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JPH05330067A - Production of ink jet head - Google Patents

Production of ink jet head

Info

Publication number
JPH05330067A
JPH05330067A JP16529392A JP16529392A JPH05330067A JP H05330067 A JPH05330067 A JP H05330067A JP 16529392 A JP16529392 A JP 16529392A JP 16529392 A JP16529392 A JP 16529392A JP H05330067 A JPH05330067 A JP H05330067A
Authority
JP
Japan
Prior art keywords
adhesive
flow path
grooves
plate
passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16529392A
Other languages
Japanese (ja)
Inventor
Osamu Naruse
修 成瀬
Kozo Sudo
浩三 須藤
Yoshihisa Ota
善久 太田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP16529392A priority Critical patent/JPH05330067A/en
Publication of JPH05330067A publication Critical patent/JPH05330067A/en
Pending legal-status Critical Current

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  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

PURPOSE:To prevent the clogging of nozzle grooves with an adhesive and enhance a production yield and printing quality by providing groove parts other than the nozzle grooves to the bonding surface of a passage plate having the nozzle grooves and applying a bonding agent to the bonding surface of the passage plate to integrally bond a substrate. CONSTITUTION:Escape grooves 4 are provided to a passage substrate 1. Since nozzle grooves 3 and the escape grooves 4 are provided to the passage plate 1, an adhesive 5 flows in the escape grooves 4 when a drive plate 6 is bonded to the passage plate 1 and, therefore, the protrusion of the adhesive to the nozzle grooves 3 is reduced. As mentioned above, since the protrusion of the adhesive is eliminated, the clogging of passage grooves or the nozzle grooves with the adhesive is eliminated and a yield is enhanced. Further, since the protrusion of the adhesive is eliminated, the rigidity with an adjacent passage is reduced and the mutual interference from an aspect of granulation characteristics is reduced and granulation is stabilized and printing quality is enhanced.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【技術分野】本発明は、インクジェットヘッドの製作方
法に関し、より詳細には、インクジェットヘッドの流路
板の接合法に関する。例えば、微細部分の接合等に適用
されるものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an inkjet head, and more particularly to a method for joining flow path plates of an inkjet head. For example, it is applied to joining fine parts.

【0002】[0002]

【従来技術】従来、インクジェット記録ヘッドを作成す
る方法として、例えば、ガラスや金属の板に切削やエッ
チング等により、微細な溝を形成し、該溝を形成した板
を他の適当な板と接合してインク通路の形成を行なう方
法が知られている。しかし、この従来法によって作成さ
れるヘッドでは、切削加工されるインク通路内壁面の荒
れが大き過ぎたり、エッチング率の差からインク通路に
歪が生じたりして、精度の良いインク通路が得難く、製
作後のインクジェット記録ヘッドのインク吐出特性にバ
ラツキが出やすいという欠点があった。
2. Description of the Related Art Conventionally, as a method for producing an ink jet recording head, for example, fine grooves are formed in a glass or metal plate by cutting or etching, and the plate in which the grooves are formed is joined to another appropriate plate. Then, a method of forming an ink passage is known. However, in the head produced by this conventional method, the roughness of the inner wall surface of the ink passage to be cut is too large, or the ink passage is distorted due to the difference in etching rate, and it is difficult to obtain an accurate ink passage. However, there is a drawback that the ink ejection characteristics of the manufactured inkjet recording head are likely to vary.

【0003】また、インク通路溝を形成した溝付板と、
インクに作用するエネルギーを発生する圧電素子や発熱
素子等の駆動素子が設けられた蓋板との貼合せの際に、
それぞれの位置合せを精度良く行うことが困難であっ
て、量産性に欠けるという問題点があった。
A grooved plate having ink passage grooves,
At the time of bonding with a cover plate provided with a driving element such as a piezoelectric element or a heating element that generates energy that acts on ink,
There is a problem in that it is difficult to perform the respective alignments with high precision, and the mass productivity is lacking.

【0004】これに対し、例えば、インク吐出圧発生素
子の設置してある基板上に感光性樹脂の硬化膜から成る
インク通路壁を形成し、その後、前記インク通路壁の覆
いを付設するものや、支持体の両面に感光性樹脂膜を積
層した覆いをインク通路を設けた基板に貼付した後、紫
外線を照射して硬化させるものが提案されているが、押
圧時の圧力分布、感光性樹脂膜の硬さ、インク通路壁の
形状等により押圧条件が変化し、インク通路への感光性
樹脂のタレ込みの発生や、インク通路壁への覆いの未接
着等が発生するという欠点があった。この点を解決する
ために、例えば、特開昭60−183158号公報に
「インクジェット記録ヘッドの製造方法」が提案されて
いる。この公報のものは、流路板と基板の接合におい
て、流路板を電磁波の透過する部材にして、感光性樹脂
膜を積層して構成するもので、感光性樹脂膜の表層部の
みを未硬化の状態に保ちつつ硬化させ、その後に基板と
接合させるものである。
On the other hand, for example, an ink passage wall made of a cured film of a photosensitive resin is formed on a substrate on which an ink ejection pressure generating element is installed, and then a cover for the ink passage wall is attached. A method has been proposed in which a cover in which a photosensitive resin film is laminated on both sides of a support is attached to a substrate provided with an ink passage and then cured by irradiation with ultraviolet rays. The pressing conditions vary depending on the hardness of the film, the shape of the ink passage wall, etc., and there is a drawback that the sagging of the photosensitive resin into the ink passage or the non-adhesion of the cover to the ink passage wall occurs. .. In order to solve this point, for example, Japanese Patent Application Laid-Open No. 60-183158 proposes a "method for manufacturing an inkjet recording head". In this publication, when the flow path plate and the substrate are joined, the flow path plate is used as a member for transmitting electromagnetic waves, and a photosensitive resin film is laminated, and only the surface layer portion of the photosensitive resin film is not formed. The material is cured while being kept in a cured state, and then bonded to the substrate.

【0005】微細な形状をもつ接合で最も重要なのは接
着剤がはみ出さないことである。接着剤へのはみ出し
は、インクなどと接液する面積を増やし、インクによる
侵食を受けやすく、そのため耐久性が低下する。また、
接着剤のはみ出し量が大きいと、インクジェットの粒子
化特性上問題がある。具体的には、圧電体を用いた方式
などにおいては、複数のチャンネル駆動をした場合にお
互いに干渉しあうなどの問題がある。この問題に対し
て、前記公報のものは有効であるが、接着体として透明
材しか使用できない欠点がある。また、接合強度の比較
においても、半硬化状態からUV照射して接合する強度
は、液状又はペースト状の接着剤に比べ劣ることが実験
的に確認されている。
The most important thing in bonding with a fine shape is that the adhesive does not overflow. The protrusion to the adhesive increases the area in contact with the ink or the like and is apt to be eroded by the ink, so that the durability is lowered. Also,
If the amount of protrusion of the adhesive is large, there is a problem in terms of particle formation characteristics of the inkjet. Specifically, in a method using a piezoelectric body, there is a problem that they interfere with each other when a plurality of channels are driven. Although the above publication is effective for this problem, it has a drawback that only a transparent material can be used as an adhesive. Also in the comparison of the bonding strength, it has been experimentally confirmed that the strength of bonding by UV irradiation from the semi-cured state is inferior to that of a liquid or paste adhesive.

【0006】図6及び図7は、従来のインクジェットヘ
ッドにおける流路板の接合例を示す図で、図6は接合正
面図、図7は接合平面図である。図6において、流路板
11にノズル溝13が設けられており、駆動板12を接
合する時に、接着剤14がノズル溝13にはみ出し、流
体抵抗となってインクの供給を妨げたり、粒子化特性上
も他のノズルに影響を及ぼしたりする。また、図7にお
いては、接着代が大きいため、接合時に空気15を巻き
込み、空気の滞留部が生じ、強度低下の原因となってい
た。
6 and 7 are views showing an example of joining flow path plates in a conventional ink jet head. FIG. 6 is a front view of joining and FIG. 7 is a plan view of joining. In FIG. 6, a nozzle groove 13 is provided in the flow path plate 11, and when the drive plate 12 is joined, the adhesive 14 protrudes into the nozzle groove 13 and becomes a fluid resistance, which hinders the ink supply or becomes a particle. It also affects other nozzles in terms of characteristics. Further, in FIG. 7, since the bonding margin is large, the air 15 is entrained during the joining, and an air retention portion is generated, which causes a decrease in strength.

【0007】また、従来スクリーン印刷は、印刷したい
形状の上に、印刷したいパターンをスクリーン上に作成
し、印刷することが通常であった。しかし、微細形状で
あると、被印刷体の形状と印刷パターンの位置合わせが
非常に困難で、被印刷体上に接着剤が印刷されなかった
り、欠けたりして接合不良を生じることがあった。ま
た、従来、転写法というのはスタンプ的なやり方が一般
で、接着剤が付けられる被接合体上の接着剤にムラが生
じるという欠点があった。
In the conventional screen printing, it has been usual that a pattern to be printed is formed on a screen to be printed and then printed. However, if the shape is fine, it is very difficult to align the shape of the material to be printed with the printing pattern, and the adhesive may not be printed on the material to be printed or may be chipped to cause a bonding failure. .. Further, conventionally, the transfer method has generally been a stamp-like method, which has a drawback that unevenness occurs in the adhesive on the article to be bonded.

【0008】[0008]

【目的】本発明は、上述のごとき実情に鑑みてなされた
もので、強度向上のために、液状接着剤を使用可能と
し、不透明材のはみ出しのない接合を可能にすること、
また、被印刷体上に接着剤が印刷されなかったり、欠け
たりして接合不良の生じないような現実な接着剤の塗布
を行うこと、さらに、マスクパターンを不要とし、スク
リーン印刷にみられるスクリーンメッシュ部でのムラが
なく全面均一な接着層の形成を可能としたインクジェッ
トヘッドの製作方法を提供することを目的としてなされ
たものである。
[Purpose] The present invention has been made in view of the above-mentioned circumstances, and enables a liquid adhesive to be used to improve strength and enables bonding of an opaque material without protruding.
In addition, it is necessary to apply an actual adhesive that does not cause a bonding failure due to the adhesive not being printed or chipped on the material to be printed. The present invention has been made for the purpose of providing a method for manufacturing an inkjet head capable of forming a uniform adhesive layer on the entire surface without unevenness in the mesh portion.

【0009】[0009]

【構成】本発明は、上記目的を達成するために、(1)
記録媒体液をオリフィスから吐出させるマルチノズル記
録ヘッドを、少なくとも一方に複数の溝を有する2つの
基板を互いに接合してなるインクジェットヘッドの製作
方法において、前記溝を有する流路板の接合面に、該溝
以外の溝部を設け、接合剤を塗布して前記基板を接合一
体化すること、更には、(2)前記接着剤の塗布をスク
リーン印刷によって流路板に設け、パターニングマスク
はベタパターンであること、更には、(3)前記接着剤
を塗布して成膜基板上に接着剤の膜形成を設け、次に流
路板を成膜基板を合わせて相対的に走査し、前記接着剤
を流路板に転写することを特徴としたものである。以
下、本発明の実施例に基づいて説明する。
In order to achieve the above object, the present invention provides (1)
A multi-nozzle recording head for ejecting a recording medium liquid from an orifice is manufactured by joining two substrates having a plurality of grooves on at least one of them. A groove portion other than the groove is provided, and a bonding agent is applied to bond and integrate the substrates. Further, (2) the adhesive agent is applied to the flow path plate by screen printing, and the patterning mask is a solid pattern. And (3) applying the adhesive to form a film of the adhesive on the film-forming substrate, and then scanning the flow path plate relative to the film-forming substrate, Is transferred to the flow path plate. Hereinafter, description will be given based on examples of the present invention.

【0010】図1は、本発明によるインクジェットヘッ
ドの製作方法の一実施例を説明するための構成図で、図
中、1は流路板、2は流路溝、3はノズル溝、4は逃げ
溝、5は接着剤である。本発明は、図6と図7において
説明したように、従来の問題点を解決するために、流路
板1に逃げ溝4を設けたものである。前記流路板の作製
は、感光性ガラスを用いたエッチング加工やSiエッチ
ングでも容易に作製できる。また、これらを基に、電鋳
を行い型製作し、樹脂成形も可能である。
FIG. 1 is a constitutional view for explaining an embodiment of a method of manufacturing an ink jet head according to the present invention, in which 1 is a flow path plate, 2 is a flow path groove, 3 is a nozzle groove, and 4 is a flow path. The escape grooves 5 are adhesives. In the present invention, as described in FIGS. 6 and 7, in order to solve the conventional problems, the flow channel plate 1 is provided with the escape groove 4. The flow path plate can be easily manufactured by etching using photosensitive glass or Si etching. Also, based on these, electroforming can be performed to mold and resin molding is also possible.

【0011】図2は、本発明によるインクジェットヘッ
ドの流路板の接合例を示す図である。流路板1にノズル
溝3と逃げ溝4が設けられていたので、駆動板6を接合
した時に接着剤5は逃げ溝4へ流入するため、接着剤の
ノズル溝3へのはみ出しは減少し、品質の安定や歩留り
の向上となる。
FIG. 2 is a diagram showing an example of joining the flow path plates of the ink jet head according to the present invention. Since the nozzle groove 3 and the escape groove 4 are provided in the flow path plate 1, the adhesive 5 flows into the escape groove 4 when the drive plate 6 is joined, so that the adhesive does not leak to the nozzle groove 3. The quality is stable and the yield is improved.

【0012】図3は、流路板上に接着剤を塗布するため
のスクリーン印刷法を説明するための図で、図中、21
は流路板、22は接着剤、23はスクリーン、24はス
キージである。スクリーン印刷法で接着剤の膜厚を制御
するポイントは、スクリーンパターン、流路板とス
クリーンのギャップ、スキージの圧力が主なるポイン
トである。この中でのスクリーンパターンは大きな割
合を示すもので、流路板のように微細部品上に塗布する
際は、塗布したい場所とパターンの位置精度を高めない
と確実な塗布が出来ず、接合した時も接着剤が載らない
ために流路溝間でインクが漏れたり、接合強度が得られ
ないなど不具合が生じていた。図8に従来のマスクパタ
ーン示し、このマスクパターンと流路板上の塗布位置は
同一であるため、位置精度として±0.01mmと非常
に高精度が要求されていた。しかし、本発明の流路板の
ごとく逃げ溝を具備するものは接着剤の膜厚管理に許容
域が広がるため、図4のような全面ベタパターンで塗布
が可能となる。
FIG. 3 is a view for explaining a screen printing method for applying an adhesive on the flow path plate, and in FIG.
Is a flow path plate, 22 is an adhesive, 23 is a screen, and 24 is a squeegee. The main points for controlling the film thickness of the adhesive by the screen printing method are the screen pattern, the gap between the flow path plate and the screen, and the pressure of the squeegee. The screen pattern in this shows a large proportion, and when applying it to fine parts such as a flow path plate, reliable application can not be done unless the position accuracy of the place to be applied and the pattern position is improved Even when the adhesive was not applied, there were problems such as ink leaking between the flow channel grooves, and a lack of bonding strength. FIG. 8 shows a conventional mask pattern. Since this mask pattern and the coating position on the flow path plate are the same, a very high positional accuracy of ± 0.01 mm is required. However, since the flow path plate of the present invention having a clearance groove has a wider allowable range for controlling the film thickness of the adhesive, it is possible to apply the solid pattern as shown in FIG.

【0013】図5(a)〜(d)は、本発明による接着
剤の他の塗布方法、すなわち、転写接合法を示す図で、
図中、31は成膜基板、32は接着剤、33はバーコー
タ、34は流路板である。図(a),(b)において成
膜基板31上にバーコータ33で均一な接着剤の膜を形
成する。この膜厚は5〜10μmが最適であり、これ
は、バーコータ33のギャップやワイヤーバーを使用す
る時は、バーのワイヤー差によって選定でき制御でき
る。図(c)において、接着剤32を塗布した流路板3
4を載せ、数百gの力で押え、成膜基板31との密着を
確実にする。図(d)において、流路板34と成膜基板
31を相対的に走査することで接着剤32を流路板34
上に転写する。ここでのポイントは走査することで確実
に全面に転写することで、従来のスタンプ法のような転
写ムラがない。
FIGS. 5A to 5D are views showing another method of applying the adhesive according to the present invention, that is, a transfer joining method.
In the figure, 31 is a film-forming substrate, 32 is an adhesive, 33 is a bar coater, and 34 is a flow path plate. In FIGS. 3A and 3B, a uniform adhesive film is formed on the film formation substrate 31 by the bar coater 33. This film thickness is optimally 5 to 10 μm, which can be selected and controlled by the wire difference of the bar when the gap of the bar coater 33 or the wire bar is used. In FIG. 3C, the flow path plate 3 coated with the adhesive 32
4 is placed and pressed with a force of several hundreds of g to ensure the close contact with the film formation substrate 31. In FIG. 3D, the adhesive 32 is removed by scanning the flow path plate 34 and the film formation substrate 31 relatively.
Transfer to the top. The points here are surely transferred to the entire surface by scanning, so that there is no uneven transfer as in the conventional stamp method.

【0014】[0014]

【効果】以上の説明から明らかなように、本発明による
と、以下のような効果がある。 (1)流路板上に逃げ溝を設けることで、接着剤のはみ
出しがなくなるため、流路溝やノズル溝の接着剤による
閉塞がなくなり歩留りが向上する。さらに、はみ出しが
なくなったことで、隣接流路との剛性が小さくなり、粒
子化特性上の相互干渉が低減し、粒子化が安定し、印字
品質が向上する。 (2)接着剤の塗布に際し、スクリーン印刷を行なうこ
とが可能である。スクリーン印刷のパターンはべタパタ
ーンが使用でき、微妙な位置合わせが不要となり、作業
効率が向上する。 (3)2つの面を合わせ相対的に動かして接着剤を転写
することで、全面に均一な接着剤の塗布が可能となり接
合強度が向上する。
[Effect] As is apparent from the above description, the present invention has the following effects. (1) By providing the escape groove on the flow path plate, the adhesive does not overflow, so that the flow path groove and the nozzle groove are not blocked by the adhesive and the yield is improved. Furthermore, since the protrusion does not occur, the rigidity with the adjacent flow path is reduced, mutual interference in particle formation characteristics is reduced, particle formation is stabilized, and print quality is improved. (2) It is possible to perform screen printing when applying the adhesive. A solid pattern can be used as the screen-printed pattern, which eliminates the need for delicate alignment and improves work efficiency. (3) By transferring the adhesive by moving the two surfaces relative to each other, the adhesive can be uniformly applied to the entire surface, and the bonding strength is improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明によるインクジェットヘッドの製作方
法の一実施例を説明するための構成図である。
FIG. 1 is a configuration diagram for explaining an embodiment of a method for manufacturing an inkjet head according to the present invention.

【図2】 本発明の流路板の接合例を示す図である。FIG. 2 is a diagram showing an example of joining the flow path plates of the present invention.

【図3】 本発明の流路板上に接着剤を塗布するための
スクリーン印刷法を示す図である。
FIG. 3 is a diagram showing a screen printing method for applying an adhesive onto the flow channel plate of the present invention.

【図4】 本発明のマスクパターンを示す図である。FIG. 4 is a diagram showing a mask pattern of the present invention.

【図5】 本発明の転写接合法を示す図である。FIG. 5 is a diagram showing a transfer joining method of the present invention.

【図6】 従来の流路板の接合例を示す図である。FIG. 6 is a diagram showing an example of joining conventional flow path plates.

【図7】 従来の流路板の接合例を示す図である。FIG. 7 is a view showing an example of joining conventional flow path plates.

【図8】 従来のマスクパターンを示す図である。FIG. 8 is a diagram showing a conventional mask pattern.

【符号の説明】[Explanation of symbols]

1…流路板、2…流路溝、3…ノズル溝、4…逃げ溝、
5…接着剤。
1 ... Flow path plate, 2 ... Flow path groove, 3 ... Nozzle groove, 4 ... Escape groove,
5 ... Adhesive.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 記録媒体液をオリフィスから吐出させる
マルチノズル記録ヘッドを、少なくとも一方に複数の溝
を有する2つの基板を互いに接合してなるインクジェッ
トヘッドの製作方法において、前記溝を有する流路板の
接合面に、該溝以外の溝部を設け、接合剤を塗布して前
記基板を接合一体化することを特徴とするインクジェッ
トヘッドの製作方法。
1. A method of manufacturing an ink jet head comprising a multi-nozzle recording head for ejecting a recording medium liquid from an orifice, wherein two substrates having a plurality of grooves on at least one of them are bonded to each other. A method for manufacturing an ink jet head, characterized in that a groove portion other than the groove is provided on the bonding surface of, and a bonding agent is applied to bond and integrate the substrates.
【請求項2】 前記接着剤の塗布をスクリーン印刷によ
って流路板に設け、パターニングマスクはベタパターン
であることを特徴とする請求項1記載のインクジェット
ヘッドの製作方法。
2. The method of manufacturing an ink jet head according to claim 1, wherein the application of the adhesive is provided on the flow path plate by screen printing, and the patterning mask is a solid pattern.
【請求項3】 前記接着剤を塗布して成膜基板上に接着
剤の膜形成を設け、次に流路板を成膜基板を合わせて相
対的に走査し、前記接着剤を流路板に転写することを特
徴とする請求項1記載のインクジェットヘッドの製作方
法。
3. The adhesive is applied to form a film of the adhesive on the film-forming substrate, and then the flow path plate is relatively scanned by aligning the film-forming substrate and the adhesive is applied to the flow path plate. The method of manufacturing an inkjet head according to claim 1, wherein the ink is transferred to the ink.
JP16529392A 1992-06-01 1992-06-01 Production of ink jet head Pending JPH05330067A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16529392A JPH05330067A (en) 1992-06-01 1992-06-01 Production of ink jet head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16529392A JPH05330067A (en) 1992-06-01 1992-06-01 Production of ink jet head

Publications (1)

Publication Number Publication Date
JPH05330067A true JPH05330067A (en) 1993-12-14

Family

ID=15809582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16529392A Pending JPH05330067A (en) 1992-06-01 1992-06-01 Production of ink jet head

Country Status (1)

Country Link
JP (1) JPH05330067A (en)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0835758A3 (en) * 1996-10-14 1999-09-08 Canon Kabushiki Kaisha A liquid jet recording head and a method for manufacturing liquid jet recording heads
JP2000263778A (en) * 1999-03-16 2000-09-26 Seiko Epson Corp Actuator device, ink jet recording head, and ink jet recording device
US6361155B1 (en) 1999-06-23 2002-03-26 Nec Corporation Ink jet recording head and method for manufacturing the same
US6554406B1 (en) 1998-12-07 2003-04-29 Fuji Xerox Co., Ltd. Inkjet recording head and method of producing the same
EP1493578A1 (en) * 2003-06-30 2005-01-05 Brother Kogyo Kabushiki Kaisha Ink-jet head
US6877845B2 (en) 2002-01-22 2005-04-12 Matsushita Electric Industrial Co., Ltd. Ink-jet head and method for producing the same
JP2005186527A (en) * 2003-12-26 2005-07-14 Seiko Epson Corp Liquid ejecting head and liquid ejecting apparatus provided with the same
JP2006035765A (en) * 2004-07-29 2006-02-09 Brother Ind Ltd Inkjet head
JP2006239927A (en) * 2005-03-01 2006-09-14 Seiko Epson Corp Liquid jet head
US7332209B2 (en) 2003-09-29 2008-02-19 Fujifilm Corporation Laminated structure formed of thin plates
US7690770B2 (en) 2003-07-08 2010-04-06 Brother Kogyo Kabushiki Kaisha Sheet-member stacked structure, lead frame, lead-frame stacked structure, sheet-member stacked and adhered structure, and ink jet printer head
JP2017081035A (en) * 2015-10-29 2017-05-18 京セラ株式会社 Flow channel member, liquid discharge head, recording device, and manufacturing method of flow channel member

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0835758A3 (en) * 1996-10-14 1999-09-08 Canon Kabushiki Kaisha A liquid jet recording head and a method for manufacturing liquid jet recording heads
US6220688B1 (en) 1996-10-14 2001-04-24 Canon Kabushiki Kaisha Liquid jet recording head and a method for manufacturing liquid jet recording heads
US6554406B1 (en) 1998-12-07 2003-04-29 Fuji Xerox Co., Ltd. Inkjet recording head and method of producing the same
JP2000263778A (en) * 1999-03-16 2000-09-26 Seiko Epson Corp Actuator device, ink jet recording head, and ink jet recording device
US6361155B1 (en) 1999-06-23 2002-03-26 Nec Corporation Ink jet recording head and method for manufacturing the same
US6877845B2 (en) 2002-01-22 2005-04-12 Matsushita Electric Industrial Co., Ltd. Ink-jet head and method for producing the same
EP1493578A1 (en) * 2003-06-30 2005-01-05 Brother Kogyo Kabushiki Kaisha Ink-jet head
US7213910B2 (en) 2003-06-30 2007-05-08 Brother Kogyo Kabushiki Kaisha Ink-jet head
US7690770B2 (en) 2003-07-08 2010-04-06 Brother Kogyo Kabushiki Kaisha Sheet-member stacked structure, lead frame, lead-frame stacked structure, sheet-member stacked and adhered structure, and ink jet printer head
US7332209B2 (en) 2003-09-29 2008-02-19 Fujifilm Corporation Laminated structure formed of thin plates
JP2005186527A (en) * 2003-12-26 2005-07-14 Seiko Epson Corp Liquid ejecting head and liquid ejecting apparatus provided with the same
JP2006035765A (en) * 2004-07-29 2006-02-09 Brother Ind Ltd Inkjet head
JP2006239927A (en) * 2005-03-01 2006-09-14 Seiko Epson Corp Liquid jet head
JP2017081035A (en) * 2015-10-29 2017-05-18 京セラ株式会社 Flow channel member, liquid discharge head, recording device, and manufacturing method of flow channel member

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