JPH05282619A - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPH05282619A JPH05282619A JP10383992A JP10383992A JPH05282619A JP H05282619 A JPH05282619 A JP H05282619A JP 10383992 A JP10383992 A JP 10383992A JP 10383992 A JP10383992 A JP 10383992A JP H05282619 A JPH05282619 A JP H05282619A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- gap
- metal
- magnetic head
- coil window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 99
- 239000002184 metal Substances 0.000 claims abstract description 33
- 239000010409 thin film Substances 0.000 claims description 26
- 239000010408 film Substances 0.000 claims description 20
- 230000005294 ferromagnetic effect Effects 0.000 claims description 5
- 238000004804 winding Methods 0.000 claims description 4
- 230000005415 magnetization Effects 0.000 abstract description 7
- 238000004544 sputter deposition Methods 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 3
- 230000006698 induction Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 17
- 229910000702 sendust Inorganic materials 0.000 description 11
- 239000000696 magnetic material Substances 0.000 description 10
- 230000004907 flux Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 6
- 229910000859 α-Fe Inorganic materials 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 230000035699 permeability Effects 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 210000003205 muscle Anatomy 0.000 description 1
- 230000003449 preventive effect Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は磁気ヘッドに関する。更
に詳述すると、本発明は、少なくとも一方の磁気コア半
体が酸化物磁性材料の基板と金属磁性薄膜により構成さ
れる一対の磁気コア半体を突合せてなる所謂メタル・イ
ン・ギャップ（ＭＩＧ）型磁気ヘッドの改良に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head. More specifically, the present invention provides a so-called metal-in-gap (MIG) in which at least one magnetic core half body is formed by abutting a pair of magnetic core half bodies composed of a substrate of an oxide magnetic material and a metal magnetic thin film. Type magnetic head improvement.
【０００２】[0002]
【従来の技術】最近、磁気記録密度の高密度化が進んで
おり、より高い抗磁力と残留磁束密度を有する磁気テー
プなどのメディアが使用されている。これに伴なって磁
気ヘッドにも高い飽和磁束密度と透磁率を有する磁気ヘ
ッドが要望されている。2. Description of the Related Art Recently, the magnetic recording density has been increasing, and media such as magnetic tapes having higher coercive force and residual magnetic flux density have been used. Along with this, a magnetic head having a high saturation magnetic flux density and a high magnetic permeability is also required for the magnetic head.
【０００３】このような磁気ヘッドとしては、例えば特
開平1-100714号に示すように、コアの大部分をフェライ
トなどの酸化物磁性材料の基板で構成し、ギャップ対向
面にのみセンダスト等の高飽和磁束密度材料の薄膜を使
用したＭＩＧヘッドが知られている。このＭＩＧヘッド
は、少なくとも一方の磁気コア半体が酸化物磁性材料の
基板と金属磁性薄膜により構成される一対の磁気コア半
体をＳｉＯ2 等のギャップ材の層を介在させて突合せ、
ＳｉＯ2 等のギャップ材の層を介在させて突合せられる
一方の磁気コア半体の金属磁性薄膜と、これに対向する
他方の磁気コア半体の金属磁性薄膜あるいは酸化物磁性
材との間で磁気ギャップを形成するようにしている。In such a magnetic head, for example, as shown in Japanese Patent Application Laid-Open No. 1-100714, most of the core is composed of a substrate made of an oxide magnetic material such as ferrite, and only a gap facing surface has a high level of sendust or the like. MIG heads using thin films of saturated magnetic flux density material are known. In this MIG head, at least one of the magnetic core halves is abutted with a pair of magnetic core halves composed of a substrate of an oxide magnetic material and a metal magnetic thin film, with a gap material layer such as SiO 2 interposed.
The magnetic field between the metal magnetic thin film of one magnetic core half body and the magnetic metal thin film of the other magnetic core half body or the oxide magnetic material facing each other, which are abutted by interposing a layer of a gap material such as SiO 2 I try to form a gap.
【０００４】金属磁性薄膜は、酸化物磁性材のギャップ
対向面（本明細書では突合せたとき対向する面をいう）
にスパッタリングなどの真空薄膜形成技術によって膜付
けされる。このとき、センダスト等の結晶磁性膜は一般
に磁気異方性が等方的であると考えられていたことか
ら、金属磁性膜を形成するギャップ対向面には何らの特
別の処置を施すこともなく平滑なギャップ対向面に正対
する方向からスパッタリングを行っている。The metal magnetic thin film is a gap facing surface of an oxide magnetic material (in the present specification, a surface facing each other when abutted against each other).
The film is formed by a vacuum thin film forming technique such as sputtering. At this time, since the crystalline magnetic film such as sendust was generally considered to have isotropic magnetic anisotropy, no special treatment was applied to the gap facing surface forming the metal magnetic film. Sputtering is performed from the direction directly facing the smooth gap facing surface.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、センダ
スト等の結晶磁性膜には実際には顕著な磁気異方性が表
われることが実験結果から検証されている。このため、
センダスト等の結晶磁性膜の磁気異方性を考慮していな
い従来の磁気ヘッドは、これら金属磁性膜の特性を十分
に発揮し切れないものであった。即ち、従来の磁気ヘッ
ドは、高周波帯域（ほぼ２０ＭＨｚ〜３０ＭＨｚまで）
における透磁率に改善の余地があるものであった。However, it has been verified from experimental results that the crystalline magnetic film of Sendust or the like actually exhibits remarkable magnetic anisotropy. For this reason,
Conventional magnetic heads that do not consider the magnetic anisotropy of crystalline magnetic films such as sendust cannot fully exhibit the characteristics of these metal magnetic films. That is, the conventional magnetic head has a high frequency band (up to about 20 MHz to 30 MHz).
There was room for improvement in the magnetic permeability.
【０００６】本発明は、簡単な構成で高周波特性を向上
させ得る磁気ヘッドを提供することを目的とする。An object of the present invention is to provide a magnetic head which can improve high frequency characteristics with a simple structure.
【０００７】[0007]
【課題を解決するための手段】かかる目的を達成するた
め、本発明は、トラック幅のギャップ対向面に強磁性金
属の薄膜を膜付けしたコア半体を対向させて前記薄膜の
間でギャップを形成すると共に、前記薄膜間にコイル窓
を形成し該コイル窓を利用して巻線をする磁気ヘッドに
おいて、前記コイル窓に磁路と直交する方向の筋を複数
形成し、その上に前記金属薄膜を形成するようにしてい
る。In order to achieve the above object, according to the present invention, core halves each having a thin film of a ferromagnetic metal attached to the gap facing surfaces of the track width are made to face each other to form a gap between the thin films. In the magnetic head in which a coil window is formed between the thin films and winding is performed by using the coil window, a plurality of stripes in the direction orthogonal to the magnetic path are formed in the coil window, and the metal is formed on the stripe. A thin film is formed.
【０００８】[0008]
【作用】フェライト等の基板のギャップ対向面にセンダ
スト等の強磁性金属をスパッタリング等によって膜付け
する時、誘導磁気異方性により磁化容易軸が基板表面の
筋によって誘導形成される。したがって、センダストな
どの金属磁性材膜を流れる磁束と直交する方向に形成さ
れたコイル窓の筋に沿って金属磁性材膜の磁気容易軸が
形成され、高周波特性を向上させる。When a ferromagnetic metal such as sendust is deposited on the surface of the substrate such as ferrite that faces the gap by sputtering or the like, the easy axis of magnetization is induced and formed by the streaks on the substrate surface due to the induced magnetic anisotropy. Therefore, the magnetic easy axis of the metal magnetic material film is formed along the stripe of the coil window formed in the direction orthogonal to the magnetic flux flowing through the metal magnetic material film such as sendust, and the high frequency characteristics are improved.
【０００９】[0009]
【実施例】以下、本発明の構成を図面に示す実施例に基
づいて詳細に説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS The structure of the present invention will be described in detail below with reference to the embodiments shown in the drawings.
【００１０】図１に本発明の磁気ヘッドを構成する一方
の磁気コア半体の基板部分のみを示す。この磁気コア半
体の基板１は、例えばフェライトなどの酸化物磁性材で
構成されている。基板１は、必要に応じてトラック幅の
ギャップ対向面を形成するため、ギャップ対向面４の少
なくとも磁気ギャップを形成する部分にトラック規制溝
が設けられて所定トラック幅に規制されている。FIG. 1 shows only the substrate portion of one of the magnetic core halves constituting the magnetic head of the present invention. This magnetic core half substrate 1 is made of an oxide magnetic material such as ferrite. In order to form a gap facing surface having a track width in the substrate 1 as necessary, a track limiting groove is provided in at least a portion of the gap facing surface 4 where a magnetic gap is formed, and the substrate is restricted to a predetermined track width.
【００１１】一対の磁気コア半体の少なくとも一方の基
板１のギャップ対向面４にはコイルを巻回するためのコ
イル窓２が設けられている。このコイル窓２には磁化容
易軸を形成したい方向に複数本の筋３が形成されてい
る。本実施例のリング型磁気ヘッドの場合、磁路に直交
する方向に磁化容易軸を配置することが高周波帯域にお
ける金属磁性膜５の透磁率を高めるという知見に基づい
て、磁束方向と直交する方向に複数本の筋３が形成され
ている。この筋３は、その形状や本数、ピッチなどには
特に限定されるものではないが、好ましくは数μｍ〜数
十μｍの例えば溝あるいは突条などから成る凹凸で構成
される。A coil window 2 for winding a coil is provided on a gap facing surface 4 of at least one substrate 1 of a pair of magnetic core halves. A plurality of stripes 3 are formed in the coil window 2 in the direction in which the easy axis of magnetization is desired to be formed. In the case of the ring type magnetic head of the present embodiment, it is based on the finding that arranging the easy axis of magnetization in the direction orthogonal to the magnetic path increases the magnetic permeability of the metal magnetic film 5 in the high frequency band, and the direction orthogonal to the magnetic flux direction. A plurality of streaks 3 are formed at. The shape, the number, the pitch, etc., of the streaks 3 are not particularly limited, but preferably, the streaks 3 are formed by unevenness of several μm to several tens of μm such as grooves or ridges.
【００１２】以上のように構成される基板１のギャップ
対向面４およびコイル窓２に強磁性金属の薄膜５を膜付
けした一対のコア半体を図２に示すように対向させて低
融点ガラス７を用いたガラスボンディングなどで接合す
ることによって、金属薄膜５，５の間でトラック幅の磁
気ギャップｇを形成する磁気ヘッドを構成する。尚、基
板１のギャップ対向面２上にはセンダスト合金等の金属
磁性薄膜３の他、１ないし２以上の極めて薄い保護膜が
必要に応じて形成されている。符号６はギャップ材であ
る。As shown in FIG. 2, a pair of core halves each having a ferromagnetic metal thin film 5 formed on the gap facing surface 4 and the coil window 2 of the substrate 1 constructed as described above are opposed to each other as shown in FIG. A magnetic head for forming a magnetic gap g of the track width between the metal thin films 5 and 5 is formed by joining the metal thin films 5 and 5 by glass bonding or the like. On the gap facing surface 2 of the substrate 1, a metal magnetic thin film 3 of sendust alloy or the like, and an extremely thin protective film of 1 or 2 or more are formed as needed. Reference numeral 6 is a gap material.
【００１３】以上のように構成される磁気ヘッドは例え
ば次のようにして製造される。The magnetic head having the above structure is manufactured, for example, as follows.
【００１４】まず、各磁気コア半体の基板となるフェラ
イト基板１，１を用意し、これらのギャップ対向面にコ
イル窓２及び必要であればトラック幅を規制するための
トラック規制溝を研削によって構成する。そして、コイ
ル窓２部分に磁化容易軸を形成したい方向即ちギャップ
対向面４に形成される金属磁性膜５を流れる磁束Φに直
交する方向に複数本の筋３が形成される。この筋３は例
えば適当な荒さの砥石などで加工される。First, the ferrite substrates 1 and 1 to be the substrates of the magnetic core halves are prepared, and the coil window 2 and the track regulating groove for regulating the track width if necessary are ground on the gap facing surfaces by grinding. Constitute. Then, a plurality of streaks 3 are formed in the direction in which the easy axis of magnetization is desired to be formed in the coil window 2, that is, in the direction orthogonal to the magnetic flux Φ flowing through the metal magnetic film 5 formed on the gap facing surface 4. The streaks 3 are processed with, for example, a grindstone having an appropriate roughness.
【００１５】次に、これらフェライト基板１，１を洗浄
し、各ギャップ対向面４及びコイル窓２に必要に応じて
反応防止層を形成した後、スパッタリング等の薄膜形成
技術を用いて金属磁性薄膜５となるセンダスト合金等を
成膜する。このとき、センダスト等の磁性膜は誘導磁気
異方性により磁気容易軸が筋３に沿って誘導形成され
る。即ち、コイル窓２の表面を流れる磁束に対し直交す
る方向に磁化容易軸が形成される。Next, these ferrite substrates 1 and 1 are washed to form a reaction preventive layer on each gap facing surface 4 and coil window 2 as required, and then a metal magnetic thin film is formed by using a thin film forming technique such as sputtering. A Sendust alloy or the like which becomes 5 is formed into a film. At this time, the magnetic easy axis of the magnetic film such as sendust is induced along the muscle 3 by the induced magnetic anisotropy. That is, the easy axis of magnetization is formed in the direction orthogonal to the magnetic flux flowing on the surface of the coil window 2.
【００１６】その後、センダストの膜３の上から同様に
スパッタリングによってセンダスト側へのガラス成分の
拡散防止のための保護膜を必要に応じて形成した後、そ
の上にギャップ材６としてのＳｉＯ2 の膜などを所定厚
さで形成する。After that, a protective film for preventing the diffusion of the glass component toward the sendust side is formed on the sendust film 3 by sputtering in the same manner, if necessary, and SiO 2 as the gap material 6 is formed thereon. A film or the like is formed with a predetermined thickness.
【００１７】このようにして形成された一対の磁気コア
半体を突合せて例えば低融点ガラスで接合し、所定のト
ラック幅の磁気ギャップｇを形成した磁気ヘッドのブロ
ックを得る。尚、低融点ガラスは突合せられた磁気コア
半体のポールピース部の両側のトラック規制溝内あるい
はコイル窓２などに充填される。The pair of magnetic core halves thus formed are abutted and joined together with, for example, low melting point glass to obtain a magnetic head block in which a magnetic gap g having a predetermined track width is formed. The low melting point glass is filled in the track restricting grooves on both sides of the pole piece parts of the magnetic core halves butted together or in the coil window 2 or the like.
【００１８】その後、この磁気ヘッドのブロックに対し
て必要な研削やラップ仕上げが施されてから、スライス
されて多数の磁気ヘッドチップとして切り出される。Thereafter, the blocks of this magnetic head are subjected to necessary grinding and lapping, and then sliced to be cut out into a large number of magnetic head chips.
【００１９】尚、上述の実施例は本発明の好適な実施の
一例ではあるがこれに限定されるものではなく本発明の
要旨を逸脱しない範囲において種々変形実施可能であ
る。例えば、好ましくは従来公知のギャップ幅を狭くす
ること及びディプスを浅くすること等を併せて実施する
ことで更に高周波特性の向上を図り得る。また、本実施
例では両方の磁気コア半体にコイル窓２及び金属磁性薄
膜５がそれぞれ形成された複合磁気ヘッドについて説明
したが、本発明はこれに限定されるものではなく、例え
ば片方の磁気コア半体のみにコイル窓２及び金属磁性薄
膜５が形成された複合磁気ヘッドにも応用できることは
言うまでもない。この場合にはギャップ材の層を介在さ
せて突合せられる一方の磁気コア半体の金属磁性薄膜
と、これに対向する他方の磁気コア半体の酸化物磁性材
との間でギャップｇが構成される。It should be noted that the above-described embodiment is an example of the preferred embodiment of the present invention, but the present invention is not limited to this, and various modifications can be made without departing from the gist of the present invention. For example, it is possible to further improve the high-frequency characteristics by preferably performing the conventionally known narrowing of the gap width and the shallowing of the depth. Further, in the present embodiment, the composite magnetic head in which the coil window 2 and the metal magnetic thin film 5 are respectively formed on both magnetic core halves has been described, but the present invention is not limited to this, and one magnetic It goes without saying that the present invention can also be applied to a composite magnetic head in which the coil window 2 and the metal magnetic thin film 5 are formed only in the core half body. In this case, a gap g is formed between the metal magnetic thin film of one magnetic core half body that is abutted with the gap material layer interposed, and the oxide magnetic material of the other magnetic core half body that opposes this. It
【００２０】[0020]
【発明の効果】以上の説明より明らかなように、本発明
の磁気ヘッドは、コイル窓に磁路と直交する方向の筋を
複数形成し、その上に前記金属薄膜を形成するようにし
たので、誘導磁気異方性により金属磁性膜をスパッタリ
ングなどで成膜する際に磁化容易軸がコイル窓内の筋に
よって誘導形成される。As is apparent from the above description, in the magnetic head of the present invention, a plurality of lines in the direction perpendicular to the magnetic path are formed in the coil window, and the metal thin film is formed thereon. When the metal magnetic film is formed by sputtering due to the induced magnetic anisotropy, the easy axis of magnetization is induced and formed by the streaks in the coil window.
【００２１】したがって、本発明の磁気ヘッドは、金属
磁性材膜の磁気容易軸が当該金属磁性膜を流れる磁束と
直交する方向に形成され、高周波特性を向上させる。し
かも、この磁気ヘッドはコイル巻線窓に筋を複数形成す
るだけの簡単な構成で従来よりも高周波特性向上を達成
できる。Therefore, in the magnetic head of the present invention, the magnetic easy axis of the metal magnetic material film is formed in the direction perpendicular to the magnetic flux flowing through the metal magnetic film, and the high frequency characteristics are improved. Moreover, this magnetic head has a simple structure in which a plurality of stripes are formed in the coil winding window, and can improve the high-frequency characteristics more than ever before.
【図１】本発明の磁気ヘッドを構成する磁気コア半体の
一実施例を基板のみで示す斜視図である。FIG. 1 is a perspective view showing an embodiment of a magnetic core half body that constitutes a magnetic head of the present invention only with a substrate.
【図２】本発明の磁気ヘッドの一実施例を示す斜視図で
ある。FIG. 2 is a perspective view showing an embodiment of a magnetic head of the present invention.
１ 磁気コア半体を構成する基板 ２ コイル窓 ３ 筋 ５ 磁気コア半体を構成する強磁性金属の薄膜 ｇ 磁気ギャップ 1 substrate forming a magnetic core half 2 coil window 3 streak 5 ferromagnetic metal thin film forming a magnetic core half g magnetic gap
Claims (1)
属の薄膜を膜付けしたコア半体を対向させて前記金属薄
膜の間でギャップを形成すると共に、前記金属薄膜間に
コイル窓を形成し該コイル窓を利用して巻線をする磁気
ヘッドにおいて、前記コイル窓に磁路と直交する方向の
筋を複数形成し、その上に前記金属薄膜を形成したこと
を特徴とする磁気ヘッド。1. A core half having a thin film of a ferromagnetic metal film facing the gap facing surface of the track width is opposed to form a gap between the metal thin films and a coil window is formed between the metal thin films. A magnetic head for winding using a coil window, characterized in that a plurality of stripes in a direction orthogonal to a magnetic path are formed in the coil window, and the metal thin film is formed on the stripe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10383992A JPH05282619A (en) | 1992-03-31 | 1992-03-31 | Magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10383992A JPH05282619A (en) | 1992-03-31 | 1992-03-31 | Magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05282619A true JPH05282619A (en) | 1993-10-29 |
Family
ID=14364600
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10383992A Pending JPH05282619A (en) | 1992-03-31 | 1992-03-31 | Magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05282619A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11225428B2 (en) | 2017-09-13 | 2022-01-18 | Nippon Electric Glass Co., Ltd. | Glass article manufacturing method |
| US11462349B2 (en) * | 2017-04-21 | 2022-10-04 | Vacon Oy | Resonance damping element and power converter with the same |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01269211A (en) * | 1988-04-20 | 1989-10-26 | Hitachi Ltd | magnetic head |
| JP3124311B2 (en) * | 1991-04-26 | 2001-01-15 | 株式会社日本コンラックス | Information recording / reproducing device |
-
1992
- 1992-03-31 JP JP10383992A patent/JPH05282619A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01269211A (en) * | 1988-04-20 | 1989-10-26 | Hitachi Ltd | magnetic head |
| JP3124311B2 (en) * | 1991-04-26 | 2001-01-15 | 株式会社日本コンラックス | Information recording / reproducing device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11462349B2 (en) * | 2017-04-21 | 2022-10-04 | Vacon Oy | Resonance damping element and power converter with the same |
| US11225428B2 (en) | 2017-09-13 | 2022-01-18 | Nippon Electric Glass Co., Ltd. | Glass article manufacturing method |
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