[go: up one dir, main page]

JPH053927Y2 - - Google Patents

Info

Publication number
JPH053927Y2
JPH053927Y2 JP5543388U JP5543388U JPH053927Y2 JP H053927 Y2 JPH053927 Y2 JP H053927Y2 JP 5543388 U JP5543388 U JP 5543388U JP 5543388 U JP5543388 U JP 5543388U JP H053927 Y2 JPH053927 Y2 JP H053927Y2
Authority
JP
Japan
Prior art keywords
magnetic
length measuring
measuring device
pair
magnetic fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP5543388U
Other languages
Japanese (ja)
Other versions
JPH01158906U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5543388U priority Critical patent/JPH053927Y2/ja
Publication of JPH01158906U publication Critical patent/JPH01158906U/ja
Application granted granted Critical
Publication of JPH053927Y2 publication Critical patent/JPH053927Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Optical Transform (AREA)

Description

【考案の詳細な説明】 [産業上の利用分野] 本考案は測長装置用防塵機構に関する。[Detailed explanation of the idea] [Industrial application field] The present invention relates to a dustproof mechanism for a length measuring device.

[従来の技術] 従来の測長装置は、第9図及び第10図に示す
とおり、リニアスケール2を上載する基底部21
と、基底部21の縁辺より上方に延在してリニア
スケール2の長手延長方向に沿つて開口する開口
面23を成す縁部22とを有する横断面コの字状
のフレーム1と、フレーム1に収納され前記リニ
アスケール2を読取るための読取機構部(発光部
3及び受光部4を含む)3,4と、縁部22の上
面に位置し開口面23に沿つて移動可能に設けら
れた保持部5と、開口面23を通り保持部5と読
取機構部3,4とを接続する柱部10とを有して
いる。このとき、柱部10と縁部22との間は、
柱部10を摺動可能とするために、摺動用の間〓
が設けられている。このため、その間〓から読取
機構部3,4へ油分、水分、或は金属粉等が侵入
する虞がある。
[Prior Art] As shown in FIGS. 9 and 10, a conventional length measuring device has a base portion 21 on which a linear scale 2 is mounted.
and an edge 22 forming an opening surface 23 extending upward from the edge of the base 21 and opening along the longitudinal extension direction of the linear scale 2; A reading mechanism section (including a light emitting section 3 and a light receiving section 4) 3 and 4 for reading the linear scale 2 and a reading mechanism section (including a light emitting section 3 and a light receiving section 4), which is housed in It has a holding part 5 and a column part 10 that passes through an opening surface 23 and connects the holding part 5 and the reading mechanism parts 3 and 4. At this time, between the column part 10 and the edge part 22,
In order to make the column part 10 slidable, a sliding space is provided.
is provided. Therefore, there is a possibility that oil, moisture, metal powder, etc. may enter the reading mechanism sections 3 and 4 from between them.

そこで、従来は、読取機構部3,4の防塵のた
めに、柱部10と縁部22との間〓に、ゴム等の
弾性体シール6が設け、これにより、読取機構部
3,4への油分、水分、或は金属粉等の侵入を防
止していた。
Therefore, conventionally, an elastic seal 6 made of rubber or the like is provided between the column 10 and the edge 22 in order to prevent dust from reading the reading mechanisms 3 and 4. This prevents oil, moisture, metal powder, etc. from entering.

[考案が解決しようとする課題] しかしながら、従来の測長装置用防塵機構で
は、リニアスケールと読取機構部との間で、測長
のための相対運動を繰返すため、柱部とフレーム
の縁部との間〓を完全にシールすることが不可能
であつた。しかも、柱部の摺動運動により弾性体
シールの摩耗粉が発生してしまい、却って、読取
機構部の受光部等を汚し、読取り誤差を生じると
いう欠陥がある。
[Problem to be solved by the invention] However, in the conventional dust-proof mechanism for length measuring devices, the relative movement for length measurement is repeated between the linear scale and the reading mechanism, so the edge of the column and frame It was impossible to completely seal the space between them. Furthermore, the sliding movement of the pillar portion generates abrasion powder of the elastic seal, which contaminates the light receiving portion of the reading mechanism and causes reading errors.

一方、本出願と同一の出願人による特願昭62−
180102号公報(62年7月21日付け出願)によれ
ば、磁性流体シールを、弾性体シールより下方の
位置で柱部と縁部との間〓に設けることにより、
油分、水分、或は金属粉等の侵入及び上述した弾
性体シールの摩耗粉の侵入を完全に防止する機構
が開示されている。
On the other hand, the patent application filed in 1983 by the same applicant as the present application
According to Publication No. 180102 (filed on July 21, 1962), by providing a magnetic fluid seal between the column and the edge at a position below the elastic seal,
A mechanism is disclosed that completely prevents the intrusion of oil, moisture, metal powder, etc., and the abrasion powder of the above-mentioned elastic seal.

具体的には、第11図〜第12図に示すとお
り、上述した弾性体シール6に加えて、リニアス
ケール2の長手延長方向全長に沿つて延び、互い
に一定の離間距離を置いて対向する一対の軟磁性
体ポールピース(継鉄)板8,8と、その一対の
継鉄8,8間に密着して挟まれる永久磁石板7と
を備えた一対の単位磁気回路を、柱部10を挟ん
で夫々対向する縁部22に夫々設け、かつ、夫々
の単位磁気回路における一対の継鉄板8の間に形
成される空〓部24の全長に渡つて、磁気的に充
填保持させた磁性流体シール9を注入することに
より、柱部10と縁部22との間〓に磁性流体シ
ール9の膜を形成し、これにより、柱部10の摺
動間〓を磁性流体シール9の膜によつて密封摺
る。その結果、弾性体シール6と磁性流体シール
9とが互いに相俟つて、読取機構部3,4への油
分、水分、或は金属粉等の侵入を完全に防止する
多重構造の防塵機構が開示されている。
Specifically, as shown in FIGS. 11 and 12, in addition to the elastic seal 6 described above, a pair of elastic seals 6 that extend along the entire length of the linear scale 2 in the longitudinal direction and face each other at a certain distance are provided. A pair of unit magnetic circuits comprising soft magnetic pole piece (yoke) plates 8, 8 and a permanent magnet plate 7 tightly sandwiched between the pair of yokes 8, 8 are constructed by connecting the pillar portion 10. A magnetic fluid is provided on the opposing edges 22 and is magnetically filled and held over the entire length of the hollow portion 24 formed between the pair of yoke plates 8 in each unit magnetic circuit. By injecting the seal 9, a film of the magnetic fluid seal 9 is formed between the pillar portion 10 and the edge 22, and thereby the sliding gap of the pillar portion 10 is covered by the film of the magnetic fluid seal 9. Then seal it. As a result, a multi-layered dustproof mechanism is disclosed in which the elastic seal 6 and the magnetic fluid seal 9 work together to completely prevent oil, moisture, metal powder, etc. from entering the reading mechanism sections 3 and 4. has been done.

ところが、係る多重構造の防塵機構における磁
性流体シール9では、柱部10の移動速度が速く
なると、柱部前進方向の磁性流体が継鉄板8上に
液溢れが生じて、柱部10の後方の磁性流体シー
ル9が耐圧破壊を起こし、防塵性能を劣化させて
しまうという欠点がある。
However, in the magnetic fluid seal 9 in such a multiple-structure dustproof mechanism, when the moving speed of the column portion 10 increases, the magnetic fluid in the forward direction of the column portion overflows onto the yoke plate 8, causing the magnetic fluid seal 9 behind the column portion 10 to undergo pressure breakdown, resulting in a deterioration of the dustproof performance.

ここで、第7図及び第8図a,b,cを用い
て、具体的に説明する。柱部10が高速で移動す
ると、第8図aに示されるように、磁性流体シー
ル9とポールピース8,8′及び永久磁石板7と
で密封されている空〓部24が、柱部10を仕切
りとして、柱部10が第7図中の矢印で示す前進
する方向の空〓部と後退する方向の空〓部とに、
実質的に2分割されることになる。
Here, a detailed explanation will be given using FIG. 7 and FIGS. 8a, b, and c. When the pillar part 10 moves at high speed, the hollow part 24, which is sealed by the magnetic fluid seal 9, the pole pieces 8, 8', and the permanent magnet plate 7, is moved by the pillar part 10, as shown in FIG. 8a. As a partition, the column part 10 is divided into an empty part in the forward direction shown by the arrow in FIG. 7 and an empty part in the backward direction,
It will essentially be divided into two parts.

このとき、柱部10が前進する方向の空〓部
は、第8図bに示すように、柱部10の移動速度
が速ければ速いほど、柱部10自体に圧縮され
て、圧力を増すと共に、柱部10の前方の磁性流
体シール9も同様に押出され、その双方の効果が
相俟つて、磁性流体シール9が継鉄板8上に溢れ
出ることになる。
At this time, as shown in FIG. 8b, the faster the moving speed of the column 10, the more the air in the direction in which the column 10 moves forward is compressed by the column 10 itself, increasing the pressure. , the magnetic fluid seal 9 in front of the column 10 is also pushed out in the same way, and both effects combine to cause the magnetic fluid seal 9 to overflow onto the yoke plate 8.

一方、柱部10が後退する方向の空〓部は、同
様に、柱部10の移動速度が速ければ速いほど、
第8図cに示すように、柱部10により膨脹し
て、減圧されると共に、柱部10の後方の磁性流
体シール9自体も欠乏してしまうため、磁性流体
シール9,9′の膜圧が薄くなり、シール耐圧が
減少し、その双方の効果が相俟つて、柱部10後
方の磁性流体シール9が破れ、防塵性能を劣化さ
せてしまうものである。
On the other hand, similarly, the faster the movement speed of the column 10, the more the empty space in the direction in which the column 10 retreats.
As shown in FIG. 8c, the column 10 expands and reduces the pressure, and the magnetic fluid seal 9 itself behind the column 10 is also depleted, so that the film pressure of the magnetic fluid seals 9 and 9' is reduced. The magnetic fluid seal 9 becomes thinner, the seal pressure resistance decreases, and both effects combine to cause the magnetic fluid seal 9 at the rear of the column 10 to break, degrading the dustproof performance.

そこで、本考案の技術的課題は、上記欠点に鑑
み、読取機構部への油分、水分或は金属粉等の進
入を完全に防止すると共に、リニアスケールの支
柱の移動速度の大小に係わらず、磁性流体シール
からの液洩れや、シール耐圧破壊等の発生を防止
した測長装置用防塵機構を提供することである。
Therefore, in view of the above-mentioned drawbacks, the technical problem of the present invention is to completely prevent oil, moisture, metal powder, etc. from entering the reading mechanism, and to completely prevent the intrusion of oil, moisture, metal powder, etc. It is an object of the present invention to provide a dustproof mechanism for a length measuring device that prevents liquid leakage from a magnetic fluid seal and seal pressure breakdown.

[課題を解決するための手段] 本考案によれば、リニアスケールと該リニアス
ケールを読取るための読取機構部とを内蔵する収
納空間を規定するフレーム本体と、該フレーム本
体の一端面に設けられ前記リニアスケールの長手
延長方向に沿つて開口した開口面を形成する縁部
と、フレーム本体に相対移動可能な保持部と、前
記開口面を通つて前記保持部と前記読取機構部と
を接続し、前記リニアスケールの長手延長方向に
沿つて移動可能に設けられた柱部とを有する測長
装置に用いられる測長装置用防塵機構において、
前記開口面をシールするための磁性流体を磁気的
に保持すると共に、該磁性流体より成る磁性流体
シール膜を、実質的に一層とする磁気回路部を備
えたことを特徴とする測長装置用防塵機構が得ら
れる。
[Means for Solving the Problems] According to the present invention, there is provided a frame body defining a storage space containing a linear scale and a reading mechanism for reading the linear scale, and a frame body provided on one end surface of the frame body. An edge forming an opening surface opened along the longitudinal extension direction of the linear scale, a holding section movable relative to the frame body, and connecting the holding section and the reading mechanism section through the opening surface. , a dust-proof mechanism for a length measuring device used in a length measuring device having a pillar section movably provided along the longitudinal extension direction of the linear scale,
For a length measuring device, comprising: a magnetic circuit section that magnetically holds a magnetic fluid for sealing the opening surface, and has a magnetic fluid sealing film made of the magnetic fluid as a substantially single layer. A dustproof mechanism is provided.

また、本考案によれば、前記磁気回路部は、所
定の間〓をおいて互いに対向する一対の単位磁気
回路からなり、該一対の単位磁気回路は、前記所
定の間〓に、前記磁性流体を磁気的に保持するこ
とが好ましい。
Further, according to the present invention, the magnetic circuit section is composed of a pair of unit magnetic circuits facing each other with a predetermined distance between them, and the pair of unit magnetic circuits are arranged so that the magnetic fluid is preferably held magnetically.

さらに、本考案によれば、前記一対の単位磁気
回路は、永久磁石本体と、該永久磁石本体の両極
を挟持して互いに対向する一対の軟磁性板部材と
を夫々有し、一方の単位磁気回路における前記一
対の軟磁性板部材の端部は、他方の単位磁気回路
における前記一対の軟磁性板部材の端部に、前記
所定の間〓を以て対向し、前記磁性流体は、前記
所定の間〓を以て互いに対向する前記一対の軟磁
性板部材の端部間のうち、どちらか一方の端部間
に、磁気的に保持されていることが好ましい。
Further, according to the present invention, each of the pair of unit magnetic circuits includes a permanent magnet body and a pair of soft magnetic plate members facing each other while sandwiching both poles of the permanent magnet body, The ends of the pair of soft magnetic plate members in the circuit face the ends of the pair of soft magnetic plate members in the other unit magnetic circuit with the predetermined distance apart, and the magnetic fluid flows in the predetermined distance. It is preferable that the soft magnetic plate member is magnetically held between one of the ends of the pair of soft magnetic plate members facing each other with a square.

また、本考案によれば、前記縁部と前記柱部と
の間をシールするための弾性シール部材を前記縁
部に設けたことを特徴とする測長装置用防塵機構
が得られる。
Further, according to the present invention, there is obtained a dustproof mechanism for a length measuring device, characterized in that an elastic sealing member for sealing between the edge and the column is provided on the edge.

より、具体的には、測長装置の柱部の移動速度
が速くなつた場合においても、本考案の磁性流体
シール膜が一層から成るため、その磁性流体シー
ルによる密封空間の方が、従来の2層の磁性流体
シール内部に密封された空間より、!?かに大きい
ため、柱部の移動による密封空間の圧力変動をよ なお、本考案における柱部の幅を、磁性流体シ
ールの幅、即ち、液が充填されている空〓幅より
小さくして行けば、柱部の移動により圧縮され、
或は欠乏する液量が減少することから、本考案の
効果をより一層高めることができる。
More specifically, even when the moving speed of the column of the length measuring device increases, the magnetic fluid seal membrane of the present invention is made of one layer, so the sealed space created by the magnetic fluid seal is better than that of the conventional one. Since it is much larger than the space sealed inside the two-layer magnetic fluid seal, pressure fluctuations in the sealed space due to the movement of the column are caused. In other words, if the width is made smaller than the width of the cavity filled with liquid, it will be compressed by the movement of the column,
Alternatively, since the amount of liquid that is deficient is reduced, the effects of the present invention can be further enhanced.

また、柱部の断面形状は流線形であることが望
ましい。さらに、磁性流体シールの磁化が高く、
粘度は低い方が望ましく、かつ、磁性流体を保持
している磁界強度も大きい方が好ましい。
Further, it is desirable that the cross-sectional shape of the pillar portion is streamlined. Additionally, the magnetization of the ferrofluid seal is high;
It is desirable that the viscosity is low, and the strength of the magnetic field holding the magnetic fluid is also preferably high.

また、単位磁気回路を構成する永久磁石をより
高い磁気特性を有するものに替えたり、その永久
磁石の容積を増したりして、磁性流体の離間間〓
の磁界強度を強めて、膜切れを生じさせないよう
にしても良い。
In addition, by replacing the permanent magnets that make up the unit magnetic circuit with ones that have higher magnetic properties, or by increasing the volume of the permanent magnets, the separation of the magnetic fluid can be reduced.
The magnetic field strength may be increased to prevent film breakage.

[実施例] 以下、本考案の実施例について図面を参照して
説明する。
[Example] Hereinafter, an example of the present invention will be described with reference to the drawings.

尚、本実施例においては、シール構造の構成を
除いては、第11図〜第13図に示す従来の防塵
機構と同様の構成を採るものである。
In this embodiment, except for the structure of the seal structure, the structure is similar to that of the conventional dustproof mechanism shown in FIGS. 11 to 13.

−第1の実施例− 第1図aにおいて、本シール構造は、リニアス
ケール(図示せず)の長手方向に延びた2枚の軟
磁性体ポールピース8A,8Bと、そのポールピ
ース8A,8B間に接着剤等により密着された板
状の永久磁石7からなる第1の単位磁気回路12
と、同様な構成で、2枚の軟磁性体ポールピース
8A′,8B′と、そのポールピース8A′,8B′間
に接着剤等により密着された板状の永久磁石7′
からなる第2の単位磁気回路12′とを、フレー
ム1の縁部22(第13図参照)に、互いに距離
をおいて対向させて配置し、第1の単位磁気回路
12のポールピース8Aの端部と第2の単位磁気
回路12′のポールピース8A′の端部との間〓
に、磁性流体膜9を磁気的に充填保持させた構成
であり、一層構造の磁性流体シールが構成されて
いる。
-First Embodiment- In Fig. 1a, this seal structure includes two soft magnetic pole pieces 8A, 8B extending in the longitudinal direction of a linear scale (not shown), and the pole pieces 8A, 8B. A first unit magnetic circuit 12 consisting of a plate-shaped permanent magnet 7 that is closely attached with an adhesive or the like.
With a similar configuration, two soft magnetic pole pieces 8A', 8B' and a plate-shaped permanent magnet 7' are closely attached between the pole pieces 8A', 8B' with an adhesive or the like.
A second unit magnetic circuit 12' consisting of a pole piece 8A of the first unit magnetic circuit 12 is arranged on the edge 22 of the frame 1 (see FIG. 13) facing each other at a distance. Between the end and the end of the pole piece 8A' of the second unit magnetic circuit 12'
In addition, the magnetic fluid film 9 is magnetically filled and held, thereby forming a single-layer magnetic fluid seal.

このため、柱部10(第13図参照)の移動速
度が速くなつても、磁性流体シール9による密封
空間が、従来の2層構造の磁性流体シール(第1
3図参照)に密封された空間より、!?かに大きい
ので、柱部10の移動による密封空間の圧力変動
が小さくなり、液洩れや、耐圧破壊を防止するこ
とができる。
Therefore, even if the moving speed of the column part 10 (see FIG. 13) becomes faster, the sealed space by the magnetic fluid seal 9 is smaller than the conventional two-layer magnetic fluid seal (first
Since it is much larger than the sealed space (see Figure 3), pressure fluctuations in the sealed space due to movement of the column 10 are reduced, and liquid leakage and pressure breakdown can be prevented.

なお、第1図bに示すように、軟磁性体ポール
ピース8A′,8A′間の距離gよりも、互いに対
向する2つの軟磁性体ポールピース8A,8B間
の距離lの方が大きい条件(g<l)が、一層構
造の磁性流体シールを、より安定にすることにな
る。逆に、g>lならば、磁気抵抗の関係によ
り、軟磁性体ポールピース8A,8B間等に、磁
性流体が流れ込み、従来の2層構造の磁性流体シ
ールを形成してしまう問題が生じる可能性があ
る。
As shown in FIG. 1b, the condition is such that the distance l between the two opposing soft magnetic pole pieces 8A and 8B is greater than the distance g between the soft magnetic pole pieces 8A' and 8A'. (g<l) will make the single-layer ferrofluid seal more stable. On the other hand, if g>l, there is a possibility that the magnetic fluid will flow between the soft magnetic pole pieces 8A and 8B due to the relationship of magnetic resistance, resulting in the formation of the conventional two-layer magnetic fluid seal. There is sex.

−第2の実施例− 第2図に示すように、第2の実施例において
は、第1の単位磁気回路12の軟磁性体ポールピ
ース8B及び第2の単位磁気回路12′の軟磁性
体ポールピース8B′間の磁気抵抗をより小さく
するために、ポールピース8B及び8B′の端部
を、所定の離間距離gを保ちつつ、対向させて折
曲げて、その対向面積を増加させた構成を採るも
のであり、磁性流体を保持する磁界強度を向上さ
せることができる。なお、ポールピース8B及び
8B′の端部間の離間距離gを縮小しても、同様
な効果が得られる。
-Second Embodiment- As shown in FIG. 2, in the second embodiment, the soft magnetic pole piece 8B of the first unit magnetic circuit 12 and the soft magnetic pole piece 8B of the second unit magnetic circuit 12' In order to further reduce the magnetic resistance between the pole pieces 8B', the ends of the pole pieces 8B and 8B' are bent to face each other while maintaining a predetermined distance g, thereby increasing the opposing area. The strength of the magnetic field that holds the magnetic fluid can be improved. Note that the same effect can be obtained even if the distance g between the ends of the pole pieces 8B and 8B' is reduced.

−第3の実施例− 第3図aに示すように、第3の実施例において
は、第1の単位磁気回路12の軟磁性体ポールピ
ース8B及び第2の単位磁気回路12′の軟磁性
体ポールピースび8B′間の磁気抵抗を、実質的
に無くすために、ポールピース8B及び8B′の
一方の端部の各々を、所定の離間距離gを以て所
定の離間距離gを以て対向させ、かつ、その他方
の端部の各々を、フレーム本体1の内側壁に沿わ
せて下ろし、フレーム本体1の底面上で、磁気的
に短絡させた構造を有し、第2の実施例に比べ、
より磁性流体を保持する磁界強度を向上させるこ
とができる。なお、第3図bでは、ポールピース
8B及び8B′の他方の端部の各々は、フレーム
本体1の内側壁に沿つて巡らせて磁気的に短絡さ
せた構造を採る場合を示している。
-Third Embodiment- As shown in FIG. 3a, in the third embodiment, the soft magnetic pole piece 8B of the first unit magnetic circuit 12 and the soft magnetic pole piece 8B of the second unit magnetic circuit 12' In order to substantially eliminate magnetic resistance between the body pole pieces 8B and 8B', one end of each of the pole pieces 8B and 8B' is opposed to each other with a predetermined separation distance g, and , each of the other end portions is lowered along the inner wall of the frame body 1 and magnetically short-circuited on the bottom surface of the frame body 1, and compared to the second embodiment,
The strength of the magnetic field that holds the magnetic fluid can be further improved. In addition, FIG. 3b shows a case in which the other end of each of the pole pieces 8B and 8B' is arranged around the inner wall of the frame body 1 and magnetically short-circuited.

−第4の実施例− 第4図に示すように、第4の実施例は、第3の
実施例をさらに変形した構造を有するものであ
る。
-Fourth Embodiment- As shown in FIG. 4, the fourth embodiment has a structure that is a further modification of the third embodiment.

−第5の実施例− 第5図に示すように、第5の実施例は、第1及
び第2の単位磁気回路12,12′は、互いに所
定の離間距離を以て対峙し、その永久磁石7,
7′を互いに同じ極性を以て配置されている。こ
れにより、第1及び第2の単位磁気回路毎のポー
ルピース間に磁気ループが構成されることにな
る。第1の単位磁気回路12のポールピース8
A,8Bは、対峙する第2の単位磁気回路12′
に臨む方向に延在し、非磁性体20を介して接合
して磁気ループを独立に構成しており、第2の単
位磁気回路12′も同様に、磁気ループを構成し
ている。このため、磁性流体は、各磁気ループに
各々保持される一層構造の磁性流体シール9を構
成し、2路、4路の磁路に分散することはない。
-Fifth Embodiment- As shown in FIG. 5, in the fifth embodiment, the first and second unit magnetic circuits 12, 12' face each other at a predetermined distance, and the permanent magnet 7 ,
7' are arranged with the same polarity. As a result, a magnetic loop is formed between the pole pieces of each of the first and second unit magnetic circuits. Pole piece 8 of first unit magnetic circuit 12
A and 8B are the opposing second unit magnetic circuits 12'
The second unit magnetic circuit 12' extends in the direction facing the magnetic field and is connected via the non-magnetic material 20 to form an independent magnetic loop. Similarly, the second unit magnetic circuit 12' also forms a magnetic loop. Therefore, the magnetic fluid constitutes a single-layer magnetic fluid seal 9 that is held in each magnetic loop, and is not dispersed into two or four magnetic paths.

−第6の実施例− 第6図に示す構成は、上述の実施例とは異なる
が、実質的に1層構造の磁性流体シールと同様の
効果を有する2層構造の磁性流体シールを示すも
のである。即ち、第1及び第2の単位磁気回路間
に囲まれる内部間〓部24と、この内部間〓部2
4に臨んで開口する貫通孔31,32を、夫々永
久磁石7′や、又は、ポールピース8B等に穿設
し、内部間〓24中の圧力変動を低減する構成を
示すものである。なお、貫通孔31,32には、
エアフイルタ(図示しない)を設けることが好ま
しい。
-Sixth Embodiment- The configuration shown in FIG. 6 is different from the above embodiment, but shows a two-layer magnetic fluid seal having substantially the same effect as a single-layer magnetic fluid seal. It is. That is, the inner spacer section 24 surrounded between the first and second unit magnetic circuits, and the inner spacer section 2
This shows a configuration in which through holes 31 and 32 opening facing the magnet 4 are formed in the permanent magnet 7' or the pole piece 8B, respectively, to reduce pressure fluctuations in the internal gap 24. In addition, in the through holes 31 and 32,
Preferably, an air filter (not shown) is provided.

[考案の効果] 以上の説明のとおり、本考案によれば、リニア
スケールの支柱の移動速度が高速になつても、防
塵機構に設けられた磁性流体シールを一層構造に
することにより、支柱の移動による磁性流体に及
ぼす圧力変動を抑制し、磁性流体シールからの液
洩れや、磁性流体シールの破壊を防止することが
できるから、高信頼性の防塵性能を有する測長装
置用防塵機構が得られる。
[Effects of the invention] As explained above, according to the present invention, even when the moving speed of the linear scale pillar becomes high, the magnetic fluid seal provided in the dust-proof mechanism is made into a layered structure, so that the pillar can be easily moved. It is possible to suppress pressure fluctuations on the magnetic fluid due to movement and prevent liquid leakage from the magnetic fluid seal and destruction of the magnetic fluid seal, making it possible to provide a dustproof mechanism for length measuring devices with highly reliable dustproof performance. It will be done.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図a,bは本考案に係わる第1の実施例の
概略図、第2図は本考案に係わる第2の実施例の
概略図であり、第3図a,bは本考案に係わる第
3の実施例の概略図、第4図は本考案に係わる第
4の実施例の概略図、第5図は本考案に係わる第
5の実施例の概略図、第6図は本考案と同様な効
果を有する他の実施例の概略図、第7図は従来の
磁性流体シールの一部を示す概略図、第8図a,
b,cは支柱の前進後退時における従来の2層構
造の磁性流体シールの圧力変動状態を示す概念
図、第9図は従来の測長装置用防塵機構の斜視
図、第10図は従来の測長装置用防塵機構の断面
図、第11図〜第13図は本出願人により既に出
願した測長装置用防塵機構の斜視図、断面図、及
びシール機構部の一部切り欠き断面図である。 1……フレーム、2……リニアスケール、3…
…発光部、4……受光部、5……保持部、6……
弾性シール部材、7,7′……永久磁石、8,
8′……永久磁石板、9……磁性流体、10……
柱部、11……非磁性体パツキン、12……第1
及び第2の単位磁気回路、13……ヨーク板、2
0……非磁性体、21……基底部、22……縁
部、23……開口面、24……内部間〓部。
Figures 1a and b are schematic diagrams of a first embodiment of the invention, Figure 2 is a schematic diagram of a second embodiment of the invention, and Figures 3a and b are diagrams of a second embodiment of the invention. A schematic diagram of the third embodiment, FIG. 4 is a schematic diagram of the fourth embodiment according to the present invention, FIG. 5 is a schematic diagram of the fifth embodiment according to the present invention, and FIG. 6 is a schematic diagram of the fifth embodiment according to the present invention. A schematic diagram of another embodiment having a similar effect; FIG. 7 is a schematic diagram showing a part of a conventional magnetic fluid seal; FIG. 8a,
b, c are conceptual diagrams showing the pressure fluctuation state of a conventional two-layered magnetic fluid seal when the column advances and retreats; Fig. 9 is a perspective view of a conventional dust-proof mechanism for a length measuring device; Fig. 10 is a conventional A sectional view of a dustproof mechanism for a length measuring device, and FIGS. 11 to 13 are a perspective view, a sectional view, and a partially cutaway sectional view of a sealing mechanism of a dustproof mechanism for a length measuring device that has already been filed by the applicant. be. 1...Frame, 2...Linear scale, 3...
... Light emitting section, 4 ... Light receiving section, 5 ... Holding section, 6 ...
Elastic sealing member, 7, 7'...Permanent magnet, 8,
8'...Permanent magnet plate, 9...Magnetic fluid, 10...
Column part, 11...Non-magnetic packing, 12...First
and a second unit magnetic circuit, 13...yoke plate, 2
0...Nonmagnetic material, 21...Base portion, 22...Edge portion, 23...Opening surface, 24...Inner space.

Claims (1)

【実用新案登録請求の範囲】 1 リニアスケールと該リニアスケールを読取る
ための読取機構部とを内蔵する収納空間を規定
するフレーム本体と、該フレーム本体の一端面
に設けられ前記リニアスケールの長手延長方向
に沿つて開口した開口面を形成する縁部と、該
縁部に係止される保持部と、前記開口面を通つ
て前記保持部と前記読取機構部とを接続し、前
記リニアスケールの長手延長方向に沿つて移動
可能に設けられた柱部とを有する測長装置に用
いられる測長装置用防塵機構において、 前記開口面をシールするための磁性流体を磁
気的に保持すると共に、該磁性流体より成る磁
性流体シール膜を、実質的に一層とする磁気回
路部を備えたことを特徴とする測長装置用防塵
機構。 2 第1請求項記載の測長装置用防塵機構におい
て、前記磁気回路部は、所定の間〓をおいて互
いに対向する一対の単位磁気回路からなり、該
一対の単位磁気回路は、前記所定の間〓に、前
記磁性流体を磁気的に保持することを特徴とす
る測長装置用防塵機構。 3 第2請求項記載の測長装置用防塵機構におい
て、前記一対の単位磁気回路は、永久磁石本体
と、該永久磁石本体の両極を挟持して互いに対
向する一対の軟磁性板部材とを夫々有し、一方
の単位磁気回路における前記一対の軟磁性板部
材の端部は、他方の単位磁気回路における前記
一対の軟磁性板部材の端部に、前記所定の間〓
を以て対向し、前記磁性流体は、前記所定の間
〓を以て互いに対向する前記一対の軟磁性板部
材の端部間のうち、どちらか一方の端部間に、
磁気的に保持されていることを特徴とする測長
装置用防塵機構。 4 第1〜第3請求項記載のいづれかの測長装置
用防塵機構において、前記縁部と前記柱部との
間をシールするための弾性シール部材を前記縁
部に設けたことを特徴とする測長装置用防塵機
構。
[Claims for Utility Model Registration] 1. A frame body defining a storage space containing a linear scale and a reading mechanism for reading the linear scale, and a longitudinal extension of the linear scale provided on one end surface of the frame body. an edge forming an opening surface opened along the direction; a holding section that is locked to the edge; the holding section and the reading mechanism section are connected through the opening surface; In a dustproof mechanism for a length measuring device, which is used in a length measuring device having a column movable along the longitudinal direction, the magnetic fluid for sealing the opening surface is magnetically held, and the magnetic fluid for sealing the opening surface is held magnetically. A dustproof mechanism for a length measuring device, comprising a magnetic circuit section having a magnetic fluid sealing film made of magnetic fluid as substantially one layer. 2. In the dust-proof mechanism for a length measuring device according to claim 1, the magnetic circuit section is composed of a pair of unit magnetic circuits facing each other with a predetermined distance apart, and the pair of unit magnetic circuits are arranged in the predetermined direction. A dustproof mechanism for a length measuring device, characterized in that the magnetic fluid is magnetically held between the parts. 3. In the dustproof mechanism for a length measuring device according to claim 2, the pair of unit magnetic circuits each include a permanent magnet body and a pair of soft magnetic plate members facing each other with both poles of the permanent magnet body sandwiched therebetween. The ends of the pair of soft magnetic plate members in one unit magnetic circuit are connected to the ends of the pair of soft magnetic plate members in the other unit magnetic circuit for the predetermined distance.
between the ends of the pair of soft magnetic plate members facing each other with the predetermined distance
A dustproof mechanism for a length measuring device characterized by being held magnetically. 4. The dustproof mechanism for a length measuring device according to any one of claims 1 to 3, characterized in that an elastic sealing member for sealing between the edge and the column is provided on the edge. Dust-proof mechanism for length measuring devices.
JP5543388U 1988-04-25 1988-04-25 Expired - Lifetime JPH053927Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5543388U JPH053927Y2 (en) 1988-04-25 1988-04-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5543388U JPH053927Y2 (en) 1988-04-25 1988-04-25

Publications (2)

Publication Number Publication Date
JPH01158906U JPH01158906U (en) 1989-11-02
JPH053927Y2 true JPH053927Y2 (en) 1993-01-29

Family

ID=31281336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5543388U Expired - Lifetime JPH053927Y2 (en) 1988-04-25 1988-04-25

Country Status (1)

Country Link
JP (1) JPH053927Y2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0023289D0 (en) * 2000-09-22 2000-11-08 Renishaw Plc Determination of displacement

Also Published As

Publication number Publication date
JPH01158906U (en) 1989-11-02

Similar Documents

Publication Publication Date Title
EP0293784B1 (en) Acceleration sensor
DE60009051D1 (en) Airtight rectangular plastic food container
JPH053927Y2 (en)
US20060059991A1 (en) Magnetofluidic accelerometer with partial filling of cavity with magnetic fluid
US5381291A (en) Vertical contact - canted magnet magnetoresistive sensor
US20050193801A1 (en) Housing for magnetofluidic accelerometer
JPH053926Y2 (en)
JP3165836B2 (en) Servo accelerometer
KR910005233A (en) Magnetic head
US3125389A (en) Magnetic door gasket
JPH06213921A (en) Magnetic fluid type acceleration sensor
JPH10104044A (en) Magnetic fuel gage
JP2001289688A (en) Manufacturing method for electronic unit case
JP2005114641A (en) Acceleration sensor
JPH0777282A (en) Sealing structure for apparatus, machinery, and the like
JP2592617Y2 (en) Compact level detection sensor
JPS6125151Y2 (en)
JPS5866072A (en) Magnetism detector
JPH0439007B2 (en)
JPS6125150Y2 (en)
JP6750640B2 (en) Multi-optical axis photoelectric sensor
JPH0423075B2 (en)
JPH0334015B2 (en)
JPS631401Y2 (en)
JPS6331474Y2 (en)