JPH06132709A - Waveguide/strip line converter - Google Patents
Waveguide/strip line converterInfo
- Publication number
- JPH06132709A JPH06132709A JP28129092A JP28129092A JPH06132709A JP H06132709 A JPH06132709 A JP H06132709A JP 28129092 A JP28129092 A JP 28129092A JP 28129092 A JP28129092 A JP 28129092A JP H06132709 A JPH06132709 A JP H06132709A
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- probe
- strip
- strip line
- line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims abstract description 45
- 239000000758 substrate Substances 0.000 claims abstract description 9
- 239000004020 conductor Substances 0.000 claims abstract description 6
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
Landscapes
- Waveguide Switches, Polarizers, And Phase Shifters (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、マイクロ波回路に用い
られる導波管回路及びマイクロストリップ線路間の変換
器に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a waveguide circuit used in a microwave circuit and a converter between microstrip lines.
【0002】[0002]
【従来の技術】従来の導波管/ストリップ線路変換器に
おいては、図4に示すように、一端に電磁波導入用の開
口6を設け、他端に終端面3を設けた方形導波管1に対
して、方形導波管1の上部側面から垂直にプローブ16
を内部に挿入し、方形導波管1の上部に設けた誘電体板
15の表面に設けられたストリップ線路18とプローブ
16との間を同軸線路17を介して接続し、方形導波管
1内に導入された電磁波をプローブ16に結合させて、
同プローブ16で電気信号に変換して同軸線路17を介
してストリップ線路18に伝え、同ストリップ線路18
で信号処理回路に入力するようにしていた。2. Description of the Related Art In a conventional waveguide / strip line converter, as shown in FIG. 4, a rectangular waveguide 1 having an opening 6 for introducing an electromagnetic wave at one end and a terminating surface 3 at the other end is provided. , The probe 16 is perpendicular to the upper side surface of the rectangular waveguide 1.
Is inserted inside, and the strip line 18 provided on the surface of the dielectric plate 15 provided on the upper portion of the rectangular waveguide 1 and the probe 16 are connected via the coaxial line 17, and the rectangular waveguide 1 By coupling the electromagnetic waves introduced into the probe 16,
The probe 16 converts the signal into an electric signal and transmits it to the strip line 18 via the coaxial line 17.
So that it was input to the signal processing circuit.
【0003】[0003]
【発明が解決しようとする課題】従って、プローブ16
とストリップ線路18の間を同軸線路17を介在させて
接続しているため、プローブ16とプローブ16を取り
付けている方形導波管1内の取付状態によって構成され
るインピーダンスと同軸線路17とのインピーダンスと
の不整合、及び同軸線路17とストリップ線路18間の
インピーダンスの不整合等により接続部で反射が起こ
り、信号の伝送損失が発生するといった問題点があり、
また、プローブ16に結合させることができる電磁波の
周波数帯域が狭いといった問題点があった。本発明は、
ストリップ線路の信号導体を延長して略帯び状に形成し
てプローブとし、同プローブに直接電磁波を結合させる
ことにより、同軸線路を削除してコストの低減を図ると
共に、同軸線路の接続部で発生する反射等による損失を
排除し、導波管/ストリップ線路変換器を広帯域化する
ことを目的とする。Accordingly, the probe 16
Since the coaxial line 17 is interposed between the strip line 18 and the strip line 18, the impedance formed by the mounting state of the probe 16 and the rectangular waveguide 1 in which the probe 16 is mounted and the impedance of the coaxial line 17 are connected. There is a problem that reflection occurs at the connection portion due to mismatching between the coaxial line 17 and the strip line 18, and a signal transmission loss occurs.
Further, there is a problem that the frequency band of the electromagnetic wave that can be coupled to the probe 16 is narrow. The present invention is
The signal conductor of the strip line is extended to form a substantially band shape to form a probe, and the electromagnetic wave is directly coupled to the probe to eliminate the coaxial line and reduce costs, and at the connection part of the coaxial line. The purpose of the present invention is to eliminate the loss caused by such reflections and to broaden the band of the waveguide / strip line converter.
【0004】[0004]
【課題を解決するための手段】図1に示すように、一端
に電磁波導入用の開口6を設け、他端に終端面3を設け
た導波管(同図においては、方形導波管1)と、方形導
波管1の側面に垂直に配置した誘電体基板2と、同誘電
体基板2に形成したマイクロストリップ線路5とからな
り、同マイクロストリップ線路5の信号導体を延長して
略帯び状に形成して方形導波管1内に突出させ帯び状プ
ローブ4とし、同帯び状プローブ4の幅方向を方形導波
管1の管軸(中心軸)方向に合わせ、同帯び状プローブ
4の長手方向の向きが方形導波管1の管軸(中心軸)に
向かうように配置したものである。As shown in FIG. 1, a waveguide having an opening 6 for introducing an electromagnetic wave at one end and a terminating surface 3 at the other end (in the figure, a rectangular waveguide 1 ) And a dielectric substrate 2 arranged perpendicularly to the side surface of the rectangular waveguide 1 and a microstrip line 5 formed on the dielectric substrate 2, and a signal conductor of the microstrip line 5 is extended to be substantially formed. The band-shaped probe 4 is formed into a band-like shape and protrudes into the rectangular waveguide 1 to form a band-shaped probe 4, and the width direction of the band-shaped probe 4 is aligned with the tube axis (center axis) direction of the rectangular waveguide 1. The longitudinal direction of 4 is arranged so as to face the tube axis (center axis) of the rectangular waveguide 1.
【0005】[0005]
【作用】本発明は上記した構成により、導波管回路をス
トリップ線路に変換するようにしており、電磁波を結合
させるプローブを帯び状プローブ4として幅を広くして
あり、広くした幅の一端から終端面3迄の距離をlaと
し、他端から終端面3迄の距離をlbとし、la及びl
bの値を、la=λa/4、lb=λb/4とすれば、
同帯び状プローブ4にλa〜λb迄の波長を有する電磁
波を効率的に結合させることができるため、導波管/ス
トリップ線路変換器で変換する電磁波の周波数帯域を広
帯域化することができ、また、マイクロストリップ線路
5の信号導体を延長して略帯び状プローブ4とし、同略
帯び状プローブ4に直接電磁波を結合させるようにして
いるため、従来例のように独立したプローブや、同軸線
路の使用が不要となり、相互の接続部で発生する損失を
排除することができ、コストの低減を図ることができ
る。According to the present invention, the waveguide circuit is converted into a strip line by the above-mentioned structure, and the probe for coupling the electromagnetic wave is widened as the band-shaped probe 4, and the widthwise end is extended from one end. The distance to the end surface 3 is la, the distance from the other end to the end surface 3 is lb, and la and l
If the values of b are la = λa / 4 and lb = λb / 4,
Electromagnetic waves having wavelengths λa to λb can be efficiently coupled to the zigzag probe 4, so that the frequency band of electromagnetic waves converted by the waveguide / strip line converter can be widened, and Since the signal conductor of the microstrip line 5 is extended to form the substantially wavy probe 4 and the electromagnetic wave is directly coupled to the substantially wavy probe 4, the independent probe or the coaxial line like the conventional example is used. It is not necessary to use it, and it is possible to eliminate the loss that occurs in the mutual connection portion, and it is possible to reduce the cost.
【0006】[0006]
【実施例】図1は、本発明の一実施例を示す、導波管/
ストリップ線路変換器の一部切り欠き斜視図であり、図
2は、図1の正面図である。1は方形導波管であり、一
端を導波管接続用のフランジ7とし、他端を方形導波管
1内に導入した電磁波を反射させる終端面3としてお
り、フランジ7面に水平方向を長辺とし、垂直方向を短
辺とした開口6を設けている。2は誘電体基板であり、
同誘電体基板2上にマイクロストリップ線路5を形成し
て、同マイクロストリップ線路5で信号処理回路に信号
を入力できるようにしている。誘電体基板2は導波管1
の上部側面に対して垂直に配置し、マイクロストリップ
線路5の信号導体4を延長して略帯び状に形成して方形
導波管1内に突出させ帯び状プローブ4とし、同帯び状
プローブ4の幅方向を同導波管1の管軸(中心軸)方向
に合わせ、図2に示すように、開口6から見た帯び状プ
ローブ4の取付位置が開口6の管軸(中心軸)を通るよ
うに配置している。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT FIG. 1 shows a waveguide /
FIG. 2 is a partially cutaway perspective view of the stripline converter, and FIG. 2 is a front view of FIG. 1. Reference numeral 1 denotes a rectangular waveguide, one end of which serves as a flange 7 for connecting the waveguide, and the other end of which serves as a terminating surface 3 for reflecting electromagnetic waves introduced into the rectangular waveguide 1. An opening 6 having a long side and a short side in the vertical direction is provided. 2 is a dielectric substrate,
A microstrip line 5 is formed on the dielectric substrate 2 so that the microstrip line 5 can input a signal to a signal processing circuit. The dielectric substrate 2 is the waveguide 1
Of the microstrip line 5 is extended perpendicularly to the upper side surface of the microstrip line 5 to be formed into a substantially zigzag shape so as to project into the rectangular waveguide 1 to form a zigzag probe 4. 2 is aligned with the tube axis (center axis) direction of the same waveguide 1, and as shown in FIG. 2, the attachment position of the band-shaped probe 4 viewed from the opening 6 is the tube axis (center axis) of the opening 6. It is arranged to pass.
【0007】例えば、開口6を介してTE10モードの
電磁波が導波管1に導入されたとする。TE10モード
の電磁波は垂直方向に電界の向きを有する電磁波であ
り、開口6からみた電界分布は中央が強く、周辺部が弱
くなる電界分布となっており、帯び状プローブ4の取付
位置を開口6の中央部に位置するようにしているため、
電磁波を帯び状プローブ4に結合させることができ、ま
た、帯び状プローブ4の取付位置を終端面3から約1/
4波長の位置に配置すれば、帯び状プローブ4に電磁波
を効率良く結合させることができる。帯び状プローブ4
では電磁波を電気信号に変換して、マイクロストリップ
線路5を介して、信号処理回路に電気信号を入力し、信
号処理を行うようにしている。For example, it is assumed that a TE10 mode electromagnetic wave is introduced into the waveguide 1 through the opening 6. The TE10 mode electromagnetic wave has an electric field direction in the vertical direction, and the electric field distribution seen from the opening 6 is such that the central part is strong and the peripheral part is weak, and the attachment position of the band-shaped probe 4 is set to the opening 6. Since it is located in the center of
Electromagnetic waves can be coupled to the zigzag probe 4, and the attachment position of the zigzag probe 4 is about 1 / about from the end surface 3.
If they are arranged at the positions of four wavelengths, electromagnetic waves can be efficiently coupled to the band-shaped probe 4. Belt-shaped probe 4
Then, the electromagnetic wave is converted into an electric signal, and the electric signal is input to the signal processing circuit via the microstrip line 5 to perform signal processing.
【0008】帯び状プローブ4は、幅を広くしてあり、
広くした幅の一端から終端面3迄の距離をlaとし、他
端から終端面3迄の距離をlbとし、la及びlbの値
を、la=λa/4、lb=λb/4とすれば、同帯び
状プローブ4にλa〜λb迄の波長を有する電磁波を効
率的に結合させることができるため、導波管/ストリッ
プ線路変換器で変換する電磁波の周波数帯域を広帯域化
することができる。なお、la及びlbの値は、la=
λa×n/4、lb=λb×n/4とし、nの値を奇数
倍になるように設定しても良い。また、帯び状プローブ
4の幅は、希望する周波数帯域が得られるように選択し
て決定するが、λa/4の値をこえないようにすること
が望ましい。導波管1内への帯び状プローブ4の挿入す
る深さNは、効率良く電磁波を結合させることができる
ように調整して決定する。The band-shaped probe 4 has a wide width,
If the distance from one end of the increased width to the end surface 3 is la, the distance from the other end to the end surface 3 is lb, and the values of la and lb are la = λa / 4, lb = λb / 4. Since electromagnetic waves having wavelengths λa to λb can be efficiently coupled to the same band-shaped probe 4, the frequency band of electromagnetic waves converted by the waveguide / strip line converter can be broadened. The values of la and lb are la =
λa × n / 4 and lb = λb × n / 4 may be set, and the value of n may be set to be an odd multiple. Further, the width of the band-shaped probe 4 is selected and determined so that a desired frequency band can be obtained, but it is desirable that the width does not exceed the value of λa / 4. The insertion depth N of the strip-shaped probe 4 into the waveguide 1 is adjusted and determined so that electromagnetic waves can be efficiently coupled.
【0009】図3は、本発明のその他の実施例を示す、
導波管/ストリップ線路変換器の一部切り欠き斜視図で
あり、図中、図1で示したものと同一のものは同一の記
号で示している。図1に示す実施例との相違点は、方形
導波管1を使用する代わりに、円形導波管8を使用する
ようにした点である。図1の実施例と同様に、円形導波
管8内に突出させた帯び状プローブ4の幅方向を円形導
波管8の中心軸(管軸)方向に合わせ、開口9から見た
帯び状プローブ4の取付位置が開口9の中心を通るよう
に配置し、終端面10からの距離がla及びlbになる
ように、帯び状プローブ4を配置している。FIG. 3 shows another embodiment of the present invention,
FIG. 2 is a partially cutaway perspective view of a waveguide / strip line converter, in which the same components as those shown in FIG. 1 are designated by the same symbols. The difference from the embodiment shown in FIG. 1 is that instead of using the rectangular waveguide 1, a circular waveguide 8 is used. As in the embodiment of FIG. 1, the zigzag probe 4 projecting into the circular waveguide 8 is aligned with the width direction of the central axis (tube axis) of the circular waveguide 8, and the zigzag shape seen from the opening 9. The band-shaped probe 4 is arranged so that the mounting position of the probe 4 passes through the center of the opening 9 and the distances from the terminal surface 10 are la and lb.
【0010】[0010]
【発明の効果】以上説明したように、本発明によれば、
マイクロストリップ線路5の信号導体を延長して略帯び
状プローブ4とし、同略帯び状プローブ4に直接電磁波
を結合させるようにしているため、従来例のように独立
したプローブや、同軸線路の使用が不要となり、接続部
で発生する損失を排除してコストの低減を図ることがで
き、またプローブを帯び状に形成しているため、変換す
る電磁波の周波数帯域を広帯域化することができ、導波
管/ストリップ線路変換器の性能向上に寄与するところ
が大きい。As described above, according to the present invention,
Since the signal conductor of the microstrip line 5 is extended to form the substantially zigzag probe 4 and electromagnetic waves are directly coupled to the approximately zigzag probe 4, the use of an independent probe or a coaxial line as in the conventional example is used. Is unnecessary, the loss generated at the connection part can be eliminated and the cost can be reduced.Because the probe is formed in a band shape, the frequency band of the electromagnetic wave to be converted can be widened, and It greatly contributes to the performance improvement of the wave tube / strip line converter.
【図1】本発明の一実施例を示す、導波管/ストリップ
線路変換器の一部切り欠き斜視図である。FIG. 1 is a partially cutaway perspective view of a waveguide / stripline converter showing an embodiment of the present invention.
【図2】図1の正面図である。FIG. 2 is a front view of FIG.
【図3】本発明のその他の実施例を示す、導波管/スト
リップ線路変換器の一部切り欠き斜視図である。FIG. 3 is a partially cutaway perspective view of a waveguide / stripline converter showing another embodiment of the present invention.
【図4】従来例を示す、導波管/ストリップ線路変換器
の一部切り欠き斜視図である。FIG. 4 is a partially cutaway perspective view of a waveguide / stripline converter showing a conventional example.
1 方形導波管 2 誘電体板 3 終端面 4 帯び状プローブ 5 マイクロストリップ線路 6 開口 7 フランジ 8 円形導波管 9 開口 10 終端面 14 切欠き線 15 誘電体板 16 プローブ 17 同軸線路 18 ストリップ線路 1 Rectangular Waveguide 2 Dielectric Plate 3 End Surface 4 Wavy Probe 5 Microstrip Line 6 Opening 7 Flange 8 Circular Waveguide 9 Opening 10 End Surface 14 Notched Line 15 Dielectric Plate 16 Probe 17 Coaxial Line 18 Stripline
Claims (3)
に終端面を設けた導波管と、同導波管の側面に垂直に配
置した誘電体基板と、同誘電体基板に形成したマイクロ
ストリップ線路とからなり、同マイクロストリップ線路
の信号導体を延長して略帯び状に形成して前記導波管内
に突出させ帯び状プローブとし、同帯び状プローブの幅
方向を同導波管の管軸方向にあわせ、同帯び状プローブ
の長手方向の向きが同導波管の管軸に向かうように配置
したことを特徴とする導波管/ストリップ線路変換器。1. A waveguide having an opening for introducing an electromagnetic wave at one end and a terminating surface at the other end, a dielectric substrate arranged perpendicular to a side surface of the waveguide, and formed on the dielectric substrate. The signal conductor of the microstrip line is extended to form a substantially striped shape and protrudes into the waveguide to form a striped probe. A waveguide / strip line converter characterized in that the longitudinal direction of the same band-shaped probe is arranged so as to face the tube axis of the same waveguide in accordance with the tube axis direction of.
1記載の導波管/ストリップ線路変換器。2. The waveguide / strip line converter according to claim 1, wherein the waveguide is a rectangular waveguide.
1記載の導波管/ストリップ線路変換器。3. A waveguide / stripline converter according to claim 1, wherein said waveguide comprises a circular waveguide.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28129092A JPH06132709A (en) | 1992-10-20 | 1992-10-20 | Waveguide/strip line converter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28129092A JPH06132709A (en) | 1992-10-20 | 1992-10-20 | Waveguide/strip line converter |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH06132709A true JPH06132709A (en) | 1994-05-13 |
Family
ID=17637008
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP28129092A Pending JPH06132709A (en) | 1992-10-20 | 1992-10-20 | Waveguide/strip line converter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH06132709A (en) |
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US7330041B2 (en) | 2004-06-14 | 2008-02-12 | Cascade Microtech, Inc. | Localizing a temperature of a device for testing |
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US7362115B2 (en) | 2003-12-24 | 2008-04-22 | Cascade Microtech, Inc. | Chuck with integrated wafer support |
US7368925B2 (en) | 2002-01-25 | 2008-05-06 | Cascade Microtech, Inc. | Probe station with two platens |
US7368927B2 (en) | 2004-07-07 | 2008-05-06 | Cascade Microtech, Inc. | Probe head having a membrane suspended probe |
US7403025B2 (en) | 2000-02-25 | 2008-07-22 | Cascade Microtech, Inc. | Membrane probing system |
US7403028B2 (en) | 2006-06-12 | 2008-07-22 | Cascade Microtech, Inc. | Test structure and probe for differential signals |
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US7436170B2 (en) | 1997-06-06 | 2008-10-14 | Cascade Microtech, Inc. | Probe station having multiple enclosures |
US7443186B2 (en) | 2006-06-12 | 2008-10-28 | Cascade Microtech, Inc. | On-wafer test structures for differential signals |
US7449899B2 (en) | 2005-06-08 | 2008-11-11 | Cascade Microtech, Inc. | Probe for high frequency signals |
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US7468609B2 (en) | 2003-05-06 | 2008-12-23 | Cascade Microtech, Inc. | Switched suspended conductor and connection |
US7492172B2 (en) | 2003-05-23 | 2009-02-17 | Cascade Microtech, Inc. | Chuck for holding a device under test |
US7492147B2 (en) | 1992-06-11 | 2009-02-17 | Cascade Microtech, Inc. | Wafer probe station having a skirting component |
US7498829B2 (en) | 2003-05-23 | 2009-03-03 | Cascade Microtech, Inc. | Shielded probe for testing a device under test |
US7498828B2 (en) | 2002-11-25 | 2009-03-03 | Cascade Microtech, Inc. | Probe station with low inductance path |
US7504823B2 (en) | 2004-06-07 | 2009-03-17 | Cascade Microtech, Inc. | Thermal optical chuck |
US7504842B2 (en) | 1997-05-28 | 2009-03-17 | Cascade Microtech, Inc. | Probe holder for testing of a test device |
US7533462B2 (en) | 1999-06-04 | 2009-05-19 | Cascade Microtech, Inc. | Method of constructing a membrane probe |
US7541821B2 (en) | 1996-08-08 | 2009-06-02 | Cascade Microtech, Inc. | Membrane probing system with local contact scrub |
US7550984B2 (en) | 2002-11-08 | 2009-06-23 | Cascade Microtech, Inc. | Probe station with low noise characteristics |
US7554322B2 (en) | 2000-09-05 | 2009-06-30 | Cascade Microtech, Inc. | Probe station |
US7609077B2 (en) | 2006-06-09 | 2009-10-27 | Cascade Microtech, Inc. | Differential signal probe with integral balun |
US7616017B2 (en) | 1999-06-30 | 2009-11-10 | Cascade Microtech, Inc. | Probe station thermal chuck with shielding for capacitive current |
US7619419B2 (en) | 2005-06-13 | 2009-11-17 | Cascade Microtech, Inc. | Wideband active-passive differential signal probe |
US7639003B2 (en) | 2002-12-13 | 2009-12-29 | Cascade Microtech, Inc. | Guarded tub enclosure |
US9429638B2 (en) | 2008-11-21 | 2016-08-30 | Cascade Microtech, Inc. | Method of replacing an existing contact of a wafer probing assembly |
-
1992
- 1992-10-20 JP JP28129092A patent/JPH06132709A/en active Pending
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US7348787B2 (en) | 1992-06-11 | 2008-03-25 | Cascade Microtech, Inc. | Wafer probe station having environment control enclosure |
US7595632B2 (en) | 1992-06-11 | 2009-09-29 | Cascade Microtech, Inc. | Wafer probe station having environment control enclosure |
US7589518B2 (en) | 1992-06-11 | 2009-09-15 | Cascade Microtech, Inc. | Wafer probe station having a skirting component |
US7492147B2 (en) | 1992-06-11 | 2009-02-17 | Cascade Microtech, Inc. | Wafer probe station having a skirting component |
US7321233B2 (en) | 1995-04-14 | 2008-01-22 | Cascade Microtech, Inc. | System for evaluating probing networks |
US7541821B2 (en) | 1996-08-08 | 2009-06-02 | Cascade Microtech, Inc. | Membrane probing system with local contact scrub |
US7504842B2 (en) | 1997-05-28 | 2009-03-17 | Cascade Microtech, Inc. | Probe holder for testing of a test device |
US7436170B2 (en) | 1997-06-06 | 2008-10-14 | Cascade Microtech, Inc. | Probe station having multiple enclosures |
US7626379B2 (en) | 1997-06-06 | 2009-12-01 | Cascade Microtech, Inc. | Probe station having multiple enclosures |
US7533462B2 (en) | 1999-06-04 | 2009-05-19 | Cascade Microtech, Inc. | Method of constructing a membrane probe |
US7616017B2 (en) | 1999-06-30 | 2009-11-10 | Cascade Microtech, Inc. | Probe station thermal chuck with shielding for capacitive current |
US7403025B2 (en) | 2000-02-25 | 2008-07-22 | Cascade Microtech, Inc. | Membrane probing system |
US7554322B2 (en) | 2000-09-05 | 2009-06-30 | Cascade Microtech, Inc. | Probe station |
US7423419B2 (en) | 2000-09-05 | 2008-09-09 | Cascade Microtech, Inc. | Chuck for holding a device under test |
US7514915B2 (en) | 2000-09-05 | 2009-04-07 | Cascade Microtech, Inc. | Chuck for holding a device under test |
US7518358B2 (en) | 2000-09-05 | 2009-04-14 | Cascade Microtech, Inc. | Chuck for holding a device under test |
US7352168B2 (en) | 2000-09-05 | 2008-04-01 | Cascade Microtech, Inc. | Chuck for holding a device under test |
US7501810B2 (en) | 2000-09-05 | 2009-03-10 | Cascade Microtech, Inc. | Chuck for holding a device under test |
US7495461B2 (en) | 2000-12-04 | 2009-02-24 | Cascade Microtech, Inc. | Wafer probe |
US7456646B2 (en) | 2000-12-04 | 2008-11-25 | Cascade Microtech, Inc. | Wafer probe |
US7355420B2 (en) | 2001-08-21 | 2008-04-08 | Cascade Microtech, Inc. | Membrane probing system |
US7492175B2 (en) | 2001-08-21 | 2009-02-17 | Cascade Microtech, Inc. | Membrane probing system |
US7368925B2 (en) | 2002-01-25 | 2008-05-06 | Cascade Microtech, Inc. | Probe station with two platens |
US7436194B2 (en) | 2002-05-23 | 2008-10-14 | Cascade Microtech, Inc. | Shielded probe with low contact resistance for testing a device under test |
US7482823B2 (en) | 2002-05-23 | 2009-01-27 | Cascade Microtech, Inc. | Shielded probe for testing a device under test |
US7489149B2 (en) | 2002-05-23 | 2009-02-10 | Cascade Microtech, Inc. | Shielded probe for testing a device under test |
US7518387B2 (en) | 2002-05-23 | 2009-04-14 | Cascade Microtech, Inc. | Shielded probe for testing a device under test |
US7304488B2 (en) | 2002-05-23 | 2007-12-04 | Cascade Microtech, Inc. | Shielded probe for high-frequency testing of a device under test |
US7550984B2 (en) | 2002-11-08 | 2009-06-23 | Cascade Microtech, Inc. | Probe station with low noise characteristics |
US7453276B2 (en) | 2002-11-13 | 2008-11-18 | Cascade Microtech, Inc. | Probe for combined signals |
US7417446B2 (en) | 2002-11-13 | 2008-08-26 | Cascade Microtech, Inc. | Probe for combined signals |
US7498828B2 (en) | 2002-11-25 | 2009-03-03 | Cascade Microtech, Inc. | Probe station with low inductance path |
US7639003B2 (en) | 2002-12-13 | 2009-12-29 | Cascade Microtech, Inc. | Guarded tub enclosure |
US7468609B2 (en) | 2003-05-06 | 2008-12-23 | Cascade Microtech, Inc. | Switched suspended conductor and connection |
US7498829B2 (en) | 2003-05-23 | 2009-03-03 | Cascade Microtech, Inc. | Shielded probe for testing a device under test |
US7876115B2 (en) | 2003-05-23 | 2011-01-25 | Cascade Microtech, Inc. | Chuck for holding a device under test |
US7492172B2 (en) | 2003-05-23 | 2009-02-17 | Cascade Microtech, Inc. | Chuck for holding a device under test |
US7501842B2 (en) | 2003-05-23 | 2009-03-10 | Cascade Microtech, Inc. | Shielded probe for testing a device under test |
US7362115B2 (en) | 2003-12-24 | 2008-04-22 | Cascade Microtech, Inc. | Chuck with integrated wafer support |
US7504823B2 (en) | 2004-06-07 | 2009-03-17 | Cascade Microtech, Inc. | Thermal optical chuck |
US7330041B2 (en) | 2004-06-14 | 2008-02-12 | Cascade Microtech, Inc. | Localizing a temperature of a device for testing |
US7368927B2 (en) | 2004-07-07 | 2008-05-06 | Cascade Microtech, Inc. | Probe head having a membrane suspended probe |
US7514944B2 (en) | 2004-07-07 | 2009-04-07 | Cascade Microtech, Inc. | Probe head having a membrane suspended probe |
US7420381B2 (en) | 2004-09-13 | 2008-09-02 | Cascade Microtech, Inc. | Double sided probing structures |
US8013623B2 (en) | 2004-09-13 | 2011-09-06 | Cascade Microtech, Inc. | Double sided probing structures |
US7449899B2 (en) | 2005-06-08 | 2008-11-11 | Cascade Microtech, Inc. | Probe for high frequency signals |
US7619419B2 (en) | 2005-06-13 | 2009-11-17 | Cascade Microtech, Inc. | Wideband active-passive differential signal probe |
US7609077B2 (en) | 2006-06-09 | 2009-10-27 | Cascade Microtech, Inc. | Differential signal probe with integral balun |
US7403028B2 (en) | 2006-06-12 | 2008-07-22 | Cascade Microtech, Inc. | Test structure and probe for differential signals |
US7443186B2 (en) | 2006-06-12 | 2008-10-28 | Cascade Microtech, Inc. | On-wafer test structures for differential signals |
US9429638B2 (en) | 2008-11-21 | 2016-08-30 | Cascade Microtech, Inc. | Method of replacing an existing contact of a wafer probing assembly |
US10267848B2 (en) | 2008-11-21 | 2019-04-23 | Formfactor Beaverton, Inc. | Method of electrically contacting a bond pad of a device under test with a probe |
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