-13 | 1997-07-02 | 日本電気株式会社 | Method for producing fluorine-containing polyimide |
| JP3663961B2 (en) * | 1999-03-15 | 2005-06-22 | セイコーエプソン株式会社 | Lens manufacturing equipment |
| WO2003100156A1 (en) * | 2002-05-23 | 2003-12-04 | Universita' Degli Studi Di Milano-Bicocca | Method for processing materials with plasma |
| JP5453591B2 (en) * | 2009-01-27 | 2014-03-26 | 国立大学法人 香川大学 | Water and oil repellent antifouling member, method for producing the same, and article using the same |
| US20140272440A1 (en) * | 2013-03-15 | 2014-09-18 | Illinois Tool Works Inc. | Transfer Foils Utilizing Plasma Treatment to Replace the Release Layer |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56118430A (en) * | 1980-02-26 | 1981-09-17 | Toray Ind Inc | Vinyl chloride resin molded article in which surface is modified |
-
1986
- 1986-10-02 JP JP61235738A patent/JPH0613615B2/en not_active Expired - Lifetime
Non-Patent Citations (1)
| Title |
|---|
| 「繊維学会昭和５９年度年次大会研究発表会講演要旨集」社団法人繊維学会昭和５９年４月２０日発表番号３Ｈ０３ |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7109108B2 (en) | 1992-10-09 | 2006-09-19 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device having metal silicide |
| US7602020B2 (en) | 1992-10-09 | 2009-10-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for forming the same |
| WO1998014506A1 (en) * | 1996-10-01 | 1998-04-09 | Matsushita Electric Industrial Co., Ltd. | Plastic substrate and method of manufacturing the same, and ink jet printer head and method of manufacturing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62235339A (en) | 1987-10-15 |
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