JPH05205220A - Manufacturing apparatus for magnetic head - Google Patents

Abstract

(57) [Abstract] [Purpose] In a manufacturing process of a thin film magnetic head, an apparatus for observing and evaluating the state after finishing the slider surface, and then performing a test evaluation of the magnetic characteristics is performed by polishing the slider surface and subsequent evaluation. The purpose is to be able to efficiently perform a series of operations such as, and to easily adjust and determine the mounting angle of the spring arm part, and to easily load / unload the disk. And [Structure] Lap abrasive grain region d1 on one disk d
The glass region d2, the magnetic film region d3, and the like are arranged concentrically. Further, a rolling direction adjuster 29 and a pitching direction adjuster 30 are interposed between a vertical adjustment stage 27 provided on a turntable 26 for adjusting the YAW angle and a head arm 28 for attaching a spring arm. The configuration. Furthermore, head side head arm 28h
However, the hinge means 31 is connected so that it bends in the direction of retracting from the disc surface.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION In a magnetic disk device, a magnetic head for recording / reproducing information on / from a magnetic disk is a thin film type instead of a conventional monolithic type. As the thin film magnetic head, there has been proposed an integrated thin film head in which a magnetic head element portion and a spring arm portion are integrally formed by a thin film technique.

The present invention relates to an apparatus for observing and evaluating the state of a sliding surface of a slider after finishing the sliding surface of the slider and then performing a test evaluation of the magnetic characteristic in the final step of manufacturing a thin film magnetic head.

[0003]

[Prior Art]

[Outline of Thin Film Magnetic Head Integrated with Spring Arm] FIGS. 6 to 9 are filed by the applicant of the present invention in Japanese Patent Application No. 3-137884.
FIG. 6 is a plan view and a side view showing the whole of the integrated thin film head. Reference numeral 1 denotes a spring arm portion, a magnetic head element portion 2 is formed at the tip of the spring arm portion, and a sliding surface 3 is formed so as to project at the tip of the magnetic head element portion 2.

FIG. 7 is a vertical sectional view of the integrated thin film head. The magnetic head element unit 2 includes a core 4 made of a magnetic material.
Further, the coil 5 is wound by the thin film technique, and the lead pattern 6 of the coil 5 is connected to the bonding pad 8 of the base (mounting portion) 7 of the spring arm portion 1.

As shown in FIG. 9, a magnetic pole 9 extending toward the magnetic disk D is connected to the tip of the core 4 and is covered with a protective film 21. On the other hand, the magnetic disk D
A rear end yoke 10 extending to the side is formed. A return yoke 11 is connected to the rear end yoke 10 in parallel with the core 4. Each of the above parts is manufactured by sequentially laminating as shown by the chain line by thin film technology.

This integral type thin film head has a sliding surface 3 at the tip.
, While being in contact with the magnetic disk D rotating in the direction of the arrow, when an information signal is applied to the coil 5, the magnetic pole 9
The magnetic flux 12 between the return yoke 11 and the return yoke 11
Permeation through the inside enables perpendicular magnetic recording.

FIG. 8A is a plan view showing a state in which this integral type thin film head is mounted on a magnetic disk device. The root 7 of the integral type thin film head H is fixed to a mounting arm 13, and the mounting arm 13 is a positioner. It is fixed at 14. Same figure
(b) is an enlarged side view showing a mounting portion of the integrated thin-film head, in which the sliding surface 3 at the tip of the integrated thin-film head H is in pressure contact with the magnetic disk D.
Is mounted so that it flexes somewhat.

[Conventional Magnetic Head Evaluation Method] When the integrated thin film head is completed, the surface of the slider portion s shown in FIG.
It is necessary to grind 3a to expose the magnetic pole 9, evaluate the contact state between the sliding surface 3 and the magnetic disk surface, and measure / evaluate the magnetic characteristics by recording / reproducing information on / from a magnetic recording medium. There is.

FIG. 10 is a diagram showing a conventional magnetic head evaluation apparatus. A lapping disk D1 is attached to a spindle 22 driven by a motor M, but it can be removed and replaced with a glass disk D2 or a magnetic disk D3. 23 is a carriage and its head arm 24
The spring arm 1 is attached via.

In this apparatus, the slider s at the tip end is sought on the lapping disc D1 to bring the sliding surface 3 of FIG. 9 into pressure contact with the lapping sheet surface of the lapping disc D1. Lap until surface is exposed.

Then, the lapping disk D1 is removed, the glass disk D2 is attached to the spindle 22 and rotated, the sliding surface 3 is pressed against the glass disk D2, and the interference fringes on the sliding surface 3 are applied from the opposite side of the glass disk D2. By observing, the finished state of the sliding surface 3 and the contact state of the magnetic pole 9 with the magnetic disk surface are observed and evaluated.

When the sliding surface 3 is lap-polished with the lapping disk D1 to expose the magnetic pole 9, it is impossible to lap the sliding surface 3 completely flat, and as shown by the chain line 3, the outside is Excessive lapping results in an arc shape.
Therefore, it is necessary to evaluate the finished state of the sliding surface 3 for each magnetic head, and the mounting angle of the spring arm portion 1 is adjusted depending on whether the exposed magnetic pole 9 tip surely contacts the magnetic disk surface. While doing so, the interference fringes are used for evaluation, and the mounting angle of the spring arm is determined.

As a result, when the sliding surface 3 is poorly polished or the tip of the magnetic pole 9 does not contact the surface of the glass disk D2, the glass disk D2 is removed, the lapping disk D1 is attached again, and sliding is performed. After lapping the surface 3 again, the glass disk D2 is exchanged again for evaluation.

If the glass disc D2 is evaluated to be non-defective, the glass disc D2 is removed,
The test magnetic disk D3 is attached to the spindle 22, and information is actually recorded / reproduced to measure and evaluate the magnetic characteristics and error occurrence status. This is not limited to the integrated thin-film head, but is almost the same in the conventional thin-film magnetic head.

[0015]

However, in the apparatus as shown in FIG. 10, since the disk has to be replaced in each step, the evaluation of the glass disk D2 in particular shows that the sliding surface wrap by the lapping disk D1 is performed again. There is a risk of damaging the magnetic head when processing, and the workability is poor, and it is not suitable for mass production.

Further, in the apparatus as shown in the figure, it is difficult to adjust or determine the mounting angle of the spring arm portion 1 so that the magnetic pole 9 surely comes into contact with the magnetic disk surface. Lacks.

Moreover, like an integrated thin film head,
As the slider section becomes thinner, it becomes difficult to load / unload the magnetic head under test on the disk. That is, as shown in FIG. 11, the slider s of the magnetic head is
Is the spring force of the spring arm unit 1 and
Since it is pressed against D2, the spring arm portion 1 is bent by the spring force when the magnetic head is located outside the glass disk D2 as shown in FIG.

Therefore, the magnetic head is a glass disk.
Before seeking onto D2, the load / unload bar 25 was moved forward, the tip of the spring arm portion 1 was straightened against the spring force, and the carriage 23 was sought on the glass disk D2. Later, the load / unload bar 25 needs to be retracted from the glass disc D2.

However, as shown in FIG. 3C, the spring arm is used when the slider s is thinned or the amount of protrusion of the sliding surface 3 is small as in the integrated thin film head due to the progress of thin film technology. It becomes impossible to insert the load / unload bar 25 into the gap h between the part 1 and the disk such as the glass disk D2.

The technical problem of the present invention is to pay attention to such a problem and efficiently carry out a series of operations such as polishing finish of the sliding surface of the magnetic head and subsequent evaluation.
In addition, the attachment angle of the spring arm can be easily adjusted or determined during evaluation work, etc.
Moreover, it is to make it easy to load / unload the disk.

[0021]

1A and 1B are views for explaining the basic principle of a magnetic head manufacturing apparatus according to the present invention. FIG. 1A is a front view, FIG. 1B is a plan view of a disc, and FIG. It is a right side view of the angle adjusting device of a moving surface. According to the invention of claim 1, the area d1 of the lap abrasive grains and the area d of the glass are formed on one disk d.
2. A magnetic head manufacturing apparatus in which at least two regions, such as the region d3 of the magnetic film, are concentrically arranged.

According to a second aspect of the present invention, a rolling direction adjuster 29 and a pitching device are provided between a vertical adjustment stage 27 provided on a turntable 26 for adjusting the YAW angle and a head arm 28 for attaching a spring arm. It is a magnetic head manufacturing apparatus in which a direction adjuster 30 is interposed.

According to the third aspect of the present invention, the head arm 28 includes a carriage-side head arm 28c and a head-side head arm 28.
The head arm 28 is divided into two parts, h and h.
Is connected by a hinge means 31 so that the head side head arm 28h is bent in the direction of retracting from the disc surface.

Then, the above-mentioned carriage-side head arm
A stopper for positioning at the tip of 28c to prevent the head side head arm 28h from excessively moving toward the disc side.
32 are fixed. The head-side head arm 28h is disposed above and below the head-side head arm 28h.
A pair of loading / unloading means 33 that moves up and down with the pinch in between.
Have 34.

[0025]

According to the present invention, at least two regions among the lapping abrasive grain region d1, the glass region d2 and the magnetic film region d3 are concentrically arranged on one disc d. Therefore, on one disk d, the sliding surface is lap-polished in the area d1 of the lap abrasive grains, and then the seek is made in the area d2 of the glass to observe and evaluate the finished state of the sliding surface. Alternatively, subsequently, the magnetic characteristics and the like can be measured and evaluated in the region d3 of the magnetic film.

Therefore, at least two operations can be continuously performed on the single disk d, and it is not necessary to replace the disk as in the conventional case, so that the work efficiency is improved. Further, since it is not necessary to unload the magnetic head to the outside of the disk d, each work can be performed with the slider s kept in the same posture, and reliability such as observation and measurement evaluation is improved.

As described in claim 2, between the vertical adjustment stage 27 provided on the turntable 26 for adjusting the YAW angle, and the head arm 28 for attaching the spring arm, the rolling direction adjuster 29 and the pitching are provided. With the device with the interposer 30 intervening, the head arm 28
Position of the sliding surface of the magnetic head mounted on the
In addition to the AW angle, you can also adjust the rolling and pitching directions.

Therefore, all the directions required for the attitude of the sliding surface of the slider of the magnetic head can be adjusted by a single device, and other operations and evaluations can be performed continuously with the adjusted values held. The workability is further improved.

In the apparatus of claim 3, the magnetic head is sought on the disk d by the unloading means while the head side head arm 28h is bent in the direction away from the disk d, and then the loading means 34 is used. Since it can be loaded on the disk d,
It is not necessary for the load / unload means 33, 34 to enter between the disc d and the spring arm 1.

Therefore, even a magnetic head having a small amount of protrusion of the sliding surface 3 such as a magnetic head having a thin slider or the above-mentioned integral type thin film head can be reliably loaded / unloaded onto the disk d. Further, since the positioning stopper 32 is fixedly provided at the tip of the carriage-side head arm 28c, the contact pressure between the slider s and the disk d can be set accurately.

[0031]

EXAMPLES Next, examples of practical use of the magnetic head manufacturing apparatus according to the present invention will be described. FIG. 2 is a perspective view showing an embodiment of the invention of claim 1. In this embodiment, a lapping abrasive grain region d1, a glass region d2, and a magnetic film region d3 are arranged from the outer peripheral side on one glass disk gd.
Are arranged concentrically in this order.

Therefore, the glass disk gd is rotated, the magnetic head is sought by the carriage to the outermost lap abrasive grain region d1, and the sliding surface of the magnetic head is lap-polished. The region d2 is sought and the striped pattern is observed from the back side to evaluate the shape of the sliding surface 3 and the contact state between the tip of the magnetic pole and the region d2 of glass.

As a result, if the result is normal, it is moved to the next region d3 of the magnetic film, information is recorded / reproduced on / from the magnetic film, and electromagnetic conversion characteristics and error characteristics are tested. If abnormal,
After moving to the region d1 of the lapping abrasive grains again and lapping again, the glass region d2 is re-evaluated, and only in the normal case, the test in the region d3 of the magnetic film is performed.

In the case of the illustrated example, there are two sets of the lapping abrasive grain region d1, the glass region d2, and the magnetic film region d3. Therefore, when each region on the outer peripheral side is worn and deteriorated, the inner peripheral side Using the lap abrasive grain region d1, the glass region d2, and the magnetic film region d3, the lapping, the sliding surface evaluation, and the magnetic characteristic test can be repeated again. Further, although there are two sets in the illustrated example, if the width of each region is narrowed or a large-diameter disk is used, it will be three.
It is possible to have more than one group, and conversely only one group is required.

As described above, if the three regions of the lapping abrasive grain region d1, the glass region d2, and the magnetic film region d3 are provided, all the work can be performed by one disc gd. A disk provided with only two types of areas is also effective. For example, when the glass disk gd is used, it is a disk having only a glass region d2 and a lap abrasive grain region d1. Alternatively, it is a disk having only a glass region d2 and a magnetic film region d3.

The area d1 of the lapping abrasive grains and the area of the magnetic film
Although it may be d3 only, in this case, since there is no glass region d2, it is not always necessary to use a glass disc, and the aluminum disc is provided with a lapping abrasive grain region d1 and a magnetic film region d3. Things are enough.

FIG. 3 is an exploded perspective view showing an embodiment of the invention of claim 2. The spring arm 1 supporting the magnetic head slider s is fixed to the head arm 28 via a base 33 having a large rigidity, and the head arm 28 is attached via a mounting block 34 to the rolling direction adjuster 29 of the attitude adjusting device. Is attached to the movable part 29a.

The base side of the rolling direction adjuster 29
29b is attached to the movable portion 30a of the pitching direction adjuster 30 via the attachment block 35. The base side 30b of the pitching direction adjuster 30 is attached to the mounting block.
It is attached to the movable portion 27 a of the vertical adjustment stage 27 via 36. The base side 27b of the vertical adjustment stage 27 is mounted on the turntable 26 for adjusting the YAW angle.

In this device, the turntable 26 on the base 37
By rotating the, the entire attitude adjusting device rotates in a horizontal plane, and the YAW angle of the slider s with respect to the disk d can be adjusted. Also, by rotating the handle 38 to move the movable part 27a of the vertical adjustment stage 27 up and down, the entire magnetic head is moved up and down together with the rolling direction adjuster 29 and the pitching direction adjuster 30, The vertical position of the slider s with respect to the plate surface can be adjusted.

Further, the knob 39 is rotated to rotate the movable portion 30a of the pitching direction adjuster 30 together with the rolling direction adjuster 29 in the longitudinal direction of the spring arm 1 about the slider s. Thus, the pitching direction of the slider s can be adjusted. Then, rotate the knob 40 to move the movable part of the rolling direction adjuster 29.
By rotating 29a around the longitudinal axis of the spring arm 1 about the slider s, the slider s can be adjusted in the rolling direction.

Each adjusting mechanism directly connects the handle 38 and the knobs 39 and 40 to the worm supported on the base side,
A worm gear that meshes with the worm is provided on the movable side 27a, 30
It can be realized by providing the a and 29a. Further, the base side 29b of the rolling direction adjuster 29 is attached to the movable portion 27a of the vertical adjustment stage 27, the base side 30b of the pitching direction adjuster 30 is attached to the movable portion 29a, and the movable side 30a thereof is attached.
You can also attach a magnetic head to.

FIG. 4 shows a conventional thin film type magnetic head assembly, (a) is a plan view, (b) is a front view, and (c) is a right side view. The slider s of the thin film magnetic head is a gimbal
It is attached to the spring arm 1 via 41, and the spring arm 1 is fixed to a rigid base 33. The magnetic head is attached to the carriage or the head arm 28 of the attitude adjusting device of FIG. 3 using the base 33.

In such a magnetic head assembly, the rolling of the magnetic head is a rotating operation in the direction shown by an arrow θ1, and the pitching is a rotating operation in the direction shown by an arrow θ2. The arrow Z direction is the vertical direction, which is the vertical position of the slider s with respect to the magnetic disk surface.

According to the attitude adjusting device of the present invention, the attitude of the magnetic head mounted on the head arm 28 can be adjusted in all directions as described above. You can set the surface in any posture.

Therefore, while the magnetic head seeks the area d2 of the glass in the embodiment of FIG. 2, the magnetic head is adjusted by adjusting the attitude adjusting device while observing the striped pattern from the back surface of the glass disk. It can be adjusted so as to have a desired posture with respect to the disk surface, or the tip of the magnetic pole 9 at the tip of the sliding surface 3 in FIG. 9 can be surely brought into contact with the magnetic disk surface.

Since the adjustment value at that time can be read by the scale of each movable part of the posture adjusting device, the optimum posture can be obtained by attaching the magnetic head to the carriage of the magnetic disk device in a posture according to the scale value. It becomes possible to attach to the magnetic disk device.

As shown in FIG.
Not limited to a disc having a plurality of work areas d1, d2, d3 on one disc, the discs D1, D2, D3 are replaced for each work as shown in FIG. 10, and the lapping and lapping results are evaluated. It can also be applied when conducting a magnetic property test.

FIG. 5 is a side view showing an embodiment of the invention of claim 3. The head arm 28 is divided into a carriage-side head arm 28c and a head-side head arm 28h, and a hinge 31 is connected between the carriage-side head arm 28c and the head-side head arm 28h.

That is, as shown by the solid line, the head side head arm 28h is connected so as to be bent in the direction of retracting from the disc d. On the side opposite to the hinge 31, a stopper 32 extending above the head arm 28h on the head side is provided.
Is fixed to the carriage-side head arm 28c.

Therefore, the head arm 28h on the head side
However, when the head side head arm 28h hits the stopper 32 and stops when approaching to the disk d side as shown by the broken line from the state of retracting from the disk d as shown by the solid line. This prevents the head-side head arm 28h from excessively moving to the side of the disk d, and the relative position between the magnetic head and the disk surface can be set, enabling highly accurate positioning.

On the upper and lower sides of the head-side head arm 28h, a pair of loading / unloading means which moves up and down with the head-side head arm 28h interposed is provided. That is, the unload bar 33 is arranged on the upper side of the head side head arm 28h, and the load bar 34 is arranged on the lower side. Both are connected so that they can move up and down as a unit.

Now, in the state shown by the broken line, load /
When the unload bars 33, 34 are lowered together, the unload bar 33 pushes down the head side head arm 28h, the head side head arm 28h bends from the hinge 31 as shown by the solid line, and retracts from the disc d. To do.

On the contrary, in the state shown by the solid line, load /
When the unload bars 33, 34 are raised, the load side bar 34 pushes up the head side head arm 28h,
It stops at the position where it abuts the stopper 32 as shown by the broken line. Moreover, the head side head arm 28h is a load bar.
Since it is constantly pressed to the stopper 32 side by 34,
A constant state is always maintained between the sliding surface of the magnetic head and the disk surface.

In this way, the head-side head arm 28h is retracted in the direction perpendicular to the disk d by the load / unload bars 33, 34 provided outside the disk d, as shown in FIG. Unlike the structure in which the load / unload bar 25 is inserted between the tip of the spring arm and the disc,
Even if the slider portion of the magnetic head is miniaturized, it can be reliably loaded / unloaded.

The loading / unloading mechanism can be used not only for manufacturing and testing a magnetic head but also for testing a single plate after a magnetic disk is completed.

[0056]

As described above, according to the invention of claim 1, at least two of the lapping abrasive grain region d1, the glass region d2 and the magnetic film region d3 are formed on one disk d. Since the areas are concentrically formed, the lapping of the sliding surface of the magnetic head, the observation / evaluation of the sliding surface condition, the magnetic characteristic test, the recording / reproducing test, etc. can be performed continuously on the same disk. Since it is possible to perform the measurement, and it is not necessary to replace the disc as in the conventional case, the work efficiency is improved, and each measurement / evaluation can be performed under the same condition, and the reliability is improved.

According to a second aspect of the invention, the attitude adjusting device for the magnetic head comprises a head arm for attaching a vertical adjusting stage 27 provided on a turntable 26 for adjusting the YAW angle and a spring arm of the magnetic head. Since the rolling direction adjuster 29 and the pitching direction adjuster 30 are interposed between the device 28 and 28, the vertical direction position of the magnetic head sliding surface and the YAW angle as well as the rolling direction and The pitching direction can also be adjusted, workability is improved, and each direction can be adjusted accurately.

The apparatus of claim 3 is a head arm on the head side.
28h is foldably supported on the carriage-side head arm 28c, and the magnetic head retreats or approaches in the vertical direction from the disk surface. Since it is not necessary to insert a load / unload bar into the disk, even if the slider portion is a thin magnetic head, it can be easily and surely loaded / unloaded onto the disk.

[Brief description of drawings]

FIG. 1 is a diagram illustrating a basic principle of a magnetic head manufacturing apparatus according to the present invention.

FIG. 2 is a perspective view showing an embodiment of the invention of claim 1;

FIG. 3 is an exploded perspective view showing an embodiment of the invention of claim 2;

4A and 4B are views showing the adjustment direction of the magnetic head, in which FIG. 4A is a plan view, FIG. 4B is a front view, and FIG. 4C is a right side view.

FIG. 5 is a side view showing an embodiment of the invention of claim 3;

6A and 6B are a plan view and a side view showing the whole of the integrated thin film head.

FIG. 7 is a vertical sectional view of an integrated thin film head.

8A is a plan view of the integrated thin film head mounted on a magnetic disk device, and FIG. 8B is an enlarged side view of a mounting portion of the integrated thin film head.

FIG. 9 is a cross-sectional view showing a completed state of a magnetic head element portion in the integrated thin film head.

FIG. 10 is a diagram showing a conventional magnetic head evaluation apparatus.

FIG. 11 is a side view showing a conventional load / unload device for a magnetic head to be evaluated.

[Explanation of symbols]

 H magnetic head 1 spring arm (part) 2 magnetic head element part s slider (part) 3 sliding surface 3a slider surface before lap polishing D magnetic disk 4 core 5 coil 7 root of spring arm 9 magnetic pole 21 protective film 22 spindle M Spindle motor 23 Carriage 24 Head arm D1 Wrapping disc D2 Glass disc D3 Magnetic disc 25 Load / unload bar 26 Rotating disc 27 Vertical adjustment stage 28 Head arm 28c Carriage side head arm 28h Head side head arm 29 Rolling direction adjuster 30 Pitching direction adjuster 31 Hinge mechanism 32 Stopper 33 Unload bar 34 Load bar d Disk gd Glass disk d1 Wrap abrasive area d2 Glass area d3 Magnetic film area

Claims (3)

[Claims] 1. At least two regions, such as a lapping abrasive grain region (d1), a glass region (d2), and a magnetic film region (d3), are concentric circles on one disk (d). An apparatus for manufacturing a magnetic head, characterized in that the magnetic heads are arranged in a pattern. 2. A rolling direction adjuster (29) between a vertical adjustment stage (27) provided on a turntable (26) for adjusting the YAW angle and a head arm (28) for attaching a spring arm. ) And a pitching direction adjuster (30) are interposed therebetween, a magnetic head manufacturing apparatus. 3. The head arm (28) is divided into a carriage-side head arm (28c) and a head-side head arm (28h), and the divided head arm (28) is divided into a head-side head arm (28h). Is connected by hinge means (31) so that it bends in the direction of retracting from the disc surface, the head side head arm (28h) is attached to the disc (d) side at the tip of the carriage side head arm (28c). The positioning stoppers (32) that prevent excessive movement are fixed, and are arranged above and below the head side head arm (28h).
A magnetic head manufacturing apparatus comprising a pair of load / unload means (33, 34) which move up and down with the head side head arm (28h) sandwiched therebetween.