JPH05509030A - Novel method and apparatus for uniformly coating structures - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed description of the invention] Novel method and apparatus for uniformly coating structures [Technical field] The present invention generally relates to a new method for uniformly coating a structure and a new method for uniformly coating a structure. Regarding equipment. Completely immerse the structure you want to uniformly coat in the coating fluid, Controlled evacuation of coating fluid. The desired uniform coating on the structure Uniquely designed to provide controlled coating fluid discharge to provide coating configurations A device having at least one sidewall that is sloped or curved is also provided.

[Background technology] In the industry, various structures such as semiconductor components must be coated with coating layers. There are times when you have to. Different coating methods or coatings for each structure. It may be necessary to use a combination of mapping processes.

Coating the surface of a large flat substrate with a coating material such as an organic polymer techniques such as regular numbers are used. , 1) dip coating, 2) Roller coating, 3) Spin coating, 4) Spray coating ing. Obtained by dip coating method and spray coating method. The thickness of these coatings has extremely large variations, sometimes reaching 100%. be. Roller coating methods produce very uniform coatings, but They are complex and expensive to install and have limited ability to coat and manipulate thin, flexible, unsupported substrates. ing. Spin coating methods have similar limitations.

Coating films from solvent-based systems typically uses one of a number of methods. 1) dip coating, 2) roller coating, 3) spin coating 4) Spray coating, thin gold Jl! Large, flat substrates such as foil If the board has to be coated on both sides, for example with resist, spin coat Coating methods such as coating, spray coating, and roller coating The law is impractical for the following reasons.

Roller coating equipment is not designed to handle thin, delicate substrates and This is especially true when surfaces must be coated. Also, usually both sides of the board are Cannot coat at the same time.

With spin coating, for example, only one surface can be coated at a time. Coat the other side. When flipping the board over for coating, lean the coated side against the chuck. Because it is held, there is a possibility of damage to that side.

Spray coating does not form a coating of uniform thickness. This process is environmentally friendly. and industrial hygiene requirements, requiring expensive equipment. , and usually each side is coated separately.

Traditional dip coating is the most practical way to coat both sides simultaneously in a manufacturing environment. This is a typical method. However, current state of the art equipment cannot produce coatings of uniform thickness. . Typically, the bottom portion of the substrate has a thicker coating than other areas. This phenomenon occurs when a wet film This occurs because the film flows when it is pulled up and partially cured or dried. Coating adhered to the lower edge of the coated substrate, forming a so-called wedge The material forms a bead.

Within the framework of the dip coating method, there are currently three different methods for coating. used in the gaming industry. One is to fix the coating tank and try to coat it. In this method, a substrate or structure to be coated is immersed in a coating fluid and then withdrawn from the coating fluid.

The other method is to fix the substrate and move the coating bath away from the substrate.

The third method is to keep both the coating tank and the substrate to be coated fixed; A force is applied to the coating fluid to force it to pass through the substrate. dip coate The fourth method, which has not been evaluated so far, was discovered by the present inventors. Therefore, fix the coating tank and structure and drain the coating fluid. This is a method of coating structures.

US Pat. No. 2,515,489 to Boru 5hko is based on This is an example of dipping a board and pulling it out from a container.

A hot solution of the polymer is used to heat the substrate. The heated coated substrate is The solution is Return to The resulting coating on the substrate is not uniform (therefore, fine geometries are required). and therefore more optimal control and uniformity of film coating is needed. It has limited applications, especially in the electronic industry.

Stelter, US Pat. No. 4,004,045, discloses that the substrate An example of a single-sided coating system where the coating is moved and the coating bath is fixed. be.

U.S. Pat. No. 4,275,098 to Gunzi et al. This is another example of keeping the tank fixed. Its design is conventional and coati Because immersion is used as a method of coating, the resulting coating is uneven and extremely This is especially true for flat, tight-tolerance structures.

U.S. Patent No. 4,341,817 by Toz i e r et al. This is a typical example of coating a structure while keeping the coating bath in a fixed position. . In the above patent, coating is achieved by varying the speed at which the valve is coated. Adhesion speed changes. This produces coatings of varying thickness, allowing you to apply the coating where you need it most. This creates a thicker protective coating.

Weber U.S. Pat. No. 4,438,159 Insert the item to be coated into the coating medium, remove it, and remove the liquid from the coating medium. The holding tank remains fixed (another example is when using a multifocal lens). Immerse in the neating solution and leave until it reaches the temperature of the solution.

Pull up on the lens and let the coating melt until excess material runs off the target surface. Due to the physical properties of the dip coating, it is kept in an atmosphere saturated with media. , a "wedge-shaped" coating results.

Multi-chamber equipment is used to move liquid from one chamber to another and A method of immersing a plate in a stationary tank and removing it from there was developed by Albrecht. cht) et al. U.S. Pat. No. 4,783,348. Single layer substrate By passing it through the membrane plan, a continuous single layer is formed and the parts are coated. . Continuously drains and refills the liquid in the tank while keeping the liquid level constant. It is also discussed.

U.S. Pat. No. 4,597,931 to Watanabe et al. fixes the substrate and mechanically closes the tank. This is a good example of the dip coating method. Corrected by hydraulic piston The coating bath is moved at a constant speed to produce a coating of varying thickness, with the coating being thickest at the bottom. can be obtained. The control system that maintains the speed of movement of the hydraulic piston is also described. It is. The basic principle of the above patent is opposite to the present invention. The concept of the above patent is based on the thickness of the coating. The goal of the present invention is to obtain a uniform coating. Is Rukoto.

U.S. Pat. No. 4,840,821 to Miyazaki et al. basically describes the coating fluid. Lift the surface of the substrate so that it is in direct contact with the flat surface of the substrate, and keep the bath stationary. This shows another dip coating method.

U.S. Pat. No. 4,085,010 to Ishimori et al. The object to be plated is placed in an upright position in an electroplating apparatus with a uniform distribution of The third type currently used in the dip coating industry is It describes the method. Pump the plating solution from one of three different reservoirs. into the bottom of the plating tank. The solution flows upwards and takes up a cylindrical plating tank. It overflows into the surrounding recirculation tank.

As mentioned earlier, conventional methods such as dip coating can remove When the polymer is applied to the substrate by heating, the dried film has a uniform thickness. There isn't. The dry coating thickness profile is thinnest at the top of the substrate and thinnest at the bottom. It also takes the form of a thick, tapered wedge. This fluctuation is twice (sometimes even twice) .

This wedge condition occurs because the wet polymer flows as the solvent evaporates. Therefore, this is when the evaporation rate changes as the thickness changes. As solvent is lost surface tension and viscosity increase, slowing the flow and thereby lowering the A large amount of polymer will remain.

To compensate for or react to these changes, ζ2 is There is also a need to change the pulling speed of parts. One way to solve this problem By incorporating expensive and complex control systems into dip coating equipment, be.

Combines hydrodynamics (controlling polymer feed and withdrawal rates) with a unique jacket design By combining resists on structures that are easy to control and highly reproducible We have now discovered that it is possible to achieve a uniform coating.

The present invention provides practical solutions that produce extremely uniform and complete coated films over large areas. It demonstrates a practical method. In addition, the profile of the tank containing the solution or Coating speed can be varied by liquid drainage rate or both. Wear.

As used herein, the term "structure" refers to means any article that can be coated.

The structure to be coated is preferably held in a fixed position, and the power of the bath design The chemical and fluid properties are used to supply and withdraw fluid at a predetermined rate to coat things.

One advantage of using the teachings of the present invention is that complex electromechanical control systems It is possible to uniformly coat the structure without using it. Flammable liquids, May cause explosion or fire in the presence of coating fluids such as photoresist. It is also important that no electronic circuits are used.

Additionally, the principles and apparatus disclosed herein require very few mechanically moving parts. Therefore, clean room contamination is avoided, making it suitable for clean room environments. very suitable.

Another advantage of the present invention is that for a given vessel shape, the liquid recovery rate profile is is reproducible between cycles and therefore provides a uniform coating of the structure. Is Rukoto.

Coating fluid can be moved across the structure to be coated by simply changing the shape of the bath. The desired linear motion of can be anything from constant to variable. too Of course, the second method is to transfer the coating from the coating tank to the holding tank or gravity tank. control or change the discharge of the fluid.

This can be done, for example, by electrical, mechanical or pneumatic pump systems. . The pump system pumps the coating from the coating tank to the holding tank or gravity tank. It may be part of a filtration system that controls the flow of fluid. Similarly, using gravity The coating fluid can also flow into the holding tank using the same method.

The present invention also applies to any material such as foils, masks, PC boards, substrates, semiconductor wafers, etc. Manually depositing coatings in a uniform and reproducible manner onto structures or electronic components Also provides stairs.

The coating fluid for the coating layer or coating antinodes can be a solvent or water. A polymeric material dissolved in a neutral medium.

Specific materials may be used with the present invention for specific applications. and For example, coating a fluid such as photoresist on a metal mask or metal foil. can be applied on the surface of the surface.

The structure to be coated can be made in almost any shape or size, and can be coated in a variety of ways. It can be used in a variety of industries, but its primary use is in applications that require highly uniform coatings. It is expected that it will be in a structure where An example of such an application is when structures such as substrates are In the electronic industry, where having a uniform coating is sometimes of paramount importance. .

The shape of the structure to be coated can be selected from circular, rectangular, triangular, polygonal, etc. You can choose. Furthermore, the method and apparatus of the present invention can be applied over the entire surface of a large area flat substrate. It is possible to coat a film of extremely uniform thickness.

Furthermore, using this method, the bead shape that occurs This method reduces the amount of polymer formed at the bottom of the structure. No extra operations are required as there are no beads of coating fluid, such as beads of Become. Currently, a bead of this coating fluid is deposited on the bottom of the coated structure. Although the cord is removed by cutting, sawing, or shearing, the present invention There is no problem.

The basic reason for bead loss is due to sagging or flow as the coating dries and solidifies. Thus, the thicker coating formed on the bottom of the substrate is constantly dissolving.

[Object of the invention and summary code] One object of the present invention is to apply a uniform coating of neating material to both sides of a flat substrate. The goal is to provide techniques. Specifically, this method works with delicate large pieces such as thin metal foil. Works well even on flat substrates (.

Another object of the invention is to describe an apparatus for producing the above-mentioned coatings in a highly uniform manner. There is a particular thing. The device described in this invention is simple and easy to reproduce. bring sex.

One aspect of the invention discloses a process for coating a structure, comprising the steps of: Ru.

a) Immersing at least a portion of the structure in a coating fluid contained in a container.

b) draining the coating fluid from the container, thereby discharging at least a portion of the structure; Form a coating in minutes.

Another aspect of the invention is a co-op having a bottom wall, a cover and at least three side walls. It is equipped with a coating bath containing a coating fluid, with a small or at right angles to the structure and to remove coating fluid while coating the structure. An apparatus for coating a structure is disclosed, comprising means for coating a structure.

The invention also provides a coating stream having a bottom, a cover and at least three side walls. A coating bath is provided in which the body is placed, and at least one side wall is perpendicular to the bottom wall surface. and also includes means for removing the coating fluid during coating of the structure. It also includes apparatus for coating structures, including:

The invention also provides a coating stream having a bottom, a cover and at least one sidewall. It is equipped with a coating bath in which the body is placed, and the coating fluid is applied during coating of the structure. It also includes an apparatus for coating a structure, comprising means for removing.

The apparatus of the present invention also includes storing a coating fluid in the coating bath or distributing the coating fluid therein. A holding tank or gravity layer may be provided for removal of the material. This removal is This can be done by force or by a pump type system. Of course, this device is coated. Temperature control means may be provided for controlling heating or cooling of the cooling fluid.

A small portion of the structure is coated by immersing at least a portion of the structure in the coating fluid. At least a portion can be coated with a coating fluid.

Of course, the product can be obtained using any of the methods disclosed and taught in this invention. Wear.

Brief description of the drawing The features believed to be novel and the distinguishing elements of the invention are set forth in the appendix. It is specifically described in the claims. However, the present invention itself is Please refer to the detailed description given below in conjunction with the accompanying drawings for both the You can best understand it by looking at it.

FIG. IA is a side view of a device constructed in accordance with the teachings of the present invention.

FIG. FIG.

FIG. 2 is a side view of another embodiment of an apparatus constructed in accordance with the teachings of the present invention.

FIG. 3 is a side view of another embodiment of an apparatus constructed in accordance with the teachings of the present invention.

FIG. 4 is a side view of another embodiment of an apparatus constructed in accordance with the teachings of the present invention.

FIG. 5 is a side view of another embodiment of an apparatus constructed in accordance with the teachings of the present invention.

FIG. 6 shows the coating obtained from the straight wall fabrication of FIG. 5 using the teachings of the present invention. In addition, compared to a device similar to the device in Figure IA with one sidewall angled at 15 degrees. This is a graph.

[Detailed description of the invention] The present invention describes a novel method and apparatus for obtaining uniform coating of structures. It is something to do.

Currently, in the production of metal masks, parts are photographed using a chain-driven conveyor. A bath of fluid, such as a resist, is heated at the same rate as the prebake (soft beta) rate of the part. It is immersed in water at a temperature of 100°C and then pulled out from there. The present invention provides a uniform surface area over a large surface area. Coating practices such as resist coatings that produce film coatings. Disclose practical methods.

Coating fluids such as photoresist coatings on substrates as previously mentioned The edge effect occurs because the wet polymer flows as the solvent evaporates. This is when the evaporation rate changes as the thickness changes. These changes To compensate for or react to, increase the rate of part pull across the entire surface. It is necessary to change. One technique to do this is to dip This may involve modifying the coating equipment to incorporate an expensive and complex control system. However, the reliability and performance of this control system cannot be guaranteed.

However, the level of liquid in the tank and the rate of withdrawal of liquid leaving the tank through the orifice are By recognizing these effects, the rate of fall of the liquid level in the bath can be controlled quite easily. Wear. By varying the cross-sectional area across the tank profile, the orifice (drain) size can be adjusted. By keeping the method constant, the structures to be coated are The linear movement of the liquid on the surface of the structure changes correspondingly. Therefore, also The tank geometry dictates the recovery rate and therefore the uniformity of the film coating. stipulate. This technique addresses the mechanisms described above that cause nonuniformity during film coating. It works to compensate for.

Using the basic relational expression of fluid mechanics called [Bernoulli's equation], fluid recovery is possible. The velocity can be calculated as a function of the liquid level in the inclined tank. steady non-pressure Bernoulli's equation for contractile flow is:

P2-P1=9g (Y2-yt) In the above formula, P2 and Pl are respectively below the tank. It represents the static pressure of the solution confined in the tank at the end and top, and ρ is the fluid tightness in the tank. degree, g is gravity, Y2 and Yl are the height of the solution at the top and bottom of the tank, respectively. represents the difference between

The above relationship shows that the pressure difference is proportional to the solution height difference. did Therefore, we apply Bernoulli's relation to specific physical properties of the coating solution. Uniform coating of flat substrates by designing the bath shape to match becomes possible.

Figure IA shows a preferred apparatus for practicing the invention.

The coating device 5 has a bottom wall 12, an inclined side wall 14, and a vertical side wall 16. It consists of a coating tank 10. End walls (not shown) can be vertical or sloped. It may be curved. Cover 18 protects coating apparatus 1o from contamination one or more pipes that allow access to and from the structure being dip coated. It can have an opening. The holding tank or gravity tank 3o has a liquid level 26 and has a bottom wall. It is connected to the coating tank 1o via 12 or one of the side walls. Figure IA As shown, a pipe 31 with a normal control valve 32 connects the coating tank 1o to the holding tank. Connected to 30. A holding tank or gravity tank 30 collects the necessary coating fluid. It only serves as a storage place for the coating fluid 22 that is supplied to the coating tank 10. but not after the fluid is drained from the coating bath 10 during coating of the structure. also acts as a holding tank or gravity tank (.

A filtration system may also be provided to purify the fluid or liquid. filtration system The system also includes a pump system for drawing fluid or liquid from the coating bath 10. can be included.

In Figure IA, pipes 33 and 37 are inserted between the coating tank 10 and the holding tank 30, respectively. A filtration system 35 with control valves 34 and 36 is arranged. Cortein In order to supply the fluid 22 to the pumping tank 10, a pipe 39 equipped with a pump 40 and a control valve 38 is installed. It is provided. The coating tank 1o is heated to a desired height with coating fluid 22. The structure to be coated, ie, the substrate 2o, is coated using the substrate holder 21. bathing fluid 22. The part of the substrate 20 to be coated is lower than the liquid level 24. must be below the ground. Therefore, when coating the entire structure 20, The entire plate 20 must be completely immersed in the fluid 22 below the liquid level 24. Ko Once the coating system is set up, the coating in the coating bath The filtration fluid 22 is discharged by gravity into the holding tank 3o or pumped and filtered. It is pumped through system 35 at a constant rate in a controlled manner. which place In this case, the coating bath 10 and the substrate 2o remain fixed. Of course, coate The flow of the cooling fluid 22 into the holding tank 30 is also controlled by control valves 32, 34 or 36. Can be controlled. After the coating fluid 22 passes through the substrate 2o once, the coating material properties Additional coating layers can be applied as required. Lift up the substrate 20 and coat it again. The coating tank 10 is filled with the coating fluid 22, and the substrate 20 is filled with the coating fluid 2. By soaking in It is feasible to form. This step can be repeated as many times as desired. I can do it. so that the next coating layer is formed only after the previous coat has dried , it would be obvious to make sure that enough time has passed between each coating layer. . This technique allows the coating material to be partially or completely removed by subsequent immersions. This is only the case when it does not have the property of being redissolved.

A coated substrate 20 resulting from a single coating layer 26 is shown in Figure IB. Before As described in , the substrate 20 may include multiple coatings of the same or different materials. It is also possible to have a layer 26. If a substrate coated on only one side is desired, the coating Remove the coating from unnecessary areas, such as by covering the areas with a mask. It will be very easy for a person skilled in the art to do so.

FIG. 2 shows another embodiment of the structure of the coating bath. The coating tank 50 has a bottom The coating tank 50 has a wall 12 and a cover 18, and the side walls 54, 56 of the coating bath 50 are sloped. The structure 51 to be coded is completely immersed in the fluid 22 below the liquid level 24, except that Soak. At the beginning of the coating operation, fluid 22 passes through tube 52 to tank 30 as well. is discharged to a pump and filtration system similar to a holding tank or system 35. Canada A heating or cooling means 58 is provided in the coating bath 5o or other container utilizing the present invention. It can also be equipped with a heating tank.

Another possible variation of the coating bath design is shown in FIG.

The coating tank 6o has two side walls 64,66, which are inclined. Therefore, the surface area of the cover 18 is larger than the surface area of the bottom wall 12. tube 62 The fluid 22 can be pumped directly or via a pump and filtration system 35 to a gravity tank. Alternatively, it is discharged into the holding tank 30. completely in coating fluid 22 to coat A submerged, unusually shaped substrate 61 is shown.

FIG. 4 shows that even if the coating bath 70 has a different shape, the substrate 20 can be coated uniformly. This shows that you can obtain The side walls 74, 76 of the coating tank 7o are curved. ing. End walls (not shown) may or may not be curved. A stirring means 78 is provided in the tank 7o to maintain the viscosity of the coating fluid 22. It can also be attached. By stirring this coating fluid, the coating flow Body homogeneity is also maintained. Movement of the liquid or fluid may adversely affect the structure being coated. As shown in FIG. Mixing should be kept to a minimum. The curved side walls 74 and 76 have a circular or elliptical cross section. It can be a shape, etc. As shown, substrate 20 is partially coated with layer 26. The coating fluid 22 is passed from the coating tank 7o through the conduit 72. It is being discharged.

Another embodiment of the coating bath is shown in FIG. The coating tank 80 is straight It has round side walls 84, 86, a bottom wall 12 and a cover 18. The board 20 is as shown in the figure. All sides are coated with a coating layer 26. Fluid 22 is a coating tank Since the liquid is being discharged from 80 to the holding tank 30 through the pipe 82, the liquid level 24 is lower than the coated substrate. It has fallen below 20. As mentioned above, the fluid 22 is moved by gravity or can be directed to holding tank 30 by a pump and filtration system 35.

In view of current equipment limitations and shortcomings, it is now possible to reproduce coatings of uniform thickness. It has become possible to create

Dip coating parameters such as liquid height, liquid pulling techniques and Coating large flat substrates by optimizing the raising speed and bath design It is possible to uniformly and conveniently and precisely limit the mapping.

One of the key factors in achieving the uniform coating of the present invention is the coating (should be neat) while controlling coating integrity by bath profile Rather than pulling the structure out of the container, the coating fluid is forced out of the container at a constant flow rate. It is to discharge it.

A layer or coating created using the coating method of the present invention that coats a structure with a material. Composite layers can also be formed. To do this, first a first uniform layer is formed, and this Allow the first layer to dry completely and then repeat the process to achieve the desired evenly coated layer. Get a number of additional layers. However, there is a need for this method to be consistent with the original properties of the coating material. There is a point.

example: The following examples are intended to illustrate the invention in more detail and may be used in any form. This is not intended to limit the scope of the present invention.

Select two 25.4 cm (10 inch) structures that are thin molybdenum masks. and its physical properties such as dimensions and thickness were recorded. One mask is shown in Figure 5. A second mask is placed in a straight-walled coating bath similar to that shown in Figure IA. A similar coating bath was placed with one side wall sloped at 15 degrees.

Fill both coating baths with the same coating fluid, i.e. photoresist. and completely immersed both masks in the coating fluid. Open the valves and The coating fluid is allowed to flow down by gravity from the coating tank into the gravity tank or holding tank. Ta. The flow rate from both coating baths was controlled at 16.4 ml per minute. figure 6 or Table 1, for a 25°4cm mask or structure, a straight wall The mold coating bath has a coating thickness of 3.0 cm on the top of a 25.4 cm mask. ``wedge'' with a coating thickness of 4.0 microns at the bottom of the mask shape profile, but the sloped wall coating bath is Gives a fairly uniform profile with almost no difference in thickness. Straight wall coating In the bath, there was a 1 micron variation in coating thickness, but the sloped wall coating In the bath, the coating thickness on the top and bottom of the mask of 25.4 cm under the same conditions The variation in size was only 0.1 micron.

Table 1 Straight wall type, 15 degree inclined wall type Top 3.0 micron 3.5 micron Bottom 4゜0 micron 3.6 micron This clearly shows that using the method of the present invention with inclined walls, As a result, a very uniform coating can be obtained. Similarly, using the method of the invention by changing the profile of the coating bath, or by changing one or more coating bath profiles. “Customize” the coating on the structure by changing the angle of the sidewalls. ” can also be done.

A straight-walled coating bath similar to that shown in Figure 5 formed a "wedge"; Using prior art methods, wedges that are twice as thick are obtained in most cases. In addition to forming a bead on the bottom edge of the mask. On the other hand, the method of the present invention When used, a slight "wedge" may form when using a straight-walled coating bath. However, no bead formation was observed. This means that the fluid to be discharged is 25.4 cm, pulling the boundary layer or meniscus as it passes through the bottom edge of the mask, This is because it prevented the formation of a code.

This makes it obvious in dip coating applications and other pulling techniques. , it can be seen that the wedge thickness profile on the flat substrate is now .

Although the invention has been described in detail with respect to certain preferred embodiments thereof, Obviously, in light of the present invention, numerous alternatives, modifications and variations will be apparent to those skilled in the art. It is white. Accordingly, the appended claims cover such alternatives, modifications and It is intended that variations be included within the true scope and spirit of the invention.

+ 2 3 4 5 6 7 8 9 10 Procedural amendment (voluntary) 1. Display of patent application International application P CT/U S 901068522, title of the invention Novel method and apparatus for uniformly coating structures 3, corrector Relationship to the incident: Patent applicant Address: American Congregation 1!110504, Armonk, New York (no street address) J Name: International Business Machines Address: Postal code 106 3-2-12 Roppongi, Minato-ku, Tokyo IBM Japan Co., Ltd. Te1 (main representative) 3586-1111 Contact information: 5563-3749.556 3-37545° bottom wall and cover and at least three 611! and has less (and A coat containing coating fluid, with one side wall at right angles to the bottom, A coating bath is provided to remove the coating fluid while coating the structure. Device for coating structures, in which steps are provided.

6. Coating stream having a bottom wall, a cover and at least one curved side wall A coating bath containing a body is provided, and the coating flow is applied while coating the structure. A device for coating structures, provided with means for removing bodies.

international search report 1m1-1-A Pass ka+1IIl-PCT/US 90106852 International Survey Report notice US9006852 S^　43634

Claims (26)

[Claims] 1. a) immersing at least a portion of the structure in a container of coating fluid; Tep and b) draining said coating fluid from said container, thereby removing said coating fluid from said structure; forming a coating on at least a portion of the coating; Methods of coating structures, including: 2. Claim characterized in that a uniform coating is formed on the structure. 1. The method of coating a structure according to 1. 3. Claim characterized in that a non-uniform coating is formed on the structure. A method for coating a structure according to claim 1. 4. coating of the structure by changing the profile of the container. 2. Coating the structure according to claim 1, characterized in that the coating has a different profile. how to. 5. The structure is placed in a container having at least one sloped wall with the coating. The coating method according to claim 1, characterized in that the structure is coated with a coating fluid. How to do it. 6. Structure according to claim 1, characterized in that the structure consists of an electronic component. How to coat things. 7. The coating fluid for the coating is dissolved in a solvent or an aqueous medium. Coating the structure according to claim 1, characterized in that it is a polymeric material with how to. 8. Claim characterized in that the coating fluid is discharged in a controlled manner. 1. The method of coating a structure according to 1. 9. Claim 1, characterized in that the coating fluid is discharged into a holding tank. A method of coating a structure as described. 10. The coating fluid may be discharged into a holding tank through a filtration system. A method of coating a structure according to claim 1, wherein the method comprises: 11. The coating fluid is discharged into a holding tank by gravity. A method of coating a structure according to claim 1. 12. discharging the coating fluid into a holding tank via a pump system; A method of coating a structure according to claim 1, characterized in that: 13. The shape of the structure to be coated is circular, square, triangular, or polygonal. A method for coating a structure according to claim 1, characterized in that the method is selected from the group Law. 14. 2. The method according to claim 1, characterized in that the coating fluid is heated. How to coat structures. 15. 2. The method according to claim 1, characterized in that the coating fluid is cooled. How to coat structures. 16. 2. The method according to claim 1, characterized in that the coating fluid is agitated. How to coat structures. 17. A product made by the method of claim 1. 18. a bottom wall, a cover, and at least three side walls, the at least one side wall being a coating tank containing coating fluid not perpendicular to the bottom; and means for removing said coating fluid during coating of the structure. equipment for coating structures. 19. Claim characterized in that the coating fluid is removed into a holding tank. 19. Apparatus for coating a structure according to 18. 20. characterized by comprising means for controlling the temperature of the coating fluid, Apparatus for coating structures according to claim 18. 21. a bottom wall, a cover, and at least three side walls, the at least one side wall being a coating tank containing a coating fluid at right angles to the bottom; , means are provided for removing said coating fluid during coating of the structure. equipment for coating structures. 22. Claim characterized in that the coating fluid is removed into a holding tank. 22. The apparatus for coating a structure according to item 21. 23. characterized by comprising means for controlling the temperature of the coating fluid, Apparatus for coating structures according to claim 21. 24. a coating having a bottom wall, a cover and at least one curved side wall A coating tank containing a fluid is provided to coat the structure while coating the structure. Apparatus for coating structures, provided with means for removing fluid. 25. Claim characterized in that the coating fluid is removed into a holding tank. 25. The apparatus for erecting a structure according to item 24. 26. characterized by comprising means for controlling the temperature of the coating fluid, Apparatus for coating structures according to claim 24.