JPH0568846A - Condenser for halon-based solvent vapor - Google Patents
Condenser for halon-based solvent vaporInfo
- Publication number
- JPH0568846A JPH0568846A JP3231782A JP23178291A JPH0568846A JP H0568846 A JPH0568846 A JP H0568846A JP 3231782 A JP3231782 A JP 3231782A JP 23178291 A JP23178291 A JP 23178291A JP H0568846 A JPH0568846 A JP H0568846A
- Authority
- JP
- Japan
- Prior art keywords
- halon
- pipe
- condensing
- based solvent
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Treating Waste Gases (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、ハロン系溶剤蒸気中の
ハロン成分の凝縮装置に関し、特に、ハロン系溶剤を含
む蒸気流中からハロン成分を効率良く凝縮して回収する
ことができるハロン系溶剤蒸気の凝縮装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a condensing device for halon components in a halon solvent vapor, and more particularly to a halon component capable of efficiently condensing and recovering halon components from a vapor stream containing a halon solvent. The present invention relates to a solvent vapor condenser.
【0002】[0002]
【従来の技術】トリクロロエチレン、テトラクロロエチ
レン、クロロホルム、四塩化炭素等のハロン系溶剤は、
電気・機械部品の洗浄剤、ドライクリーニングの洗浄
剤、有機物の溶剤等として多量に使用されている。これ
らの物質は、動物実験で発ガン性、肝障害が認められて
おり、ハロン系溶剤の使用による大気、水質等の環境汚
染が社会的に問題となっている。これらのことから、ハ
ロン系溶剤の使用により発生する排気ガス、廃液中のハ
ロン成分は、回収して再利用することが望まれている。2. Description of the Related Art Halon solvents such as trichloroethylene, tetrachloroethylene, chloroform and carbon tetrachloride are
It is widely used as a cleaning agent for electric and mechanical parts, a cleaning agent for dry cleaning, and a solvent for organic substances. Carcinogenicity and liver damage have been observed in these substances in animal experiments, and environmental pollution such as air and water quality due to the use of halon-based solvents has become a social problem. From these facts, it is desired to collect and reuse the exhaust gas generated by using the halon-based solvent and the halon component in the waste liquid.
【0003】ハロン系溶剤を加熱等して発生する蒸気
流、排気ガス等の気体中のハロン成分の回収法として
は、その気体をコンデンサー中で加圧しながら冷却して
ハロン成分を液化する加圧/冷却凝縮法、多孔性の吸着
剤に吸着させる吸着法、高沸点溶剤に吸収させる吸収法
等が実用化されている。特に、加圧/冷却凝縮法は、各
種ハロンやフロンの如き揮発性の高い溶剤や冷媒の回収
法して広く利用されている。As a method of recovering a halon component in a gas such as a vapor flow generated by heating a halon-based solvent or an exhaust gas, pressurization for liquefying the halon component by cooling the gas while pressurizing the gas in a condenser. A cooling / condensation method, an adsorption method of adsorbing on a porous adsorbent, an absorption method of adsorbing on a high boiling point solvent, etc. have been put into practical use. In particular, the pressure / cooling condensation method is widely used as a method for recovering highly volatile solvents and refrigerants such as various halons and freons.
【0004】[0004]
【発明が解決しようとする課題】しかし、上記方法で使
用している既存のコンデンサーは、冷媒ガスを通導する
冷却コイル等をコンデンサーのタンク内に装備する冷却
方式であるため、ハロンやフロン成分を凝縮させる際の
熱交換効率が冷却コイル等の表面積に依存されやすく、
ハロンやフロン成分を含有する気体の排気量が多い場合
やこれらの成分の含有量が低い場合には、コンデンサー
装置を全体的に大型化する必要がある。その結果、装置
の据付面積を広く要し、かつ、装置の制作費、稼働費等
がコスト高となる。また、ハロンやフロン成分を含む気
体中の水分量が多い場合には、冷却コイル等の表面に水
分が凍結しやすく、凝縮効率を著しく悪くする。However, since the existing condenser used in the above method is a cooling system in which a cooling coil or the like for conducting a refrigerant gas is installed in the condenser tank, a halon or freon component is used. The heat exchange efficiency when condensing is easily dependent on the surface area of the cooling coil,
If the amount of exhaust gas containing halon or freon components is large or the amount of these components is low, it is necessary to upsize the condenser device as a whole. As a result, a large installation area is required for the device, and the production cost and operating cost of the device become high. Further, when the amount of water in the gas containing halon or freon components is large, the water easily freezes on the surface of the cooling coil or the like, and the condensation efficiency is significantly deteriorated.
【0005】本発明は、上述した点に鑑みてなされたも
ので、凝縮管内に通導させたハロン系溶剤蒸気流中のハ
ロン成分を加圧/冷却下で効率良く凝縮させて回収する
ハロン系溶剤蒸気の凝縮装置を提供することを目的とす
るものである。The present invention has been made in view of the above-mentioned points, and is a halon system for efficiently condensing and recovering halon components in a halon-based solvent vapor stream introduced into a condenser pipe under pressure / cooling. It is an object of the present invention to provide a condenser for solvent vapor.
【0006】[0006]
【課題を解決するための手段】そのために本発明のハロ
ン系溶剤蒸気の凝縮装置は、ハロン系溶剤を含む蒸気を
排気する回転ポンプと、該回転ポンプに接続して前記蒸
気流を通導させハロン成分を凝縮させて他の気体成分と
分離させるための凝縮管、該凝縮管に接続され凝縮管内
の圧力と気流及び液流の方向を調節する複数個の調整バ
ルブと、前記凝縮管を冷却するための冷却槽と、前記凝
縮管の排出口に接続して凝縮されたハロン成分をトラッ
プするための冷却トラップを備え、前記回転ポンプの吐
出圧を利用して前記凝縮管内部を加圧するとともに前記
冷却槽を介して冷却することにより凝縮管内に通導させ
たハロン系溶剤を含む蒸気流中のハロン成分を加圧と冷
却して凝縮させて回収することを特徴とする。To this end, a condensing device for halon-based solvent vapor according to the present invention comprises a rotary pump for exhausting vapor containing a halon-based solvent and a rotary pump connected to the rotary pump to conduct the vapor flow. A condensing pipe for condensing the halon component to separate it from other gas components, a plurality of adjusting valves connected to the condensing pipe for adjusting the pressure in the condensing pipe and the direction of the air flow and the liquid flow, and cooling the condensing pipe. And a cooling trap for trapping condensed Halon components by connecting to a discharge port of the condensing pipe, and pressurizing the inside of the condensing pipe by using the discharge pressure of the rotary pump. It is characterized in that the halon component in the vapor stream containing the halon solvent introduced into the condenser by cooling through the cooling tank is pressurized and cooled to be condensed and recovered.
【0007】[0007]
【作用】本発明のハロン系溶剤蒸気の凝縮装置では、真
空ポンプの吐出圧を利用して前記凝縮管内部を加圧する
とともに前記冷却槽を介して冷却するので、ハロン系溶
剤を含む気体中のハロン成分が空気等の気体成分に比べ
て比重が大きく、かつ、加圧/冷却下で液化し易い物性
を利用し、その凝縮管内に通導させたハロン系溶剤蒸気
流中のハロン成分を加圧/冷却下で効率良く凝縮させて
回収することができる。In the halon-based solvent vapor condensing device of the present invention, the discharge pressure of the vacuum pump is used to pressurize the inside of the condensing pipe and cool it through the cooling tank. The halon component has a larger specific gravity than gas components such as air, and the physical properties that make it easy to liquefy under pressure / cooling are used to add the halon component in the halon-based solvent vapor flow introduced into the condensing pipe. It can be efficiently condensed and recovered under pressure / cooling.
【0008】[0008]
【実施例】以下、本発明の一実施例を図面に基づき詳述
する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the drawings.
【0009】図1は本発明のハロン系溶剤蒸気の凝縮装
置の1実施例を示す側断面図、図2は金属性円筒管2を
5列に並列に配管した場合における凝縮管1を上方から
見た図であり、1は凝縮管、2は金属製円筒管、3a〜
3gは金属製接続管、4は冷却槽、5a〜5cは調整バ
ルブ、6はドレンバルブ、7は回転ポンプ、8はバッフ
ァータンク、9aは排出口、9bは排出口、10は冷却
トラップ、11はドレン口、12はハロン系溶剤蒸気の
発生源を示す。FIG. 1 is a side sectional view showing an embodiment of a condensing device for halon-based solvent vapor according to the present invention, and FIG. 2 shows the condensing pipe 1 when the metallic cylindrical pipes 2 are arranged in parallel in five rows. It is the figure seen, 1 is a condensing pipe, 2 is a metal cylindrical pipe, 3a-
3 g is a metal connecting pipe, 4 is a cooling tank, 5a to 5c are adjusting valves, 6 is a drain valve, 7 is a rotary pump, 8 is a buffer tank, 9a is an outlet, 9b is an outlet, 10 is a cooling trap, 11 Indicates a drain port, and 12 indicates a source of halon-based solvent vapor.
【0010】図1において、凝縮管1は、冷却槽4内に
配置され、金属製接続管3a〜3gを用いて熱交換面積
が大きく、耐圧性に優れた複数の金属製円筒管2を直列
に配列配管したものである。この凝縮管1では、金属製
接続管3aを通して発生源12より発生したハロン系溶
剤蒸気を前段の金属製円筒管2に導入し、上部の金属製
接続管3bと下部の金属製接続管3cを交互に配置して
蛇行するように複数の金属製円筒管2を直列に接続する
と共に、それぞれの金属製円筒管2の下端に金属製接続
管3dを接続して金属製接続管3eで共通接続してい
る。そして、この下端の金属製接続管3eからハロン成
分の凝縮液を回収し、最終段の金属製円筒管2の上部に
金属製接続管3fを接続してハロン成分を除去した気体
を放出するように構成している。In FIG. 1, a condensing pipe 1 is arranged in a cooling tank 4, and a plurality of metal cylindrical pipes 2 having a large heat exchange area and excellent pressure resistance are connected in series by using metal connecting pipes 3a to 3g. It is an array of pipes. In this condensing pipe 1, the halon-based solvent vapor generated from the source 12 is introduced into the metal cylindrical pipe 2 in the preceding stage through the metal connecting pipe 3a, and the upper metal connecting pipe 3b and the lower metal connecting pipe 3c are connected. A plurality of metallic cylindrical tubes 2 are connected in series so as to be alternately arranged and meandered, and a metallic connecting tube 3d is connected to the lower end of each metallic cylindrical tube 2 to be commonly connected by a metallic connecting tube 3e. is doing. Then, the condensate of the halon component is collected from the metal connecting pipe 3e at the lower end, and the metal connecting pipe 3f is connected to the upper part of the final stage metal cylindrical pipe 2 so that the gas from which the halon component is removed is discharged. Is configured.
【0011】冷却槽4は、5℃〜−40℃に冷却された
流液が供給され、凝縮管1に導入されたハロン系溶剤蒸
気を冷却することによって、ハロン成分を凝縮分離させ
るものである。凝縮管1の給気口である金属製接続管3
aには、圧力緩衝用のバッファータンク8を介してオイ
ルレス真空ポンプの如き回転ポンプ7が接続されてい
る。凝縮管1の出口部の金属製接続管3fと3eには、
調整バルブ5a〜5cとドレンバルブ6が接続され、排
出口9aには凝縮液をトラップするための冷却トラップ
10が接続されている。排出口9bは空気等の気体の排
気口であり、ドレン口11は、水分などの排出口であ
る。発生源12は、電気・機械部品の洗浄装置やドライ
クリーニング装置等のハロン系溶剤蒸気の発生源であ
る。The cooling tank 4 is supplied with the liquid stream cooled to 5 ° C. to −40 ° C., and cools the halon-based solvent vapor introduced into the condenser pipe 1 to condense and separate the halon components. .. Metal connecting pipe 3 which is the air supply port of the condensing pipe 1.
A rotary pump 7 such as an oilless vacuum pump is connected to a via a buffer tank 8 for buffering pressure. In the metal connecting pipes 3f and 3e at the outlet of the condensing pipe 1,
The adjustment valves 5a to 5c and the drain valve 6 are connected to each other, and the discharge port 9a is connected to a cooling trap 10 for trapping the condensate. The exhaust port 9b is an exhaust port for gas such as air, and the drain port 11 is an exhaust port for water. The generation source 12 is a generation source of halon-based solvent vapor such as a cleaning device for electric / mechanical parts and a dry cleaning device.
【0012】次に動作を説明する。上述した如き構成に
おいて、発生源12により発生したハロン系溶剤蒸気
は、回転ポンプ7により吸引されバッファータンク8を
介して凝縮管1に導入される。該凝縮管1内において、
調整バルブ5a〜5cを調整して回転ポンプ7の吐出圧
により前記蒸気流を加圧するとともに、冷却槽4を介し
て冷却することにより前記蒸気流中のハロン成分を凝縮
し、空気等の気体成分と分離する。Next, the operation will be described. In the configuration as described above, the halon-based solvent vapor generated by the generation source 12 is sucked by the rotary pump 7 and introduced into the condensing pipe 1 via the buffer tank 8. In the condensing tube 1,
The adjusting valves 5a to 5c are adjusted to pressurize the vapor flow by the discharge pressure of the rotary pump 7, and the Halon component in the vapor flow is condensed by cooling through the cooling tank 4 to a gas component such as air. And separate.
【0013】前記凝縮管1の中で凝縮されたハロン成分
の凝縮液は、金属製接続管3d、3eより調整バルブ5
aを通して排出口9aから冷却トラップ10に導かれて
液体として回収される。また、空気等の気体成分の大部
分は、凝縮管1の排出口9bより大気中に放出される。
この際、凝縮管1の調整バルブ5bを閉じ、5aと5c
を調整して開放することにより、空気等の気体成分は、
排出口9aから冷却トラップ10を経て大気中に放出さ
せることもできる。また、ハロン系溶剤蒸気中に含まれ
る水分は、凝縮管1内の圧力と温度を調整することによ
り、凝縮管1の内壁に凍結させることも、前記ハロン成
分の凝縮液と共に冷却トラップ10に液体としてトラッ
プすることもできる。The condensate of the halon component condensed in the condensing pipe 1 is supplied from the metal connecting pipes 3d and 3e to the adjusting valve 5.
It is guided to the cooling trap 10 from the discharge port 9a through a and is recovered as a liquid. Most of the gas components such as air are discharged into the atmosphere from the outlet 9b of the condenser pipe 1.
At this time, the adjusting valve 5b of the condensing pipe 1 is closed and 5a and 5c are closed.
By adjusting and opening, the gas components such as air
It can also be discharged from the discharge port 9a into the atmosphere through the cooling trap 10. Further, the water contained in the halon-based solvent vapor can be frozen on the inner wall of the condensing pipe 1 by adjusting the pressure and temperature in the condensing pipe 1, and can be liquid in the cooling trap 10 together with the condensate of the halon component. Can also be trapped as
【0014】上記した如く、水分を凝縮管1の内壁に凍
結させた場合は、適時該凝縮管1の内部を加温すること
により、水分は液体として凝縮管1のドレン口11より
排出される。As described above, when water is frozen on the inner wall of the condensing tube 1, the water is discharged as a liquid from the drain port 11 of the condensing tube 1 by heating the inside of the condensing tube 1 at appropriate times. ..
【0015】なお、本発明は、上記の実施例に限定され
るものではなく、種々の変形が可能である。例えば上記
の実施例では、金属製接続管3b、3cを用いて金属製
円筒管2を直列に配列配管する際に、金属製円筒管2の
上端、下端より中寄りを接続部としたが、上端、下端を
接続部としてもよい。また、金属製円筒管、金属製接続
管を用いたが、金属製でなく合成樹脂や新素材を使った
円筒管を用いてもよいことはいうまでもない。さらに、
入口部と出口部との間で凝縮管1を1列にして配列配管
したが、複数列にして配列配管するように構成してもよ
い。金属性円筒管2を5列に並列に配管した場合におけ
る凝縮管1を上方から見た図が図2である。例示した如
く金属製円筒管2と金属製接続管3a〜3gを組み合わ
せて配列配管し凝縮管1を構成することにより、凝縮管
1の大きさ、形状等幾多の変更が可能であり、ハロン系
溶剤蒸気の必要処理容量に応じて凝縮管の凝縮能力を高
めることができる。The present invention is not limited to the above embodiment, but various modifications can be made. For example, in the above embodiment, when the metal cylindrical pipes 2 are arranged in series by using the metal connecting pipes 3b and 3c, the middle of the upper end and the lower end of the metal cylindrical pipe 2 is used as the connecting portion. The upper end and the lower end may be used as the connecting portion. Further, although the metal cylindrical pipe and the metal connecting pipe are used, it goes without saying that a cylindrical pipe made of synthetic resin or a new material instead of metal may be used. further,
Although the condensing pipes 1 are arranged and arranged in one line between the inlet part and the outlet part, they may be arranged in plural lines and arranged. FIG. 2 is a view of the condensing pipe 1 viewed from above when the metallic cylindrical pipes 2 are arranged in parallel in five rows. By arranging the condensing pipe 1 by combining the metallic cylindrical pipe 2 and the metallic connecting pipes 3a to 3g as illustrated, the condensing pipe 1 can be modified in various sizes and shapes. The condensing capacity of the condenser tube can be increased according to the required processing capacity of the solvent vapor.
【0016】[0016]
【発明の効果】以上詳述した如く、本発明は、金属製円
筒管を配列配管した凝縮管により、該凝縮管にハロン系
溶剤を含む蒸気流を導通させ、加圧と冷却により揮発性
が高くかつ、比重の大きいハロン成分を効率良く凝縮さ
せて他の気体成分から分離して回収することができる。
しかも、既存の加圧/冷却型コンデンサーと比較して、
金属製円筒管を配列配管した凝縮管を使用しているた
め、熱交換表面積を広くとることができ、加圧及び冷却
し易く、コンパクトで耐圧性に優れ、かつ、凝縮効率が
良いハロン系溶剤蒸気の凝縮装置を作製することができ
る。また、ハロン系溶剤蒸気中に含まれる水分は、凝縮
管内の圧力と冷却温度を調整することにより、表面積の
広い凝縮管の内壁に凍結させることも、ハロン成分の凝
縮液と共に液体としてトラップすることもできる。その
ため、既存の加圧/冷却型コンデンサーと比べて、水分
の凍結による熱交換効率の低下を少なくすることができ
る。更に、本発明で使用している凝縮管は、金属製円筒
管と金属製接続管を組み合わせた構造をとっているた
め、該凝縮管の大きさ、配列方法等の形状において幾多
の変更が可能であり、ハロン系溶剤蒸気の必要処理容量
に応じたコンパクトで効率の良い凝縮装置を作製するこ
とができる。As described above in detail, according to the present invention, a vaporizing flow containing a halon-based solvent is conducted to the condensing pipe by a condensing pipe in which metal cylindrical pipes are arranged, and the volatility is increased by pressurizing and cooling. It is possible to efficiently condense a halon component having a high specific gravity and to separate and collect it from other gas components.
Moreover, compared to existing pressure / cooling type condensers,
Since a condensing pipe in which metal cylindrical pipes are arranged is used, the heat exchange surface area can be wide, it is easy to pressurize and cool, it is compact and has excellent pressure resistance, and the halon-based solvent has good condensation efficiency. A vapor condensing device can be made. In addition, the water contained in the halon-based solvent vapor can be frozen on the inner wall of a condenser tube with a large surface area by adjusting the pressure and cooling temperature in the condenser tube, or trapped as a liquid together with the condensate of the halon component. You can also Therefore, it is possible to reduce a decrease in heat exchange efficiency due to freezing of water as compared with the existing pressure / cooling type condenser. Furthermore, since the condensing pipe used in the present invention has a structure in which a metal cylindrical pipe and a metal connecting pipe are combined, many changes can be made in the size of the condensing pipe, the arrangement method, and the like. Therefore, it is possible to manufacture a compact and efficient condensing device according to the required processing capacity of the halon-based solvent vapor.
【図1】 本発明のハロン系溶剤蒸気の凝縮装置の1実
施例を示す側断面図である。FIG. 1 is a side sectional view showing an embodiment of a condensing device for halon-based solvent vapor according to the present invention.
【図2】 金属性円筒管2を5列に並列に配管した場合
における凝縮管1を上方から見た図である。FIG. 2 is a view of the condensing pipe 1 when the metallic cylindrical pipes 2 are arranged in parallel in five rows as viewed from above.
1…凝縮管、2…金属製円筒管、3a〜3g…金属製接
続管、4…冷却槽、5a〜5c…調整バルブ、6…ドレ
ンバルブ、7…回転ポンプ、8…バッファータンク、9
a…排出口、9b…排出口、10…冷却トラップ、11
…ドレン口、12…ハロン系溶剤蒸気の発生源DESCRIPTION OF SYMBOLS 1 ... Condensing pipe, 2 ... Metal cylindrical pipe, 3a-3g ... Metal connecting pipe, 4 ... Cooling tank, 5a-5c ... Regulator valve, 6 ... Drain valve, 7 ... Rotary pump, 8 ... Buffer tank, 9
a ... outlet, 9b ... outlet, 10 ... cooling trap, 11
… Drain port, 12… Source of Halon-based solvent vapor
───────────────────────────────────────────────────── フロントページの続き (72)発明者 亀井 克利 東京都世田谷区上用賀4丁目37番6号財団 法人 競走馬理化学研究所内 (72)発明者 嶌本 淳 東京都世田谷区上用賀4丁目37番6号財団 法人 競走馬理化学研究所内 (72)発明者 田中 春夫 東京都世田谷区上用賀4丁目37番6号財団 法人 競走馬理化学研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Katsutoshi Kamei 4-37-6 Kamigaga, Setagaya-ku, Tokyo Inside the Race Horse Institute of Physical and Chemical Research (72) Inventor Atsushi Takumoto 4-37 Kamigaga, Setagaya-ku, Tokyo No. 6 Incorporated Race Horse Institute of Physical and Chemical Research (72) Inventor Haruo Tanaka 4-37-6 Kamigaga, Setagaya-ku, Tokyo Inside Incorporated Horse Institute of Physical and Chemical Research
Claims (2)
ポンプと、該回転ポンプに接続して前記蒸気流を通導さ
せハロン成分を凝縮させて他の気体成分と分離させるた
めの凝縮管と、該凝縮管に接続され凝縮管内の圧力と気
流及び液流の方向を調節する複数個の調整バルブと、前
記凝縮管を冷却するための冷却槽と、前記凝縮管の排出
口に接続して凝縮されたハロン成分をトラップするため
の冷却トラップを備え、前記回転ポンプの吐出圧を利用
して前記凝縮管内部を加圧するとともに前記冷却槽を介
して冷却することにより凝縮管内に通導させたハロン系
溶剤を含む蒸気流中のハロン成分を加圧と冷却して凝縮
させて回収することを特徴とするハロン系溶剤蒸気の凝
縮装置。1. A rotary pump for exhausting vapor containing a halon-based solvent, and a condensing pipe connected to the rotary pump for conducting the vapor flow to condense a halon component and separate it from other gas components. A plurality of adjusting valves connected to the condensing pipe for adjusting the pressure in the condensing pipe and the direction of the air flow and the liquid flow; a cooling tank for cooling the condensing pipe; and a discharge port of the condensing pipe. A cooling trap for trapping the condensed halon component was provided, and the discharge pressure of the rotary pump was used to pressurize the inside of the condensing pipe and cool it through the cooling tank so that it was conducted into the condensing pipe. A condensing device for a halon-based solvent vapor, which collects a halon component in a vapor stream containing a halon-based solvent by pressurizing, cooling, condensing, and collecting.
いることを特徴とする請求項1記載のハロン系溶剤蒸気
の凝縮装置。2. The condensing device for halon-based solvent vapor according to claim 1, wherein the inside of the condensing pipe is arranged in a cooling tank.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3231782A JPH0568846A (en) | 1991-09-11 | 1991-09-11 | Condenser for halon-based solvent vapor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3231782A JPH0568846A (en) | 1991-09-11 | 1991-09-11 | Condenser for halon-based solvent vapor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0568846A true JPH0568846A (en) | 1993-03-23 |
Family
ID=16928949
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3231782A Pending JPH0568846A (en) | 1991-09-11 | 1991-09-11 | Condenser for halon-based solvent vapor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0568846A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6857764B2 (en) | 1998-06-30 | 2005-02-22 | Canon Kabushiki Kaisha | Illumination optical system and exposure apparatus having the same |
US7027227B2 (en) | 2003-01-22 | 2006-04-11 | Canon Kabushiki Kaisha | Three-dimensional structure forming method |
JP2009115627A (en) * | 2007-11-07 | 2009-05-28 | Tokyo Electric Power Co Inc:The | Dilute substance detector |
-
1991
- 1991-09-11 JP JP3231782A patent/JPH0568846A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6857764B2 (en) | 1998-06-30 | 2005-02-22 | Canon Kabushiki Kaisha | Illumination optical system and exposure apparatus having the same |
US7027227B2 (en) | 2003-01-22 | 2006-04-11 | Canon Kabushiki Kaisha | Three-dimensional structure forming method |
JP2009115627A (en) * | 2007-11-07 | 2009-05-28 | Tokyo Electric Power Co Inc:The | Dilute substance detector |
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