[go: up one dir, main page]

JPH06116701A - Thermally sprayed heating element for composite particle and its production - Google Patents

Thermally sprayed heating element for composite particle and its production

Info

Publication number
JPH06116701A
JPH06116701A JP26275592A JP26275592A JPH06116701A JP H06116701 A JPH06116701 A JP H06116701A JP 26275592 A JP26275592 A JP 26275592A JP 26275592 A JP26275592 A JP 26275592A JP H06116701 A JPH06116701 A JP H06116701A
Authority
JP
Japan
Prior art keywords
heating element
insulating
thermal spray
conductive
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26275592A
Other languages
Japanese (ja)
Other versions
JP3216737B2 (en
Inventor
Shuhei Nakahama
修平 中浜
Nobuyori Bessho
信頼 別所
Toshiyuki Koya
敏行 小屋
Yoshikazu Murata
好和 村田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP26275592A priority Critical patent/JP3216737B2/en
Publication of JPH06116701A publication Critical patent/JPH06116701A/en
Application granted granted Critical
Publication of JP3216737B2 publication Critical patent/JP3216737B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Surface Heating Bodies (AREA)
  • Resistance Heating (AREA)
  • Coating By Spraying Or Casting (AREA)

Abstract

PURPOSE:To provide the thermally sprayed heating element which is inexpensive and is a stable and high additive value by thermally spraying conductive composite particles to a base material. CONSTITUTION:The composite particles consisting of insulating or semiconductor particles coated with an conductive material or the composite particles consisting of the conductive particles coated with a insulating or conductive material are thermally sprayed onto the surface of the base material which is an insulator to form the thermally sprayed film to be electrically heated, by which the thermally sprayed heating element is obtd.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、通電発熱させるための
溶射発熱体に係り、特に導電性物質又は絶縁体か半導体
物質をそれぞれの粒子にコーテングした複合粒子を溶射
加工した溶射発熱体に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thermal spray heating element for energizing and generating heat, and more particularly to a thermal spray heating element obtained by thermal spraying composite particles obtained by coating a conductive material, an insulating material or a semiconductor material into respective particles.

【0002】[0002]

【従来の技術】従来の発熱体は、金属、カーボン、導電
性セラミックス及び前記導電性物質と絶縁物質の混合物
をその特性に応じて塗布、焼結、シース化、蒸着、溶射
等の加工技術により製造していた。しかしながら、例え
ば金属の溶射加工で発熱体を形成する場合抵抗率が通常
10-4オーダの為、所定の抵抗値を得るためには発熱体
の長さを(ジグ等を用いて)長くしたり、又その断面積
を小さくする必要があったが、その厚みには限度がある
ため、特に電力密度が小さいという問題があった。ま
た、金属の溶射材料は約1万円/kgと高価である。一
方、TiO2 等の導電性セラミックスは電気特性や耐久
性に問題があった。
2. Description of the Related Art Conventional heating elements are formed by applying processing techniques such as coating, sintering, sheathing, vapor deposition, and thermal spraying of metal, carbon, conductive ceramics, and a mixture of the conductive material and insulating material according to their characteristics. It was manufactured. However, when forming a heating element by thermal spraying of metal, for example, the resistivity is usually on the order of 10 −4 , so to obtain a predetermined resistance value, the length of the heating element is lengthened (using a jig or the like). Moreover, it was necessary to reduce the cross-sectional area, but there was a problem that the power density was particularly small because the thickness was limited. Further, the metal spray material is expensive, about 10,000 yen / kg. On the other hand, conductive ceramics such as TiO 2 have problems in electrical characteristics and durability.

【0003】このような技術を開示した文献として、特
開昭59−94394号公報、特公平2−56425号
公報がある。一方、特開昭64−8260号公報に金属
−セラミック複合皮膜の形成方法がある。これは主眼が
複合皮膜の製造法であり、又、無電解メッキを主体にし
ているため、かぎられた金属のみであり導電性セラミッ
クス等は不可能であり、また、化学的処理のため不純物
の影響が懸念される。又、電力印加による発熱体の特性
評価も欠点になっている。
Documents disclosing such a technique include Japanese Patent Laid-Open No. 59-94394 and Japanese Patent Publication No. 2-56425. On the other hand, there is a method for forming a metal-ceramic composite coating in Japanese Patent Laid-Open No. 64-8260. This is mainly a method of manufacturing a composite coating, and since electroless plating is the main component, it is only a limited metal and conductive ceramics etc. are not possible. There is concern about the impact. Further, the evaluation of the characteristics of the heating element by applying electric power is also a drawback.

【0004】[0004]

【発明が解決しようとする課題】上記の技術的な本質は
見掛け抵抗率を10-3〜100 に制御できる技術を確立
することである。この技術が達成されれば、所定の抵抗
値が抵抗率、長さ、及び断面積の3要素を任意に変えら
れるので容易に得られることになる。また、電気的に安
定であるためには導電性物質が連続していることが重要
であり、マクロ的にみてその割合が同程度であることが
均一加熱上必要となる。そこで、本発明は、上記した諸
要求を満足することのできる高付加価値の溶射発熱体と
その製造法を提供することを課題とするものである。
[SUMMARY OF THE INVENTION] is to establish a technique for the technical essence apparent resistivity of the can be controlled to 10 -3 to 10 0. When this technique is achieved, a predetermined resistance value can be easily obtained because the three elements of resistivity, length, and cross-sectional area can be arbitrarily changed. Further, in order to be electrically stable, it is important that the conductive substance is continuous, and it is necessary for uniform heating that the ratios thereof are approximately the same from a macro perspective. Therefore, it is an object of the present invention to provide a high value-added thermal spray heating element capable of satisfying the above-mentioned various requirements and a manufacturing method thereof.

【0005】[0005]

【課題を解決するための手段】上記課題を解決するため
に、本発明では、絶縁体基材と、該基材表面に導電性物
質をコーテングした絶縁又は半導体粒子からなる複合粒
子を溶射して形成した溶射皮膜とからなる溶射発熱体と
するか、又は絶縁体基材と、該基材表面に絶縁又は半導
体物質をコーテングした導電性粒子からなる複合粒子を
溶射して形成した溶射皮膜とからなる溶射発熱体とした
ものである。
In order to solve the above problems, in the present invention, an insulating base material and a composite particle composed of insulating or semiconductor particles coated with a conductive substance on the surface of the base material are sprayed. A thermal spray heating element consisting of the formed thermal spray coating, or an insulating base material and a thermal spray coating formed by spraying composite particles consisting of electrically conductive particles coated with an insulating or semiconductor substance on the surface of the base material. This is a thermal spray heating element.

【0006】また、本発明では、絶縁体の基材表面に、
導電性物質をコーテングした絶縁又は半導体粒子からな
る複合粒子、又は絶縁又は半導体物質をコーテングした
導電性粒子からなる複合粒子を溶射して、通電発熱させ
る溶射皮膜を形成することを特徴とする複合粒子の溶射
発熱体の製造法としたものである。上記のように、本発
明では、セラミックの粒子表面に導電性物質をコーテン
グした複合物質(粒子)を溶射加工して形成した溶射皮
膜に、電力印加することにより発熱体とする。
Further, in the present invention, on the surface of the base material of the insulator,
Composite particles consisting of insulating or semiconductor particles coated with a conductive material, or composite particles consisting of conductive particles coated with an insulating or semiconductor material are sprayed to form a sprayed coating that produces heat when energized. This is a method for manufacturing a thermal spray heating element. As described above, in the present invention, a heat-generating body is formed by applying electric power to the thermal spray coating formed by thermal spraying the composite material (particles) obtained by coating the surface of the ceramic particles with the conductive material.

【0007】上記において、コーテング膜はメッキ、メ
カニカルアロイング、スパッタ等で製造でき、膜厚は
0.1μm〜20μm程度に変えられるものである。導
電性物質としては、金属、合金類とB4 C、TiC、W
C、ZrC、TiB2 、Mo25 、TiN、AlN、
MoSi2 などの導電性セラミックやSnO、Pb
2、ReO2 、V2 3 などの導電性酸化物が使用で
きる。絶縁又は半導体粒子の粒径は10〜75μm程度
であり、絶縁物質(粒子)としてはAl2 3 、TiO
2 、ZrO2 、CaO、Y2 3 、Cr2 3 、Mg
O、MnO等とそれぞれの混合物であり、半導体物質と
してはSn、Se、Te、SiC、GaN、ZnS、P
bSなどである。
In the above, the coating film can be manufactured by plating, mechanical alloying, sputtering, etc., and the film thickness can be changed to about 0.1 μm to 20 μm. Conductive substances include metals, alloys and B 4 C, TiC, W
C, ZrC, TiB 2 , Mo 2 B 5 , TiN, AlN,
Conductive ceramics such as MoSi 2 and SnO, Pb
Conductive oxides such as O 2 , ReO 2 and V 2 O 3 can be used. The particle size of the insulating or semiconductor particles is about 10 to 75 μm, and the insulating material (particles) is Al 2 O 3 or TiO 2.
2 , ZrO 2 , CaO, Y 2 O 3 , Cr 2 O 3 , Mg
O, MnO, etc., and their respective mixtures, and the semiconductor material is Sn, Se, Te, SiC, GaN, ZnS, P.
For example, bS.

【0008】[0008]

【作用】例えば、金属が1μmコーテングされた30μ
mの複合粒子を用いた溶射加工で、膜厚を100μmに
したとすれば、30μmの粒子が1/2に縮少して積層
し1個15μmのラメラとなり、6個半径方向に並ぶと
仮定すれば、コーテング層のみをとれば同様に全体の膜
厚は6μmとなる。これは金属のみの場合に比して約1
7倍の抵抗値が得られることになる。また、コーテング
層は三次元で連続しているため、電気的に安定であり、
マクロ的に導電性物質の割合が同程度となり均一加熱さ
れる。また、コーテング膜厚を変えることにより見掛け
抵抗率も変化する。
Function: For example, 30μ coated with 1μm metal
Assuming that the film thickness is 100 μm in the thermal spraying process using m composite particles, 30 μm particles are reduced to 1/2 and laminated to form a 15 μm lamella, and 6 particles are arranged in the radial direction. For example, if only the coating layer is taken, the total film thickness becomes 6 μm. This is about 1 compared to the case of metal alone
This means that a resistance value that is seven times higher can be obtained. Also, since the coating layer is three-dimensionally continuous, it is electrically stable,
Macroscopically, the ratio of the conductive material is about the same, and uniform heating is performed. Further, the apparent resistivity also changes by changing the coating film thickness.

【0009】一方、金属の溶射材料は約1万円/kgと
高価であるが、安価なセラミックを核に用いている為、
金属の割合が小さく安価となる。従って、複雑な溶射加
工をせずとも、この複合粒子の溶射加工により家庭の電
源で使える任意の形状のヒータが簡単に得られる。
On the other hand, the thermal spray material of metal is expensive at about 10,000 yen / kg, but since inexpensive ceramic is used as the core,
The proportion of metal is small and the cost is low. Therefore, without performing complicated thermal spraying, the thermal spraying of the composite particles makes it possible to easily obtain a heater of any shape that can be used in a household power source.

【0010】[0010]

【実施例】以下、本発明を実施例により具体的に説明す
るが、本発明はこれに限定されるものではない。 実施例1 平均粒径27.5μmのAl2 3 +2.3TiO2
らなる粒子に、導電性物質として平均粒径1.3μmの
Ni粉を10:3wt%の割合でメカニカルアロイング
法を用いてコーテングした。Ni膜厚が約2μmの複合
粒子が得られた。この複合粒子をプラズマ溶射法で、す
でにAl2 3 で絶縁処理を施こした25A SUS3
04、長さ10cmの外表面に、膜厚80μmの溶射発
熱体を形成した。
EXAMPLES The present invention will be specifically described below with reference to examples, but the present invention is not limited thereto. Example 1 A mechanical alloying method was used in which particles of Al 2 O 3 + 2.3TiO 2 having an average particle diameter of 27.5 μm were mixed with Ni powder having an average particle diameter of 1.3 μm as a conductive material at a ratio of 10: 3 wt%. I coated. Composite particles having a Ni film thickness of about 2 μm were obtained. 25A SUS3 which had already been insulation-treated with Al 2 O 3 by plasma spraying method for these composite particles
04, a thermal spray heating element having a film thickness of 80 μm was formed on the outer surface having a length of 10 cm.

【0011】図1にこの複合粒子の溶射発熱体を用いた
抵抗率測定の加熱装置を示す。図1において、溶射発熱
体1が本体(SUS304)2の上に形成されており、
溶射発熱体1の両端に電極3を取り付け、アンメータ5
を介してスライダック(100V、10A)4に接続さ
れている。溶射発熱体1の中央には熱電対6を設置し温
度が測定されている。
FIG. 1 shows a heating device for measuring resistivity using the thermal spray heating element of the composite particles. In FIG. 1, a thermal spray heating element 1 is formed on a main body (SUS304) 2,
The electrodes 3 are attached to both ends of the thermal spray heating element 1, and the ammeter 5
Is connected to the slidac (100V, 10A) 4 via. A thermocouple 6 is installed at the center of the thermal spray heating element 1 to measure the temperature.

【0012】この溶射発熱体1に取り付けた電極3にス
ライダック4で50V電圧を印加したところ、電流値が
10A流れたことによりこの発熱体の抵抗は常法で5Ω
であった。このことより抵抗率を計算すると0.04Ω
・cmであり、Ni粉のみに対して約100倍の見掛け
抵抗率の増加を得た。
When a voltage of 50 V was applied to the electrode 3 attached to the thermal spray heating element 1 by the sliderac 4, a current value of 10 A flowed, and the resistance of the heating element was 5 Ω by the usual method.
Met. From this, the resistivity is calculated to be 0.04Ω
-Cm, and an increase in apparent resistivity about 100 times that of Ni powder alone was obtained.

【0013】次に上記溶射発熱体にスライダックで5W
(5.0V、1.0A)20W(10.0V、2.0
A)の昇温加熱実験を実施した。その結果を図2に示
す。30分で電力密度0.05W/cm2 で45℃、
0.2W/cm2 で75℃であった。なお室温28.1
℃であった。なお、温度は溶射発熱体表面に取りつけた
熱電対6で測定した。
Next, 5 W with a slidac on the thermal spray heating element.
(5.0V, 1.0A) 20W (10.0V, 2.0
The temperature rising heating experiment of A) was implemented. The result is shown in FIG. 45 ° C. with a power density of 0.05 W / cm 2 in 30 minutes,
It was 75 ° C. at 0.2 W / cm 2 . Room temperature 28.1
It was ℃. The temperature was measured with a thermocouple 6 attached to the surface of the thermal spray heating element.

【0014】[0014]

【発明の効果】本発明によれば次のような効果を奏する
ことができる。 (1)本発明は導電性物質をコーテングした複合粒子を
溶射加工したことにより、この皮膜の見掛け抵抗率が任
意に制御できた。従って、家庭電源で容易にヒータが得
られ、利用範囲が拡大した。 (2)この皮膜は三次元的に導電性物質で連続されてい
るため電気的に安定であり、マクロ的に均一加熱され
る。 (3)この複合粒子は核に安価な絶縁粒子を用いたこと
により安価となった。 (4)見掛け抵抗率が増加したため高抵抗となった。よ
ってヒータのコンパクト化が可能となった。
According to the present invention, the following effects can be obtained. (1) In the present invention, the apparent resistivity of this coating can be arbitrarily controlled by subjecting composite particles coated with a conductive material to thermal spraying. Therefore, the heater can be easily obtained with the household power source, and the range of use is expanded. (2) This coating is electrically stable because it is three-dimensionally continuous with a conductive substance, and is uniformly heated macroscopically. (3) The cost of the composite particles has been reduced by using inexpensive insulating particles for the core. (4) The apparent resistivity increased, resulting in high resistance. Therefore, the heater can be made compact.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の溶射発熱体を用いた加熱実験装置の概
略説明図。
FIG. 1 is a schematic explanatory view of a heating experimental apparatus using a thermal spray heating element of the present invention.

【図2】溶射発熱体の表面温度を示すグラフ。FIG. 2 is a graph showing the surface temperature of a thermal spray heating element.

【符号の説明】[Explanation of symbols]

1:溶射発熱体、2:本体(SUS304)、3:電
極、4:スライダック、5:アンメータ、6:熱電対
1: Thermal spray heating element, 2: Main body (SUS304), 3: Electrode, 4: Slidac, 5: Ammeter, 6: Thermocouple

───────────────────────────────────────────────────── フロントページの続き (72)発明者 村田 好和 東京都大田区羽田旭町11番1号 株式会社 荏原製作所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yoshikazu Murata 11-1 Haneda-Asahi-cho, Ota-ku, Tokyo Inside EBARA CORPORATION

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 絶縁体基材と、該基材表面に導電性物質
をコーテングした絶縁又は半導体粒子からなる複合粒子
を溶射して形成した溶射皮膜とからなる溶射発熱体。
1. A thermal spray heating element comprising an insulating base material and a thermal spray coating formed by thermal spraying composite particles composed of insulating or semiconductor particles coated with a conductive substance on the surface of the insulating base material.
【請求項2】 絶縁体基材と、該基材表面に絶縁又は半
導体物質をコーテングした導電性粒子からなる複合粒子
を溶射して形成した溶射皮膜とからなる溶射発熱体。
2. A thermal spray heating element comprising an insulating base material and a thermal spray coating formed by thermal spraying composite particles comprising conductive particles obtained by coating an insulating or semiconductor material on the surface of the insulating base material.
【請求項3】 絶縁体の基材表面に、導電性物質をコー
テングした絶縁又は半導体粒子からなる複合粒子、又は
絶縁又は半導体物質をコーテングした導電性粒子からな
る複合粒子を溶射して、通電発熱させる溶射皮膜を形成
することを特徴とする複合粒子の溶射発熱体の製造法。
3. A conductive particle-coated composite particle composed of insulating or semiconductor particles coated with a conductive material, or a composite particle composed of conductive particles coated with an insulating or semiconductor material is sprayed on the surface of a base material of an insulator to generate heat when energized. A method for manufacturing a composite particle thermal spray heating element, which comprises forming a thermal spray coating.
JP26275592A 1992-09-07 1992-09-07 Spray heating element for composite particles and its manufacturing method Expired - Fee Related JP3216737B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26275592A JP3216737B2 (en) 1992-09-07 1992-09-07 Spray heating element for composite particles and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26275592A JP3216737B2 (en) 1992-09-07 1992-09-07 Spray heating element for composite particles and its manufacturing method

Publications (2)

Publication Number Publication Date
JPH06116701A true JPH06116701A (en) 1994-04-26
JP3216737B2 JP3216737B2 (en) 2001-10-09

Family

ID=17380143

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26275592A Expired - Fee Related JP3216737B2 (en) 1992-09-07 1992-09-07 Spray heating element for composite particles and its manufacturing method

Country Status (1)

Country Link
JP (1) JP3216737B2 (en)

Also Published As

Publication number Publication date
JP3216737B2 (en) 2001-10-09

Similar Documents

Publication Publication Date Title
US4808490A (en) Plasma sprayed film resistor heater
US2679569A (en) Electrically conductive film
EP0221531A3 (en) High heat conductive insulated substrate and method of manufacturing the same
JPH07282961A (en) Heater
US5922275A (en) Aluminum-chromium alloy, method for its production and its applications
CN212678358U (en) a heater
JPH11312570A (en) Ceramic heater
US4536645A (en) Solid-body heating unit
JP3033852B2 (en) Resistor and resistor paste composition for aluminum nitride heater
GB2344042A (en) Method of producing resistive heating elements on an uninsulated conductive substrate
JPH06116701A (en) Thermally sprayed heating element for composite particle and its production
CN112369686A (en) Heating device
CN212678357U (en) a smoking device
WO2002043439A1 (en) A method of producing electrically resistive heating elements having self-regulating properties
JP3108590U (en) Electrothermal film heating device
JPH01117287A (en) Far infrared radiation heating body and manufacture thereof
JPH027379A (en) Manufacture of heating plate
JPH05315053A (en) PTC thermistor heating device
JPS61134776A (en) Heat roll of copying machine
JP3281749B2 (en) Heat roller for fixing
JP3472010B2 (en) Heat resistant conductive material and composite material using the same
JP3367995B2 (en) Multilayer ceramic heater
JPH0945466A (en) Self temperature adjusting heating resistor material, conductive powder used therein, and self temperature adjusting heater using heating resistor material
JP2000195649A (en) Inorganic insulated heater and its manufacture
JPS6057662B2 (en) heating element

Legal Events

Date Code Title Description
S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080803

Year of fee payment: 7

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090803

Year of fee payment: 8

LAPS Cancellation because of no payment of annual fees