JPH0548060A - Solid-state image sensor element - Google Patents
Solid-state image sensor elementInfo
- Publication number
- JPH0548060A JPH0548060A JP3225091A JP22509191A JPH0548060A JP H0548060 A JPH0548060 A JP H0548060A JP 3225091 A JP3225091 A JP 3225091A JP 22509191 A JP22509191 A JP 22509191A JP H0548060 A JPH0548060 A JP H0548060A
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- light
- solid
- color filter
- photoelectric conversion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 20
- 238000006243 chemical reaction Methods 0.000 claims abstract description 13
- 210000002858 crystal cell Anatomy 0.000 claims abstract description 3
- 238000003384 imaging method Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 abstract description 10
- 239000004990 Smectic liquid crystal Substances 0.000 abstract description 3
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 239000000975 dye Substances 0.000 description 12
- 230000031700 light absorption Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 230000002194 synthesizing effect Effects 0.000 description 2
- 239000004986 Cholesteric liquid crystals (ChLC) Substances 0.000 description 1
- 108010010803 Gelatin Proteins 0.000 description 1
- 229920000106 Liquid crystal polymer Polymers 0.000 description 1
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 1
- 239000004988 Nematic liquid crystal Substances 0.000 description 1
- 239000004983 Polymer Dispersed Liquid Crystal Substances 0.000 description 1
- DPOPAJRDYZGTIR-UHFFFAOYSA-N Tetrazine Chemical compound C1=CN=NN=N1 DPOPAJRDYZGTIR-UHFFFAOYSA-N 0.000 description 1
- 230000032900 absorption of visible light Effects 0.000 description 1
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 1
- 150000004056 anthraquinones Chemical class 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000004043 dyeing Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920000159 gelatin Polymers 0.000 description 1
- 239000008273 gelatin Substances 0.000 description 1
- 235000019322 gelatine Nutrition 0.000 description 1
- 235000011852 gelatine desserts Nutrition 0.000 description 1
- DZVCFNFOPIZQKX-LTHRDKTGSA-M merocyanine Chemical compound [Na+].O=C1N(CCCC)C(=O)N(CCCC)C(=O)C1=C\C=C\C=C/1N(CCCS([O-])(=O)=O)C2=CC=CC=C2O\1 DZVCFNFOPIZQKX-LTHRDKTGSA-M 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 125000005504 styryl group Chemical group 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
Landscapes
- Facsimile Heads (AREA)
- Color Television Image Signal Generators (AREA)
- Liquid Crystal (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、固体撮像素子に関し、
特に、カラー撮像が可能な固体撮像素子に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solid-state image sensor,
In particular, it relates to a solid-state image sensor capable of color imaging.
【0002】[0002]
【従来の技術】図4は単板式カラーカメラに用いられる
従来の固体撮像素子の断面図である。同図において、1
は半導体基板、2は光電変換領域、3は電荷転送領域、
4はポリシリコンからなる電荷転送電極、5は光電変換
領域2上に開口を有する遮光膜、6a、6bは透明高分
子材料からなる平坦化膜、10は固体撮像素子の実効的
開口率を高めるために、各光電変換領域2上に形成され
たマイクロレンズ、12は光電変換領域2上に赤、緑、
青の各色のフィルタが規則的に配列されているカラーフ
ィルタ層である。2. Description of the Related Art FIG. 4 is a sectional view of a conventional solid-state image pickup device used in a single-plate color camera. In the figure, 1
Is a semiconductor substrate, 2 is a photoelectric conversion region, 3 is a charge transfer region,
Reference numeral 4 is a charge transfer electrode made of polysilicon, 5 is a light-shielding film having an opening on the photoelectric conversion region 2, 6a and 6b are flattening films made of a transparent polymer material, and 10 is an effective aperture ratio of the solid-state imaging device. Therefore, a microlens formed on each photoelectric conversion region 2, 12 is a red lens, a green lens on the photoelectric conversion region 2,
This is a color filter layer in which filters of respective colors of blue are regularly arranged.
【0003】[0003]
【発明が解決しようとする課題】上述したように単板式
カラーカメラでは、光電変換領域に入射する光の色を識
別するためのカラーフィルタ層を備えた固体撮像素子を
用いることが不可欠である。而して、カラーフィルタを
形成するにはゼラチンパターンの形成工程、染色工程、
保護膜形成工程等の工程を複数回繰り返さなければなら
ないので、素子が非常に高価なものとなる。また、3板
式カラーカメラではダイクロイックミラーを用いて各色
に分離することが必要となるが、ダイクロイックミラー
自体が高価なものであるので、カラーカメラのコストダ
ウンが困難であった。As described above, in the single plate type color camera, it is indispensable to use the solid-state image pickup device having the color filter layer for identifying the color of the light incident on the photoelectric conversion region. Thus, in order to form a color filter, a gelatin pattern forming step, a dyeing step,
Since the steps such as the protective film forming step must be repeated a plurality of times, the device becomes very expensive. Further, in the three-plate color camera, it is necessary to separate each color using a dichroic mirror, but since the dichroic mirror itself is expensive, it is difficult to reduce the cost of the color camera.
【0004】ところで、カラーカメラを白黒モードで動
作させようとすることがあるが、その場合従来の固体撮
像素子を用いたものでは、信号合成回路が必要となるの
で、回路的に複雑化し、また忠実に原画の情報を再現さ
せることが困難であった。By the way, a color camera may be operated in a monochrome mode, but in that case, a conventional solid-state image pickup device requires a signal synthesizing circuit, which makes the circuit complicated and It was difficult to faithfully reproduce the original information.
【0005】また、カラーフィルタは特定の波長の光の
みを透過させるものであるため入射光のうち1/3〜2
/3は光電変換に寄与しない。そのため、カラーカメラ
を白黒モードで動作させるときは光の利用効率が極端に
低下する。Further, since the color filter transmits only light of a specific wavelength, 1/3 to 2 of the incident light is used.
/ 3 does not contribute to photoelectric conversion. Therefore, when the color camera is operated in the monochrome mode, the light utilization efficiency is extremely reduced.
【0006】[0006]
【課題を解決するための手段】本発明の固体撮像素子で
は、従来の技術におけるカラーフィルタ機能が、ゲスト
・ホスト(G・H)形電気光学効果を有するG・H形液
晶により達成されている。In the solid-state image pickup device of the present invention, the color filter function in the prior art is achieved by the GH liquid crystal having the guest-host (GH) electro-optical effect. .
【0007】このG・H形液晶では、例えば電圧無印加
の状態において光吸収が生じ透過光が着色するように、
また電圧印加状態では光吸収が起きずに透過光が着色し
ないように、液晶分子および染色分子が配列されてい
る。その結果、電圧無印加状態では固体撮像素子をカラ
ー用として、また電圧印加状態では白黒用として機能さ
せることが可能となる。In this G.H type liquid crystal, for example, light is absorbed and the transmitted light is colored when no voltage is applied,
In addition, liquid crystal molecules and dye molecules are arranged so that light is not absorbed and transmitted light is not colored when a voltage is applied. As a result, the solid-state image pickup device can function as a color device when no voltage is applied, and can function as a monochrome device when a voltage is applied.
【0008】[0008]
【実施例】次に、本発明の実施例について図面を参照し
て説明する。図1は、本発明の第1の実施例を示す断面
図である。同図において、1は半導体基板、2は光電変
換領域、3は電荷転送領域、4はポリシリコンからなる
電荷転送電極、5は光電変換領域上に開口を有する遮光
膜、6a、6bは透明高分子材料からなる平坦化膜、7
a、7bはそれぞれ表面にITO、酸化錫等からなる導
電膜が形成されている透明電極基板、8はゲストとして
二色性染料が溶解されている、Δε>0(Δεは誘電率
異方性)のネマティック液晶(NP 液晶)、9は偏光
子、10はマイクロレンズである。Embodiments of the present invention will now be described with reference to the drawings. FIG. 1 is a sectional view showing a first embodiment of the present invention. In the figure, 1 is a semiconductor substrate, 2 is a photoelectric conversion region, 3 is a charge transfer region, 4 is a charge transfer electrode made of polysilicon, 5 is a light-shielding film having an opening on the photoelectric conversion region, and 6a and 6b are transparent. Flattening film made of molecular material, 7
a and 7b are transparent electrode substrates each having a conductive film made of ITO, tin oxide or the like formed on the surface, 8 is a dichroic dye dissolved as a guest, Δε> 0 (Δε is the dielectric anisotropy nematic liquid crystals) (N P LCD), 9 polarizer, 10 is a microlens.
【0009】NP 液晶8は、ダイレクタが透明電極基板
と平行になるように処理がなされてホモジニアス配列に
なされている。そしてゲスト染料として用いられる二色
性染料は、分子の長軸方向と短軸方向で可視光の吸収に
異方性をもつ材料であるが、ここでは、長軸方向に光吸
収をもつp形二色性染料が用いられている。二色性染料
としては、通常用いられるメロシアニン系、スチリル
系、アゾ系、アントラキノン系、テトラジン系等各種の
ものが使用できる。The N P liquid crystal 8 is processed so that the director thereof is parallel to the transparent electrode substrate, and has a homogeneous alignment. The dichroic dye used as the guest dye is a material having anisotropy in absorption of visible light in the major axis direction and the minor axis direction of the molecule. A dichroic dye is used. As the dichroic dye, various kinds of commonly used merocyanine-based, styryl-based, azo-based, anthraquinone-based, tetrazine-based dyes and the like can be used.
【0010】図2の(a)は、図1の実施例における透
明電極基板間に電圧を印加しない状態の入射光の様子を
示す模式図である。この状態では、偏光子9を通った白
色直線偏光の振動方向とp形二色染料の光吸収軸が一致
するために光吸収が生じ、透過光が着色し固体撮像素子
はカラー用の素子として機能する。FIG. 2A is a schematic diagram showing a state of incident light in a state where no voltage is applied between the transparent electrode substrates in the embodiment of FIG. In this state, since the vibration direction of the white linearly polarized light that has passed through the polarizer 9 and the light absorption axis of the p-type dichroic dye coincide with each other, light absorption occurs, the transmitted light is colored, and the solid-state imaging device is used as a color device. Function.
【0011】図2の(b)は、上記実施例における透明
電極基板間に電圧を印加した状態の入射光の様子を示す
模式図である。この状態では、偏光子を通った白色直線
偏光の振動方向と染料の光吸収軸が直交するため、光吸
収が起こらず透過光は着色しないで固体撮像素子は白黒
用の素子として機能する。FIG. 2B is a schematic diagram showing a state of incident light in a state where a voltage is applied between the transparent electrode substrates in the above embodiment. In this state, the vibration direction of the white linearly polarized light passing through the polarizer and the light absorption axis of the dye are orthogonal to each other, so that light absorption does not occur and the transmitted light is not colored, and the solid-state imaging device functions as a monochrome device.
【0012】図3は、本発明の第2の実施例を示す断面
図である。同図において、図1の実施例の部分と共通す
る部分には同一の参照番号が付されているので重複した
説明は省略する。本実施例では、G・H形液晶のホスト
液晶としてスメクティック液晶(SP 液晶)11を使用
している。スメクティック液晶自身に偏光作用があるた
め本実施例では第1の実施例で不可欠であった偏光子が
不要となり、製造がより容易になる外、光の利用効率が
大幅に向上する。特に、本撮像素子を白黒モードで使用
するときには、入射光のほぼ100%を光電変換領域に
導入することができる。FIG. 3 is a sectional view showing a second embodiment of the present invention. In the figure, portions common to those of the embodiment of FIG. 1 are designated by the same reference numerals, and a duplicate description will be omitted. In this embodiment, using the smectic liquid crystal (S P LCD) 11 as a host liquid crystal for G · H type liquid crystal. Since the smectic liquid crystal itself has a polarization effect, the polarizer, which was indispensable in the first embodiment, is not required in this embodiment, which facilitates the manufacture and significantly improves the light utilization efficiency. Particularly, when the image pickup device is used in the monochrome mode, almost 100% of the incident light can be introduced into the photoelectric conversion region.
【0013】以上好ましい実施例について説明したが、
本発明は、これら実施例に限定されるものではなく、各
種改変が可能である。例えば、液晶は、コレステリック
液晶(CP 液晶)も使用可能であり、また、液晶を高分
子−液晶複合膜(高分子分散型液晶)として使用するこ
とができる。さらに、液晶にΔε<0のものを用いたり
(NN 液晶等)、p型二色染料に代えてn型二色染料を
用いたりすることができる。The preferred embodiment has been described above.
The present invention is not limited to these examples, and various modifications can be made. For example, the liquid crystal is a cholesteric liquid crystal (C P LCD) can be used, also, the liquid crystal polymer - can be used as a liquid crystal composite film (polymer dispersed liquid crystal). Further, it is possible to use a liquid crystal having Δε <0 (N N liquid crystal or the like), or to use an n-type dichroic dye instead of the p-type dichroic dye.
【0014】なお、染料のパターンについては従来のカ
ラーフィルタ層のようにモザイク状とすることもできる
が、ストライプ状であってもよい。また、3板式カラー
カメラを構成する場合には、チップ上全面に一様のパタ
ーンを形成したものを使用することができる。The dye pattern may be a mosaic pattern as in the conventional color filter layer, but may be a stripe pattern. When a three-plate color camera is constructed, a chip having a uniform pattern formed on the entire surface can be used.
【0015】[0015]
【発明の効果】以上説明したように、本発明の固体撮像
素子は、G・H形液晶セルによってカラーフィルタ機能
を達成させるものであるので、本発明によれば、製造す
るのに複雑な工程を必要とするカラーフィルタ層を用い
ることなく、また高価なダイクロイックミラーを使用す
ることなく固体カラーカメラを構成することができる。As described above, since the solid-state image pickup device of the present invention achieves the color filter function by the G.H type liquid crystal cell, according to the present invention, it is a complicated process to manufacture. It is possible to construct a solid-state color camera without using a color filter layer that requires the above, and without using an expensive dichroic mirror.
【0016】また、カラーカメラを白黒モードで使用す
るには、G・H形液晶に無色光を透過させるようにする
だけで済み複雑な信号合成回路が必要でなくなる。ま
た、モノクローム信号を色信号の合成によって得るもの
ではないので、原画を忠実に再現することができる。さ
らに、白黒モード時には特に偏光子を使用しない場合で
は、光が光電変換領域に入射する前に吸収されることが
なくなるので、光利用効率が大幅に向上する。Further, in order to use the color camera in the black and white mode, it is only necessary to allow colorless light to pass through the G / H type liquid crystal, and a complicated signal synthesizing circuit becomes unnecessary. Further, since the monochrome signal is not obtained by combining the color signals, the original image can be faithfully reproduced. Further, in the black and white mode, when the polarizer is not used, the light is not absorbed before entering the photoelectric conversion region, so that the light utilization efficiency is significantly improved.
【図1】本発明の第1の実施例を示す断面図。FIG. 1 is a sectional view showing a first embodiment of the present invention.
【図2】本発明の第1の実施例の使用状態を説明するた
めの摸式図。FIG. 2 is a schematic diagram for explaining a usage state of the first embodiment of the present invention.
【図3】本発明の第2の実施例を示す断面図。FIG. 3 is a sectional view showing a second embodiment of the present invention.
【図4】従来例の断面図。FIG. 4 is a sectional view of a conventional example.
1…半導体基板 2…光電変換領域 3…電荷転送領域 4…電荷転送電極 5…遮光膜 6a、6b…平坦化膜 7a、7b…透明電極基板 8…NP 液晶 9…偏光子 10…マイクロレンズ 11…SP 液晶 12…カラーフィルタ層DESCRIPTION OF SYMBOLS 1 ... Semiconductor substrate 2 ... Photoelectric conversion area 3 ... Charge transfer area 4 ... Charge transfer electrode 5 ... Light-shielding film 6a, 6b ... Flattening film 7a, 7b ... Transparent electrode substrate 8 ... N P liquid crystal 9 ... Polarizer 10 ... Microlens 11 ... SP liquid crystal 12 ... Color filter layer
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 FI 技術表示箇所 H04N 9/07 A 8943−5C ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification code Office reference number FI technical display location H04N 9/07 A 8943-5C
Claims (1)
セルが搭載されている固体撮像素子。1. A solid-state imaging device in which a guest-host type liquid crystal cell is mounted on a photoelectric conversion device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3225091A JPH0548060A (en) | 1991-08-09 | 1991-08-09 | Solid-state image sensor element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3225091A JPH0548060A (en) | 1991-08-09 | 1991-08-09 | Solid-state image sensor element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0548060A true JPH0548060A (en) | 1993-02-26 |
Family
ID=16823860
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3225091A Pending JPH0548060A (en) | 1991-08-09 | 1991-08-09 | Solid-state image sensor element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0548060A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0728095A (en) * | 1994-04-14 | 1995-01-31 | Rohm Co Ltd | Image pickup display device |
JPH0997891A (en) * | 1995-09-29 | 1997-04-08 | Nec Corp | Solid-state imaging device |
JP2004254269A (en) * | 2002-12-25 | 2004-09-09 | Iwane Kenkyusho:Kk | Highlight suppressed picture photographing apparatus |
WO2005101852A1 (en) * | 2004-04-16 | 2005-10-27 | Iwane Laboratories, Ltd. | Highlight-suppressed image pickup apparatus |
US7339649B2 (en) | 2003-12-17 | 2008-03-04 | Sony Corporation | Lens barrel and imaging device |
JP2010109196A (en) * | 2008-10-30 | 2010-05-13 | Sharp Corp | Solid-state image pickup device and electronic information equipment |
US9148555B2 (en) | 2013-07-25 | 2015-09-29 | Sony Corporation | Image pickup apparatus, image pickup method, and program |
-
1991
- 1991-08-09 JP JP3225091A patent/JPH0548060A/en active Pending
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0728095A (en) * | 1994-04-14 | 1995-01-31 | Rohm Co Ltd | Image pickup display device |
JPH0997891A (en) * | 1995-09-29 | 1997-04-08 | Nec Corp | Solid-state imaging device |
JP2004254269A (en) * | 2002-12-25 | 2004-09-09 | Iwane Kenkyusho:Kk | Highlight suppressed picture photographing apparatus |
US7339649B2 (en) | 2003-12-17 | 2008-03-04 | Sony Corporation | Lens barrel and imaging device |
WO2005101852A1 (en) * | 2004-04-16 | 2005-10-27 | Iwane Laboratories, Ltd. | Highlight-suppressed image pickup apparatus |
JP2010109196A (en) * | 2008-10-30 | 2010-05-13 | Sharp Corp | Solid-state image pickup device and electronic information equipment |
US9148555B2 (en) | 2013-07-25 | 2015-09-29 | Sony Corporation | Image pickup apparatus, image pickup method, and program |
US9690126B2 (en) | 2013-07-25 | 2017-06-27 | Sony Corporation | Image pickup apparatus, image pickup method, and program |
US10194102B2 (en) | 2013-07-25 | 2019-01-29 | Sony Corporation | Image pickup apparatus, image pickup method, and program |
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