JPH0549846B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a seismic isolation/vibration isolation structure, and particularly to a seismic isolation/vibration isolation structure suitable for mounting semiconductor manufacturing equipment.

[Background of the invention]

Various types of semiconductor manufacturing equipment are installed in clean rooms and the like, and some of these semiconductor manufacturing equipment, such as steppers, are extremely sensitive to vibration. Therefore, semiconductor manufacturing equipment that dislikes such vibrations must be installed on a floor with a seismically isolated and vibration-proof structure. Figure 1 shows a conventional seismic isolation/vibration isolation structure. As shown in FIG. 1, a mount frame 12 with an open top is installed on the base 10, and an intermediate mount 14 is supported on this mount frame 12. That is, the intermediate pedestal 14 is supported on its lower surface by the pedestal frame 12 via a coil spring 16, and is supported by the pedestal frame 12 on its side via a rubber damper 18. Note that the member indicated by the reference numeral 20 is a weight disposed at the center of the intermediate frame 14. A pedestal 24 is installed on the upper part of the intermediate pedestal 14 via anti-vibration rubbers 22, 22, and equipment such as semiconductor manufacturing equipment is installed on this pedestal 24.

However, in the seismic isolation/vibration-proof structure shown in Fig. 1, when the weight of the equipment increases, the vibration-proof rubber 22
may buckle and become unable to support equipment. In addition, in the above-mentioned vibration isolation structure, the structure of the vibration isolation structure is complicated, and the seismic isolation/vibration isolation effect is only effective in one direction (up and down direction).
It is difficult to have a three-dimensional vibration absorption effect, as there is a risk of resonance for frequencies (below 10Hz).

Fig. 2 shows another conventional seismic isolation/vibration isolation structure. A base 10 and a pedestal 2 on which equipment etc. are installed
A laminated rubber 26 is disposed between the rubber member 4 and the rubber member 4. The laminated rubber 26 includes rubber plates 28 and metal plates 30 arranged alternately in a laminated manner, and these are adhered to each other to constitute the laminated rubber 26.

However, the conventional seismic isolation/vibration isolation structure using the laminated rubber 26 has the advantage of being able to support a large vertical load because the metal plate 30 is arranged, but the equipment installed on the pedestal 24 is lightweight. In some cases, buckling may occur because the rigidity is weak in the horizontal direction.

[Purpose of the invention]

The present invention has been made in view of the above circumstances, and is a seismic isolation/vibration proofing system that has a seismic isolation/vibration proofing effect regardless of the weight of the equipment, and further has a seismic isolation/vibration proofing effect in three dimensions. The purpose is to propose a structure.

[Summary of the invention]

In order to achieve the above object, the present invention includes a base;
a pedestal frame supported on a base via a plurality of laminated rubber; a lattice-shaped vertical wall provided on the pedestal frame and forming a plurality of spaces; and a plurality of spaces formed by the lattice-shaped vertical wall. A plurality of mounts, each of which is placed within the mount frame and supports equipment, whose upper or lower part is supported by an elastic body on the mount frame, and whose sides are supported by the vertical wall of the mount frame via laminated rubber. and,
It is characterized in that the individual devices are placed on each of the plurality of frames.

〔Example〕

Preferred embodiments of the seismic isolation/vibration isolation structure according to the present invention will be described in detail below with reference to the accompanying drawings.

3 and 4 show the structure of a first embodiment of the present invention. As shown in FIG. 3, a pedestal frame 32 is supported on the base 10 via laminated rubber 26, 26. As described above, the laminated rubber 26 is composed of rubber plates 28 and metal plates 30 arranged alternately in a laminated manner. Vertical walls 34 are erected upward on the mount frame 32 in a grid pattern.
(In FIGS. 3 and 4, only one space formed by the lattice-like vertical walls 34 is shown, and other spaces are omitted.) Frame 2 that supports equipment such as manufacturing equipment
4 will be installed. The bottom surface of the pedestal 24 is supported on a pedestal frame 32 via an elastic body 36. In addition, the four sides 24A, 24A, 24A, 24A of the pedestal 24,
is supported by the vertical wall 34 of the pedestal frame 32 via the laminated rubber 26. The laminated rubber 26 is placed between the side surface 24A of the pedestal 24 and the vertical wall 34 of the pedestal frame 32 in a compressed state with preload applied thereto.

According to the embodiment of the present invention configured as described above, the load in the vertical direction is supported by the laminated rubber 26 installed between the base 10 and the frame frame 32, and the load in the horizontal direction is supported. The frame 24 and the vertical wall 3
Since it is supported by the laminated rubber 26 installed between the base plate and the base plate 4, it has a seismic isolation and vibration damping effect against vibrations in two-dimensional directions.

5 and 6 show the structure of a second embodiment of the present invention. In the second embodiment, a multi-stage laminated rubber 40 is disposed between the base 10 and the pedestal frame 32. The multi-stage rubber laminate 40 has ordinary rubber laminates 26, 26 connected midway through a plurality of connecting plates 42 to prevent the rubber laminate 26 from buckling against displacement in the horizontal direction. The connecting plate 42 may be formed of a rigid body and connect the metal plates 30 of the laminated rubber 26. As a result, even if the equipment and the like installed above are lightweight, the multi-stage rubber lamination 40 prevents the laminated rubber 26, 26 from buckling due to displacement in the horizontal direction. In the second embodiment, the vertical walls 34 erected on the frame frame 32 are formed in a lattice shape as shown in FIG. 6, and a plurality of spaces 44 are formed. Each of the plurality of spaces 44 is provided with a pedestal 46 for supporting equipment and the like. The pedestal 46 is formed into a prismatic shape with a hollow interior, and is supported at its lower end with an elastic member 50 interposed between it and a support protrusion 48 formed at the lower part of the vertical wall 34 . Also, pedestal 4
Laminated rubber 26 is disposed between the side surface of 6 and the vertical wall 34 in a preloaded state. This laminated rubber 26 is provided to absorb horizontal loads. The elastic modulus of the laminated rubber 26 and elastic body 50 that support the pedestal 46 in the other space 44 can be determined according to the weight of the equipment supported by the pedestal 46 or the required vibration isolation structure. Although the bottom surface of the pedestal 46 is supported on the pedestal frame 32 by an elastic body 50, it may be suspended by an elastic body.

According to the embodiment, the laminated rubber 40 that supports the pedestal frame 32 is constructed in a multi-tiered manner, so that it has strong horizontal rigidity and does not buckle due to horizontal shaking even when lightweight equipment is installed. Never. Moreover, since the laminated rubber 26 is disposed between the vertical wall 34 and the pedestal 46, the load in the lateral direction can be supported.

Further, according to the second embodiment, the lattice-shaped mount frame 3
Since the pedestals 46 are individually provided in the plurality of spaces 44 formed in 2 through the elastic bodies 50, devices can be arbitrarily set in each pedestal 46. Therefore, a sufficient load can be applied to the rubber laminations 40, 40 supporting the frame frame 32, so that buckling deformation of the rubber laminations 40, 40 can be prevented.

Furthermore, since a plurality of devices can be distributed to individual pedestals, each pedestal 46 can receive vibrations generated when each device operates. Therefore, it is possible to prevent the vibrations of each of the plurality of devices from propagating to other devices via the pedestal 46 and adversely affecting each other.

Furthermore, one mount frame 32 formed in a grid shape
Since a plurality of devices can be installed in the system, the equipment can be simplified.

〔Effect of the invention〕

As explained above, according to the seismic isolation/vibration isolation floor structure according to the present invention, since the laminated rubber is disposed between the side surface of the pedestal that supports equipment etc. and the vertical wall of the pedestal frame that supports the pedestal, Can support lateral loads. In addition, the vertical frame of the mount frame is divided into a grid pattern to form a plurality of spaces, and a mount supporting each piece of equipment is placed in this space. By appropriately changing the type of the spring and the elastic modulus of the spring, etc., it is possible to provide seismic isolation and vibration isolation effects that meet the requirements of each semiconductor manufacturing device.
Furthermore, since the mount frame has laminated rubber placed in multiple stages between it and the base, the laminated rubber will not buckle under lateral loads even if the machinery is lightweight. do not have.

Moreover, according to the seismic isolation/vibration isolation structure according to the present invention,
Since the mounts are individually provided in the plurality of spaces formed in the lattice-shaped mount frame via elastic bodies, it is possible to arbitrarily set equipment on each mount. Therefore, a sufficient load can be applied to the plurality of laminated rubbers supporting the gantry frame, so that buckling deformation of the plurality of laminated rubbers can be prevented.

Furthermore, since a plurality of devices can be distributed to individual mounts, each mount can receive the vibrations generated when each device operates.
Therefore, it is possible to prevent the vibrations of each of the plurality of devices from propagating to other devices via the pedestal and adversely affecting each other.

Furthermore, since a plurality of devices can be provided on one lattice-shaped mount frame, the equipment can be simplified.

[Brief explanation of the drawing]

Figure 1 is a sectional view showing the structure of a conventional seismic isolation/vibration isolation structure, Figure 2 is a front view showing another conventional seismic isolation/vibration isolation structure using laminated rubber, and Figure 3 is a cross-sectional view showing the structure of a conventional seismic isolation/vibration isolation structure. 4 is a sectional view showing the structure of the first embodiment, FIG. 4 is a plan view thereof, and FIGS. 5 and 6 are sectional views showing the structure of the first embodiment.
The drawings show the structure of the embodiment, FIG. 5 is a partial sectional view thereof, and FIG. 6 is a plan view thereof. DESCRIPTION OF SYMBOLS 10... Base, 26... Laminated rubber, 32... Frame, 34... Vertical wall, 40... Multi-stage laminated rubber.

Claims (1)

[Scope of Claims] 1. A base, a pedestal frame supported on the base via a plurality of laminated rubber, a lattice-shaped vertical wall provided on the pedestal frame and forming a plurality of spaces, and the lattice-shaped vertical wall It is placed in a plurality of spaces formed by vertical walls and supports the equipment, and its upper or lower part is an elastic body and is supported by the frame frame, and the side part is laminated to the vertical wall of the frame frame. A vibration-isolating/vibration-isolating structure comprising: a plurality of pedestals supported via rubber; and the individual devices are placed on each of the plurality of pedestals. 2. The vibration isolation/vibration isolation structure according to claim 1, wherein the laminated rubber between the substrate and the frame frame are connected to each other by a connecting plate.