JPH05281072A - Pirani gauge - Google Patents
Pirani gaugeInfo
- Publication number
- JPH05281072A JPH05281072A JP7315991A JP7315991A JPH05281072A JP H05281072 A JPH05281072 A JP H05281072A JP 7315991 A JP7315991 A JP 7315991A JP 7315991 A JP7315991 A JP 7315991A JP H05281072 A JPH05281072 A JP H05281072A
- Authority
- JP
- Japan
- Prior art keywords
- filament
- terminal
- gauge
- vacuum
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 claims abstract description 9
- 230000000149 penetrating effect Effects 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 238000005259 measurement Methods 0.000 abstract description 5
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229910000833 kovar Inorganic materials 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、主として中真空領域の
圧力測定に広く使用されるピラニ真空計の、特にセンサ
部（測定子）に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a Pirani vacuum gauge, which is widely used mainly for pressure measurement in a medium vacuum region, and more particularly to a sensor section (measuring element).
【０００２】[0002]
【従来の技術】真空中に細い金属線からなるフィラメン
トを張り、それを加熱しておくと、該熱フィラメントに
気体が衝突した際、この気体に熱を奪われるので、圧力
の変化に対応して該熱フィラメントの熱損失量、従って
温度が変わるが、ピラニ真空計は、この熱損失量に相当
する温度変化を電気的に変換し、フィラメントの電気抵
抗の変化として検知し、これを更に圧力値に換算して圧
力を測定するものである。2. Description of the Related Art When a filament made of a thin metal wire is stretched in a vacuum and heated, the gas loses heat when the gas collides with the hot filament. The amount of heat loss of the hot filament, and thus the temperature, changes, but the Pirani vacuum gauge electrically converts the change in temperature corresponding to this amount of heat loss and detects it as a change in the electrical resistance of the filament. It is converted into a value and the pressure is measured.
【０００３】図２は、従来のピラニ真空計のセンサ部の
要部構成図である。図において、フィラメント１は、下
端を、図示しない真空フランジに銀ロー付される絶縁部
２を貫通して設けられた端子３と接続され、上端は、同
様に絶縁部２を貫通して設けられ、フィラメント支持体
（サポート）を兼ねた端子４と接続され、これらの両端
子３と４は、真空外部で計測回路とリード線６で接続さ
れている。なお、図中、７は内部を真空にしたセンサ本
体の壁面を示している。FIG. 2 is a schematic view of the main part of a sensor section of a conventional Pirani vacuum gauge. In the figure, the filament 1 is connected at its lower end to a terminal 3 provided through an insulating portion 2 attached to a vacuum flange (not shown) by silver brazing, and at the upper end thereof is similarly provided through the insulating portion 2. , A terminal 4 also serving as a filament support (support), and both terminals 3 and 4 are connected to a measuring circuit by a lead wire 6 outside the vacuum. In the figure, reference numeral 7 denotes a wall surface of the sensor body whose inside is evacuated.
【０００４】上記フィラメント１に電流を流して当該ピ
ラニ真空計を作動させるとき、フィラメント１の熱損失
は次式で与えられる。 ＫR （Ｔf 4 −Ｔw 4 ）＋ＫC Ｐ（Ｔf −Ｔw ）＋端損失 …（１） 但し、Ｔf ：フィラメントの温度 Ｔw ：フィラメント周囲の壁の温度 ＫR ：輻射係数 ＫC ：フィラメントの熱伝導係数 Ｐ ：気体の圧力 上記（１）式の第１項は、フィラメントから壁への輻射
による熱損失分である。第２項は、気体の熱伝導による
熱損失分であり、気体の圧力Ｐに比例することから、真
空計として使用できるわけである。またＫC は、フィラ
メントの温度、気体の分子量、フィラメントの表面積等
から決定される係数である。第３項の端損失は、フィラ
メントを保持している端子３、４や、計測回路５へ接続
されるリード線６等を伝わって逃げる熱損失分であり、
室温の変化や、センサ本体の温度変化によって変動す
る。When a current is applied to the filament 1 to operate the Pirani gauge, the heat loss of the filament 1 is given by the following equation. K R (T f 4 -T w 4) + K C P (T f -T w) + end loss ... (1) where, T f: temperature T w of the filament: Temperature K R of the filament around the wall: radiation coefficient K C : Thermal conductivity coefficient of filament P: Pressure of gas The first term of the above equation (1) is the heat loss due to radiation from the filament to the wall. The second term is the amount of heat loss due to the heat conduction of the gas, and is proportional to the pressure P of the gas, so it can be used as a vacuum gauge. K C is a coefficient determined from the temperature of the filament, the molecular weight of the gas, the surface area of the filament and the like. The end loss of the third term is a heat loss amount that escapes by being transmitted through the terminals 3 and 4 holding the filament, the lead wire 6 connected to the measurement circuit 5, and the like.
It fluctuates due to changes in room temperature and changes in the temperature of the sensor body.
【０００５】[0005]
【発明が解決しようとする課題】従来のピラニ真空計の
センサ部は、上記したように、フィラメント１に電流を
流すための端子３、４が、絶縁部４を貫通し、計測回路
５へリード線６で接続されており、更に一方の端子４
は、フィラメント１の支持体（サポート）としても用い
られているため、該端子４を極端に細くし熱伝導を小さ
くするという手段を用いることができないため、上式
（１）式第３項の端損失によるフィラメントの熱損失が
大きいという問題点があった。As described above, in the sensor section of the conventional Pirani vacuum gauge, the terminals 3 and 4 for supplying a current to the filament 1 penetrate the insulating section 4 and lead to the measuring circuit 5. Connected by wire 6, and one terminal 4
Is also used as a support (support) for the filament 1, and means for making the terminal 4 extremely thin to reduce heat conduction cannot be used. Therefore, in the third term of the above formula (1), There is a problem that the heat loss of the filament due to the end loss is large.
【０００６】更に従来のフィラメント１は、１本の直線
又はコイル状に巻かれた１本の線からなっていたので、
該フィラメント１が接続される端子３、４の中の１本４
は、導入端子からフィラメント１の長さ以上の長さを持
たせる必要があった。Further, since the conventional filament 1 is composed of one straight line or one wire wound in a coil,
One of the terminals 3, 4 to which the filament 1 is connected 4
Had to be longer than the length of the filament 1 from the introduction terminal.
【０００７】また、上記（１）式の端損失によるフィラ
メントの熱損失は、室温やセンサ本体の温度変化により
変動するため、ピラニ真空計の指示する圧力値の精度を
悪くする要因となるという問題点があった。Further, since the heat loss of the filament due to the end loss of the above equation (1) varies depending on the room temperature and the temperature change of the sensor body, it becomes a factor that deteriorates the accuracy of the pressure value indicated by the Pirani gauge. There was a point.
【０００８】更にまた、上記端損失による影響を相対的
に少なくするためにはフィラメント１の長さを或る程度
（１０ｃｍ位）長くする必要があり、またフィラメント
を接続する端子３、４の２本のうち１本４も長くなるた
め、外力による震動を受けると該端子４の振動も大きく
なり、フィラメント１が切れ易くなる等の問題点もあっ
た。Furthermore, in order to relatively reduce the influence of the above end loss, it is necessary to lengthen the filament 1 to a certain extent (about 10 cm), and to connect the filaments to the terminals 3, 4 of 2. Since one of the books 4 is also long, there is a problem in that the vibration of the terminal 4 is increased when a vibration due to an external force is applied, and the filament 1 is easily broken.
【０００９】本発明は、上記した従来例のもつ問題点を
解決し、端損失による熱損失が少なく、且つフィラメン
トが切れにくい構造でしかも感度が高く、低い圧力まで
安定して測定が可能なピラニ真空計を提供することを目
的としている。The present invention solves the above-mentioned problems of the prior art, has a structure in which the heat loss due to end loss is small, the filament is not easily broken, the sensitivity is high, and stable measurement is possible even at a low pressure. The purpose is to provide a vacuum gauge.
【００１０】[0010]
【課題を解決するための手段】上記の目的を達成するた
めに、本発明は、ピラニ真空計の熱フィラメントの両端
を、真空導入端子の絶縁部に貫通することなく埋設され
た端子と接続し、該端子を、該端子の近傍に設けられ上
記絶縁部を貫通する端子と、熱伝導量の小さい極く細い
電導体で接続したことを特徴とし、第２番目の発明は、
上記熱フィラメントを、中間部で支持された逆Ｖ字形に
張って形成し、該熱フィラメントの両端を上記第１番目
の発明のように接続したことを特徴としている。In order to achieve the above object, the present invention connects both ends of a hot filament of a Pirani gauge with a terminal embedded without penetrating the insulation part of a vacuum lead-in terminal. The second invention is characterized in that the terminal is connected to a terminal provided in the vicinity of the terminal and penetrating the insulating portion by an extremely thin electric conductor having a small amount of heat conduction.
The hot filament is stretched in an inverted V shape supported by an intermediate portion, and both ends of the hot filament are connected as in the first aspect of the invention.
【００１１】[0011]
【作用】本発明は上記のように、フィラメントの両端と
接続される支持体を兼ねた端子と、真空外部の電気回路
と接続される絶縁部を貫通する端子とを、熱伝導量の小
さい細い電導体で接続しているため、上記絶縁部を貫通
する端子を通して真空外部に放熱される端損失の量が、
極端に小さくなり、更にまた、室温やセンサ本体の温度
変化が、フィラメントに直接接続されサポートを兼ねて
いる端子に伝わりにくくなるため、端損失によるフィラ
メントの熱損失量の変動も小さくなる。As described above, according to the present invention, the terminal also serving as a support connected to both ends of the filament and the terminal penetrating the insulating portion connected to the electric circuit outside the vacuum are thin and have a small amount of heat conduction. Since it is connected by a conductor, the amount of end loss radiated to the outside of the vacuum through the terminal penetrating the insulating part is
Further, it becomes extremely small, and furthermore, changes in room temperature and temperature of the sensor body are less likely to be transmitted to the terminal which is directly connected to the filament and also functions as a support.
【００１２】また、上記熱フィラメントを逆Ｖ字形に張
って形成されているので、該フィラメントの全長が長く
なって、前記（１）式の第２項の真空計としての感度が
大きくなり、そのため、端損失の変動が圧力値に及ぼす
影響を（相対的に）小さくすることができ、且つ該フィ
ラメントが長くなっても、中間部で支持される支持体を
短くできるので、振動により該フィラメントが切れる恐
れも少なくなる。Further, since the above-mentioned hot filament is stretched in an inverted V shape, the total length of the filament becomes long, and the sensitivity of the vacuum gauge of the second term of the above formula (1) becomes large. , The influence of the fluctuation of the end loss on the pressure value can be made small (relatively), and even if the filament becomes long, the support body supported at the intermediate portion can be made short, so that the filament causes vibration. There is less risk of breaking.
【００１３】[0013]
【実施例】次に、本発明の実施例を図面と共に説明す
る。図１は、本発明の一実施例を示すピラニ真空計セン
サ部の要部構成図である。図において、１１は直径２５
μの白金からなるフィラメントであって、逆Ｖ字形に張
られ、中央部を直径１ｍｍのコバール棒からなるフィラ
メント支持体１２で支持され、両端部は、真空導入端子
（真空室へ導入する端子）のアルミナからなる絶縁部１
３に貫通することなく埋設され支持体を兼ねた２個の端
子（上記支持体１２と同様に直径１ｍｍのコバール棒か
らなる。）１４、１４にスポット溶接して接続されて保
持されている。Embodiments of the present invention will now be described with reference to the drawings. FIG. 1 is a configuration diagram of a main part of a Pirani vacuum gauge sensor unit showing an embodiment of the present invention. In the figure, 11 is a diameter 25
It is a filament made of μ platinum and is stretched in an inverted V shape, and its central portion is supported by a filament support 12 made of a Kovar rod having a diameter of 1 mm, and both ends are vacuum introduction terminals (terminals introduced into a vacuum chamber). Insulation part 1 made of alumina
It is held by being connected by spot welding to two terminals (made of a Kovar rod having a diameter of 1 mm like the support 12) which are embedded without penetrating 3 and also serve as a support.
【００１４】上記両端子１４は、その近傍に設けられ且
つ上記絶縁部１３を貫通する端子１５に、熱伝導が小さ
くなるような直径０．１ｍｍのタンタル（Ｔａ）線から
なる非常に細い電導体１６を介して接続され、これら両
端子１５、１５は、リード線１７を介して、外部の電気
回路１８に接続されている。上記絶縁部１３は、センサ
の胴体（ボディ）となる真空フランジと、支持体１２及
び両端子１４、１５と同様に、銀ロー付されている。な
お、図中、１９は内部を真空にされたセンサ本体の壁面
を示している。Both the terminals 14 are very thin conductors made of tantalum (Ta) wire having a diameter of 0.1 mm so as to reduce heat conduction to the terminals 15 provided in the vicinity thereof and penetrating the insulating portion 13. These terminals 15 and 15 are connected via a lead wire 17 to an external electric circuit 18. The insulating portion 13 is brazed with silver, as is the case with the vacuum flange which is the body of the sensor, the support 12 and the terminals 14 and 15. In the figure, 19 indicates the wall surface of the sensor body whose inside is evacuated.
【００１５】次に、作用について説明すると、当該ピラ
ニ真空計センサでは、フィラメント１１を支持している
端子１４と、真空外部のリード線１７と接続される端子
１５とを、直径０．１ｍｍ程度の非常に細い金属線１６
で接続しているため、端子１５を通して真空外部に放熱
される端損失の量が、極端に小さくなる。また、室温や
センサ本体の温度変化が、フィラメント１１を支持して
いる端子１４に伝わりにくくなるため、前記（１）式第
３項の端損失によるフィラメント１１の熱損失量の変動
も小さくなる。Next, the operation will be described. In the Pirani vacuum gauge sensor, the terminal 14 supporting the filament 11 and the terminal 15 connected to the lead wire 17 outside the vacuum have a diameter of about 0.1 mm. Very thin metal wire 16
Therefore, the amount of end loss radiated to the outside of the vacuum through the terminal 15 is extremely small. Further, changes in the room temperature and the temperature of the sensor body are less likely to be transmitted to the terminal 14 supporting the filament 11, so that the fluctuation of the heat loss amount of the filament 11 due to the end loss in the third term of the equation (1) becomes small.
【００１６】更に、フィラメント１１を逆Ｖ字形に張る
ことによって全長が長くなり、前記（１）式第２項の真
空計としての感度が大きくなるため、端損失の変動が圧
力値に及ぼす影響を相対的に小さくすることができるば
かりでなく、該フィラメント１１が長くなっても、中間
部を支持している支持体１２が短くできるので、振動に
よってフィラメント１１が切れる恐れも少なくなる。Further, by stretching the filament 11 in an inverted V shape, the total length becomes longer, and the sensitivity of the vacuum gauge of the second term of the formula (1) becomes large, so that the influence of the fluctuation of the end loss on the pressure value is affected. Not only can the size be made relatively small, but even if the filament 11 becomes long, the support 12 supporting the intermediate portion can be made short, so that there is less risk that the filament 11 will break due to vibration.
【００１７】なお、上記した実施例において、フィラメ
ント１１に直径２５μの白金線を用いた構造について説
明したが、フィラメント１１の温度変化が該フィラメン
ト線の抵抗変化として検出できるものであれば何んでも
よい。また、両端子１４、１５を接続する電導体１６を
構成する直径０．１ｍｍのタンタル線も、端子１５と比
較して熱伝導が小さいものであれば何んでもよい。ま
た、フィラメントの支持体１２及び支持体を兼ねる端子
１４に０．１ｍｍコバール棒を用いた構造について説明
したが、フィラメント接触部とアルミナ絶縁部１３との
間に、ガラス等の熱伝導率が小さい材質のものを中継さ
せることにより、更に端損失の影響を小さくすることが
できる。また、絶縁部１３を構成するアルミナは、各電
極間を絶縁し、真空シール材となるものであれば、材
質、形状を問わないことは勿論である。In the above embodiment, the structure using the platinum wire having the diameter of 25 μ as the filament 11 has been described, but any temperature change of the filament 11 can be detected as a resistance change of the filament wire. Good. Further, the tantalum wire having a diameter of 0.1 mm forming the electric conductor 16 connecting the terminals 14 and 15 may be any one as long as it has a smaller heat conduction than the terminal 15. Further, the structure in which the 0.1 mm Kovar rod is used for the filament support 12 and the terminal 14 also serving as the support has been described, but the thermal conductivity of glass or the like is small between the filament contact portion and the alumina insulating portion 13. By relaying the material, the effect of end loss can be further reduced. Further, it goes without saying that the alumina constituting the insulating portion 13 may be of any material and shape as long as it insulates the electrodes from each other and serves as a vacuum sealing material.
【００１８】[0018]
【発明の効果】以上説明したように、本発明によれば、
ピラニ真空計の熱フィラメントの支持を兼ねた端子と、
真空外部のリード線と接続される端子とを、熱伝導量の
小さい電導体で接続したことにより、上記外部と接続さ
れる端子を通して真空外部に放熱される端損失によるフ
ィラメントの熱損失を小さくすることができ、また、室
温やセンサ本体の温度変化による影響を受けにくくなる
ので、真空計としての精度が向上し、従来１０-3Ｔｏｒ
ｒ台とされていた測定下限値を引き延ばし、安定した測
定をすることが可能となる。As described above, according to the present invention,
A terminal that also functions as a support for the hot filament of the Pirani vacuum gauge,
The terminal connected to the lead wire outside the vacuum is connected by an electric conductor with a small amount of heat conduction, so that the heat loss of the filament due to the end loss radiated to the outside of the vacuum through the terminal connected to the outside is reduced. In addition, since it is less affected by the room temperature and the temperature change of the sensor body, the accuracy of the vacuum gauge is improved, and the conventional 10 -3 Torr
It is possible to extend the lower limit of measurement, which has been set to r units, and perform stable measurement.
【００１９】また、熱フィラメントを、中間部で支持さ
れた逆Ｖ字形に張り、真空導入端子の根本で端子と接続
したことにより、該フィラメントの全長が長くなって真
空計としての感度が大きくなるため、端損失の変動が圧
力値に及ぼす影響を小さくでき、また、中間部を支持す
る支持体が短くて済むので、振動によりフィラメントが
切れる恐れが少なく、且つセンサの大きさをコンパクト
にすることができる。Further, by arranging the hot filament in an inverted V shape supported by the intermediate portion and connecting it to the terminal at the base of the vacuum introduction terminal, the total length of the filament is increased and the sensitivity as a vacuum gauge is increased. Therefore, the influence of fluctuations in end loss on the pressure value can be reduced, and since the support that supports the intermediate part can be short, there is little risk of the filament breaking due to vibration, and the size of the sensor should be compact. You can
【図１】本発明の一実施例を示すピラニ真空計のセンサ
部の要部構成図である。FIG. 1 is a main part configuration diagram of a sensor unit of a Pirani vacuum gauge showing an embodiment of the present invention.
【図２】従来例を示すピラニ真空計のセンサ部の要部構
成図である。FIG. 2 is a main part configuration diagram of a sensor unit of a Pirani vacuum gauge showing a conventional example.
１１ フィラメント １２ フィラメント支持体 １３ 絶縁部 １４、１５ 端子 １６ 熱伝導量の小さい電導体 １７ リード線 １８ 電気回路 11 Filament 12 Filament support 13 Insulating part 14, 15 Terminal 16 Electrical conductor with small heat conduction amount 17 Lead wire 18 Electric circuit
Claims (2)
ンサ本体の内部に設け、該熱フィラメント周囲の気体に
よる熱伝導により生じるフィラメントの熱損失量の変化
から気体の圧力を測定するようにしたピラニ真空計のセ
ンサ部において、上記フィラメントの両端部を、真空導
入端子の絶縁部に貫通することなく埋設された端子と接
続し、該端子を、該端子の近傍に設けられ上記絶縁部を
貫通する端子と、熱伝導量を小さくした電導体で接続し
たことを特徴とするピラニ真空計。1. A Pirani vacuum in which a heat filament made of a thin metal wire is provided inside a sensor body, and the pressure of the gas is measured from a change in the amount of heat loss of the filament caused by heat conduction by gas around the heat filament. In the sensor part of the meter, both ends of the filament are connected to a terminal embedded without penetrating the insulating part of the vacuum introduction terminal, and the terminal is provided in the vicinity of the terminal and penetrates the insulating part. And a Pirani vacuum gauge, characterized in that they are connected by an electric conductor having a small amount of heat conduction.
ンサ本体の内部に設け、該熱フィラメント周囲の気体に
よる熱伝導により生じるフィラメントの熱損失量の変化
から気体の圧力を測定するようにしたピラニ真空計のセ
ンサ部において、上記フィラメントを、中間部で支持さ
れた逆Ｖ字形に張り、両端部を真空導入端子の絶縁部に
貫通することなく埋設された端子と接続し、該端子を、
該端子の近傍に設けられ上記絶縁部を貫通する端子と、
熱伝導量を小さくした電導体で接続したことを特徴とす
るピラニ真空計。2. A Pirani vacuum in which a hot filament made of a thin metal wire is provided inside a sensor body, and the pressure of the gas is measured from the change in the amount of heat loss of the filament caused by heat conduction by the gas around the hot filament. In the sensor part of the meter, the filament is stretched in an inverted V shape supported by an intermediate part, both ends are connected to a terminal embedded without penetrating the insulating part of the vacuum introduction terminal, and the terminal is connected to
A terminal provided in the vicinity of the terminal and penetrating the insulating portion,
A Pirani vacuum gauge, characterized in that it is connected by an electric conductor with a small amount of heat conduction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3073159A JP3045559B2 (en) | 1991-04-05 | 1991-04-05 | Pirani vacuum gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3073159A JP3045559B2 (en) | 1991-04-05 | 1991-04-05 | Pirani vacuum gauge |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05281072A true JPH05281072A (en) | 1993-10-29 |
| JP3045559B2 JP3045559B2 (en) | 2000-05-29 |
Family
ID=13510116
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3073159A Expired - Fee Related JP3045559B2 (en) | 1991-04-05 | 1991-04-05 | Pirani vacuum gauge |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3045559B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101255564B1 (en) * | 2004-11-24 | 2013-04-17 | 가부시키가이샤 아루박 | Pirani gauge |
| CN107894300A (en) * | 2017-12-29 | 2018-04-10 | 李涛 | A kind of vacuum degree measuring equipment |
-
1991
- 1991-04-05 JP JP3073159A patent/JP3045559B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101255564B1 (en) * | 2004-11-24 | 2013-04-17 | 가부시키가이샤 아루박 | Pirani gauge |
| CN107894300A (en) * | 2017-12-29 | 2018-04-10 | 李涛 | A kind of vacuum degree measuring equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3045559B2 (en) | 2000-05-29 |
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