JPH0596600U - Transport device - Google Patents

Abstract

(57) [Abstract] [Purpose] To provide a transfer device in which the impact at the beginning of engagement between a rack and a pinion is effectively mitigated. [Structure] A steel ball 12 is pressed by a spring 14 to a tooth portion of a pinion 4 which is not yet meshed with a replaceable secondary rack 11 on a trolley 1, and an angle of the pinion 4 is set to an angle at which the secondary rack 11 can be favorably engaged. I tried to regulate it.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a transfer device suitable for transferring a substrate of a plasma CVD device.

[0002]

[Prior Art]

 An example of this kind of conveying device is shown in FIG. The substrate is placed on a hanger (not shown) provided on the carriage 1. A guide roller (not shown) is attached to the carriage 1 and is movably positioned with respect to the guide rail 2 so that the positions of the respective steps provided in the vacuum container of the CVD apparatus can be sequentially moved. It has become.

The driving force for the movement is given from a pinion 4 that meshes with a rack 3 attached to the side surface of the truck 1, and the rack 3 is guided by a guide as the truck 1 moves in the arrow direction. It is designed to mesh with the pinions 4 installed along the rail 2 in sequence.

One or two pinions 4 are always engaged with one trolley 1. The shaft 5 of each pinion 4 is driven by penetrating to the outside of the vacuum container via a rail (not shown). It is connected to the motor.

[0005]

[Problems to be solved by the device]

 In the transfer device as described above, as the carriage moves, the plurality of pinions installed along the guide rails sequentially engage with each other.

[0006] Therefore, the bogie is sent to the pinion that was in a free state without engaging with anything, and when the rack starts to engage with the pinion, the bogie receives a large impact, which causes the hanger to move upward. There was a problem that the substrate placed on the substrate was misaligned or dropped.

Such an inconvenience becomes particularly noticeable when the angle of the pinion when it is stopped in a free state before the meshing starts is a specific angle described later.

FIG. 4 shows how the rack 3 and the pinion 4 engage with each other when they start to engage with each other. In the figures (a) to (f), the angle of the pinion 4 is changed by 1/6 pitch, and it can be seen that the rack 3 that has advanced in the direction of the arrow hits the pinion 4 that is stopped. Further, in (a) and (b), it is understood that the leading tooth 3a of the rack 3 has an angle at which it comes into contact with the tip portion of the pinion 4, so that it cannot be bitten in properly.

Since the original meshing start point between the rack 3 and the pinion 4 occurs on the meshing line L drawn obliquely in the figure, even in the case of (c) to (f) where the tooth tips do not contact each other, It will be engaged about one pitch from the beginning of the next engagement. Due to these causes, a shock occurs at the beginning of engagement.

Further, in the involute gear, since the slip ratio and the contact surface pressure become maximum at the point where meshing starts (when it is assumed that only one tooth is responsible for the load), the tooth starting meshing at a point before that Since it is used under severe conditions, the wear is great.

Therefore, the wear of the rack 3 attached to the truck 1 is concentrated on the leading teeth 3a, and the rack 3 can be replaced with a short life even though the wear of the rack 3 has not progressed so much. Was needed.

[0012]

[Means for Solving the Problems]

 In order to solve the above-mentioned problems, a first invention is to provide a carriage that is movably supported by a guide device, a rack attached to the outer surface of the carriage along the movement direction, and a pinion that engages with the rack. And a plurality of the pinions are provided at intervals shorter than the length of the rack and the moving distance of the carriage is larger than the length of the rack, a pinion that is not engaged with the rack is stopped. It is characterized in that it is provided with a means for regulating the angle at which it moves.

A second invention is provided with a carriage movably supported by a guide device, a rack attached to an outer surface of the carriage along the movement direction, and a pinion engaging with the rack, In a transport device in which a plurality of the pinions are provided at intervals shorter than the length of the rack and a moving distance of the carriage is larger than the length of the rack, the pinion is located in front of the rack when viewed in the moving direction of the carriage. A pawl member that meshes directly or indirectly with the pinion is elastically supported on the trolley located.

[0014]

[Action]

 According to the first invention, when the pinion is not meshed with the rack, the pinion is always held at an angle capable of meshing with the rack, that is, the angles (c) to (f) in FIG. The tooth tip and the rack are prevented from hitting each other.

According to the second invention, even when the pinion and the claw member are in contact with each other at an angle in which they cannot be engaged with each other, the impact is relieved by the escape of the claw member. Then, the pinion in which the claw member engaged with the pinion is in a free state is rotated so as to start engaging with the advancing rack on the original engagement line L (see FIG. 4).

[0016]

【Example】

 An embodiment of the present invention will be described with reference to the accompanying drawings. The same members as those of the conventional technique shown in FIG. 5 are designated by the same reference numerals, and detailed description thereof will be omitted.

FIG. 1 shows a first embodiment of the present invention. A stainless steel main rack 10 and a plastic (polyetheretherketone) auxiliary rack 11 located in front of the stainless steel main rack 10 are mounted on the upper surface of the trolley 1, and the auxiliary rack 11 can be easily replaced. It has become.

The steel ball 12 is positioned by the guide tube 13 and pressed by the spring 14 with respect to the stainless steel pinion 4 that meshes with the main and auxiliary racks 10 and 11.

The shaft (not shown) to which the pinion 4 is attached penetrates to the outside of the vacuum container via a rail (not shown), and is attached to the motor via a clutch (not shown).

Therefore, when the pinion 4 is not meshed with the main rack 10 and the sub rack 11, the pinion 4 can be freely rotated by disengaging the clutch. At this time, since the steel ball 12 is pressed against the tooth portion of the pinion 4 by the spring 14, the pinion 4 has a certain angle (corresponding to the angle of (c) to (f) in FIG. 4). ) To stop.

With the above angle, the advanced tip of the auxiliary rack 11 and the tooth tip of the pinion 4 do not contact each other, and the tooth surface of the auxiliary rack 11 and the tooth surface of the pinion 4 always contact each other. As a result, the impact that the sub rack 11 receives is reduced.

Further, since the material of the auxiliary rack 11 is made of a material having a hardness lower than that of the pinion 4, wear of the pinion 4 can be suppressed to a small level. By the way, the top teeth of the sub rack 11 may start to come into contact with the front teeth before the original start point of the engagement, so that the wear becomes large. In this case, the main rack 10 is left and only the sub rack 11 is replaced. do it.

FIG. 2 shows a second embodiment of the present invention. An L-shaped holder 16 extends forward from the tip of the stainless steel rack 15 on the trolley 1, and a plastic (polyimide) claw 18 is made to correspond to the rack tooth pitch via a leaf spring 17 on this holder 16. Installed.

According to this, when the rack 15 advances, the claws 18 first come into contact with the teeth of the pinion 4 made of stainless steel. At this time, depending on the angle of the pinion 4, the claw 18 may come into contact with the tooth tip portion of the pinion 4, but at this time, the leaf spring 17 supporting the claw 18 bends and is buffered. Then, after the claw 18 engages with the pinion 4, the pinion 4 is rotated to an angle at which the pinion 4 starts to engage on the original engagement line as the rack 15 advances.

FIG. 3 shows a third embodiment of the present invention. A holder 20 extended from a stainless steel rack 15 is provided with a claw 22 rotatably supported around a pin 21.

The claw 22 is made of stainless steel having a surface coated with a solid lubricant film, and the portion engaging with the pinion 4 has a shape in which the pitch of the rack teeth is extended. Then, one end of the claw 22 is pushed toward the pinion 4 side by the compression spring 23, and the stopper 24 provided on the other end stops at a position where it comes into contact with the holder 20.

According to this, when the rack 15 advances, the claws 22 first come into contact with the teeth of the pinion 4. At this time, depending on the angle of the pinion 4, the claw 22 may contact the tooth tip portion of the pinion 4, but the compression spring 23 supporting the claw 22 bends so that the claw 22 rotates around the pin 21. The shock is alleviated because it rotates to and moves away from the pinion 4. Then, after the claw 22 engages with the pinion 4, the pinion 4 is rotated in accordance with the progress of the rack 15 as in the second embodiment. Further, in this embodiment, the position of the claw 22 is positioned more accurately than in the case where the claw 22 is supported by the leaf spring (see 17 in FIG. 2), so that the rotation of the pinion 4 is aligned with the teeth of the rack 15. Accuracy is improved.

[0028]

[Effect of the device]

 As described above, according to the present invention, the impact when the rack and the pinion engage with each other is reduced. In addition, it is possible to prevent breakage and indentation of teeth that accompany it. Furthermore, in the long run, the frequency of replacement of the entire rack due to damage to the tip of the rack can be reduced, and the wear and damage of the pinion, which is not easy to replace, can be reduced, improving the operating rate of the equipment.

[Submission date] October 15, 1992

[Procedure Amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0004

[Correction method] Change

[Correction content]

[0004] For the single bogie 1, always Ri Contact mesh is one or two pinion 4, the shaft 5 of each pinion 4 through the vacuum vessel outside through the sheet Lumpur not shown Connected to the drive motor.

[Procedure Amendment 2]

[Document name to be amended] Statement

[Name of item to be corrected] 0019

[Correction method] Change

[Correction content]

[0019] Incidentally, the shaft (not shown) is attached to the pinion 4, penetrates into the vacuum chamber outside through the sheet Lumpur not shown, where, is attached to the motor via a clutch (not shown).

[Brief description of drawings]

FIG. 1 is a conceptual diagram showing a first embodiment of the present invention.

FIG. 2 is a conceptual diagram showing a second embodiment of the present invention.

FIG. 3 is a conceptual diagram showing a third embodiment of the present invention.

FIG. 4 is a diagram showing a meshed state of a rack and a pinion for showing a cause of occurrence of impact due to meshing.

FIG. 5 is a perspective view showing a conventional transfer device.

[Explanation of symbols]

 1 bogie 4 pinion 10 main rack 11 sub rack 12 steel ball 14 spring 15 rack 17 leaf spring 18 claw 22 claw 23 compression spring

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[Procedure amendment]

[Submission date] October 15, 1992

[Procedure 3]

[Document name to be corrected] Drawing

[Name of item to be corrected] Fig. 4

[Correction method] Change

[Correction content]

[Figure 4]

Claims (4)

[Scope of utility model registration request] 1. A trolley movably supported by a guide device, a rack attached to an outer surface of the trolley along the moving direction, and a pinion meshing with the rack, the pinion being a length of the rack. In a transporting device in which a plurality of carriages are provided at intervals shorter than the length and the travel distance of the carriage is larger than the length of the rack, a means for regulating the angle when the pinion not meshing with the rack stops is provided. Characteristic transport device. 2. The transfer device according to claim 1, wherein the teeth of the leading portion of the rack are replaceable when viewed in the direction of movement of the carriage. 3. The conveying device according to claim 2, wherein the replaceable tooth material has a hardness lower than that of the pinion. 4. A bogie movably supported by a guide device, a rack attached to an outer surface of the bogie along the moving direction, and a pinion meshing with the rack, the pinion being a length of the rack. In a transport device in which a plurality of trolleys are provided at a distance shorter than the length and the travel distance of the trolley is greater than the length of the rack, the pinion is directly mounted on the trolley located in front of the rack when viewed in the movement direction of the trolley. Alternatively, a conveying device is characterized in that a claw member that indirectly engages is elastically supported.