JPH05281110A - Xy driving sample stage - Google Patents

Abstract

PURPOSE:To make thin and compact a sample stage movable in XY directions in an analyzing apparatus. CONSTITUTION:This XY moving sample stage is provided with a fixed plate 101 which has linear grooves formed on one plane in the uniform cross section at right angles to the longitudinal direction. Moreover, the sample stage is provided with a moving plate 102 and a cross guide rod 106 to be fitted with each groove 105 of the moving plate 102. The moving plate 102 is placed on the fixed plate 101 in a movable fashion in XY directions, with linear grooves 105 formed on a plane confronting the fixed plate 101 in a direction orthogonal to the grooves 105 of the fixed plate 101 and in the uniform cross section at right angles to the longitudinal direction.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an XY drive sample table which can move a sample used in an analyzer such as a fluorescent X-ray film thickness meter in XY directions.

[0002]

2. Description of the Related Art As a conventional sample stage capable of moving a sample in XY directions, there is one disclosed in Japanese Patent Laid-Open No. 3-129653. The perspective view is shown in FIG. On the upper surface of the rectangular flat plate-shaped fixing plate 101, 2 parallel to the X direction are formed.
A book groove 101a is formed. On the fixed plate 101, a rectangular flat plate-shaped X-direction moving plate 102 is placed.
A first guide rod 102 a that engages with the two grooves 101 a of the fixed plate 101 is provided on the bottom surface side of the X-direction moving plate 102. That is, the X-direction moving plate 102 is the fixed plate 10
The upper surface of 1 is movable in the X direction.

A second guide bar 102b is provided on the upper surface of one end of the X-direction moving plate 102 in the Y direction which is a direction perpendicular to the X direction. Further, on the upper surface of the other end of the X-direction moving plate 102, a guide groove 102c is provided in parallel with the second guide rod 102b. On the upper surface of the X-direction moving plate 102, a rectangular flat plate moving base 103 is placed. The end portion 103a of the moving base 103 of the rectangular flat plate has a guide groove 102c.
A guide metal fitting 103b that engages with the second guide rod is attached to the opposite end. The movable table 103 is movable in the Y direction on the upper surface of the X direction movable plate 102. That is, the movable table 103 is fixed to the fixed plate 10
With respect to 1, it is movable in the XY directions.

[0004]

In the conventional apparatus, the X-direction moving plate 102 that moves in the X direction with respect to the fixed plate 101 is used.
Is provided on the upper surface of the fixed plate 101, and further the X-direction moving plate 102
On the other hand, the moving table 103 that moves in the Y direction is moved to the X direction moving plate 1.
02 Since it was provided on the upper surface, the plate-like thing had three layers, and since it also had a slide mechanism between them,
It was thicker overall.

An object of the present invention is to reduce the thickness of the XY drive sample table K that can move the sample in the XY directions.

[0006]

In order to achieve the above object, the present invention provides a fixing plate in which a groove having a straight line shape and a uniform cross section at right angles to the longitudinal direction is provided on one plane. And is movably mounted on the fixed plate in the XY directions, and has a uniform linear cross section on the plane facing the fixed plate in the direction perpendicular to the groove of the fixed plate and at right angles to the longitudinal direction. An XY-driving sample stage is characterized by comprising a moving plate provided with various grooves, and a cross-shaped guide rod which engages with the fixed plate and each groove of the moving plate.

[0007]

A groove for moving the moving plate in the X direction is provided on the fixed plate, and a groove for moving the moving plate in the Y direction is provided on the lower face of the moving plate. Since the guide rods that engage with the groove are overlapped and intervene in a cross shape (cross shape), the overall thickness becomes thin. That is, the X-direction moving plate, which is called in the conventional example, becomes unnecessary.

[0008]

The present invention will be described with reference to the drawings. The component structure is shown in FIG. The fixing plate 101 has a rectangular plate shape, and a groove 105 that is linear and has a uniform cross-sectional shape perpendicular to the longitudinal direction is provided on the surface thereof. Also, X
Similarly, the movable plate 102 that can move in the Y direction also has a fixed plate 10.
A groove 105 that is linear and has a uniform cross-sectional shape perpendicular to the longitudinal direction is provided on the surface facing No. 1. The movable plate 102 is placed on the fixed plate 101 so that the grooves 105 are orthogonal to each other. The guide rods 106 that engage with the respective grooves 105 have a first guide rod 106a that engages with the groove 105 of the fixed plate 101 and a second guide rod 106b that engages with the groove 105 of the moving plate 102 in a cross shape. It has a structure in which they are superposed and joined at the crossed position with a pin 107. At the pin 107, the first and second guide rods 106a, 1
06b becomes one guide rod 106. The guide rod 106 is placed on the fixed plate 101 in accordance with the position of the groove 105, and the movable plate 102 is placed on the fixed plate 101 by aligning the groove of the movable plate 102 with the guide rod 106.

At least the movable plate 10 is provided on the fixed plate 101.
2 is a length that moves in the X direction, and a through hole 10 that is long in the X direction
7 is provided, and the moving plate 102 is provided with a through hole 107 that is long enough to move the moving plate 102 in the Y direction and is long in the Y direction. Further, when the fixed plate 101 and the movable plate 102 are superposed on each other at their neutral points, their through holes 107 are provided at positions intersecting with each other at their neutral points.

The assembly screw 110 is moved through the washer 108, the spring 109 and the washer 108 into the through hole 107, and the moving plate 1 is moved.
Insert from the 02 side, and from the back of the solid plate 101, assemble screws 11
A nut is incorporated into the 0 threaded portion through the washer 108. That is, in these, the movable plate 102 can move (slide) in the XY directions on the surface of the fixed plate 101 so as to be movable.
It is intended to be in close contact with.

A female screw 111 is cut on one end face of each of the first and second guide rods 106a and 106b in the longitudinal direction thereof. A female feed screw 112 is attached to each female screw 111. At the end of the fixed plate 101 and the end of the movable plate 102 on the side of the female screw 111, the feed screw fixing member 1 is provided.
13 is attached to the assembly screw 110. The feed screw fixing member 113 is provided with a U-shaped groove for receiving the head of the feed screw 112, and the feed screw 112 has ends of the first and second guide rods 106a and 106b and the feed screw. The spring 109 is inserted between the fixing member 113 and the fixing member 113. That is, this spring 109 is used for the first and second guide rods 1.
A force that constantly expands the space between the ends of 06a and 106b and the feed screw fixing member 113 is generated. The result after combining them is shown in FIG.

Therefore, when each feed screw 112 is rotated, the moving plate 102 can be freely moved in the XY directions. Further, since the guide rod 105 is only interposed between the fixed plate 101 and the movable plate 102, it can be made very thin as shown in FIG.

[0013]

In an analyzer such as a fluorescent X-ray film thickness meter,
An XY drive sample table that can move the sample in the XY directions can be made very thin and small.

[Brief description of drawings]

1 is an exploded view of the present invention

FIG. 2 is a perspective view of the device of the present invention.

FIG. 3 is a perspective view of a conventional device.

[Explanation of symbols]

 101 fixed plate 102 moving plate 106 guide bar

Claims (1)

[Claims] 1. A fixed plate having a linear groove provided on one plane and having a uniform cross-sectional shape perpendicular to the longitudinal direction, and a fixed plate movably mounted on the fixed plate in the XY directions. A movable plate which is placed on the plane facing the fixed plate and which is linear in a direction perpendicular to the groove of the fixed plate and has a uniform cross-sectional shape perpendicular to the longitudinal direction; An XY driven sample stage, characterized in that it comprises a guide rod that engages with each groove of the movable plate.