JPH0563938B2 - - Google Patents
Info
- Publication number
- JPH0563938B2 JPH0563938B2 JP3155719A JP15571991A JPH0563938B2 JP H0563938 B2 JPH0563938 B2 JP H0563938B2 JP 3155719 A JP3155719 A JP 3155719A JP 15571991 A JP15571991 A JP 15571991A JP H0563938 B2 JPH0563938 B2 JP H0563938B2
- Authority
- JP
- Japan
- Prior art keywords
- molds
- outside air
- resin
- mold
- air blocking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Moulds For Moulding Plastics Or The Like (AREA)
- Injection Moulding Of Plastics Or The Like (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Description
【0001】【0001】
【産業上の利用分野】 この発明は、例えば、
IC、LSI、ダイオード、コンデンサー等の電子部
品を樹脂により封止成形する装置の改良に係り、
特に、樹脂成形体にボイドが形成されるのを防止
するものに関する。[Industrial Application Field] This invention includes, for example,
Regarding the improvement of equipment for sealing and molding electronic components such as ICs, LSIs, diodes, and capacitors with resin,
In particular, the present invention relates to something that prevents voids from forming in a resin molded body.
【0002】【0002】
【従来の技術】 従来より、トランスフアモール
ド法によつて電子部品を樹脂封止成形することが
行われているが、この方法は、例えば、樹脂成形
用金型(図2〜4参照)を用いて、通常、次のよ
うにして行われる。
即ち、予め、上型(固定型)及び下型(可動
型)を加熱手段にて樹脂成形温度にまで加熱す
る。
次に、電子部品を装着したリードフレームを下
型面に設けたセツト用凹所の所定位置に嵌合セツ
トすると共に、樹脂材料をポツト内に供給する
(図2参照)。
次に、下型を上動して上下両型を型締めする。
このとき、上記電子部品及びその周辺のリードフ
レームは該両型面に対設した上下両キヤビテイ内
に嵌装されることになり、また、ポツト内の樹脂
材料は加熱されて順次に溶融化される。
次に、上記ポツト内の樹脂材料をプランジヤー
にて加圧して、溶融化した樹脂材料を該ポツトと
両キヤビテイとの間に設けられた樹脂通路を通し
て両キヤビテイ内に注入する(図3参照)。なお、
上記キヤビテイと外部とを適宜なエアベントを介
して連通し、両キヤビテイ内への溶融樹脂材料注
入・充填作用を利用して、該キヤビテイ内部の空
気を外部へ押し出すように設けられている。
従つて、電子部品及びその周辺のリードフレー
ムは、両キヤビテイの形状に対応して成形される
樹脂成形用体内に封止成形されることになるの
で、樹脂の硬化後に下型を下動して上下両型を型
開きすると共に、これと略同時的に、両キヤビテ
イ内の樹脂成形体(モールドパツケージ)とリー
ドフレーム及び樹脂通路内の硬化樹脂を離型機構
により夫々離型させればよい(図4参照)。[Prior Art] Conventionally, electronic components have been molded with resin by the transfer molding method. It is usually carried out as follows. That is, the upper mold (fixed mold) and the lower mold (movable mold) are heated in advance to the resin molding temperature using heating means. Next, the lead frame with the electronic component mounted thereon is fitted and set in a predetermined position in a setting recess provided on the lower mold surface, and a resin material is supplied into the pot (see FIG. 2). Next, move the lower mold upward to clamp both the upper and lower molds.
At this time, the electronic component and the lead frame surrounding it are fitted into both upper and lower cavities that are placed opposite to the mold surfaces, and the resin material in the pot is heated and sequentially melted. Ru. Next, the resin material in the pot is pressurized by a plunger, and the molten resin material is injected into both cavities through the resin passage provided between the pot and both cavities (see FIG. 3). In addition,
The cavity is communicated with the outside through a suitable air vent, and the air inside the cavity is pushed out to the outside by utilizing the action of injecting and filling the molten resin material into both cavities. Therefore, the electronic components and the surrounding lead frame are sealed and molded inside the resin molding body, which is molded to correspond to the shape of both cavities. When both the upper and lower molds are opened, almost simultaneously, the resin molded body (mold package) in both cavities, the lead frame, and the cured resin in the resin passage are released by a mold release mechanism. (See Figure 4).
【0003】 ところで、上記したように、ポツトと
樹脂通路及びキヤビテイ内に存在する残溜空気は
エアベントから外部に自然に排出されるように考
慮されているが、この残溜空気排出手段による場
合は、その排出作用が不確実であること等に基因
して、樹脂成形体における内部ボイドの形成等を
有効に防止することができないと云う問題があ
る。[0003] By the way, as mentioned above, it is considered that the residual air existing in the pot, the resin passage, and the cavity is naturally discharged to the outside from the air vent, but when using this residual air discharge means, , there is a problem that the formation of internal voids in the resin molded product cannot be effectively prevented due to the uncertainty of its discharge action.
【0004】 樹脂成形体内部のボイド形成と云う問
題を解消するためには、例えば、ポツトと樹脂通
路及び両キヤビテイ内に存在する残溜空気を外部
に強制的に排気することが考えられる。しかしな
がら、この強制排気手段は、上記残溜空気が溶融
樹脂材料中に混入されないと云う点で優れている
が、次のような技術的問題があるために実用化さ
れていないのが実情である。
即ち、樹脂封止成形装置の金型における上型及
び下型の両型はその樹脂成形毎に型開閉(型締め
及び型開き)されるが、上記強制排気手段を採用
するためには、両型の型締時に、該両型における
少なくともポツト・樹脂通路・キヤビテイ部を外
気と遮断し、その範囲内の残溜空気を排気しなけ
ればならない。
また、そのような外気を遮断するための手段と
しては、例えば、両型の型面、即ち、両型のパー
テイングライン面にOリングを配置し、その型締
時に該Oリングを押圧して該Oリングにより設定
される範囲内と外気とを遮断するもの、或は、両
型の型面に嵌合凹凸部を対向配置し、その型締時
に該凹凸部を嵌合させると共に、その凹凸部の嵌
合面に設けたOリングを押圧して該Oリングによ
り設定される範囲内と外気とを遮断するもの等が
考えられる。[0004] In order to solve the problem of void formation inside the resin molded body, for example, it is conceivable to forcibly exhaust the residual air existing in the pot, the resin passage, and both cavities to the outside. However, although this forced exhaust means is superior in that the residual air is not mixed into the molten resin material, it has not been put into practical use due to the following technical problems. . That is, both the upper mold and the lower mold in the mold of the resin encapsulation molding apparatus are opened and closed (mold clamping and mold opening) each time the resin is molded. When the molds are clamped, at least the pots, resin passages, and cavity portions of both molds must be isolated from the outside air, and the residual air within these areas must be exhausted. In addition, as a means for blocking such outside air, for example, O-rings are placed on the mold surfaces of both molds, that is, on the parting line surfaces of both molds, and the O-rings are pressed when the molds are clamped. A device that blocks the area set by the O-ring from the outside air, or a fitting concave and convex portion is arranged facing each other on the mold surfaces of both molds, and when the mold is clamped, the concave and convex portions are fitted, and the concave and convex portions are fitted. It is conceivable to press an O-ring provided on the fitting surface of the part to block the outside air from the area set by the O-ring.
【0005】【0005】
【発明が解決しようとする課題】 しかしなが
ら、両型の型面にOリングや嵌合凹凸部等の外気
遮断手段を配設する従来装置の構成においては、
該両型の型締めと該外気遮断手段による外気遮断
作用とが略同時的に行われるため、例えば、該両
型面に供給したリードフレームが何らかの理由に
よつて所定の位置及び状態にセツトされていない
ような異常時においても、その型締作用と外気遮
断作用とが略同時的に行われて、該両型の型面や
リードフレーム及び外気遮断自体を損傷すると云
つた問題がある。[Problems to be Solved by the Invention] However, in the configuration of the conventional device in which external air blocking means such as O-rings and fitting uneven parts are provided on the mold surfaces of both molds,
Since the mold clamping of both molds and the outside air blocking action by the outside air blocking means are performed almost simultaneously, for example, if the lead frame supplied to the both mold surfaces is set in a predetermined position and state for some reason. There is a problem in that even in an abnormal situation where the mold is not closed, the mold clamping action and the outside air blocking action are performed almost simultaneously, damaging the mold surfaces of both molds, the lead frame, and the outside air blocking itself.
【0006】 また、上記外気遮断手段が両型の型面
等に固設されているときは、該両型に対するチエ
イスブロツクの装着や交換作業が面倒であると云
う問題があり、更に、多品種少量生産と云う要請
に対応してチエイスブロツクを頻繁に交換するタ
イプの電子部品の樹脂封止成形装置においては、
このチエイスブロツク交換作業に手数を要して全
体的な生産性が低下する等の問題がある。[0006] In addition, when the outside air blocking means is fixedly installed on the mold surfaces of both molds, there is a problem that mounting and replacing chase blocks for both molds is troublesome, and furthermore, In resin encapsulation molding equipment for electronic parts, which requires frequent replacement of chase blocks in response to demands for low-volume production of various types,
This chase block replacement work requires a lot of effort, leading to problems such as a decrease in overall productivity.
【0007】 本発明は、上述した残溜空気の外部強
制排気手段の構成を簡略化してその作業性・操作
性の向上を図ると共に、固定及び可動の両型に対
する固定側及び可動側の両チエイスブロツクの着
脱作業を簡易に且つ確実に行うことができる電子
部品の樹脂封止成形装置を提供することを目的と
する。[0007] The present invention aims to improve the workability and operability by simplifying the configuration of the external forced exhaust means for the residual air described above, and also to improve the workability and operability of both the fixed side and the movable side for both fixed and movable types. It is an object of the present invention to provide a resin sealing molding apparatus for electronic components that can easily and reliably perform the work of attaching and detaching an is block.
【0008】[0008]
【課題を解決するための手段】 本発明に係る電
子部品の樹脂封止成形装置は、固定型1と可動型
2とを対向配置させた樹脂成形用金型を備えた電
子部品の樹脂封止成形装置であつて、上記固定型
1及び可動型2の夫々に、該両型1,2における
少なくとも樹脂材料供給用のポツト9・樹脂通路
25,26・樹脂成形用のキヤビテイ10,20
部の外側方周囲を覆う外気遮断用部材33,30
を摺動自在に各嵌装し、且つ、該両型1,2の型
締時に該両外気遮断用部材33,30の両者を嵌
合自在に配設すると共に、該両型1,2と上記両
外気遮断用部材33,30との各嵌合面、並び
に、該両外気遮断用部材33,30両者の嵌合面
にシール部材を介在配置し、更に、上記両外気遮
断用部材33,30両者の嵌合時において両型
1,2間に設定される外気遮断空間部38と真空
源40側とを真空経路39を介して連通接続させ
て構成したことを特徴とするものである。[Means for Solving the Problems] An apparatus for resin-sealing electronic components according to the present invention is equipped with a resin-molding mold in which a fixed mold 1 and a movable mold 2 are arranged facing each other. The molding apparatus includes at least a pot 9 for supplying resin material, resin passages 25 and 26, and cavities 10 and 20 for resin molding in both the molds 1 and 2, respectively.
Outside air blocking members 33, 30 that cover the outer periphery of the
are slidably fitted into each other, and when both the molds 1 and 2 are clamped, both the outside air blocking members 33 and 30 are disposed so as to be freely fitted, and both the molds 1 and 2 are fitted together. A sealing member is interposed between each of the fitting surfaces of the outside air blocking members 33, 30 and the fitting surfaces of both the outside air blocking members 33, 30, and further, both the outside air blocking members 33, 30 is characterized in that when both molds 1 and 2 are fitted, an outside air blocking space 38 set between both molds 1 and 2 is connected to the vacuum source 40 side through a vacuum path 39.
【0009】 また、本発明に係る電子部品の樹脂封
止成形装置は、固定型1と可動型2とを対向配置
させると共に、該両型に対してチエイスブロツク
7,8を着脱自在に嵌装した樹脂成形用金形を備
えた電子部品の樹脂封止成形装置であつて、上記
固定型1及び可動型2の夫々に、該両型における
少なくとも樹脂材料供給用のポツト9・樹脂通路
25,26・樹脂成形用のキヤビテイ10,20
部の外側方周囲を覆う外気遮断用部材33,30
を摺動自在に各嵌装すると共に、該両外気遮断用
部材33,30の両者を、該両型の型締時に嵌合
自在に配設し、且つ、該両型に対する上記チエイ
スブロツク7,8の着脱時には該着脱作業を阻害
しない位置にまで後退自在に配設し、また、該両
型と上記両外気遮断用部材33,30との各嵌合
面、並びに、該両外気遮断用部材33,30両者
の嵌合面にシール部材を介在配置し、更に、上記
両外気遮断用部材33,30両の嵌合時において
両型1,2間に設定される外気遮断空間部38と
真空源40側とを真空経路39を介して連通接続
させて構成したことを特徴とするものである。[0009] In addition, the resin sealing molding apparatus for electronic components according to the present invention has a fixed mold 1 and a movable mold 2 disposed facing each other, and chase blocks 7 and 8 are removably fitted to both molds. In this apparatus, the fixed mold 1 and the movable mold 2 are provided with at least a pot 9 and a resin passage 25 for supplying resin material in each of the fixed mold 1 and the movable mold 2. , 26・Cavity 10, 20 for resin molding
Outside air blocking members 33, 30 that cover the outer periphery of the
are slidably fitted into each other, and both of the outside air blocking members 33 and 30 are disposed such that they can be fitted together when the molds are clamped, and the chase block 7 for both the molds is fitted. . A sealing member is interposed between the fitting surfaces of both the members 33 and 30, and an outside air blocking space 38 is provided between the molds 1 and 2 when both the outside air blocking members 33 and 30 are fitted together. This is characterized in that it is configured to be connected to the vacuum source 40 side via a vacuum path 39.
【0010】 また、本発明に係る電子部品の樹脂封
止成形装置は、上記した両外気遮断用部材33,
30の夫々が、固定側及び可動側の両金型ベース
3,4の外周面に対して摺動自在に各嵌装されて
いることを特徴とするものである。[0010] Furthermore, the resin sealing molding apparatus for electronic components according to the present invention includes both the outside air blocking members 33,
30 are each fitted slidably onto the outer circumferential surfaces of both the fixed and movable mold bases 3 and 4.
【0011】【0011】
【作 用】 本発明の構成によれ、固定及び可動
の両型1,2の型締時に、両外気遮断用部材3
3,30を摺動させて該両外気遮断用部材33,
30の両者を嵌合させることにより、該両型1,
2における少なくともポツト・樹脂通路・キヤビ
テイの外側方周囲を覆つて外気遮断空間部38を
容易に構成することができる。
従つて、上記外気遮断空間部38に連通接続さ
せた真空源40を作動することによつて、該外気
遮断空間部38内の残溜空気を、真空経路39を
通して、効率良く且つ確実に排出することができ
る。
また、この状態で電子部品の樹脂封止成形を行
うことにより、該外気遮断空間部38内の残溜空
気が溶融樹脂材料中に混入するのを防止できる。
更に、樹脂材料Rの加熱溶融化の過程において該
樹脂材料内部の空気が該外気遮断空間部38内に
流出した場合においても、その空気が溶融樹脂材
料中に混入するのを防止することができる。
また、上記両外気遮断用部材33,30両者の
嵌合作用は、該両型1,2の型開閉作用とは無関
係に行うことができる。[Function] According to the configuration of the present invention, when both the fixed and movable molds 1 and 2 are clamped, both outside air blocking members 3
3, 30 to slide the outside air blocking members 33,
By fitting both the molds 1 and 30, the two molds 1,
The outside air-blocking space 38 can be easily formed by covering at least the outer periphery of the pot, the resin passage, and the cavity in 2. Therefore, by operating the vacuum source 40 connected in communication with the outside air shutoff space 38, the residual air in the outside air shutoff space 38 is efficiently and reliably exhausted through the vacuum path 39. be able to. Further, by performing resin sealing molding of the electronic component in this state, it is possible to prevent residual air in the outside air shielding space 38 from mixing into the molten resin material.
Furthermore, even if the air inside the resin material flows out into the outside air blocking space 38 during the process of heating and melting the resin material R, it is possible to prevent the air from mixing into the molten resin material. . Moreover, the fitting action of both the outside air blocking members 33, 30 can be performed independently of the mold opening/closing action of the molds 1, 2.
【0012】【0012】
【実施例】 図1には、電子部品の樹脂封止成形
装置の構成を概略的に示しており、また、図2〜
4には、該装置における金型要部を概略的に示し
ており、また、図5〜6は該金型要部を拡大して
示している。[Example] Fig. 1 schematically shows the configuration of a resin sealing molding apparatus for electronic components, and Figs.
4 schematically shows the main parts of the mold in the apparatus, and FIGS. 5 and 6 show the main parts of the mold in an enlarged manner.
【0013】 この装置には、上部固定盤に装設され
る固定型1(上型)と、下部可動盤に装設される
可動型2(下型)とが対設されている。[0013] This device includes a fixed mold 1 (upper mold) installed on an upper fixed platen and a movable mold 2 (lower mold) installed on a lower movable platen.
【0014】 また、固定側金型ベース3及び可動側
金型ベース4には、ヒータ等の樹脂材料加熱手段
5,6が夫々設けられている。
また、固定側金型ベース3には固定側チエイス
ブロツク7がアリ溝3a及びアリ部7a等による
嵌合手段によつて着脱自在に装設されている。
また、可動側金型ベース4には可動側チエイス
ブロツク8がアリ溝4a及びアリ部8a等による
嵌合手段によつて着脱自在に装設されている。
また、上記両金型ベース3,4に嵌合された両
チエイスブロツク7,8は、その前後両端部に固
定する適宜なブロツク7b,8bを介して所定位
置に嵌装されるように設けられている。
なお、図1には、両チエイスブロツク7,8の
前後両端部をブロツク7b,8bにて固定する場
合を示したが、該ブロツク7b,8bのいずれか
一方を省略してもよい。例えば、その一方側のブ
ロツクに相当する部分と両金型ベース3,4とを
一体に形成するようにしてもよい。
更に、上記両チエイスブロツク7,8と両固定
ブロツク7b,8bとの間に、適当なシール部材
(図示なし)を介在配置させてもよい。[0014] Furthermore, the fixed mold base 3 and the movable mold base 4 are provided with resin material heating means 5, 6 such as heaters, respectively. Further, a stationary chase block 7 is removably installed on the stationary mold base 3 by means of fitting means such as a dovetail groove 3a and a dovetail portion 7a. Further, a movable chase block 8 is detachably mounted on the movable mold base 4 by means of fitting means such as a dovetail groove 4a and a dovetail portion 8a. Further, both chase blocks 7 and 8 fitted to both mold bases 3 and 4 are fitted in predetermined positions via appropriate blocks 7b and 8b fixed to both front and rear ends thereof. It is being Although FIG. 1 shows a case in which both the front and rear ends of both chase blocks 7 and 8 are fixed by blocks 7b and 8b, either one of the blocks 7b and 8b may be omitted. For example, a portion corresponding to the block on one side and both mold bases 3, 4 may be formed integrally. Further, a suitable sealing member (not shown) may be interposed between the chase blocks 7, 8 and the fixing blocks 7b, 8b.
【0015】 また、可動側チエイスブロツク8には
所要複数個の樹脂材料供給用ポツト9が配設され
ており、更に、該各ポツト9の周辺所定位置には
所要複数個の樹脂成形用のキヤビテイ10が夫々
配設されている。
また、該可動側チエイスブロツク8には、ヒー
タ等の専用加熱手段11が装設されている。
また、該可動側チエイスブロツク8の下方位置
にはキヤビテイ10内にて成形される樹脂成形体
の離型用エジエクターピン12aを備えた下部エ
ジエクタープレート12と、上記各ポツト9内に
供給された各樹脂材料Rを夫々各別に加圧するた
めのプランジヤー13aを備えたプランジヤーホ
ルダー13とが配設されている。
また、上記各エジエクターピン12aの上端部
は各キヤビテイ10に連通するピン孔14に夫々
嵌合されている。
また、上記各プランジヤー13aの上端部は可
動側金型ベース4及びエジエクタープレート12
に設けた挿通孔15,16を通して各ポツト9に
夫々嵌合されている。また、上記プランジヤーホ
ルダー13は、上記可動側金型ベース4の下部に
設けたレール部材13bに対して着脱自在に装設
されている。
なお、上記可動側金型ベース4に設けられる下
部エジエクタープレート12の嵌装空間部と外部
との間、及び、上記プランジヤーホルダー13の
嵌装空間部と外部との間に、適当なシール部材
(図示なし)を介在配置させてもよい。[0015] In addition, the movable chase block 8 is provided with a required plurality of resin material supply pots 9, and furthermore, at predetermined positions around each pot 9, a required plurality of resin material supply pots 9 are provided. Cavities 10 are respectively arranged. Further, the movable chase block 8 is equipped with a dedicated heating means 11 such as a heater. Further, at a lower position of the movable chase block 8, there is a lower ejector plate 12 equipped with an ejector pin 12a for releasing the resin molded product molded in the cavity 10, and a lower ejector plate 12 provided with ejector pins 12a for releasing the resin molded product molded in the cavity 10, and a lower ejector plate 12 provided with ejector pins 12a for releasing the resin molded product molded in the cavity 10. A plunger holder 13 is provided with a plunger 13a for pressurizing each resin material R separately. Further, the upper end portion of each ejector pin 12a is fitted into a pin hole 14 communicating with each cavity 10, respectively. The upper end of each plunger 13a is connected to the movable mold base 4 and the ejector plate 12.
They are fitted into the respective pots 9 through insertion holes 15 and 16 provided in the holes 15 and 16, respectively. Further, the plunger holder 13 is detachably attached to a rail member 13b provided at the lower part of the movable mold base 4. A suitable seal is provided between the fitting space of the lower ejector plate 12 provided on the movable mold base 4 and the outside, and between the fitting space of the plunger holder 13 and the outside. A member (not shown) may be interposed.
【0016】 また、固定側チエイスブロツク7に
は、上記キヤビテイ10の位置及び数に対応した
キヤビテイ20が夫々対設されている。
また、該固定側チエイスブロツク7には、ヒー
タ等の専用加熱手段21が装設されている。
また、該固定側チエイスブロツク7の上方位置
にはキヤビテイ20内にて成形される樹脂成形体
の離型用エジエクターピン22aを備えた上部エ
ジエクタープレート22と、該上部エジエクター
プレートの支持ピン22bと、該支持ピン22b
を介して上部エジエクタープレート22を押し下
げるための弾性部材23とが夫々配設されてい
る。
また、上記各エジエクターピン22aの下端部
は各キヤビテイ20に連通するピン孔24と、各
ポツト9の位置に対向して設けられるカル部25
に連通するピン孔24aに夫々嵌合されている。
上記エジエクタープレート22は、図2及図4
に示す両型1,2の型開時に弾性部材23の弾性
により押し下げられることにより、そのキヤビテ
イ20内と、ポツト9と該キヤビテイ20との間
に設けられる所要長さの樹脂通路部(図例のもの
は、カル部25とゲート部26)内にて硬化した
樹脂成形体Pを夫々離型させることができるよう
に設けられている。[0016] Further, cavities 20 corresponding to the positions and numbers of the cavities 10 are provided in the fixed side chase block 7, respectively. Further, the stationary chase block 7 is equipped with a dedicated heating means 21 such as a heater. Further, at a position above the fixed side chase block 7, there is an upper ejector plate 22 equipped with an ejector pin 22a for releasing the resin molded product molded in the cavity 20, and a support for the upper ejector plate. pin 22b and support pin 22b
An elastic member 23 for pushing down the upper ejector plate 22 via the upper ejector plate 22 is provided. Further, the lower end of each ejector pin 22a has a pin hole 24 communicating with each cavity 20, and a cull portion 25 provided opposite the position of each pot 9.
The pin holes 24a communicate with each other. The ejector plate 22 is shown in FIGS. 2 and 4.
When the molds 1 and 2 shown in the figure are opened, the elastic member 23 is pressed down by the elasticity of the elastic member 23, thereby forming a resin passage section of a required length (example in the figure) provided inside the cavity 20 and between the pot 9 and the cavity 20. These are provided so that the resin molded body P cured within the cull portion 25 and the gate portion 26) can be released from the mold.
【0017】 なお、上記両型1,2の型開時におい
ては、前記下部エジエクタープレート12はエジ
エクターバー12bによつて押し上げられてその
各エジエクターピン12aが各キヤビテイ10内
の樹脂成形体Pを夫々離型させることになるが
(図4参照)、その型締時においては、上下両エジ
エクタープレート22,12に対向配置した上下
のリターンピン(図示なし)が該両エジエクター
プレート22,12を上方及下方に夫々後退させ
るように設けられている(図3参照)。[0017] When the molds 1 and 2 are opened, the lower ejector plate 12 is pushed up by the ejector bar 12b, and the ejector pins 12a touch the resin molded body in each cavity 10. P is released from the mold respectively (see FIG. 4), but when the mold is clamped, the upper and lower return pins (not shown) arranged opposite to the upper and lower ejector plates 22, 12 , 12 upwardly and downwardly, respectively (see FIG. 3).
【0018】 従つて、上記した樹脂封止成形装置を
用いてリードフレーム27に装着した電子部品2
7aを樹脂封止成形する場合は、先ず、図2に示
すように、リードフレーム27を適宜な供給取出
機構28を介して可動型(下型)面に設けたセツ
ト用凹所29の所定位置に供給セツトすると共
に、各ポツト9内に樹脂材料(樹脂タブレツト)
Rを供給し、次に、図3に示すように、下部可動
盤を介して可動型2を上昇させて両型1,2の型
締めを行い、次に、各ポツト9内の樹脂材料Rを
プランジヤー13aにて加圧し加熱手段5,6,
11,21により加熱溶融化された樹脂材料を樹
脂通路部25,26を通して両キヤビテイ10,
20内に注入充填させることにより、樹脂成形体
P(図4参照)内に該電子部品27aを封止成形
することができる。[0018] Therefore, the electronic component 2 mounted on the lead frame 27 using the resin sealing molding apparatus described above.
When molding 7a with resin, first, as shown in FIG. 2, the lead frame 27 is placed at a predetermined position in a setting recess 29 provided on the movable mold (lower mold) surface via an appropriate supply/take-out mechanism 28. At the same time, a resin material (resin tablet) is placed in each pot 9.
As shown in FIG. is pressurized by the plunger 13a and the heating means 5, 6,
The resin material heated and melted by 11 and 21 is passed through the resin passages 25 and 26 into both cavities 10 and 21.
By injecting and filling the electronic component 27a into the resin molded body P (see FIG. 4), the electronic component 27a can be sealed and molded within the resin molded body P (see FIG. 4).
【0019】 本発明装置は、上述したような電子部
品の樹脂封止成形装置において、次の構成を備え
たことを特長としている。[0019] The apparatus of the present invention is a resin sealing molding apparatus for electronic components as described above, and is characterized by having the following configuration.
【0020】 即ち、上記した可動側金型ベース4
に、可動型2の型面における少なくとも各ポツト
9・各キヤビテイ10の外側方周囲を覆う丸筒
形・角筒形等の外気遮断用部材30を嵌装すると
共に、該外気遮断用部材30を所要の駆動機構3
1を介して型開閉方向へ摺動自在に嵌装し、更
に、該可動側金型ベース4と該外気遮断用部材3
0との嵌合面に適当なシール部材32を介在配置
している。[0020] That is, the movable mold base 4 described above
Into the mold surface of the movable mold 2, an external air blocking member 30 having a round or square cylinder shape is fitted to cover at least the outer periphery of each pot 9 and each cavity 10, and the external air blocking member 30 is fitted. Required drive mechanism 3
1 so as to be slidable in the mold opening/closing direction, and furthermore, the movable mold base 4 and the outside air blocking member 3
A suitable sealing member 32 is interposed on the fitting surface with 0.
【0021】 また、上記した固定側金型ベース3
に、固定型3の型面における少なくとも各樹脂通
路(カル部25及ゲート部26)・各キヤビテイ
20の外側方周囲を覆う丸筒形・角筒形の外気遮
断用部材33を嵌装すると共に、該外気遮断用部
材33を所要の駆動機構34を介して型開閉方向
へ摺動自在に嵌装し、更に、該固定側金型ベース
3と該外気遮断用部材33との嵌合面に適当なシ
ール部材35を介在配置している。[0021] In addition, the fixed side mold base 3 described above
In addition, an outside air blocking member 33 in the shape of a round cylinder or a square cylinder is fitted to cover at least the outer periphery of each resin passage (cull part 25 and gate part 26) and each cavity 20 on the mold surface of the fixed mold 3. , the external air blocking member 33 is slidably fitted in the mold opening/closing direction via a required drive mechanism 34, and a fitting surface between the stationary mold base 3 and the external air blocking member 33 is fitted. A suitable sealing member 35 is interposed.
【0022】 また、上記両型1,2の型締時におい
て、上記した両駆動機構31,34を介して両外
気遮断用部材30,33を型締方向へ夫々前進移
動させると、該両外気遮断用部材30,33両者
の先端部が嵌合するように設けられている(図3
参照)。なお、図3においては、可動側金型ベー
ス4に嵌装した外気遮断用部材30の上端部を可
動型4の型面付近にまで上動させると共に、固定
側金型ベース3に嵌装した外気遮断用部材33を
上記可動側金型ベース4の外気遮断用部材30に
おける外周面に嵌合させる場合を例示している。[0022] Furthermore, when the molds 1 and 2 are clamped, when the outside air blocking members 30 and 33 are respectively moved forward in the mold clamping direction via the driving mechanisms 31 and 34, the outside air is The distal ends of both the blocking members 30 and 33 are provided to fit together (Fig. 3
reference). In FIG. 3, the upper end of the outside air blocking member 30 fitted to the movable mold base 4 is moved up to near the mold surface of the movable mold 4, and the upper end of the outside air blocking member 30 fitted to the fixed mold base 3 is moved upward. The case where the outside air blocking member 33 is fitted to the outer peripheral surface of the outside air blocking member 30 of the movable mold base 4 is illustrated.
【0023】 また、上記両外気遮断用部材30,3
3両者の嵌合面には適当なシール部材36が介在
配置されている。更に、両金型ベース3,4と両
チエイスブロツク7,8との間、両チエイスブロ
ツク7,8と各エジエクターピン22a,12a
との間、可動側チエイスブロツク8とポツト9及
びプランジヤー13aとの間にも適当なシール部
材37が介在配置されている。
従つて、図3に示す両型1,2の型締時におい
ては、両外気遮断用部材30,33の先端部を嵌
合させることにより、上記可動型2と固定型1の
型面間は、該両外気遮断用部材30,33と上記
各シール部材32,35,36,37とによつて
外気が遮断された空間部38が構成されることに
なる。
なお、上記両型1,2面間は、上記両シール部
材35,36によつて実質的に外気と遮断された
状態にあるので、上記各シール部材37の介在配
置は不要である。
また、上記各シール部材37の介在配置に換え
て、或は、これを省略するときは、前述したよう
に、両チエイスブロツク7,8と両固定ブロツク
7b,8bとの間、及び、プランジヤーホルダー
13の嵌装空間部と外部との間に、適当なシール
部材を介在配置することが好ましい。[0023] Also, both of the outside air blocking members 30, 3
3. A suitable sealing member 36 is interposed between the fitting surfaces of the two. Further, between both mold bases 3, 4 and both chase blocks 7, 8, between both chase blocks 7, 8 and each ejector pin 22a, 12a
A suitable sealing member 37 is also interposed between the movable chase block 8, the pot 9, and the plunger 13a. Therefore, when the molds 1 and 2 shown in FIG. , the outside air blocking members 30, 33 and the sealing members 32, 35, 36, 37 form a space 38 that is shut off from outside air. Incidentally, since the surfaces of both the molds 1 and 2 are substantially isolated from the outside air by the seal members 35 and 36, the intervening arrangement of the seal members 37 is unnecessary. In addition, in place of the intervening arrangement of each of the seal members 37, or when omitting this, as described above, the space between both chase blocks 7, 8 and both fixed blocks 7b, 8b, and between the plunger It is preferable that a suitable sealing member be interposed between the fitting space of the ear holder 13 and the outside.
【0024】 また、両外気遮断用部材30,33両
者の嵌合時において構成される上記した外気遮断
空間部38には、真空パイプ等の真空経路39の
一端側が連通接続されると共に、該真空経路39
の他端側は真空ポンプその他の適当な真空源40
側と連通接続されている。
従つて、図3に示す両型1,2の型締時におい
て該真空源40を作動させると、上記外気遮断空
間部38の残溜空気が強制的に吸引排出されて、
該外気遮断空間部38内を真空状態とすることが
できるものである。[0024] In addition, one end side of a vacuum path 39 such as a vacuum pipe is connected to the above-mentioned outside air insulation space 38, which is formed when both the outside air insulation members 30 and 33 are fitted, and the vacuum route 39
The other end is a vacuum pump or other suitable vacuum source 40.
It is connected to the side. Therefore, when the vacuum source 40 is activated when both the molds 1 and 2 shown in FIG.
The inside of the outside air cutoff space 38 can be brought into a vacuum state.
【0025】 なお、上記外気遮断空間部38は、上
記したように、両型1,2の型締時に、両外気遮
断用部材30,33と各シール部材32,35,
36,37とにより該両型間に設定される外気が
遮断された空間部である。
従つて、両型1,2の型締時においては、該両
型における少なくとも樹脂材料供給用ポツト9・
樹脂通路25,26・樹脂成形用のキヤビテイ1
0,20部の外側方周囲が外気と遮断される状態
となるが、この外気遮断空間部38内の残溜空気
は、該両型の接合面間や一方の型面に設けたエア
ベント等を通して相互に流通することが可能であ
る。[0025] As described above, the outside air blocking space 38 is provided with both outside air blocking members 30, 33 and each sealing member 32, 35, when the molds 1, 2 are clamped.
36 and 37 is a space defined between the two molds and cut off from outside air. Therefore, when both molds 1 and 2 are clamped, at least the resin material supply pots 9 and 2 in both molds are closed.
Resin passages 25, 26/cavity 1 for resin molding
The outer periphery of the 0.20 parts is cut off from the outside air, but the residual air in this outside air isolation space 38 is removed through an air vent etc. provided between the joint surfaces of the two molds or on one of the mold surfaces. Mutual circulation is possible.
【0026】 また、上記した真空源40の作動は、
両型1,2の型締作用が終了した後に開始するだ
けでなく、例えば、該両型の型締作用と並行して
行つてもよい。
即ち、図2に示す型開状態から図3に示す完全
な型締状態に至るまでの間、例えば、可動型2を
中間型締位置まで上昇させてリードフレーム27
等のセツト状態の良否を確認し、その後に、可動
型2を完全型締位置にまで上昇させると云つた型
締作用の過程において、可動型2が上記中間型締
位置に上昇したときに真空源40を作動させるよ
うにしてもよい。
このときは、両型1,2間の排気作用が該両型
の完全型締の時期よりも先行することになるの
で、完全型締後に上記排気作用を開始するより
も、その排気効率がよいと云つた利点がある。[0026] Furthermore, the operation of the vacuum source 40 described above is as follows:
The process may not only start after the mold clamping actions of both molds 1 and 2 are completed, but also may be performed in parallel with the mold clamping actions of both molds, for example. That is, during the period from the mold open state shown in FIG. 2 to the complete mold clamp state shown in FIG.
In the process of mold clamping, in which the movable mold 2 is raised to the complete mold clamping position, when the movable mold 2 is raised to the intermediate mold clamping position, the vacuum is Source 40 may also be activated. At this time, the exhaust action between the molds 1 and 2 precedes the time when the molds are completely clamped, so the exhaust efficiency is better than if the exhaust action is started after the molds are completely clamped. There are advantages.
【0027】 また、上記両外気遮断用部材30,3
3は、上記両駆動機構31,34を介して、上記
両金型ベース3,4に対する上記両チエイスブロ
ツク7,8の着脱・交換作用を阻害しない位置
(図2参照)にまで後退移動するように設けられ
ている。従つて、該両外気遮断用部材30,33
を図3に示す前進位置に夫々前進移動させた状態
で両型1,2の型開閉を行うことができるので、
必ずしも、通常の樹脂成形サイクル毎に該両外気
遮断用部材30,33を後退移動させる必要はな
い。[0027] Also, both of the outside air blocking members 30, 3
3 is moved backward through the drive mechanisms 31 and 34 to a position (see FIG. 2) that does not hinder the attachment/detachment/replacement of the chase blocks 7 and 8 to the mold bases 3 and 4. It is set up like this. Therefore, both the outside air blocking members 30, 33
Since both molds 1 and 2 can be opened and closed with the molds 1 and 2 moved forward to the forward positions shown in FIG.
It is not necessarily necessary to move the outside air blocking members 30 and 33 backward every normal resin molding cycle.
【0028】 上記した実施例の構成によれば、固定
及び可動の両型1,2の型締時に、両外気遮断用
部材33,30を摺動させて該両外気遮断用部材
33,30の両を嵌合させることにより、該両型
1,2における少なくともポツト9・樹脂通路2
5,26・キヤビテイ20,10の外側方周囲を
覆つて外気遮断空間部38を容易に構成すること
ができる。また、この空気の外部強制排気手段の
構成、特に、両外気遮断用部材33,30の嵌合
構成及びその作業性・操作性はきわめて簡略化さ
れている。従つて、上記外気遮断空間部38に連
通接続させた真空源40を作動させることによつ
て、該外気遮断空間部38内の残溜空気を、真空
経路39を通して、効率良く且つ確実に外部に強
制的に排出することができる。
また、この状態で電子部品の樹脂封止成形を行
うことにより、該外気遮断空間部38内の残溜空
気が溶融樹脂材料中に混入するのを防止すること
ができる。
更に、樹脂材料Rの加熱溶融化の過程において
該樹脂材料内部の空気が該外気遮断空間部38内
に流出した場合においても、その空気を同様に排
気できるので、これが溶融樹脂材料中に混入する
のを防止することができる。
また、上記両外気遮断用部材33,30両者の
嵌合作用は、該両型1,2の型開閉作用とは無関
係に行うことができるので、この嵌合作用を該両
型の完全型締後若しくは中間型締後に行うことに
より、例えば、リードフレーム27や樹脂材料R
のセツト不良時に、両型1,2の型締作用と両外
気遮断用部材33,30両者の嵌合作用が同時的
に行われて該両型の型面や該リードフレーム及び
該両外気遮断用部材を損傷すると云つた作業上の
危険性を未然に防止することができる。[0028] According to the configuration of the embodiment described above, when both the fixed and movable molds 1 and 2 are clamped, both the outside air blocking members 33 and 30 are slid and the outside air blocking members 33 and 30 are closed. By fitting both, at least the pot 9 and the resin passage 2 in both the molds 1 and 2
5, 26. The outside air-blocking space 38 can be easily formed by covering the outer periphery of the cavities 20, 10. Further, the configuration of this external forced air exhaust means, particularly the fitting configuration of both external air blocking members 33 and 30, and the workability and operability thereof are extremely simplified. Therefore, by operating the vacuum source 40 connected to the outside air shutoff space 38, the residual air in the outside air shutoff space 38 is efficiently and reliably released outside through the vacuum path 39. Can be forcibly ejected. Further, by performing resin sealing molding of the electronic component in this state, it is possible to prevent residual air in the outside air shielding space 38 from mixing into the molten resin material. Furthermore, even if the air inside the resin material flows out into the outside air shielding space 38 during the process of heating and melting the resin material R, the air can be similarly exhausted, so that it will not get mixed into the molten resin material. can be prevented. Further, since the fitting action of both the outside air blocking members 33 and 30 can be performed independently of the mold opening/closing action of the two molds 1 and 2, this fitting action can be performed to completely close the molds of the two molds. By performing this after or after intermediate mold clamping, for example, the lead frame 27 and the resin material R
When the molds 1 and 2 are improperly set, the clamping action of both dies 1 and 2 and the fitting action of both outside air shielding members 33 and 30 are performed simultaneously, and the mold surfaces of the two molds, the lead frame, and the outside air shielding members 33 and 30 are simultaneously performed. It is possible to prevent operational dangers such as damage to the parts used.
【0029】 本発明は、上述した実施例のものに限
定されるものではなく、本発明の趣旨を逸脱しな
い範囲内で、必要に応じて、任意に且つ適宜に変
更・選択して採用できるものである。
例えば、両外気遮断用部材33,30両者を嵌
合させる構成態様については、可動側金型ベース
4に嵌装した外気遮断用部材30を、固定側金型
ベース3に嵌装した外気遮断用部材33における
外周面に嵌合させると云つた、実施例図のものと
は逆の構成態様を採用してもよい。
また、両外気遮断用部材33,30両者の嵌合
面は、図2〜5に示すような上下方向の断面垂直
面41であつてもよく、また、図6に示すような
テーパー面42であつてもよく、要するに、該両
者の嵌合面に介在配置したシール部材36によつ
て、該両者間における空気の流れを遮断すること
ができる構成であればよい。
また、実施例図においては、外気遮断空間部3
8が、両型1,2の接合面間とその外側方周囲に
構成される場合を示したが、該外気遮断空間部3
8と該両型における両エジエクタープレート1
2,22の嵌装空間部との間に通気孔を穿設し
て、該嵌装空間部内の残溜空気をも同時に外部へ
排出するような構成を採用してもよい。また、本
発明は、実施例に示したような両チエイスブロツ
ク7,8を頻繁に着脱させるタイプのものに限ら
ず、通常のタイプの構成を有する電子部品の樹脂
封止成形装置においても同様に適用できることは
明らかである。
また、両外気遮断用部材33,30の駆動機構
31,34としては、例えば、適当なラツク・ピ
ニオン機構等の機械的駆動機構や、電動モータ等
の電気的駆動機構、或は、油圧・空圧等の流体駆
動機構のいずれを採用してもよいが、電子部品の
樹脂封止成形と云う観点からは、上記した電気的
駆動機構或は空圧駆動機構を採用することが好ま
しい。[0029] The present invention is not limited to the above-mentioned embodiments, and can be arbitrarily and appropriately modified and selected as necessary without departing from the spirit of the present invention. It is. For example, in a configuration in which both outside air blocking members 33 and 30 are fitted together, the outside air blocking member 30 fitted to the movable mold base 4 is fitted to the fixed mold base 3, and the outside air blocking member 30 fitted to the fixed mold base 3 is It is also possible to adopt a configuration opposite to that shown in the embodiment drawings, in which the member 33 is fitted onto the outer circumferential surface of the member 33. Further, the fitting surfaces of both outside air blocking members 33 and 30 may be vertical cross-sectional surfaces 41 in the vertical direction as shown in FIGS. 2 to 5, or may be tapered surfaces 42 as shown in FIG. In short, any configuration is sufficient as long as the seal member 36 interposed between the fitting surfaces of the two can block the flow of air between the two. In addition, in the embodiment diagram, the outside air blocking space 3
8 is constructed between the joining surfaces of both molds 1 and 2 and around the outer side thereof, but the outside air blocking space 3
8 and both ejector plates 1 in both types.
A configuration may also be adopted in which a ventilation hole is provided between the fitting spaces 2 and 22 and the residual air in the fitting spaces is also discharged to the outside at the same time. Further, the present invention is not limited to the type in which both the chase blocks 7 and 8 are frequently attached and detached as shown in the embodiment, but can be similarly applied to a resin sealing molding apparatus for electronic components having a normal type configuration. It is clear that it can be applied to The drive mechanisms 31 and 34 for the outside air blocking members 33 and 30 may be, for example, a mechanical drive mechanism such as a suitable rack and pinion mechanism, an electric drive mechanism such as an electric motor, or a hydraulic or pneumatic drive mechanism. Although any fluid drive mechanism such as pressure may be employed, from the viewpoint of resin sealing molding of electronic components, it is preferable to employ the above-mentioned electric drive mechanism or pneumatic drive mechanism.
【0030】【0030】
【発明の効果】 本発明によれば、ポツトと樹脂
通路及びキヤビテイと云う金型の型締時における
構成空間部に存在する残溜空気と樹脂材料中に含
有されている空気を外部へ強制的に排出すること
ができる。
また、この空気の外部強制排気手段の構成のみ
ならず、全体的な装置の構成を簡略化することが
できると共に、その作業性・操作性に優れた電子
部品の樹脂封止成形装置を提供できる効果を奏す
るものである。[Effects of the Invention] According to the present invention, the residual air existing in the constituent spaces of the pot, the resin passage, and the cavity when the mold is clamped and the air contained in the resin material are forced to the outside. can be discharged. In addition, it is possible to simplify not only the configuration of the external forced exhaust means for this air but also the overall configuration of the device, and to provide a resin encapsulation molding device for electronic components with excellent workability and operability. It is effective.
【0031】 また、上記した残溜空気等が溶融樹脂
材料中に混入しないので、樹脂成形体の内部や表
面部にボイドや欠損部が形成されるのを効率良く
且つ確実に防止することができる電子部品の樹脂
封止成形装置を提供できる効果がある。[0031] Furthermore, since the above-mentioned residual air and the like are not mixed into the molten resin material, it is possible to efficiently and reliably prevent the formation of voids and defects inside and on the surface of the resin molded body. This has the effect of providing a resin sealing molding device for electronic parts.
【0032】 また、特に、固定側及び可動側に両チ
エイスブロツクを固定及び可動の両型に対して頻
繁に着脱するタイプの電子部品の樹脂封止成形装
置に適用する場合に、相乗的な効果を奏するもの
である。[0032] In addition, especially when applied to a type of resin sealing molding equipment for electronic components in which both chase blocks on the fixed side and movable side are frequently attached and detached from both fixed and movable molds, synergistic It is effective.
【0033】 また、上記した諸種の効果と共に、高
品質性及び高信頼性を備えたこの種製品を成形す
ることができると云つた優れた実用的な効果を奏
するものである。[0033] In addition to the various effects described above, the present invention also provides excellent practical effects such as being able to mold this type of product with high quality and high reliability.
【図1】電子部品の樹脂封止成形装置の構成を概
略的に示す一部分解斜視図である。FIG. 1 is a partially exploded perspective view schematically showing the configuration of an apparatus for resin sealing and molding electronic components.
【図2】本発明に係る電子部品の樹脂封止成形装
置における金型の要部を拡大して示す一部切欠縦
断面図で、樹脂封止成形前の型開状態を示してい
る。FIG. 2 is a partially cutaway vertical cross-sectional view showing an enlarged main part of the mold in the resin encapsulation molding apparatus for electronic components according to the present invention, showing the mold in an open state before resin encapsulation molding.
【図3】図2に対応する金型要部の一部切欠縦断
面図で、樹脂封止成形時の型締状態を示してい
る。FIG. 3 is a partially cutaway vertical sectional view of the main part of the mold corresponding to FIG. 2, showing the mold clamping state during resin sealing molding.
【図4】図2に対応する金型要部の一部切欠縦断
面図で、樹脂封止成形後の型開状態を示してい
る。FIG. 4 is a partially cutaway vertical sectional view of the main part of the mold corresponding to FIG. 2, showing the mold in an open state after resin sealing molding.
【図5】外気遮断用部材両者の嵌合面の拡大縦断
面図である。FIG. 5 is an enlarged vertical cross-sectional view of the fitting surfaces of both outside air blocking members.
【図6】外気遮断用部材両者の他の形状例を示す
もので、該両者の嵌合面の縦断面図である。FIG. 6 shows another example of the shape of the outside air blocking members, and is a longitudinal cross-sectional view of the fitting surfaces of the two.
1 固定型 2 可動型 3 固定側金型ベース 4 可動側金型ベース 5 加熱手段 6 加熱手段 7 固定側チエイスブロツク 7b ブロツク 8 可動側チエイスブロツク 8b ブロツク 9 ポツト 10 キヤビテイ 11 加熱手段 12 下部エジエクタープレート 12a エジエクターピン 13 プランジヤーホルダー 13a プランジヤー 13b レール部材 20 キヤビテイ 21 加熱手段 22 エジエクタープレート 22a エジエクターピン 25 カル部 26 ゲート部 27 リードフレーム 27a 電子部品 28 供給取出機構 30 外気遮断用部材 31 駆動機構 32 シール部材 33 外気遮断用部材 34 駆動機構 35 シール部材 36 シール部材 37 シール部材 38 外気遮断空間部 39 真空経路 40 真空源 41 断面垂直面 42 テーパー面 R 樹脂材料 P 樹脂成形体。 1 Fixed type 2 Movable type 3 Fixed side mold base 4 Movable mold base 5 Heating means 6 Heating means 7 Fixed side chase block 7b block 8 Movable side chase block 8b block 9 pots 10 Cavity 11 Heating means 12 Lower ejector plate 12a Ejector pin 13 Plunger holder 13a Plunger 13b Rail member 20 Cavity 21 Heating means 22 Ejector plate 22a Ejector pin 25 Cal Club 26 Gate section 27 Lead frame 27a Electronic parts 28 Supply and extraction mechanism 30 Outside air blocking member 31 Drive mechanism 32 Seal member 33 Outside air blocking member 34 Drive mechanism 35 Seal member 36 Seal member 37 Seal member 38 Outside air isolation space 39 Vacuum path 40 Vacuum source 41 Cross section vertical plane 42 Tapered surface R Resin material P Resin molded body.
Claims (3)
させた樹脂成形用金型を備えた電子部品の樹脂封
止成形装置であつて、上記固定型1及び可動型2
の夫々に、該両型1,2における少なくとも樹脂
材料供給用のポツト9・樹脂通路25,26・樹
脂成形用のキヤビテイ10,20部の外側方周囲
を覆う外気遮断用部材33,30を摺動自在に各
嵌装し、且つ、該両型1,2の型締時に該両外気
遮断用部材33,30の両者を嵌合自在に配設す
ると共に、該両型1,2と上記両外気遮断用部材
33,30との各嵌合面、並びに、該両外気遮断
用部材33,30両者の嵌合面にシール部材を介
在配置し、更に、上記両外気遮断用部材33,3
0両者の嵌合時において両型1,2間に設定され
る外気遮断空間部38と真空源40側とを真空経
路39を介して連通接続させて構成したことを特
徴とする電子部品の樹脂封止成形装置。1. A resin sealing molding apparatus for electronic components, comprising a resin molding mold in which a fixed mold 1 and a movable mold 2 are disposed facing each other, the fixed mold 1 and the movable mold 2 being arranged opposite to each other.
Outside air blocking members 33 and 30 that cover at least the outer periphery of the resin material supply pot 9, the resin passages 25 and 26, and the resin molding cavities 10 and 20 in both molds 1 and 2 are slid onto the molds 1 and 2, respectively. Both of the outside air blocking members 33 and 30 are arranged to be movably fitted together, and both of the outside air blocking members 33 and 30 are fitted together when the molds 1 and 2 are clamped. Seal members are interposed between the fitting surfaces of the outside air blocking members 33, 30 and the fitting surfaces of both the outside air blocking members 33, 30, and
0 Resin for an electronic component characterized in that when the two molds are fitted, the outside air blocking space 38 set between the molds 1 and 2 is connected to the vacuum source 40 side through a vacuum path 39. Sealing molding equipment.
させると共に、該両型1,2に対してチエイスブ
ロツク7,8を着脱自在に嵌装した樹脂成形用金
型を備えた電子部品の樹脂封止成形装置であつ
て、上記固定型1及び可動型2の夫々に、該両型
1,2における少なくとも樹脂材料供給用のポツ
ト9・樹脂通路25,26・樹脂成形用のキヤビ
テイ10,20部の外側方周囲を覆う外気遮断用
部材33,30を摺動自在に各嵌装すると共に、
該両外気遮断用部材33,30の両者を該両型
1,2の型締時に嵌合自在に配設し、且つ、該両
型1,2に対する上記チエイスブロツク7,8の
着脱時には該着脱作業を阻害しない位置にまで後
退自在に配設し、また、該両型1,2と上記両外
気遮断用部材33,30との各嵌合面、並びに、
該両外気遮断用部材33,30両者の嵌合面にシ
ール部材を介在配置し、更に、上記両外気遮断用
部材33,30両者の嵌合時において両型1,2
間に設定される外気遮断空間部38と真空源40
側とを真空経路39を介して連通接続させて構成
したことを特徴とする電子部品の樹脂封止成形装
置。2. An electronic device comprising a resin molding mold in which a fixed mold 1 and a movable mold 2 are disposed facing each other, and chase blocks 7 and 8 are removably fitted to the molds 1 and 2. This is a resin sealing molding apparatus for parts, and each of the fixed mold 1 and the movable mold 2 is provided with at least a pot 9 for supplying resin material, resin passages 25 and 26, and a cavity for resin molding in both molds 1 and 2. Outside air blocking members 33 and 30 covering the outer periphery of the parts 10 and 20 are slidably fitted, and
Both of the external air blocking members 33 and 30 are arranged so that they can be fitted together when the molds 1 and 2 are clamped, and when the chase blocks 7 and 8 are attached to and removed from the molds 1 and 2, It is arranged so as to be freely retractable to a position that does not obstruct the attachment/detachment work, and each of the fitting surfaces of the molds 1 and 2 and the outside air blocking members 33 and 30, as well as
A sealing member is interposed between the fitting surfaces of both the external air blocking members 33 and 30, and furthermore, when both the external air blocking members 33 and 30 are fitted, both molds 1 and 2
The outside air isolation space 38 and the vacuum source 40 are set between
A resin sealing molding apparatus for electronic parts, characterized in that the apparatus is configured such that the two sides are connected to each other via a vacuum path 39.
夫々が、固定側及び可動側の両金型ベース3,4
の外周面に対して摺動自在に各嵌装されているこ
とを特徴とする請求項1又は請求項2に記載の電
子部品の樹脂封止成形装置。3. Both the outside air blocking members 33 and 30 are connected to both the mold bases 3 and 4 on the fixed side and the movable side, respectively.
3. The apparatus for resin sealing and molding electronic parts according to claim 1, wherein the resin sealing molding apparatus for electronic parts is slidably fitted onto the outer circumferential surface of the electronic parts.
Priority Applications (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15571991A JPH04350949A (en) | 1991-05-28 | 1991-05-28 | Resin sealed molded device for electronic component |
GB9418909A GB2280144B (en) | 1991-01-17 | 1992-01-10 | Apparatus for molding resin to seal an electronic part |
GB9200609A GB2252746B (en) | 1991-01-17 | 1992-01-10 | A method of molding resin to seal an electronic part on a lead frame and apparatus therefor |
MYPI92000061A MY108182A (en) | 1991-01-17 | 1992-01-15 | A method of molding resin sealing of semiconductor device and apparatus thereof |
NL9200089A NL194666C (en) | 1991-01-17 | 1992-01-17 | Method and device for enclosing an electronic part by compression molding in synthetic resin. |
KR1019920000661A KR920015493A (en) | 1991-01-17 | 1992-01-17 | Resin bag molding method and apparatus for semiconductor device |
US08/173,150 US5435953A (en) | 1991-01-17 | 1993-12-21 | Method of molding resin for sealing an electronic device |
US08/273,025 US5507633A (en) | 1991-01-17 | 1994-07-08 | Resin molding apparatus for sealing an electronic device |
HK180995A HK180995A (en) | 1991-01-17 | 1995-11-30 | Apparatus for molding resin to seal an electronic part |
HK181095A HK181095A (en) | 1991-01-17 | 1995-11-30 | A method of molding resin to seal an electronic part on a lead frame and apparatus therefor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15571991A JPH04350949A (en) | 1991-05-28 | 1991-05-28 | Resin sealed molded device for electronic component |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH04350949A JPH04350949A (en) | 1992-12-04 |
JPH0563938B2 true JPH0563938B2 (en) | 1993-09-13 |
Family
ID=15611995
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15571991A Granted JPH04350949A (en) | 1991-01-17 | 1991-05-28 | Resin sealed molded device for electronic component |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04350949A (en) |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59227435A (en) * | 1983-06-08 | 1984-12-20 | Mitsubishi Metal Corp | Mold for transfer molding |
JPH0648842Y2 (en) * | 1986-10-09 | 1994-12-12 | 三菱電機株式会社 | Resin encapsulation equipment for semiconductor devices |
-
1991
- 1991-05-28 JP JP15571991A patent/JPH04350949A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH04350949A (en) | 1992-12-04 |
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