JPH05272952A - X-ray television radioscopy apparatus - Google Patents

Abstract

PURPOSE:To prevent errors in judgment and perform secure inspection by overlapping an image containing a display corresponding to a predetermined part of an X-ray radioscopic image on the above part. CONSTITUTION:A personal computer 25 sends a position signal to a manipulator control part 20 and positions a subject on a predetermined position. An X-ray radioscopic image of the subject is projected on an image tube projection surface, and the image is input through a television camera 13 and an image intensifier 15 to a superimpose board 26. The personal computer 25 reads data of an inspected portion on the inspected part, creates an image where a mark is displayed on the corresponding position and outputs it to the board 26. The board 26 embeds the image data into an image signal of the X-ray radioscopic image from the intensifier 15 and creates an image signal where a second image is overlapped on the radioscopic image. This signal is sent to a monitor 16 and displayed as an overlapped image. Thus an inexperienced person can perform secure inspection free from errors.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray television see-through device used for inspecting the inside of industrial products and the like.

[0002]

2. Description of the Related Art An X-ray television see-through device is useful for nondestructive inspection of defects such as cavities in an aluminum die cast and defective wire bonding in an IC package. X
The line television see-through device may be placed in the manufacturing process line for 100% inspection, or may be used for off-line sampling inspection, but in any case,
The inspection target is always the same, or the type is limited. Therefore, in the X-ray television fluoroscopic apparatus, an X-ray fluoroscopic image of a certain portion of the object to be inspected is displayed on the monitor screen by the TV camera, and the inspector appears on the screen according to a predetermined inspection standard while looking at this screen. The inspection method is to judge the quality of one or more inspection points.

[0003]

In the above-mentioned conventional inspection method, even if there is a manual of a predetermined inspection standard, each portion is inspected by the memory of the inspector at the actual inspection stage. When there are many inspection points on the screen, the inspection points may be overlooked. Further, in the case of an inspection in which a complicated determination such as a permissible range of the size of the nest is different for each inspection site, rather than a simple determination of contact or the like, a determination error may occur.

The present invention has been made to solve such a problem, and its object is to perform an inspection based on an image displayed on the screen.
An object of the present invention is to provide an X-ray television see-through device capable of performing a reliable inspection without mistakes.

[0005]

In order to solve the above-mentioned problems, the present invention provides an X-ray television fluoroscopic apparatus for displaying an X-ray fluoroscopic image of a fluoroscopic object on the screen of a monitor device, comprising: a) A television camera that captures an X-ray image that has passed through an object and outputs a video signal of a fluoroscopic X-ray image, and b) a predetermined portion in the screen that includes a display corresponding to the fluoroscopic X-ray image. Second image output means for outputting an image signal, and c) an image signal of an image in which the image output by the second image output means is superimposed on the fluoroscopic X-ray image output by the television camera, is output to the monitor device. And an image superimposing means.

[0006]

When the transparent part of the transparent object is predetermined, the position of each part of the transparent object is constant in the transparent X-ray image taken by the television camera. Therefore, the second image output means creates an image (second image) having a display corresponding to the fluoroscopic X-ray image in a predetermined portion, based on given information regarding the position of each portion. The second image can be, for example, a pointer that points to a predetermined portion of the fluoroscopic object, a mask that covers a portion other than the predetermined portion, a message related to the fluoroscopic X-ray image, or the like. The image superimposing means creates an image in which the second image is superimposed on the X-ray fluoroscopic image based on the signals from the television camera and the second image outputting means, and outputs the video signal to the monitor device.
As a result, on the monitor screen, the information related to the fluoroscopic X-ray image is appropriately displayed in the related portion, so that the fluoroscopic X-ray image becomes easier to understand.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 4 shows the overall construction of an X-ray fluoroscopic inspection system embodying the present invention. In this embodiment, the external appearance is a normal X.
Although a personal computer (personal computer) is connected to the line television see-through device, a superimpose board is incorporated inside the personal computer as described later. First, the structure and operation of a normal X-ray television see-through device will be briefly described. The X-rays emitted from the X-ray tube 10 pass through the object 11 to be inspected, and then the image tube 1
A perspective image of the test object 11 is projected on the projection surface of 2. This fluoroscopic image is taken by the television camera 13, and the video signal is sent to the image enhancing device 15 in the console section 14 of the X-ray television fluoroscopic device. In the image enhancement device 15, the fluoroscopic image is subjected to image processing such as noise removal processing and contour enhancement processing, and then the video signal is sent to the monitor (CRT) 16. As a result, a perspective image of the inspection object 11 is displayed on the screen of the monitor 16.

The console section 14 is provided with an X-ray operating section 17, and an inspector sets an optimum X-ray condition in accordance with the type of the object 11 to be inspected by the X-ray operating section 17, and the X-ray apparatus is operated. The tube voltage, tube current, etc. of the X-ray tube 10 are controlled via the control section 19 of the section 18. Further, the console unit 14 is also provided with a manipulator operation unit 20, and the inspector uses the manipulator operation unit 20 to move the stage 21 on which the object 11 is placed up, down, left and right, front and back, rotated, and swung. By moving in each degree of freedom, it is possible to project a perspective image of an arbitrary portion of the test object 11 on the screen of the monitor 16 in an arbitrary size. The above is the configuration and operation of the part of the normal X-ray television see-through device.

This embodiment is based on this X-ray television apparatus.
The X-ray fluoroscopic inspection system is configured by adding the personal computer 25 as the second image output means and the superimpose board 26 which is one of the peripheral devices of the personal computer 25 as the image superimposing means. FIG. 1 shows the configuration of the main part of the present fluoroscopy system. In this embodiment, the superimpose board 26 is connected to the personal computer 25 by inserting it into the expansion slot of the personal computer 25, enters the control of the personal computer 25, and receives the superimposing image signal from the personal computer 25. The video signal input terminal of the superimpose board 26 is connected to the output terminal of the image enhancing device 15 of the console section 14, and the superimposed video signal output terminal is connected to the monitor 16. The image enhancement device 15
The video signal from the TV camera 13 may be directly connected to the superimpose board 26 without passing through. Manipulator operation unit 20 of personal computer 25 and console unit 14
And are connected by a serial or parallel signal line.

A list (not shown) of the personal computer 25 (internal or external) stores a list for each type of the object 11 to be inspected, and data regarding an inspection site of each object 11 to be inspected. In addition, as will be described later, it is possible to store message data or the like that needs to be notified to the inspector during the inspection.

A procedure for inspecting an IC package, for example, and a process performed by the personal computer 25 by the X-ray fluoroscopic inspection apparatus of the present embodiment having such a configuration will be described with reference to the flowchart of FIG. Before starting the inspection, the inspector first inputs a number for identifying the type of the inspection object 11 from the keyboard of the personal computer 25 (step S1). This number may be input using the keyboard provided in the manipulator operation unit 20 and transferred to the personal computer side.

A personal computer 25 which has received the number of the type of object to be inspected
The CPU reads the data regarding the inspection location of the object from the internal or external storage device (step S2).
This completes the preparation for fluoroscopic X-ray examination of this type of object. After that, the inspector puts one inspection object 11 on a predetermined stage of the X-ray device unit 18, closes the door of the X-ray device unit 18, and then presses the inspection start button (step S3). When receiving the inspection start signal, the CPU of the personal computer 25 determines, based on the inspection region data read in step S2,
A position signal is sent to the manipulator operation unit 20 so that the test object 11 is placed at a predetermined position. As a result, an X-ray fluoroscopic image of a predetermined portion of the test object 11 is projected on the projection surface of the image tube 12 in a predetermined size, and the image thereof is connected to the television camera 13 and the image enhancing apparatus 1 by the connection.
It is input to the superimpose board 26 through 5.

On the other hand, the CPU of the personal computer 25 reads out the data of the inspection site in the inspection site from the internal or external storage device and internally creates an image (second image) in which a mark is displayed at the position corresponding to the inspection site. And store it in the graphic memory. The data of the second image in the graphic memory is output to the superimpose board 26. The superimpose board 26 is a personal computer 2.
The image data of the second image from No. 5 is embedded in the video signal (NTSC signal) of the X-ray fluoroscopic image from the image enhancement device 15, and the video signal of the image in which the second image is superimposed on the X-ray fluoroscopic image ( NTSC signal). This video signal is sent to the monitor 16 and a superimposed image is displayed on the screen.

For example, when inspecting the connection state of the lead wires in the IC package, a pointer for indicating the inspection location is displayed on the second image corresponding to the lead wire connection location to be inspected. When this second image is superimposed and displayed on the X-ray fluoroscopic image by the superimposing board 26, the image shown in FIG.
As shown in (a), the predetermined inspection location is the monitor 1.
The pointer 30 can be clearly designated on the six screens (step S4). As a result, even an inexperienced inspector can surely perform the inspection without missing the portion to be inspected.

When the inspector checks the location pointed by the pointer 30 and determines whether the location is good or bad, the inspector judges "good" on the manipulator operation section 20 of the console section 14 or the keyboard of the personal computer 25. Or the "defective" button is pressed (step S5). This determination signal is stored in the storage device of the personal computer 25 to be used as basic data for later statistical quality control (step S6). When the inspection of one location is completed in this way, the personal computer 25 determines whether or not the inspection of all the inspection locations of the object 11 has been completed (step S7), and if not completed, the pointer is displayed. 30 is moved to the next inspection location (FIG. 2B), and the process returns to step S4 to repeat the above process. If necessary, the stage 21 is moved so that the inspection point is within the screen, and the coordinates of the position where the pointer should be displayed are also converted accordingly.

If the inspection of all inspection points of the object 11 is completed in step S7, the process proceeds to step S8 to check whether or not all the inspection objects of this type have been inspected. It is determined (step S8). If the object 11 to be inspected still remains, the process returns to step S3 and waits for the inspector to set the object 11 on the stage 21 of the X-ray device section 18. The above is the procedure of the inspection by this system.

When the inspection points are constant, the personal computer 25 does not need to control the manipulator operation unit 20, and the personal computer side may always output a constant screen as the second screen to the superimpose board 26. .. Further, as the second image output to the superimpose board 26, as shown in FIG. 2C, a portion other than the inspection portion 31 may be masked. As a result, the inspector can concentrate more on checking the inspection location, and the inspection efficiency is improved. Furthermore, FIG.
As shown in (d), a message 32 (for example, more detailed inspection item or precaution at the inspection location) necessary for the inspection may be displayed on the second screen.

[0018]

In the X-ray television fluoroscopy device according to the present invention, by changing the image (second image) created by the second image output means variously, a predetermined portion of the fluoroscopy X-ray image is pointed by a pointer. You can use it in various ways, such as giving instructions, masking parts other than the necessary parts, and displaying a reference message. Therefore, when it is used in an inspection system for industrial products, for example, even an unskilled person can quickly perform a reliable and error-free inspection.

[Brief description of drawings]

FIG. 1 is a configuration diagram of a control portion of an X-ray fluoroscopic inspection system that is an embodiment of the present invention.

FIG. 2 is a front view showing an example of display on a monitor screen.

FIG. 3 is a flowchart showing an inspection procedure by the X-ray fluoroscopic inspection system according to the embodiment.

FIG. 4 is a system configuration diagram of an X-ray fluoroscopic inspection system according to an embodiment.

[Explanation of symbols]

10 ... X-ray tube 11 ... Inspected object 13 ... TV camera 15 ... Image enhancement device 16 ... Monitor 25 ... PC 26 ... Superimpose board

Claims (1)

[Claims] 1. An X-ray television fluoroscopy device for displaying an X-ray fluoroscopic image of a fluoroscopic object on a screen of a monitor device, comprising: a) capturing an X-ray image transmitted through the object, A television camera for outputting a video signal; b) a second image output means for outputting a signal of an image including a display corresponding to the fluoroscopic X-ray image at a predetermined portion in the screen; and c) a television camera. Image superimposing means for outputting a video signal of an image obtained by superimposing the image output by the second image output means on the fluoroscopic X-ray image output by the monitor device, to the X-ray television fluoroscopic device. ..