JPH05203450A - Gyroscope apparatus - Google Patents

Abstract

PURPOSE:To detect a displacement of a conducting mass part especially when an angular velocity or an acceleration is inputted as change in capacitance concerning the gyroscope apparatus. CONSTITUTION:This gyroscope apparatus is made up of a first conducting plate having a first insulation layer 3 and a recess part 2 on one surface 1a thereof and a second conducting plate 5 which is junctioned on the first conducting plate 1 and has a conducting mass part 6 held free to vibrate through a suspension 4.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gyro device,
In particular, the present invention relates to a novel improvement for detecting a displacement of a conductive mass portion at the time of inputting an angular velocity or acceleration as a change in capacitance to obtain a microminiature gyro device.

[0002]

2. Description of the Related Art As a gyro device of this type which has been conventionally used, for example, there is a mechanical structure disclosed in Japanese Utility Model Laid-Open No. 1-61611.

[0003]

Since the conventional gyro device is configured as described above, there are the following problems. That is, in the case of the conventional gyro device, since the displacement of the rotating body when the angular velocity input is applied to the rotating body rotated by the motor is electrically detected by the torquer coil, the configuration becomes extremely complicated and the cost is reduced. It was impossible to achieve down and mass-produce as an inexpensive product.

The present invention has been made to solve the above problems, and in particular, a displacement of a conductive mass portion at the time of inputting an angular velocity or acceleration is detected as a change in capacitance, and a microminiature gyro device is provided. The purpose is to provide.

[0005]

In a gyro device according to the present invention, a first conductive plate having a first insulating layer and a recess on one surface, and a gyro device joined to the first conductive plate and oscillatably held via a suspension. The second conductive plate has a conductive mass portion, and the first conductive plate and the conductive mass portion form a variable capacitor.

[0006]

In the gyro device according to the present invention, when an angular velocity input is generated from the outside while the whole device is vibrated, the known Coriolis force causes the conductive mass portion to be orthogonal to the surface direction. Since it is displaced in the direction and vibrates, the magnitude of the input angular velocity can be detected by detecting the displacement of the interval with the first conductive plate due to this displacement as the change of the capacitance. Further, the input of acceleration can be detected as a change in capacitance according to the same principle as described above.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of the gyro device according to the present invention will be described in detail below with reference to the drawings. 1 to 3
1 shows a gyro device according to the present invention, FIG. 1 is a perspective view of a main part, FIG. 2 is an exploded sectional view showing the entire structure, and FIG.
FIG. 4 is a plan view of a main part.

In the figure, the reference numeral 1 indicates a first part formed entirely by etching using silicon.
This is a conductive plate, and a recess 2 is formed in the center of one surface 1a of the first conductive plate 1. A frame-shaped first insulating layer 3 is formed around the recess 2.

A second conductive plate 5 having a suspension 4 formed of an insulating film such as silicon oxide is bonded to one surface 1a of the first conductive plate 1, and a central portion of the suspension 4 is provided. A conductive mass portion 6 made of a conductor such as copper is provided corresponding to the concave portion 2.
Therefore, the surface 6a of the conductive mass portion 6 is kept in a non-contact state with the bottom surface 2a of the concave portion 2, and the conductive mass portion 6 is maintained.
Are oscillated in the recess 2.

The recess 2 is formed in the center of the second conductive plate 5.
Is formed so that the suspension 4 can vibrate, and the extension 4a of the suspension 4 constitutes the second insulating layer of the second conductive plate 5, and the second conductive layer 5 The third insulating layer 8 is also formed on the back surface of the plate 5.

The third insulating layer 8 is provided with a lid 11 having fourth and fifth insulating layers 9 and 10 bonded thereto.
A first lead 12 is provided on the first conductive plate 1, and a second lead 13 is formed on the conductive mass portion 6. Through the leads 12 and 13, the first lead 12 is formed. 1 is configured to output the capacitance of the variable capacitor 14 formed by using air as a dielectric between the conductive plate 1 and the conductive mass portion 6.

Therefore, in the above-described structure, the gyro device 20 shown in FIG. 1 is vibrated in the direction indicated by the arrow A by an external vibrating means (not shown) such as a piezoelectric vibrator. When the input angular velocity ω is applied in the direction of arrow B from the conductive mass portion 6 by the well-known Coriolis force.
However, since it is displaced while vibrating in a direction orthogonal to the surface direction C, the capacitance of the variable capacitor 14 changes,
The magnitude of the input angular velocity can be detected by detecting this change.

Further, in the state of FIG. 1, when an acceleration is applied from the outside in the direction of arrow D, the capacitance of the variable capacitor 14 changes, and the magnitude of the acceleration can be detected as described above.

[0014]

Since the gyro device according to the present invention is constructed as described above, the following effects can be obtained.
That is, for a plurality of conductive plates obtained by etching a silicon plate or the like, a gyro can be formed only by forming an insulating layer and a conductive mass part, so that the entire structure is simple and inexpensive, It can be miniaturized and mass-produced.

[Brief description of drawings]

FIG. 1 is a perspective view of a main part of a gyro device according to the present invention.

FIG. 2 is an exploded sectional view showing the overall configuration.

FIG. 3 is a plan view of a main part.

[Explanation of Codes] 1 First conductive plate 1a One surface 2 Recessed portion 3 First insulating layer 4 Suspension 5 Second conductive plate 6 Conductive mass portion 14 Variable capacitor

Claims (1)

[Claims] 1. A first conductive plate (1) having a first insulating layer (3) and a recess (2) on one surface (1a) and a suspension (4) joined to the first conductive plate (1). A variable capacitor (14) comprising a second conductive plate (5) having a conductive mass part (6) oscillatably held by the first conductive plate (1) and the conductive mass part (6). A gyro device comprising: