JPH05222551A - Manufacture of coated cermet cutting tool - Google Patents
Manufacture of coated cermet cutting toolInfo
- Publication number
- JPH05222551A JPH05222551A JP5668492A JP5668492A JPH05222551A JP H05222551 A JPH05222551 A JP H05222551A JP 5668492 A JP5668492 A JP 5668492A JP 5668492 A JP5668492 A JP 5668492A JP H05222551 A JPH05222551 A JP H05222551A
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- layer
- cutting tool
- carbonitrides
- lower layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005520 cutting process Methods 0.000 title claims abstract description 40
- 239000011195 cermet Substances 0.000 title claims abstract description 34
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 10
- 239000010410 layer Substances 0.000 claims abstract description 65
- 238000000034 method Methods 0.000 claims abstract description 39
- 238000005240 physical vapour deposition Methods 0.000 claims abstract description 26
- 239000000463 material Substances 0.000 claims abstract description 24
- 238000005229 chemical vapour deposition Methods 0.000 claims abstract description 20
- 239000002356 single layer Substances 0.000 claims abstract description 11
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 claims abstract description 8
- 150000004767 nitrides Chemical class 0.000 claims abstract description 8
- 150000001247 metal acetylides Chemical class 0.000 claims abstract description 6
- 239000010936 titanium Substances 0.000 claims abstract description 6
- 229910052735 hafnium Inorganic materials 0.000 claims abstract description 5
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 5
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 3
- 239000011247 coating layer Substances 0.000 claims description 25
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 239000011230 binding agent Substances 0.000 claims description 6
- 229910002090 carbon oxide Inorganic materials 0.000 claims description 4
- -1 carbonitrides Chemical class 0.000 claims description 4
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical class [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 3
- 150000004649 carbonic acid derivatives Chemical class 0.000 claims 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical group [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 2
- 230000006866 deterioration Effects 0.000 abstract description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 15
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 7
- 230000007423 decrease Effects 0.000 description 5
- 229910010037 TiAlN Inorganic materials 0.000 description 4
- 230000002159 abnormal effect Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- GSJBKPNSLRKRNR-UHFFFAOYSA-N $l^{2}-stannanylidenetin Chemical compound [Sn].[Sn] GSJBKPNSLRKRNR-UHFFFAOYSA-N 0.000 description 2
- 229910010060 TiBN Inorganic materials 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000010730 cutting oil Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 102200082816 rs34868397 Human genes 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 1
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- 229910003863 HfBN Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910007950 ZrBN Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
(57)【要約】
【目的】 耐欠損性の低下を抑えながら耐摩耗性を大幅
に向上させ、超高速切削にも適した被覆サーメット切削
工具の製造方法を提供する。
【構成】 サーメット母材上に物理的蒸着法によりＴ
ｉ、Ｚｒ、Ｈｆの炭化物、窒化物、炭窒化物など、及び
酸化アルミニウム、窒化チタンアルミニウム、酸窒化チ
タンアルミニウムから選ばれた単層又は複層で膜厚が
０.３μｍ以上の下層を形成し、該下層の上に化学的蒸
着法により設けたＴｉ、Ｚｒ、Ｈｆの炭化物、窒化物、
炭窒化物、ホウ窒化物など、及び酸化アルミニウムから
選ばれた単層又は複層で膜厚が０.５μｍ以上の上層を
形成し、且つ下層と上層の合計膜厚を１５μｍ以下とす
る被覆サーメット切削工具の製造方法。(57) [Abstract] [Purpose] To provide a method for manufacturing a coated cermet cutting tool which is capable of significantly improving wear resistance while suppressing deterioration of fracture resistance and is also suitable for ultra-high speed cutting. [Constitution] T was formed on the cermet base material by physical vapor deposition.
i, Zr, Hf carbides, nitrides, carbonitrides, etc., and a single layer or multiple layers selected from aluminum oxide, titanium aluminum nitride, titanium aluminum oxynitride to form a lower layer having a thickness of 0.3 μm or more. A Ti, Zr or Hf carbide or nitride provided on the lower layer by a chemical vapor deposition method,
A coated cermet in which a single layer or multiple layers selected from carbonitride, boronitride, etc., and aluminum oxide forms an upper layer having a thickness of 0.5 μm or more, and the total thickness of the lower layer and the upper layer is 15 μm or less. Manufacturing method of cutting tool.
Description
【０００１】[0001]
【産業上の利用分野】本発明は、サーメットの母材上に
硬質セラミックスからなる硬質被覆層を備えた被覆サー
メット切削工具の製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a coated cermet cutting tool having a hard coating layer made of hard ceramics on a base material of a cermet.
【０００２】[0002]
【従来の技術】サーメットは、Ｔｉを主とする周期律表
の４Ａ、５Ａ、６Ａ族金属の炭化物、窒化物、炭窒化
物、酸化物などを硬質相とし、これら硬質相を結合する
ための結合相としてＦｅ、Ｃｏ、Ｎｉ、Ｃｒ、Ｍｏ、
Ｗ、Ｔｉ、Ａｉなどの金属を少なくとも１種含むセラミ
ックスと金属の複合焼結体であり、主に切削工具として
鋼や鋳鉄等の仕上げ加工に使用されている。2. Description of the Related Art Cermet has a hard phase composed of carbides, nitrides, carbonitrides, oxides, etc. of 4A, 5A, and 6A metals in the periodic table mainly containing Ti, and is used to bond these hard phases. Fe, Co, Ni, Cr, Mo as a binder phase,
It is a composite sintered body of ceramics and metal containing at least one kind of metal such as W, Ti and Ai, and is mainly used as a cutting tool for finishing of steel, cast iron and the like.
【０００３】近年、切削加工の分野では、高能率化を図
るために切削速度を従来よりも大幅に引き上げる動きが
あり、切削速度５００ｍ／ｍｉｎ以上の高速切削にも耐
える切削工具が望まれている。これに伴い、切削中にお
ける切削工具の刃先温度は益々高くなる傾向にあるが、
サーメット切削工具においては耐熱強度の不足から、上
記のような高速切削領域では刃先が熱により変形した
り、逃げ面摩耗が促進されるため、工具の寿命が著しく
低下して使用に耐えない。In recent years, in the field of cutting, there has been a movement to significantly increase the cutting speed as compared with the conventional one in order to achieve high efficiency, and a cutting tool which can endure high-speed cutting at a cutting speed of 500 m / min or more is desired. .. Along with this, the cutting edge temperature of the cutting tool during cutting tends to become higher and higher,
Since the cermet cutting tool lacks heat resistance strength, the cutting edge is deformed by heat and flank wear is accelerated in the above high-speed cutting region, so that the life of the tool is remarkably reduced and it cannot be used.
【０００４】この様な状況下でサーメット切削工具の耐
欠損性や耐摩耗性を改善するため、例えば特開平２−４
９７２号公報等に記載されるごとく、切削工具のサーメ
ット母材の表面に、イオンスパッタリング法等の物理的
蒸着法又はＣＶＤ法等の化学的蒸着法のいずれかによ
り、ＴｉＣ、ＴｉＮ、ＴｉＣＮのような硬質セラミック
スの単層又は複層からなる被覆層を形成することが提案
されている。しかしながら、これらの物理的蒸着法又は
化学的蒸着法のいずれかで形成した硬質被覆層を有する
被覆サーメット切削工具においても、前記のような超高
速切削領域ではなお十分な耐摩耗性が得られていない現
状である。Under these circumstances, in order to improve the fracture resistance and wear resistance of the cermet cutting tool, for example, Japanese Patent Laid-Open No. 2-4
As described in Japanese Patent Publication No. 972 etc., TiC, TiN, TiCN, etc. can be formed on the surface of a cermet base material of a cutting tool by a physical vapor deposition method such as an ion sputtering method or a chemical vapor deposition method such as a CVD method. It has been proposed to form a coating layer consisting of a single layer or multiple layers of different hard ceramics. However, even in a coated cermet cutting tool having a hard coating layer formed by any of these physical vapor deposition methods or chemical vapor deposition methods, sufficient wear resistance is still obtained in the ultra-high speed cutting region as described above. There is no current situation.
【０００５】即ち、化学的蒸着法では約１０００℃とい
う高温で硬質被覆層を成膜することから、成膜中に母材
のサーメットから結合相の構成成分であるＦｅ、Ｃｏ、
Ｎｉなどが被覆層内に拡散し、その結果被覆層の硬度が
低下し、また成長核の生成時に異常成長が発生して、十
分な耐摩耗性が得られない。一方、物理的蒸着法では約
５００〜６００℃という比較的低温で成膜できるので、
サーメットの結合相成分が被覆層に拡散することはな
く、従って被覆層の硬度低下や異常成長は見られない
が、物理的蒸着法で形成した硬質被覆層はサーメット母
材との密着強度が不十分なため、十分な耐摩耗性が得ら
れない。That is, in the chemical vapor deposition method, since the hard coating layer is formed at a high temperature of about 1000 ° C., Fe, Co, which are constituents of the binder phase, from the cermet of the base material, during the film formation.
Ni or the like diffuses into the coating layer, and as a result, the hardness of the coating layer decreases, and abnormal growth occurs when the growth nuclei are generated, so that sufficient wear resistance cannot be obtained. On the other hand, since the physical vapor deposition method can form a film at a relatively low temperature of about 500 to 600 ° C.,
The binder phase component of cermet does not diffuse into the coating layer, and therefore the hardness of the coating layer does not decrease and abnormal growth does not occur, but the hard coating layer formed by physical vapor deposition has a poor adhesion strength with the cermet base material. Since it is sufficient, sufficient abrasion resistance cannot be obtained.
【０００６】[0006]
【発明が解決しようとする課題】本発明はかかる従来の
事情に鑑み、サーメットの母材に適切な硬質被覆層を形
成し、耐欠損性の低下を最小限に抑えつつ、耐摩耗性を
従来よりも大幅に向上させることにより、超高速の切削
加工領域にも十分使用できる、被覆サーメット切削工具
の製造方法を提供することを目的とする。In view of the above conventional circumstances, the present invention forms a suitable hard coating layer on the base material of the cermet to minimize the deterioration of the fracture resistance and at the same time, to improve the wear resistance of the prior art. It is an object of the present invention to provide a method for producing a coated cermet cutting tool, which can be sufficiently used even in an ultrahigh-speed cutting region by making a great improvement.
【０００７】[0007]
【課題を解決するための手段】上記目的を達成するた
め、本発明によるサーメットからなる母材の表面上に硬
質被覆層を有する被覆サーメット切削工具の製造方法に
おいては；物理的蒸着法により母材の表面に直接Ｔｉ、
Ｚｒ、Ｈｆの炭化物、窒化物、炭窒化物、炭酸化物、炭
酸窒化物、及び酸化アルミニウム、窒化チタンアルミニ
ウム、酸窒化チタンアルミニウムの少なくとも１種から
選ばれた単層又は複層からなる膜厚が０.３μｍ以上の
下層を形成し、該下層の上に化学的蒸着法によりＴｉ、
Ｚｒ、Ｈｆの炭化物、窒化物、炭窒化物、炭酸化物、炭
酸窒化物、ホウ窒化物、ホウ炭窒化物、及び酸化アルミ
ニウムの少なくとも１種から選ばれた単層又は複層から
なる膜厚が０.５μｍ以上の上層を形成し、且つ下層と
上層の合計膜厚を１５μｍ以下とすることを特徴とす
る。In order to achieve the above object, in a method for producing a coated cermet cutting tool having a hard coating layer on the surface of a base material made of cermet according to the present invention, the base material is prepared by a physical vapor deposition method. Ti directly on the surface of
Zr, Hf carbide, nitride, carbonitride, carbon oxide, carbonitride, and a film thickness of a single layer or multiple layers selected from at least one of aluminum oxide, titanium aluminum nitride, titanium aluminum oxynitride A lower layer having a thickness of 0.3 μm or more is formed, and Ti on the lower layer is formed by a chemical vapor deposition method.
A film thickness of a single layer or multiple layers selected from at least one of Zr and Hf carbides, nitrides, carbonitrides, carbon oxides, carbonitrides, boronitrides, borocarbonitrides, and aluminum oxides. It is characterized in that an upper layer of 0.5 μm or more is formed and the total film thickness of the lower layer and the upper layer is 15 μm or less.
【０００８】[0008]
【作用】本発明者らは、硬質被覆層の形成方法である物
理的蒸着法と化学的蒸着法のそれぞれの欠点を改善する
ため、硬質被覆層を下層と上層とに分けた各層を、物理
的蒸着法と化学的蒸着法を組み合わせてそれぞれ形成す
ることを種々検討した。その結果、下層を物理的蒸着法
で形成すればサーメットの結合相を構成する金属成分が
硬質被覆層中に拡散することを防止でき、しかも下層の
上に化学的蒸着法で上層を形成することにより、先に物
理的蒸着法で形成した下層が上層形成中に約１０００℃
に加熱される結果、当該下層と母材との密着強度が物理
的蒸着法による単独の被覆層に比較して改善向上するこ
とが判明した。In order to improve the respective drawbacks of the physical vapor deposition method and the chemical vapor deposition method, which are the methods for forming the hard coating layer, the present inventors have made the hard coating layer into a lower layer and an upper layer, and Various studies were conducted on the formation of each by combining the chemical vapor deposition method and the chemical vapor deposition method. As a result, if the lower layer is formed by a physical vapor deposition method, it is possible to prevent the metal components constituting the binder phase of the cermet from diffusing into the hard coating layer, and further form the upper layer by a chemical vapor deposition method on the lower layer. As a result, the lower layer previously formed by the physical vapor deposition method was heated to about 1000 ° C during the formation of the upper layer.
It was found that as a result of the heating, the adhesion strength between the lower layer and the base material is improved and improved as compared with a single coating layer formed by physical vapor deposition.
【０００９】従って、本発明における硬質被覆層のう
ち、物理的蒸着法で形成した下層はサーメット母材と強
固に接合し、且つ化学的蒸着法で形成した上層は母材で
あるサーメットの結合相を構成するＦｅ、Ｃｏ、Ｎｉ、
Ｃｒ、Ｍｏ、Ｗなど金属成分を含まないので、硬度の低
下や異常な粒成長がない。そのため、本発明方法により
製造した被覆サーメット切削工具は、超高速の切削加工
にも十分耐え得る耐摩耗性を備え、且つ耐欠損性にも優
れている。Therefore, in the hard coating layer of the present invention, the lower layer formed by the physical vapor deposition method is firmly bonded to the cermet base material, and the upper layer formed by the chemical vapor deposition method is the bonding phase of the cermet base material. Fe, Co, Ni constituting
Since it does not contain metal components such as Cr, Mo and W, there is no decrease in hardness or abnormal grain growth. Therefore, the coated cermet cutting tool manufactured by the method of the present invention has wear resistance sufficient to withstand ultra-high-speed cutting and is also excellent in fracture resistance.
【００１０】本発明における硬質被覆層の膜厚につい
て、物理的蒸着法で形成する下層の膜厚が０.３μｍ未
満か又は化学的蒸着法で形成する上層の膜厚が０.５μ
ｍ未満の場合には共に十分な耐摩耗性が得られず、又下
層と上層の合計膜厚が１５μｍを越えると耐欠損性の低
下が大きくなる。Regarding the film thickness of the hard coating layer in the present invention, the film thickness of the lower layer formed by physical vapor deposition is less than 0.3 μm or the film thickness of the upper layer formed by chemical vapor deposition is 0.5 μm.
If it is less than m, sufficient abrasion resistance cannot be obtained, and if the total film thickness of the lower layer and the upper layer exceeds 15 μm, the fracture resistance is greatly reduced.
【００１１】又、一般に物理的蒸着法により形成した硬
質被覆層には、１.５〜２.０ＧＰａ程度の圧縮応力が残
留するとされている。そこで本発明では、上記のごとく
物理的蒸着法で形成した下層の上に化学的蒸着法で形成
した後、更にその上層の上に物理的蒸着法より最上層を
形成して硬質被覆層全体に圧縮残留応力を与えることに
より、耐欠損性の低下を抑制することが可能である。た
だし、最上層の膜厚が０.３μｍ未満ではその効果がな
く、５μｍを越えると硬質被覆層全体の総膜厚が厚くな
り過ぎ、逆に耐欠損性の低下が見られる。Further, it is generally said that a compressive stress of about 1.5 to 2.0 GPa remains in the hard coating layer formed by physical vapor deposition. Therefore, in the present invention, after the chemical vapor deposition method is formed on the lower layer formed by the physical vapor deposition method as described above, the uppermost layer is further formed by the physical vapor deposition method on the upper layer to form the entire hard coating layer. By giving the compressive residual stress, it is possible to suppress the decrease in fracture resistance. However, if the film thickness of the uppermost layer is less than 0.3 μm, that effect is not obtained, and if it exceeds 5 μm, the total film thickness of the entire hard coating layer becomes too thick, and conversely the fracture resistance is reduced.
【００１２】[0012]
【実施例】型番ＣＮＭＧ４３２ＥＮＧのチップ形状を有
するＩＳＯ Ｐ０１のサーメットからなる母材を用意
し、この母材表面に公知の物理的蒸着法により通常の条
件で表１に示す単層又は複層の下層を形成し、この下層
の上に公知の化学的蒸着法により通常の条件で表１に示
す単層又は複層の上層を形成した。更に、そのうち幾つ
かの試料については、上層の上に公知の物理的蒸着法に
より通常の条件で表１に示す単層又は複層の最上層を形
成した。尚、表１の下層、上層及び最上層が複層の場
合、すべて左側の層ほど母材寄りであることを示してい
る。EXAMPLE A base material made of a cermet of ISO P01 having a chip shape of the model number CNMG432ENG was prepared, and the surface of this base material was formed by a known physical vapor deposition method under the normal conditions under the single layer or multiple layers shown in Table 1. Was formed, and the upper layer of the single layer or the multiple layers shown in Table 1 was formed on this lower layer by a known chemical vapor deposition method under ordinary conditions. Furthermore, for some of the samples, the uppermost layer of the single layer or multiple layers shown in Table 1 was formed on the upper layer by a known physical vapor deposition method under normal conditions. In Table 1, when the lower layer, the upper layer and the uppermost layer are multiple layers, it is indicated that the leftmost layer is closer to the base material.
【００１３】[0013]
【表１】 下層と膜厚(μm) 上層と膜厚(μm) 最上層と膜厚(μm)試料 母材側→ →外側→ →最外側 1＊ なし なし なし 2＊ TiCN なし なし 3.0 3＊ TiCN TiC／Al2O3 なし 0.2 2.0 3.0 4＊ TiCN TiCN なし 0.3 0.4 5＊ TiC／TiCN TiBCN／Al2O3 なし 2.0 3.0 9.0 2.0 6＊ TiCN／TiN TiN／TiCN／Al2O3／TiN TiCN 2.0 3.0 2.0 5.0 2.5 0.5 0.2 7＊ TiN／TiAlN TiN／TiCN／Al2O3／TiN TiAlN 2.0 3.0 1.0 6.0 2.5 0.5 6.0 8 TiCN TiCN／TiC／TiBN／Al2O3 なし 3.0 2.0 3.0 0.5 2.5 9 TiCN TiCN／TiC／TiBN／Al2O3 TiAlN 3.0 2.0 3.0 0.5 2.5 3.0 10 TiAlN Al2O3 なし 0.3 0.5 11 HfC／HfCN／HfN HfN／HfCN／HfBCN／Al2O3／HfN なし 2.0 2.0 1.0 0.5 5.0 0.5 3.0 1.0 12 HfN HfN／HfC／HfCO／HfCNO／Al2O3 なし 5.0 1.0 5.0 1.0 0.5 1.0 13 TiCN／TiC TiC／TiCN／TiCNO／Al2O3 TiN／TiCN 2.0 3.0 3.0 5.0 1.5 0.5 0.1 0.2 14 ZrC／ZrCN／ZrN ZrN／ZrCN／ZrC／ZrCN／ZrN ZrN／ZrCN／ZrC 3.0 1.5 0.5 0.5 2.0 5.0 2.0 0.5 0.5 1.5 3.0 15 TiCN／TiCNO／TiN TiN／TiBCN TiCN／TiN 1.5 0.5 1.0 4.0 4.0 2.5 0.5 16 TiC／TiCO TiCO／TiC／TiCN TiCNO／TiCO／TiC 2.5 0.5 1.0 6.0 1.0 0.5 1.0 1.5 17 HfCN／HfCNO／HfN HfBN／Al2O3／HfN HfN／HfCNO／HfCN 2.0 0.5 0.5 0.5 4.0 3.5 0.5 0.5 2.0 18 HfC／HfCO HfCO／Al2O3／HfN HfN／HfC／HfCO 2.5 0.5 0.5 4.0 3.5 0.5 2.0 0.5 19 ZrC／ZrCO／ZrCNO ZrCNO／ZrCO ZrCO／ZrCNO 2.0 0.5 0.5 4.0 4.0 1.5 1.5 20 Al2O3 ZrN／ZrBN／ZrBCN Al2O3 3.0 4.0 1.0 3.0 3.0 21 TiAlNO Al2O3 TiAlNO 3.0 8.0 3.0 （注）＊を付した試料１〜７は比較例である（以下同じ）。[Table 1] Lower layer and film thickness (μm) Upper layer and film thickness (μm) Upper layer and film thickness (μm) Sample base material side → → Outer → → Outermost 1 * None None 2 * TiCN None None 3.0 3 * TiCN TiC / Al 2 O 3 None 0.2 2.0 3.0 4 * TiCN TiCN None 0.3 0.4 5 * TiC / TiCN TiBCN / Al 2 O 3 None 2.0 3.0 9.0 2.0 6 * TiCN / TiN TiN / TiCN / Al 2 O 3 / TiN TiCN 2.0 3.0 2.0 5.0 2.5 0.5 0.2 7 * TiN / TiAlN TiN / TiCN / Al 2 O 3 / TiN TiAlN 2.0 3.0 1.0 6.0 2.5 0.5 6.0 8 TiCN TiCN / TiC / TiBN / Al 2 O 3 None 3.0 2.0 3.0 0.5 2.5 9 TiCN TiCN / TiC / TiBN / Al 2 O 3 TiAlN 3.0 2.0 3.0 0.5 2.5 3.0 10 TiAlN Al 2 O 3 None 0.3 0.5 11 HfC / HfCN / HfN HfN / HfCN / HfBCN / Al 2 O 3 / HfN None 2.0 2.0 1.0 0.5 5.0 0.5 3.0 1.0 12 HfN HfN / HfC / HfCO / HfCNO / Al 2 O 3 None 5.0 1.0 5.0 1.0 0.5 1.0 13 TiCN / TiC TiC / TiCN / TiCNO / Al 2 O 3 TiN / TiCN 2.0 3.0 3.0 5.0 1.5 0.5 0.1 0.2 14 ZrC / ZrCN / ZrN ZrN / ZrCN / ZrC / ZrCN / ZrN ZrN / ZrCN / ZrC 3.0 1.5 0.5 0.5 2.0 5.0 2.0 0.5 0.5 1.5 3.0 15 TiCN / T iCNO / TiN TiN / TiBCN TiCN / TiN 1.5 0.5 1.0 4.0 4.0 2.5 0.5 16 TiC / TiCO TiCO / TiC / TiCN TiCNO / TiCO / TiC 2.5 0.5 1.0 6.0 1.0 0.5 1.0 1.5 17 HfCN / HfCNO / HfN HfBN / Al 2 O 3 / HfN HfN / HfCNO / HfCN 2.0 0.5 0.5 0.5 4.0 3.5 0.5 0.5 2.0 18 HfC / HfCO HfCO / Al 2 O 3 / HfN HfN / HfC / HfCO 2.5 0.5 0.5 4.0 3.5 0.5 2.0 0.5 19 ZrC / ZrCO / ZrCNO ZrCNO / ZrCO ZrCO / ZrCNO 2.0 0.5 0.5 4.0 4.0 1.5 1.5 20 Al 2 O 3 ZrN / ZrBN / ZrBCN Al 2 O 3 3.0 4.0 1.0 3.0 3.0 21 TiAlNO Al 2 O 3 TiAlNO 3.0 8.0 3.0 (Note) Samples 1 to 7 marked with * Is a comparative example (hereinafter the same).
【００１４】得られた被覆サーメット切削工具の各試料
を用いて、下記切削条件による切削試験を行って切削性
能をそれぞれ評価し、結果を表２に示した。耐摩耗性 被 削 材： Ｓ４５Ｃ 切削速度： ５００ｍ／ｍｉｎ． 送 り： ０.３ｍｍ／ｒｅｖ． 切 込 み： ０.５ｍｍ 切 削 油： 湿式 寿命判定： 逃げ面摩耗量０．２ｍｍとなるまでの時間
（分）耐欠損性 被 削 材： Ｓ４５Ｃ溝付き材（外周上等間隔に長手方
向の溝４本） 切削速度： ２００ｍ／ｍｉｎ． 送 り： ０.２ｍｍ／ｒｅｖ． 切 込 み： １.０ｍｍ 切 削 油： 湿式 評価判定： チッピング発生率Using each of the samples of the obtained coated cermet cutting tool, a cutting test was conducted under the following cutting conditions to evaluate the cutting performance, and the results are shown in Table 2. Wear resistance Work material: S45C Cutting speed: 500 m / min. Delivery: 0.3 mm / rev. Depth of cut: 0.5 mm Cutting oil: Wet life judgment: Time until flank wear amount reaches 0.2 mm (minutes) Defect resistance Work material: S45C grooved material (equal to the outer circumference in the longitudinal direction) 4 grooves) Cutting speed: 200 m / min. Delivery: 0.2 mm / rev. Depth of cut: 1.0 mm Cutting oil: Wet Evaluation judgment: Chipping occurrence rate
【００１５】[0015]
【表２】試料 耐摩耗性(分) 欠損率(％) 1＊ 5 30 2＊ 18 45 3＊ 16 45 4＊ 18 40 5＊ 40 90 6＊ 33 90 7＊ 48 90 8 30 55 9 35 40 10 28 40 11 40 70 12 35 60 13 35 70 14 45 70 15 30 38 16 33 38 17 38 43 18 39 43 19 35 40 20 40 43 21 42 45[Table 2] Sample wear resistance (min) Defect rate (%) 1 * 5 30 2 * 18 45 3 * 16 45 4 * 18 40 5 * 40 90 6 * 33 90 7 * 48 90 8 30 55 9 35 40 10 28 40 11 40 70 12 35 60 13 35 70 14 45 70 15 30 38 16 33 38 17 38 43 18 39 43 19 35 40 20 40 43 21 42 45
【００１６】表１及び表２の結果から、硬質被覆層のな
い試料１及び物理的蒸着法による下層のみを被覆した試
料２は共に超高速切削での耐摩耗性が極めて悪く、また
物理的蒸着法による下層と化学的蒸着法による上層で被
覆した試料でも、下層又は上層の膜厚が薄すぎる試料３
及び４では耐摩耗性に劣り、逆に膜厚が厚すぎる試料５
では耐欠損性に劣ることが解る。試料６及び７は下層と
上層の上に物理的蒸着法により最上層を設けてあるが、
その膜厚が厚すぎるので耐欠損性に劣る。From the results shown in Tables 1 and 2, both the sample 1 without the hard coating layer and the sample 2 coated with only the lower layer by the physical vapor deposition method have extremely poor wear resistance in ultra-high speed cutting and physical vapor deposition. Even if the sample is covered with the lower layer by chemical vapor deposition and the upper layer by chemical vapor deposition, the thickness of the lower or upper layer is too thin Sample 3
Sample Nos. 5 and 4 are inferior in wear resistance and the film thickness is too thick.
Then, it is understood that the fracture resistance is poor. In Samples 6 and 7, the uppermost layer was provided on the lower layer and the upper layer by physical vapor deposition,
Since the film thickness is too thick, the chipping resistance is poor.
【００１７】これに対して、本発明の試料８〜２１はい
ずれも耐摩耗性と耐欠損性の両方に優れていることが解
る。特に、物理的蒸着法による下層のみの試料２とその
上に化学的蒸着法による上層を設けた試料８を比較する
と、本発明によるこれら２層を積層したことによる効果
が明白である。又、試料８と９の比較、及び試料６、７
と試料１３、１４の比較から、物理的蒸着法により厚さ
０.３〜５μｍの最上層を設けることで、耐欠損性が更
に改善されることが解る。On the other hand, it is understood that the samples 8 to 21 of the present invention are excellent in both wear resistance and fracture resistance. In particular, comparing the sample 2 having only the lower layer formed by the physical vapor deposition method with the sample 8 having the upper layer formed by the chemical vapor deposition method thereon, the effect of stacking these two layers according to the present invention is clear. Also, a comparison of Samples 8 and 9 and Samples 6 and 7
From the comparison between Samples 13 and 14, it is understood that the fracture resistance is further improved by providing the uppermost layer having a thickness of 0.3 to 5 μm by the physical vapor deposition method.
【００１８】[0018]
【発明の効果】本発明によれば、サーメット母材への硬
質被覆層として、物理的蒸着法により下層を形成し、こ
の下層の上に化学的蒸着法により上層を積層することに
より、母材への密着強度に優れ且つ母材のサーメットか
ら結合相金属の拡散のない硬質被覆層が得られるので、
超高速の切削領域においても十分な耐摩耗性を有すると
同時に耐欠損性にも優れた被覆サーメット切削工具を提
供することが出来る。According to the present invention, as a hard coating layer on a cermet base material, a lower layer is formed by a physical vapor deposition method, and an upper layer is laminated on the lower layer by a chemical vapor deposition method to form a base material. Since a hard coating layer that has excellent adhesion strength to and does not diffuse the binder phase metal from the base material cermet,
It is possible to provide a coated cermet cutting tool which has sufficient wear resistance even in an ultra-high speed cutting region and at the same time has excellent fracture resistance.
【００１９】又、上記の上層の上に、更に物理的蒸着法
により最上層を設ければ、硬質被覆層に残留圧縮応力を
与えることができるので、前記下層と上層の膜厚が比較
的厚い場合であっても、耐欠損性の低下を有効に抑制す
ることが可能である。If the uppermost layer is further provided on the upper layer by a physical vapor deposition method, residual compressive stress can be applied to the hard coating layer, so that the lower layer and the upper layer are relatively thick. Even in this case, it is possible to effectively suppress the decrease in fracture resistance.
Claims (3)
被覆層を有する被覆サーメット切削工具の製造方法にお
いて；物理的蒸着法により母材の表面に直接Ｔｉ、Ｚ
ｒ、Ｈｆの炭化物、窒化物、炭窒化物、炭酸化物、炭酸
窒化物、及び酸化アルミニウム、窒化チタンアルミニウ
ム、酸窒化チタンアルミニウムの少なくとも１種から選
ばれた単層又は複層からなる膜厚が０.３μｍ以上の下
層を形成し、該下層の上に化学的蒸着法によりＴｉ、Ｚ
ｒ、Ｈｆの炭化物、窒化物、炭窒化物、炭酸化物、炭酸
窒化物、ホウ窒化物、ホウ炭窒化物、及び酸化アルミニ
ウムの少なくとも１種から選ばれた単層又は複層からな
る膜厚が０.５μｍ以上の上層を形成し、且つ下層と上
層の合計膜厚を１５μｍ以下とすることを特徴とする被
覆サーメット切削工具の製造方法。1. A method for producing a coated cermet cutting tool having a hard coating layer on the surface of a base material made of cermet; Ti, Z directly on the surface of the base material by a physical vapor deposition method.
The film thickness of a single layer or multiple layers selected from at least one of carbides, nitrides, carbonitrides, carbon oxides, carbonitrides of r and Hf, and aluminum oxide, titanium aluminum nitride, and titanium aluminum oxynitride. A lower layer having a thickness of 0.3 μm or more is formed, and Ti, Z is formed on the lower layer by a chemical vapor deposition method.
The film thickness of a single layer or multiple layers selected from at least one of carbides, nitrides, carbonitrides, carbon oxides, carbonitrides, boronitrides, and borocarbonitrides of r and Hf. A method for producing a coated cermet cutting tool, which comprises forming an upper layer having a thickness of 0.5 μm or more and making a total film thickness of the lower layer and the upper layer 15 μm or less.
母材であるサーメットの結合相を構成する金属成分を含
まないことを特徴とする、請求項１記載の被覆サーメッ
ト切削工具の製造方法。2. The upper layer provided by the chemical vapor deposition method,
The method for producing a coated cermet cutting tool according to claim 1, wherein a metal component constituting a binder phase of the base material cermet is not included.
メット切削工具の前記上層の上に、物理的蒸着法により
Ｔｉ、Ｚｒ、Ｈｆの炭化物、窒化物、炭窒化物、炭酸化
物、炭酸窒化物、及び酸化アルミニウム、窒化チタンア
ルミニウム、酸窒化チタンアルミニウムの少なくとも１
種から選ばれた単層又は複層からなる膜厚が０.３〜５
μｍの最上層を形成することを特徴とする被覆サーメッ
ト切削工具の製造方法。3. Ti, Zr, Hf carbides, nitrides, carbonitrides, carbonates, carbonitrides by physical vapor deposition on the upper layer of the coated cermet cutting tool produced by the method of claim 1. And at least one of aluminum oxide, titanium aluminum nitride, and titanium aluminum oxynitride.
The film thickness consisting of a single layer or multiple layers selected from seeds is 0.3 to 5
A method for manufacturing a coated cermet cutting tool, which comprises forming an uppermost layer of μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5668492A JPH05222551A (en) | 1992-02-07 | 1992-02-07 | Manufacture of coated cermet cutting tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5668492A JPH05222551A (en) | 1992-02-07 | 1992-02-07 | Manufacture of coated cermet cutting tool |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05222551A true JPH05222551A (en) | 1993-08-31 |
Family
ID=13034265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5668492A Pending JPH05222551A (en) | 1992-02-07 | 1992-02-07 | Manufacture of coated cermet cutting tool |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05222551A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1266980A2 (en) * | 2001-06-11 | 2002-12-18 | Mitsubishi Materials Corporation | Surface-coated carbide alloy tool |
| US7413591B2 (en) | 2002-12-24 | 2008-08-19 | Kyocera Corporation | Throw-away tip and cutting tool |
| JP6641610B1 (en) * | 2018-10-10 | 2020-02-05 | 住友電工ハードメタル株式会社 | Cutting tool and manufacturing method thereof |
| JP6641611B1 (en) * | 2018-10-10 | 2020-02-05 | 住友電工ハードメタル株式会社 | Cutting tool and manufacturing method thereof |
| WO2020075356A1 (en) * | 2018-10-10 | 2020-04-16 | 住友電工ハードメタル株式会社 | Cutting tool and manufacturing method therefor |
| WO2020075355A1 (en) * | 2018-10-10 | 2020-04-16 | 住友電工ハードメタル株式会社 | Cutting tool and manufacturing method therefor |
-
1992
- 1992-02-07 JP JP5668492A patent/JPH05222551A/en active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1266980A2 (en) * | 2001-06-11 | 2002-12-18 | Mitsubishi Materials Corporation | Surface-coated carbide alloy tool |
| EP1266980A3 (en) * | 2001-06-11 | 2003-03-12 | Mitsubishi Materials Corporation | Surface-coated carbide alloy tool |
| US6855405B2 (en) | 2001-06-11 | 2005-02-15 | Mitsubishi Materials Corporation | Surface-coated carbide alloy tool |
| CN100425391C (en) * | 2001-06-11 | 2008-10-15 | 三菱综合材料株式会社 | Tools coated with cemented carbides |
| US7413591B2 (en) | 2002-12-24 | 2008-08-19 | Kyocera Corporation | Throw-away tip and cutting tool |
| DE10361321B4 (en) * | 2002-12-24 | 2011-02-24 | Kyocera Corp. | Disposable tip and method of making same |
| JP6641610B1 (en) * | 2018-10-10 | 2020-02-05 | 住友電工ハードメタル株式会社 | Cutting tool and manufacturing method thereof |
| JP6641611B1 (en) * | 2018-10-10 | 2020-02-05 | 住友電工ハードメタル株式会社 | Cutting tool and manufacturing method thereof |
| WO2020075356A1 (en) * | 2018-10-10 | 2020-04-16 | 住友電工ハードメタル株式会社 | Cutting tool and manufacturing method therefor |
| WO2020075355A1 (en) * | 2018-10-10 | 2020-04-16 | 住友電工ハードメタル株式会社 | Cutting tool and manufacturing method therefor |
| EP3865234A4 (en) * | 2018-10-10 | 2022-08-17 | Sumitomo Electric Hardmetal Corp. | Cutting tool and manufacturing method therefor |
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