JPH06129801A - Measuring device - Google Patents

Abstract

PURPOSE:To measure the inner dia. and depth of a workpiece with high accuracy by providing an X and Y axial moving means for moving a touch sensor in the X and Y axial directions relatively and a Z axial moving distance detecting means for measuring the moving distance of the touch sensor in the Z axial direction. CONSTITUTION:A touch sensor 27 and a workpiece 11 are relatively moved in X and Y axial directions by operating X and Y axial direction moving means 3, 5. The sensor 27 and the workpiece 11 are then moved relatively in the opposite X axial direction to make the inner dia. parts of the sensor 27 and the workpiece abut on each other. The half of moving amount at the right time of abutting is calculated. With the means 3, the sensor 27 and the workpiece 11 are moved in the opposite X axial direction by the half of the moving amount. With the means 5 the sensor 27 and the work 11 are then moved in the Y axial direction to make the inner dia. parts of the sensor 27 and the workpiece 11 abut on each other and at the right time of abutting zero (0) setting is carried out. They are made to abut on each other while being moved in the opposite direction and a specified value is added to the moving amount at the right time of abutting for calculating (35) the inner dia., and the sensor recognizes the depth at the time of abutting.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to, for example, a measuring device for measuring the inner diameter of a hollow work, and particularly to a work having a relatively large diameter and a work having a very small diameter (for example, an inner diameter of 1 mm or less). It is possible to accurately measure the inner diameter of a wide range of works up to (items) and to measure the depth of the inner diameter of the work.

[0002]

2. Description of the Related Art For example, when the inner diameter portion of a work is polished by an inner diameter polishing device, it is necessary to confirm whether or not the inner diameter portion is finished to a predetermined size. Conventionally,
Measurement of this kind of inner diameter is performed using various measuring devices, for example, for the inner diameter part of a work of extremely small diameter,
It is common to use an inner diameter gauge or the like. That is, a large number of inner diameter gauges finished in advance to a predetermined outer diameter are prepared, and one each is inserted into the inner diameter portion of the work, and the inner diameter of the work is specified from the insertion degree.

[0003]

According to the above-mentioned conventional structure, there is a problem that it is difficult to measure the inner diameter of a work having an extremely small diameter. That is, for each work
This is because it is necessary to insert various kinds of inner diameter gauges and specify the inner diameter from the insertion state. Moreover, the measurement accuracy was not high at all. Further, there is no means for measuring the depth of the inner diameter of the work with high accuracy.

The present invention has been made on the basis of such a point, and its object is to measure the inner diameter of the inner diameter portion of a work, particularly a work having an extremely small diameter, with high accuracy and by simple work. An object of the present invention is to provide a measuring device that enables the measurement of the depth of the inner diameter portion.

[0005]

In order to achieve the above object, a measuring apparatus according to the present invention comprises a work holding means for holding a work to be measured, and an inner diameter of the work which is inserted into the inner diameter portion of the work. Of the touch sensor for measuring the depth of the inner diameter portion of the workpiece, and the work holding means and the touch sensor are relatively moved in the axial direction (Z-axis direction) to position the touch sensor at a predetermined depth position of the inner diameter portion of the workpiece. The Z-axis direction moving means, the X-axis direction moving means for relatively moving the work holding means and the touch sensor in an arbitrary radial direction (X-axis direction), the work holding means and the touch sensor, and the X-direction moving means. When the Y-axis direction moving means for relatively moving in the radial direction (Y-axis direction) orthogonal to the axial direction and the touch sensor are located at an arbitrary position in the Z-axis direction, zero setting is performed and then the touch sensor is set. Chisensa is characterized in that anda Z-axis direction moving distance detection means for measuring the moving distance when moving the Z-axis direction.

At this time, the work holding means and the touch sensor are relatively moved in the X axis direction by the X-axis direction moving means to hold the moving distance at the moment when the inner diameter portion of the work and the touch sensor come into contact with each other. Means for displaying
A means for moving the work holding means and the touch sensor relative to each other in the Y-axis direction by the Y-axis direction moving means to hold and display the moving distance at the moment when the inner diameter portion of the work and the touch sensor contact each other is provided. It is preferable.

[0007]

First, the measuring apparatus according to the present invention measures the inner diameter of the work by the following procedure. First, the work to be measured is held by the work holding means. Next, the Z-axis direction moving means relatively moves the touch sensor and the work holding means in the Z-axis direction to position the touch sensor at a predetermined depth position within the inner diameter portion of the work.
Next, the X-axis direction moving means and the Y-axis direction moving means are appropriately operated to relatively move the touch sensor and the workpiece in the X-axis direction and the Y-axis direction. For example, the touch sensor and the work are relatively moved in the X-axis direction by the X-axis direction moving means to bring the touch sensor and the inner diameter portion of the work into contact with each other. Zero set is performed at the moment of contact. Next, the touch sensor and the work are relatively moved in the X-axis direction opposite to the above by the X-axis direction moving means to bring the touch sensor and the inner diameter portion of the work into contact with each other. Half the amount of movement at the moment of contact is calculated, and the X-axis direction moving means relatively moves the touch sensor and the workpiece in the opposite X-axis direction by half the amount of movement. . As a result, the touch sensor is located on the axis of the work.

Next, the touch sensor and the work are relatively moved in the Y-axis direction by the Y-axis direction moving means to bring the touch sensor and the inner diameter portion of the work into contact with each other. Zero set is performed at the moment of contact. Next, the touch sensor and the work are relatively moved in the Y-axis direction opposite to the above by the Y-axis direction moving means, and the touch sensor and the inner diameter portion of the work are brought into contact with each other. The inner diameter of the work can be calculated by adding a predetermined addition value to the movement amount at the moment of contact. The added value is the stylus (stylus) outer diameter of the touch sensor. It should be noted that the above measurement procedure is just an example, and it goes without saying that the measurement may be performed by another procedure, and the added value also differs depending on the configuration of the touch sensor.

Further, according to the inner diameter measuring device of the present invention, the depth of the inner diameter portion of the work can be measured. The procedure is as follows. First, the touch sensor is brought into contact with the end surface of the work. In that state, the Z-axis direction movement distance detecting means is set to zero. After that, the touch sensor is Z
If it moves in the axial direction, the moving distance will be detected by the Z-axis moving distance detecting means. Therefore, if the touch sensor is lowered into the inner diameter portion of the work, the lowered movement distance is detected, and it is possible to recognize at which depth position the touch sensor is located in the inner diameter portion of the work. Further, the depth of the inner diameter portion can be recognized from the moving distance when the touch sensor comes into contact with the bottom portion of the inner diameter portion.

Further, the work holding means and the touch sensor are relatively moved in the X-axis direction by the X-axis direction moving means,
A means for holding and displaying the moving distance at the moment when the inner diameter portion of the work and the touch sensor contact each other is provided, and similarly, the work holding means and the touch sensor are relatively moved in the Y-axis direction by the Y-axis direction moving means. When means for holding and displaying the moving distance at the moment when the inner diameter portion of the work and the touch sensor are brought into contact with each other is displayed, the work holding means and the touch sensor are moved relative to each other, and Even if the contact is further moved after the contact, the moving distance can be measured with high accuracy, and the accuracy of inner diameter measurement can be improved.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. The inner diameter measuring device according to the present embodiment has a structure as shown in FIG. First, there is a base 1 as an apparatus main body, and on this base 1, an XY table mechanism 3 is installed as an X-axis direction moving means and a Y-axis direction moving means. The XY table mechanism 3 has the following structure. There is a Y-axis table mechanism 5 as Y-axis direction moving means, and an X-axis table mechanism 5 is provided on the Y-axis table mechanism 5.
An X-axis table mechanism 7 as an axis moving means is installed. A work holding means 9 is installed on the X-axis table mechanism 7, and the work holding means 9 holds the work 11.

The Y-axis table mechanism 5 is for moving the X-axis table mechanism 7 by a screw method. That is, a screw (not shown) is provided, and a nut (not shown) is screwed into the screw. The Y-axis table 13 is fixed to this nut. And the operation handle 1
By rotating 5 to rotate the screw, the nut whose rotation is restricted moves in the Y-axis direction, whereby the Y-axis table 13 and thus the entire X-axis table mechanism 7 moves in the Y-axis direction. Is. A speed reducer may be inserted between the operation handle 15 and the screw.
A clutch brake may be inserted between the operation handle 15 and the speed reducer.

The X-axis table mechanism 7 side has the same structure, and a nut (not shown) is screwed into a screw (not shown). The X-axis table 17 is fixed to this nut. Then, by rotating the operation handle 19 to rotate the screw, the nut whose rotation is restricted is moved to the X position.
It moves in the axial direction, whereby the X-axis table 17 and thus the work holding means 9 moves in the X-axis direction. A speed reducer may be inserted between the operation handle 19 and the screw, and a clutch brake may be inserted between the operation handle 19 and the speed reducer.

A pillar portion 21 is erected on the base 1. A sensor unit 23 is attached to the front surface side of the column portion 21 so as to be vertically movable. The sensor unit 23
Is composed of an arm portion 25, a touch sensor 27 attached to the tip of the arm portion 25, a stylus (measuring element) 29 detachably attached to the lower end of the touch sensor 27, and the like. A pinion gear (not shown) is built in the inside of the arm portion 25, and this pinion gear is used for the pillar portion 2.
It meshes with the rack gear 31 attached to the No. 1. Then, the pinion gear is rotated by rotating the operation handle 33, and thereby the arm portion 25 and thus the entire sensor unit 23 is moved up and down in the Z-axis direction. A speed reducer may be inserted between the operation handle 33 and the pinion gear.
A clutch brake may be interposed between the gear and the reduction gear.

A digital gauge 35 as a Z-axis movement distance detecting means is attached to the pillar 21 above the sensor unit 23 so as to be movable in the Z-axis direction. That is, there is the arm portion 37, and the digital gauge 35
Is attached to the tip of the arm portion 37. This arm 3
A pinion gear (not shown) is built in 7 and meshes with the rack gear 31 already described. Then, by rotating the operation handle 39, the pinion gear is rotated, and thereby the arm portion 37 and thus the digital gauge 35 are moved up and down in the Z-axis direction. A reduction gear may be inserted between the operation handle 39 and the pinion gear. The digital gauge 35 is a measuring element 41.
And a dial display section 43.

The sensor unit 23 and the digital gauge 35 are connected to the operating portion 45 via lead wires 47 and 49. Various operation units and a display unit are arranged on the front surface side of the operation unit 45. First, the on / off switch 51 is arranged, and the addition switch 53 is arranged below the on / off switch 51. An addition value setting unit 55 for setting an addition value is provided on the right side of the addition switch 53 in the figure. Further, on the right side of the figure, X-axis direction movement distance display units 57 and 59 for displaying the movement distance in the X-axis direction are arranged in two rows, and
Y-axis direction movement distance display portions 61 and 63 that display the movement distance in the Y-axis direction are arranged in two rows in the vertical direction. Further, at the right end in the figure, a reset switch 65 and a zero set switch 67 are arranged in upper and lower two rows.

The operation will be described based on the above configuration. First, the depth measurement of the inner diameter portion starting from the detection of the upper end surface 11a of the work 11 will be described. As shown in FIG. 2, the operation handle 33 is rotated to lower the touch sensor unit 23, and the tip of the touch sensor 29 is attached to the work 1.
1 is brought into contact with the upper end surface 11a. When the touch sensor 29 comes into contact with the upper end surface 11a of the work 11, a sound (for example, a beeping sound) is output, so that the touch sensor 29 causes the upper end surface 11 of the work 11 to come.
It can be confirmed that it has come into contact with a. Then, the rotation operation of the operation handle 33 is stopped. Next, as shown in FIG.
Rotate the operation handle 39 to rotate the digital gauge 35.
Is lowered to bring the probe 41 into contact with the upper end surface of the sensor 27 of the touch sensor unit 23. Then, the operation handle 39 is further rotated to operate the digital gauge 3
Lower 5 As a result, as shown in FIG. 3, the tracing stylus 41 is in a state of being housed in the main body of the digital gauge 35. At this point, zero setting is performed and the display on the dial display portion 43 is set to zero. With this, the upper end surface 11a of the work 11 is detected.

Next, the XY table mechanism 3 is appropriately operated to position the stylus 29 above the inner diameter portion of the work 11. Then, from there, the operation handle 33 is rotated to lower the touch sensor unit 23 by a predetermined amount. This is shown in FIG. As a result, the tip of the stylus 29 is located at a predetermined depth position within the inner diameter portion of the work 11. This operation can be easily and highly accurately performed by monitoring the display on the dial display portion 43 of the digital gauge 35. Then, with the tip of the stylus 29 positioned at a predetermined depth position within the inner diameter portion of the work 11, the inner diameter measurement operation described later can be performed. By rotating the operation handle 33 while observing the display on the dial display section 43 of the digital gauge 35, the touch sensor unit 23 can be lowered by a predetermined amount and positioned at an arbitrary depth position. it can.

Further, regarding the depth (H) of the inner diameter portion of the work 11, the tip of the stylus 29 is as shown in FIG.
It can be easily measured by observing the display of the dial display portion 43 when it abuts on the bottom of the inner diameter portion.

Next, the inner diameter measuring operation will be described. First, the XY table mechanism 3 is appropriately operated to operate the work 11
Is located at an appropriate position (an appropriate position where the stylus 29 enters the inner diameter portion of the work 11 in a non-contact state).
Next, rotate the operating handle 33 to move the stylus 2
9 is lowered and inserted into the inner diameter portion of the work 11 at a predetermined depth position. For example, it is assumed that the stylus 29 is inserted into the inner diameter portion of the work 11 in the state shown in FIG. The outer diameter of the stylus 29 is (d), and the work 1
The inner diameter of 1 is (D).

In the above state, the XY table mechanism 3 is driven to move the work 11 in the X-axis direction. When the work 11 moves in the X-axis direction and the stylus 29 comes into contact with the inner diameter portion of the work 11, a sound (for example, a beeping sound) is output. Thereby, the operation of the XY table mechanism 3 is stopped. This is shown in FIG. The stylus 29 and the inner diameter portion of the workpiece 11 are in contact with each other at point a. At this time, X
The amount of movement is displayed on each of the axial movement amount display units 57 and 59. That is, the X-axis direction movement amount display portion 57 holds and displays the movement amount at the moment when the stylus 29 and the inner diameter portion of the work 11 contact each other. On the other hand, actually, there is a slight amount of movement even after the stylus 29 and the inner diameter portion of the work 11 come into contact with each other.
A value including the amount of movement is displayed on. Therefore, by repeating the above-mentioned work a plurality of times, the displays on the X-axis direction movement amount display portions 57 and 59 will coincide with each other. That is,
The movement of the work 11 in the X-axis direction can be stopped at the moment when the stylus 29 and the inner diameter portion of the work 11 come into contact with each other. At this point, zero set is performed.

Next, by operating the X / Y table mechanism 3,
The work 11 is moved in the X-axis direction opposite to the above.
When the inner diameter portion of the work 11 and the stylus 29 come into contact with each other, a sound (for example, a beep sound) is output. Thereby, the operation of the XY table mechanism 3 is stopped.
The situation is shown in FIG. The stylus 29 and the inner diameter portion of the work 11 are in contact with each other at point b. The movement distance (L) at that time is displayed on the X-axis direction movement amount display portions 57 and 59. However, the value at the moment when the sound is output is held and displayed on the X-axis direction movement amount display unit 57, and the slight amount of movement after the sound is output is displayed on the X-axis direction movement amount display unit 59. The included value is displayed. Also in this case, by repeating the above operation a plurality of times, the X-axis direction movement amount display units 57 and 59 are displayed.
The display will match. This will be described more specifically. The work 11 is moved in the opposite direction to move the stylus 2
9 apart. At that time, the reset switch 65 is operated to release the hold state of the X-axis direction movement amount display section 59. In this state, the work of bringing the work 11 and the stylus 29 into contact with each other is performed again. By repeating this work a plurality of times, the displays on the X-axis direction movement amount display units 57 and 59 will match. Then, when the relative movement distance between the stylus 29 and the work 11 is (L) during the transition from the state shown in FIG. 7 to the state shown in FIG.
The center line of the work 11 will be present where it has returned by (L / 2). Therefore, the XY table mechanism 3 is operated to return the work 11 by (L / 2) in the X-axis direction.
The state is shown in FIG. The amount of (L / 2) may be confirmed by monitoring the display of the X-axis direction movement amount display unit 59.

Next, by operating the X / Y table mechanism 3,
The work 11 is moved in the Y-axis direction. When the work 11 moves in the Y-axis direction and the stylus 29 comes into contact with the inner diameter portion of the work 11, a sound (for example, a beeping sound) is output. Thereby, the operation of the XY table mechanism 3 is stopped. This is shown in FIG. The stylus 29 is in contact with the inner diameter portion of the work 11 at point c. At this time, the movement amounts are displayed on the Y-axis direction movement amount display portions 61 and 63, respectively. That is, the Y-axis direction movement amount display unit 6
In 1, the movement amount at the moment when the stylus 29 and the inner diameter portion of the work 11 contact is held and displayed. on the other hand,
Actually, there is a slight amount of movement even after the stylus 29 and the inner diameter portion of the work 11 come into contact with each other, and the Y-axis direction movement amount display portion 63 displays a value including the movement amount. Therefore, by repeating the above-mentioned work a plurality of times, the displays on the Y-axis direction movement amount display portions 61 and 63 come to coincide with each other. That is, the movement of the work 11 in the Y-axis direction can be stopped at the moment when the stylus 29 and the inner diameter portion of the work 11 contact each other. At this point, zero is set.

Next, by operating the X / Y table mechanism 3,
The work 11 is moved in the Y-axis direction opposite to the above.
When the work 11 moves in the Y-axis direction and the stylus 29 comes into contact with the inner diameter portion of the work 11, a sound (for example, a beeping sound) is output. The moving distance (M) at that time is displayed on the Y-axis direction moving amount display portions 61 and 63. However,
The value at the moment when the sound is output is held and displayed on the Y-axis direction movement amount display unit 61, and the Y-axis direction movement amount display unit 63 is displayed.
A value including a slight amount of movement after the sound is output is displayed on. Also in this case, by repeating the above-mentioned operation a plurality of times, the displays on the Y-axis direction movement amount display sections 61 and 63 are matched. This will be described more specifically. The work 11 is moved in the opposite direction and separated from the stylus 29. At that point, operate the reset switch 65,
The hold state of the Y-axis direction movement amount display unit 61 is released.
In this state, the work of bringing the work 11 and the stylus 29 into contact with each other is performed again. By repeating such work a plurality of times, the displays on the Y-axis direction movement amount display portions 61 and 63 are made to coincide with each other. This is shown in FIG.
The stylus 29 is in contact with the inner diameter portion of the work 11 at the point d. If the distance that the stylus 29 and the workpiece 11 relatively move during the transition from the state shown in FIG. 10 to the state shown in FIG. 11 is (M), this movement distance (M)
Then, the value obtained by adding the outer diameter (d) of the stylus 29 is the inner diameter (D ₁ ) of the inner diameter portion of the work 11. or,
The center of the inner diameter portion of the work 11 is located where the distance (M / 2) has returned from the state shown in FIG.
This is shown in FIG.

Since the inner diameter (D ₁ ) of the work 11 has been measured at the above stage, the measurement may be completed. In the case of the present embodiment, the work 11 is again measured in the X-axis direction. Then, the inner diameter (D ₂ ) of the work 11 is measured again. That is, the X / Y table mechanism 3 is driven to move the work 11 again in the X-axis direction (shown in FIG. 13), and then the work 11 is moved in the opposite X-axis direction (see FIG. 13). 14). Assuming that the distance that the workpiece 11 and the stylus 29 have moved relative to each other during the transition from FIG. 13 to FIG. 14 is (N), the inner diameter (D ₂ ) of the inner diameter portion of the workpiece 11 is equal to the movement distance (N). It is a value obtained by adding the outer diameter (d) of 29.

After that, the measured inner diameter (D ₁ ) and (D
₂ ) and calculate the average to obtain the inner diameter (D), or
It will be confirmed as the maximum and minimum values. Alternatively, the work 11 may be rotated by an arbitrary angle, and the same measurement work may be performed at another position at the same depth position. Then, the inner diameter (D ₁ ′) and (D ₂ ′) thus measured and the average of the inner diameters (D ₁ ) and (D ₂ ) are calculated as the inner diameter (D), or the maximum value is calculated. , As the minimum value. Also, as already explained,
In the case of the present embodiment, the stylus 29 can be positioned at a predetermined depth position of the inner diameter portion of the work 11, so that the inner diameter (D) can be measured at a plurality of different depth positions. The distribution of the inner diameter (D) in the depth direction, the taper degree, etc. can be measured.

As described above, according to this embodiment, the following effects can be obtained. First, the work of measuring the inner diameter of the work 11 is simplified, and particularly, the work of measuring the work having an extremely small inner diameter is simplified. That is, the XY table mechanism 3
This is because the inner diameter of the work 11 can be measured only by appropriately operating and moving the work 11 in the X-axis direction or the Y-axis direction several times and performing a predetermined calculation. Further, the depth (H) of the inner diameter portion of the work 11 can be measured, and the stylus 29 can be positioned at a predetermined depth position. Therefore, the distribution of the inner diameter (D) in the depth direction of the inner diameter portion of the work 11 and the taper degree of the inner diameter portion can be measured with high accuracy.

Further, the stylus 2 is arranged in the X-axis direction and the Y-axis direction.
9 and the work 11 are moved relative to each other to hold and display the moving distance when the two come into contact with each other. Also, the moving distance can be measured with high accuracy. Thereby, the accuracy of the inner diameter measurement is also high.

The present invention is not limited to the above embodiment. First, in the above-described embodiment, the operation of the X / Y-axis table mechanism 3, the vertical movement of the stylus 29, and the like are all described as manual operations, but they may all be automated. That is, the measurement process shown in FIGS. 6 to 14 (this is just an example) is programmed in advance and is input / stored in the controller. On the other hand, a servo motor is arranged in each of the mechanism for vertically moving the X / Y-axis table mechanism 3 and the stylus 29, and the servo motors are controlled by the controller to automate the measurement work. Further, it may be considered that the work 11 is carried in and out by a carry-in / carry-out robot, and the work 11 is automated. Further, in the case of the one embodiment, the stylus 29 is moved in the Z-axis direction and the work 11 is moved in the X-axis direction and the Y-axis direction.
It is not limited to that. In short, the stylus 29
It suffices that the workpiece 11 and the workpiece 11 can be relatively moved in the X-, Y-, and Z-axis directions. As the Z-axis direction moving distance detecting means, a means other than a digital gauge may be used.

[0030]

As described in detail above, according to the inner diameter measuring device of the present invention, the work of measuring the inner diameter of the work is simplified. That is, the inner diameter of the work can be measured by performing the work of moving the work in the X-axis direction or the Y-axis direction several times and performing a predetermined calculation. Further, the depth of the inner diameter portion of the work can be measured, and the touch sensor can be positioned at a predetermined depth position. Therefore, the distribution of the inner diameter of the workpiece in the depth direction, the taper degree of the inner diameter, and the like can be measured with high accuracy.
Further, since the stylus and the work are relatively moved in the X-axis direction and the Y-axis direction to hold and display the movement distance when the two come into contact with each other. Even if it moves further, the moving distance can be measured with high accuracy. Thereby,
The accuracy of the inner diameter measurement, particularly, the inner diameter measurement of a work having an extremely small diameter is also high.

[Brief description of drawings]

FIG. 1 is a diagram showing an embodiment of the present invention and is a perspective view of an inner diameter measuring apparatus.

FIG. 2 is a diagram showing an embodiment of the present invention, which is a diagram showing depth measurement of an inner diameter portion of a work in the order of steps.

FIG. 3 is a diagram showing an embodiment of the present invention, which is a diagram showing the depth measurement of the inner diameter portion of the work in the order of steps.

FIG. 4 is a diagram showing an embodiment of the present invention, which is a diagram showing depth measurement of an inner diameter portion of a work in the order of steps.

5A and 5B are views showing an embodiment of the present invention and are views showing the depth measurement of the inner diameter portion of the work in the order of steps.

FIG. 6 is a view showing an embodiment of the present invention, and is a view showing the inner diameter measurement of the inner diameter portion of the work in the order of steps.

FIG. 7 is a view showing an embodiment of the present invention and is a view showing an inner diameter measurement of an inner diameter portion of a work in the order of steps.

FIG. 8 is a view showing an embodiment of the present invention and is a view showing an inner diameter measurement of an inner diameter portion of a work in the order of steps.

FIG. 9 is a diagram showing an embodiment of the present invention, and is a diagram showing an inner diameter measurement of an inner diameter portion of a work in the order of steps.

FIG. 10 is a diagram showing an embodiment of the present invention, which is a diagram showing an inner diameter measurement of an inner diameter portion of a work in the order of steps.

FIG. 11 is a diagram showing an embodiment of the present invention, which is a diagram showing the inner diameter measurement of the inner diameter portion of the work in the order of steps.

FIG. 12 is a diagram showing one embodiment of the present invention, which is a diagram showing the inner diameter measurement of the inner diameter portion of the work in the order of steps.

FIG. 13 is a view showing an embodiment of the present invention and is a view showing the inner diameter measurement of the inner diameter portion of the work in the order of steps.

FIG. 14 is a diagram showing an embodiment of the present invention, which is a diagram showing the inner diameter measurement of the inner diameter portion of the work in the order of steps.

[Explanation of symbols]

 3 XY table mechanism (X-axis direction moving means) 5 Y-axis table mechanism (Y-axis direction moving means) 7 X-axis table mechanism 11 Work piece 27 Touch sensor 29 Stylus 35 Digital gauge (Z-axis direction moving distance detecting means)

Claims (2)

[Claims] 1. A work holding means for holding a work to be measured, a touch sensor inserted into the inner diameter portion of the work for measuring the inner diameter of the work and measuring the depth of the inner diameter portion of the work, and the work holding means. And Z-axis direction moving means for relatively moving the touch sensor in the axial direction (Z-axis direction) to position the touch sensor at a predetermined depth position of the inner diameter portion of the work, the work holding means and the touch sensor. X-axis direction moving means for relatively moving in an arbitrary radial direction (X-axis direction), relative to the work holding means and the touch sensor in a radial direction (Y-axis direction) orthogonal to the X-axis direction. The Y-axis direction moving means and the touch sensor Z
Z-axis moving distance detecting means for measuring the moving distance when the touch sensor moves in the Z-axis direction from the zero position when the touch sensor moves to the arbitrary position in the axial direction. Measuring device. 2. The measuring device according to claim 1, wherein the workpiece holding means and the touch sensor are relatively moved in the X-axis direction by the X-axis direction moving means so that the inner diameter portion of the workpiece and the touch sensor come into contact with each other. There is provided means for holding and displaying the movement distance at the time of movement, and similarly, the work holding means and the touch sensor are relatively moved in the Y-axis direction by the Y-axis direction moving means, and the inner diameter portion of the work is also provided. A measuring device comprising means for holding and displaying a moving distance when the touch sensor and the touch sensor are in contact with each other.