JPH0610853B2 - Method for producing magnetic member coated with carbon film - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION "Field of Use of the Invention" The present invention has an optical bandwidth of 1.0 eV or more, particularly 1.5 to 5.
Reinforcement of these magnetic members by coating carbon having 5.5 eV or a film containing carbon as a main component on the magnetic parts or the members for the magnetic head, especially on the slider parts (magnetic tape, magnetic disk, etc. where they rub against each other). And a composite to be obtained as a wear-resistant protective material against mechanical stress.

"Prior Art" Regarding the coating of a carbon film, a patent application "Composite having a carbon coating and a method for producing the same" filed by the present inventor (Japanese Patent Application No. 56-146936, filed Sep. 17, 1981) is known. Has been. However, these are merely general descriptions of the production method thereof, and the formation temperature thereof is substantially 200 ° C. or lower, preferably +150 to −100 ° C., and the ferrite and permalloy which are the surfaces to be formed are substantially cooled. No example is given of coating the slider portion of a magnetic material such as rare earth.

"Conventional problem" In the conventional example, it is said that the carbon film can be obtained only at a high temperature of 200 to 1000 ° C, and depending on the condition, the carbon film is at room temperature (the surface is heated up to about 150 ° C by plasma). Alternatively, there is no description that a sufficient hardness can be obtained even by a manufacturing method at a temperature lower than that.

"Means for Solving Problems" In the present invention, carbon or a film containing carbon as a main component is coated on a magnetic head member, particularly on a slider portion that is a portion to be rubbed with a magnetic tape or a magnetic disk, and the surface of the member is coated. It is intended to reinforce mechanical strength such as abrasion resistance. In particular, by introducing a hydrocarbon gas such as ethylene or methane into an atmosphere in which a plasma is generated by a direct current or a high frequency, in particular, a high frequency electric field in which a positive direct current bias is added to the substrate side, and decomposing it, a C--C bond is formed. As a result, instead of making non-translucent conductive or poorly conductive carbon such as graphite, the optical energy bandwidth (Eg) required by the manufacturing conditions is 1.
It is characterized by the formation of insulative carbon similar to diamond with 0 eV or higher, preferably 1.5-5.5 eV. Further, the carbon of the present invention has a Vickers hardness of 2000 Kg / mm ² or more, preferably 4500 Kg / mm ²
Above, ideally amorphous or amorphous having a diamond-like hardness of 6500 Kg / mm ² or 5 to 200
Carbon having a semi-amorphous (semi-amorphous) structure having microcrystallinity of Å size, or hydrogen or halogen element in the carbon is 25 atomic% or less, or III-valent or V-valent impurity is 5 atomic% or less, Further, a composite is provided in which carbon having carbon as a main component (hereinafter, simply referred to as carbon in the present invention) to which nitrogen is added at a concentration of N / C ≦ 0.05 is provided on a substrate. .

The present invention further forms the substrate on which this carbon is formed at a temperature lower than 200 ° C., preferably −100 to 150 ° C., which is 500 to 1500 ° C. lower than that of the conventionally known CVD method. Another feature is that we have found experimentally that coating is possible without deteriorating the characteristics and preventing the reaction occurring at the interface with the underlying material.

According to the present invention, boron, which is a trivalent impurity, is added to this carbon at a concentration of 0.1 to 5 atom%, P-type carbon is provided, and phosphorus and nitrogen, which are V-valent impurities, are similarly added. .1
Another feature is that the carbon on the upper surface of the substrate is made conductive by adding N-type carbon in a concentration of ˜5 atomic%.

Further, according to the present invention, a carbon film having a diamond bond is formed on the upper surface of a slider portion of a magnetic head member having a magnetic material such as a base material, particularly ferrite, permalloy, rare earth or amorphous component, and a large amount of this is produced. Roll-to-roll (roll)
It is to be manufactured by the method of "to roll (hereinafter referred to as RTR)".

The method for producing the composite used in the present invention will be described below with reference to the drawings.

Example 1 FIG. 1 shows an outline of an RTR type plasma CVD apparatus for forming carbon or a coating film containing carbon as a main component of the present invention.

In the drawing, in the doping system (10), hydrogen as a carrier gas is supplied from (11), a hydrocarbon gas which is a reactive gas such as methane or ethylene is supplied from (12), and diborane (diluted with hydrogen) as a trivalent impurity (13) is used. ), V-valent impurity ammonia or foshin is introduced into the reaction system (30) from the nozzle (25) through the valve (28) and the flow meter (29) from (14). Before reaching this nozzle, it is effective to add microwave energy at (26) for the activation of the reactive gas to preactivate it.

In the reaction system (30), from the first roll (4) to the second roll (5)
To the auxiliary rolls (6) and (7).

This auxiliary roll (7) is provided with a spring to give a certain tension (tension) so that the tape-shaped carrier does not have slack.
Equipped with (27). Between the auxiliary rolls, the first electrode (2),
Tape-shaped carrier (1) having a surface to be formed, second electrode
(3) with a high frequency electrode (1) between the pair of electrodes (2), (3).
5), electric energy is applied from the matching transformer (16) and the DC bias power source (17) to generate plasma (40).
Exhaust system (20) is pressure regulating valve (25), turbo molecular pump (2
2) Exhaust unnecessary gas through the rotary pump (23).

These reactive gases are 0.01 to 0.3 t in the reaction space (40).
Orr, for example, 0.1 torr, and energy of 0.1 to 5 KW can be added by electromagnetic energy of high frequency. DC bias is -200 to 600V (substantially -400 to + 400V
V) is added. This is because when the DC bias is zero, the self-bias has -200V (with the second electrode as the ground level). The reactive gas was partially diluted with hydrogen. For example methane or ethylene: hydrogen = 1:
I set it to 1. It has a first electrode cooling means (9) for cooling liquid
Insert it from (8) and discharge it to (8 ').
Hold at 0 to -100 ° C. Thus, by plasma, carbon having an amorphous structure or a microcrystalline structure having a Vickers hardness of 2000 kg / mm ² or more on the surface to be formed and having a large number of CC bonds with a thermal conductivity of 2.5 W / cm deg or more is generated. It was Furthermore, this electromagnetic energy supplies 50W ~ 1KW, 0.03 ~ 3W per unit area
Plasma energy of / cm ² was applied. When the plasma density was high, or when the reactive gas was previously excited by microwaves, it was possible to generate semi-amorphous carbon having a microcrystalline size of 5 to 200 Å. The film forming rate is 100 to 1000 A / min, and especially when the surface temperature is -50 to 150 ° C. and the DC bias is +100 to 300 V, the film forming rate is 100 to 200 A / min (microwave using methane Was used), 500-1000 A / min (when methane was used in the microwave or ethylene was used in the microwave).

All of these are considered to be good products only under the condition that the Vickers hardness is 2000 kg / mm ² or more. Of course, if graphite is the main component, it is extremely soft and black, which is completely different from the present invention.

This reaction product gas is cooled by the magnetic head member (1).
It is cooled by (9) and is formed as a film on this upper surface. The impurities after the reaction are exhausted from the exhaust system (20) through a turbo molecular pump and a rotary pump. Reaction system is 0.00
It is maintained at 1 to 10 torr, typically 0.01 to 0.5 torr, and a plasma state (40) is generated in the reaction system by the microwave (26) and high frequency energy (15). Especially when the excitation source is at a frequency of 1 GHz or higher, for example, 2.45 GHz, C
-H bond separates hydrogen, and frequency source is 0.1-50M
Hz For example, at a frequency of 13.56 MHz, C-C coupling, C =
C bond can be decomposed, -C-C- bond can be made, carbon unpaired bonds collide with each other to form covalent bond (diamond bond), and a stable diamond structure can be locally formed. .

Thus, on the magnetic material of the magnetic head and the metal or the magnetic material of the slider portion of the magnetic head member, carbon, particularly carbon containing 25 mol% or less of hydrogen, or carbon having P, I or N type conductivity is mainly used. A coating film as a component could be formed.

Example 2 FIGS. 2 (A), (B-1) and (B-2) are examples of a magnetic head using carbon obtained by the manufacturing method of Example 1 or a member therefor. That is, the magnetic head member is arranged in a tape shape on the tape or the tape-shaped carrier. This is the first
Carbon (50) is 0.03 to 3 μm on the upper surface by the RTR method shown in the figure.
It is preferably provided in a thickness of 0.1 to 0.5 μm. Further, after coating the carbon film (50), the magnetic head member (41) was removed from the tape-shaped carrier. A part of the magnetic head or other different material such as a magnetic tape or a magnetic disk is extremely effective in improving the wear resistance of the member of the slider portion which runs by rubbing its surface. Especially, this carbon film has a thermal conductivity of 2.5 W / cmde.
g or more, typically 4.0 to 6.0 W / cmdeg, which is close to 6.0 W / cmdeg of diamond, so that the heat generated by the high-speed tape-shaped carrier running is uniformly dissipated to the whole,
Since it is possible to prevent the local temperature rise and the characteristic deterioration of the magnetic head due to the temperature rise, many characteristics such as abrasion resistance, high thermal conductivity, and high smoothness peculiar to the carbon film are effectively used in combination.

[Embodiment 3] FIG. 2A shows an example of writing, reading, or the head for a tape.

Magnetic body using Mn-Zn ferrite of this magnetic head (41)
On the slider part (42) in (43), carbon or a film (50) containing carbon as a main component was coated to a thickness of 0.1 to 0.5 μm. Then, the life could be improved to 5 times as compared with the case without coating. This drawing is
An example of a drawing of a 1 / 2-inch VTR magnetic head is shown.

Especially when the carbon film is not coated, the Vickers hardness of the slider part is only 800 Kg / mm ² , so it is 2000 Kg / mm 2.
The effect for improving the slip of the tape or the like on the surface is remarkable as well as it can be improved to ² or more.

Example 4 FIGS. 2 (B-1) and (B-2) show an example of a thin film magnetic head. FIG. 2 (B-1) is a front view and (B-2) is a side view. This magnetic head has a track width of 25 μm and a slider portion gap length of 0.1 μm.
6μm, flying height of 0μm, inductance of 100mH or less (1M
Hz) and an output voltage of 0.3 mV or more ((1MHz). The magnetic material (43) has a thickness of 0.05 to 0.3 μm on the slider portion (42) of carbon or a portion (50) containing carbon as a main component. Then, the wear resistance of this thin film head could be extended three times or more.

"Effect" As is apparent from the above description, the present invention forms an organic resin or glass, a magnetic material, a metal or a ceramic on the organic resin, and uses carbon or carbon as a main component on the surface of the magnetic head member or the entire magnetic head. It is provided by coating the film. The industrial value of this composite is immeasurable because it can promote slipping and improve abrasion resistance as seen in many other examples. In particular, while this carbon can be formed at a low temperature of 150 ° C or lower, its hardness and adhesion to the substrate are extremely excellent.

In addition, the magnetic material is rare earth magnets such as Samallium and cobalt,
Amorphous magnetic material, iron oxide or nickel on it,
It may be an anisotropic magnetic material coated with chromium or the like or a ferrite magnetic material.

[Brief description of drawings]

FIG. 1 shows an outline of a roll-to-roll type manufacturing apparatus for forming carbon or a coating film containing carbon as a main component on the surface to be formed of the present invention. 2 (A), (B-1) and (B-2) show examples of the composite of the present invention.

Claims (1)

[Claims] 1. A step of temporarily attaching or disposing a magnetic member having a slider portion on the surface of a tape-shaped carrier, and the roll while moving these members and the tape-shaped carrier from a first roll to a second roll. DC or high frequency voltage is applied between the first electrode disposed on the back side of the tape-shaped carrier and the second electrode disposed on the surface side of the tape-shaped carrier facing the electrode. Then, plasma is generated to cause decomposition reaction with the hydrocarbon gas or the additive gas in addition to this, and the carbon film or the carbon to which the additive of boron, phosphorus or nitrogen is added is deposited on the slider portion. Magnetic film coated with a carbon film, which comprises a step of forming a film containing carbon as a main component having a covalent bond, and a step of thereafter separating the member from the tape-shaped carrier. A method for manufacturing a member.