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JPH05231804A - Method and instrument for measuring circularity - Google Patents

Method and instrument for measuring circularity

Info

Publication number
JPH05231804A
JPH05231804A JP3638292A JP3638292A JPH05231804A JP H05231804 A JPH05231804 A JP H05231804A JP 3638292 A JP3638292 A JP 3638292A JP 3638292 A JP3638292 A JP 3638292A JP H05231804 A JPH05231804 A JP H05231804A
Authority
JP
Japan
Prior art keywords
opening hole
measuring
contact
inner circumference
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3638292A
Other languages
Japanese (ja)
Inventor
Minoru Numamoto
実 沼本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
Original Assignee
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Priority to JP3638292A priority Critical patent/JPH05231804A/en
Publication of JPH05231804A publication Critical patent/JPH05231804A/en
Pending legal-status Critical Current

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  • A Measuring Device Byusing Mechanical Method (AREA)

Abstract

PURPOSE:To shorten the measuring time of the instrument by improving the measuring efficiency of the instrument and, at the same time, to further improve the measurement accuracy of the instrument. CONSTITUTION:A measuring section 48A which can be brought into contact with the inner periphery of an opened hole 50A is provided on the outer periphery of a probe 48 and, at the same time, another measuring section 48B which can be brought into contact with the inner periphery of a jet 50B is provided at the front end of the probe 48. Then the distance between the contact point of the sections 48A and that of the section 48B is set smaller than the distance L2 between the inner periphery of the hole 50a and that of the jet 50B. Accordingly, when the section 48A is moved toward the jet 50B while the section 48A is brought into contact with the inner periphery of the hole 50A, the section 48B is brought into contact with the inner periphery of the jet 50B and the section 49A is separated from the inner periphery of the hole 50A. Therefore, the section 48B can measure the axis of the jet 50B continuously from the axis of the hole 50A.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は真円度測定方法及び装
置に係り、特に被測定物に同軸上に形成された各々の開
口孔の同軸度を求める真円度測定方法及び装置に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a roundness measuring method and apparatus, and more particularly to a roundness measuring method and apparatus for determining the coaxiality of each opening formed coaxially in an object to be measured.

【0002】[0002]

【従来の技術】図5には自動車等に使用されている燃料
噴射ノズルが示されていて、燃料噴射ノズル10の噴射
口12は噴霧状の燃料をエンジン(図示せず。)に供給
するために微小径に設定されている。この噴射口12は
筒状に形成された燃料噴射ノズル10の先端部に、筒状
部の開口孔14と同軸上に形成する必要がある。
2. Description of the Related Art FIG. 5 shows a fuel injection nozzle used in an automobile or the like. An injection port 12 of the fuel injection nozzle 10 supplies atomized fuel to an engine (not shown). Is set to a small diameter. The injection port 12 needs to be formed at the tip of the cylindrical fuel injection nozzle 10 coaxially with the opening hole 14 of the cylindrical portion.

【0003】そして、生産された製品の噴射口12と開
口孔14とが同軸上に形成されているか否かを検査する
ために真円度測定機が使用されている。
A roundness measuring machine is used to inspect whether the injection port 12 and the opening hole 14 of the produced product are coaxially formed.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、燃料噴
射ノズル10の噴射口12は微小径で形成されていて、
さらに開口孔14の先端部に位置しているので、開口孔
14のA側から見ると噴射口12が見えない。従って、
真円度測定機の測定子で開口孔14の軸心を測定した
後、開口孔14側から測定子を噴射口12の内周にセッ
トすることができないので、噴射口12の軸心を測定す
る場合には燃料噴射ノズル10の上下を逆転させて噴射
口12を上方に位置決めする必要がある。
However, the injection port 12 of the fuel injection nozzle 10 is formed with a small diameter,
Further, since it is located at the tip of the opening hole 14, the injection port 12 cannot be seen when viewed from the side A of the opening hole 14. Therefore,
After measuring the axis of the opening hole 14 with the probe of the roundness measuring machine, the probe cannot be set on the inner circumference of the injection port 12 from the side of the opening hole 14, so the axis of the injection port 12 is measured. In this case, it is necessary to turn the fuel injection nozzle 10 upside down and position the injection port 12 upward.

【0005】このため、先ず噴射口12を下方に位置決
めした状態で燃料噴射ノズル10を測定位置に固定して
開口孔14の軸心を測定し、次に燃料噴射ノズル10の
外周の軸心を測定する。次いで、燃料噴射ノズル10の
上下を逆転させて噴射口12を上方に位置決めした状態
で燃料噴射ノズル10を測定位置に固定して噴射口12
の軸心を測定し、さらに燃料噴射ノズル10の外周の軸
心を測定する。
Therefore, first, the fuel injection nozzle 10 is fixed at the measurement position with the injection port 12 positioned downward, and the axial center of the opening hole 14 is measured, and then the axial center of the outer periphery of the fuel injection nozzle 10 is measured. taking measurement. Next, the fuel injection nozzle 10 is fixed at the measurement position while the fuel injection nozzle 10 is turned upside down and the injection port 12 is positioned above.
Of the fuel injection nozzle 10 is further measured.

【0006】そして、噴射口12を下方に位置決めした
時、及び噴射口12を上方に位置決めした時のそれぞれ
の燃料噴射ノズル10の外周の軸心を媒体として、開口
孔14と噴射口12の同心度を求める。従って、燃料噴
射ノズル10を上下を逆転させた状態で2回測定位置に
セットする必要があり、さらに、それぞれの状態で2回
燃料噴射ノズル10の外周の軸心を測定する必要がある
ので、測定効率が悪く、かつ、測定誤差が発生し易いと
いう問題がある。
Then, when the injection port 12 is positioned downward and when the injection port 12 is positioned upward, the axial center of the outer circumference of each fuel injection nozzle 10 is used as a medium, and the concentricity of the opening hole 14 and the injection port 12 is concentric. Ask for degrees. Therefore, it is necessary to set the fuel injection nozzle 10 to the measurement position twice with the top and bottom reversed, and further it is necessary to measure the axial center of the outer periphery of the fuel injection nozzle 10 twice in each state. There is a problem that the measurement efficiency is poor and a measurement error is likely to occur.

【0007】本発明はこのような事情に鑑みてなされた
もので、測定効率の向上を図ることにより測定時間の短
縮化を図ることができ、さらに測定精度の向上を図るこ
とができる真円度測定方法及び装置を提供することを目
的とする。
The present invention has been made in view of the above circumstances, and a roundness that can shorten the measurement time by improving the measurement efficiency and further improve the measurement accuracy. It is an object of the present invention to provide a measuring method and device.

【0008】[0008]

【課題を解決するための手段】本発明は、前記目的を達
成する為に、被測定物に同軸上に形成された第1開口孔
と、該第1開口孔の底部に形成されて第1開口孔より小
径の第2開口孔との同心度を求める測定子を備えた真円
度測定装置において、前記第1開口孔の内周に接触可能
な第1測定部を前記測定子の外周に設けると共に前記測
定子の先端に前記第2開口孔の内周に接触可能な第2測
定部を設け、前記第1測定部の接触点と第2測定部の接
触点間の距離を前記第1開口孔の内周と第2開口孔の内
周間の距離より小さく設定し、前記第1測定部を第1開
口孔の内周に接触した状態で前記第2開口孔の方向に移
動させて、前記第2測定部を第2開口孔の内周に接触さ
せると共に前記第1測定部を前記第1開口孔の内周から
離すことを特徴とする。
In order to achieve the above object, the present invention provides a first opening hole coaxially formed in an object to be measured, and a first opening hole formed at the bottom of the first opening hole. In a roundness measuring device provided with a measuring element for determining a concentricity with a second opening having a diameter smaller than that of the opening, a first measuring part capable of contacting the inner circumference of the first opening is provided on the outer circumference of the measuring tip. A second measuring unit that is provided and is in contact with the inner circumference of the second opening hole is provided at the tip of the probe, and the distance between the contact point of the first measuring unit and the contact point of the second measuring unit is set to the first measuring unit. The distance is set smaller than the distance between the inner circumference of the opening hole and the inner circumference of the second opening hole, and the first measuring unit is moved toward the second opening hole while being in contact with the inner circumference of the first opening hole. A second measuring portion is brought into contact with the inner circumference of the second opening hole, and the first measuring portion is separated from the inner circumference of the first opening hole. That.

【0009】[0009]

【作用】本発明によれば、第1開口孔の内周に接触可能
な第1測定部を測定子の外周に設けると共に測定子の先
端に第2開口孔の内周に接触可能な第2測定部を設け
た。そして、第1測定部の接触点と第2測定部の接触点
間の距離を第1開口孔の内周と第2開口孔の内周間の距
離より小さく設定した。従って、第1測定部を第1開口
孔の内周に接触した状態で第2開口孔の方向に移動させ
ると、第2測定部が第2開口孔の内周に接触すると共に
第1測定部が第1開口孔の内周から離れる。
According to the present invention, the first measuring portion which can contact the inner circumference of the first opening hole is provided on the outer circumference of the measuring element, and the tip of the measuring element can contact the inner circumference of the second opening hole. A measuring unit was provided. Then, the distance between the contact point of the first measurement section and the contact point of the second measurement section was set smaller than the distance between the inner circumference of the first opening hole and the inner circumference of the second opening hole. Therefore, when the first measuring unit is moved in the direction of the second opening hole while being in contact with the inner circumference of the first opening hole, the second measuring unit is in contact with the inner circumference of the second opening hole and the first measuring unit is also in contact. Separate from the inner circumference of the first opening hole.

【0010】これにより、第2測定部は第1開口孔の軸
心に連続させて第2開口孔の軸心を測定することができ
る。
Thus, the second measuring section can measure the axial center of the second opening hole while continuing the axial center of the first opening hole.

【0011】[0011]

【実施例】以下添付図面に従って本発明に係る真円度測
定方法及び装置について詳説する。図1には本発明に係
る真円度測定装置の側面図が示されている。真円度測定
装置30の本体32にはテーブル34が回動自在に設け
られていて、テーブル34は図示しないモータの駆動で
回動する。また、テーブル34にはX軸ツマミ36とY
軸ツマミ38とが設けられていて、テーブル34はX軸
ツマミ36を操作するとX軸方向に移動し、Y軸ツマミ
38を操作するとY軸方向に移動する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A roundness measuring method and apparatus according to the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 shows a side view of a roundness measuring device according to the present invention. A table 34 is rotatably provided on the main body 32 of the roundness measuring device 30, and the table 34 is rotated by driving a motor (not shown). The table 34 has an X-axis knob 36 and a Y-axis.
A shaft knob 38 is provided, and the table 34 moves in the X-axis direction when the X-axis knob 36 is operated, and moves in the Y-axis direction when the Y-axis knob 38 is operated.

【0012】さらに、テーブル34にはコラム40が立
設されていて、コラム40にはコラム40に沿って上下
方向に移動可能な上下台42が支持されている。上下台
42にはアーム44が支持されていて、アーム44には
検出器46を介して測定子48が設けられている。そし
て、測定子48をテーブル34に載置されたワーク50
に接触させた状態でテーブル34を回動して軸心等を測
定する。
Further, a column 40 is erected on the table 34, and an up-and-down table 42 which is vertically movable along the column 40 is supported on the column 40. An arm 44 is supported on the upper and lower pedestals 42, and a probe 48 is provided on the arm 44 via a detector 46. Then, the work piece 50 in which the tracing stylus 48 is placed on the table 34
The table 34 is rotated in a state of being in contact with, and the shaft center and the like are measured.

【0013】図2には本発明に係る真円度測定装置の要
部拡大図が示されている。同図に示すように検出器46
に取り付けられている測定子48の先端部外周には測定
部48Aが固定されていて、測定子48の先端部にはシ
ャフト48Bを介して測定部48Cが固定されている。
そして、図4に示すように測定部48Aの先端部から測
定部48Cの右端部までの距離L1は、燃料噴射ノズル
50に形成されている開口孔50Aの内周から噴射口5
0Bの内周までの距離L2より僅かに小さく設定されて
いる。
FIG. 2 shows an enlarged view of the main part of the roundness measuring device according to the present invention. As shown in FIG.
A measuring portion 48A is fixed to the outer circumference of the tip of the measuring element 48 attached to the measuring element 48, and a measuring portion 48C is fixed to the tip of the measuring element 48 via a shaft 48B.
As shown in FIG. 4, the distance L1 from the tip of the measurement unit 48A to the right end of the measurement unit 48C is from the inner periphery of the opening hole 50A formed in the fuel injection nozzle 50 to the injection port 5.
It is set to be slightly smaller than the distance L2 to the inner circumference of 0B.

【0014】従って、図3に示すように測定部48Aを
燃料噴射ノズル50の開口孔50Aの内周に接触させた
状態で測定子48を開口孔50Aの内周に沿って下方向
に移動させると、測定部48Cが噴射口50B内に案内
される。次いで、測定部48Cが噴射口50B内に案内
された状態から測定子48をさらに下方向に移動する
と、測定部48Cが噴射口50Bの内周に接触する。こ
の場合、測定部48Aの先端部から測定部48Cの右端
部までの距離L1は、燃料噴射ノズル50に形成されて
いる開口孔50Aの内周から噴射口50Bの内周までの
距離L2より僅かに小さく設定されているので、測定子
48が僅かに撓んで測定部48Aと開口孔50Aの内周
との接触が解除される(図4参照)。
Therefore, as shown in FIG. 3, the probe 48 is moved downward along the inner circumference of the opening hole 50A while the measuring portion 48A is in contact with the inner circumference of the opening hole 50A of the fuel injection nozzle 50. Then, the measuring unit 48C is guided into the ejection port 50B. Then, when the tracing stylus 48 is moved further downward from the state where the measuring unit 48C is guided inside the ejection port 50B, the measuring unit 48C comes into contact with the inner circumference of the ejection port 50B. In this case, the distance L1 from the tip of the measurement unit 48A to the right end of the measurement unit 48C is smaller than the distance L2 from the inner circumference of the opening hole 50A formed in the fuel injection nozzle 50 to the inner circumference of the injection port 50B. Since it is set to be small, the contact point 48 is slightly bent, and the contact between the measuring portion 48A and the inner circumference of the opening hole 50A is released (see FIG. 4).

【0015】このように構成された本発明に係る真円度
測定装置の作用について説明する。先ず、燃料噴射ノズ
ル50を噴射口50Bを下方向に配置すると共に開口孔
50Aを垂直状態でテーブル34上に保持する。この状
態で測定子48を開口孔50A内に嵌入して、測定部4
8Aを開口孔50Aの内周に接触させる。次に、テーブ
ル34を回動して開口孔50Aの軸心を測定する。
The operation of the roundness measuring device according to the present invention thus constructed will be described. First, the fuel injection nozzle 50 is arranged with the injection port 50B downward, and the opening hole 50A is held on the table 34 in a vertical state. In this state, the tracing stylus 48 is fitted in the opening hole 50A, and the measuring unit 4
8A is brought into contact with the inner circumference of the opening hole 50A. Next, the table 34 is rotated to measure the axis of the opening hole 50A.

【0016】次いで、測定部48Aを開口孔50Aの内
周に接触させた状態で、測定部48Aを下方に移動する
と、測定部48Cが噴射口50B内に案内される(図3
参照)。さらに、測定子48を下方向に移動すると、測
定部48Cが噴射口50Bの内周に接触して、測定部4
8Aと開口孔50Aの内周との接触が解除される(図4
参照)。この状態でテーブル34を回動して噴射口50
Bの軸心を測定する。
Next, when the measuring section 48A is moved downward with the measuring section 48A in contact with the inner periphery of the opening hole 50A, the measuring section 48C is guided into the injection port 50B (FIG. 3).
reference). Further, when the tracing stylus 48 is moved downward, the measuring portion 48C comes into contact with the inner circumference of the injection port 50B, and the measuring portion 4C
The contact between 8A and the inner periphery of the opening hole 50A is released (FIG. 4).
reference). In this state, the table 34 is rotated to rotate the injection port 50.
Measure the B axis.

【0017】そして、開口孔50Aの軸心と噴射口50
Bの軸心から開口孔50Aと噴射口50Bの同心度を求
める。このように、測定子48の先端部外周に測定部4
8Aを固定すると共に測定子48の先端部に測定部48
Cを固定することにより、燃料噴射ノズル50を噴射口
50Bをガイドとして利用することができる。従って、
噴射口50Bの底部に形成されていて見えにくい噴射口
50B内に測定部48Cを挿入することができるので、
燃料噴射ノズル50を反転して噴射口50Bを上方に位
置決めする必要がなくなった。
The axis of the opening 50A and the injection port 50
The concentricity of the opening hole 50A and the injection port 50B is determined from the axis of B. In this way, the measuring unit 4 is attached to the outer circumference of the tip of the probe 48.
8A is fixed and the measuring unit 48 is attached to the tip of the probe 48.
By fixing C, the fuel injection nozzle 50 can be used as the injection port 50B as a guide. Therefore,
Since the measuring portion 48C can be inserted into the ejection port 50B which is formed at the bottom of the ejection port 50B and is difficult to see,
It is no longer necessary to reverse the fuel injection nozzle 50 and position the injection port 50B upward.

【0018】前記実施例では燃料噴射ノズル50の開口
孔50Aと噴射口50Bの同心度を求める場合について
説明したが、これに限らず、比較的大きな径の開口孔の
奥に微小径の孔が形成されている他の被測定物にも適用
することができる。
In the above embodiment, the case where the concentricity between the opening hole 50A of the fuel injection nozzle 50 and the injection port 50B is obtained has been described. It can also be applied to other formed DUTs.

【0019】[0019]

【発明の効果】以上説明したように本発明に係る真円度
測定方法及び装置によれば、第1測定部を第1開口孔の
内周に接触した状態で第2開口孔の方向に移動させる
と、第2測定部が第2開口孔の内周に接触すると共に第
1測定部が第1開口孔の内周から離れる。これにより、
第2測定部は第1開口孔の軸心に連続させて第2開口孔
の軸心を測定することができる。
As described above, according to the roundness measuring method and apparatus according to the present invention, the first measuring portion is moved in the direction of the second opening hole while being in contact with the inner circumference of the first opening hole. Then, the second measuring portion contacts the inner circumference of the second opening hole, and the first measuring portion moves away from the inner circumference of the first opening hole. This allows
The second measuring section can be continuous with the axis of the first opening to measure the axis of the second opening.

【0020】従って、測定効率の向上を図ることによ
り、測定時間の短縮を図ることができ、さらに測定精度
の向上を図ることができる。
Therefore, by improving the measurement efficiency, the measurement time can be shortened and the measurement accuracy can be further improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る真円度測定装置の側面図FIG. 1 is a side view of a roundness measuring device according to the present invention.

【図2】本発明に係る真円度測定装置の要部拡大図FIG. 2 is an enlarged view of a main part of the roundness measuring device according to the present invention.

【図3】本発明に係る真円度測定装置の測定子で燃料噴
射ノズルの開口孔を測定している状態を説明する図
FIG. 3 is a diagram for explaining a state in which a probe of a roundness measuring device according to the present invention measures an opening hole of a fuel injection nozzle.

【図4】本発明に係る真円度測定装置の測定子で燃料噴
射ノズルの噴射口を測定している状態を説明する断面図
FIG. 4 is a cross-sectional view illustrating a state in which a probe of a roundness measuring device according to the present invention measures an injection port of a fuel injection nozzle.

【図5】本発明に係る真円度測定装置で測定される燃料
噴射ノズルの断面図
FIG. 5 is a sectional view of a fuel injection nozzle measured by a roundness measuring device according to the present invention.

【符号の説明】[Explanation of symbols]

30…真円度測定装置 48…測定子 48A、48B…測定部 50…燃料噴射ノズル 50A…開口孔 50B…噴射口 L1…測定部48A、48Bの距離 L2…開口孔と噴射口とのそれぞれの内周間の距離 30 ... Roundness measuring device 48 ... Measuring element 48A, 48B ... Measuring part 50 ... Fuel injection nozzle 50A ... Opening hole 50B ... Injection port L1 ... Distance between measuring parts 48A and 48B L2 ... Respectively of opening hole and injection port Distance between inner circumference

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 被測定物に同軸上に形成された第1開口
孔と、該第1開口孔の底部に形成されて第1開口孔より
小径の第2開口孔との同心度を求める測定子を備えた真
円度測定方法において、 前記測定子の外周に設けられた第1測定部を、前記第1
開口孔の内周に接触して第1開口孔の軸心を測定し、 前記第1先端部を前記第1開口孔の内周に接触した状態
で前記第2開口孔の方向に移動させて、前記測定子の先
端に設けられた第2測定部を第2開口孔の内周に接触さ
せると共に前記第1測定部を前記第1開口孔の内周から
離し、 前記第2測定部で第2開口孔の軸心を測定し、 前記第1開口孔及び第2開口孔のそれぞれの軸心から前
記第1開口孔と第2開口孔の同心度を求めることを特徴
とする方法。
1. A measurement for obtaining a concentricity between a first opening hole coaxially formed in an object to be measured and a second opening hole formed at a bottom portion of the first opening hole and having a diameter smaller than that of the first opening hole. In the roundness measuring method with a probe, the first measuring unit provided on the outer circumference of the probe is provided with the first measuring unit.
The axial center of the first opening hole is measured by contacting the inner circumference of the opening hole, and the first tip portion is moved in the direction of the second opening hole while being in contact with the inner circumference of the first opening hole. A second measuring part provided at the tip of the probe is brought into contact with the inner circumference of the second opening hole, and the first measuring part is separated from the inner circumference of the first opening hole; A method of measuring the axial center of the two opening holes and determining the concentricity of the first opening hole and the second opening hole from the respective axial centers of the first opening hole and the second opening hole.
【請求項2】 被測定物に同軸上に形成された第1開口
孔と、該第1開口孔の底部に形成されて第1開口孔より
小径の第2開口孔との同心度を求める測定子を備えた真
円度測定装置において、 前記第1開口孔の内周に接触可能な第1測定部を前記測
定子の外周に設けると共に前記測定子の先端に前記第2
開口孔の内周に接触可能な第2測定部を設け、 前記第1測定部の接触点と第2測定部の接触点間の距離
を前記第1開口孔の内周と第2開口孔の内周間の距離よ
り小さく設定し、 前記第1測定部を第1開口孔の内周に接触した状態で前
記第2開口孔の方向に移動させて、前記第2測定部を第
2開口孔の内周に接触させると共に前記第1測定部を前
記第1開口孔の内周から離すことを特徴とする真円度測
定装置。
2. A measurement for determining the concentricity between a first opening hole formed coaxially on the object to be measured and a second opening hole formed at the bottom of the first opening hole and having a diameter smaller than that of the first opening hole. In a roundness measuring device including a probe, a first measuring unit capable of contacting an inner circumference of the first opening hole is provided on an outer circumference of the probe and the second measuring unit is provided at a tip of the probe.
A second measuring unit that can contact the inner circumference of the opening hole is provided, and the distance between the contact point of the first measuring unit and the contact point of the second measuring unit is set to the inner circumference of the first opening hole and the second opening hole. The distance between the inner circumferences is set to be smaller, and the first measuring portion is moved toward the second opening hole while being in contact with the inner circumference of the first opening hole to move the second measuring portion to the second opening hole. Circularity measuring device, wherein the first measuring portion is separated from the inner periphery of the first opening hole while being in contact with the inner periphery of the.
JP3638292A 1992-02-24 1992-02-24 Method and instrument for measuring circularity Pending JPH05231804A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3638292A JPH05231804A (en) 1992-02-24 1992-02-24 Method and instrument for measuring circularity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3638292A JPH05231804A (en) 1992-02-24 1992-02-24 Method and instrument for measuring circularity

Publications (1)

Publication Number Publication Date
JPH05231804A true JPH05231804A (en) 1993-09-07

Family

ID=12468300

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3638292A Pending JPH05231804A (en) 1992-02-24 1992-02-24 Method and instrument for measuring circularity

Country Status (1)

Country Link
JP (1) JPH05231804A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008241450A (en) * 2007-03-27 2008-10-09 Showa Denko Kk Method and device for inspecting opening diameter of disk-like substrate having circular opening part in central part

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008241450A (en) * 2007-03-27 2008-10-09 Showa Denko Kk Method and device for inspecting opening diameter of disk-like substrate having circular opening part in central part

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