JPH05316757A - Moving mechanism - Google Patents

Abstract

PURPOSE:To obtain a moving mechanism in which continuous driving is realized smoothly with no limit on the moving amount and positive clamping is realized with no slip. CONSTITUTION:A movable member 1 is clamped by means of clamp members 2 in two sets of opposing actuators 8a, 8c and 8b, 8d crossing each other at an angle of 90 deg.. Piezoelectric elements 3 for clamping are arranged radially on the outside of the clamp member 2 while piezoelectric elements 4, 5 for movement are arranged on the opposite side faces of the clamp member in the tangential direction to the movable member 1. The movable member 1 is then clamped by means of the clamp members 2 in the actuators 8a, 8c with the clamp members 2 in the actuators 8b, 8d being unclamped. When one of the-piezoelectric elements 4, 5 for movement in the actuators 8a, 8c is elongated gradually while the other is contracted gradually under that state, the movable member 1 rotates counterclockwise on the drawing. Clamp members 2 in the actuators 8a, 8c are then unclamped and the clamp members 2 in the actuators 8b, 8d are clamped thus rotating the movable member 1. The operation is repeated to rotate the movable member 1 continuously.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a moving mechanism used for precision equipment.

[0002]

2. Description of the Related Art Conventionally, as a moving device using an actuator such as a piezoelectric element, a mechanism for directly driving a movable portion by a piezoelectric element, or as shown in FIG. It is known that the position is driven by using a displacement magnifying mechanism for magnifying. Further, as shown in FIGS. 8 and 9, a pair of clamps and a telescopic part for moving the clamps are provided, and the clamping is performed alternately, and the telescopic parts are telescopically moved for positioning by a scale-like method. Mechanisms are also known (Japanese Patent Laid-Open Nos. 2-95180 and 2-84085). Further, as a mechanism for driving a moving body by bringing the moving body into pressure contact with a vibrating body vibrated by a piezoelectric element, there are those shown in FIGS. 10 and 11 (Japanese Patent Laid-Open Nos. 60474/1990 and 87981/1990).
Publication).

[0003]

In the method of directly driving the movable part by an actuator such as a piezoelectric element, the moving range is limited by the maximum displacement of the actuator. When the piezoelectric element is used, the movement range of about several tens of μm is the limit even if the laminated piezoelectric element having large displacement is used. As shown in FIG. 7, in the method using the displacement magnifying mechanism, the displacement magnifying rate up to several tens of times can be obtained as compared with the case of directly driving, but the movement range is limited, and the displacement magnifying mechanism reduces the rigidity. There is a problem of decrease. In the case of the scale insect mechanism as shown in FIGS. 8 to 11, there is a problem that high speed movement cannot be performed because of intermittent operation. In the mechanism shown in FIG. 10,
When one of the piezoelectric elements combined at right angles is extended, a bending moment acts on the other piezoelectric element, and the piezoelectric element may be destroyed. In the mechanism as shown in FIG. 11, a shearing force acts on the pressing piezoelectric element, and bending vibration also occurs during high-speed driving, so the piezoelectric element may be destroyed. Further, since the pressing force acts as a shearing force on the moving piezoelectric element, it cannot be strongly pressed, and there is a problem that it cannot be firmly fixed. In addition, when the moving body is moved by pressure as shown in FIGS. 10 and 11, the generated force of the piezoelectric element is large and the displacement amount is small, so that the displacement is absorbed by the bending of the moving body and reliable driving cannot be performed. There is.

The advantages of the present invention over these conventional examples are:
It is as follows. That is, there is no limitation on the amount of movement because it is not a direct drive by an expansion / contraction element or a displacement magnifying mechanism.
It is possible to drive continuously and smoothly, rather than the intermittent operation like the conventional scale insect mechanism, there is no position shift when switching clamps, and it is possible to perform fine positioning with the resolution up to the limit of the telescopic element. Since the moving body is sandwiched by the clamp mechanism instead of being pressed and fixed from one direction, the clamp can be reliably performed and no slippage occurs. Fine positioning is possible even in the clamping direction. Since a complicated mechanism such as a displacement magnifying mechanism is not used, the rigidity is high and high speed driving is possible. Since the elastic hinge is used, the bending moment and shearing force acting on the expansion element can be reduced. Since the moving telescopic element is arranged so as to sandwich the clamp portion, no tensile force acts on the moving telescopic element.

[0005]

In the present invention, since the movable member is clamped by being sandwiched from both sides, the movable member is not displaced by the clamp, and the clamping force is applied symmetrically, so that the reliable clamping is performed. You can do it. Since two or more pairs of clamp mechanisms are provided, and each clamp mechanism is provided with a telescopic element for individually moving the clamp mechanism, it is possible to alternately operate, and one clamp mechanism clamps. In the meantime, the clamp mechanism is moved to move the movable member, and the remaining clamp mechanism is moved to the initial position. During the movement or after the movement, another clamp mechanism is clamped to perform the initial clamping. The operation of releasing the set of clamp mechanisms, moving the clamp mechanisms to move the movable member while the other clamp mechanisms are clamping, and moving the set of clamp mechanisms to the initial position is performed. At this time, by moving the speed waveform of the moving expansion / contraction element to a triangular wave, the moving speed of the clamping mechanism becomes constant during clamping. In addition, by increasing the time for moving the movable member, shortening the time for returning the clamp member to the initial position, and simultaneously clamping the two or more sets of clamp mechanisms by overlapping, before the telescopic element for movement begins to return. It is driven by another set, and the movable member can be continuously moved. In addition, by controlling the amount of expansion of the movable expansion / contraction element in a state of being clamped by the clamp mechanism, it becomes possible to perform a minute amount of high-speed movement and adjustment. Furthermore, by controlling the amount of expansion of the clamping expansion / contraction element in a state of being clamped by the clamping mechanism, it becomes possible to move and adjust a minute amount in the clamping direction at high speed. Since the minute amount can be adjusted, the moving mechanism of the present invention can position the movable member.

When one or both of the clamp telescopic element and the drive telescopic element are driven to expand or contract so that the acceleration continuously and smoothly changes,
It is possible to prevent delay in displacement and overshoot, suppress vibration, and eliminate a positioning error caused by slippage on a friction surface due to inertial force and impact force, thereby realizing highly accurate positioning.

If a displacement magnifying mechanism is attached to one or both of the clamp telescopic element and the drive telescopic element, and the stroke of the telescopic element is expanded, clamping or driving is performed reliably and dragging or the like is caused. It is possible to eliminate the positioning error that occurs.

The clamp portion is driven by the movable telescopic element to move by the hinge portion provided between the elastic element for clamping and the clamp member and between the elastic member for clamp and the fixed portion, the hinge portion having weakened rigidity in the moving direction. However, shearing force and bending moment are not applied to the clamp expansion element. Similarly, the shearing force acting on the elastic element for clamping and the bending force are provided between the movable elastic element and the clamp member and between the movable elastic element and the fixed portion by providing the hinge portion whose rigidity is weakened in the clamp pressing direction. The moment can be reduced.

By attaching a telescopic element for movement having hinge portions weakened in the clamp pressing direction to both ends of the clamp member and applying a compressive force to the telescopic element, the clamp portion can be moved at high speed during high speed movement. Even if it is reciprocally moved, no tensile force acts on the movable expansion / contraction element.

By replacing one of the moving expansion / contraction elements attached to both ends with an elastic body such as a spring, it becomes possible to reduce the number of expansion / contraction elements to be used by preventing the pulling force from acting during high speed driving.

One set of moving mechanism parts is arranged so as to face each other on the diameter of the shaft-shaped movable member, and another set of moving mechanism parts is arranged so as to be offset from the one set in the central axis direction of the movable member. By doing so, it is possible to stack the adjacent moving mechanism parts, and it is possible to reduce the shaft diameter and downsize.

In a moving mechanism using two or more pairs of moving mechanism sections, by further arranging two or more pairs of moving mechanism sections in a direction different from the moving mechanism section or in a rotation direction, two degrees of freedom can be obtained. A positioning mechanism can be easily obtained.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a rotary type moving mechanism according to a first embodiment of the present invention. The details of the actuator are shown in Fig. 1.
2. The drive waveforms of each elastic element are shown in FIG. The movable member 1 is a rotary shaft in this example, and alternately applies a clamping force to the clamp members 2 in the two sets of actuators 8a, 8c and 8b, 8d facing each other at an angle of 90 ° to drive them. In this embodiment, a laminated piezoelectric element is used as the clamp elastic element 3 and the movable elastic elements 4 and 5 of the actuators 8a to 8d. The clamp piezoelectric element 3 is a clamp member 2
Radially arranged on the outside of. Further, the moving piezoelectric elements 4 and 5 are arranged on both side surfaces of the clamp member 2 in the tangential direction of the movable member 1. The actual rotation operation is in the following order.

The two actuators 8a and 8c are set as one set, and the remaining two actuators 8b and 8d are set as another set, and the following operations are performed by shifting the half-cycle phase from each other.
That is, a clamping force is applied to the clamping member 2 by applying a voltage to the clamping piezoelectric element 3 of the actuators 8a and 8c to extend the clamping member 2, and the movable member 1 is clamped.
At this time, the moving piezoelectric element 4 is in a state of being expanded by applying a voltage, and the moving piezoelectric element 5 is in a state of contracting without being applied with a voltage, so that the clamp member 2 is located at a position closer to the right side in FIG. is there. Next, when the voltage of the moving piezoelectric element 4 is gradually decreased and contracted, and at the same time the voltage of the moving piezoelectric element 5 is gradually increased and expanded, the clamp member 2 moves to the left in FIG. .. Further, since the clamp members of the actuators facing each other are moving in the opposite directions, the moving member 1 is given a couple force and rotates counterclockwise. next,
By keeping the state (the state in which the moving piezoelectric element 4 is contracted, the moving piezoelectric element 5 is extended, and the clamp member 2 is closer to the left side in FIG. 12), the voltage of the clamping piezoelectric element 3 is set to zero. The clamping force of the clamp member 2 is released and the clamp of the movable member 1 is released. Next, when the voltage of the moving piezoelectric element 4 is gradually increased and expanded and at the same time the voltage of the moving piezoelectric element 5 is gradually decreased and contracted, the clamp member 2 moves to the right in FIG. .. As a result, the clamp member 2 returns to the initial position, but since the clamp piezoelectric element 3 is contracted and the clamp member 2 is not in contact with the movable member 1, it does not rotate in the reverse direction. When the clamp members 2 of the actuators 8a and 8c are released, a clamping force is generated by the clamp members 2 of the actuators 8b and 8d to perform a rotating operation. As described above, the four actuators are used as two sets of driving units and are alternately operated with the phases thereof shifted, whereby the movable member 1 can be continuously rotated.

Hinge members 10a to 10c are provided between the clamping piezoelectric element 3 and the expansion / contraction piezoelectric elements 4 and 5 and the fixed frame 11, and the clamping piezoelectric element 3 and the moving piezoelectric element 4, The hinge members 9a to 9c are provided between the clamp member 5 and the clamp member 2 to prevent an excessive bending stress or an excessive shearing force from acting on the piezoelectric element.

Further, FIG. 2 shows a voltage waveform of each actuator. The rectangular wave 20 that repeats high voltage and low voltage is used to drive the clamping piezoelectric element 3 of the actuators 8a and 8c on the side that first applies the clamping force. Further, triangular waves 21 and 22 are used to drive the moving piezoelectric elements 4 and 5.

Further, for the clamping piezoelectric elements of the actuators 8b and 8d on the side that first releases the clamping force, a rectangular wave 23 having the same waveform as that of the above-mentioned 20 but opposite phase is used. The same triangular waves 21, 22 are used to drive the moving piezoelectric elements 4 and 5.
Is used.

The conventional mechanism shown in FIG. 10 has a problem that a bending stress close to breaking strength is generated in the piezoelectric element.
For example, when a piezoelectric element having a size of 5 × 5 × 18 (mm) is used and its end portion is forcibly displaced by 15 μm in the lateral direction with respect to the piezoelectric element, the Young's modulus of the piezoelectric ceramic is 560.
When it is set to 00 N / mm ² , the maximum bending moment applied to the piezoelectric element is 810 Nmm, and the maximum stress due to the bending moment is 38.9 N / mm ² , which is almost equal to the transverse rupture force of the piezoelectric element. There is a fear of However, at both ends of the piezoelectric element, width 5 mm, length 1 m
By providing a hinge part made of stainless steel with a thickness of 0.8 mm and a thickness of 0.8 mm, the maximum bending moment applied to the piezoelectric element is 65.9 Nmm, and the maximum stress due to the bending moment is 3.2 N / mm ^2, which poses a problem. It becomes possible to make it a value without.

FIG. 3 is a waveform diagram showing a driving method different from that shown in FIG. In the triangular input waveform of the expansion / contraction element for movement, the time for moving the movable member is lengthened, the time for returning the clamp member to the initial position is shortened, and two sets of clamp mechanisms are overlapped and clamped to move. As a result, it is possible to prevent a speed change and a shift when the clamps are switched, and perform a smooth rotation at a constant speed. In this example, two sets of clamp mechanisms alternately clamp at two places, but three or more sets of clamp mechanisms may be used to move the movable member more stably.

Further, a part or all of the clamping piezoelectric elements are extended to clamp the movable member 1, and the movable expansion / contraction element moves the clamp mechanism to perform precise positioning of the movable member 1 and vibration control. Such high speed and high rigidity micro-movement can be performed. Further, some or all of the clamp piezoelectric elements are extended to clamp the movable member 1, and the clamp expansion / contraction element moves the clamp mechanism to perform positioning in the clamp direction. High-speed, high-rigidity minute movement such as eccentric positioning and vibration control can be performed.

FIG. 13 shows the voltage waveform of each actuator in the driving method of the moving mechanism used in the third embodiment of the present invention. As shown in FIG. 13, when driving the clamping piezoelectric element 3 of the actuators 8a and 8c on the side that first applies the clamping force, the rising and falling portions of a rectangular wave that repeats high voltage and low voltage are changed to both retention curves. The drive waveform 20a smoothly connected is used. Further, triangular waves 21a and 22a are used to drive the moving piezoelectric elements 4 and 5.

Further, for the clamping piezoelectric elements of the actuators 8b and 8d on the side that first releases the clamping force, the waveform 23a having the same waveform as the above 20a but the phase opposite thereto is used.
To drive the moving piezoelectric elements 4 and 5, the same triangular wave 21a,
22a is used.

By providing each of these drive waveforms, it is possible to prevent delay of displacement, overshoot, vibration of the clamp member 2 during the clamp operation, violent collision between the clamp member and the movable member 1, and highly accurate positioning. It will be possible.

Next, FIG. 14 shows the voltage waveform of each actuator in the driving method of the moving mechanism used in the fourth embodiment of the present invention. In the fourth embodiment, the actuators 8a, 8c on the side that first applies the clamping force are driven by using the two stationary curves 21b instead of the triangular wave 21a to drive the piezoelectric elements 5 for movement. On the other hand, instead of the triangular wave 22a, the two stationary curves 22b whose phases are opposite to those of the stationary curves 21b.
It is driven by using.

Similarly, with respect to the moving piezoelectric elements 4 and 5 of the actuators 8b and 8d that first release the clamping force, the same two retention curves 21b and 22b as those on the clamping force applying side, respectively.
It is driven by using. In this case, in driving the clamping piezoelectric element 3, the rectangular waves 20 whose phases are mutually inverted on the side that first applies the clamping force and the side that releases the clamping force, respectively.
b and 23b are used.

By using such a driving waveform,
It is possible to prevent driving delay, overshoot, and vibration of the clamp member during the driving operation, thereby enabling highly accurate positioning.

FIG. 15 shows the voltage waveform of each actuator in the driving method of the moving mechanism used in the fifth embodiment of the present invention. In the fifth embodiment, the moving piezoelectric elements 4 and 5 are provided with 21b.
The same curves 20c and 23c as 20a and 23a are used, which are driven by using the same two stationary curves 21c and 22c having opposite phases, and have rectangular waves connected to the clamping piezoelectric element 3 by the two stationary curves and whose phases are inverted to each other. The accelerations of both the clamping piezoelectric element 3 and the moving piezoelectric elements 4 and 5 are changed smoothly.

By applying such driving waveforms respectively, it is possible to prevent delay of displacement, overshoot, vibration of the clamp member 2 during the clamp operation and the drive operation, and a violent collision between the clamp member and the movable member 1. It becomes possible to perform highly accurate positioning.

The sixth embodiment of the present invention is intended to drive the rotary shaft at a constant speed, and as shown in FIG. 16, a sawtooth wave voltage is applied to the moving element 4 on the side which first applies the clamping force. The waveform 21d is given to the moving element 5 by a waveform 22d having a phase opposite to that of the voltage waveform 21d, and the voltage is linearly increased (decreased) in the driving process to operate at a constant speed.

Further, the moving piezoelectric element 4 on the side that first releases the clamping force gives a voltage waveform 24d of a sawtooth wave whose phase is opposite to that of the waveform 21d, and the moving piezoelectric element 5 has a phase opposite to that of the waveform 22d. A sawtooth voltage waveform 25d is applied so that constant speed rotation is continuously performed.

The clamp piezoelectric element 3 has the same stationary curves 20d and 23d as the curved curves 20a and 23a in which the rectangular waveforms of the third embodiment are connected to each other by the stationary curves.
Was used, and an input waveform with which the acceleration, velocity, and displacement of the clamp member smoothly changed was used.

By imparting each of these driving waveforms, it becomes possible to prevent delay of displacement, overshoot, vibration of the clamp member 2 during the clamp operation, and violent collision between the clamp member and the movable member 1. The movable member 1 rotates at a constant speed, which enables highly accurate positioning.

In the seventh embodiment of the present invention, as shown in FIGS.
In the first moving mechanism of the present invention, which is a rotary type in the first embodiment shown in FIG. 2, the enlargement mechanism of the clamp portion shown in FIGS. 17 and 18 is attached instead of FIG. The movable member 1 is a shaft in this example, and two sets of actuators 8a, 8c and 8b, 8d facing each other at an angle of 90 ° are provided.
Clamping forces are alternately applied to the inner clamp members 2 to drive them. In this embodiment, as the clamp elastic element 3 and the movable elastic elements 4 and 5 of the actuators 8a to 8d,
A laminated piezoelectric element is used. Piezoelectric element for clamp 3
Are radially arranged outside the clamp member 2 and the arm 13, and the arm 13 is connected to the fixed portion 6 and the clamp piezoelectric element 3 by the hinge 12. The hinge portion 12 of this embodiment is arranged in the longitudinal direction of the arm as shown in FIG. 18, and the hinge 12a is a fulcrum between the fixed portion and the arm.
The hinge 12b between the clamp piezoelectric element and the arm serves as a force point, and the displacement magnifying mechanism is configured by performing the lever movement. Further, the arm 13 is in sliding contact with the clamp member 2 and is the point of action. The moving piezoelectric elements 4 and 5 are arranged on both sides of the clamp member 2 in the tangential direction of the movable member 1. When the clamp piezoelectric element is extended, the hinge portion exists, so that the arm 13 moves the lever and pushes the clamp member 2 toward the center of the movable member 1. The clamp member 2 in contact with the sliding surface is further pushed to clamp the movable member 1. At this time, since the stroke of the clamp member 2 is large due to the expansion mechanism by the hinge, there is an advantage that the clamp operation can be reliably performed.

A hinge member 10 is provided between the clamping piezoelectric element 3 and the expansion / contraction piezoelectric elements 4 and 5 and the fixed frame 11, and the clamping piezoelectric element 3 and the moving piezoelectric elements 4 and 5 are provided. A hinge member 9 is provided between the clamp member 2 and the clamp member 2 so that bending stress and shearing force do not act on the piezoelectric element.

Since the stroke of the clamp operation is increased by using the displacement magnifying mechanism, the clamp is reliably performed, and the positioning error caused by dragging or the like can be eliminated. Further, in the present embodiment, if the bearing is supported between the rotary shaft and the fixed portion to receive the load,
It is possible to avoid the influence of the decrease in rigidity as in the conventional case.

Further, a hinge may be attached instead of the sliding surface between the arm 13 and the clamp member 2 by the above-mentioned moving mechanism.

Further, between the moving piezoelectric element 4 or 5 and the clamp member 2, the arm 1 shown in the above-mentioned Examples 7 and 8 is provided.
3 may be provided and it may be an expansion mechanism. At this time, since the stroke of the clamp member 2 is large due to the expansion mechanism by the hinge, there is an advantage that the moving operation can be performed quickly.

As shown in FIG. 1, piezoelectric elements 4 and 5 for movement are attached to both sides of each clamp member 2, and a compressive force is applied to the piezoelectric elements so that the clamp portion can be driven back and forth at high speed during high speed movement. Also, it becomes possible to prevent the pulling force from moving on the moving piezoelectric element.

As shown in FIG. 4, one of the moving piezoelectric elements mounted on both sides of the clamp member is replaced with an elastic body 12 such as a spring so that the tensile force does not work during high speed driving and the piezoelectric element is removed. It is possible to reduce the number of elements used.

Further, as shown in FIG. 5, a part of the moving mechanism part is arranged so as to face the diameter of the axial movable member, and another set of moving mechanism parts is provided to the one set of the movable member. By arranging them so as to shift in the direction of the central axis, it is possible to stack the adjacent moving mechanism parts, and it is possible to reduce the shaft diameter and reduce the size.

FIG. 6 shows an example in which the present invention is applied to a uniaxial linear movement mechanism. In this example, two sets of clamping mechanisms are alternately clamped at two places, but two or more sets of clamping mechanisms may be used to perform more stable movement of the movable member.

Further, by using the mechanism of FIG. 6 as the movable member in the form of a shaft and incorporating the mechanism of FIG. 1 in the fixed frame, a moving mechanism having two degrees of freedom of rotation and axial movement can be realized. In a moving mechanism using two or more pairs of moving mechanism sections, by further arranging two or more pairs of moving mechanism sections in a direction different from the moving mechanism section or in a rotation direction,
A positioning mechanism having two or more degrees of freedom can be easily obtained. By arranging the pair of moving mechanism units on a plane with an angle of 90 degrees, it is possible to move the two axes orthogonal to each other, and various moving combinations can be made by arranging the moving mechanism.

[0043]

The advantages of the present invention are as follows. That is, there is no limitation on the amount of movement because it is not a direct drive by an expansion / contraction element or a displacement magnifying mechanism. It is possible to drive continuously and smoothly, rather than the intermittent operation like the conventional scale-insect mechanism, and it is also possible to perform fine positioning with a resolution up to the limit of the telescopic element. Since the moving body is sandwiched by the clamp mechanism instead of being pressed and fixed from one direction, the clamp can be reliably performed and no slippage occurs. Fine positioning is possible even in the clamping direction. Since a complicated mechanism such as a displacement magnifying mechanism is not used, the rigidity is high and high speed driving is possible. Since the elastic hinge is used, the bending moment and shearing force acting on the expansion element can be reduced. Since the moving telescopic element is arranged so as to sandwich the clamp portion, no tensile force acts on the moving telescopic element.

By driving the clamp and drive expansion / contraction elements so that the acceleration changes smoothly, delay in displacement of the clamp member, overshoot, vibration, and collision are prevented. As a result, highly accurate positioning is possible.

By attaching an expansion mechanism to the expansion element,
A clamp-release action is ensured. Further, there is an effect that the moving speed becomes faster.

[Brief description of drawings]

FIG. 1 is a rotary movement mechanism according to a first embodiment of the present invention.

FIG. 2 is a diagram showing drive waveforms of the piezoelectric element of the first embodiment.

FIG. 3 is a diagram showing a drive waveform of a piezoelectric element of the mechanism of FIG. 1 in a second embodiment of the present invention, and a diagram in which a rectangular wave is provided with an overlapping portion.

FIG. 4 is a diagram in which one of the opposing piezoelectric elements in the eleventh embodiment of the present invention is replaced with an elastic body.

FIG. 5 is a diagram in which a moving mechanism unit is axially displaced to reduce the size in a twelfth embodiment of the present invention.

FIG. 6 is a diagram of a uniaxial translation movement mechanism according to a thirteenth embodiment of the present invention.

FIG. 7 is a diagram of a conventional example of a displacement magnifying mechanism using a lever.

FIG. 8 is a diagram of a conventional example of a rotary positioning device using a scale insect mechanism.

FIG. 9 is a view of a conventional example of a rotary positioning device using a scale insect mechanism.

FIG. 10 is a diagram of a conventional example of a translational positioning device using a scale insect mechanism.

FIG. 11 is a view of a conventional example of a translational positioning device using a scale insect mechanism.

FIG. 12 is a diagram showing an actuator section of a moving mechanism used in the first embodiment of the present invention.

FIG. 13 is a voltage waveform diagram of each actuator in the driving method of the moving mechanism used in the third embodiment of the present invention.

FIG. 14 is a voltage waveform chart of each actuator in the driving method of the moving mechanism used in the fourth example of the present invention.

FIG. 15 is a voltage waveform chart of each actuator in the driving method of the moving mechanism used in the fifth embodiment of the present invention.

FIG. 16 is a voltage waveform diagram of each actuator of the driving method of the moving mechanism used in the sixth embodiment of the present invention.

FIG. 17 is a diagram showing a displacement magnifying mechanism portion of a moving mechanism used in a seventh embodiment of the present invention.

FIG. 18 is a side view of a hinge portion.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Movable member (axis) 2 Clamping member 3 Clamping piezoelectric element 4 Moving piezoelectric element 5 Moving piezoelectric element 6 Fixed frame 8a-8d Actuator 9, 10 Hinge part 11 Fixed frame 12 Hinge part 13 Arm 12a Hinge (fulcrum) 12b Hinge (force point) 20a-d, 21a-d, 22a-d, 23a-d Driving voltage waveforms of the clamping piezoelectric element 3 and the moving piezoelectric elements 4 and 5 used in the examples of the present invention.

Continuation of front page (51) Int.Cl. ⁵ Identification number Reference number within the agency FI Technical indication location // B23Q 5/28 8107-3C (72) Inventor Yasuhiro Otsuka 5-7-1 Shiba, Minato-ku, Tokyo Japan Electric stock company (72) Inventor Kenichi Yoshida 5-7-1, Shiba, Minato-ku, Tokyo Nippon Electric Co., Ltd. (72) Inventor Toshinori Ishida 5-7-1 Shiba, Minato-ku, Tokyo NEC stock

Claims (13)

[Claims] 1. A pair of clamp mechanisms for clamping a movable member by clamping it from both sides by a clamp expansion / contraction element.
A moving mechanism comprising at least one set, and each pair of clamping mechanisms including one or more moving telescopic elements for moving the clamping mechanisms. 2. An operation of moving a movable member by moving the clamp mechanism while the clamp mechanism is clamped and moving another clamp mechanism to an initial position, During the movement or after the movement, the part of the other clamp mechanism is clamped to release the part of the clamp mechanism that was originally clamped, and the part of the clamp mechanism is clamped while the part of the other clamp mechanism is clamped. While moving the movable member by moving
The moving mechanism according to claim 1, wherein the movable member is continuously moved by performing an operation of moving the clamp mechanism in the part to the initial position. 3. A rectangular wave-shaped input waveform is used to drive the clamping elastic element of the clamping mechanism, and a triangular-wave input waveform is used to drive the movable elastic element of the clamping mechanism. Moving mechanism. 4. A triangular input waveform of a moving expansion / contraction element, wherein the time for moving the movable member is increased and the time for returning the clamp member to the initial position is shortened so that two or more sets of clamp mechanisms overlap each other. The moving mechanism according to claim 3, wherein the moving mechanism is clamped. 5. The moving mechanism according to claim 2, wherein the movable member is clamped by a part or all of the clamp mechanism, and the movable member is positioned by moving the clamp mechanism by a moving telescopic element for moving the clamp mechanism. .. 6. The moving mechanism according to claim 2, wherein the movable member is clamped by a part or all of the clamp mechanism, and the displacement of the pair of clamping elastic elements is controlled to position the movable member. 7. A hinge portion having weakened rigidity in the moving direction is provided between the clamp telescopic element and the clamp member and between the clamp telescopic element and the fixed portion to provide a space between the telescopic element for movement and the clamp member and for movement. 7. The moving mechanism according to claim 2, wherein a hinge portion weakened in rigidity is provided in the clamp pressing direction between the expansion element and the fixed portion. 8. A moving expansion / contraction element having hinge portions, whose rigidity is weakened in a clamp pressing direction, attached to both ends of the clamp member according to claim 1, respectively. The moving mechanism according to 5, 6, or 7. 9. The elastic member is used to replace one of the movable expansion / contraction elements attached to both ends.
The described moving mechanism. 10. A set of a moving mechanism composed of a clamp portion, a clamp telescopic element, a moving telescopic element, and a hinge portion at both ends of each telescopic element is arranged so as to face each other on the diameter of a shaft-shaped movable member. And another set of moving mechanism parts are arranged so as to be displaced in the central axis direction of the movable member with respect to the one set. 9. The moving mechanism according to 9. 11. The positioning of the movable member is performed by using two or more pairs of a moving mechanism section composed of a clamp section, a clamp telescopic element, a moving telescopic element, and a hinge section at both ends of each telescopic element. 3. The moving mechanism according to claim 2, wherein two or more pairs of moving mechanism sections are arranged in a direction different from the moving mechanism section or in a rotating direction.
The moving mechanism according to 3, 4, 5, 6, 7, 8 or 9. 12. A clamp telescopic element, a moving element, or both a clamp telescopic element and a moving element,
Stretching or contracting driving is performed so that the acceleration continuously and smoothly changes.
The moving mechanism according to 6, 7, 8, 9, 10 or 11. 13. A magnifying mechanism is provided by providing a hinge portion between the moving telescopic element and the clamp member, or between the moving telescopic element and the fixed portion, and between the fixed portion and the clamp member. The moving mechanism according to 1, 2, 7, 8, 9, 10, 11 or 12.